CN109343034A - A kind of laser radar emission system based on MEMS galvanometer - Google Patents
A kind of laser radar emission system based on MEMS galvanometer Download PDFInfo
- Publication number
- CN109343034A CN109343034A CN201811097046.4A CN201811097046A CN109343034A CN 109343034 A CN109343034 A CN 109343034A CN 201811097046 A CN201811097046 A CN 201811097046A CN 109343034 A CN109343034 A CN 109343034A
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- laser
- reflecting mirror
- collimation
- mems galvanometer
- beam splitting
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
Abstract
It includes pulse laser collimation transmitting module, MEMS galvanometer, reflecting mirror, rotation motor and diffraction beam splitting element that the present invention, which discloses a kind of laser radar emission system based on MEMS galvanometer,；The pulse laser collimation transmitting module emits collimation laser；The MEMS galvanometer, pulse laser collimation transmitting module, the reflecting mirror and the diffraction beam splitting element are correspondingly arranged, so that the collimation laser, which is incident on the mirror surface of the MEMS galvanometer, reflects to form reflected light；The reflected light is incident on the reflecting mirror, is further incident upon on the diffraction beam splitting element by the reflection of the reflecting mirror, and uniform several divergent beams are formed；The reflecting mirror is connected with the rotation motor, and the rotation motor can drive the reflecting mirror to rotate；The present invention is by adjusting the rotational angle of the rotation motor to carry out more wheel scans；The spatial dimension of angle between adjacent beams under single sweep operation can be filled up, to increase substantially spacescan resolution ratio.
Description
Technical field
The present invention relates to laser radar technique fields, and in particular to a kind of laser radar transmitting system based on MEMS galvanometer
System.
Background technique
In recent years, with robot, unmanned field flourish, the demand to Intellisense sensor is more next
It is more urgent.Laser radar is one of key core Intellisense sensor, and because of range accuracy height, high directivity, response is fast, not by
The advantages such as ground clutter influence, and can effectively provide robot, Vehicle Decision Method and control system required information, become current machine
The environment such as device people, unmanned sense most efficient solution.
But existing laser radar is the high-resolution for guaranteeing spacescan, and the transmitting module of laser radar is mostly complicated and smart
Close optical path adjusting mechanism cooperates rigorous high, causes module making at high cost, can not give birth in batches in an assembling process between component
It produces, seriously affects the popularization of laser radar, restrict the development of robot, unmanned field.
In view of the above drawbacks, creator of the present invention obtains the present invention by prolonged research and practice finally.
Summary of the invention
To solve above-mentioned technological deficiency, the technical solution adopted by the present invention is, provides a kind of swashing based on MEMS galvanometer
Optical radar emission system includes pulse laser collimation transmitting module, MEMS galvanometer, reflecting mirror, rotation motor and diffraction beam splitting member
Part；The pulse laser collimation transmitting module emits collimation laser；The MEMS galvanometer, pulse laser collimation transmitting
Module, the reflecting mirror and the diffraction beam splitting element are correspondingly arranged, so that the collimation laser is incident on the MEMS galvanometer
Mirror surface on reflect to form reflected light；The reflected light is incident on the reflecting mirror, by the reflection of the reflecting mirror
It is further incident upon on the diffraction beam splitting element, forms uniform several divergent beams；The reflecting mirror and the rotation horse
Up to connection, the rotation motor can drive the reflecting mirror rotation to realize the laser radar transmitting system based on MEMS galvanometer
The Multiple-Scan of system.
Preferably, the pulse laser collimation transmitting module includes laser, the pulse laser collimation transmitting mould
Block carries out collimation processing to the laser light source and forms the collimation laser, the beam diameter of the collimation laser with it is described
The mirror surface size of MEMS galvanometer matches.
Preferably, the laser uses wavelength for the impulse semiconductor laser of 905nm, peak transmitted power 30W,
The collimation laser angle of divergence is 3mrad*3mrad.
