CN207249108U - The integrated scanning device of multi-wavelength laser radar - Google Patents
The integrated scanning device of multi-wavelength laser radar Download PDFInfo
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- CN207249108U CN207249108U CN201720818779.7U CN201720818779U CN207249108U CN 207249108 U CN207249108 U CN 207249108U CN 201720818779 U CN201720818779 U CN 201720818779U CN 207249108 U CN207249108 U CN 207249108U
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Abstract
The utility model discloses a kind of integrated scanning device of multi-wavelength laser radar, including the micro- tilting mirrors of MEMS and laser light emitting light source, the laser light emitting light source includes the infrared laser of the 1400 1600nm wavelength of infrared laser and an at least high power of 800 1000nm wavelength of an at least low-power, the two is arranged at intervals and is projected with incidence angles degree on the micro- tilting mirrors of the MEMS, the incident laser of the infrared laser of the 800 1000nm wavelength of low-power outwardly corresponds to outgoing after the micro- tilting mirror reflections of the MEMS and forms near field scan area, the incident laser of the infrared laser of the 1400 1600nm wavelength of high power outwardly corresponds to outgoing after the micro- tilting mirror reflections of the MEMS and forms far-field scanning region；Complemented each other by the two, obtain unexpected effect, especially suitable for automatic driving field.
Description
Technical field
It the utility model is related to a kind of integrated scanning device of multi-wavelength laser radar.
Background technology
Laser radar LiDAR (Light Laser Detection and Ranging), is laser acquisition and range-measurement system
Abbreviation, it is the radar by the use of laser as radiation source.Laser radar is the product that laser technology is combined with Radar Technology,
Including at least transmitter and receiver.
Wherein, the infrared laser of the low-power 800-1000nm wavelength of 800-1000nm wavelength have beam quality it is poor,
The characteristics of non-eye-safe, thus can not high power transmission, detection range is limited；The high power of 1400-1600nm wavelength
The infrared laser of 1400-1600nm wavelength has good beam quality, belongs to the spy of eye-safe wave-length coverage, output power
Point, but it is limited by repetition rate and cost.Infrared laser and the height due to the low-power 800-1000nm wavelength
The reapective features of the infrared laser of power 1400-1600nm wavelength, are extremely limited its scope of application.
Utility model content
For the utility model to solve the above problems, providing a kind of integrated scanning device of multi-wavelength laser radar, it is logical
Cross and swash the infrared laser of the low-power 800-1000nm wavelength and the infrared of the high power 1400-1600nm wavelength
Light device is integrated, and the low-power 800- is made up by the infrared laser of the high power 1400-1600nm wavelength
The deficiency of the infrared laser of 1000nm wavelength, makes the two complement each other, and obtains unexpected effect.
To achieve the above object, the technical solution adopted in the utility model is：
A kind of integrated scanning device of multi-wavelength laser radar, including the micro- tilting mirrors of MEMS and laser light emitting light source, it is described to swash
The light beam of light emitting light source is projected on the micro- tilting mirrors of the MEMS, and as the rotation of the micro- tilting mirrors of the MEMS is outwardly emitted
Form a laser scanning region；The laser light emitting light source includes the infrared laser of an at least low-power 800-1000nm wavelength
Device and at least infrared laser of a high power 1400-1600nm wavelength, the infrared of the low-power 800-1000nm wavelength are swashed
The infrared laser of light device and the high power 1400-1600nm wavelength is arranged at intervals and projects institute with incidence angles degree
State on the micro- tilting mirrors of MEMS, the incident laser of the infrared laser of the low-power 800-1000nm wavelength is through micro- turn of the MEMS
Outwardly corresponding outgoing forms wide visual field, near field scan area closely, the high power 1400-1600nm ripples after mirror reflection
The incident laser of long infrared laser outwardly correspond to outgoing after the reflection of the MEMS micro- tilting mirrors and forms narrow visual field, at a distance
Far-field scanning region.
Preferably, the infrared laser of the low-power 800-1000nm wavelength is arranged in the high power 1400-
The both sides of the infrared laser of 1600nm wavelength so that the near field scan area is located at the both sides in the laser scanning region,
The far-field scanning region is located at the middle part in the laser scanning region.
Preferably, the infrared laser of the low-power 800-1000nm wavelength is using circumferential array distribution or multiple circumferential directions
The superposition distribution of array, the infrared laser of the high power 1400-1600nm wavelength is distributed using circumferential array or multiple weeks
Superposition distribution to array.
