CN106839991B - Laser scanning device and laser scanning method applied to three-dimensional scene measurement - Google Patents

Laser scanning device and laser scanning method applied to three-dimensional scene measurement Download PDF

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Publication number
CN106839991B
CN106839991B CN201710232058.2A CN201710232058A CN106839991B CN 106839991 B CN106839991 B CN 106839991B CN 201710232058 A CN201710232058 A CN 201710232058A CN 106839991 B CN106839991 B CN 106839991B
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laser
light
mirror
light receiving
target object
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CN106839991A (en
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耿远超
黄晚晴
张颖
刘兰琴
王文义
孙喜博
郑天然
张锐
粟敬钦
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a laser scanning device and a laser scanning method applied to three-dimensional scene measurement, wherein the laser scanning device comprises a light source, a laser phase modulator, a grating, a reflecting mirror, a lens, a ranging light receiving part and an imaging light receiving part; the laser phase modulator and the grating form a laser deflection part to modulate laser, so that the traditional turning mirror deflection method is replaced, and high-frequency laser scanning can be realized. The invention adopts the combination of the laser phase modulator and the grating to replace the turning mirror to deflect and scan the light beam, the scanning frequency is only limited by the modulation frequency of the phase modulator, the GHz magnitude can be achieved, and the deflection component has no mechanical movement, so that on one hand, the starting delay caused by the inertia of the component is avoided, and on the other hand, the influence of the movement friction on the service life of the device is avoided.

Description

Laser scanning device and laser scanning method applied to three-dimensional scene measurement
Technical Field
The invention relates to the field of laser scanning, in particular to a laser scanning device and a laser scanning method applied to three-dimensional scene measurement.
Background
The laser scanning device is a device which deflects laser emitted by a light source in a direction by using a specific device, thereby realizing one-dimensional or two-dimensional scanning of a target object. The distance measuring component and the imaging component are combined, so that the target object can be subjected to three-dimensional imaging. The technology is currently applied to aspects such as terrain detection, automatic driving, rapid generation of three-dimensional models and the like.
Current methods for achieving laser scanning mainly use a rotatable mirror (turning mirror, refer to patent document 200710153106.5) driven by a motor to periodically deflect a laser beam, thereby achieving scanning. But is limited by the driving rotation speed of the motor, and the scanning frequency of the rotating mirror method can only reach the MHz magnitude at most. And is limited by the inertia of the moving parts, which can be activated for a longer time. And mechanical movement cannot avoid life limitations due to frictional losses.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided a laser scanning apparatus for three-dimensional scene measurement, comprising:
a light source for emitting a pulsed laser;
a laser modulation unit located on the laser path for modulating the deflection of the laser direction;
and a reflecting mirror which reflects the laser light adjusted by the laser modulation unit and emits the laser light to scan the target object along a substantially horizontal direction, and at the same time, reflects the light beam reflected from the target object to the imaging light receiving part and the distance measuring light receiving part to perform three-dimensional imaging of the target object.
Preferably, the laser modulation unit includes: the horizontal axis modulation unit is used for modulating the horizontal deflection angle of the laser and is positioned on a laser light path;
the vertical axis modulation unit is used for modulating the vertical deflection angle of the laser and is positioned on the laser path modulated by the horizontal axis modulation unit.
Preferably, the horizontal axis modulation unit comprises a horizontal axis phase modulator and a horizontal axis grating which are sequentially positioned on the pulse laser light path; the vertical axis modulation unit comprises a vertical axis phase modulator and a vertical axis grating which are sequentially positioned on the pulse laser light path.
Preferably, the scribing directions of the horizontal axis grating and the vertical axis grating are perpendicular to each other, and the deflection surfaces for deflecting the laser are perpendicular to each other.
Preferably, the method further comprises: the first half-transmitting half-reflecting mirror is positioned on a laser light path between the laser modulation unit and the reflecting mirror and transmits the laser modulated by the laser modulation unit to the reflecting mirror; the reflecting mirror reflects the laser and emits the scanning target object along the approximately horizontal direction;
a lens located on the reflection light path of the first half mirror;
a second half mirror located on the transmission light path of the lens;
the imaging light receiving part is positioned on a transmission light path of the second half-mirror; the ranging light receiving part is positioned on a reflecting light path of the second half-mirror; the reflecting mirror reflects the light beam reflected from the target object to the reflecting surface of the first half-transmitting half-reflecting mirror and horizontally to the lens; the lens transmits the target object beam to the second half-mirror; the light beam transmitted from the second half-mirror enters the imaging light receiving portion, and the reflected light beam enters the distance measuring light receiving portion.
