CN113188964A - 微小物检测装置 - Google Patents

微小物检测装置 Download PDF

Info

Publication number
CN113188964A
CN113188964A CN202110474857.7A CN202110474857A CN113188964A CN 113188964 A CN113188964 A CN 113188964A CN 202110474857 A CN202110474857 A CN 202110474857A CN 113188964 A CN113188964 A CN 113188964A
Authority
CN
China
Prior art keywords
light
scattered light
optical system
object detection
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110474857.7A
Other languages
English (en)
Chinese (zh)
Inventor
中井贤也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN113188964A publication Critical patent/CN113188964A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means
    • G01N15/0211Investigating a scatter or diffraction pattern
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/0303Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/49Scattering, i.e. diffuse reflection within a body or fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/49Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/075Investigating concentration of particle suspensions by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0046Investigating dispersion of solids in gas, e.g. smoke
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0053Investigating dispersion of solids in liquids, e.g. trouble
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N2015/0687Investigating concentration of particle suspensions in solutions, e.g. non volatile residue
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434Optical arrangements
    • G01N2015/1452Adjustment of focus; Alignment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486Counting the particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1488Methods for deciding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493Particle size
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1497Particle shape
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • G01N2021/217Measuring depolarisation or comparing polarised and depolarised parts of light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N2021/4792Polarisation of scatter light

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CN202110474857.7A 2015-12-14 2016-12-08 微小物检测装置 Pending CN113188964A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2015243250 2015-12-14
JP2015-243250 2015-12-14
JP2016017780 2016-02-02
JP2016-017780 2016-02-02
CN201680071190.3A CN108369171B (zh) 2015-12-14 2016-12-08 微小物检测装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201680071190.3A Division CN108369171B (zh) 2015-12-14 2016-12-08 微小物检测装置

Publications (1)

Publication Number Publication Date
CN113188964A true CN113188964A (zh) 2021-07-30

Family

ID=59056415

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201680071190.3A Active CN108369171B (zh) 2015-12-14 2016-12-08 微小物检测装置
CN202110474857.7A Pending CN113188964A (zh) 2015-12-14 2016-12-08 微小物检测装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201680071190.3A Active CN108369171B (zh) 2015-12-14 2016-12-08 微小物检测装置

Country Status (5)

Country Link
US (2) US10241043B2 (de)
EP (2) EP3392648B1 (de)
JP (2) JP6542385B2 (de)
CN (2) CN108369171B (de)
WO (1) WO2017104533A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10578537B2 (en) * 2016-03-30 2020-03-03 Sintrol Oy Method for measuring the properties of particles in a medium and a device for measuring the properties of particles in a flue gas
KR102644216B1 (ko) * 2017-01-10 2024-03-05 엘지이노텍 주식회사 입자 센싱 장치
KR102065755B1 (ko) * 2018-04-25 2020-01-13 (주)파이버피아 오염인자 농도 측정 장치 및 방법
WO2019244325A1 (ja) * 2018-06-22 2019-12-26 三菱電機株式会社 粒子検出装置
CN109342300A (zh) * 2018-11-29 2019-02-15 苏州苏信环境科技有限公司 一种光纤型空气粒子计数传感器系统
CN110849817B (zh) * 2019-10-21 2020-11-24 中国科学院大气物理研究所 一种单颗粒物偏振光学性质和光学粒径谱测量系统
US11828696B2 (en) 2020-12-16 2023-11-28 Caterpillar Inc. System and method for processing data from a particle monitoring sensor
CN112630127B (zh) * 2021-03-10 2021-05-28 中国科学院上海高等研究院 一种真空微粒计数器
RU2763682C1 (ru) * 2021-06-09 2021-12-30 Геннадий Евгеньевич Котковский Оптическая система для определения составов аэрозолей на основе люминесцентного анализа аэрозольных частиц
CN113720750B (zh) * 2021-08-31 2023-07-28 北京航空航天大学 一种光学颗粒计数器
KR102388703B1 (ko) * 2021-09-23 2022-04-20 (주)엔아이디에스 생물 입자 및 비생물 입자를 검출하는 센서 장치
KR20230151150A (ko) * 2022-04-22 2023-11-01 삼성전자주식회사 공기조화기 및 그 제어 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60190835A (ja) * 1985-02-22 1985-09-28 Hitachi Ltd 微粒子検出器
JPH0196532A (ja) * 1987-10-07 1989-04-14 Nippon Kagaku Kogyo Kk 光散乱方式による微粒子検出装置
JPH04283648A (ja) * 1991-03-12 1992-10-08 Agency Of Ind Science & Technol 気体中繊維状粒子特性測定方法
CN1985160A (zh) * 2004-07-22 2007-06-20 光屋环球解决方案有限公司 针对颗粒传感器系统的改进设计
CN202092931U (zh) * 2011-05-18 2011-12-28 北京汇丰隆经济技术开发有限公司 一种单光源生物气溶胶粒子检测装置

