CN1131462A - 压力传感器的隔离膜片 - Google Patents
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Abstract
本发明传感器(12)指示出工作液体压力输出值。该传感器(10)具有一第一主体(14),该敏感元件具有一充满隔离液的、从第一端口延伸到敏感元件(16)的第一通道。第二主体具有一个用于装载工作液(28)的入口(1)和一个第二端口。位于第一端口和第二端口之间的隔离膜将工作液和隔离液分开。和密封(48)相邻接的膜片(46)密封住膜片(46)并将膜片(46)连接到第二主体(13)。弹簧(66,68)将密封(48)和膜片(46)撑开。
Description
本发明涉及压力传感器,尤其涉及压力传感器中的隔离膜片。
压力传感器具有与隔离膜片相连的压力敏感元件。隔离膜片将压力敏感元件与被测腐蚀性工作流体隔离开来。借助于一通道中具有显著不可缩性的隔离液,压力从隔离膜片传至敏感元件。美国专利“组合式压力传感器”(专利号4,833,922)和“隔离降应力式压力传感器”(专利号5,094,109)描述了这类压力传感器。
由于隔离膜片暴露在工作流体中,它接触的腐蚀性介质可能损坏它的结构。兰宝石和陶瓷的强度和抗腐蚀性都很好,因此它们很适合作隔离膜片材料。然而,既使采用这些材料,膜片的密封应力仍会改变膜片的刚度和形状并导致误差的出现。此外,由这些材料制成的膜片并不具有为获得精确的压力测量结果而要求的足够流体排量。现有密封结构的抗腐蚀性仍很差。
本发明是一种指示工作液体压力输出值传感器。该传感器中有两条通道,一条通道充入隔离液,并从第一端口延伸至敏感装置,另一条通道容纳工作液体,并具有第二端口。隔离膜片将第一和第二端口隔离开,也将隔离液与工作流体隔离开。贴近膜片的密封件将膜片与工作液体的压力联系起来。该密封件由防腐蚀的平面弹簧支撑。此外,装有膜片的膜片组件安装在应力隔离底座上。
图1是本发明所述压力传感器的局部剖面图。
图2是图1所示膜片的剖面图。
图3是密封件的剖面图。
图1是本发明的压力传感器10的方案,它由传输部分12,法兰13和敏感部分14组成。敏感部分14含有压力敏感元件16,传输部分12含有传输电路20。敏感电路18与传输电路20通过通讯总线22联连。传输电路20通过一个双线通讯电路传送工作流体的压力信息。
本发明的敏感部分14含有隔离组件24和26。组件24在图2中得到更详细的描述。压力敏感元件16将法兰13中的通道28内的压力P1和通道30内的压力P2间的压力差测出。压力P1经由通道32和隔离组件24作用在敏感元件16上。压力P2经由通道34和隔离组件26作用在敏感元件16上。通道32沿管接头36和管路42延伸。通道34沿管接头38和管路42延伸。通道32和34内充有具显著不可压缩性的液体(例如油)。管接头36和38与敏感部分14间以螺纹连接,从而使载有敏感电路18的敏感部分的内部与通道28和30内所含的工作流体之间形成了一个较长的熄火路径(flame—quenching Path)。
隔离组件24含有支座44,该支座最好熔焊在隔离膜片46上(详见图2)。支座44和膜片的材料在一个实施例中为兰宝石,在另一个实施例中则为陶瓷。通道32经过支座44延伸到膜片46。聚四氟乙烯(PTFE)密封件48置于膜片46和法兰13之间。陶瓷弹簧50和52安置在聚四氟乙烯密封件48的内部并由垫片54隔离开。垫片54上开有横向通道,借此使流体与弹簧50和52的两面都连通。通道55在通道28与陶瓷膜片46之间延伸。支座44与敏感部分14之间由衬垫56和硅橡胶58隔开。
隔离组件26含有支座60,该支座最好熔焊在隔离膜片62上,聚四氟乙烯密封件64将膜片62与法兰13隔开。陶瓷弹簧66和68含在聚四氟乙烯密封件64内部并由垫片70隔开,垫片70一般由陶瓷制成。通道71穿过垫片70和陶瓷弹簧66、68,并由此使流体在膜片62和通道30之间连通。衬垫72和硅橡胶74将支座60与敏感部分14的壳体隔开。
