CN113168046A - 驱动基板及其制作方法、显示装置 - Google Patents
驱动基板及其制作方法、显示装置 Download PDFInfo
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- CN113168046A CN113168046A CN201980002099.XA CN201980002099A CN113168046A CN 113168046 A CN113168046 A CN 113168046A CN 201980002099 A CN201980002099 A CN 201980002099A CN 113168046 A CN113168046 A CN 113168046A
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- 239000000758 substrate Substances 0.000 title claims abstract description 189
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 230000000149 penetrating effect Effects 0.000 claims abstract description 19
- 239000010949 copper Substances 0.000 claims description 106
- 229910052802 copper Inorganic materials 0.000 claims description 105
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 101
- 239000002184 metal Substances 0.000 claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 47
- -1 MoWu Inorganic materials 0.000 claims description 15
- 229910015338 MoNi Inorganic materials 0.000 claims description 12
- 229910016027 MoTi Inorganic materials 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 363
- 230000035882 stress Effects 0.000 description 73
- 238000000034 method Methods 0.000 description 19
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 9
- 239000011810 insulating material Substances 0.000 description 9
- 238000005476 soldering Methods 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 7
- 239000004020 conductor Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007772 electroless plating Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 230000003760 hair shine Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49866—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers characterised by the materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Led Device Packages (AREA)
- Structure Of Printed Boards (AREA)
- Liquid Crystal (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
一种驱动基板及其制作方法、显示装置,属于显示技术领域。驱动基板包括:衬底基板(1);位于所述衬底基板(1)上的应力缓冲层(2);位于所述应力缓冲层(2)远离所述衬底基板(1)一侧的走线结构,所述走线结构中与所述应力缓冲层(2)接触的走线的厚度大于阈值;位于所述走线结构远离所述衬底基板(1)一侧的第一绝缘层(6);位于所述第一绝缘层(6)远离所述衬底基板(1)一侧的多个电子元件,所述电子元件通过贯穿所述第一绝缘层(6)的过孔(11)与走线结构连接。
Description
PCT国内申请,说明书已公开。
Claims (22)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2019/113006 WO2021077354A1 (zh) | 2019-10-24 | 2019-10-24 | 驱动基板及其制作方法、显示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN113168046A true CN113168046A (zh) | 2021-07-23 |
CN113168046B CN113168046B (zh) | 2023-08-25 |
Family
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Application Number | Title | Priority Date | Filing Date |
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CN201980002099.XA Active CN113168046B (zh) | 2019-10-24 | 2019-10-24 | 驱动基板及其制作方法、显示装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11676947B2 (zh) |
EP (1) | EP4050406A4 (zh) |
JP (1) | JP7384335B2 (zh) |
CN (1) | CN113168046B (zh) |
WO (1) | WO2021077354A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111051975A (zh) * | 2019-11-27 | 2020-04-21 | 京东方科技集团股份有限公司 | 驱动基板及其制备方法、发光基板和显示装置 |
WO2023015579A1 (zh) * | 2021-08-09 | 2023-02-16 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170213803A1 (en) * | 2011-06-08 | 2017-07-27 | X-Celeprint Limited | Methods for Surface Attachment of Flipped Active Components |
CN109031779A (zh) * | 2018-07-25 | 2018-12-18 | 京东方科技集团股份有限公司 | 发光二极管基板、背光模组和显示装置 |
CN109256400A (zh) * | 2018-11-16 | 2019-01-22 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN109887416A (zh) * | 2019-03-15 | 2019-06-14 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN110133895A (zh) * | 2019-06-10 | 2019-08-16 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
CN110335875A (zh) * | 2019-07-02 | 2019-10-15 | 武汉华星光电技术有限公司 | 显示面板及其制作方法 |
Family Cites Families (9)
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JP5222165B2 (ja) | 2009-01-27 | 2013-06-26 | 株式会社沖データ | 光源装置及びそれを有するヘッドアップディスプレイ装置 |
JP5316227B2 (ja) | 2009-05-28 | 2013-10-16 | 日本電気株式会社 | コンデンサ、配線基板およびそれらの製造方法 |
US8884343B2 (en) | 2012-02-24 | 2014-11-11 | Texas Instruments Incorporated | System in package and method for manufacturing the same |
US9806244B2 (en) | 2014-01-10 | 2017-10-31 | Sharp Kabushiki Kaisha | Substrate for light emitting device, light emitting device, and manufacturing method of substrate for light emitting device |
US20190081077A1 (en) | 2016-03-15 | 2019-03-14 | Sharp Kabushiki Kaisha | Active matrix substrate |
KR102587215B1 (ko) * | 2016-12-21 | 2023-10-12 | 삼성디스플레이 주식회사 | 발광 장치 및 이를 구비한 표시 장치 |
CN208014703U (zh) * | 2018-03-29 | 2018-10-26 | 昆山工研院新型平板显示技术中心有限公司 | 驱动背板、微发光二极管显示面板及显示器 |
CN109597245B (zh) | 2019-01-02 | 2023-12-12 | 京东方科技集团股份有限公司 | 背光模组及其制备方法、显示装置 |
KR20200088954A (ko) * | 2019-01-15 | 2020-07-24 | 삼성디스플레이 주식회사 | 표시 장치 |
-
2019
- 2019-10-24 US US16/965,470 patent/US11676947B2/en active Active
- 2019-10-24 JP JP2021564455A patent/JP7384335B2/ja active Active
- 2019-10-24 EP EP19945412.5A patent/EP4050406A4/en active Pending
- 2019-10-24 CN CN201980002099.XA patent/CN113168046B/zh active Active
- 2019-10-24 WO PCT/CN2019/113006 patent/WO2021077354A1/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170213803A1 (en) * | 2011-06-08 | 2017-07-27 | X-Celeprint Limited | Methods for Surface Attachment of Flipped Active Components |
CN109031779A (zh) * | 2018-07-25 | 2018-12-18 | 京东方科技集团股份有限公司 | 发光二极管基板、背光模组和显示装置 |
CN109256400A (zh) * | 2018-11-16 | 2019-01-22 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN109887416A (zh) * | 2019-03-15 | 2019-06-14 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN110133895A (zh) * | 2019-06-10 | 2019-08-16 | 京东方科技集团股份有限公司 | 显示基板及其制作方法、显示装置 |
CN110335875A (zh) * | 2019-07-02 | 2019-10-15 | 武汉华星光电技术有限公司 | 显示面板及其制作方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111051975A (zh) * | 2019-11-27 | 2020-04-21 | 京东方科技集团股份有限公司 | 驱动基板及其制备方法、发光基板和显示装置 |
WO2023015579A1 (zh) * | 2021-08-09 | 2023-02-16 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法 |
US11984456B2 (en) | 2021-08-09 | 2024-05-14 | Tcl China Star Optoelectronics Technology Co., Ltd. | Array base plate and manufacturing method therefor |
Also Published As
Publication number | Publication date |
---|---|
EP4050406A1 (en) | 2022-08-31 |
US11676947B2 (en) | 2023-06-13 |
US20210143134A1 (en) | 2021-05-13 |
WO2021077354A1 (zh) | 2021-04-29 |
JP2023506613A (ja) | 2023-02-17 |
CN113168046B (zh) | 2023-08-25 |
EP4050406A4 (en) | 2022-11-02 |
JP7384335B2 (ja) | 2023-11-21 |
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