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3946239A (en) * 1975-01-24 1976-03-23 The United States Of America As Represented By The United Energy Research And Development Administration Ellipsoidal cell flow system
US4188543A (en) * 1978-03-20 1980-02-12 Coulter Electronics, Inc. Ellipsoid radiation collector apparatus and method
US4273443A (en) * 1979-11-21 1981-06-16 Coulter Electronics, Inc. Method and apparatus for measurement of reradiation in particle flow cell systems
JPS6335395Y2 (de) * 1980-02-29 1988-09-20
US4601576A (en) * 1983-12-09 1986-07-22 Tencor Instruments Light collector for optical contaminant and flaw detector
JPS61160048A (ja) * 1985-01-08 1986-07-19 Dan Sangyo Kk 点光源強度検出光学系
EP0627073A1 (de) 1992-02-21 1994-12-07 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Analyse von teilcheneigenschaften
EP0723654B1 (de) 1993-09-27 2007-11-07 Venturedyne Ltd. Verbesserter partikelsensor und vorrichtung zum nachweis eines teilchens
US5767967A (en) * 1997-01-02 1998-06-16 Yufa; Aleksandr L. Method and device for precise counting and measuring the particulates and small bodies
DE19741853A1 (de) * 1997-09-23 1999-03-25 Bosch Gmbh Robert Rauchmelder
GB9721861D0 (en) * 1997-10-15 1997-12-17 Kidde Fire Protection Ltd High sensitivity particle detection
US7126687B2 (en) * 1999-08-09 2006-10-24 The United States Of America As Represented By The Secretary Of The Army Method and instrumentation for determining absorption and morphology of individual airborne particles
US6239873B1 (en) * 2000-11-13 2001-05-29 The United States Of America As Represented By The Secretary Of The Army Apparatus for simultaneous measurement of two polarization states of scattered light
JP4130938B2 (ja) * 2001-09-28 2008-08-13 Hoya株式会社 光ピックアップ用対物光学系
JP3720799B2 (ja) 2002-10-02 2005-11-30 神栄株式会社 花粉センサ
US9441244B2 (en) 2003-06-30 2016-09-13 The Regents Of The University Of California Mutant adeno-associated virus virions and methods of use thereof
US7119899B2 (en) * 2003-07-23 2006-10-10 Lighthouse Worldwide Solutions, Inc Particle sensor system
US7502110B2 (en) * 2004-07-21 2009-03-10 Lighthouse Worldwide Solutions, Inc Design for particle sensor system
CN2729694Y (zh) * 2004-07-30 2005-09-28 中国科学院上海光学精密机械研究所 光散射式尘埃粒子测量仪的光学装置
WO2007063862A1 (ja) 2005-11-29 2007-06-07 Nidec Sankyo Corporation 粒子計数器及びそれを備えた粒子計数装置、粒子計数システム及びその使用方法
JP2007199012A (ja) * 2006-01-30 2007-08-09 Nidec Sankyo Corp 光散乱式粒子計数装置
EP2235736B1 (de) * 2007-12-13 2015-04-01 Azbil Corporation Pathogendetektion durch gleichzeitige grössen-/fluoreszenzmessung
GB0801375D0 (en) * 2008-01-25 2008-03-05 Secr Defence Fluid-borne particle detector
EP2889603B1 (de) * 2012-10-15 2018-08-01 Sony Corporation Vorrichtung zur mikropartikelmessung
WO2015073911A1 (en) * 2013-11-14 2015-05-21 Beckman Coulter, Inc. Flow cytometry optics
DE102013226668A1 (de) * 2013-12-19 2015-06-25 Carl Zeiss Smt Gmbh Verfahren zum Kalibrieren einer Wellenfronterzeugungseinrichtung
JP6688966B2 (ja) * 2015-07-27 2020-04-28 パナソニックIpマネジメント株式会社 粒子検出センサ
CN205844139U (zh) * 2016-04-20 2016-12-28 夏普株式会社 颗粒物浓度检测设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60190835A (ja) * 1985-02-22 1985-09-28 Hitachi Ltd 微粒子検出器
JPH0196532A (ja) * 1987-10-07 1989-04-14 Nippon Kagaku Kogyo Kk 光散乱方式による微粒子検出装置
JPH04283648A (ja) * 1991-03-12 1992-10-08 Agency Of Ind Science & Technol 気体中繊維状粒子特性測定方法
CN1985160A (zh) * 2004-07-22 2007-06-20 光屋环球解决方案有限公司 针对颗粒传感器系统的改进设计
CN202092931U (zh) * 2011-05-18 2011-12-28 北京汇丰隆经济技术开发有限公司 一种单光源生物气溶胶粒子检测装置

