CN113219438A - High-precision MEMS laser radar transmitting device and method - Google Patents
High-precision MEMS laser radar transmitting device and method Download PDFInfo
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- CN113219438A CN113219438A CN202010068809.3A CN202010068809A CN113219438A CN 113219438 A CN113219438 A CN 113219438A CN 202010068809 A CN202010068809 A CN 202010068809A CN 113219438 A CN113219438 A CN 113219438A
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- G01—MEASURING; TESTING
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- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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Abstract
The invention discloses a high-precision MEMS laser radar transmitting device and a method, comprising a laser transmitting module, a laser receiving module and a control module, wherein the laser transmitting module comprises a laser and a collimating lens, and the collimating lens is used for collimating laser beams transmitted by the laser; a scanning module including a Micro Electro Mechanical System (MEMS) micro galvanometer for reflecting the laser beam from the collimating lens to the non-uniform beam angle expanding module; a non-uniform beam angle expansion module for converting a beam from a Micro Electro Mechanical System (MEMS) micro galvanometer into a beam with a non-uniform distribution of scan angle intervals. The technical scheme of the invention realizes high-precision detection of the laser radar and improves the utilization rate of laser light energy.
Description
Technical Field
The invention belongs to the field of laser radar detection, and particularly relates to a high-precision MEMS laser radar transmitting device and method.
Background
A laser radar (LIDAR) measures information of a position, a velocity, and the like of a target object by emitting a laser beam to the target object and receiving a beam reflected from the target object. Among them, micro-electro-mechanical systems (MEMS) lidar, which is a typical representative of solid-state lidar, is widely researched and applied in the industry.
The beam that comes out by MEMS scanning field angle is little, the scanning point is fixed, scanning angle interval is fixed, generally can't satisfy the field angle demand that is used for intelligent driving laser radar, consequently need add the optics and expand the beam structure to satisfy the demand of on-vehicle laser radar field angle. However, existing intra-industry optical beam expansion schemes focus on uniform angle expansion schemes and cannot meet the requirement of using different scanning angle intervals for different regions in a field of view.
Disclosure of Invention
The invention aims to solve the technical problem of carrying out non-uniform angle beam expansion on a scanning beam of an MEMS laser radar.
According to a first aspect of the present invention, there is provided a high-precision MEMS lidar transmission apparatus comprising:
the laser emitting module comprises a laser and a collimating lens, wherein the collimating lens is used for collimating a laser beam emitted by the laser;
a scanning module including a Micro Electro Mechanical System (MEMS) micro galvanometer for reflecting the laser beam from the collimating lens to a non-uniform beam angle expanding module;
the non-uniform beam angle expansion module is used for converting the beams from the Micro Electro Mechanical System (MEMS) micro galvanometer into beams with non-uniform distribution of scanning angle intervals.
Optionally, the scan angle interval of the non-uniformly distributed beams increases from a central region of the field of view to an edge region of the field of view.
Optionally, the non-uniform beam angle expansion module comprises at least two lenses, wherein a part of the at least two lenses focuses the beam from the MEMS micro-galvanometer to the focal plane position of the remaining part of the at least two lenses, and the radius of curvature of each of the at least two lenses is matched in the radial direction for converting the beam from the MEMS micro-galvanometer into a beam with a non-uniform distribution of scanning angle intervals.
Optionally, the radius of curvature of each of the at least two lenses is gradually decreased from the center to the edge, and the scanning angle intervals of the light beams which are non-uniformly distributed in the scanning angle intervals are gradually increased from the central region of the field of view to the edge region of the field of view after matching.
Optionally, the non-uniform beam angle expansion module comprises a single lens comprising a front surface and a back surface, wherein the front surface of the lens is configured to focus the beam from the MEMS micro-galvanometer to a focal plane location of the back surface of the lens; the curvature radiuses of the front surface and the rear surface of the lens are matched in the radial direction, and the lens is used for converting the light beams from the MEMS micro-galvanometer into light beams which are distributed unevenly at scanning angle intervals.
Optionally, the radius of curvature of the front and back surfaces of the single lens gradually decreases from the center to the edge, and after matching, the scanning angle interval of the light beams with the non-uniform distribution of the scanning angle interval gradually increases from the central region of the field of view to the edge region of the field of view.
Optionally, the non-uniform beam angle enlarging module comprises a plurality of lens groups, each lens group being respectively used for enlarging the scanning angle of the beam within the corresponding field of view range from the MEMS micro-galvanometer, wherein each lens group in the plurality of lens groups comprises at least two lenses, and a part of the at least two lenses focus the beam from the MEMS micro-galvanometer to the focal plane position of the rest of the at least two lenses; there are at least two different beam angle magnifications in the plurality of lens groups.
Optionally, each lens group of the plurality of lens groups has a fixed beam angle magnification, each lens group of the plurality of lens groups being respectively disposed in the field of view region, wherein the beam angle magnification of the lens group disposed in the center region of the field of view is smaller than the beam angle magnification of the lens group disposed in the edge region of the field of view, such that the scanning angle interval of the beams of the non-uniform distribution of the scanning angle interval increases stepwise from the center region of the field of view to the edge region of the field of view.
Optionally, each lens group of the plurality of lens groups comprises a variable focus lens having an adjustable beam angle magnification.
