CN221478759U - Adjustment mechanism and mechanical arm transmission device - Google Patents

Abstract

The utility model belongs to the technical field of adjusting mechanisms, and discloses an adjusting mechanism and a mechanical arm transmission device. The adjusting mechanism comprises a base, a supporting seat, a first adjusting component and a second adjusting component. The supporting seat and the base are arranged at intervals; the first adjusting component and the second adjusting component are arranged between the base and the supporting seat, the first adjusting component comprises a first adjusting piece, a flange is arranged on the first adjusting piece, and the flange is used for supporting the supporting seat; the fixed position of the first adjusting piece and the base is adjustable, so that the distance between the base and the supporting seat is adjusted; the second adjusting component comprises a second adjusting piece, an adjusting block and a pressing block, and the second adjusting piece can drive the adjusting block to horizontally move through driving the adjusting block, so that the position of the supporting seat relative to the base in the horizontal direction is adjusted. The mechanical arm transmission device can correct errors of the mounting position of the mechanical arm transmission device through adjusting the position of the supporting seat conveniently and rapidly, and is simple in structure, convenient to mount and use, low in cost and free from electric connection and gas connection.

Description

Adjustment mechanism and mechanical arm transmission device

Technical Field

The utility model relates to the technical field of adjusting mechanisms, in particular to an adjusting mechanism and a mechanical arm transmission device.

Background

The mechanical transmission arm is a motion robot (or an automatic mechanical structure) used for transmitting (or carrying) wafers in the cavity of the semiconductor equipment, and can carry the wafers to different positions in the cavity of the semiconductor equipment, in the process, the mounting accuracy of the mechanical transmission arm can directly influence the picking and placing positions of the wafers, however, in the actual production process, the mounting error of the mechanical transmission arm is unavoidable, and the traditional wafer transmission mechanical arm can only be matched with the calibration mechanical arm by adjusting the positions of other functional modules once being fixedly mounted, so that the difficulty and complexity of adjustment are increased, and the production efficiency is indirectly reduced. Therefore, a convenient and quick adjustment manner is needed to calibrate the installation error of the mechanical transmission arm.

Disclosure of utility model

An object of the present utility model is to provide an adjusting mechanism to achieve a convenient and quick adjustment.

To achieve the purpose, the utility model adopts the following technical scheme: an adjustment mechanism, comprising: the base is provided with a supporting seat which is arranged at intervals with the base; the first adjusting component is arranged between the base and the supporting seat and comprises a first adjusting piece, and a flange is arranged on the first adjusting piece and used for supporting the supporting seat; the fixed positions of the first adjusting piece and the base are adjustable, so that the distance between the base and the supporting seat is adjusted; the second adjusting component is arranged between the base and the supporting seat and comprises a second adjusting piece, an adjusting block and a pressing block, the pressing block is fixedly connected with one side, close to the base, of the supporting seat and can be abutted to the adjusting block, and the second adjusting piece can drive the pressing block to horizontally move through driving the adjusting block, so that the position, relative to the base, of the supporting seat in the horizontal direction is adjusted.

Preferably, one end of the first adjusting member is extended from the supporting seat in a vertical direction, and the other end of the first adjusting member and the base are capable of moving up and down.

Preferably, the device further comprises locking pieces, wherein the locking pieces are arranged at two ends of the first adjusting piece, so that the first adjusting piece is locked on the base, and the supporting seat is tightly pressed on the flange.

Preferably, the first adjusting member includes an adjusting bolt, one end of the adjusting bolt is in threaded connection with the base, and the other end of the adjusting bolt penetrates out of the supporting seat.

Preferably, the first adjustment assembly further comprises a spacer disposed between the flange and the support base.

Preferably, the supporting seat is provided with a via hole, the first adjusting piece penetrates out of the via hole, and the diameter of the via hole is larger than that of the first adjusting piece.

Preferably, the base is provided with a fixing seat, and the second adjusting piece is arranged on the fixing seat in a penetrating manner and is in threaded connection with the fixing seat; the adjusting block is arranged between the supporting seat and the base and is rotationally connected with the second adjusting piece; or the base is provided with a fixed seat, and the second adjusting piece is arranged on the fixed seat in a penetrating way and is rotationally connected with the fixed seat; the adjusting block is arranged between the supporting seat and the base and is in threaded connection with the second adjusting piece.

Preferably, the adjusting block is provided with an adjusting groove, one end of the pressing block stretches into the adjusting groove, a gap is formed between the pressing block and the adjusting groove, and gaps are formed between the adjusting block and the supporting seat and between the adjusting block and the base.