Also Published As

Publication number Publication date
EP3392648A1 (de) 2018-10-24
JPWO2017104533A1 (ja) 2018-05-24
CN108369171B (zh) 2021-06-01
JP6932156B2 (ja) 2021-09-08
EP3392648B1 (de) 2020-10-07
CN108369171A (zh) 2018-08-03
EP3761008B1 (de) 2023-06-14
EP3761008A1 (de) 2021-01-06
WO2017104533A1 (ja) 2017-06-22
JP6542385B2 (ja) 2019-07-10
US10670522B2 (en) 2020-06-02
JP2019203897A (ja) 2019-11-28
EP3392648A4 (de) 2018-10-24
US20190162661A1 (en) 2019-05-30
US10241043B2 (en) 2019-03-26
US20180321147A1 (en) 2018-11-08

Similar Documents

Publication Publication Date Title
CN108369171B (zh) 微小物检测装置
US8427641B2 (en) Compact detector for simultaneous particle size and fluorescence detection
CN110095477B (zh) 测定微尘的分析仪
US9857287B2 (en) Particulate sensor device
JP4817442B2 (ja) 粒子分析装置用光学系、及びそれを用いた粒子分析装置
JP5533055B2 (ja) 光学的測定装置及び光学的測定方法
EP2472248A2 (de) Mikropartikeldetektionsvorrichtung
US7502110B2 (en) Design for particle sensor system
KR101825159B1 (ko) 난반사 감소 기능이 부가된 이종의 반사경이 결합된 미세먼지 및 미생물 검출장치
JP2017138223A (ja) 微小物検出装置
KR101919103B1 (ko) 반사경을 구비하지 않는 광학식 미생물 검출 장치
US9086377B2 (en) Optical system for fluorescence detection and fine particle analyzing apparatus
CN112334755A (zh) 粒子检测装置
JP3436539B2 (ja) 粒子分析のための改良型粒子センサ及び方法
US7119899B2 (en) Particle sensor system
KR20160103285A (ko) 미세 먼지 및 미생물 검출 장치
US20220373477A1 (en) Apparatus for detecting fine dust and microorganisms
JPH05240769A (ja) 粒子計数装置
CN113588499A (zh) 一种气溶胶粒子探测光学系统

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination