CN209911542U

CN209911542U - Laser radar

Info

Publication number: CN209911542U
Application number: CN201920342051.0U
Authority: CN
Inventors: 胡小波; 鲁曼; 沈俭; 刘颖
Original assignee: LeiShen Intelligent System Co Ltd
Current assignee: LeiShen Intelligent System Co Ltd
Priority date: 2019-03-18
Filing date: 2019-03-18
Publication date: 2020-01-07
Anticipated expiration: 2029-03-18

Abstract

The utility model discloses a laser radar. The method comprises the following steps: the device comprises a light emitting unit, a light receiving unit and a control processing unit; the light emission unit comprises a light source subunit, an optical phased array subunit and an MEMS scanning mirror unit which are sequentially arranged along the propagation direction of light, and the light source subunit, the optical phased array subunit and the MEMS scanning mirror unit are respectively and electrically connected with the control processing unit; the light source subunit emits an incident beam; the optical phased array subunit deflects the incident light beam in a first plane to form a one-dimensional light beam with a preset scanning angle on the first plane, and the one-dimensional light beam irradiates the reflecting surface of the MEMS scanning mirror unit; the MEMS scanning mirror unit rotates under the action of a driving force, so that the one-dimensional light beam irradiated on the reflecting surface is deflected in a second plane (intersected with the first plane), the one-dimensional light beam is scanned on the second plane, and a detection light beam is formed. The embodiment of the utility model provides a technical scheme can reduce mechanical loss, promotes the laser radar life-span.

Description

Laser radar

Technical Field

The embodiment of the utility model provides a relate to laser rangefinder technical field, especially relate to a laser radar.

Background

The laser radar is a radar system that emits a laser beam to detect a characteristic quantity such as a position and a velocity of a target object. The working principle of the laser radar is as follows: the method comprises the steps of transmitting a detection signal (laser beam) to a target object, comparing a received signal (target object echo or echo signal) reflected from the target object with the transmitted signal, and carrying out appropriate processing to obtain relevant information of the target object, such as parameters of distance, direction, height, speed, posture, even shape and the like of the target object, so as to detect, track and identify the target object.

However, most of the three-dimensional scanning laser radars which have been mass-produced at present are multi-line mechanical rotating laser radars, and a macroscopic mechanical rotating part is arranged inside the laser radar to mechanically rotate the whole structure, so that the laser radar has serious mechanical wear, low reliability and large volume. Aiming at the problem, a reflecting prism (or a galvanometer) in the laser radar can be arranged to rotate only so as to reduce rotating components, thereby reducing mechanical friction loss, but the driving power consumption required by the mechanical rotation of a rotating part in the laser radar structure is higher, so that the whole machine of the laser radar generates heat seriously; at the same time, there is still mechanical wear caused by mechanical rotation, resulting in a short lifetime of the lidar.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a laser radar, can reduce the mechanical loss of laser radar and thus promote the life-span of laser radar; meanwhile, the driving power consumption can be reduced by reducing the driving force required by rotation, so that the heating problem of the laser radar can be improved.

An embodiment of the utility model provides a laser radar, this laser radar includes: the device comprises a light emitting unit, a light receiving unit and a control processing unit;

the light emitting unit is used for emitting a probe beam, the light receiving unit is used for receiving an echo beam reflected by a target object, and the control processing unit is used for determining the related information of the target object according to the probe beam and the echo beam; the relevant information of the target object comprises at least one of distance, azimuth, altitude and speed;

the light emitting unit comprises a light source subunit, an optical phased array subunit and an MEMS scanning mirror unit which are sequentially arranged along the propagation direction of light, and the light source subunit, the optical phased array subunit and the MEMS scanning mirror unit are respectively and electrically connected with the control processing unit;

the control processing unit controls the light source subunit to emit incident light beams;

the control processing unit controls the optical phased array subunit to deflect the incident light beam in a first plane to form a one-dimensional light beam with a preset scanning angle on the first plane, and the one-dimensional light beam irradiates the reflecting surface of the MEMS scanning mirror unit;

the control processing unit controls the MEMS scanning mirror unit to rotate under the action of a driving force so as to deflect the one-dimensional light beam irradiated on the reflecting surface in a second plane, so that the one-dimensional light beam is scanned on the second plane to form the detection light beam;

wherein the first plane intersects the second plane.

