CN113206030B - Adjusting device of temperature measuring device - Google Patents
Adjusting device of temperature measuring device Download PDFInfo
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- CN113206030B CN113206030B CN202110504939.1A CN202110504939A CN113206030B CN 113206030 B CN113206030 B CN 113206030B CN 202110504939 A CN202110504939 A CN 202110504939A CN 113206030 B CN113206030 B CN 113206030B
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- bearing piece
- adjusting
- temperature measuring
- measuring device
- bearing
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- 238000000034 method Methods 0.000 claims abstract description 16
- 230000008569 process Effects 0.000 claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 6
- 230000007704 transition Effects 0.000 claims description 22
- 238000005096 rolling process Methods 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 10
- 230000005489 elastic deformation Effects 0.000 claims description 6
- 239000000969 carrier Substances 0.000 claims description 3
- 238000009529 body temperature measurement Methods 0.000 claims 3
- 239000013078 crystal Substances 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000276425 Xiphophorus maculatus Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention provides an adjusting device of a temperature measuring device, which is used in semiconductor process equipment and comprises a first bearing piece, a second bearing piece and an adjusting component, wherein the first bearing piece is connected with the temperature measuring device and is used for bearing the temperature measuring device; the second bearing piece is positioned below the first bearing piece and is arranged opposite to the first bearing piece; the adjusting assembly is arranged between the first bearing piece and the second bearing piece, at least one adjusting knob is arranged on the adjusting assembly, and the adjusting assembly is used for adjusting the inclination direction of the first bearing piece relative to the second bearing piece by rotating the adjusting knob. The adjusting device of the temperature measuring device can simply, conveniently and efficiently adjust the temperature measuring device, so that the temperature measuring device can incline towards different directions.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an adjusting device of a temperature measuring device.
Background
Silicon carbide (SiC) single crystals have excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, extremely high chemical stability, etc., and can be used for manufacturing high-frequency, high-power electronic devices and optoelectronic devices operating under high temperature and strong radiation conditions, and have great application value in the fields of national defense, industrial production, power supply and power transformation. In the growth process of silicon carbide crystals, a temperature measuring device is required to accurately monitor the temperature of the crystals for a long time, and different monitoring ranges are regulated at different stages of crystal growth, so that the distribution of a thermal field is regulated in time, and the growth process of the crystals is ensured to be uniform and stable.
The conventional adjusting device of the temperature measuring device 38 adjusts different monitoring ranges at different stages of crystal growth by tilting the temperature measuring device 38 in different directions so that the temperature measuring beam emitted by the temperature measuring device 38 irradiates different ranges. As shown in fig. 10 and 11, a conventional adjusting device includes a base 31, an adjusting plate 32, a fixing frame 33, four adjusting studs 34, four adjusting nuts 35, four locking nuts 36 and four springs 37, a temperature measuring device 38 is fixed on the adjusting plate 32 by the fixing frame 33, the bottom ends of the adjusting studs 34 are screwed into threaded holes of the base 31, the top ends penetrate through the adjusting plate 32, and the four adjusting studs 34 are used for supporting the adjusting plate 32 and the temperature measuring device 38 fixed on the adjusting plate 32. When the monitoring range of the temperature measuring device 38 needs to be adjusted, after the direction in which the temperature measuring device 38 needs to be inclined is selected, the locking nut 36 in the direction can be firstly loosened, and the corresponding adjusting nut 35 is simultaneously tightened, so that the adjusting nut 35 presses the part of the adjusting plate 32 located in the direction to move downwards, the pitching angle of the temperature measuring device 38 is changed by changing the inclination angle of the adjusting plate 32 in the direction, the detection range of the temperature measuring device 38 is changed accordingly, after the pitching angle of the temperature measuring device 38 is proper, the locking nut 36 is tightened again, the inclination angle of the adjusting plate 32 in the direction is fixed, and then the adjustment is completed.
When the existing adjusting device adjusts the temperature measuring device 38 each time, the tool is required to be used for loosening the locking nut 36, then the tool is required to be used for adjusting the adjusting nut 35, after the adjusting is proper, the tool is required to be used for locking the locking nut 36, the adjusting operation can be completed, the adjusting operation is inconvenient, the adjusting process is quite complicated, when the pitching angle of the temperature measuring device 38 is required to be adjusted to be large, all the locking nuts 36 are required to be loosened, all the adjusting nuts are required to be adjusted, after the adjusting is proper, all the locking nuts 36 are required to be locked, the adjusting can be completed, in addition, after the adjusting is completed, if the adjusting is not accurate, the adjusting is required to be repeated, the disassembling device is repeated, so that the adjusting operation is more inconvenient, and the adjusting process is more complicated.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides an adjusting device of a temperature measuring device, which can simply, conveniently and efficiently adjust the temperature measuring device to enable the temperature measuring device to incline towards different directions.