Preferably, the distance from the second half mirror to the imaging light receiving unit and the distance measuring light receiving unit is the same.
Preferably, a mirror driving unit for driving the mirror is connected to the mirror.
The invention also provides a method for carrying out laser scanning by adopting the laser scanning device applied to three-dimensional scene measurement, which comprises the following steps:
step one, setting a phase modulation function of a horizontal axis phase modulator on laser asThe phase modulation function of the vertical axis phase modulator laser is +.>The horizontal deflection angle α (t) and the vertical deflection angle β (t) of the outgoing light are respectively:
wherein lambda is the wavelength of laser emitted by the light source, c is the speed of light in vacuum, k u =dα/dλ,k v Dβ/dλ is the dispersion coefficient of the horizontal-axis grating and the vertical-axis grating, respectively;and->Respectively representing the waveform slopes of the two phase modulators at the time t;
step two, a three-dimensional coordinate system is established by taking the center of the reflecting mirror as an origin; the method specifically comprises the following steps: taking the horizontal deflection angle direction as a u axis, taking the vertical deflection angle direction as a v axis and taking the emergent direction of reflected light as a w axis; the imaging light receiving part can measure the coordinates of the reflecting points on the target object on the uv plane because the angles of the reflecting mirrors for the light reflected by the different reflecting points of the target object are different, so that the focal positions of the imaging light receiving part are different; the distance measuring light receiving part measures the time delta t from the emission of the laser pulse from the light source to the return of the distance measuring light receiving part, and deducts the transmission time delta t of the light pulse in the laser scanning device 0 Then, the distance between the reflecting point of the target object and the laser scanning device can be calculated, so that the coordinate of the reflecting point of the target object on the w axis is determined; taking the center of the reflector as the origin of coordinates of an external coordinate system, the w-axis coordinates are:
in the scanning range of the laser scanning device, the three-dimensional (uvw) coordinates of each reflecting point of the target object are measured, so that the target object can be subjected to three-dimensional imaging;
at the same time, the dispersion coefficient k of the horizontal axis grating and the vertical axis grating is adjusted u And k v Different fractions can be obtained in the u-axis and v-axis directionsResolution.
Preferably, the Δt 0 Including the time that the laser light is transmitted to the mirror after being emitted from the light source, and the time that the laser light returned from the target is transmitted to the ranging light receiving part after being emitted by the mirror. .
The working principle of the laser scanning device applied to three-dimensional scene measurement is as follows: the laser source emits pulse laser with high repetition frequency, the laser phase modulator carries out periodic phase modulation, and the phase modulation enables the wavelength of the laser to shift by a small amount, and the shift amount changes with time. Then, the laser is reflected by the grating, and the reflection angle of the laser is related to the wavelength of the incident light, so that the angle of the reflected light is periodically changed along with the modulation waveform of the phase modulation, and the purpose of laser scanning is achieved. Two-dimensional laser scanning can be achieved using a combination of two sets of phase modulators and gratings, wherein the reticle directions of the two gratings are perpendicular to each other and the deflection planes of the deflected laser light are perpendicular to each other.