使用陶瓷或兰宝石膜片是必要的,因为它们不会同工作流体发生反应。此外,这类材料的脆性有助于减小滞后,从而改善精度。然而,这种方案的一个主要问题在于如何提供合适的应力隔离措施以避免螺纹应力和密封应力改变膜片的刚度和形状以及由此带来的误差。本发明从以下两方面解决该问题:一是用弹簧加载的聚四氟乙密封件来降低加在隔离膜片上的密封接触力,进而降低密封应力。二是利用对应于管道压力(最高可达6000磅/英寸2)的螺纹力来形成应力隔离。为优化抗腐蚀性能,本发明采用抗腐蚀弹簧。
脆性隔离元件具有较大的厚度/直径比和比先前工艺所采用的金属膜片更高的弹性模量。这将使之具有比金属膜片更强的刚性。一种解决办法是采用波纹面的膜片,但这对于用目前技术加工的脆性膜片来说是不可能的。脆性隔离元件应采用现有技术所没的方法来形成应力隔离。
隔离组件24和26与敏感组件14间的应力隔离是由硅橡胶58和74实现的。这会降低组件24和26上的应力,因为只有管接头36、38和衬垫56、72与组件14的连接是固定的。此外,组件24、26与法兰13之间由密封件48、50隔开。在一个实施例中,这些密封件采用具有良好密封性能和抗腐蚀性能的聚四氟乙烯材料。
聚四氟乙烯具有“冷变形”特性。在压力作用下,它会随时间的推移而改变形状。一种解决办法是在聚四氟乙烯密封件48和64中设置具有抗腐蚀性的金属盘簧。图3是设有盘簧80的密封件48的剖面图。另一个办法是用具有更好抗腐蚀性的陶瓷材料制做弹簧。弹簧应该能产生足够大的变位以容纳工件的误差和补偿聚四氟乙烯随时间变化而出现的蠕变。
本发明提供了在密封件(该密封件由象聚四氟乙烯这样具有良好弹性和抗腐蚀性的材料制成)中设置弹簧的技术。陶瓷弹簧50和52可以限制聚四氟乙烯密封件48的变形。(尽管此处讨论的是膜片组件24,但也适合于膜片组件26)。穿过弹簧52、50和垫片54的通道55使工作流体得以触动膜片46,该通道还将压力P1从通道28传至通道32并被压力敏感元件1b和敏感电路18检出。陶瓷弹簧50和52可产生足够大的变形以容纳被密封工件的误差和补偿聚四氟乙烯随时间变化出现的蠕变。弹簧也可对聚四氟乙烯施加足够的力使之填入被密封表面的缺陷中。
弹簧所能储存的能量由下式表示: 其中,Espring是弹簧储存的能量,σmax是材料的最大工作应力,E是材料的弹性模量,V是材料的体积。与金属相比,陶瓷及其它脆性材料具有较低的σmax和较高的E。这使得脆性材料的σmax/E比金属材料小10至50倍。为补偿这一差距,本发明所使用弹簧的体积比相应的金属弹簧大10至50倍,这需要将弹簧延伸到聚四氟乙烯密封件的边缘以外。除了能量储存能力的问题,另一个难点在于由陶瓷及其它脆性材料制成小型线圈。可以将多个陶瓷弹簧叠加以产生所需的弹性常数。弹簧上的孔可以使工作流体传到隔离膜片。如果用陶瓷材料制做膜片46和62,工作流体在隔离组件24和26中将不接触任何腐蚀性材料。
脆性隔离组件往往刚度较大。刚度的任何变化都会导致压力测量的误差。为减小刚度变化,在本发明中隔离组件被工作流体的压力全方位作用。为此采用了弹性支座(硅橡胶)以产生与工作流体压力相等的流体静压力。弹性支座应足够薄以免因温度变化而过度挤压和膨胀,从而超出弹簧的弹性限度。
本发明还采用熔化焊而不是钎焊材料来连接膜片。熔焊连接不易受腐蚀和蠕变的影响。
本发明中的膜片可优先使用于那些容量较小和要求隔离液排量较小的压力敏感元件,这样有利于减小压力测量过程中液体的总膨胀。作为参考,此外引入一项名为“膜片悬浮式压力传感器”的专利申请(流水号为08/123,729,1993年9月20日发稿,申请人Roger L.Frick),该申请所描述的压力敏感元件具有缩减隔离液排量的功能。
尽管以上对本发明的描述所基于的是优选实施例,但此领域的普通技术人员会认识到:一些对形式和细节可能做出的修改并不超出本发明的思想和范围。例如,所用的弹簧材料可以是包括兰宝石在内的其它物质。