Preferably, the divergent beams through the diffraction beam splitting element beam splitting are five, the diffraction grating beam splitting member
Power uniformity≤± 10% of each divergent beams of part, divergent beams described in emission effciency >=75%, five are formed
Entire beam divergence angle be 12 °, the angle between the adjacent divergent beams is 3 °.
Preferably, the scanning range of the MEMS galvanometer is ± 10 °, sweep speed 200Hz.
Preferably, it is the adjacent divergent beams that rotation motor described in single sweep operation, which drives the deflection angle of the reflecting mirror,
Between angle half.
Compared with the prior art the beneficial effects of the present invention are: 1, the present invention, can be accurate by diffraction beam splitting element
Control the angle between each laser radar transmitting harness, so as to avoid accurate, complicated micro- assembling process, improve harness it
Between precision with consistency；2, on the basis of not increasing number of lasers, by time-division multiplex technology, it can be achieved that space
The resolution ratio of detection significantly improves, and avoids and improves resolution ratio in the prior art and bring significant cost increases, system extension
Property is strong；3, by adjusting the rotational angle of the rotation motor to carry out more wheel scans；Adjacent beams under single sweep operation can be filled up
Between angle spatial dimension, to increase substantially spacescan resolution ratio.
Detailed description of the invention
Fig. 1 is the structural perspective of the laser radar emission system embodiment two；
Fig. 2 is the optical path side view of the laser radar emission system embodiment two；
Fig. 3 is the optical path top view of the laser radar emission system embodiment two；
Fig. 4 is the structural perspective of the laser radar emission system embodiment three；
Fig. 5 is the structure top view of the laser radar emission system embodiment three；
Fig. 6 is the comparison view that three mirror angle of laser radar emission system embodiment changes front and back beam splitting；
Fig. 7 is the structural perspective of the laser radar emission system example IV；
Fig. 8 is the structure top view of the laser radar emission system example IV；
Fig. 9 is the comparison view that the laser radar emission system example IV mirror angle changes front and back beam splitting；
Figure 10 is the MEMS vibration mirror scanning dot matrix schematic diagram that the laser radar emission system embodiment five scans for the first time；
Figure 11 is the MEMS vibration mirror scanning dot matrix schematic diagram of 5 second of laser radar emission system embodiment scanning.
Digital representation in figure:
1- pulse laser collimates transmitting module；2-MEMS galvanometer；3- reflecting mirror；4- rotation motor；5- diffraction beam splitting member
Part；11- laser；12- cylindrical lens；13- non-spherical lens.
Specific embodiment
Below in conjunction with attached drawing, the forgoing and additional technical features and advantages are described in more detail.
Embodiment one
Laser radar emission system in the present embodiment includes pulse laser collimation transmitting module 1 and diffraction beam splitting element
5；The pulse laser collimation transmitting module 1 and the diffraction beam splitting element 5 are correspondingly arranged.
The pulse laser collimation transmitting module 1 includes laser 11, and the pulse laser collimation transmitting module 1 is logical
The combination for crossing optical system, which is realized, handles the collimation of 11 light source of laser, collimation treated collimation laser vertical incidence
Enter on the diffraction beam splitting element 5, if the collimation laser of vertical incidence is uniformly divided into drying hair by the diffraction beam splitting element 5
Spreading beam, the angle between the divergent beams can carry out accurate control by adjusting the structure of the diffraction beam splitting element 5
System.
The laser radar emission system is additionally provided with rotating platform, and the rotating platform can be in the rotating platform
Mandrel line rotates 360 ° in the horizontal direction, the pulse laser collimation transmitting module 1 and the diffraction beam splitting element 5
It is arranged on the rotating platform, the rotating platform drives the pulse laser collimation transmitting module 1 and the diffraction point
Beam element 5 is rotated, and is scanned the surrounding enviroment that the divergent beams are projected to the rotating platform to realize, from
And guarantees laser radar and the detection of 360 ° of range certain visual angle ranges around is perceived.
By the diffraction beam splitting element 5, the period on the diffraction beam splitting element 5 between etching groove, Ke Yijing are adjusted
Really control the angle between each divergent beams that the laser radar emission system is launched, so as to avoid it is accurate,
Complicated micro- assembling process, improve precision between the divergent beams with consistency, to improve the use of laser radar
Popularization.
Embodiment two
As shown in FIG. 1, FIG. 1 is the structural perspectives of the laser radar emission system embodiment two；The pulse laser
Device collimation transmitting module 1 further includes cylindrical lens 12, non-spherical lens 13, and the cylindrical lens 12 and the non-spherical lens 13 are arranged
Between the laser 11 and the diffraction beam splitting element 5, the laser 11 preferably uses impulse semiconductor laser；Institute
Diffraction beam splitting element 5 is stated preferably using diffraction grating beam splitting element.
Specifically, the semiconductor laser 11 differs larger with the light-emitting surface size of slow-axis direction in fast axis direction, one
As, it is larger that the laser 11 emits the angle of divergence of the laser on the fast axis direction.
Therefore the laser 11 is emitted laser described by the aspheric design 12 that the present invention passes through setting first
The angle of divergence on fast axis direction is compressed, and the laser 11 emits laser will be impregnable on the slow-axis direction
Continue to transmit；The fixed setting of the non-spherical lens 13 makes the light-emitting surface of the laser 11 in the non-spherical lens 13
Focal plane, the focal length of the non-spherical lens 13 is generally higher than 30mm, by the non-spherical lens 13 by the transmitting
Laser is collimated on the slow-axis direction and on the fast axis direction, and the collimated light beam angle of divergence after collimation is less than
3mrad x 3mrad。
The laser beam compression on fast axis direction is carried out by the cylindrical lens 12, transmitting laser can be reduced and reach the aspheric
Light energy before face lens 13 dissipates.
By the collimation laser vertical incidence after collimation into the diffraction beam splitting element 5, pass through the diffraction beam splitting member
The collimation laser is divided into several divergent beams, as shown in Fig. 2, and in a second direction not by part 5 in a first direction
It is impacted, as shown in Figure 3；The first direction and the second direction are vertical.
Preferably, several divergent beams that the first direction is formed guarantee the rotary flat perpendicular to horizontal plane
When platform rotates in the horizontal direction, the divergent beams can be scanned to the space within the scope of 360 °, upper and lower certain visual angle, from
And guarantees laser radar and the detection of 360 ° of range certain visual angle ranges around is perceived.
In the present embodiment, the laser 11 uses wavelength for the impulse semiconductor laser of 905nm, peak emission function
Rate is 25W, according to the wavelength of the laser 11, designs and produces the diffraction beam splitting element 5, the function of each divergent beams
Rate uniformity≤± 10%, emission effciency >=75%, collimation laser are five diverging lights through 5 beam splitting of diffraction beam splitting element
Beam, the entire beam divergence angle that divergent beams described in five are formed are 12 °, and the angle between each divergent beams is 3 °.
Embodiment three
Embodiment three is further improved on the basis of example 1, thes improvement is that, the laser radar hair
The system of penetrating further includes reflecting mirror 3, rotation motor 4.
As shown in Figure 4, Figure 5, Fig. 4 is the structural perspective of the laser radar emission system embodiment three；Fig. 5 is described
The structure top view of laser radar emission system embodiment three；The reflecting mirror 3 and the rotation motor 4 connect, the rotation
Motor 4 can drive the reflecting mirror 3 rotation to adjust the angle of laser and the reflecting mirror 3, change laser light incident to described
Incident angle and reflection angle on reflecting mirror 3.
The setting of reflecting mirror 3 collimates between transmitting module 1 and the diffraction beam splitting element 5 in the pulse laser；
The pulse laser collimation transmitting module 1, the diffraction beam splitting element 5, the reflecting mirror 3 and the rotation motor 4 are all provided with
It sets on the rotating platform.
The collimation laser that the pulse laser collimation transmitting module 1 projects injects the reflecting mirror 3 vertically downward,
In 45 degree of angles when the mirror surface and horizontal plane of the reflecting mirror 3 start, so that the collimation laser is horizontal after the reflecting mirror 3
It projects, the diffraction grating and horizontal plane of the diffraction beam splitting element 5.