Optionally, the variable focus lens is a liquid crystal lens or an electrowetting lens.
Optionally, the non-uniform beam angle expansion module comprises a plurality of lenses, each lens being respectively used for expanding the scanning angle of the beam within the corresponding field of view range of the MEMS micro-galvanometer, wherein each lens comprises a front surface and a back surface, wherein the front surface of the lens is used for focusing the beam from the MEMS micro-galvanometer to the focal plane position of the back surface of the lens; there are at least two different beam angle magnifications in the plurality of lenses.
Optionally, each of the plurality of lenses has a fixed beam angle magnification, and each of the plurality of lenses is respectively disposed in the field of view, wherein the beam angle magnification of the lens disposed in the central region of the field of view is smaller than the beam angle magnification of the lens disposed in the edge region of the field of view, such that the scan angle interval of the beam of light whose scan angle interval is non-uniformly distributed increases in stages from the central region of the field of view to the edge region of the field of view.
Optionally, the non-uniform beam angle expansion module includes at least two radial multifocal nano gratings disposed oppositely, wherein a part of the at least two radial multifocal nano gratings is used to focus the beam from the MEMS micro galvanometer to a focal plane position of the remaining part of the at least two radial multifocal nano gratings, and a focal length of each of the at least two radial multifocal nano gratings is matched in a radial direction, so as to convert the beam from the MEMS micro galvanometer into a beam with a non-uniform scanning angle interval.
Optionally, each of the at least two radial multifocal nano-gratings includes a plurality of nano-sub-gratings, focal lengths of which are different from each other and are configured to increase along the radial focal length, wherein a beam angle magnification of the nano-sub-grating disposed at a central region of the field of view is smaller than a beam angle magnification of the nano-sub-grating disposed at an edge region of the field of view, so that a scanning angle interval of the beams whose angle interval is non-uniformly distributed is segmented or gradually increased from the central region of the field of view to the edge region of the field of view.
According to a second aspect of the present invention, there is provided a lidar system comprising a high-precision MEMS lidar transmitting apparatus as described above.
According to a third aspect of the invention, there is provided an autonomous vehicle comprising a lidar system as described above.
According to a fourth aspect of the present invention, there is provided a high-precision MEMS lidar transmission method, comprising;
collimating the laser beam emitted from the laser by using a collimating lens;
a Micro Electro Mechanical System (MEMS) micro-vibration mirror is adopted to reflect the laser beam from the auto-collimation lens to the non-uniform beam angle expansion module;
the non-uniform light beam angle expansion module converts the light beams from the MEMS micro-vibrating mirror into light beams which are distributed at non-uniform angle intervals.
Optionally, in the above method, the scanning angle interval of the beams whose angle interval is non-uniformly distributed increases from a central region of the field of view to an edge region of the field of view.
The technical scheme of the invention has the beneficial technical effects that: different scanning angle intervals are adopted for different areas in a view field for scanning, high-precision detection is realized for the area with small scanning angle intervals, and the utilization rate of laser light energy can be improved for the area with large scanning angle intervals although the detection precision is reduced.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic view of a prior art lidar scanning angle distribution. Fig. 2 is a schematic diagram of a high-precision MEMS lidar transmitting apparatus according to a first embodiment of the present invention.
Fig. 3 is a schematic view of the distribution of scanning angles of the lidar according to the first embodiment of the present invention.
Fig. 4 is a schematic diagram showing the relative position relationship between the laser and the MEMS of the high-precision MEMS lidar transmitting apparatus according to the first embodiment of the present invention.
Fig. 5 is an explanatory diagram of a beam angle enlarging module according to the first embodiment of the present invention.
Fig. 6 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmitting apparatus according to a second embodiment of the present invention.
FIG. 7A is a schematic view of small angle magnification in an angle enlargement scheme of a lens group according to a second embodiment of the present invention.
Fig. 7B is a large angle magnification schematic view in an angle enlargement scheme of a lens group according to a second embodiment of the present invention.
Fig. 8 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmitting apparatus according to a third embodiment of the present invention.
Fig. 9 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmission apparatus according to an alternative implementation of a third embodiment of the invention.
Fig. 10 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmitting apparatus according to a fourth embodiment of the present invention.
Figure 11 is a schematic view of a fourth embodiment of a radial multi-focal nano-grating structure according to the present invention.
Figure 12 is a schematic view of a radial multi-focal nano-grating design according to a fourth embodiment of the present invention.
Fig. 13 is a flowchart of a high-precision MEMS lidar transmission method according to a seventh embodiment of the present invention.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of systems consistent with certain aspects of the invention, as detailed in the appended claims.
In the description of the present application, it is noted that the terms "first", "second", and the like are used merely for distinguishing between descriptions and are not intended to indicate or imply relative importance.
First embodiment
As shown in fig. 1, for the uniform angle expansion scheme adopted by the existing industry lidar optical beam expansion scheme, the scanning angle for the target object located directly in front of the lidar is substantially the same as the scanning angle for the background object located far away (above the side) from the lidar. The uniform angle expansion scheme has the same scanning angle interval for different areas in a field of view, realizes the same detection precision, and cannot meet the requirement of the field angle of the intelligent driving radar.