Further, the first plane is perpendicular to the second plane.

Further, the light emitting unit further comprises a collimating subunit, and the collimating subunit is located in the optical paths of the light source subunit and the optical phased array subunit;

the collimation subunit is configured to collimate the incident light beam emitted by the light source subunit, and irradiate the collimated incident light beam to the optical phased array subunit.

Further, the light source subunit includes a laser.

Further, the optical phased array subunit includes an optical waveguide array;

the control processing unit sequentially provides preset voltage for the optical waveguide array; and the optical waveguide array deflects the incident beam by a preset angle according to the sequentially received preset voltage.

Further, the control processing unit provides different preset voltages to the optical waveguide array within a preset scanning time, so that the optical waveguide array deflects the incident beam by different preset angles according to the different preset voltages to form the one-dimensional beam.

Further, the preset voltage is less than or equal to 10V, and the preset scanning angle is within a range of +/-10 degrees.

Further, the optical waveguide array is an AlGaAs optical waveguide array or a silicon-based optical waveguide array.

Furthermore, the light receiving unit comprises a receiving lens subunit and an array detection subunit which are sequentially arranged along the propagation direction of the light, and the array detection subunit is electrically connected with the control processing unit;

the receiving mirror unit is used for receiving the echo light beam and focusing the echo light beam to the array detection subunit;

the array detection subunit is used for converting the received echo light beam into an electric signal and transmitting the electric signal to the control processing unit.

Further, the array detection subunit includes a photon detector.

Further, the control processing unit determines the relevant information of the target object by adopting at least one of a time-of-flight method, a phase method and a frequency-modulated continuous wave method.

The embodiment of the utility model provides a laser radar, which comprises a light emitting unit, a light receiving unit and a control processing unit; the light emitting unit is used for emitting a detection light beam, the light receiving unit is used for receiving an echo light beam reflected by a target object, and the control processing unit is used for determining related information of the target object according to the detection light beam and the echo light beam; the relevant information of the target object comprises at least one of distance, azimuth, altitude and speed; the light emitting unit comprises a light source subunit, an optical phased array subunit and an MEMS scanning mirror unit which are sequentially arranged along the propagation direction of light, and the light source subunit, the optical phased array subunit and the MEMS scanning mirror unit are respectively and electrically connected with the control processing unit; the control processing unit controls the light source subunit to emit incident light beams; the control processing unit controls the optical phased array subunit to deflect the incident beam in a first plane so as to form a one-dimensional beam with a preset scanning angle on the first plane, and the one-dimensional beam irradiates the reflecting surface of the MEMS scanning mirror unit; the control processing unit controls the MEMS scanning mirror unit to rotate under the action of a driving force so as to deflect the one-dimensional light beam irradiated on the reflecting surface in a second plane, so that the one-dimensional light beam is scanned on the second plane to form a detection light beam; the first plane is intersected with the second plane, and three-dimensional scanning can be realized by combining the optical phased array subunit and the MEMS scanning mirror unit; the optical phased array subunit and the MEMS scanning mirror unit are low in driving power consumption, so that the overall power consumption of the laser radar can be reduced, and the overall heating problem of the laser radar can be reduced; meanwhile, the optical phased array subunit and the MEMS scanning mirror unit do not need macroscopic mechanical rotation, so that mechanical abrasion can be reduced, and the service life of the laser radar can be prolonged.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a laser radar according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of another laser radar provided in an embodiment of the present invention;

fig. 3 is a schematic structural diagram of another laser radar provided by an embodiment of the present invention;

fig. 4 is a schematic structural diagram of an optical waveguide array in a laser radar according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of another laser radar according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of another laser radar according to an embodiment of the present invention.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