In order to achieve the object of the invention, an adjusting device of a temperature measuring device is provided, which is used in semiconductor process equipment and comprises a first bearing piece, a second bearing piece and an adjusting component, wherein,
the first bearing piece is connected with the temperature measuring device and used for bearing the temperature measuring device; the second bearing piece is positioned below the first bearing piece and is arranged opposite to the first bearing piece;
the adjusting assembly is arranged between the first bearing piece and the second bearing piece, at least one adjusting knob is arranged on the adjusting assembly, and the adjusting assembly is used for adjusting the inclination direction of the first bearing piece relative to the second bearing piece by rotating the adjusting knob.
Optionally, the adjusting assembly comprises two adjusting knobs, a supporting member and an elastic connecting member, wherein,
the two ends of the elastic connecting piece are respectively and fixedly connected to the opposite surfaces of the first bearing piece and the second bearing piece, and are used for generating elastic deformation to support the first bearing piece when the adjusting knob adjusts the inclination direction of the first bearing piece relative to the second bearing piece;
one surface of the adjusting knob, which faces the second bearing piece, is fixed on the second bearing piece, and the surface of the adjusting knob, which faces the first bearing piece, is in rolling contact with the first bearing piece;
the supporting piece is in rolling contact with two opposite surfaces of the second bearing piece and the first bearing piece respectively;
the elastic connecting piece is arranged in the middle area between the first bearing piece and the second bearing piece, and the two adjusting knobs and the supporting pieces are distributed around the elastic connecting piece at intervals.
Optionally, the adjusting knob comprises a ball, a roller and a rotating shaft; wherein,
the second bearing piece is provided with a containing hole for the rotating shaft to be inserted into, the periphery of the rotating shaft is provided with external threads, and the containing hole is internally provided with internal threads matched with the external threads;
the roller is arranged on the rotating shaft, the edge of the roller protrudes relative to the edges of the first bearing piece and the second bearing piece, and the rotating shaft can be driven to rotate in the accommodating hole by the rotation of the roller, so that the rotating shaft extends into the accommodating hole or extends out of the accommodating hole;
the ball is arranged on one surface of the roller facing the first bearing piece, and the ball is used for making rolling contact with the surface of the first bearing piece.
Optionally, the surface of the first bearing member facing the second bearing member is provided with a receiving structure in a region corresponding to two adjusting knobs, and the receiving structure is used for providing a rotation space for the corresponding adjusting knobs.
Optionally, the support comprises a rotor and a base, wherein,
the seat body is arranged on the second bearing piece, and a first accommodating groove for accommodating the rotating body is formed in the seat body; a second accommodating groove for accommodating the rotator is formed in one surface of the first bearing piece, which faces the second bearing piece; the second accommodating groove is arranged corresponding to the first accommodating groove;
the rotator is rotatably disposed in the first and second receiving grooves to make rolling contact with the first and second carriers when the inclination direction of the first carrier with respect to the second carrier is changed.
Optionally, the elastic connection piece comprises a spring plate, and the spring plate comprises a first connection part, a second connection part and a transition part; wherein,
the first connecting part is connected with the first bearing piece, the second connecting part is connected with the second bearing piece, and the transition part is respectively connected with the first connecting part and the second connecting part;
the first connecting portion and the second connecting portion are arranged in parallel, and the transition portion is obliquely arranged relative to the first connecting portion and the second connecting portion.
Optionally, the spring plate is provided with a plurality of through holes.
Optionally, the transition portion is inclined at an angle of 3 ° to 20 ° relative to the first and second connection portions.
Optionally, the first bearing member and the second bearing member are both platy, temperature measuring device bears in the first bearing member deviates from on the one side of second bearing member, first bearing member with the second bearing member is provided with first light transmission structure and second light transmission structure respectively, first light transmission structure with the second light transmission structure corresponds the setting, is used for the confession temperature measuring light beam transmission of temperature measuring device transmission.
Optionally, a third light-transmitting structure is disposed on the transition portion, and the third light-transmitting structure, the first light-transmitting structure and the second light-transmitting structure are disposed corresponding to each other, so that the temperature measuring light beam emitted by the temperature measuring device can be transmitted.
The invention has the following beneficial effects:
according to the adjusting device of the temperature measuring device, the adjusting knob arranged between the first bearing piece and the second bearing piece is rotated to adjust the inclination direction of the first bearing piece relative to the second bearing piece, and the first bearing piece is connected with the temperature measuring device to bear the temperature measuring device, so that the inclination direction of the temperature measuring device can be adjusted by adjusting the inclination direction of the first bearing piece relative to the second bearing piece, the temperature measuring device can be inclined in different directions, and the adjusting component is arranged between the first bearing piece and the second bearing piece, so that in the process of adjusting the inclination direction of the temperature measuring device, the adjusting component only can apply upward supporting force to the first bearing piece, but can not apply downward pressure to the first bearing piece, and can not fix the first bearing piece by means of downward pressure, and therefore, in the process of adjusting the inclination direction of the first bearing piece relative to the second bearing piece, the adjusting component can not cause inclination interference to the first bearing piece, the inclination direction of the first bearing piece relative to the second bearing piece can be adjusted, and the temperature measuring device can be adjusted in different directions, and the temperature measuring device can be adjusted simply and conveniently.