As shown in fig. 6, Fig. 6 is beam splitting before and after three reflecting mirror of the laser radar emission system embodiment, 3 angulation change
Compare view；When the laser radar emission system carries out first lap rotation through the rotating platform, the reflecting mirror 3 keep with
Horizontal direction is in the state at 45 degree of angles, and the collimation laser is gone out by 3 horizontal emission of reflecting mirror, is impinged perpendicularly on described
Diffraction beam splitting element 5 forms dispersed light beam described in three beams by beam splitting, i.e. solid line light beam in Fig. 3, therefore passes through the dispersion
Environment on the certain angle of space can be detected within Beam rotation one week；When the second circle of laser radar emission system rotation
When, the reflecting mirror 3 rotates by a certain angle θ under the action of the rotation, and the collimation laser vertically downward again passes by
When changing original horizontal exit after the reflecting mirror 3 and deflect down the angle θ, and then being incident on the diffraction beam splitting element 5,
Dispersed light beam described in three beams integrally deflects down the angle θ, i.e. phantom beam in Fig. 3, the dispersed light beam is by rotating horizontally one
Circle, when supplemented with first lap between adjacent two-beam range detection, so that detection resolution may make to double.
Laser radar emission system of the present invention passes through the skill that is time-multiplexed on the basis of not increasing number of lasers
Art, it can be achieved that the resolution ratio to space exploration significantly improves, avoid improve resolution ratio in the prior art and bring it is huge at
This increase, set expandability are strong
In the present embodiment, the impulse semiconductor laser that the laser 11 used uses wavelength as 905nm, it is described
Pulse laser collimates laser-beam divergence angle≤3mrad that transmitting module 1 issues.Spread out according to the wavelength of the laser 11
Penetrating 5 beam splitting of beam splitting element is three divergent beams, and the entire beam divergence angle that divergent beams described in three are formed is 20 °, each
Angle between the divergent beams is 10 °.The uniformity of each divergent beams≤± 10%, emission effciency >=75%.
Example IV
As shown in Figure 7, Figure 8, Fig. 7 is the structural perspective of laser radar emission system of the present invention, and Fig. 8 is laser of the present invention
The structure top view of radar emission system；Laser radar emission system of the present invention includes pulse laser collimation transmitting module
1, MEMS galvanometer 2, reflecting mirror 3, rotation motor 4 and diffraction beam splitting element 5；MEMS (MEMS, Micro-Electro-
Mechanical System)。
The reflecting mirror 3 and the rotation motor 4 connect, the rotation motor 4 can drive the rotation of reflecting mirror 3 to
The angle of laser and the reflecting mirror 3 is adjusted, incident angle and reflection angle in Laser emission to the reflecting mirror 3 are changed.
The pulse laser collimation transmitting module 1 includes laser 11, and the pulse laser collimation transmitting module 1 is logical
The combination for crossing optical system, which is realized, handles the collimation of 11 light source of laser, collimation treated beam diameter with it is described
The mirror surface size of MEMS galvanometer 2 matches.Harness number, uniformity, the efficiency of the diffraction beam splitting element 5 are needed according to specific
It is required that being designed and optimizing in advance.
The MEMS galvanometer 2 is mounted on the pulse laser collimation transmitting module 1 to emit on the corresponding position of laser,
So that collimation after laser light incident to the mirror surface of the MEMS galvanometer 2 on reflect, the signal light of reflection be incident on described in spread out
It penetrates on beam splitting element 5, is divided into multi beam divergent beams；The MEMS galvanometer 2 is further controlled, so that the MEMS galvanometer 2 rotates
Realize the scanning within the scope of certain angle, the signal light reflected through the MEMS galvanometer 2 and the reflecting mirror 3 is spread out by described
Beam splitting element 5 is penetrated to form multi beam divergent beams and synchronize scanning within the scope of certain angle.Adjust the rotation motor 4
Rotational angle realizes the adjusting to the signal angular on the diffraction beam splitting element 5 is incident on, so that each hair of beam splitting
Spreading beam and the divergent beams at originally moment intersect to spatial emission, are again started up the MEMS galvanometer 2 and are scanned, can fill up
Angular range between scanning adjacent beams for the first time can carry out more wheels by adjusting the rotational angle of the rotation motor 4 and sweep
It retouches, to increase substantially spacescan resolution ratio.