Fig. 1 is a schematic structural diagram of a laser radar provided by an embodiment of the present invention, and fig. 2 is a schematic structural diagram of another laser radar provided by an embodiment of the present invention. Referring to fig. 1 and 2, the laser radar 10 includes: a light emitting unit 110, a light receiving unit 120, and a control processing unit 130; the light emitting unit 110 is configured to emit a probe beam, the light receiving unit 120 is configured to receive an echo beam reflected by the target object 20, and the control processing unit 130 is configured to determine information related to the target object 20 according to the probe beam and the echo beam; the relevant information of the target object 20 includes at least one of distance, orientation, altitude, and speed; the light emitting unit 110 includes a light source subunit 111, an optical phased array subunit 112, and an MEMS scanning mirror unit 113, which are sequentially arranged along the propagation direction of light, and the light source subunit 111, the optical phased array subunit 112, and the MEMS scanning mirror unit 113 are respectively electrically connected to the control processing unit 130; the control processing unit 130 controls the light source subunit 111 to emit an incident light beam; the control processing unit 130 controls the optical phased array subunit 112 to deflect the incident light beam in the first plane to form a one-dimensional light beam with a preset scanning angle on the first plane, and the one-dimensional light beam irradiates on the reflecting surface of the MEMS scanning mirror unit 113; the control processing unit 130 controls the MEMS scanning mirror unit 113 to rotate under the action of the driving force, so as to deflect the one-dimensional light beam irradiated onto the reflection surface in the second plane, thereby realizing the scanning of the one-dimensional light beam on the second plane and forming a detection light beam; wherein the first plane intersects the second plane.

Illustratively, the light emitting unit 110 is a laser emitting unit, the light receiving unit 120 is a laser receiving unit, and the probe beam, the echo beam, the incident beam, and the one-dimensional beam are all laser beams.

A one-dimensional beam is understood to be the entirety of all differently deflected beams formed by the various angles of deflection of the incident beam in the first plane, which can be scanned in the first plane.

Wherein, the laser radar 10 utilizes the optical phased array subunit 112 to realize the beam scanning in the first plane, and combines with the beam scanning in the second plane realized by the MEMS scanning mirror unit 113; it will also be appreciated that the lidar 10 utilizes an optical phased array subunit 112 to effect beam scanning in one dimension in conjunction with a MEMS scanning mirror unit 113 to effect beam scanning in another dimension.

Wherein the optical phased array subunit 112 implements beam deflection based on optical phased array technology. The optical phased array technology is a light beam pointing control technology and is derived from the microwave phased array technology. Optical phased array subunit 112 implements deflection based on electro-optic or thermo-optic effects to achieve beam scanning. Illustratively, taking the electro-optical effect as an example, the core component of the optical phased array subunit 112 is a plurality of phase modulation units (also called as phase control units) made of an electro-optical material, and by controlling the voltage applied to the phase modulation units, each phase modulation unit generates a corresponding phase delay, so as to control the phase of the optical field at the exit end of each phase modulation unit; by adjusting the phase relationship between the light fields emitted from the phase modulation units to be in phase with each other in a set direction, mutual intensified interference is generated, as a result of the interference, a high-intensity light beam is generated in the direction, while the light waves in other directions do not satisfy the condition of being in phase with each other, and the interference results are cancelled out, so that the radiation intensity is close to zero, and thus, when the incident light beam is emitted from the optical phased array subunit 112, the emission angle is controllably deflected.

Illustratively, on a time scale, by applying a different series of voltages to the phase modulation unit, deflection of the incident light beam at a different series of angles can be achieved, so that the control processing unit 130 can be used to control the optical phased array subunit 112 to achieve scanning of the incident light beam in the first plane.

