CN113131782A - Piezoelectric driver, manufacturing method thereof and imaging module - Google Patents
Piezoelectric driver, manufacturing method thereof and imaging module Download PDFInfo
- Publication number
- CN113131782A CN113131782A CN201911418275.6A CN201911418275A CN113131782A CN 113131782 A CN113131782 A CN 113131782A CN 201911418275 A CN201911418275 A CN 201911418275A CN 113131782 A CN113131782 A CN 113131782A
- Authority
- CN
- China
- Prior art keywords
- layer
- piezoelectric
- sacrificial layer
- elastic
- piezoelectric element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000463 material Substances 0.000 claims description 23
- 238000000059 patterning Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000011368 organic material Substances 0.000 claims description 2
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 24
- 238000010586 diagram Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000005484 gravity Effects 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- MNKMDLVKGZBOEW-UHFFFAOYSA-M lithium;3,4,5-trihydroxybenzoate Chemical compound [Li+].OC1=CC(C([O-])=O)=CC(O)=C1O MNKMDLVKGZBOEW-UHFFFAOYSA-M 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005360 phosphosilicate glass Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Abstract
The invention discloses a piezoelectric actuator, a manufacturing method thereof and an imaging module, wherein the piezoelectric actuator comprises: the piezoelectric element comprises a movable end and a fixed end, wherein the movable end is provided with a sliding rod, and the direction from the movable end to the fixed end is the length direction; the supporting block is used for fixing the fixed end of the piezoelectric element; the moving part is arranged at the movable end of the piezoelectric element and provided with a sliding groove, the sliding rod extends into the sliding groove and can slide in the sliding groove along the length direction, and the sliding rod can drive the moving part to move upwards or downwards in an electrified state; and one end of the elastic limiting piece is connected to the moving part, and the other end of the elastic limiting piece is connected to the supporting block and is used for limiting the rotation of the moving part.
Description
Technical Field
The invention relates to the technical field of motion control, in particular to a piezoelectric driver, a manufacturing method thereof and an imaging module.
Background
In some electronic terminals, it is often necessary to translate, vertically move or tilt some of the components to achieve some specific functions. For example, in various electronic terminals such as video cameras, still cameras, and mobile phones having a lens module, a movable lens or an image sensor is usually moved in an optical axis direction to focus or zoom or moved in a direction perpendicular to the optical axis direction to prevent optical shake by a driving mechanism such as a VCM Motor. However, unlike the conventional single lens reflex camera, it is a great engineering challenge to implement the function in electronic terminals such as mobile phones, micro video cameras, and cameras with a small spatial volume. Referring to fig. 1 and 2, which are main structural views of a brake, fig. 1 shows an ideal state after a sacrificial layer is released, in which a moving member 30 is in a balanced state, and fig. 2 shows an actual state after the sacrificial layer is released, in which the moving member 30 rotates by gravity. In some cases, the actuator is required to release the supporting sacrificial layer and then bond with the element to be actuated, and the rotation of the moving part 30 affects the subsequent bonding of the element. Therefore, a structure for controlling the movement capable of restricting the rotation of the moving member 30 is desired.
Disclosure of Invention
The invention aims to provide a piezoelectric driver, a manufacturing method thereof and an imaging module, which can solve the problem that a moving part rotates under the action of gravity after releasing a sacrificial layer.
In order to achieve the above object, the present invention provides a piezoelectric driver including:
the piezoelectric element comprises a movable end and a fixed end, wherein the movable end is provided with a sliding rod, and the direction from the movable end to the fixed end is the length direction;
the supporting block is used for fixing the fixed end of the piezoelectric element;
the moving part is arranged at the movable end of the piezoelectric element and provided with a sliding groove, the sliding rod extends into the sliding groove and can slide in the sliding groove along the length direction, and the sliding rod can drive the moving part to move upwards or downwards in an electrified state;
and one end of the elastic limiting piece is connected to the moving part, and the other end of the elastic limiting piece is connected to the supporting block and is used for limiting the rotation of the moving part.
In another aspect, the invention provides an imaging module, which includes the piezoelectric actuator and a driven component, where the driven component includes a lens group, an imaging sensor element, an aperture or a lens sheet, and the driven component is fixed on the surface of the moving component;
and an electrical connection structure connected to the electrodes of the piezoelectric element.
The invention also provides a method for forming the piezoelectric actuator, which comprises the following steps:
providing a first substrate, and forming a supporting block and a first sacrificial layer positioned on the periphery of the supporting block on the first substrate;
forming a moving part on the first sacrificial layer, the moving part including a runner;
providing a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the movable end is provided with a sliding rod, the fixed end of the piezoelectric element is bonded on the supporting block, and the sliding rod extends into the sliding groove;
forming an elastic limiting piece on the first sacrificial layer, wherein one end of the elastic limiting piece is connected with the supporting block, and the other end of the elastic limiting piece is connected with the moving part;
forming a second sacrificial layer in which the moving part and the elastic limiting member are located;
and removing the first sacrificial layer and the second sacrificial layer.
The invention has the advantages that the elastic limiting piece is arranged between the moving part and the supporting block, so that the problem that the sliding rod freely moves in the sliding groove after the sacrificial layer is released and the moving part rotates under the action of gravity is solved;
further, the imaging module formed by the piezoelectric actuator can limit the transverse movement of the driven part along the length direction of the piezoelectric element when the piezoelectric actuator is symmetrically arranged. When a plurality of piezoelectric actuators are provided on the outer periphery of the driven member, the lateral movement of the driven member can be regulated in a plurality of directions.
Drawings
Fig. 1 is a schematic structural diagram of an ideal case of a piezoelectric actuator after a sacrificial layer is released.
Fig. 2 is a schematic structural diagram of an example of an actual situation after a sacrificial layer of a piezoelectric actuator is released.
Fig. 3 is a schematic structural diagram of a piezoelectric actuator according to an embodiment of the invention.
Fig. 4 is a schematic structural diagram of a piezoelectric element.
Fig. 5 is a top view of an embodiment of an elastic limiting member according to the present invention.