Claims (20)
1.一种指示工作流体压力输出量的传感器,它包括:
一个具有两条通道的部分,一条通道充有隔离液,并从第一端口延伸至用来检测压力输出量的敏感装置,另一通道内充有工作流体;
一个将第一和第二通道隔离开并阻止工作流体进入第一通道的隔离膜片;
用来密封膜片并将工作流体的压力传至膜片的密封装置;且
上述隔离膜片由脆性抗腐蚀材料构成。
2.根据权利要求1的传感器,其密封装置包括聚四氟乙烯(PTEF)。
3.根据权利要求1的传感器,其中贴近密封装置的弹簧包括陶瓷。
4.根据权利要求1的传感器,其中贴近密封装置的弹簧包括兰宝石。
5.根据权利要求1的传感器含有贴近第一根弹簧的第二根弹簧,该弹簧与第一根弹簧联合起作用。
6.根据权利要求5的传感器中含有垫片,该垫片位于第一和第二根弹簧之间。
7.根据权利要求1的传感器,其特征在于隔离膜片位于膜片组件中,且该组件与基体之间实现充分的应力隔离。
8.根据权利要求1的传感器,其特征在于隔离膜片位于膜片组件中,且该组件事实上承受工作流体的压力。
9.根据权利要求1的传感器,包括贴近密封装置的盘簧。
10.根据权利要求1的传感器,其特征在于隔离膜片包括陶瓷。
11.根据权利要求1的传感器,其特征在于隔离膜片包括兰宝石。
12.一种指示工作流体压力输出量的传感器,含有:
一个具有两条通道的部分,一条通道充有隔离液,并从第一端口延伸至用来检测压力输出量的敏感装置,另一条传感器通道内载有工作流体;
一套将第一、第二通道隔离开并阻止工作流体进入第一通道的隔离组件;
用来密封膜片并将工作流体的压力传至膜片的密封装置;和
一套将隔离组件与基体相连的应隔离装置。
13.根据权利要求12的传感器,其特征在于第一条延伸的弹簧贴近密封装置并使密封装置与膜片撑开。
14.根据权利要求13的传感器,其特征在于弹簧包括陶瓷。
15.根据权利要求13的传感器,其特征在于弹簧包括兰宝石。
16.根据权利要求14的传感器,其中有第二根延伸的弹簧贴近第一根延伸的弹簧,且二者联合起作用。
17.根据权利要求16的传感器,在其中的第一和第二根弹簧之间含有垫片。
18.根据权利要求12的传感器,其特征在于应力隔离装置的膜片组件与基体之间含有一层弹性体。
19.根据权利要求12的传感器,其特征在于隔离组件中包括陶瓷隔离膜片。
20.根据权利要求12的传感器,其特征在于隔离组件中包括兰宝石隔离膜片。
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US12636393A | 1993-09-24 | 1993-09-24 | |
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Also Published As
Publication number | Publication date |
---|---|
CA2169824A1 (en) | 1995-03-30 |
JPH09503057A (ja) | 1997-03-25 |
EP0720733A1 (en) | 1996-07-10 |
SG41962A1 (en) | 1997-08-15 |
EP0720733B1 (en) | 1999-03-17 |
CN1058569C (zh) | 2000-11-15 |
DE69417247D1 (de) | 1999-04-22 |
DE69417247T2 (de) | 1999-07-08 |
JP3415846B2 (ja) | 2003-06-09 |
US5524492A (en) | 1996-06-11 |
WO1995008759A1 (en) | 1995-03-30 |
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