As shown in figure 9, Fig. 9 is the comparison view of beam splitting before and after 3 angulation change of laser radar emission system reflecting mirror of the present invention
Figure；Laser radar emission system concrete operating principle of the present invention are as follows: 11 collimating module 1 of pulse laser emits laser to institute
It states on the mirror surface of MEMS galvanometer 2 and is reflected into reflected light through the MEMS galvanometer 2, the reflection is incident on by the reflected light
It on mirror 3, is further incident upon on the diffraction beam splitting element 5 by the reflection of the reflecting mirror 3, forms uniform several divergings
Light beam.In the initial state, the reflecting mirror 3 keeps angle constant, by the scanning of the MEMS galvanometer 2, as shown in Fig. 2,
The divergent beams will carry out first time scanning within the scope of certain angle, be formed to detecting in a certain range of space.
When completing single pass process, by the control action of the rotation motor 4 so that the reflecting mirror 3 deflect it is certain inclined
Gyration θ, the divergent beams also generate deflection effect, and drive the MEMS galvanometer 2 to carry out second again and scan, at this time
Further effective supplement is carried out to the scanning range of first time scanning by second of the scanning, so as to increase exponentially
Detection resolution of the present invention based on 2 laser radar emission system of MEMS galvanometer.
The laser radar emission system is also correspondingly arranged on laser receiver；The laser receiver includes wide-angle
Camera lens, optical filter and photodetector, the echo-signal of target to be measured reflection is successively through the wide-angle lens and the optical filtering
Piece is imaged on the test surface of the photodetector；The applicable wavelengths of the wide-angle lens, the applicable wavelengths of the optical filter
Match with 11 light source of laser with the applicable wavelengths of the photodetector.
The photodetector includes several linear probe units, threadiness probe unit parallel tightly to each other
Column, and the strip hot spot presented when all linear probe units and the static MEMS galvanometer 2 is vertical, to guarantee
The three dimensional local information of obtained target to be measured does not misplace/deforms.
The threadiness probe unit is using the avalanche photodide (APD) that can receive laser.
The laser radar emission system is additionally provided with driving circuit, and the driving circuit is for driving the laser 11
According to predeterminated frequency emission pulse laser, the driving torsion of MEMS galvanometer 2 to realize laser scanning, the driving rotation horse
The echo that different divergent beams, the acquisition of driving signal processing circuit and processing target to be measured are returned is formed up to 4 rotational angles
Signal.
What the signal processing circuit was detected by calculating each linear probe unit of the photodetector
The time between echo-signal that 11 collimating module of the pulse laser pulse laser emitted and target to be measured return
Difference or phase difference calculate the range information of target to be measured；By obtained range information respectively with the corresponding MEMS
The real time scan angle of galvanometer 2 matches, and can finally obtain the three dimensional local information of target to be measured.
Embodiment five
In the present embodiment, the laser 11 uses wavelength for the impulse semiconductor laser of 905nm, peak emission function
Rate is 30W, what the pulse laser collimation transmitting module 1 issued impulse semiconductor laser by the combination of optical system
Laser is collimated, angle of divergence 3mrad*3mrad.
According to the wavelength of the laser 11, the Power uniformities of each divergent beams of the diffraction beam splitting element 5≤
± 10%, emission effciency >=75%, incident laser is five divergent beams through 5 beam splitting of diffraction beam splitting element, described in five
The entire beam divergence angle that divergent beams are formed is 12 °, and the angle between each divergent beams is 3 °.