The invention at least comprises the following beneficial effects: the invention adopts the combination of the laser phase modulator and the grating to replace the turning mirror to deflect and scan the light beam, the scanning frequency is only limited by the modulation frequency of the phase modulator, the GHz magnitude can be achieved, and the deflection component has no mechanical movement, so that on one hand, the starting delay caused by the inertia of the component is avoided, and on the other hand, the influence of the movement friction on the service life of the device is avoided.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Description of the drawings:
FIG. 1 is a schematic diagram showing the internal structure and internal coordinate definition of a laser scanning device according to the present invention;
FIG. 2 is a schematic diagram of a scanning of a target object by a laser scanning device and a schematic diagram of external coordinate definition;
FIG. 3 is a schematic diagram of the range and path of the laser scan in example 1;
fig. 4 pulse waveform I (t) of light source 1, phase modulation waveform phi of horizontal axis phase modulator 2 in embodiment 1 u (t), and the phase modulation waveform phi of the vertical axis phase modulator 4 v (t)。
The specific embodiment is as follows:
the present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Fig. 1 and 2 show a laser scanning device for three-dimensional scene measurement, comprising:
a light source 1 for emitting a pulsed laser;
a laser modulation unit located on the laser path for modulating the deflection of the laser direction;
and a reflecting mirror 7 for reflecting the laser light adjusted by the laser light adjusting means and emitting the laser light in a substantially horizontal direction to scan the target object 13, and for reflecting the light beam reflected from the target object to the imaging light receiving unit 10 and the distance measuring light receiving unit 11 to perform three-dimensional imaging of the target object.
In the above technical solution, the laser modulation unit includes: the horizontal axis modulation unit is used for modulating the horizontal deflection angle of the laser and is positioned on a laser light path; the horizontal axis modulation unit comprises a horizontal axis phase modulator 2 and a horizontal axis grating 3 which are sequentially positioned on the pulse laser light path;
the vertical axis modulation unit is used for modulating the vertical deflection angle of the laser and is positioned on the laser path modulated by the horizontal axis modulation unit; the vertical axis modulation unit comprises a vertical axis phase modulator 4 and a vertical axis grating 5 which are sequentially positioned on the pulse laser light path; the line dividing directions of the horizontal axis grating and the vertical axis grating are mutually perpendicular, and the deflection surfaces of the deflection laser are mutually perpendicular; as shown in the schematic structure of fig. 1, a corresponding three-dimensional coordinate system (x, y, z) is established, wherein the scribe lines of the horizontal axis grating 3 are parallel to the xz plane; the scribe lines of the vertical axis grating 5 are parallel to the yz plane.
In the above technical solution, further includes: a first half mirror 6 which is located on the laser path between the laser modulation unit and the reflecting mirror and transmits the laser modulated by the laser modulation unit to the reflecting mirror 7; the reflecting mirror 7 reflects the laser beam and emits the scanning target 13 in a substantially horizontal direction;
a lens 8 located on the reflection optical path of the first half mirror;
a second half mirror 9 located on the transmission optical path of the lens;
wherein the imaging light receiving part 10 is positioned on a transmission light path of the second half-mirror; the distance measurement light receiving part 11 is positioned on a reflection light path of the second half mirror; the reflecting mirror reflects the light beam reflected from the target object to the reflecting surface of the first half-transmitting half-reflecting mirror and horizontally to the lens; the lens transmits the target object beam to the second half-mirror; the light beam transmitted from the second half-mirror enters the imaging light receiving portion, and the reflected light beam enters the distance measuring light receiving portion.
In the above technical solution, the distances from the second half mirror to the imaging light receiving portion and to the distance measuring light receiving portion are the same.
In the above technical solution, a mirror driving unit for driving the mirror is connected to the mirror.