Drawings
FIG. 1 is a schematic diagram of a temperature measuring device carried by an adjusting device of the temperature measuring device according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a second bearing member of an adjusting device of a temperature measuring device and a first adjusting member, a second adjusting member, a supporting member and an elastic connecting member arranged on the second bearing member according to an embodiment of the present invention;
FIG. 4 is a schematic structural view of a first adjusting member and a second adjusting member of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a second carrier of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 6 is a schematic structural view of a first carrier of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a structure in which a first accommodating groove and a second accommodating groove of an adjusting device of a temperature measuring device accommodate a rotator;
FIG. 8 is a schematic structural view of an elastic connection member of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of an elastic connection member and an opening thereof of an adjusting device of a temperature measuring device according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of an adjusting device of a temperature measuring device in the prior art;
FIG. 11 is a schematic view of a part of a temperature measuring device according to the prior art;
reference numerals illustrate:
11-a first carrier; 111-a first light-transmitting structure; 112-first connection holes; 113-a second receiving groove; 114-a containment structure; 12-a second carrier; 121-a receiving hole; 122-a second light transmissive structure; 13-a support; 131-a base; 132-a rotor; 133-a first receiving groove; 14-elastic connection; 141-a first connection; 142-a second connection; 143-transition; 144-through holes; 145-a third light transmissive structure; 146-first mounting holes; 147-second mounting holes; 17-an adjusting knob; 171-a roller; 172-rotating shaft; 173-ball; 18-a clamping member; 19-pin shafts; 21-a temperature measuring device; 31-a base; 32-adjusting plates; 33-fixing frame; 34-adjusting the stud; 35-adjusting the nut; 36-locking nut; 37-springs; 38-a temperature measuring device.
Detailed Description
In order to make the technical scheme of the present invention better understood by those skilled in the art, the following describes in detail an adjusting device of the temperature measuring device provided by the present invention with reference to the accompanying drawings.
As shown in fig. 1, the present embodiment provides an adjusting device of a temperature measuring device 21, which is used in semiconductor process equipment, and includes a first bearing member 11, a second bearing member 12 and an adjusting component, wherein the first bearing member 11 is connected with the temperature measuring device 21, and is used for bearing the temperature measuring device 21; the second bearing piece 12 is positioned below the first bearing piece 11 and is arranged opposite to the first bearing piece 11; the adjusting assembly is arranged between the first bearing piece 11 and the second bearing piece 12, and at least one adjusting knob 17 is arranged on the adjusting assembly, and the adjusting assembly is used for adjusting the inclination direction of the first bearing piece 11 relative to the second bearing piece 12 by rotating the adjusting knob 17.
According to the adjusting device of the temperature measuring device 21 provided by the embodiment of the invention, the adjusting knob 17 arranged between the first bearing piece 11 and the second bearing piece 12 is rotated to adjust the inclination direction of the first bearing piece 11 relative to the second bearing piece 12, and the temperature measuring device 21 is borne by the first bearing piece 11 and the temperature measuring device 21, so that the inclination direction of the temperature measuring device 21 can be adjusted by adjusting the inclination direction of the first bearing piece 11 relative to the second bearing piece 12, the temperature measuring device 21 can be inclined in different directions, and the adjusting component is arranged between the first bearing piece 11 and the second bearing piece 12, so that in the process of adjusting the inclination direction of the temperature measuring device 21, the adjusting component only can apply upward supporting force to the first bearing piece 11, but can not apply downward pressure to the first bearing piece 11, and can not fix the first bearing piece 11 by means of downward pressure, and therefore, in the process of adjusting the inclination direction of the first bearing piece 11 relative to the second bearing piece 12, the adjusting component can not cause interference to the inclination direction of the first bearing piece 11, and the temperature measuring device 21 can be adjusted in the same direction simply and conveniently.
As shown in fig. 2 and 3, in a preferred embodiment of the present invention, the adjusting assembly may include two adjusting knobs 17, a supporting member 13 and an elastic connecting member 14, wherein both ends of the elastic connecting member 14 are fixedly connected to opposite surfaces of the first bearing member 11 and the second bearing member 12, respectively, and are used for supporting the first bearing member 11 by elastic deformation when the adjusting knobs 17 adjust the tilting direction of the first bearing member 11 relative to the second bearing member 12; the side of the adjusting knob 17 facing the second bearing member 12 is fixed on the second bearing member 12, and the side facing the first bearing member 11 is in rolling contact with the first bearing member 11; the supporting piece 13 is in rolling contact with two opposite surfaces of the second bearing piece 12 and the first bearing piece 11 respectively; the elastic connecting piece 14 is arranged in the middle area between the first bearing piece 11 and the second bearing piece 12, and the two adjusting knobs 17 and the supporting pieces 13 are distributed around the elastic connecting piece 14 at intervals.