Preferably, the first adjusting components are multiple groups and/or the second adjusting components are multiple groups, one part of the multiple groups of the second adjusting components is used for adjusting the supporting seat along the first horizontal direction, the other part of the multiple groups of the second adjusting components is used for adjusting the supporting seat along the second horizontal direction, and the first horizontal direction and the second horizontal direction are vertically arranged.

Another object of the present utility model is to provide a robot arm transmission device to achieve correction of self-installation errors.

To achieve the purpose, the utility model adopts the following technical scheme: the mechanical arm transmission device comprises the adjusting mechanism and the mechanical transmission arm, wherein the mechanical transmission arm is fixedly connected with the supporting seat, so that the position of the mechanical arm transmission device can be adjusted.

The utility model has the beneficial effects that:

the utility model provides an adjusting mechanism, which is characterized in that a first adjusting component and a second adjusting component are arranged between a base and a supporting seat, the first adjusting component can adjust the distance between the base and a supporting plate, and the second adjusting component can adjust the horizontal position of the supporting seat relative to the base, so that the position of the supporting seat relative to the base in the vertical direction and the horizontal direction can be adjusted.

The utility model also provides a mechanical arm transmission device which comprises the adjusting mechanism and the mechanical transmission arm, wherein the supporting seat is fixedly connected with the mechanical transmission arm, and errors of the installation position of the mechanical transmission arm can be conveniently and rapidly corrected by adjusting the position of the supporting seat.

Drawings

Fig. 1 is a schematic perspective view of a mechanical arm transmission device according to an embodiment of the present utility model;

FIG. 2 is a front view of a robot transport unit in accordance with an embodiment of the present utility model;

FIG. 3 is an enlarged schematic view of the utility model at I of FIG. 2;

FIG. 4 is a top view of a robotic arm transport apparatus according to an embodiment of the utility model;

FIG. 5 is a cross-sectional view taken along line A-A of FIG. 4 in accordance with the present utility model;

FIG. 6 is an enlarged schematic view of FIG. 5 at II in accordance with the present utility model;

FIG. 7 is a cross-sectional view taken along the B-B direction of FIG. 6 in accordance with the present utility model;

fig. 8 is an enlarged schematic view of fig. 7 at III in accordance with the present utility model.

In the figure:

1. A first adjustment assembly; 11. a first adjustment member; 12. a flange; 13. a first lock nut; 14. a second lock nut; 15. a gasket is arranged on the upper part; 16. a lower gasket; 2. a second adjustment assembly; 21. a second adjusting member; 22. an adjusting block; 23. briquetting; 24. pressing a block fixing screw; 3. a mechanical transmission arm; 41. a base; 411. a fixing seat; 412. a fastening screw; 42. and a supporting seat.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

The present utility model provides an adjustment mechanism, as shown in fig. 1-2, comprising: a base 41, a support base 42, the support base 42 being spaced from the base 41; the first adjusting assembly 1 is arranged between the base 41 and the supporting seat 42 and is used for adjusting the distance between the base 41 and the supporting seat 42; the second adjusting assembly 2 is disposed between the base 41 and the support base 42, and is used for adjusting the position of the support base 42 relative to the base 41 in the horizontal direction. The first adjusting assembly 1 disposed between the base 41 and the support base 42 can realize the elevation of the support base 42 in the vertical direction by adjusting the interval between the support base 42 and the base 41; the second adjusting assembly 2, which is disposed between the base 41 and the support base 42, can adjust the position of the support base 42 in the horizontal direction with respect to the base 41. Through the cooperation of first adjusting part 1 and second adjusting part 2 to can adjust the position of supporting seat relative base in vertical direction and horizontal direction, and have simple structure, installation convenient to use, with low costs, need not to connect the technical effect of electric gas.

In some embodiments, as shown in fig. 3, the first adjusting assembly 1 includes a first adjusting member 11, where a flange 12 is disposed on the first adjusting member 11, and the flange 12 is used to support a supporting seat 42; one end of the first adjusting member 11 is penetrated from the supporting seat 42 in the vertical direction, and the other end is connected to the base 41. Specifically, as shown in fig. 6, the first adjusting member 11 includes an adjusting bolt, on which a flange 12 is provided, one end of the adjusting bolt is screwed with the base 41, and the other end thereof passes through the support seat 42.