Fig. 6 is a cross-sectional view of fig. 5.
Fig. 7 is a top view of an elastic restraint according to another embodiment of the invention.
Fig. 8 is a perspective view of a chute according to an embodiment of the invention.
Fig. 9 is a cross-sectional view of the chute of fig. 8 taken along the Y-direction.
FIG. 10 is a schematic structural diagram of a piezoelectric element with a multi-layer structure according to an embodiment of the present invention
Fig. 11 is a top view of an imaging module according to an embodiment of the invention.
Fig. 12 is a cross-sectional view taken along line a-a' of fig. 11 (elastic restraint not shown).
Fig. 13 to 21 are schematic structural diagrams corresponding to different steps of a method for manufacturing a piezoelectric actuator according to an embodiment of the invention.
Description of reference numerals: 10-a support block; 20-a piezoelectric element; 30-a moving part; 40-an elastic restraint; 21-a slide bar; 31-a chute; 24-a support layer; 22-a second electrode; 23-a piezoelectric film; 21-a first electrode; 25-an insulating layer; 251-a first electrode lead-out; 252-a second electrode lead-out; 26-a conductive structure; 211-odd electrode layers; 221-even number electrode layer; 41-side wall; 42-a trench; 43-a tie film; 4011-bottom layer of elastic restraint; 4012-top layer of elastic restraint; 4013-bottom sidewalls of elastic restraints; 311-a first film layer; 312-a second film layer; 313-a third film layer; 50-a driven member; 61-a first electrical connection; 62-a second electrical connection; 63-a conductive plug; 100-a first substrate; 101-a first support layer; 102-a second support layer; 103-a third support layer; 110 — a first sacrificial layer; 303-chute bottom wall; 401-a first part; 302-chute side walls; 402-a second portion; 301-chute top wall; 403-third part.
Detailed Description
The imaging module and the manufacturing method thereof according to the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and drawings, it being understood, however, that the concepts of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. The drawings are in simplified form and are not to scale, but are provided for convenience and clarity in describing embodiments of the invention.
It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
If the method herein comprises a series of steps, the order in which these steps are presented herein is not necessarily the only order in which these steps may be performed, and some steps may be omitted and/or some other steps not described herein may be added to the method. Although elements in one drawing may be readily identified as such in other drawings, the present disclosure does not identify each element as being identical to each other in every drawing for clarity of description.
Example 1
An embodiment of the present invention provides a piezoelectric actuator, fig. 3 is a schematic structural diagram of a piezoelectric actuator according to an embodiment of the present invention, and referring to fig. 3, the piezoelectric actuator includes:
the piezoelectric element 20 comprises a movable end and a fixed end, wherein the movable end is provided with a sliding rod 21, and the direction from the movable end to the fixed end is the length direction;
a supporting block 10 for fixing a fixed end of the piezoelectric element 20;
a moving member 30 disposed at a movable end of the piezoelectric element 20, wherein the moving member 30 has a sliding slot 31, the sliding rod 21 extends into the sliding slot 31, the sliding rod 21 can slide in the sliding slot 31 along the length direction, and the sliding rod 31 can drive the moving member 30 to move upward or downward when the power is turned on;
and an elastic restricting member 40 having one end connected to the moving member 30 and the other end connected to the support block 10, for restricting the rotation of the moving member 30.
First, the working principle of the piezoelectric actuator is described: the driving component of the piezoelectric actuator is a piezoelectric element 20, one end of the piezoelectric element 20 fixed to the supporting block 10 is a fixed end, and the other end is a movable end, and the movable end moves upwards or downwards when the piezoelectric element is in a power-on state. Specifically, referring to fig. 4, in the present embodiment, the specific structure of the piezoelectric element 20 includes a support layer 24, and a piezoelectric stack structure located on the support layer 24, where the piezoelectric stack structure includes a second electrode 22, a piezoelectric film 23, and a first electrode 21 stacked in sequence from bottom to top, an insulating layer 25 is further disposed above the first electrode 21, the first electrode 21 and the second electrode 22 are respectively connected to a first electrode terminal 251 and a second electrode terminal 252, and the first electrode terminal 251 and the second electrode terminal 252 are both located in the insulating layer 25.
When the first electrode lead 251 and the second electrode lead 252 are energized, a voltage difference is generated between the upper surface and the lower surface of the piezoelectric film 23, and the piezoelectric film 23 contracts, and the support layer 24 cannot expand and contract, so that the piezoelectric element 20 warps upward or downward (the direction of the warpage, the degree of the warpage depends on the voltages applied to the upper and lower surfaces of the piezoelectric film 23) after the energization, and the movable end of the piezoelectric element 20 bends upward or downward. When the movable end of the piezoelectric element 20 is provided with an element, the element can be driven to move up and down.
The piezoelectric film 23 is made of a piezoelectric material that can be deformed when energized, such as quartz crystal, aluminum nitride, zinc oxide, lead zirconate titanate, barium titanate, lithium gallate, lithium germanate, or titanium germanate. The material of the support layer 24 is a dielectric material that is not electrically conductive, such as silicon oxide, silicon nitride, etc.
In this embodiment, two sides of the movable end of the piezoelectric element 20 are respectively provided with one sliding rod 21, one side opposite to the movable end is provided with a moving member 30, the moving member 30 is provided with a sliding slot 31, the sliding slot 31 includes a first sub-sliding slot and a second sub-sliding slot symmetrically arranged along the width direction of the piezoelectric element 20, and the two sliding rods 21 respectively extend into the corresponding sub-sliding slots. The slide rod 21 is movable in the slide groove 31 in the longitudinal direction of the piezoelectric element 20. When the movable end of the piezoelectric element moves upward or downward, the slide bar 21 moves the moving member 30 upward or downward. In this embodiment, there is one piezoelectric element 20, and two sides of the piezoelectric element 20 are respectively provided with an elastic limiting member 40, one end of the elastic limiting member 40 is connected to the supporting block 10, and the other end is connected to the moving member 30, so as to limit the rotation of the moving member 30. In another embodiment, the number of elastic constraints 40 may be one or more. It should be appreciated that the symmetrically disposed elastic restraints 40 may provide greater control over the balance of the moving member 30.