Specifically, the adjusting device of the temperature measuring device 21 provided in the embodiment of the present invention will be described by taking the example that the front, rear, left and right of the adjusting device shown in fig. 2, the supporting member 13 and the two adjusting knobs 17 shown in fig. 3 are respectively located at the front, left and right, and the elastic connection member 14 is located at the middle region between the first carrier member 11 and the second carrier member 12. The elastic connection member 14 is located in a middle region between the first carrier 11 and the second carrier 12, one end is fixedly connected with a side of the first carrier 11 opposite to the second carrier 12, and the other end is fixedly connected with a side of the second carrier 12 opposite to the first carrier 11, so that the first carrier 11 is connected with the second carrier 12, that is, the first carrier 11 is connected with the second carrier 12 through the elastic connection member 14, and the elastic connection member 14 can support the first carrier 11 due to elasticity of the elastic connection member 14, and when the rotation adjustment knob 17 adjusts the inclination direction of the first carrier 11 relative to the second carrier 12, the elastic connection member 14 can generate elastic deformation, so that the inclination direction of the first carrier 11 relative to the second carrier 12 can be changed, and the first carrier 11 is supported at the same time. The supporting piece 13 is located at the front side of the elastic connecting piece 14, the two adjusting knobs 17 are respectively located at the left side and the right side of the elastic connecting piece 14, the supporting piece 13 and the two adjusting knobs 17 are arranged at intervals, namely, the elastic connecting piece 14 is arranged in the middle area between the first bearing piece 11 and the second bearing piece 12, and the two adjusting knobs 17 and the supporting piece 13 are distributed around the elastic connecting piece 14 at intervals.
One surface of the adjusting knob 17 facing the second bearing member 12 is fixed on the second bearing member 12, and the surface facing the first bearing member 11 is in rolling contact with the first bearing member 11, so that rolling friction can be formed between the adjusting knob 17 and the first bearing member 11 when the adjusting knob 17 is rotated to adjust the inclination direction of the first bearing member 11 relative to the second bearing member 12, friction force between the adjusting knob 17 and the first bearing member 11 is reduced, abrasion between the adjusting knob 17 and the first bearing member 11 is reduced, and service life of the adjusting device is prolonged. The supporting piece 13 is in rolling contact with two opposite sides of the second bearing piece 12 and the first bearing piece 11 respectively, so that when the rotary adjusting knob 17 is rotated to adjust the inclination direction of the first bearing piece 11 relative to the second bearing piece 12, rolling friction can be formed between the supporting piece 13 and the first bearing piece 11 and the second bearing piece 12 respectively, friction force between the supporting piece 13 and the first bearing piece 11 and the second bearing piece 12 respectively is reduced, abrasion between the supporting piece 13 and the first bearing piece 11 and the second bearing piece 12 respectively is reduced, and service life of the adjusting device is prolonged.
However, the positions of the supporting member 13, the elastic connecting member 14 and the two adjusting knobs 17, and the relative positions of the two adjusting knobs are not limited thereto.
The state of the adjusting device as shown in fig. 2 is a state in which the first carrier 11 is parallel with respect to the second carrier 12, i.e., a state in which the first carrier 11 is not inclined with respect to the second carrier 12. In the process of adjusting the temperature measuring device 21 by means of the adjusting device of the temperature measuring device 21 provided by the embodiment of the invention, when the temperature measuring device 21 needs to be adjusted to incline the temperature measuring device 21 to the right, the left adjusting knob 17 can be adjusted, the height of the adjusting knob 17 is higher than that of the right adjusting knob 17, so that the left adjusting knob 17 corresponding to the first bearing member 11 is raised, or the right adjusting knob 17 can be adjusted, the height of the adjusting knob 17 is lower than that of the left adjusting knob 17, so that the right adjusting knob 17 corresponding to the first bearing member 11 is lowered, and the first bearing member 11 is inclined to the right relative to the second bearing member 12, and then the temperature measuring device 21 can incline to the right, at this time, the first bearing member 11 can be supported by the two adjusting knob 17, the supporting member 13 and the elastic connecting member 14 together.
When it is necessary to adjust the temperature measuring device 21 such that the temperature measuring device 21 is tilted to the left, the right adjusting knob 17 may be adjusted such that the height of the adjusting knob 17 is higher than the height of the left adjusting knob 17 to raise the height of the adjusting knob 17 to the right of the first carrier 11 corresponding thereto, or the left adjusting knob 17 may be adjusted such that the height of the adjusting knob 17 is lower than the height of the right adjusting knob 17 to lower the height of the adjusting knob 17 to the left of the first carrier 11 corresponding thereto, thereby tilting the first carrier 11 to the left with respect to the second carrier 12, and then the temperature measuring device 21 may be tilted to the left, at which time the first carrier 11 may be supported by the two adjusting knobs 17, the supporting member 13 and the elastic connection member 14 together.
When the temperature measuring device 21 needs to be adjusted, the left adjusting knob 17 and the right adjusting knob 17 can be adjusted at the same time to enable the temperature measuring device 21 to incline towards the rear side, the heights of the two adjusting knobs 17 are lower than the heights of the supporting pieces 13 on the front side, so that the heights of the two adjusting knobs 17 on the left side and the right side corresponding to the two adjusting knobs respectively to the first bearing piece 11 are reduced, at the moment, the supporting pieces 13 support the front side of the first bearing piece 11, the elastic connecting pieces 14 can be subjected to the gravity of the first bearing piece 11 and the temperature measuring device 21, the rear side of the first bearing piece 11 can be reduced, the front side is driven to rise, the first bearing piece 11 can incline towards the rear side relative to the second bearing piece 12, and then the temperature measuring device 21 can incline towards the rear side, and at the moment, the first bearing piece 11 can be jointly supported by the two adjusting knobs 17 and the elastic connecting pieces 14.