The adjusting mechanism further comprises locking pieces, the two ends of the first adjusting piece are provided with the locking pieces, so that the first adjusting piece is locked on the base, and the supporting seat is tightly pressed on the flange. Specifically, the locking member includes a first locking nut 13 and a second locking nut 14, the first locking nut 13 is in threaded connection with one end of the adjusting bolt penetrating out of the supporting seat 42, the supporting seat can be pressed against the flange, and one end of the adjusting bolt in threaded connection with the base 41 penetrates out of the base 41 downwards along the vertical direction and can be locked by the second locking nut 14.

In some embodiments, the first adjustment assembly 1 further comprises a spacer arranged between said flange 12 and the support seat 42. Preferably, the spacers include an upper spacer 15 and a lower spacer 16, the upper spacer 15 being disposed between the retaining member and the support base 42, the lower spacer 16 being disposed between the flange 12 and the support base 42. On the one hand, it is possible to provide a shock-absorbing buffer and on the other hand the lower spacer 16 also provides a bearing surface, so that a secure and stable mounting between the support seat 42 and the first adjustment assembly 1 can be ensured.

In order to prevent interference with the first adjusting assembly 1 when the second adjusting assembly 2 adjusts the supporting seat 42 in the horizontal direction, as shown in fig. 5 and 6, the supporting seat 42 is provided with a via hole through which the first adjusting member 11 passes, the diameter of the via hole is larger than that of the first adjusting member 11, and the diameters of the upper gasket 15 and the lower gasket 16 are larger than that of the via hole. It will be appreciated that the adjustable distance of the second adjustment assembly 2 may be selected according to the actual use requirements, and the diameter of the via may be determined according to the adjustable distance of the second adjustment assembly 2, thereby determining the minimum diameter of the via.

In some embodiments, a fixing base 411 is disposed on the base 41, and the fixing base 411 is fixedly connected to the base 41, alternatively, as shown in fig. 3, the fixing base 411 is fixed to the base 41 by a fastening screw 412. As shown in fig. 7 and 8, the second regulating assembly 2 includes: the second adjusting piece 21 is penetrated through the fixed seat 411 and is rotationally connected with the fixed seat 411; the adjusting block 22 is arranged between the supporting seat 42 and the base 41, and is in threaded connection with the second adjusting piece 21; the pressing block 23, the pressing block 23 and the supporting seat 42 are fixedly connected with one side close to the base 41, and can be abutted against the adjusting block 22. Alternatively, the connection relationship between the second adjusting member 21 and the fixing base 411 and the adjusting block 22 may be: the second adjusting piece 21 is arranged on the fixing seat 411 in a penetrating mode and is in threaded connection with the fixing seat 411, and the adjusting block 22 is arranged between the supporting seat 42 and the base 41 and is rotationally connected with the second adjusting piece 21 so that the second adjusting piece can drive the adjusting block. Wherein the fixing seat 411 is provided at an edge of the base 41 such that the second regulating member 21 can be installed between the base 41 and the support plate in a horizontal direction; the pressing block 23 is fixedly connected with the supporting seat 42 through a pressing block 23 fixing screw. As shown in fig. 3 and 8, the adjustment block 22 has an adjustment groove in which opposite side surfaces are open, and the other opposite side surfaces can be respectively abutted against the pressing pieces 23. One end of the pressing block 23 extends into the adjusting groove, a gap is arranged between the pressing block 23 and two side surfaces of the adjusting groove along the adjusting direction of the second adjusting piece 21, and the gap between the pressing block 23 and the two side surfaces of the adjusting groove can be determined according to the distance in the horizontal direction of actual requirements. Gaps are arranged between the adjusting block 22 and the supporting seat 42 and the base 41, and the adjusting block 22 is limited by the pressing block 23 and the base 41 to rotate. When the adjustment block 22 does not participate in the adjustment in the horizontal direction, the second adjustment member 21 is appropriately adjusted so that the adjustment block is not in contact with the base 41, and a friction-free state is maintained. Of course, in other embodiments, the adjustment block 22 may be slidably coupled to the base 41.

In some embodiments, as shown in fig. 1, the first adjusting assemblies 1 are multiple groups, the second adjusting assemblies 2 are multiple groups, and one part of the multiple groups of second adjusting assemblies 2 is used for adjusting the supporting seat 42 along the first horizontal direction, and the other part is used for adjusting the supporting seat 42 along the second horizontal direction, wherein the first horizontal direction and the second horizontal direction are vertically arranged.

The utility model also provides a mechanical arm transmission device which comprises the adjusting mechanism and the mechanical transmission arm 3, wherein the mechanical transmission arm 3 is fixedly connected with the supporting seat 42, for example, the mechanical transmission arm is fixed with the supporting seat 42 through a screw, so that the position of the mechanical transmission arm can be adjusted.