Illustratively, the MEMS scanning mirror unit 113 includes a single-axis MEMS scanning mirror, and the scanning angle of the single-axis MEMS scanning mirror is large, and the scanning frequency can reach tens of KHz, which is beneficial to realizing high-speed scanning of the laser radar 10. In addition, since the MEMS scanning mirror unit 113 does not need to be mechanically driven, it has less mechanical wear and long life.

Illustratively, the rotation of the MEMS scanning mirror unit 113 may be understood as the MEMS scanning mirror unit 113 vibrating at a high speed by a driving force, and the current vibration position is deflected from the last vibration position by a preset angle, thereby achieving the rotation thereof.

The laser radar 10 adopts an optical phased array technology, and realizes the scanning of an incident beam in a first plane under the conditions of non-mechanical rotation and non-mechanical vibration; meanwhile, the laser radar 10 adopts the MEMS scanning mirror unit 113, the optical phased array subunit 112 and the MEMS scanning mirror unit 113 are low in driving voltage, and no macroscopic mechanical rotating part exists, so that the service life of the laser radar is prolonged. Meanwhile, the sizes of the optical phased array subunit 112 and the MEMS scanning mirror unit 113 are small, so that the overall size of the laser radar 10 is reduced, the laser radar 10 is easier to integrate and design, and the requirements of modern measurement technologies are met.

In addition, the laser radar 10 integrates an optical phased array technology and a MEMS scanning mirror, and has high scanning precision and high scanning speed.

Optionally, the first plane is perpendicular to the second plane.

Illustratively, with continued reference to FIG. 2, the first plane is a vertical plane and the second plane is a horizontal plane. The scanning of the beam at four angles (1, 2, 3, 4) in the vertical direction is shown only by way of example in fig. 2. The vertical incident beam is incident on the single-axis MEMS scanning mirror (i.e., MEMS scanning mirror unit 113), and the positions where the beams of different angles are incident on the single-axis MEMS scanning mirror are different; the incident beams 1, 2, 3, 4 present four circular spots on the single axis MEMS scanning mirror. The control processing unit controls the vibration frequency and the vibration direction of the single-axis MEMS scanning mirror to realize the scanning of the incident beam in the horizontal direction, namely to form a detection beam. The single axis MEMS scanning mirror is only exemplarily shown in fig. 2 rotated from the first position 1131 to the second position 1132, where the light beam 1 is deflected to 1', the light beam 2 is deflected to 2', the light beam 3 is deflected to 3', and the light beam 4 is deflected to 4', that is, the deflection of the light beam in the horizontal direction is achieved. The probe beam is irradiated to the target object, the surface of the target object reflects or diffusely reflects the probe beam, and the reflected echo beam is received by the light receiving unit 120.

It should be noted that fig. 2 only exemplarily shows four probe beams and four corresponding echo beams, which are only partial beams within the scanning range of the laser radar, and do not constitute a limitation on the laser radar 10 provided by the embodiment of the present invention.

It should be noted that, the included angle between the first plane and the second plane may also be set according to the actual detection requirement of the laser radar 10, and the embodiment of the present invention does not limit this.

Optionally, the light source subunit 111 comprises a laser.

With such arrangement, the overall power consumption of the laser radar 10 is lower than that of a multi-line mechanical rotating laser radar; and the overall structure of the laser radar 10 is simple, which is beneficial to reducing the overall design and manufacturing cost of the laser radar 10.

Illustratively, the laser may be a laser diode, a fiber laser, a gas laser, a solid state laser, or other types of lasers known to those skilled in the art; the laser can be a single-wavelength output laser or a multi-wavelength output laser; the laser output by the laser can be polarized light or unpolarized light; the laser output mode of the laser can be continuous output or pulse output; above, all can set up according to laser radar 10's actual demand, the embodiment of the utility model provides a do not limit to this.

It should be noted that the number of lasers in the light source subunit 111 can also be set according to the actual requirement of the laser radar 10, and may be 2 or more, which is not limited in the embodiment of the present invention.