Preferably, the infrared laser of the low-power 800-1000nm wavelength or the high power 1400-1600nm ripples
Long infrared laser is also connected with a laser aligner, is projected again after the laser aligner carries out collimation processing described
On the micro- tilting mirrors of MEMS.
Preferably, the infrared laser of the high power 1400-1600nm wavelength is adjusted scanning according to detection range
Density, detection range farther out when using low-density high power scan, when detection range is nearer using high density low-power scan.
The beneficial effects of the utility model are：
(1), the integrated scanning device of the utility model includes the infrared laser of an at least low-power 800-1000nm wavelength
Device and at least infrared laser of a high power 1400-1600nm wavelength, make it be correspondingly formed wide visual field, closely near respectively
Field scan region and narrow visual field, remote far-field scanning region, on the one hand, so that the angle of oscillation of the micro- tilting mirrors of MEMS need not be expanded
In the case of degree can expansion of laser light scanning area, reduce the technical difficulty and processing cost of the micro- tilting mirrors of MEMS, can be light
Realize large-scale laser scanning, and improve laser scanning efficiency；On the other hand, the high power 1400-1600nm is passed through
The infrared laser of wavelength makes up the deficiency of the infrared laser of the low-power 800-1000nm wavelength, makes the two mutually auxiliary phase
Into unexpected effect being obtained, especially suitable for automatic driving field；
(2), the utility model to the laser scanning region by carrying out subarea-scanning so that the pendulum of the micro- tilting mirrors of MEMS
Dynamic angle is smaller, so as to improve laser scanning density, real-time and accuracy effect are more preferable；
(3), the infrared laser of low-power 800-1000nm wavelength is arranged in the high power 1400-1600nm wavelength
Infrared laser both sides so that the near field scan area is located at the both sides in the laser scanning region, and the far field is swept
The middle part that region is located at the laser scanning region is retouched, when being controlled suitable for automatic driving, passes through high power 1400-
The infrared laser of 1600nm wavelength carries out the long-range detection on road surface, passes through the infrared laser of low-power 800-1000nm wavelength
Device carries out the proximity detection of side vehicle or object, so as to fulfill the long-range detection among visual field, while takes into account Zhou Biankuan
The moderate distance detection of field angle, it is a wide range of to detect comprehensively, improve the security of automatic Pilot；
(4), the distribution of laser light emitting light source circumferential array or the superposition of multiple circumferential arrays distribution, can be in two dimension or three-dimensional
Spatially realize large-scale laser scanning；
(5), the utility model carries out sub-scanning by multiple transmitting light sources, and each laser can launch laser in turn
Beam, so as to improve the repetitive rate of whole integrated scanning device, avoids the repetitive rate restricted problem of single laser.
Brief description of the drawings
Attached drawing described herein is used to provide a further understanding of the present invention, and forms one of the utility model
Point, the schematic description and description of the utility model is used to explain the utility model, does not form to the utility model
Improper restriction.In the accompanying drawings：
Fig. 1 is the scanning optical path schematic diagram of the integrated scanning device of the multi-wavelength laser radar of one embodiment of the utility model
(the infrared laser of+one high power 1400-1600nm wavelength of infrared laser of a low-power 800-1000nm wavelength
Device)；
Fig. 2 is the scanning optical path signal of the integrated scanning device of the multi-wavelength laser radar of another embodiment of the utility model
Scheme (the infrared laser of+one high power 1400-1600nm wavelength of infrared laser of two low-power 800-1000nm wavelength
Device)；
In figure：
The infrared laser of 11- low-power 800-1000nm wavelength；The infrared of 12- high power 1400-1600nm wavelength is swashed
Light device；
21- near field scan areas；22- far-field scannings region；
The micro- tilting mirrors of 30-MEMS；40- incident lasers；50- shoot lasers.
Embodiment
In order to make technical problem to be solved in the utility model, technical solution and beneficial effect clearer, clear, with
Under in conjunction with the accompanying drawings and embodiments, the utility model is further elaborated.It is it should be appreciated that described herein specific real
Example is applied only to explain the utility model, is not used to limit the utility model.
As shown in Figure 1, a kind of integrated scanning device of multi-wavelength laser radar of the utility model, including micro- turn of MEMS
Mirror 30 and laser light emitting light source 11,12, the light beam of the laser light emitting light source 11,12 are projected on the micro- tilting mirrors 30 of the MEMS,
And to form a laser scanning region 21,22 as the rotation of the micro- tilting mirrors 30 of the MEMS is outwardly emitted.