As described in the background art, in the manufacturing of the piezoelectric actuator, the supporting block 10, the piezoelectric element 20, and the moving member 30 are embedded in the sacrificial layer, and after the sacrificial layer is released, the sliding rod 21 can slide in the sliding groove 31 because the outer peripheral dimension of the sliding rod 21 is smaller than the dimension of the sliding groove 31, and when the bonding portion 32 of the moving member 30 is heavy, the moving member 30 is rotated downward by gravity. When it is necessary to attach the driven member to the adhesive portion, the difficulty of alignment is increased. In this embodiment, since one end of the moving member 30 is fixed to the support block 10 by the elastic restricting member 40, the rotation of the moving member 30 due to the gravity can be restricted.
The shape of the elastic limiting piece can be the common shapes of various springs, such as a three-dimensional hollow spiral spring shape or a plane sawtooth shape. The projection shape of the elastic limiting piece on the first surface perpendicular to the length direction or the second surface parallel to the length direction comprises a trapezoid, a rectangle or a triangle. The trapezoidal or rectangular or triangular shape as used herein refers to the shape of each smallest unit cell, not the shape of the spring as a whole. Referring to fig. 5 and 6, which are a structural view of the elastic limiting member, fig. 5 is a top view of the elastic limiting member 40, fig. 6 is a sectional view of the elastic limiting member 40, in this embodiment, the elastic limiting member 40 is provided with a plurality of parallel and spaced side walls 41 and grooves 42, the cross section of the side walls 41 or the grooves 42 is trapezoidal or rectangular, and the length, the width and the depth of the side walls or the grooves 42 are in the micrometer range. The specific parameter settings are set according to the actual situation, such as according to the size of the piezoelectric element 20, the size and weight of the moving member 30, and the like. In this embodiment, the groove 42 includes a penetrating region and a non-penetrating region, and the non-penetrating region is provided with a connecting film 43 connected to the two opposite sidewalls 41. The connection film 43 is disposed at one end of the groove 42, and the connection films 43 are alternately disposed at both ends of the groove 42. In another embodiment, the connecting film 43 may be disposed at an end of the one-side groove 42 or between both ends of the groove. In another embodiment, the elastic restriction member 40 is provided with grooves 42 on both sides thereof, and the connection film 43 is disposed between the upper and lower grooves. In other embodiments, the trench 42 may not be provided with a through region. Providing through-penetration zones may increase the flexibility of the elastic constraints 40. The resistance to deformation of the piezoelectric element that needs to be overcome is minimized while limiting the rotation of the moving member.
Referring to fig. 7, a top view of a hollow coil spring-like elastic restraint includes an elastic restraint base layer 4011, an elastic restraint top layer 4012, and an elastic restraint base layer side wall 4013.
In this embodiment, referring to fig. 8, the moving component is provided with a first film layer 311, a second film layer 312, and a third film layer 313 stacked in sequence from top to bottom, two sides of the first film layer 311 and the third film layer 313 extend outward relative to the second film layer 312 to form an extending portion, and the extending portion and an end of the second film layer 312 enclose the sliding slot 31. The slide groove 31 has an opening in a direction in which the piezoelectric element 20 extends and contracts, when the piezoelectric element 20 warps, the slide rod 21 moves in the direction of the opening of the slide groove 31, and there is a risk of falling out of the slide groove 31, referring to fig. 9, which is a schematic structural view of the slide groove 31, and referring to fig. 8, the slide groove 31 has an opening in a length direction (arrow X direction) of the piezoelectric element 20, and there is a risk of falling from the opening when the slide rod 21 moves to the opening, and fig. 8 is a schematic structural view of a cross section of the slide groove 31 viewed in a width direction (arrow Y direction) of the piezoelectric element after. The cross section of the sliding chute 31 is annular, and when the sliding rod 21 slides to the edge of the sliding chute 31, the sliding rod cannot fall off the sliding chute 31 due to blockage.
In this embodiment, the sliding groove 31 and the elastic limiting member 40 are an integral structure, a bottom surface of the elastic limiting member 40 is flush with a bottom surface of the third film layer 303, and a top surface of the elastic limiting member 40 is flush with a top surface of the first film layer 301. The groove 42 is connected to two opposite side walls of the groove 42 by the third film layer 303. When the sliding groove 31 and the elastic limiting member 40 are of an integral structure, the material of the elastic limiting member 40 is the same as that of the sliding groove 31, such as a dielectric material, including silicon dioxide, silicon nitride, and the like. When the sliding chute 31 and the elastic limiting member 40 are separate structures, the material of the elastic limiting member 40 may be an organic material, such as a polymer resin material, which has a certain flexibility, and the elasticity of the elastic limiting member 40 is sequentially improved.
In this embodiment, the piezoelectric element 20 is fixed on the upper surface of the supporting block 10, and in another embodiment, the supporting block 10 includes an upper supporting block and a lower supporting block which are distributed up and down, and the piezoelectric element is fixed between the upper supporting block and the lower supporting block. When the piezoelectric element 20 is fixed between the upper support block and the lower support block, it is more advantageous to fix the fixed end of the piezoelectric element.
In addition, the piezoelectric laminated structure of the piezoelectric element 20 is not limited to only one piezoelectric film 23, and referring to fig. 10, the piezoelectric laminated structure is a piezoelectric laminated structure having three piezoelectric films 23, electrodes are distributed on the upper surface and the lower surface of each piezoelectric film 23, and two adjacent piezoelectric films 23 share the electrode located therebetween, so that the three piezoelectric films 23 total 4 layers of electrodes, the electrodes are counted from bottom to top, the odd-numbered layers of electrodes 211 are electrically connected together by a conductive structure 26, the even-numbered layers of electrodes 221 are electrically connected together by another conductive structure 26, and the portion of the conductive structure 26 extending into the piezoelectric laminated structure needs to be located in the insulating layer 25, and only the end portion is in contact with the electrode needing to be electrically connected. The tops of the two conductive structures 26 may serve as a first electrode lead 251 and a second electrode lead 252, respectively, such that the first electrode lead 251 and the second electrode lead 252 are both located on the top surface of the piezoelectric element 20.