The scanning range of the MEMS galvanometer 2 is ± 10 °, and sweep speed 200Hz, the reflecting mirror 3 is using high-precision
Galvanometer, the rotation motor 4 adjust the angle of the reflecting mirror 3 and horizontal direction；Preferably, initial time, the reflecting mirror 3
Angle with horizontal direction is in 45 °, starts the first time scanning that the MEMS galvanometer 2 carries out 20 ° of ranges, sweeps when the first time
After retouching completion, the scanning lattice of formation is as shown in Figure 10.When the 3 deflection angle θ of reflecting mirror is 1.5 °, described in starting
MEMS galvanometer 2 carries out second of scanning within the scope of 20 degree again, what the first time scanning and second of the scanning were formed
Dot matrix is as shown in figure 11.Therefore by the adjustment of 3 angle of reflecting mirror, the scanning resolution of spacescan may make to improve one
Times.
It is worth noting that according to the structure setting of the diffraction beam splitting element 5, after the diffraction beam splitting element 5
It obtains divergent beams quantity and is not limited to 5 beams, the diffraction beam splitting element 5 can be subjected to structure setting according to specific works condition,
The divergent beams quantity is caused to be adjusted to 8,16,32 etc.；The angle of second of reflecting mirror 3 adjustment is not limited to adjacent light
The half of beam angle is also possible to other possible angles；The scanning times that the MEMS galvanometer 2 scans are not limited to twice, can also
To be repeatedly, the angle that the reflecting mirror 33 adjusts every time can be gradually increased.
The foregoing is merely presently preferred embodiments of the present invention, is merely illustrative for the purpose of the present invention, and not restrictive
's.Those skilled in the art understand that in the spirit and scope defined by the claims in the present invention many changes can be carried out to it,
It modifies or even equivalent, but falls in protection scope of the present invention.
Claims (6)
1. a kind of laser radar emission system based on MEMS galvanometer, which is characterized in that collimate transmitting mould including pulse laser
Block, MEMS galvanometer, reflecting mirror, rotation motor and diffraction beam splitting element；The pulse laser collimation transmitting module transmitting collimation
Laser；The MEMS galvanometer, pulse laser collimation transmitting module, the reflecting mirror and the diffraction beam splitting element are corresponding
Setting, so that the collimation laser, which is incident on the mirror surface of the MEMS galvanometer, reflects to form reflected light；The reflected light
It is incident on the reflecting mirror, is further incident upon on the diffraction beam splitting element by the reflection of the reflecting mirror, formed equal
Even several divergent beams；The reflecting mirror is connected with the rotation motor, and the rotation motor can drive the reflecting mirror to turn
The dynamic Multiple-Scan to realize the laser radar emission system based on MEMS galvanometer.
2. as described in claim 1 based on the laser radar emission system of MEMS galvanometer, which is characterized in that the pulse laser
It includes laser that device, which collimates transmitting module, and the pulse laser collimation transmitting module carries out at collimation the laser light source
Reason forms the collimation laser, and the beam diameter of the collimation laser matches with the mirror surface size of the MEMS galvanometer.
3. as described in claim 1 based on the laser radar emission system of MEMS galvanometer, which is characterized in that the laser is adopted
The impulse semiconductor laser for being 905nm with wavelength, peak transmitted power 30W, the collimation laser angle of divergence are 3mrad*
3mrad。
4. as described in claim 1 based on the laser radar emission system of MEMS galvanometer, which is characterized in that through the diffraction point
The divergent beams of beam element beam splitting are five, and the power of each divergent beams of the diffraction grating beam splitting element is equal
Even property≤± 10%, the entire beam divergence angle that divergent beams described in emission effciency >=75%, five are formed are 12 °, adjacent institute
Stating the angle between divergent beams is 3 °.
5. as described in claim 1 based on the laser radar emission system of MEMS galvanometer, which is characterized in that the MEMS galvanometer
Scanning range be ± 10 °, sweep speed 200Hz.
6. as described in claim 1 based on the laser radar emission system of MEMS galvanometer, which is characterized in that described in single sweep operation
Rotation motor drives the half of deflection angle angle between the adjacent divergent beams of the reflecting mirror.
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