In the present embodiment, the laser light emitting light source includes the infrared laser of an at least low-power 800-1000nm wavelength
11 and at least one high power 1400-1600nm wavelength infrared laser 12, the low-power 800-1000nm wavelength it is infrared
The typical launch wavelength of laser is 905nm, and the infrared laser of the high power 1400-1600nm wavelength is typically launched
Wavelength is 1550nm.In the present embodiment, the infrared laser 12 of the high power 1400-1600nm wavelength, which can use, is more than 100w
The infrared laser of peak power, the infrared laser 11 of the low-power 800-1000nm wavelength, which can use, is less than 20w peak values
The infrared laser of power, so as to ensure eye-safe.
The infrared laser 11 of the low-power 800-1000nm wavelength and the high power 1400-1600nm wavelength
Infrared laser 12 is arranged at intervals and is projected with incidence angles degree on the micro- tilting mirrors 30 of the MEMS, the low-power 800-
The incident laser 40 of the infrared laser 11 of 1000nm wavelength is outwardly corresponding after the micro- tilting mirrors 30 of the MEMS reflect to be emitted shape
Near field scan area 21 into wide visual field, closely, the incidence of the infrared laser 12 of the high power 1400-1600nm wavelength
Laser 40 outwardly corresponds to outgoing after the micro- tilting mirrors 30 of the MEMS reflect and forms narrow visual field, remote far-field scanning region
22。
Wherein, the infrared laser 11 of the low-power 800-1000nm wavelength and the high power 1400-1600nm ripples
The quantity of long infrared laser can be configured and be laid out according to concrete application environment and specific scanning range, also, described
The infrared laser of high power 1400-1600nm wavelength is adjusted scanning density according to detection range, detection range farther out when
Scanned using low-density high power, scanned when detection range is nearer using high density low-power.As shown in Figure 1, it can use at least
The infrared laser 11 of one low-power 800-1000nm wavelength and at least one high power 1400-1600nm wavelength it is infrared
Laser 12 carries out integrated scanning, the scanning area covering institute of the infrared laser 11 of the low-power 800-1000nm wavelength
The scanning area of the infrared laser 12 of high power 1400-1600nm wavelength is stated, but high power 1400-1600nm wavelength is infrared
Laser 12 primarily forms far-field scanning region, is very suitable for the automobile driven fast mistake of the higher road of speed and highway
Forewarning function is provided in journey.As shown in Fig. 2, in another embodiment, the infrared laser of the low-power 800-1000nm wavelength
Device 11 is arranged in the both sides of the infrared laser 12 of the high power 1400-1600nm wavelength so that the near field scan area
21 are located at the both sides in the laser scanning region, and the far-field scanning region 22 is located at the middle part in the laser scanning region；That is,
The scanning area of the infrared laser 11 of the low-power 800-1000nm wavelength and the high power 1400-1600nm wavelength
The scanning area of infrared laser 12 only partly overlaps, and avoids dropout, the high power 1400-1600nm wavelength it is infrared
Laser 12 is mainly responsible for the long-range detection of central region, and the infrared laser 11 of the low-power 800-1000nm wavelength can
Without carrying out multiple scanning to central region, it need to only be responsible for carrying out two side areas the proximity detection of side vehicle or object,
So as to fulfill a wide range of security for detecting, improving automatic Pilot comprehensively.
In the present embodiment, the infrared laser 11 of the low-power 800-1000nm wavelength or the high power 1400-
The infrared laser 12 of 1600nm wavelength is also respectively connected with a laser aligner (not shown), through the laser aligner into
Projected again on the micro- tilting mirrors 30 of the MEMS after the processing of row collimation.Wherein, from 11,12 to MEMS micro- tilting mirror 30 of laser light emitting light source
Between laser be known as incident laser 40, be known as shoot laser to the laser extraneous scanning area from the micro- tilting mirrors 30 of MEMS
50, after the incident laser 40 of different angle projects the micro- tilting mirrors 30 of the MEMS, the angle of the shoot laser 50 reflected
Also it is different, so as to form different scanning areas.
According to the scanning range of required scanning area, the infrared laser 11 of the low-power 800-1000nm wavelength uses
Circumferential array is distributed or the superposition of multiple circumferential arrays distribution, the infrared laser 12 of the high power 1400-1600nm wavelength
It is distributed using circumferential array distribution or the superposition of multiple circumferential arrays：That is, when the laser scanning peak width is relatively narrow and along horizontal stroke
To during extension, the laser light emitting light source can use circumferential array to be distributed；When the laser scanning peak width is relatively narrow and along vertical
To during extension, the laser light emitting light source can use longitudinal array distribution；When the area in the laser scanning region is larger, institute
The superposition distribution of multiple circumferential arrays can be carried out by stating laser light emitting light source, i.e. be carried out at the same time circumferential array distribution and longitudinal array
Distribution.Also, the quantity and layout of the laser light emitting light source can be configured according to the size in the laser scanning region.Example
Such as, the level angle of most of micro- tilting mirrors of two dimension MEMS is the several years to tens degree (such as 45 degree).The application is swashed by multiple
Light emitting light source carries out transmitting laser beam, and each incident laser 40 projects the micro- tilting mirrors 30 of the MEMS with different incidence angles
On, field of view angle can be expanded.