In other embodiments, the piezoelectric stack structure is not limited to include three piezoelectric films, and may include two, four, five, or six piezoelectric films, and the like, and the ability of warping the piezoelectric element 20 may be improved by increasing the number of the piezoelectric films 23, so that the piezoelectric element 20 can move the moved element 30 with a larger mass.
Further, the manner in which the odd-numbered layer electrodes 211 and the even-numbered layer electrodes 221 are electrically connected is not limited to the conductive structure 26 shown in fig. 10, and may be electrically connected by means of a conductive plug and an interconnection line. The two conductive structures 26 may also lead the odd-numbered layer electrodes 211 and the even-numbered layer electrodes 221 to the bottom surface of the support layer 24, so that the first electrode terminals 251 and the second electrode terminals 252 are located on the bottom surface of the piezoelectric element 20, or lead the odd-numbered layer electrodes 211 and the even-numbered layer electrodes 221 to the top surface of the piezoelectric element 20 and the bottom surface of the support layer 24, respectively, so that the first electrode terminals 251 and the second electrode terminals 252 are located on the top surface and the bottom surface of the piezoelectric element 20, respectively, which is not illustrated herein.
It is to be understood that, in order to ensure that the warping directions of the three piezoelectric films are the same, the polarities of the adjacent two piezoelectric films are opposite.
Example 2
An embodiment of the present invention further provides an imaging module, fig. 11 and 12 show an imaging module according to an embodiment of the present invention, fig. 11 is a top view of the imaging module, fig. 12 is a cross-sectional view taken along a tangential direction of a-a' of fig. 11, please refer to fig. 11 and 12, the imaging module includes the above-mentioned piezoelectric driver and a driven member 50, the driven member 50 includes a lens group, an imaging sensor, a diaphragm or a lens sheet, and the driven member 50 is fixed on a surface of the moving member 30; and the electric connection end is electrically connected with the piezoelectric driver.
The surface of the driven member 50 fixed to the moving member 30 includes: when the imaging module is driven by only one piezoelectric actuator, the driven member 50 may be bonded to the upper surface or the lower surface of the moving member. When the imaging module includes a plurality of piezoelectric actuators, the driven members may be all located on the upper surface or the lower surface of the moving member, or a part of the moving member may be fixed to the upper surface of the driven member and another part of the moving member may be fixed to the lower surface of the driven member. The fixing mode comprises dry film bonding or viscose bonding.
Referring to fig. 11, in the present embodiment, two piezoelectric actuators are provided, and are symmetrically disposed with respect to the moved element 50, and the moved element 50 is disposed on the upper surface of the moving member.
In another embodiment, the piezoelectric actuator is provided in plurality, and the plurality of piezoelectric actuators is provided on the outer periphery of the driven member. In a preferred embodiment, the plurality of piezoelectric actuators are symmetrically arranged.
Of course, the piezoelectric actuators may be arranged asymmetrically, and it should be understood that when the piezoelectric actuators are arranged symmetrically, the elastic limiting members of the two opposite piezoelectric actuators can simultaneously restrict the driven member to move in two directions, so that the lateral movement of the driven member in the horizontal direction can be reduced.
As shown in fig. 12, the first openings of the sliding grooves in the telescopic direction are both directed toward the corresponding supporting block 10, so that the two piezoelectric elements 20 in a pair are distributed on both sides of the center of the driven member 50. The first opening of the slide groove in the telescopic direction may also face away from the support block 10, so that the two piezoelectric elements 20 in the pair are arranged to overlap. That is, the movable end of the piezoelectric element 20 selectively protrudes into the slide groove on the side far from the driven member 50 (each piezoelectric element 20 moves the opposite side of the driven member 50), and in this case, the length of the piezoelectric element 20 can be increased, and the piezoelectric element can be easily lifted even when the driven member 50 has a large mass.
Further, as shown in fig. 12, the fixing position of the supporting block 10 to the piezoelectric element 20 is located outside the driven member 10. The fixing position of the supporting block 10 to the piezoelectric element 20 may also be located in a space below the driven member 50. In this embodiment, the supporting block 10 and the fixing positions of the supporting block 10 and the piezoelectric element 20 are located right below the driven member 50, so that the fixed end of the piezoelectric element 20 is closer to the center of the driven member 50 than the movable end. Of course, the supporting block 10 is not limited to be located completely under the driven part 50, and may also be located partially under the driven part 50, so that the supporting block 10 may be completely or partially covered by the driven part, which may save the area occupied by the supporting block 10, reduce the area of the whole imaging module, and facilitate size reduction.
Referring to fig. 12, the first electrode tap 251 and the second electrode tap 252 (not shown) of the piezoelectric element 20 are located at the bottom surface of the piezoelectric element 20. The lower surface of the supporting block 10 is provided with a first electrical connection end 61 and a second electrical connection end 62, which are located right below the piezoelectric element 20. The supporting block 10 is provided with a conductive plug 63 connected to the first electrical connection terminal 61, the other end of the conductive plug is electrically connected to the first electrode terminal 251 of the piezoelectric element 20, and the second electrical connection terminal 62 is electrically connected to the second electrode terminal 252 of the piezoelectric element 20 through another conductive plug 63. The lower end of the conductive plug is electrically connected to the circuit board 10 to supply power to the piezoelectric driving part.
When the first electrode leading-out end and the second electrode leading-out end are both positioned on the top surface of the piezoelectric element, the first electrode leading-out end and the second electrode leading-out end can be respectively and electrically connected with a circuit board through a lead wire, so that the circuit board can apply voltage to the piezoelectric driver.
The invention is not limited to directly connecting the first electrode leading-out end, the second electrode leading-out end and the circuit board through leads, and an electric connection end can be arranged on the top surface of the supporting block, the first electrode leading-out end, the second electrode leading-out end and the electric connection end are electrically connected through leads, and then the electric connection end on the top surface of the supporting block is electrically connected with the circuit board through another interconnection structure (such as a lead or a conductive plug), so that the length of the lead can be shortened.
When the fixed end of the piezoelectric element is fixed between the upper layer supporting block and the lower layer supporting block, the first electrode leading-out end of the piezoelectric element is located on the upper surface of the piezoelectric element, the first electric connection end and the second electric connection end can be both arranged on the upper surface of the upper layer supporting block, and the first electrode leading-out end and the second electrode leading-out end are respectively connected to the first electric connection end and the second electric connection end through the conductive plug penetrating through the upper layer supporting block right above the piezoelectric element.
When the fixed end of the piezoelectric element is fixed between the upper layer supporting block and the lower layer supporting block, one of the first electrode leading-out end and the second electrode leading-out end is positioned on the upper surface of the piezoelectric element, and the other one is positioned on the lower surface of the piezoelectric element. The upper surface of the upper layer supporting block and the lower surface of the lower layer supporting block are respectively provided with an electric connection end, and the electrode leading-out end is electrically connected with the electric connection end through a conductive plug.
Example 3
This embodiment is different from embodiment 1 in that the driven member is an imaging sensing element.
The top surface of the piezoelectric element 20 is further provided with a wiring layer, the wiring layer is located in the insulating layer 25, and both ends of the wiring layer are provided with a third electric connection end and a fourth electric connection end which are exposed out of the insulating layer 25. The third electrical connection end is closer to the driven part 50 than the fourth electrical connection end, a fifth electrical connection end is arranged on the upper surface of the driven part 50, the third electrical connection end and the fifth electrical connection end are electrically connected through a flexible connecting piece, and the fourth electrical connection end is electrically connected with a circuit board through a lead so that the circuit board supplies power or provides signals for the imaging sensing element. Compared with the way of directly electrically connecting the fifth electrical connection terminal of the imaging sensor element with the circuit board by using a lead, the length of the flexible connection member in this embodiment can be shorter (the closer the third electrical connection terminal is to the imaging sensor element, the shorter the length of the flexible connection member), and the driven member 50 does not pull the flexible connection member when moving up or down.
In the present invention, the third electrical connection end is not limited to be located on the top surface of the piezoelectric element, for example, when the support block includes a first layer of support block and a second layer of support block stacked in sequence from bottom to top, and the fixed end of the piezoelectric element is fixed between the first layer of support block and the second layer of support block, the third electrical connection end may be directly located on the top of the support block and electrically connected to the circuit board by using a lead. It should be understood that, in the present invention, the third electrical connection end is not limited to be electrically connected to the circuit board through a lead, and a sixth electrical connection end may also be directly formed on the top surface of the supporting block, the fourth electrical connection end is electrically connected to the sixth electrical connection end through a lead, and another interconnection structure is further disposed in the supporting block 10 and electrically connects the sixth electrical connection end and the circuit board, so that the circuit board can supply power to the moved element or transmit signals. The flexible connecting piece in this embodiment is a flexible interconnection line, and the interconnection structure is a conductive plug.
In the present invention, the sixth electrical connection end may also be electrically connected to the circuit board by other interconnection manners, and the flexible connection member and the interconnection structure may also be other structures, which is not limited in the present invention.
Example 4
In this embodiment, the driven member 50 is a mirror.
The moving part of the piezoelectric actuator is connected with one side of the reflector, the other side opposite to the reflector is rotationally connected with a supporting surface, and when the piezoelectric element 20 is electrified and warped upwards or downwards, the reflector is inclined, so that the purpose of changing the reflection angle is achieved.
In the present invention, one side of the mirror is not limited to one piezoelectric actuator, and two or more piezoelectric actuators may be provided.
It should be understood that the mirror is not limited to having the piezoelectric actuators distributed on only one side, but may also have the piezoelectric actuators distributed on two sides, four sides, and circumferentially.
Example 5
An embodiment of the present invention further provides a method for manufacturing a piezoelectric actuator, where the method includes:
s01: providing a first substrate, and forming a supporting block and a first sacrificial layer positioned on the periphery of the supporting block on the first substrate;
s02: forming a moving part on the first sacrificial layer, the moving part including a runner;
s03: providing a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the movable end is provided with a sliding rod, the fixed end of the piezoelectric element is bonded on the supporting block, and the sliding rod extends into the sliding groove;
s04: and forming an elastic limiting piece on the first sacrificial layer, wherein one end of the elastic limiting piece is connected with the supporting block, and the other end of the elastic limiting piece is connected with the moving part.
S05: forming a second sacrificial layer in which the moving part and the elastic limiting member are located
S06: and removing the first sacrificial layer and the second sacrificial layer.
Fig. 13 to 20 are schematic structural diagrams corresponding to steps of a method for manufacturing a piezoelectric actuator according to an embodiment of the present invention.
Referring to fig. 13 and 14, step S01: providing a first substrate 100, forming a supporting block on the first substrate 100 and a first sacrificial layer 110 located in a region surrounded by the supporting block.
It should be noted that, as an integral structure, the supporting blocks are formed on the first substrate 100 in steps, and referring to fig. 20, the supporting blocks include a first layer supporting block 101, a second layer supporting block 102, and a third layer supporting block 103, which are defined as integral supporting blocks. The first sacrificial layer 100 in this step is located inside the area enclosed by the first layer supporting block 101.
Forming a first sacrificial layer on the first substrate 100 by a vapor deposition method, the material of the first sacrificial layer including: phosphosilicate glass, borophosphosilicate glass, germanium, carbon, low temperature silica, polyimide, and the like, but are not limited to the above materials. And patterning the first sacrificial layer, and removing the first sacrificial layer at the position of the preformed supporting block to form the first layer supporting block 101.