Fig. 2 shows a schematic diagram of a high-precision MEMS lidar transmitting apparatus of the present invention. As shown in FIG. 2, the high-precision MEMS laser radar transmitting device comprises a laser transmitting module 10, a collimating lens 12 and a control module, wherein the laser transmitting module 10 comprises a laser 11 and the collimating lens 12, and the collimating lens 12 is used for collimating laser beams emitted from the laser 11; a scanning module 20 including a Micro Electro Mechanical System (MEMS) micro galvanometer 21 for reflecting the laser beam from the collimating lens 12 to the non-uniform beam angle expanding module 30; and the non-uniform beam angle expansion module 30 is used for converting the beams with the uniformly distributed angle intervals from the MEMS micro-galvanometer 21 into the beams with the non-uniformly distributed angle intervals.
According to the technical scheme of the embodiment of the invention, different scanning angle intervals are adopted for different areas in a field of view for scanning, high-precision detection is realized for the area with small scanning angle intervals, and the utilization rate of laser light energy can be improved for the area with large scanning angle intervals although the detection precision is reduced.
For intelligent driving, it is generally desirable that the scan angle interval of a target object directly in front of the near field of view is smaller to achieve high-precision detection; the scanning angle interval of the background object at the edge of the far field of view can be properly increased, so that the utilization rate of the laser light energy is improved. Therefore, there is a need for a lidar with high accuracy, high safety factor, and high application reliability that employs a non-uniform angle enlargement scheme. Referring to fig. 3, generally, for the vicinity of the field of view in front of the automobile (field of view near 0 degree), the angle interval of the outgoing light beam scanned by the radar is required to be small, so as to ensure high-precision detection and identification of the appearance of an object in front, identify information such as the category of the object, and ensure driving safety; for the automobile viewing field obliquely above or below, only the scenery existing at a long distance can be detected without small angle interval.
As an alternative to the first embodiment of the present invention, the scan angle interval of the light beams whose scan angle interval is non-uniformly distributed may be increased from the central region of the field of view to the edge region of the field of view.
The technical scheme of the optional implementation mode of the embodiment of the invention can reduce the scanning angle interval of the target object right in front of the near field of view so as to realize high-precision detection; the scanning angle interval of the background object at the edge of the far field of view can be properly increased, so that the utilization rate of the laser light energy is improved.
As an alternative to the first embodiment of the present invention, the laser 11 may be a semiconductor laser with a wavelength of 905nm or 1550nm, which has a minimum size and a minimum power, and may be a single laser or multiple lasers. Alternatively, the collimating lens 12 may be a single collimating lens or a collimating lens group, and includes a plurality of collimating lenses for collimating the fast-axis and slow-axis light beams of the laser 11. Fig. 4 shows the relative positions of the plurality of lasers 11A,11B,11C, the plurality of collimator lenses 12A,12B,12C, and the MEMS micro-mirror 21. As an alternative to the embodiment of the present invention, the number of lasers may be more than 3, and correspondingly, the number of collimating lenses may also be more than 3. The MEMS micro-vibrating mirror 21 is of a micro-reflector structure and is used for two-dimensionally scanning the collimated laser beams emitted to the MEMS micro-vibrating mirror to form a certain horizontal and vertical field angle; the light beams scanned and emitted by the MEMS micro-vibrating mirror 21 are light beams with uniform angular interval distribution.
The term "angle enlargement magnification" in the present application refers to the ratio of the angle of the light actually emitted by the laser radar to the angle of the light deflected by the MEMS micro-galvanometer 21 to the angle enlargement optical system (the non-uniform beam angle enlargement module 30), and is defined by γ, as shown in fig. 5. The angular magnification γ is tan (θ 2)/tan (θ 1). The light rays scanned and emitted by the MEMS micro-galvanometer 21 are light beams with uniform angle intervals, the angle expansion multiplying power at different radial areas in the non-uniform light beam angle expansion module 30 is different, the interval of the light-emitting angle is different finally, and the angle expansion density of the different radial areas is different.
Second embodiment
As shown in fig. 6, according to the second embodiment of the present invention, the non-uniform beam angle expanding module 30 in the first embodiment may include at least two lenses, wherein a portion of the at least two lenses focuses the beam from the MEMS micro-galvanometer 21 to the focal plane position of the remaining portion of the at least two lenses; the radii of curvature of each of the at least two lenses are matched in a radial direction for converting the light beam from the MEMS micro-galvanometer 21 into a light beam with a non-uniform distribution of scan angle intervals.
As shown in fig. 6, the non-uniform beam angle expansion module 30 is exemplified to include two lenses, namely a lens a and a lens B, and the lens a and the lens B are combined together to perform secondary expansion on the angle of the field of view of the beam scanned and emitted by the MEMS micro-galvanometer 21. Wherein the lens a may be a focusing lens for focusing the incident collimated beam from the MEMS micro-galvanometer 21 at the focal plane position of the lens B; the lens B collimates and segregates the light beam from the lens A to realize final angle beam expansion. The lens a and/or the lens B may be formed by combining a plurality of lenses, and the plurality of lenses forming the lens a jointly implement a focusing function to focus the incident collimated light beam of the MEMS micro-galvanometer 21 at the focal plane position of the lens B.
As shown in fig. 6, the lens a and the lens B have a plurality of focal points in the radial direction; when the curvature radius of the lens surface is different at different radial positions, the corresponding focal length is different.