By taking 3 laser light emitting light sources of circumferential array distribution as an example, it is assumed that the horizontal field of view angle of the micro- tilting mirrors of MEMS is
45 degree of angles：
If being 30 degree of angles between adjacent two beams incident beam 40, field angle altogether is：45+30=75；
If being 25 degree of angles between adjacent two beams incident beam 40, field angle altogether is：45+25=70；
If being 20 degree of angles between adjacent two beams incident beam 40, field angle altogether is：45+20=60.
Expand angle likewise, be able to can also be realized by the multiple laser light emitting light sources of longitudinal array distribution.So as to solve
The problem of rotation angle of the certainly described micro- tilting mirrors 30 of MEMS is less than normal, expands the field angle of integrated scanning device.
Also, the placement position of the infrared laser 12 of the high power 1400-1600nm wavelength can be according to concrete application
The direction and scope for needing to carry out long-range detection in environment are configured.And accordingly in the high power 1400-1600nm ripples
The infrared laser 11 of the low-power 800-1000nm wavelength of the both sides laying respective numbers of long infrared laser 12 carries out auxiliary
Help and carry out side proximity detection.
The preferred embodiment of the utility model has shown and described in described above, as previously described, it should be understood that this practicality is new
Type is not limited to form disclosed herein, is not to be taken as the exclusion to other embodiment, and available for various other groups
Conjunction, modification and environment, and above-mentioned teaching or the technology of association area can be passed through in utility model contemplated scope described herein
Or knowledge is modified.And changes and modifications made by those skilled in the art do not depart from the spirit and scope of the utility model, then
All should be in the protection domain of the appended claims for the utility model.
Claims (5)
1. a kind of integrated scanning device of multi-wavelength laser radar, including the micro- tilting mirrors of MEMS and laser light emitting light source, the laser
The light beam of transmitting light source is projected on the micro- tilting mirrors of the MEMS, and to be formed as the rotation of the micro- tilting mirrors of the MEMS is outwardly emitted
One laser scanning region；It is characterized in that, the laser light emitting light source includes an at least low-power 800-1000nm wavelength
Infrared laser and at least infrared laser of a high power 1400-1600nm wavelength, the low-power 800-1000nm wavelength
Infrared laser and the high power 1400-1600nm wavelength infrared laser be arranged at intervals and thrown with incidence angles degree
It is mapped on the micro- tilting mirrors of the MEMS, the incident laser of the infrared laser of the low-power 800-1000nm wavelength is through the MEMS
Outwardly corresponding outgoing forms wide visual field, near field scan area closely, the high power 1400- after micro- tilting mirror reflection
The incident laser of the infrared laser of 1600nm wavelength outwardly corresponds to outgoing after the micro- tilting mirror reflections of the MEMS and forms narrow regard
Field, remote far-field scanning region.
A kind of 2. integrated scanning device of multi-wavelength laser radar according to claim 1, it is characterised in that：The low work(
The infrared laser of rate 800-1000nm wavelength is arranged in the two of the infrared laser of the high power 1400-1600nm wavelength
Side so that the near field scan area is located at the both sides in the laser scanning region, and the far-field scanning region is swashed positioned at described
The middle part in optical scanning region.
A kind of 3. integrated scanning device of multi-wavelength laser radar according to claim 1, it is characterised in that：The low work(
The infrared laser of rate 800-1000nm wavelength is distributed using circumferential array or the superposition of multiple circumferential arrays distribution, the Gao Gong
The infrared laser of rate 1400-1600nm wavelength is distributed using circumferential array or the superposition of multiple circumferential arrays distribution.
A kind of 4. integrated scanning device of multi-wavelength laser radar according to claim 1, it is characterised in that：The low work(
The infrared laser of the infrared laser of rate 800-1000nm wavelength or the high power 1400-1600nm wavelength is also connected with one and swashs
Optical collimator, projects on the micro- tilting mirrors of the MEMS again after the laser aligner carries out collimation processing.
5. a kind of integrated scanning device of multi-wavelength laser radar according to any one of claims 1 to 4, its feature exist
In：The infrared laser of the high power 1400-1600nm wavelength is adjusted scanning density, detection range according to detection range
Scanned using low-density high power when farther out, scanned when detection range is nearer using high density low-power.