Referring to fig. 15 to 21, forming the moving part 30, bonding the piezoelectric element 20, forming the elastic stoppers 40, and the second sacrificial layer on the first sacrificial layer 110 includes:
referring to fig. 15, step S21: forming a first dielectric layer on the first sacrificial layer 110 and the supporting block, and patterning the first dielectric layer to form a bottom wall 303 of the chute and an elastic limiting part 40;
forming a first dielectric layer on the first sacrificial layer 110 and the supporting block by physical vapor deposition or chemical vapor deposition, wherein the material of the first dielectric layer includes silicon oxide or silicon nitride, etching the first dielectric layer to form the bottom wall 303 of the runner and the elastic limiting member 40, and the elastic limiting member 40 may be various shapes of a flat spring, such as a corrugated zigzag shape. Referring to fig. 16, a top view of the elastic limiting member 40 is shown. Both ends of the elastic limiting member 40 are connected with the bottom wall 303 of the chute and the supporting block, respectively.
Referring to fig. 17, step S22: forming a second sacrificial layer covering the bottom wall 303 of the runner and the elastic limiting member 40;
forming an opening in the second sacrificial layer, and filling a second dielectric layer in the opening to serve as a side wall 302 of the sliding chute;
specifically, a second sacrificial layer is formed by a vapor deposition method, the material of the second sacrificial layer refers to the material of the first sacrificial layer, the second sacrificial layer covers the bottom wall 303 of the chute and the elastic limiting member 40, an opening is formed in the second sacrificial layer by an etching process, and a second dielectric layer is filled in the opening to serve as the side wall 302 of the chute.
With continued reference to fig. 17, step S23: bonding the fixed end of the piezoelectric element 20 on the supporting block, and the movable end is arranged above the chute bottom wall 301;
specifically, the fixed end of the piezoelectric element 20 is bonded to the supporting block by using an adhesive or a dry film adhesive, and the movable end is disposed above the sacrificial layer above the chute bottom wall 301.
With continued reference to fig. 17, step S24: and forming a third dielectric layer on the second sacrificial layer and the side wall, and patterning the third dielectric layer to form a top wall 301 of the sliding chute.
The material and the forming method of the third dielectric layer refer to the material and the forming method of the first dielectric layer, and are not described in detail herein.
In another embodiment, the elastic limiting member may be formed in the through hole after the side wall of the runner is formed and then the through hole is formed in the sacrificial layer. Or after the top wall of the chute is formed, a through hole is formed in the sacrificial layer, and an elastic limiting member is formed in the through hole. The elastic limiting parts formed by the three modes have the same structure and different heights.
In another embodiment, the elastic limiter includes a bottom connection portion and a side wall, and the forming of the moving part 30, the bonding of the piezoelectric element 20, the forming of the elastic limiter 40, and the second sacrificial layer on the first sacrificial layer 110 includes:
referring to fig. 18, step S21: forming a first dielectric layer on the first sacrificial layer 110 and the supporting block, patterning the first dielectric layer to form a bottom wall of the sliding chute and a first part 401 of the elastic limiting piece, and a third sacrificial layer located between the bottom wall 303 of the sliding chute, the first part 401 of the elastic limiting piece and the supporting block;
the material and the forming method of the first dielectric layer refer to the foregoing, and the material and the forming method of the third sacrificial layer refer to the material and the forming method of the first sacrificial layer, in this embodiment, the first portion 401 of the elastic limiting member is divided into a plurality of parallel strips, and serves as the bottom connecting portion of the elastic limiting member.
With continued reference to fig. 18, step S22: forming a fourth dielectric layer on the bottom wall of the sliding chute, the first part of the elastic limiting part and the third sacrificial layer, and patterning the fourth dielectric layer to form a side wall of the sliding chute and a second part 402 of the elastic limiting part;
the material and forming method of the fourth dielectric layer refer to the material and forming method of the first dielectric layer, the second portion 402 of the elastic limiting member is a side wall of the elastic limiting member, in this embodiment, the second portion of the elastic limiting member is formed between the end portions of each strip-shaped structure formed by the first portion of the elastic limiting member, and connects two strip-shaped end portions, and the shapes are connected like a plurality of M shapes.
With continued reference to fig. 18, step S23: forming a fourth sacrificial layer covering the side wall 302 of the runner, the second portion 402 of the elastic limiting member, the third sacrificial layer; and bonding the fixed end of the piezoelectric element on the supporting block, and arranging the movable end above the bottom wall of the sliding chute.
The material and the forming method of the fourth sacrificial layer are as described above with reference to the material and the forming method of the first sacrificial layer, and the manner of bonding the piezoelectric element is as described above.
Referring to fig. 19, step S24: forming a fifth dielectric layer on the fourth sacrificial layer, the piezoelectric element, the second part of the elastic limiting part and the side wall of the sliding chute, and patterning the fifth dielectric layer to form a top wall 301 of the sliding chute;
the first part 401 of the elastic limiting member and the second part 402 of the elastic limiting member constitute the elastic limiting member.
The material and forming method of the fifth dielectric layer refer to the material and forming method of the first dielectric layer, in this embodiment, the elasticity of the elastic limiting member is better than that of the previous embodiment.
In another embodiment, the elastic restriction member is in the shape of a spiral and is a hollow solid spring. Forming the moving part 30, bonding the piezoelectric element 20, forming the elastic stoppers 40, and the second sacrificial layer on the first sacrificial layer 110 include:
referring to fig. 20 and 21, fig. 21 is a top view of fig. 20, and on the basis of the previous embodiment, after the piezoelectric element is bonded, the method further includes: forming a sixth dielectric layer over the fourth sacrificial layer, the piezoelectric element 20, and the second portion 402 of the elastic restriction member, patterning the sixth dielectric layer to form a third portion 403 of the elastic restriction member;
the first part 401 of the elastic limiting member, the second part 402 of the elastic limiting member and the third part 403 of the elastic limiting member constitute the elastic limiting member 40.