The relationship between the radius of curvature r and the focal length f is:
f＝r/(n-1)
(1)
n is the refractive index of the lens
Referring to fig. 7A, 7B, the effect of the focal length of lens a and lens B on the angular magnification is shown.
Relationship of angle magnification γ to focal length and radius of curvature:
γ＝fa(n)/fb(n)＝ra(n)/rb(n) (2)
fa focal length of lens A at radial nth point
fb focal length of lens B at nth point in radial direction
ra radius of curvature of lens A at radial nth point
rb radius of curvature of lens A at radial nth point
d axial distance between lens A and lens B
Fig. 7A is a schematic view of small-angle magnification, and fig. 7B is a schematic view of large-angle magnification. The focal length fB of lens B in fig. 7A is greater than the focal length fB of lens B in fig. 7B; the focal length fA of lens a in fig. 7A is smaller than the focal length fA of lens a in fig. 7B. Therefore, the angle expansion magnification γ is derived from the formula (2), and the angle expansion magnification of fig. 7A is larger than that of fig. 7B.
Taking fig. 6 as an example, in the present embodiment, the curvature radii of the two lenses are matched in the radial direction, which means that after the change trends of the curvature radius of each lens from the center to the edge of the lens interact, the light beams emitted through the at least two lenses can form light beams which satisfy the non-uniform distribution of the scanning angle interval in a specific form. For example, the radius of curvature of each lens may be tapered from the center of the lens to the edge, i.e., fa (n)/fb (n) and ra (n)/rb (n) may be tapered from the center to the edge, thereby ensuring that the central area angular magnification of each lens is small and the edge area angular magnification of each lens is large; conversely, the radius of curvature of each lens may be gradually larger from the center to the edge thereof, i.e., fa (n)/fb (n) and ra (n)/rb (n) may be gradually smaller from the center to the edge, thereby ensuring that the angular magnification of the central area of each lens is large and the angular magnification of the edge area of each lens is small. When the non-uniform beam angle enlarging module 30 includes more lenses, the principle is similar and will not be described herein.
According to an alternative implementation of the second embodiment of the invention, the radius of curvature of each of the at least two lenses is gradually decreasing from the center to the edge and matched such that the scanning angle interval of the light beams with a non-uniform distribution of the scanning angle interval is gradually increasing from the central region of the field of view to the edge region of the field of view.
In order to realize that the angle interval of the central visual angle of the actually emergent light beam is small, the angle interval of the edge visual field is large, namely the central visual field of the angle expansion magnification is small, and the edge visual field is large (see figure 6); that is, the surface shape of the lens A (and B) is divided into n parts (the number of n is equal to the number of angular magnifications) from the center to the edge in the radial direction, and the curvature radius of each part is different; referring to fig. 7B, the trend of the lens a-face from center to edge is: the focal length fa is gradually reduced, and the curvature radius ra is gradually reduced; the variation trend of the B-surface type of the lens from the center to the edge is as follows: the focal length fb gradually decreases and the radius of curvature rb gradually decreases. And fa (n)/fb (n) and ra (n)/rb (n) decrease from the center to the edge.
As an example, the angular magnification relationship of the field of view region shown in fig. 6 is γ 1> γ 2> γ 4> γ 3. The angle enlargement magnification γ 3 in the center region of the field of view is the smallest, and the angle enlargement magnification γ 1 in the edge region of the upper field of view is the largest. The angle magnification γ 2 of the region between the upper field-of-view edge region and the field-of-view center region is larger than the angle magnification γ 4 of the region between the lower field-of-view edge region and the field-of-view center region.
As an alternative implementation of the second embodiment of the present invention, the non-uniform beam angle expansion module 30 may comprise a single lens, the lens comprising a front surface and a back surface, wherein the front surface of the lens is used for focusing the incident collimated beam from the MEMS micro-galvanometer 21 to the focal plane position of the surface of the lens; the front and back surface radii of curvature of the lens are matched in the radial direction for converting the beam from the MEMS micro-galvanometer 21 into a beam with a non-uniform distribution of scan angle intervals.
According to the above alternative embodiment, the non-uniform beam angle expansion module 30 is composed of a single lens, and can expand the beam field angle scanned and emitted by the MEMS micro-galvanometer 21 twice. The front surface of the single lens is used for focusing the incident collimated light beam from the MEMS micro-vibrating mirror 21 at the focal plane position of the rear surface; the rear surface collimates and segregates the light beam from the front surface to achieve final angular beam expansion. The curvature radius of the front surface and the curvature radius of the rear surface are changed in a gradual change mode, namely, the focal lengths of light corresponding to different radial positions of the lens are different, and after the focal lengths of the front surface and the rear surface corresponding to the radial positions are matched, the non-uniform angle beam expanding effect can be realized.
In this embodiment, the single lens may be a thick lens, the front surface of the single lens functions as the lens a in fig. 6, the rear surface of the single lens functions as the lens B in fig. 6, and the radii of curvature of the front surface and the rear surface of the single lens are matched in the radial direction as described in fig. 6, which is not described herein again.
In the present embodiment, a single thick lens is used to implement the function of multiple lenses, which can effectively reduce the non-uniform beam angle expanding module 30.