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| CN108445506A (en) * | 2018-05-11 | 2018-08-24 | 北醒（北京）光子科技有限公司 | A kind of driving radiating circuit, laser radar and measurement method |
| CN109884610A (en) * | 2019-03-14 | 2019-06-14 | 深圳市镭神智能系统有限公司 | A kind of laser radar scanning method and laser radar |
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN110244317A (en) * | 2019-06-03 | 2019-09-17 | 深圳市速腾聚创科技有限公司 | Laser radar system |
| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
| CN110412602A (en) * | 2019-07-02 | 2019-11-05 | 北醒（北京）光子科技有限公司 | A kind of laser radar detection method and laser radar |
| CN111239760A (en) * | 2020-01-16 | 2020-06-05 | 湖北三江航天红峰控制有限公司 | Multi-view-field target environment information acquisition device and method based on fusion sensor |
| CN112055820A (en) * | 2018-05-01 | 2020-12-08 | 高通股份有限公司 | Time-of-flight ranging using different transmit fields |
| US20210215801A1 (en) * | 2018-08-22 | 2021-07-15 | Robert Bosch Gmbh | Eye-safe lidar system having an adjustable scanning range |
| CN113534445A (en) * | 2021-05-21 | 2021-10-22 | 北京控制工程研究所 | Double-light-path laser scanning assembly |
| WO2022140913A1 (en) * | 2020-12-28 | 2022-07-07 | 深圳市大疆创新科技有限公司 | Tof ranging apparatus and control method therefor |
| WO2022147652A1 (en) * | 2021-01-05 | 2022-07-14 | 深圳市速腾聚创科技有限公司 | Laser radar and device having laser radar |
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| CN112055820A (en) * | 2018-05-01 | 2020-12-08 | 高通股份有限公司 | Time-of-flight ranging using different transmit fields |
| CN112055820B (en) * | 2018-05-01 | 2024-04-02 | 高通股份有限公司 | Time-of-flight ranging with different transmit fields |
| CN108445506B (en) * | 2018-05-11 | 2023-11-03 | 北醒（北京）光子科技有限公司 | Measuring method for improving fog permeability of laser radar |
| CN108445506A (en) * | 2018-05-11 | 2018-08-24 | 北醒（北京）光子科技有限公司 | A kind of driving radiating circuit, laser radar and measurement method |
| US20210215801A1 (en) * | 2018-08-22 | 2021-07-15 | Robert Bosch Gmbh | Eye-safe lidar system having an adjustable scanning range |
| CN109884610A (en) * | 2019-03-14 | 2019-06-14 | 深圳市镭神智能系统有限公司 | A kind of laser radar scanning method and laser radar |
| CN110153106A (en) * | 2019-04-29 | 2019-08-23 | 苏州创鑫激光科技有限公司 | A kind of laser cleaning system and cleaning method |
| CN110153106B (en) * | 2019-04-29 | 2024-02-13 | 苏州创鑫激光科技有限公司 | Laser cleaning system and cleaning method |
| CN110244317A (en) * | 2019-06-03 | 2019-09-17 | 深圳市速腾聚创科技有限公司 | Laser radar system |
| CN110412602A (en) * | 2019-07-02 | 2019-11-05 | 北醒（北京）光子科技有限公司 | A kind of laser radar detection method and laser radar |
| CN110398752A (en) * | 2019-08-05 | 2019-11-01 | 昂纳信息技术（深圳）有限公司 | A kind of laser radar system of more visual fields |
| CN111239760A (en) * | 2020-01-16 | 2020-06-05 | 湖北三江航天红峰控制有限公司 | Multi-view-field target environment information acquisition device and method based on fusion sensor |
| WO2022140913A1 (en) * | 2020-12-28 | 2022-07-07 | 深圳市大疆创新科技有限公司 | Tof ranging apparatus and control method therefor |
| WO2022147652A1 (en) * | 2021-01-05 | 2022-07-14 | 深圳市速腾聚创科技有限公司 | Laser radar and device having laser radar |
| CN113534445A (en) * | 2021-05-21 | 2021-10-22 | 北京控制工程研究所 | Double-light-path laser scanning assembly |
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Effective date of registration: 20200817 Address after: No.558 FenHu Avenue, Lili Town, Wujiang District, Suzhou City, Jiangsu Province Patentee after: Suzhou Lingwei Intelligent Technology Co.,Ltd. Address before: 5026 Jinsong Road, Dublin, CA Patentee before: NEUVITION Inc. |