Optionally, fig. 3 is a schematic structural diagram of another laser radar provided in the embodiment of the present invention. Referring to fig. 2 and 3, light emitting unit 110 further includes a collimating subunit 114, and collimating subunit 114 is located in the optical path of light source subunit 111 and optical phased-array subunit 112; the collimating subunit 114 is configured to collimate the incident light beam emitted by the light source subunit 111, and irradiate the collimated incident light beam to the optical phased array subunit 112.

The light beam emitted by the light source subunit 111 is a divergent light beam, and the collimation subunit 114 collimates the divergent light beam emitted by the light source subunit 111 to form a parallel light beam which is then irradiated to the incident surface of the optical phased array subunit 112, so that energy loss can be avoided, and the signal intensity of the detection light beam emitted by the light emitting unit 110 can be improved.

Illustratively, the collimating sub-unit 114 may include a cylindrical mirror, a collimating lens, and other optical elements known to those skilled in the art.

It should be noted that, when the light source subunit 111 integrates the light beam collimating function therein, it is not necessary to provide a collimating subunit.

Optionally, optical phased-array subunit 112 includes an optical waveguide array; the control processing unit 130 sequentially provides preset voltages to the optical waveguide array; the optical waveguide array deflects the incident beam by a preset angle according to the sequentially received preset voltage.

The preset angle can be understood as an angle at which the optical waveguide array deflects the incident beam under a certain preset voltage, and the incident beam can be deflected by a series of preset angles by applying a series of voltages to the optical waveguide array, so that a one-dimensional scanning beam with a preset scanning angle range on the first plane is formed.

Because the scanning speed of the light beams of the optical waveguide array is high and the scanning frequency can reach the MHz magnitude, the laser radar 10 can realize high angular resolution; meanwhile, the driving voltage of the optical waveguide array is low, which is beneficial to reducing the overall power consumption of the laser radar 10.

Exemplarily, fig. 4 is a schematic structural diagram of an optical waveguide array in a laser radar according to an embodiment of the present invention. Referring to fig. 4, the optical waveguide array includes an electrode layer 410 and an optical waveguide layer 420 formed on a substrate 400 and alternately stacked; wherein, the electrode layer 410 can also be called as cladding layer 410, and the optical waveguide layer 420 can also be called as core layer 420; one optical waveguide layer 420 and one electrode layer 410 correspond to one phase modulation unit. The control processing unit 130 applies a predetermined potential to the electrode layer 410, so as to generate a corresponding potential difference (i.e. voltage) in each waveguide layer 420, and each phase modulation unit generates a corresponding phase delay through the electro-optical effect of the crystals in the optical waveguide layer 420, thereby changing the phase distribution of the incident light beam 30 on the exit surface of the optical waveguide array, and thus realizing the light beam deflection in a first plane (e.g. a vertical plane determined by the first direction X and the third direction Z).

It should be noted that a plane defined by the second direction Y and the third direction Z is a horizontal plane, a plane defined by the first direction X and the second direction Y is an incident plane of the incident beam 30 on the optical waveguide array, and the size of the spot of the incident beam 30 incident on the optical waveguide array is exemplarily shown by a bold dashed box in fig. 4. Illustratively, the size of the incident beam 30 is on the order of micrometers (μm).

It should be noted that fig. 4 only shows the optical waveguide array including four electrode layers 410 and three optical waveguide layers 420 by way of example, but does not constitute a limitation to the optical waveguide array provided by the embodiments of the present invention. In other embodiments, the number of layers of the electrode layer 410 and the optical waveguide layer 420 in the optical waveguide array may be set according to actual requirements of the laser radar 10, which is not limited by the embodiment of the present invention.

Optionally, the control processing unit 130 provides different preset voltages to the optical waveguide array within a preset scanning time, so that the optical waveguide array deflects by the incident light beam by different preset angles according to the different preset voltages to form a one-dimensional light beam.

That is, by controlling the processing unit 130 to apply different combinations of voltages to the optical waveguide array, scanning of the optical beam in the vertical plane can be achieved.

It should be noted that the preset voltage corresponds to a voltage difference applied to each optical waveguide layer 420. Because the restriction of the environmental condition and the technological parameter of the actual manufacture process of optical waveguide array, the physical properties (mainly refer to the electro-optic effect) of every layer of optical waveguide layer 420 is not identical, therefore should predetermine the voltage and the actual physical properties setting of optical waveguide layer 420 according to the theory, the embodiment of the utility model provides a do not limit to its specific numerical value.

Optionally, the preset voltage is less than or equal to 10V, and the preset scanning angle is within a range of ± 10 °.

In this way, scanning within an angle variation range of 20 ° in the first plane is advantageously achieved at a lower driving voltage.

Optionally, the optical waveguide array is an AlGaAs optical waveguide array or a silicon-based optical waveguide array.

Illustratively, AlGaAs crystals are transparent to near infrared wavelengths, and a desired refractive index of the optical waveguide array can be obtained by controlling the composition of Al. The response time of the optical phased array subunit formed by utilizing the AlGaAs optical waveguide array is in ns order.

Illustratively, AlGaAs optical waveguide arrays can be fabricated by Metal-organic Chemical Vapor Deposition (MOCVD), with the substrate material being GaAs and the core material being AlGaAs. MOCVD is a chemical vapor deposition process that utilizes metal organic compounds as source materials. MOCVD uses organic compounds of III group and II group elements and hydrides of V group and VI group elements as crystal growth source materials, and carries out vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow thin layer single crystal materials of various III-V main group and II-VI sub group compound semiconductors and multi-element solid solutions thereof.

It should be noted that, other ways known to those skilled in the art may also be adopted to form the optical waveguide array, and the optical phased array subunit may also include other types of optical phased arrays known to those skilled in the art, for example, a lithium niobate crystal phased array, a liquid crystal phased array, or a piezoelectric ceramic phased array, which is not limited by the embodiment of the present invention.

Optionally, fig. 5 is a schematic structural diagram of another laser radar provided by an embodiment of the present invention, and fig. 6 is a schematic structural diagram of another laser radar provided by an embodiment of the present invention. Referring to fig. 5 and 6, or referring to fig. 2 and 5, the light receiving unit 120 includes a receiving lens subunit 121 and an array detection subunit 122 sequentially arranged along the propagation direction of light, the array detection subunit 122 being electrically connected to the control processing unit 130; the receiving mirror unit 121 is used for receiving the echo light beam and focusing the echo light beam to the array detection subunit 122; the array detection subunit 122 is configured to convert the received echo light beam into an electrical signal, and transmit the electrical signal to the control processing unit 130.

Wherein, the echo light beam is received by the receiving lens subunit 121 and focused to the array detection subunit 122, and the array detection subunit 122 converts the optical signal of the echo light beam into an electrical signal and transmits the electrical signal to the control processing unit 130; the control processing unit 130 amplifies the electrical signal to finally obtain information such as distance, direction, height, speed, etc. of the target object.

For example, the receiving lens subunit 121 may include a spherical lens group or an aspherical lens group, and the focusing of the echo beam to the array detection subunit 122 may be achieved.

Optionally, the array detection subunit 122 includes a photon detector.

Illustratively, the photon detector may be a plurality of Avalanche Photodiodes (APDs) arranged in an array, and the arrangement is such that the volume of the array detection subunit 122 is reduced.

The array detection subunit 122 may also be a single large-area APD, a focal plane array detector, a single-point or array silicon photomultiplier (MPPC) detector, or other types of array detectors known to those skilled in the art, which is not limited by the embodiments of the present invention.

Alternatively, the control processing unit 130 determines the relevant information of the target object 20 by using at least one of a time-of-flight method, a phase method, and a frequency modulated continuous wave method.