As an alternative to the second embodiment of the present invention, the radii of curvature of the front and rear surfaces of the single lens gradually decrease from the center to the edge, and after matching, the scanning angle interval of the light beams whose scanning angle interval is unevenly distributed gradually increases from the central region of the field of view to the edge region of the field of view.
Third embodiment
According to the third embodiment of the present invention, the non-uniform beam angle enlarging module 30 comprises a plurality of lens groups, each lens group being respectively used for enlarging the scanning angle of the beam within the corresponding field of view range from the MEMS micro-galvanometer 21, wherein each lens group of the plurality of lens groups comprises at least two lenses, a part of the at least two lenses focuses the beam from the MEMS micro-galvanometer 21 to the focal plane position of the rest of the at least two lenses; the plurality of lens groups present at least two different beam angle magnifications.
Fig. 8 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmitting apparatus according to a third embodiment of the present invention. As shown in fig. 8, the non-uniform beam angle enlarging module 30 is exemplified by a lens assembly C, a lens assembly D, and a lens assembly E with three different parameters. Each lens group in fig. 8 is composed of a front lens and a rear lens which are coaxially arranged in front and rear. The front lens focuses the incident collimated beam from the MEMS micro-galvanometer 21 to the focal plane position of the back lens, which collimates and segregates the beam. Each of the lens group C, the lens group D, and the lens group E has a fixed beam angle magnification, and there are at least two different beam angle magnifications. Each of the lens group C, the lens group D, and the lens group E is disposed in a field of view region, respectively.
By adopting the implementation mode of the plurality of lens groups in the embodiment, the beam angle magnification of each lens group is fixed, and the complexity of lens processing can be reduced.
According to an alternative implementation of the third embodiment of the present invention, each of the plurality of lens groups may have a fixed beam angle magnification, each of the plurality of lens groups being respectively disposed in the field of view region, wherein the beam angle magnification of the lens group disposed in the center region of the field of view is smaller than the beam angle magnification of the lens group disposed in the edge region of the field of view, such that the scanning angle interval of the beams, which are non-uniformly distributed, increases in stages from the center region of the field of view to the edge region of the field of view.
In the present embodiment, as shown in fig. 8, the beam angle magnification of the lens group D disposed in the center region of the field of view is smaller than the beam angle magnification of the lens groups D, E disposed in the edge region of the field of view, so that the scanning angle interval of the beams whose scanning angle interval is unevenly distributed increases stepwise from the center region of the field of view to the edge region of the field of view.
As shown in fig. 8, the lens group C and the lens group E correspond to the angles of the upper and lower marginal fields of view emitted from the MEMS micro-galvanometer 21, and are used to enlarge the upper and lower marginal angles with a large magnification, that is, the angle interval between the light beams emitted from the lens group C and the lens group E is large, so as to detect a distant object. The lens group D corresponds to the angle near the central field of view emitted from the MEMS micro-galvanometer 21, and is used to enlarge the small-magnification angle near the central field of view, i.e., the angle interval of the light beam emitted from the lens group D is small, so as to detect the scene right in front and distinguish the specific details of the scene.
According to an alternative implementation of the third embodiment of the invention, each lens group of the plurality of lens groups may comprise a variable focus lens, having an adjustable beam angle magnification.
When an automobile adopting the laser radar transmitting device of the embodiment runs, the light beam expansion ratios of different view field areas can be changed according to real-time road conditions. For example, when the details of a certain object are required to be detected, a small beam expansion magnification mode is selected; when the general outline of the whole road condition is seen in demand, a large beam expansion multiplying power mode is selected, and therefore driving safety is improved.
According to an alternative implementation of the above third embodiment of the invention, the variable focus lens may be a liquid crystal lens or an electrowetting lens. The zoom lens can adjust the magnification of the light beam under the control of an electric signal to realize the arbitrarily variable magnification of the light beam. Fig. 9 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmission apparatus according to an alternative implementation of a third embodiment of the invention. As shown in fig. 9, the non-uniform beam angle enlarging module 30 is exemplified by three groups of lens groups, i.e., a lens group a1, a2, a lens group B1, B2, a lens group C1, and C2. Each lens group in fig. 9 is composed of a front lens and a rear lens which are coaxially arranged in front and rear. The front lens focuses the incident collimated beam from the MEMS micro-galvanometer 21 to the focal plane position of the back lens, which collimates and segregates the beam. Each of lens group a1, a2, lens group B1, B2, lens group C1, C2 may be a liquid crystal lens or an electrowetting lens, and thus have variable beam angle magnification.
The beam angle magnification of the lens groups B1, B2 disposed in the central region of the field of view is made smaller than that of the lens groups a1, a2 and C1, C2 disposed in the peripheral region of the field of view by electric signal adjustment, so that the scanning angle interval of the beams whose scanning angle interval is unevenly distributed increases stepwise from the central region of the field of view to the peripheral region of the field of view.
As an optional implementation manner of the third embodiment of the present invention, the non-uniform beam angle enlarging module 30 is not limited to be configured by 3 lens groups, and may be configured by 2 lens groups or a plurality of lens groups of 3 or more, each lens group includes at least two lenses, a part of the at least two lenses focuses the incident collimated beam from the MEMS micro-galvanometer 21 to the focal plane position of the rest of the at least two lenses, and the rest of the at least two lenses collimates and segregates the beam; each lens group has a fixed beam angle magnification, each lens group is respectively arranged in a field area, and the lens groups can form different modes of non-uniform scanning. For example, the beam angle magnification of the lens group disposed in the central region of the field of view is smaller than the beam angle magnification of the lens group disposed in the peripheral region of the field of view, so that the scanning angle interval of the beams, which are unevenly distributed in the scanning angle interval, increases stepwise from the central region of the field of view to the peripheral region of the field of view.