Specifically, in some embodiments, as shown in fig. 4, the first adjusting assemblies 1 are three groups, and are arranged in a triangle around the mechanical transmission arm 3, the second adjusting assemblies 2 are four groups, and are respectively arranged in the middle positions of four sides of the base 41, and two groups of second adjusting assemblies 2 on two opposite sides are oppositely arranged. In other embodiments, the second adjusting assemblies 2 may be arranged in two groups, and each group is disposed at a position intermediate two adjacent sides of the base 41.

The adjusting process of the mechanical transmission arm 3 is as follows:

Taking the adjustment mechanism with three groups of first adjustment assemblies 1 and four groups of second adjustment assemblies 2 as an example, as shown in fig. 3-4, when the position of the mechanical transmission arm 3 in the vertical direction is adjusted, first the first lock nuts 13 and the second lock nuts 14 in the three groups of first adjustment assemblies 1 are loosened, then the adjustment bolts in the groups of first adjustment assemblies 1 are rotated in the same direction successively, the adjustment bolts are in threaded connection with the base 41, the adjustment bolts can vertically move upwards or vertically downwards relative to the base 41, the support seat 42 is supported by the flange 12, so that the support seat 42 can be driven to move upwards or downwards relative to the base 41, and as the mechanical transmission arm 3 is mounted on the support plate, the position of the mechanical transmission arm 3 in the vertical direction can be finally adjusted, and after the adjustment is completed, the first lock nuts 13 and the second lock nuts 14 in the groups of first adjustment assemblies 1 are tightened to keep the current position fixed.

When the position of the mechanical transmission arm 3 in the horizontal direction is adjusted, taking fig. 3 and fig. 4 as an example, when the mechanical transmission arm needs to move in the first horizontal direction, the first lock nuts 13 in the three groups of first adjusting components 1 are unscrewed first, taking the direction shown in fig. 4 as an example, after the first lock nuts 13 are unscrewed, the second adjusting pieces 21 in the right second adjusting component 2 are rotated to adjust the adjusting blocks 22 to the right, so that the gaps between the pressing blocks 23 and the adjusting grooves in the right second adjusting component 2 are at least partially on the right, the right adjusting blocks 22 and the pressing blocks 23 are prevented from interfering when the left second adjusting component 2 is adjusted to the right, and then the right first adjusting pieces 21 are properly rotated, so that the right adjusting blocks 22 are not contacted with the base 41. Then, the second adjusting piece 21 in the left second adjusting component 2 is rotated, so that the adjusting block 22 moves rightwards (along the first horizontal direction), the pressing block 23 is pushed to move rightwards (along the first horizontal direction), the supporting seat 42 moves along the first horizontal direction relative to the base 41, and the position of the mechanical transmission arm 3 in the first horizontal direction can be finally adjusted due to the fact that the mechanical transmission arm 3 is arranged on the supporting plate, and after adjustment is completed, the first locking nuts 13 in each group of first adjusting components 1 are tightened, so that the current position is kept fixed.

If the movement is required to be reversed along the first horizontal direction, the left second adjusting piece 21 is first turned so that the gap between the adjusting groove of the left adjusting block 22 and the pressing block 23 is at least partially on the left side, then the left first adjusting piece 21 is appropriately turned so that the left adjusting block 22 is not contacted with the base 41, then the right second adjusting component 2 is adjusted so that the adjusting block 22 moves leftwards (along the direction opposite to the first horizontal direction), thereby pushing the pressing block 23 to move leftwards (along the direction opposite to the first horizontal direction), the movement of the supporting seat 42 relative to the base 41 along the direction opposite to the first horizontal direction is realized, the position of the mechanical transmission arm 3 in the direction opposite to the first horizontal direction can be finally adjusted due to the fact that the mechanical transmission arm 3 is mounted on the supporting plate, and after the adjustment is completed, the first locking nuts 13 in each group of the first adjusting components 1 are tightened to keep the current position fixed.

When the movement in the second horizontal direction and the reverse direction of the second horizontal direction are required, the specific operation process is the same as the reverse operation in the first horizontal direction and the first horizontal direction, and only the description direction is different, so that the description is not repeated.