The invention discloses a method for carrying out laser scanning by adopting the laser scanning device applied to three-dimensional scene measurement, which comprises the following steps:
as shown in fig. 1, a light source 1 emits pulsed laser with high repetition frequency, a horizontal axis phase modulator 2 and a horizontal axis grating 3 modulate a horizontal deflection angle (along a u-axis direction in fig. 2) of the laser, a vertical axis phase modulator 4 and a vertical axis grating 5 modulate a vertical deflection angle (along a v-axis direction in fig. 2) of the laser, and then the laser is transmitted through a first half mirror 6, reflected by a reflecting mirror 7 and emitted to a target object 13 along a substantially horizontal direction;
setting the phase modulation function of the horizontal axis phase modulator to laser asThe phase modulation function of the vertical axis phase modulator laser is +.>The horizontal deflection angle α (t) and the vertical deflection angle β (t) of the outgoing light are respectively:
wherein lambda is the wavelength of laser emitted by the light source, c is the speed of light in vacuum, k u =dα/dλ,k v Dβ/dλ is the dispersion coefficient of the horizontal-axis grating and the vertical-axis grating, respectively;and->Respectively representing the waveform slopes of the two phase modulators at the time t;
the second step is that the light beam (shown by a broken line in fig. 1) reflected from the target object 13 to the laser scanning device 14 is focused by the lens 8 after being reflected by the reflecting mirror 7 and the first half-reflecting mirror 6, and is split into two light beams after being transmitted and focused by the second half-reflecting mirror 9, one light beam is transmitted and focused on the imaging surface of the imaging light receiving part 10, and the other light beam is reflected to enter the distance measuring light receiving part 11. The distance from the half mirror 9 to the imaging light receiving part 10 is the same as the distance measurement light receiving part 11; establishing a three-dimensional coordinate system by taking the center of the reflecting mirror as the origin of coordinates of the external coordinate system in FIG. 2; the method specifically comprises the following steps: taking the horizontal deflection angle direction as a u axis, taking the vertical deflection angle direction as a v axis and taking the emergent direction of reflected light as a w axis; wherein, the angles of the light reflected from different reflection points of the target object to the reflecting mirror 7 are different, so that the focal positions of the imaging light receiving part 10 are different, and the imaging light receiving part can measure the coordinates of the reflection points on the target object 13 on the uv plane; the distance measuring light receiving unit 11 measures the time Deltat from the emission of the laser pulse from the light source to the return of the laser pulse to the distance measuring light receiving unit 11, and subtracts the light pulse from the laser scanning deviceThe transmission time deltat inside the device 14 0 Then, the distance between the reflecting point of the object and the laser scanning device 14 can be calculated, so as to determine the coordinate of the reflecting point of the object on the w axis. Wherein Δt is 0 Including the time that the laser light is transmitted to the mirror 7 after being emitted from the light source, and the time that the laser light returned from the target is transmitted to the ranging light receiving portion 11 after being emitted by the mirror 7. The center of the mirror 7 is taken as the origin of coordinates of the external coordinate system in FIG. 2, and the w-axis coordinates are
In summary, the three-dimensional (uvw) coordinates of each reflection point of the target object are measured within the scanning range of the laser scanning device 14, so that the target object can be three-dimensionally imaged.
At the same time, the dispersion coefficient k of the horizontal axis grating 3 and the vertical axis grating 5 is adjusted u And k v Different resolutions may be obtained in the u-axis and v-axis directions.
Example 1:
the required scan target range and path is shown in fig. 3 as a 5×5 matrix, and the laser is scanned line by line from coordinates (-2, -2) to coordinates (2, 2) in a zigzag path. The pulse timing of the light source 1 and the modulation waveforms of the two phase modulators 2 and 4 are shown in fig. 4. The waveforms of the phase modulators 2 and 4 are kept linearly variable during one pulse period, with the slope corresponding to the angle of the scan, and kept constant for the next pulse period, phi u Slope change of (t), phi v (t) remaining unchanged, the scanning spot moves in the u-axis direction. After finishing scanning one line v And (t) changing, the scanning point moves in the v-axis direction, and jumps to the next row.
Assuming that the repetition frequency of the laser light emitted from the light source 1 is 1GHz and the modulation frequencies of the horizontal axis phase modulator 2 and the vertical axis phase modulator 4 are 1GHz, the laser scanning device 14 scans one pixel point for 1ns and 10 can be scanned within 1ms 6 And each pixel, so that rapid and clear three-dimensional imaging can be performed on a high-speed moving object.
Although embodiments of the present invention have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the invention would be readily apparent to those skilled in the art, and accordingly, the invention is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.

Claims (6)

1. A laser scanning device for three-dimensional scene measurement, comprising:
a light source for emitting a pulsed laser;
a laser modulation unit located on the laser path for modulating the deflection of the laser direction;
a reflecting mirror which reflects the laser light adjusted by the laser light adjusting unit and emits the laser light to scan the target object along the approximately horizontal direction, and simultaneously reflects the light beam reflected from the target object to the imaging light receiving part and the ranging light receiving part to perform three-dimensional imaging of the target object;
the laser modulation unit includes: the horizontal axis modulation unit is used for modulating the horizontal deflection angle of the laser and is positioned on a laser light path;
the vertical axis modulation unit is used for modulating the vertical deflection angle of the laser and is positioned on the laser path modulated by the horizontal axis modulation unit;
the horizontal axis modulation unit comprises a horizontal axis phase modulator and a horizontal axis grating which are sequentially positioned on the pulse laser light path; the vertical axis modulation unit comprises a vertical axis phase modulator and a vertical axis grating which are sequentially positioned on the pulse laser light path;
the line directions of the horizontal axis grating and the vertical axis grating are mutually perpendicular, and the deflection surfaces of the horizontal axis grating and the vertical axis grating for deflecting laser are mutually perpendicular.