When the temperature measuring device 21 needs to be adjusted, the left adjusting knob 17 and the right adjusting knob 17 can be adjusted at the same time when the temperature measuring device 21 tilts towards the front side, so that the heights of the two adjusting knobs 17 are higher than the heights of the supporting pieces 13 at the front side, and the two adjusting knobs 17 respectively raise the heights of the first bearing piece 11 at the left side and the right side corresponding to the two adjusting knobs respectively, at this time, the elastic force of the elastic connecting piece 14 can support the first bearing piece 11, and the supporting height of the supporting piece 13 on the front side of the first bearing piece 11 is unchanged, so that the front side of the first bearing piece 11 does not change, and the rear side of the first bearing piece 11 is raised, so that the first bearing piece 11 tilts towards the front side relative to the second bearing piece 12, and then the temperature measuring device 21 can tilt towards the front side, and at this time, the first bearing piece 11 can be jointly supported by the two adjusting knobs 17, the supporting pieces 13 and the elastic connecting piece 14.
As shown in fig. 3 to 5, in a preferred embodiment of the present invention, the adjusting knobs 17 may each include balls 173, rollers 171, and a rotation shaft 172; wherein, the second bearing member 12 is provided with a containing hole 121 into which the rotating shaft 172 is inserted, the periphery of the rotating shaft 172 is provided with external threads (not shown in the figure), the containing hole 121 is provided with internal threads (not shown in the figure) matched with the external threads, the roller 171 is arranged on the rotating shaft 172, the edge of the roller 171 protrudes relative to the edges of the first bearing member 11 and the second bearing member 12, and the rotation of the roller 171 can drive the rotating shaft 172 to rotate in the containing hole 121, so that the rotating shaft 172 extends into the containing hole 121 or extends out of the containing hole 121; the balls 173 are disposed on a surface of the roller 171 facing the first carrier 11, and the balls 173 are configured to make rolling contact with a surface of the first carrier 11.
Since the edges of the roller 171 protrude with respect to the edges of the first carrier 11 and the second carrier 12, the rotation shaft 172 can be directly driven to rotate in the accommodating hole 121 by rotating the roller 171 in the process of adjusting the temperature measuring device 21, and since the outer circumference of the rotation shaft 172 is provided with the external thread and the internal thread matched with the external thread, when the rotation shaft 172 rotates in the accommodating hole 121, the rotation shaft 172 extends into the accommodating hole 121 or extends out of the accommodating hole 121, so that the rotation shaft 172 can descend or ascend with respect to the accommodating hole 121, thereby driving the roller 171 to descend or ascend, driving the first carrier 11 to descend or ascend through the roller 171, and then enabling the height of the position of the first carrier 11 corresponding to the roller 171 to descend or ascend, thereby adjusting the inclination direction of the first carrier 11 with respect to the second carrier 12.
In addition, as shown in fig. 3 and 4, a surface of the roller 171 facing the first carrier 11 is provided with a ball 173 for rolling contact with a surface of the first carrier 11, so when the roller 171 drives the first carrier 11 to descend or ascend, the ball 173 is in rolling contact with a surface of the first carrier 11 facing the roller 171, rather than the surface of the roller 171 facing the roller 171, which directly contacts the surface of the first carrier 11 facing the roller 171, so that rolling friction is formed between the adjusting knob 17 and the first carrier 11, thereby reducing friction force between the adjusting knob 17 and the first carrier 11, reducing abrasion between the adjusting knob 17 and the first carrier 11, and further prolonging service life of the adjusting device.
As shown in fig. 6, in a preferred embodiment of the present invention, a receiving structure 114 may be provided on a surface of the first carrier 11 facing the second carrier 12 in an area corresponding to the two adjustment knobs 17, the receiving structure 114 being used to provide a rotation space for the corresponding adjustment knobs 17.
By means of the accommodation structure 114 accommodating the adjustment knob 17 therein and allowing the adjustment knob 17 to rotate therein, the distance between the first carrier 11 and the second carrier 12 can be reduced, thereby improving the stability of the adjustment device in use.
As shown in fig. 6, the receiving structure 114 may include a counterbore provided at a region corresponding to the two adjustment knobs 17 on a surface of the first carrier 11 facing the second carrier 12, and an inner diameter of the counterbore is larger than an outer diameter of the roller 171.
As shown in fig. 3 and 5-7, in a preferred embodiment of the present invention, the supporting member 13 may include a rotating body 132 and a base 131, wherein the base 131 is disposed on the second carrying member 12, a first accommodating groove 133 accommodating the rotating body 132 is disposed in the base 131, and a second accommodating groove 113 accommodating the rotating body 132 is disposed on a surface of the first carrying member 11 facing the second carrying member 12; the second receiving groove 113 is provided corresponding to the first receiving groove 133; the rotation body 132 is rotatably provided in the first and second accommodation grooves 133 and 113 to make rolling contact with the first and second carriers 11 and 12 when the tilting direction of the first carrier 11 with respect to the second carrier 12 is changed.