As an optional implementation manner of the third embodiment of the present invention, the non-uniform beam angle expansion module 30 includes a plurality of lenses, each lens is used for expanding the scanning angle of the beam within the corresponding field of view range from the MEMS micro-galvanometer, and each lens includes a front surface and a back surface, wherein the front surface of the lens is used for focusing the incident collimated beam from the MEMS micro-galvanometer 21 to the focal plane position of the back surface of the lens; there are at least two different beam angle magnifications in the plurality of lenses.
According to the above-described alternative embodiment, each of the plurality of lenses has a fixed beam angle magnification, and each of the plurality of lenses is disposed in the field of view region, respectively, wherein the beam angle magnification of the lens disposed in the center region of the field of view is smaller than the beam angle magnification of the lens disposed in the edge region of the field of view, so that the scan angle interval of the beams, which are non-uniformly distributed in the scan angle interval, increases stepwise from the center region of the field of view to the edge region of the field of view.
Fourth embodiment
As shown in fig. 10, according to the fourth embodiment of the present invention, the non-uniform beam angle expansion module 30 includes at least two radial multi-focal nano-gratings 41, 42, wherein a portion of the at least two radial multi-focal nano-gratings 41 are used for focusing the beam from the MEMS micro-galvanometer 21 to the focal plane position of the remaining portion of the at least two radial multi-focal nano-gratings 42, and the focal length of each of the at least two radial multi-focal nano-gratings is matched in the radial direction for converting the beam from the MEMS micro-galvanometer 21 into a beam with a non-uniform scanning angle interval.
In this embodiment, the focal length of each of the two radial multifocal nano gratings is matched in the radial direction, which means that after the trend of the change of the curvature radius of each nano grating from the center to the edge curvature radius interacts, the light beams emitted through the at least two nano gratings can form light beams which satisfy the non-uniform distribution of the scanning angle interval in a specific form. For example, the radius of curvature of each nanograting may be gradually smaller from the center to the edge, and the angular magnification may be gradually smaller from the center to the edge; conversely, the curvature radius of each nano grating may be gradually increased from the center to the edge, and the angle expansion magnification is gradually decreased from the center to the edge. When the non-uniform beam angle expansion module 30 includes more nano-gratings, the principle is similar and will not be described herein.
Fig. 10 is a schematic diagram of beam angle enlargement of a high-precision MEMS lidar transmitting apparatus according to a fourth embodiment of the present invention. As shown in fig. 10, the non-uniform beam angle expansion module 30 includes two radial multi-focus nano gratings 41 and 42 disposed oppositely, wherein the radial multi-focus nano grating 41 is used for focusing the incident collimated beam from the MEMS micro-galvanometer 21 at the focal plane position of the radial multi-focus nano grating 42, the radial multi-focus nano grating 42 is used for collimating and segregating the focused beam from the radial multi-focus nano grating 41, so as to perform non-uniform beam expansion, and the focal length of each of the two radial multi-focus nano gratings increases from the central area to the edge area thereof in the radial direction.
For a vehicle-mounted laser radar device, the lightness and thinness are the ultimate requirements of future development of the market all the time, and in the embodiment, the design scheme of angle expansion is realized by using a nano grating mode, so that the size of the laser radar can be effectively reduced.
According to an alternative implementation of the fourth embodiment of the present invention, each of the at least two radial multifocal nanograsters 41 and 42 includes a plurality of nano-sub-gratings, the focal lengths of which are different from each other and are arranged together in such a way as to increase along the radial focal length. The beam angle magnification of the nanometer sub-grating arranged in the central area of the field of view is smaller than that of the nanometer sub-grating arranged in the edge area of the field of view, so that the scanning angle interval of the beams with the angle interval distributed non-uniformly is segmented or gradually increased from the central area of the field of view to the edge area of the field of view.
As an optional implementation manner of the fourth embodiment of the present invention, the non-uniform beam angle expansion module 30 includes, but not limited to, 2 radial multi-focal nano-gratings, and may include more than 2 radial multi-focal nano-gratings, where a part of the plurality of radial multi-focal nano-gratings is used to focus the incident collimated beam from the MEMS micro-galvanometer 12 to the focal plane position of the remaining part of the plurality of radial multi-focal nano-gratings, and the remaining part of the plurality of radial multi-focal nano-gratings is used to collimate and segregate the focused beam, so as to perform the non-uniform beam expansion. The focal length of each of the plurality of radial multifocal nanograsters increases in a radial direction from a central region to an edge region thereof.
Fig. 11 is a schematic view of a radial multifocal nano-grating structure according to a fourth embodiment of the present invention, where the radial multifocal nano-grating structure material may be a lens medium material such as SINx, and may be processed by nanoimprint, laser direct writing, or electron beam direct writing. The design mode of the radial multi-focus nano beam structure is as follows: the height and width of the grating steps represent the phase profile of the grating to deflect the incident beam diffraction in a particular direction. The Fresnel sheet is a typical representative, and the density of the grating step width is distributed according to a certain rule, namely, one focal length can be used.