It should be noted that, in the present embodiment, when the first portion 401 of the elastic limiting member is formed, the formed structure is a plurality of parallel and spaced bars, and when the second portion 402 of the elastic limiting member is formed, the formed positions are located at two ends of each bar-shaped structure formed by the first portion of the elastic limiting member, and the bar-shaped structures are parallel and vertical bars, that is, the two ends are heightened, so as to form a plurality of parallel vertical bars. The third portion 403 of the elastic limiting member is formed to connect two by two the vertical rods formed by the second portion 402 of the elastic limiting member. Form a three-dimensional spring shape.
It should be noted that, in the present specification, all the embodiments are described in a related manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the structural embodiment, since it is substantially similar to the method embodiment, the description is relatively simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (20)
1. A piezoelectric actuator, comprising:
the piezoelectric element comprises a movable end and a fixed end, wherein the movable end is provided with a sliding rod, and the direction from the movable end to the fixed end is the length direction;
the supporting block is used for fixing the fixed end of the piezoelectric element;
the moving part is arranged at the movable end of the piezoelectric element and provided with a sliding groove, the sliding rod extends into the sliding groove and can slide in the sliding groove along the length direction, and the sliding rod can drive the moving part to move upwards or downwards in an electrified state;
and one end of the elastic limiting piece is connected to the moving part, and the other end of the elastic limiting piece is connected to the supporting block and is used for limiting the rotation of the moving part.
2. The piezoelectric actuator of claim 1, wherein the elastic restriction is a spring.
3. The piezoelectric driver of claim 2, wherein the shape of the elastic restriction comprises: coil spring-like or zigzag-like.
4. The piezoelectric actuator according to claim 1, wherein a projection shape of the elastic restriction member on a first face perpendicular to the length direction or a second face parallel to the length direction includes a trapezoid, a rectangle, or a triangle.
5. The piezoelectric actuator of claim 1, wherein the elastic restriction is the same or different material than the runner.
6. The piezoelectric actuator according to claim 1, wherein the moving member is provided with a first film layer, a second film layer and a third film layer stacked in sequence from top to bottom, two sides of the first film layer and the third film layer extend outward relative to the second film layer to form a protruding portion, and the protruding portion and an end of the second film layer enclose the sliding groove.
7. The piezoelectric actuator of claim 1, wherein the runners are of unitary construction with the resilient constraints.
8. The piezoelectric driver according to claim 1, wherein the slide bar is disposed at both sides or in the middle of the movable end, and the slide groove corresponds to a position direction of the slide bar.
9. The piezoelectric actuator according to claim 1, wherein the number of the elastic stoppers is at least two, and the elastic stoppers are symmetrically disposed on two sides of the piezoelectric element.
10. The piezoelectric actuator according to claim 1, wherein the piezoelectric element is fixed to an upper surface of the support block or,
the supporting blocks comprise an upper layer supporting block and a lower layer supporting block which are vertically distributed, and the piezoelectric elements are fixed between the upper layer supporting block and the lower layer supporting block.
11. The piezoelectric actuator according to claim 1, wherein the material of the elastic stopper comprises a dielectric material or an organic material.
12. The piezoelectric driver according to claim 1, wherein the piezoelectric element includes: the piezoelectric actuator comprises a support layer and a piezoelectric laminated structure positioned on the support layer, wherein the piezoelectric laminated structure comprises: the upper surface and the lower surface of each piezoelectric film are distributed with electrodes, and two adjacent piezoelectric films share the electrode positioned between the two piezoelectric films;
the electrodes are counted from bottom to top in sequence, the electrodes of the odd layers are electrically connected together, and the electrodes of the even layers are electrically connected together.
The first leading-out end is electrically connected with the odd layer electrode; the second leading-out terminal is electrically connected with the even layer electrode;
the first leading-out end and the second leading-out end are both positioned on the top surface or the bottom surface of the piezoelectric element, or one of the first leading-out end and the second leading-out end is positioned on the top surface and the other one is positioned on the bottom surface.
13. An imaging module comprising the piezoelectric actuator of any one of claims 1 to 12, further comprising:
a driven part including a lens group, an imaging sensor element, an aperture or a lens sheet, the driven part being fixed to a surface of the moving part;
and the electric connection end is electrically connected with the piezoelectric driver.
14. The imaging module of claim 13, wherein the piezoelectric actuator is a plurality of piezoelectric actuators distributed around the driven member.
15. The imaging module of claim 14, wherein a plurality of the piezoelectric actuators are symmetrically disposed.
16. The imaging module of claim 13, wherein the securing means comprises dry film bonding or adhesive bonding.
17. A method of manufacturing a piezoelectric actuator, comprising:
providing a first substrate, and forming a supporting block and a first sacrificial layer positioned on the periphery of the supporting block on the first substrate;
forming a moving part on the first sacrificial layer, the moving part including a runner;
providing a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the movable end is provided with a sliding rod, the fixed end of the piezoelectric element is bonded on the supporting block, and the sliding rod extends into the sliding groove;
forming an elastic limiting piece on the first sacrificial layer, wherein one end of the elastic limiting piece is connected with the supporting block, and the other end of the elastic limiting piece is connected with the moving part;
forming a second sacrificial layer in which the moving part and the elastic limiting member are located;
and removing the first sacrificial layer and the second sacrificial layer.
18. The method of manufacturing an electrical actuator of claim 17 wherein forming moving parts on the first sacrificial layer, bonding piezoelectric elements, forming elastic constraints, and forming a second sacrificial layer comprises:
forming a first medium layer on the first sacrificial layer and the supporting block, and patterning the first medium layer to form a bottom wall of the sliding chute and an elastic limiting piece;
forming a second sacrificial layer covering the bottom wall of the chute and the elastic limiting piece;
forming an opening in the second sacrificial layer, and filling a second dielectric layer in the opening to be used as a side wall of the sliding groove;
bonding a fixed end of the piezoelectric element on the supporting block, wherein the movable end is arranged above the bottom wall of the chute;
and forming a third dielectric layer on the second sacrificial layer and the side wall, and patterning the third dielectric layer to form the top wall of the sliding chute.