Illustratively, the Time of Flight (TOF) method determines position information of the target object 20 by calculating a Time difference of laser pulses.

Illustratively, the phase method determines the distance of the target object 20 by calculating the phase difference between the probe beam and the echo beam.

Illustratively, Frequency Modulated Continuous Wave (FMCW) determines the distance of the target object 20 by calculating the Frequency difference between the probe beam and the echo beam.

It should be noted that the control processing unit 130 may also determine the related information of the target object 10 by other methods known to those skilled in the art, which is not limited by the embodiment of the present invention.

The embodiment of the utility model provides a laser radar 10 adopts single laser instrument as the light source for three-dimensional scanning laser radar, realizes the scanning of vertical direction through optics phased array technique, uses unipolar MEMS scanning mirror to realize the scanning of horizontal direction. A laser in the laser radar 10 is lighted to emit an incident beam, the incident beam enters the optical waveguide array through a collimating subunit (also called as a transmitting collimating system), and a series of voltage data is loaded to each phase modulation unit in the optical waveguide array through the control processing unit to realize beam deflection in the vertical direction; and the light beam is reflected by the single-axis MEMS scanning mirror, and the single-axis MEMS scanning mirror vibrates at high speed at the moment, so that multilayer scanning can be realized. The detection light beam (also called as scanning light beam) is reflected by one or more objects in space to form a reflected light beam (i.e. an echo light beam), the echo light beam is focused to the array detector (i.e. the array detection subunit) through the receiving lens group (i.e. the receiving lens unit), the array detection subunit converts the optical signal of the echo light beam into an electric signal, and the electric signal is processed by the control processing system to obtain the distance and direction information of the target object, so as to generate the three-dimensional point cloud picture. The single laser is used as a light source, the optical waveguide array with low driving voltage and the single-axis MEMS scanning mirror are used, so that the power consumption of the whole laser radar is reduced, and the size of the laser radar 10 is reduced; the optical phased array subunit and the MEMS scanning mirror unit have high scanning precision and fast response time, and can effectively improve the angular resolution and the scanning frequency compared with a multi-line mechanical rotating laser radar, a laser radar based on the rotation or torsion of a reflector or a laser radar based on a prism scanning technology; macroscopic rotating parts are not needed, mechanical abrasion does not exist, and the service life of the laser radar 10 is prolonged.

It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.

Claims

1. A lidar, comprising: the device comprises a light emitting unit, a light receiving unit and a control processing unit;

wherein the first plane intersects the second plane.

2. The lidar of claim 1, wherein the first plane is perpendicular to the second plane.

3. The lidar of claim 1, wherein the light transmitting unit further comprises a collimating subunit located in the optical path of the light source subunit and the optical phased array subunit;

4. The lidar of claim 1, wherein the light source subunit comprises a laser.

5. The lidar of claim 1, wherein the optical phased array subunit comprises an optical waveguide array;

6. The lidar of claim 5, wherein the control processing unit provides different preset voltages to the optical waveguide array within a preset scanning time, so that the optical waveguide array deflects the incident beam by different preset angles according to the different preset voltages to form the one-dimensional beam.

7. Lidar according to claim 6, wherein the predetermined voltage is less than or equal to 10V and the predetermined scanning angle is within ± 10 °.

8. Lidar according to claim 5, wherein the optical waveguide array is an AlGaAs optical waveguide array or a silicon-based optical waveguide array.

9. The lidar of claim 1, wherein the light receiving unit comprises a receiving lens subunit and an array detection subunit which are arranged in sequence along the propagation direction of light, the array detection subunit being electrically connected to the control processing unit;

10. The lidar of claim 9, wherein the array detection subunit comprises a photon detector.

11. The lidar of claim 1, wherein the control processing unit determines the information about the target object using at least one of a time-of-flight method, a phase method, and a frequency modulated continuous wave method.