The basic relationship is as follows:
f＝(rj)2/(jλ) (3)
f: focal length
rj: radius of j-th grating ring at focal length f
j: j-th grating ring
λ: wavelength of light wave
h＝λ/2/n (4)
h is grating height
n is refractive index of grating
The nano grating has holography, that is, for a complete grating with fixed focal length, only a part of the nano grating (nano sub grating) can be intercepted, and the nano sub grating still has the same focal length as the original nano grating.
Figure 12 is a schematic view of a radial multi-focal nano-grating design according to a fourth embodiment of the present invention. As shown in fig. 11, the complete grating morphology (the same change rule from the center to the edge zone) under each focal length is designed, then the radial position of each view field angle on the enlarged lens group and the lens focal length required for reaching the beam angle enlargement magnification at the position are scanned by each MEMS micro-galvanometer, the corresponding radial position on the grating with the corresponding focal length is intercepted, that is, the nano sub-grating with the corresponding focal length is obtained, so that the grating radial positions with the focal lengths required by each view field are intercepted, and the radial multi-focal-point nano grating is obtained by splicing and designing together. In the design of the radial multi-focus grating, the variation relation of grating ring zones at different radial positions can be directly designed according to a formula (3), and the radial multi-focus effect can be realized.
Taking three angle magnifications in the full view field as an example, the central view field angle magnification is small, and the edge view field angle magnification is maximum. As shown in the left side of fig. 11, the angle of the field of view scanned and emitted by the MEMS micro-galvanometer is divided into three parts (i) and (ii), and the projection is performed in the radial direction of the non-uniform beam angle expansion module, and the heights of the three parts correspond to h1, h2, and h3, respectively. The light expansion multiplying power of the three parts of the field of view is different, and the focal lengths of the corresponding non-uniform light beam angle expansion modules are different. Setting the required focal length of the nano grating as f1, f2 and f 3; the complete nanometer grating appearance corresponding to the focal length can be designed, as shown in the upper side of fig. 11; then, the required parts are respectively cut out from the complete grating according to the projection positions of the view fields of all parts on the grating surface, as shown in the middle of FIG. 11; and finally, the three are combined together to complete the radial trifocal grating design, as shown in the lower side of fig. 11.
Referring to fig. 10, according to an alternative implementation manner of the fourth embodiment of the present invention, after two sets of the radial multifocal nanograsters 41 and the nanograsters 42 for angle expansion are designed and manufactured on the front and rear surfaces of the substrate 50, respectively, the non-uniform beam angle expansion module 30 can be obtained. The substrate 50 may be made of a transparent material. Therefore, the effect of non-uniform angle expansion is achieved by combining and matching two groups of radial multi-focus nano grating structures. The effects of small central view field angle interval and large edge view field angle interval are realized.
According to an alternative implementation of the fourth embodiment of the present invention, one set of the radial multifocal nano-gratings may be fabricated on one side of the first substrate, another set of the radial multifocal nano-gratings may be fabricated on one side of the second substrate, and then the surfaces of the first substrate and the second substrate on which the radial multifocal nano-gratings are not fabricated are fixed relatively together. The first substrate and the second substrate may be made of a transparent material. According to another alternative embodiment of the present invention, the surfaces of the first substrate and the second substrate on which the radial multifocal nano-gratings are not prepared may be disposed opposite to each other with an air gap therebetween.
As shown in fig. 12, the use of the radial multi-focus nano-grating with 3 focuses can realize the sectional increase of the scanning angle interval of the beams with the non-uniform angular interval from the central area of the field of view to the edge area of the field of view; it is also conceivable that the field angle scanned and emitted by the MEMS micro-galvanometer 21 is expanded to be more divided by arranging each nano sub-grating of the nano-grating so that the nano-grating includes 4,5,6,7,8,9 … n radial focuses. The more the angular division of the field of view, the smoother the amplitude of the increase in the scan angle interval of the angularly spaced non-uniformly distributed beams from the central region of the field of view to the peripheral region of the field of view. If the number of the radial focuses of the nano-grating is n, the angle expansion multiplying power is gamma 1 to gamma n, so that the scanning angle interval of the light beams with the angle interval distributed non-uniformly is gradually increased from the central area of the field of view to the edge area of the field of view.
In a specific implementation process, when the laser emitting module includes a plurality of lasers, in order to ensure that actual emergent light angle space is continuous, included angles between every two lasers in different beam expanding schemes are different, and the included angle between two lasers in the third embodiment is larger than that in the second embodiment and that in the fourth embodiment.
Fifth embodiment
The present embodiment provides a lidar system including the high-precision MEMS lidar transmitting apparatus described in the first to fourth embodiments.
By adopting the laser radar system of the embodiment, the non-uniform scanning in the field of view of the laser radar can be realized.
Sixth embodiment
The present embodiment provides an autonomous vehicle including the laser radar system described in the fifth embodiment.
The automatic driving vehicle can utilize the laser radar carried by the automatic driving vehicle to realize non-uniform scanning in a view field and meet the requirement of automatic driving.