It will be appreciated that when adjusting in the first horizontal direction, the pressing blocks 23 of the two sets of second adjusting components 2 in the second horizontal direction move along the first horizontal direction relative to the adjusting grooves, the adjusting grooves are disposed at the opposite side openings in the first horizontal direction, and similarly, when adjusting in the second horizontal direction, the pressing blocks 23 of the two sets of second adjusting components 2 in the first horizontal direction move along the second horizontal direction relative to the adjusting grooves, and the adjusting grooves are disposed at the opposite side openings in the second horizontal direction. Therefore, when being adjusted in either horizontal direction, the adjustment groove in the other horizontal direction does not interfere with the pressing block 23.

In other embodiments, when the second adjusting components 2 are two groups, they are respectively disposed at the middle positions of two adjacent sides of the base 41, no opposite second adjusting components 2 are disposed, and the adjusting block 22 can no longer be provided with an adjusting groove with a larger gap, and when the second adjusting components 2 are adjusted along the first horizontal direction or the second horizontal direction, the adjustment can be implemented by only one group of second adjusting components 2, and the position of the opposite adjusting block 22 does not need to be adjusted in advance.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. An adjustment mechanism, comprising:

a base (41),

The supporting seat (42) is arranged at intervals with the base (41);

The first adjusting assembly (1) is arranged between the base (41) and the supporting seat (42), the first adjusting assembly (1) comprises a first adjusting piece (11), a flange (12) is arranged on the first adjusting piece (11), and the flange (12) is used for supporting the supporting seat (42); the fixed position of the first adjusting piece (11) and the base (41) is adjustable, so that the distance between the base (41) and the supporting seat (42) is adjusted;

The second adjusting component (2) is arranged between the base (41) and the supporting seat (42), the second adjusting component (2) comprises a second adjusting piece (21), an adjusting block (22) and a pressing block (23), the pressing block (23) is fixedly connected with one side, close to the base (41), of the supporting seat (42) and can be abutted to the adjusting block (22), and the second adjusting piece (21) can drive the pressing block (23) to horizontally move through driving the adjusting block (22), so that the position, relative to the base (41), of the supporting seat (42) in the horizontal direction is adjusted.

2. An adjustment mechanism according to claim 1, characterized in that one end of the first adjustment member (11) is passed out of the support seat (42) in a vertical direction, and the other end is movable up and down with respect to the base (41).

3. The adjusting mechanism according to claim 2, further comprising locking members, wherein the locking members are provided at both ends of the first adjusting member (11) so that the first adjusting member (11) is locked to the base (41), and the supporting seat (42) is pressed against the flange (12).

4. An adjustment mechanism according to claim 2, characterized in that the first adjustment member (11) comprises an adjustment bolt, one end of which is screwed with the base (41) and the other end of which passes out of the support seat (42).

5. The adjustment mechanism according to claim 1, characterized in that the first adjustment assembly (1) further comprises a spacer arranged between the flange (12) and the support seat (42).

6. The adjusting mechanism according to claim 1, wherein a via hole is provided in the support base (42), the first adjusting member (11) penetrates through the via hole, and the diameter of the via hole is larger than that of the first adjusting member (11).

7. The adjusting mechanism according to claim 1, wherein a fixed seat (411) is arranged on the base (41), and the second adjusting piece (21) is arranged on the fixed seat (411) in a penetrating manner and is in threaded connection with the fixed seat (411);

The adjusting block (22) is arranged between the supporting seat (42) and the base (41) and is rotationally connected with the second adjusting piece (21);

Or a fixed seat (411) is arranged on the base (41), and the second adjusting piece (21) penetrates through the fixed seat (411) and is connected with the fixed seat (411) in a rotating way;

The adjusting block (22) is arranged between the supporting seat (42) and the base (41) and is in threaded connection with the second adjusting piece (21).

8. The adjusting mechanism according to claim 7, wherein the adjusting block (22) is provided with an adjusting groove, one end of the pressing block (23) extends into the adjusting groove, a gap is arranged between the pressing block (23) and the adjusting groove, and gaps are arranged between the adjusting block (22) and the supporting seat (42) and between the adjusting block and the base (41).

9. The adjusting mechanism according to any one of claims 1-8, wherein the first adjusting assembly (1) is a plurality of groups and/or the second adjusting assembly (2) is a plurality of groups, a part of the plurality of groups of the second adjusting assemblies (2) is used for adjusting the supporting seat (42) along a first horizontal direction, and the other part is used for adjusting the supporting seat (42) along a second horizontal direction, wherein the first horizontal direction and the second horizontal direction are vertically arranged.

10. A mechanical arm transmission device, characterized by comprising the adjusting mechanism according to any one of claims 1-9 and a mechanical transmission arm (3), wherein the mechanical transmission arm (3) is fixedly connected with the supporting seat (42), so that the position of the mechanical transmission arm can be adjusted.