When the inclination direction of the first bearing member 11 relative to the second bearing member 12 is changed, the first bearing member 11 generates a force on the rotating body 132 contacting with the surface facing the second bearing member 12, and when the rotating body 132 receives the force generated by the first bearing member 11, the rotating body 132 rotates in the first receiving groove 133 and the second receiving groove 113, so that rolling contact is generated between the rotating body 132 and the first bearing member 11 and the second bearing member 12, friction force between the supporting member 13 and the first bearing member 11 and the second bearing member 12 is reduced, abrasion of the supporting member 13, abrasion of the first bearing member 11 and abrasion of the second bearing member 12 are reduced, and service life of the adjusting device is prolonged.
Moreover, since the rotating body 132 is rotatably disposed in the first accommodating groove 133 and the second accommodating groove 113, and the first accommodating groove 133 and the second accommodating groove 113 are correspondingly disposed, the rotating body 132 can be accommodated between the first accommodating groove 133 and the second accommodating groove 113 by means of the correspondingly disposed first accommodating groove 133 and second accommodating groove 113, and the rotating body 132 is prevented from being separated from the first accommodating groove 133 or the second accommodating groove 113 in the rotating process, so that the use stability of the adjusting device is improved.
Alternatively, the rotator 132 may be a ball.
As shown in fig. 3 and 8, in a preferred embodiment of the present invention, the elastic connection member 14 may include a spring plate including a first connection portion 141, a second connection portion 142, and a transition portion 143, wherein the first connection portion 141 is connected to the first carrier member 11, the second connection portion 142 is connected to the second carrier member 12, and the transition portion 143 is connected to the first connection portion 141 and the second connection portion 142, respectively; the first connection portion 141 and the second connection portion 142 are disposed in parallel, and the transition portion 143 is disposed obliquely with respect to the first connection portion 141 and the second connection portion 142.
By arranging the first connecting portion 141 and the second connecting portion 142 in parallel and connecting the transition portion 143 to the first connecting portion 141 and the second connecting portion 142, respectively, and by arranging the transition portion 143 to be inclined with respect to the first connecting portion 141 and the second connecting portion 142, it is possible to tilt the first carrier 11 to the rear side more easily with respect to the second carrier 12 by the elastic force of the spring plate in a state where the first carrier 11 is parallel to the second carrier 12, that is, in a state where the spring plate has been elastically deformed, and the spring plate has a resilient force at this time, and by such a design, it is possible to tilt the temperature measuring device 21 to the rear side more easily by the resilient force of the spring plate in a process of adjusting the heights of both the two adjusting knobs 17 to be lower than the heights of the front side supports 13 at the same time when it is necessary to adjust the temperature measuring device 21 to the rear side.
As shown in fig. 6 and 9, the first connecting portion 141 is connected to a surface of the first carrier 11 facing the second carrier 12, a first mounting hole 146 may be formed in the first connecting portion 141, a first connecting hole 112 may be formed in the first carrier 11, and a pin (not shown) may be inserted through the first connecting hole 112 and into the first mounting hole 146 to connect the first connecting portion 141 with the first carrier 11.
As shown in fig. 5 and 9, the second connection portion 142 is connected to a surface of the second carrier 12 facing the first carrier 11, a second mounting hole 147 may be formed in the second connection portion 142, a second connection hole may be formed in the second carrier 12, and the second connection portion 142 may be connected to the second carrier 12 by inserting a pin 19 through the second connection hole and into the second mounting hole 147.
In a preferred embodiment of the invention, as shown in fig. 9, the spring plate may be provided with a plurality of through holes 144. In this way, the stress generated when the spring plate generates elastic deformation can be reduced, the elasticity of the spring plate is improved, the spring plate can generate elastic deformation more easily, and the first bearing piece 11 can tilt more easily relative to the second bearing piece 12.
As shown in fig. 9, a through hole 144 is formed at the connection between the first connection portion 141 and the transition portion 143, a through hole 144 is formed at the connection between the second connection portion 142 and the transition portion 143, and a through hole 144 is formed in the transition portion 143.
In a preferred embodiment of the present invention, the transition portion 143 may be inclined at an angle of 3 ° -20 ° with respect to the first and second connection portions 141 and 142.
As shown in fig. 2, 3, 5 and 6, in a preferred embodiment of the present invention, the first carrier 11 and the second carrier 12 may each have a plate shape, the temperature measuring device 21 is carried on a surface of the first carrier 11 facing away from the second carrier 12, the first carrier 11 and the second carrier 12 are respectively provided with a first light-transmitting structure 111 and a second light-transmitting structure 122, and the first light-transmitting structure 111 and the second light-transmitting structure 122 are correspondingly arranged for transmitting the temperature measuring light beam emitted by the temperature measuring device 21.
The temperature measuring device 21 detects the temperature of the object to be detected by emitting a temperature measuring beam to the object to be detected (for example, siC crystal), and since the temperature measuring device 21 is carried on the surface of the first plate-shaped carrying member 11 facing away from the second carrying member 12, in order to avoid shielding the temperature measuring beam emitted by the temperature measuring device 21 by the first plate-shaped carrying member 11, the first and second light-transmitting structures 111 and 122 can be respectively arranged on the first and second carrying members 11 and 12, and the first and second light-transmitting structures 111 and 122 can be correspondingly arranged, so that the temperature measuring beam of the temperature measuring device 21 can be emitted to the object to be detected through the first and second light-transmitting structures 111 and 122.
Alternatively, the first light transmitting structure 111 may include a first light transmitting hole.
Optionally, the second light-transmitting structure 122 may include a second light-transmitting hole.
Alternatively, the temperature measuring device 21 may comprise an infrared thermometer.
As shown in fig. 1, in a preferred embodiment of the present invention, the adjusting device for the temperature measuring device 21 provided in the embodiment of the present invention may further include a clamping member 18, where the clamping member 18 is disposed on the first carrier 11, for clamping the temperature measuring device 21.
As shown in fig. 3 and 9, in a preferred embodiment of the present invention, a third light-transmitting structure 145 may be disposed on the transition portion 143, where the third light-transmitting structure 145 is disposed corresponding to the first light-transmitting structure 111 and the second light-transmitting structure 122, and is used for transmitting the temperature measuring light beam emitted by the temperature measuring device 21. This can avoid the shielding of the temperature measuring beam emitted from the temperature measuring device 21 by the elastic connection member 14, such as a spring plate, so that the temperature measuring beam of the temperature measuring device 21 can be emitted to the object to be detected through the first light-transmitting structure 111, the third light-transmitting structure 145 and the second light-transmitting structure 122.
As shown in fig. 3, the spring plate is disposed in a middle area between the first carrier 11 and the second carrier 12, the first connection portion 141 of the spring plate is connected to a surface of the first carrier 11 facing the second carrier 12, the second connection portion 142 of the spring plate is connected to a surface of the second carrier 12 facing the first carrier 11, the transition portion 143 of the spring plate is disposed between the first light-transmitting structure 111 and the second light-transmitting structure 122, the third light-transmitting structure 145 is disposed on the transition portion 143 and corresponds to the first light-transmitting structure 111 and the second light-transmitting structure 122, and the temperature measuring beam of the temperature measuring device 21 is sequentially transmitted through the first light-transmitting structure 111, the third light-transmitting structure 145 and the second light-transmitting structure 122 to be measured.
Optionally, the third light transmitting structure 145 may include a third light transmitting hole.
In summary, the adjusting device for the temperature measuring device 21 provided by the embodiment of the invention can simply and efficiently adjust the temperature measuring device 21, so that the temperature measuring device 21 can be inclined towards different directions.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but the invention is not limited thereto. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (10)
1. An adjusting device of a temperature measuring device is used in semiconductor process equipment and is characterized by comprising a first bearing piece, a second bearing piece and an adjusting component, wherein,
the first bearing piece is connected with the temperature measuring device and used for bearing the temperature measuring device; the second bearing piece is positioned below the first bearing piece and is arranged opposite to the first bearing piece;
the adjusting assembly is arranged between the first bearing piece and the second bearing piece, at least one adjusting knob is arranged on the adjusting assembly, and the adjusting assembly is used for adjusting the inclination direction of the first bearing piece relative to the second bearing piece by rotating the adjusting knob; and, in addition, the processing unit,
one surface of the adjusting knob, which faces the second bearing piece, is fixed on the second bearing piece, and the surface of the adjusting knob, which faces the first bearing piece, is in rolling contact with the first bearing piece, so that rolling friction is formed between the adjusting knob and the first bearing piece when the adjusting knob adjusts the inclination direction of the first bearing piece relative to the second bearing piece.
2. The device for adjusting a temperature measuring device according to claim 1, wherein the adjusting assembly comprises two of the adjusting knobs, a support member and an elastic connection member, wherein,
the two ends of the elastic connecting piece are respectively and fixedly connected to the opposite surfaces of the first bearing piece and the second bearing piece, and are used for generating elastic deformation to support the first bearing piece when the adjusting knob adjusts the inclination direction of the first bearing piece relative to the second bearing piece;
the supporting piece is in rolling contact with two opposite surfaces of the second bearing piece and the first bearing piece respectively;
the elastic connecting piece is arranged in the middle area between the first bearing piece and the second bearing piece, and the two adjusting knobs and the supporting pieces are distributed around the elastic connecting piece at intervals.
3. The adjustment device of a temperature measurement device of claim 2, wherein the adjustment knob comprises a ball, a roller, and a rotating shaft; wherein,
the second bearing piece is provided with a containing hole for the rotating shaft to be inserted into, the periphery of the rotating shaft is provided with external threads, and the containing hole is internally provided with internal threads matched with the external threads;
the roller is arranged on the rotating shaft, the edge of the roller protrudes relative to the edges of the first bearing piece and the second bearing piece, and the rotating shaft can be driven to rotate in the accommodating hole by the rotation of the roller, so that the rotating shaft extends into the accommodating hole or extends out of the accommodating hole;
the ball is arranged on one surface of the roller facing the first bearing piece, and the ball is used for making rolling contact with the surface of the first bearing piece.
4. The adjustment device of a temperature measuring device according to claim 2, characterized in that the surface of the first carrier facing the second carrier is provided with receiving structures in areas corresponding to two of the adjustment knobs, the receiving structures being adapted to provide a rotational space for the corresponding adjustment knobs.
5. The device for adjusting a temperature measuring device according to claim 2, wherein the supporting member comprises a rotating body and a base body, wherein,
the seat body is arranged on the second bearing piece, and a first accommodating groove for accommodating the rotating body is formed in the seat body; a second accommodating groove for accommodating the rotator is formed in one surface of the first bearing piece, which faces the second bearing piece; the second accommodating groove is arranged corresponding to the first accommodating groove;
the rotator is rotatably disposed in the first and second receiving grooves to make rolling contact with the first and second carriers when the inclination direction of the first carrier with respect to the second carrier is changed.
6. The adjustment device of a temperature measurement device of claim 2, wherein the elastic connection comprises a spring plate comprising a first connection portion, a second connection portion, and a transition portion; wherein,
the first connecting part is connected with the first bearing piece, the second connecting part is connected with the second bearing piece, and the transition part is respectively connected with the first connecting part and the second connecting part;
the first connecting portion and the second connecting portion are arranged in parallel, and the transition portion is obliquely arranged relative to the first connecting portion and the second connecting portion.
7. The device for adjusting a temperature measurement device according to claim 6, wherein the spring plate is provided with a plurality of through holes.
8. The adjustment device of a temperature measuring device according to claim 6, characterized in that the angle of inclination of the transition portion with respect to the first and second connection portions is 3 ° -20 °.
9. The adjusting device of the temperature measuring device according to claim 6, wherein the first bearing member and the second bearing member are both plate-shaped, the temperature measuring device is borne on one surface of the first bearing member, which faces away from the second bearing member, the first bearing member and the second bearing member are respectively provided with a first light transmission structure and a second light transmission structure, and the first light transmission structure and the second light transmission structure are correspondingly arranged and are used for transmitting temperature measuring light beams emitted by the temperature measuring device.
10. The adjusting device of the temperature measuring device according to claim 9, wherein a third light-transmitting structure is arranged on the transition portion, and the third light-transmitting structure is arranged corresponding to the first light-transmitting structure and the second light-transmitting structure, and is used for transmitting a temperature measuring light beam emitted by the temperature measuring device.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110504939.1A CN113206030B (en) | 2021-05-10 | 2021-05-10 | Adjusting device of temperature measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110504939.1A CN113206030B (en) | 2021-05-10 | 2021-05-10 | Adjusting device of temperature measuring device |
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| CN113206030B true CN113206030B (en) | 2024-04-16 |
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| CN208238940U (en) * | 2018-06-19 | 2018-12-14 | 韶山恒升机械工业有限公司 | A kind of temperature measurement of vacuum furnace device of angle adjustable and position |
| WO2019201666A1 (en) * | 2018-04-20 | 2019-10-24 | Spieth-Maschinenelemente Gmbh & Co. Kg | Fixing device |
| CN209638664U (en) * | 2019-01-16 | 2019-11-15 | 博众精工科技股份有限公司 | A kind of WidFin mechanism |
| CN111609936A (en) * | 2020-05-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Temperature measuring device in semiconductor process equipment and semiconductor process equipment |
| CN111911769A (en) * | 2020-06-12 | 2020-11-10 | 珠海广浩捷科技股份有限公司 | Adjusting device |
| CN213091022U (en) * | 2020-09-11 | 2021-04-30 | 深圳市金大智能创新科技有限公司 | Temperature measuring device |
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2021
- 2021-05-10 CN CN202110504939.1A patent/CN113206030B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019201666A1 (en) * | 2018-04-20 | 2019-10-24 | Spieth-Maschinenelemente Gmbh & Co. Kg | Fixing device |
| CN208238940U (en) * | 2018-06-19 | 2018-12-14 | 韶山恒升机械工业有限公司 | A kind of temperature measurement of vacuum furnace device of angle adjustable and position |
| CN209638664U (en) * | 2019-01-16 | 2019-11-15 | 博众精工科技股份有限公司 | A kind of WidFin mechanism |
| CN111609936A (en) * | 2020-05-25 | 2020-09-01 | 北京北方华创微电子装备有限公司 | Temperature measuring device in semiconductor process equipment and semiconductor process equipment |
| CN111911769A (en) * | 2020-06-12 | 2020-11-10 | 珠海广浩捷科技股份有限公司 | Adjusting device |
| CN213091022U (en) * | 2020-09-11 | 2021-04-30 | 深圳市金大智能创新科技有限公司 | Temperature measuring device |
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| CN113206030A (en) | 2021-08-03 |
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