Seventh embodiment
Referring to fig. 13, the present embodiment provides a high-precision MEMS lidar transmission method, including;
collimating the laser beam emitted from the laser 11 with a collimating lens 12;
a Micro Electro Mechanical System (MEMS) micro-vibrating mirror 21 is adopted to reflect the laser beam from the collimating lens 12 to the non-uniform beam angle enlarging module 30;
the non-uniform beam angle expansion module 30 converts the beam from a micro-electromechanical system (MEMS) micro-galvanometer into angularly spaced non-uniformly distributed beams.
The method of this embodiment corresponds to the first to fourth embodiments, and reference is made to the first to fourth embodiments for specific description, which is not repeated herein.
According to the technical scheme of the embodiment of the invention, different scanning angle intervals are adopted for different areas in a field of view for scanning, high-precision detection is realized for the area with small scanning angle intervals, and the utilization rate of laser light energy can be improved for the area with large scanning angle intervals although the detection precision is reduced.
According to an alternative implementation of the seventh embodiment of the invention, in the method described above, the scanning angle interval of the angularly spaced non-uniformly distributed beams increases from a central region of the field of view to an edge region of the field of view.
The features and benefits of the present invention are illustrated by reference to the examples. Accordingly, the invention is expressly not limited to these exemplary embodiments illustrating some possible non-limiting combination of features which may be present alone or in other combinations of features.
The above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A high-precision MEMS laser radar transmitting device is characterized by comprising:
the laser emitting module comprises a laser and a collimating lens, wherein the collimating lens is used for collimating a laser beam emitted by the laser;
the scanning module comprises an MEMS micro-galvanometer and is used for reflecting the laser beam from the collimating lens to the non-uniform beam angle expansion module;
the non-uniform light beam angle expansion module is used for converting the light beams from the MEMS micro-galvanometer into light beams with non-uniform scanning angle intervals.
2. A high accuracy MEMS lidar transmission apparatus according to claim 1, wherein the non-uniform distribution of the scanning angle interval of the beams increases in scanning angle interval from a central region of the field of view to an edge region of the field of view.
3. A high precision MEMS lidar transmission apparatus according to claim 1 or 2, wherein the non-uniform beam angle expansion module comprises at least two lenses, wherein a portion of the at least two lenses focuses the beam from the MEMS galvanometer to the focal plane position of the remaining portion of the at least two lenses; the curvature radius of each lens of the at least two lenses is matched in the radial direction, and the MEMS micro galvanometer is used for converting the light beams from the MEMS micro galvanometer into light beams which are distributed in a non-uniform mode at scanning angle intervals.
4. A high precision MEMS lidar transmission apparatus according to claim 1 or 2 wherein the non-uniform beam angle expansion module comprises a single lens comprising a front surface and a back surface, wherein the front surface of the lens is configured to focus the beam from the MEMS micro-galvanometer to a focal plane location of the back surface of the lens; the curvature radiuses of the front surface and the rear surface of the lens are matched in the radial direction, and the lens is used for converting the light beams from the MEMS micro-galvanometer into light beams which are distributed unevenly at scanning angle intervals.
5. A high precision MEMS lidar transmitting apparatus according to claim 1 or 2, wherein the non-uniform beam angle expansion module comprises a plurality of lens groups, each lens group for expanding a scanning angle of the beam within a corresponding field of view of the MEMS micro-galvanometer, wherein each lens group of the plurality of lens groups comprises at least two lenses, a portion of the at least two lenses focusing the beam from the MEMS micro-galvanometer to focal plane positions of a remaining portion of the at least two lenses; the plurality of lens groups present at least two different beam angle magnifications.
6. A high precision MEMS lidar transmission device of claim 7, wherein each lens group of the plurality of lens groups comprises a variable focus lens having an adjustable beam angle magnification.
7. A high precision MEMS lidar transmitting apparatus according to claim 1 or 2, wherein the non-uniform beam angle expansion module comprises a plurality of lenses, each lens for expanding a scanning angle of the beam within a corresponding field of view of the MEMS galvanometer, wherein each lens comprises a front surface and a back surface, wherein the front surface of the lens is for focusing the beam from the MEMS galvanometer to a focal plane location of the back surface of the lens; there are at least two different beam angle magnifications in the plurality of lenses.
8. The high precision MEMS lidar transmitting device of claim 1, wherein the non-uniform beam angle expansion module comprises at least two radial multi-focal nano-gratings, wherein a portion of the at least two radial multi-focal nano-gratings are configured to focus the beam from the MEMS micro-galvanometer to a focal plane location of a remaining portion of the at least two radial multi-focal nano-gratings, and wherein a focal length of each of the at least two radial multi-focal nano-gratings is radially matched for converting the beam from the MEMS micro-galvanometer into a beam with a non-uniform distribution of scanning angle intervals.
9. A high-precision MEMS laser radar transmitting method is characterized by comprising the following steps of;
collimating the laser beam emitted from the laser by using a collimating lens;
reflecting the laser beam from the collimating lens to a non-uniform beam angle enlarging module by adopting an MEMS (micro-electromechanical system) micro-vibration mirror;
the non-uniform light beam angle expansion module converts the light beams from the MEMS micro-vibrating mirror into light beams which are distributed at non-uniform angle intervals.
10. A high precision MEMS lidar transmission method as claimed in claim 9 wherein the angular spacing of the non-uniformly angularly spaced beams increases from a central region of the field of view to an edge region of the field of view.
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