2. The laser scanning device for three-dimensional scene measurement according to claim 1, further comprising: the first half-transmitting half-reflecting mirror is positioned on a laser light path between the laser modulation unit and the reflecting mirror and transmits the laser modulated by the laser modulation unit to the reflecting mirror; the reflecting mirror reflects the laser and emits the scanning target object along the approximately horizontal direction;
a lens located on the reflection light path of the first half mirror;
a second half mirror located on the transmission light path of the lens;
the imaging light receiving part is positioned on a transmission light path of the second half-mirror; the ranging light receiving part is positioned on a reflecting light path of the second half-mirror; the reflecting mirror reflects the light beam reflected from the target object to the reflecting surface of the first half-transmitting half-reflecting mirror and horizontally to the lens; the lens transmits the target object beam to the second half-mirror; the light beam transmitted from the second half-mirror enters the imaging light receiving portion, and the reflected light beam enters the distance measuring light receiving portion.
3. The laser scanning device for three-dimensional scene measurement according to claim 2, wherein the second half mirror has the same distance to the imaging light receiving section and the distance measuring light receiving section.
4. The laser scanning device for three-dimensional scene measurement according to claim 1, wherein a mirror driving unit for driving the mirror is connected to the mirror.
5. A method of laser scanning using the laser scanning apparatus for three-dimensional scene measurement according to claim 2, comprising the steps of:
step one, setting a phase modulation function of a horizontal axis phase modulator on laser asThe phase modulation function of the vertical axis phase modulator laser is +.>The horizontal deflection angle α (t) and the vertical deflection angle β (t) of the outgoing light are respectively:
wherein lambda is the wavelength of laser emitted by the light source, c is the speed of light in vacuum, k u =dα/dλ,k v Dβ/dλ is the dispersion coefficient of the horizontal-axis grating and the vertical-axis grating, respectively;and->Respectively representing the waveform slopes of the two phase modulators at the time t;
step two, a three-dimensional coordinate system is established by taking the center of the reflecting mirror as an origin; the method specifically comprises the following steps: taking the horizontal deflection angle direction as a u axis, taking the vertical deflection angle direction as a v axis and taking the emergent direction of reflected light as a w axis; the imaging light receiving part can measure the coordinates of the reflecting points on the target object on the uv plane because the angles of the reflecting mirrors for the light reflected by the different reflecting points of the target object are different, so that the focal positions of the imaging light receiving part are different; the distance measuring light receiving part measures the time delta t from the emission of the laser pulse from the light source to the return of the distance measuring light receiving part, and deducts the transmission time delta t of the light pulse in the laser scanning device 0 Then, the distance between the reflecting point of the target object and the laser scanning device can be calculated, so that the coordinate of the reflecting point of the target object on the w axis is determined; taking the center of the reflector as the origin of coordinates of an external coordinate system, the w-axis coordinates are:
in the scanning range of the laser scanning device, the three-dimensional (uvw) coordinates of each reflecting point of the target object are measured, so that the target object can be subjected to three-dimensional imaging;
at the same time, the dispersion coefficient k of the horizontal axis grating and the vertical axis grating is adjusted u And k v Different resolutions may be obtained in the u-axis and v-axis directions.
6. The method of laser scanning with a laser scanning device for three-dimensional scene measurement as recited in claim 5, wherein said Δt is 0 Including the time that the laser light is transmitted to the mirror after being emitted from the light source, and the time that the laser light returned from the target is transmitted to the ranging light receiving part after being emitted by the mirror.
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CN108759711B (en) * 2018-04-04 2020-04-28 杭州电子科技大学 Non-mechanical laser three-dimensional scanning system
CN114295075B (en) * 2022-03-09 2022-06-03 中国工程物理研究院激光聚变研究中心 Device and method for measuring integral three-dimensional contour of inner surface of concave workpiece

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