19. The method of manufacturing an electrical actuator of claim 17 wherein forming moving parts on the first sacrificial layer, bonding piezoelectric elements, forming elastic constraints, and forming a second sacrificial layer comprises:
forming a first medium layer on the first sacrificial layer and the supporting block, patterning the first medium layer to form a bottom wall of the sliding chute and a first part of the elastic limiting part, and a third sacrificial layer positioned among the bottom wall of the sliding chute, the first part of the elastic limiting part and the supporting block; forming a fourth medium layer on the bottom wall of the sliding chute, the first part of the elastic limiting part and the third sacrificial layer, and patterning the fourth medium layer to form the side wall of the sliding chute and the second part of the elastic limiting part;
forming a fourth sacrificial layer covering the side wall of the runner, the second part of the elastic limiting piece and the third sacrificial layer;
bonding a fixed end of the piezoelectric element on the supporting block, wherein the movable end is arranged above the bottom wall of the chute;
forming a fifth dielectric layer on the fourth sacrificial layer, the piezoelectric element, the second part of the elastic limiting part and the side wall of the sliding chute, and patterning the fifth dielectric layer to form a top wall of the sliding chute;
the third sacrificial layer and the fourth sacrificial layer form the second sacrificial layer;
the first portion of the elastic restriction member and the second portion of the elastic restriction member constitute the elastic restriction member.
20. The method of manufacturing an electrical actuator of claim 19, further comprising, after bonding the piezoelectric element:
forming a sixth dielectric layer over the fourth sacrificial layer, the piezoelectric element, and the second portion of the elastic limiting member, and patterning the sixth dielectric layer to form a third portion of the elastic limiting member;
the first portion of the elastic limiting member, the second portion of the elastic limiting member, and the third portion of the elastic limiting member constitute the elastic limiting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911418275.6A CN113131782A (en) | 2019-12-31 | 2019-12-31 | Piezoelectric driver, manufacturing method thereof and imaging module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911418275.6A CN113131782A (en) | 2019-12-31 | 2019-12-31 | Piezoelectric driver, manufacturing method thereof and imaging module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113131782A true CN113131782A (en) | 2021-07-16 |
Family
ID=76769219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911418275.6A Pending CN113131782A (en) | 2019-12-31 | 2019-12-31 | Piezoelectric driver, manufacturing method thereof and imaging module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113131782A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110101806A1 (en) * | 2008-07-11 | 2011-05-05 | Loevgren Torbjoern | Safety Device for a Linear Actuator and a Linear Actuator |
| CN103476702A (en) * | 2010-12-07 | 2013-12-25 | 普利麦克斯有限公司 | Process for manufacturing electro-mechanical systems |
| CN103985814A (en) * | 2014-05-13 | 2014-08-13 | 上海集成电路研发中心有限公司 | Double-layer piezoelectric film cantilever beam sensor structure and manufacturing method thereof |
| US20180364449A1 (en) * | 2016-03-29 | 2018-12-20 | Fujifilm Corporation | Focusing mechanism and imaging module |
| CN109250682A (en) * | 2018-09-25 | 2019-01-22 | 中国电子科技集团公司第四十九研究所 | A kind of preparation method of suspension beam-membrane structure |
-
2019
- 2019-12-31 CN CN201911418275.6A patent/CN113131782A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110101806A1 (en) * | 2008-07-11 | 2011-05-05 | Loevgren Torbjoern | Safety Device for a Linear Actuator and a Linear Actuator |
| CN103476702A (en) * | 2010-12-07 | 2013-12-25 | 普利麦克斯有限公司 | Process for manufacturing electro-mechanical systems |
| CN103985814A (en) * | 2014-05-13 | 2014-08-13 | 上海集成电路研发中心有限公司 | Double-layer piezoelectric film cantilever beam sensor structure and manufacturing method thereof |
| US20180364449A1 (en) * | 2016-03-29 | 2018-12-20 | Fujifilm Corporation | Focusing mechanism and imaging module |
| CN109250682A (en) * | 2018-09-25 | 2019-01-22 | 中国电子科技集团公司第四十九研究所 | A kind of preparation method of suspension beam-membrane structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9621775B2 (en) | Electrical bar latching for low stiffness flexure MEMS actuator | |
| KR101309795B1 (en) | varifocal optical device | |
| US7800651B2 (en) | Image-stabilization driving device | |
| KR102019098B1 (en) | Micro electro mechanical systems device | |
| US20220066125A1 (en) | Lens module and camera module including the same | |
| KR20160034080A (en) | Actuator Unit and Camera Module | |
| CN113130734A (en) | Piezoelectric driving structure and imaging module | |
| KR102085803B1 (en) | MICRO ELECTRO MECHANICAL SYSTEMS DEVICE and CAMERA MODULE HAVING THE SAME | |
| CN113131782A (en) | Piezoelectric driver, manufacturing method thereof and imaging module | |
| CN112351158B (en) | Imaging module, forming method thereof and lens assembly | |
| CN112825542B (en) | Imaging module | |
| CN210323540U (en) | Piezoelectric USM lens driving device for auto-focusing and camera device | |
| US20060209427A1 (en) | Electrostatic actuator and image pickup apparatus using the same | |
| JP4924347B2 (en) | Moving mechanism, imaging unit, and imaging apparatus | |
| CN113132570B (en) | Imaging module and electronic equipment | |
| CN113067496B (en) | Piezoelectric driver, manufacturing method thereof and imaging module | |
| CN112311977B (en) | Imaging module, forming method thereof and lens assembly | |
| CN113067964B (en) | Piezoelectric actuator and imaging module | |
| JP4068086B2 (en) | Electrostatic actuator and imaging device | |
| CN112485880B (en) | Lens module and lens assembly | |
| JP2009071663A (en) | Movement mechanism and imaging apparatus | |
| JP2012521569A (en) | Micro imaging device | |
| CN113675328B (en) | Piezoelectric driver, manufacturing method thereof and imaging module | |
| CN112351159B (en) | Imaging module and lens assembly | |
| CN112866444B (en) | Imaging module and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |