CN113067964B - Piezoelectric actuator and imaging module - Google Patents
Piezoelectric actuator and imaging module Download PDFInfo
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- CN113067964B CN113067964B CN201911417713.7A CN201911417713A CN113067964B CN 113067964 B CN113067964 B CN 113067964B CN 201911417713 A CN201911417713 A CN 201911417713A CN 113067964 B CN113067964 B CN 113067964B
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
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Abstract
The invention discloses a piezoelectric actuator and an imaging module, wherein the piezoelectric actuator comprises: the piezoelectric actuator comprises a first piezoelectric element and a second piezoelectric element which are oppositely arranged along a first direction, wherein the first direction is the length direction of the piezoelectric elements; the piezoelectric element comprises a movable end and a fixed end, and the movable end is provided with a sliding rod; the piezoelectric actuator comprises a first supporting block and a second supporting block which are oppositely arranged, wherein the fixed end of a first piezoelectric element is fixed on the first supporting block, and the fixed end of a second piezoelectric element is fixed on the second supporting block; the sliding rod is inserted into the sliding groove and can slide along a first direction; the first moving part is fixedly connected with the second moving part and arranged between the movable ends; when the piezoelectric element is in an electrified state, the sliding rod drives the first moving part and the second moving part to move up and down, and the surfaces of the first moving part and the second moving part are used for fixing the driven part.
Description
Technical Field
The invention relates to the technical field of motion control, in particular to a piezoelectric driver and an imaging module.
Background
In some electronic terminals, it is often necessary to translate, vertically move or tilt some of the components to achieve some specific functions. For example, in various electronic terminals such as video cameras, still cameras, and mobile phones having a lens module, a movable lens or an image sensor is usually moved in an optical axis direction to focus or zoom or moved in a direction perpendicular to the optical axis direction to prevent optical shake by a driving mechanism such as a VCM Motor. However, unlike the conventional single lens reflex camera, it is a great engineering challenge to implement the function in electronic terminals such as mobile phones, micro video cameras, and cameras with a small spatial volume. Referring to fig. 1A and 1B, which are main structural views of a brake, fig. 1A shows an ideal state after a sacrificial layer is released, in which a moving member 400 is in a balanced state, and fig. 1B shows an actual state after the sacrificial layer is released, in which the moving member 400 rotates by gravity. In some cases, the actuator is required to release the sacrificial support layer and then bond with the element to be actuated, and the rotation of the moving part 400 affects the subsequent bonding of the element. In addition, referring to fig. 2A and 2B, fig. 2A is a schematic structural diagram of the moved element 30 moving upward in an ideal state, and fig. 2B is a schematic structural diagram of the moved element 30 moving laterally, so how to solve the above two problems is a problem to be solved at present.
Disclosure of Invention
The invention aims to provide a piezoelectric driver and an imaging module, which can solve the problems that a moving part rotates under the action of gravity after a sacrificial layer is released and a driven part moves horizontally when moving upwards or downwards.
In order to achieve the above object, the present invention provides a piezoelectric actuator comprising: the piezoelectric actuator comprises a first piezoelectric element and a second piezoelectric element which are oppositely arranged along a first direction, wherein the first direction is the length direction of the piezoelectric elements;
the piezoelectric element comprises a movable end and a fixed end, and sliding rods extending out of the movable end are arranged on two sides of the movable end;
the piezoelectric actuator comprises a first supporting block and a second supporting block which are oppositely arranged, wherein the fixed end of a first piezoelectric element is fixed on the first supporting block, and the fixed end of a second piezoelectric element is fixed on the second supporting block; the movable ends of the piezoelectric elements are arranged oppositely;
the sliding rod comprises a first moving component with a first sliding groove and a second moving component with a second sliding groove, wherein the first sliding groove and the second sliding groove are arranged in a back-to-back manner, and the sliding rod extends into the sliding grooves and can slide along the first direction; the first moving part is fixedly connected with the second moving part and arranged between the movable ends;
when the piezoelectric element is in a power-on state, the sliding rod drives the moving part to move upwards or downwards, and the surface of the moving part is used for fixing the driven part.
The present invention further provides an imaging module, which includes the above piezoelectric driver, and further includes:
a driven part including a lens group, an imaging sensor element, an aperture or a lens sheet, the driven part being fixed to a surface of the moving part
And the electric connection end is connected with the electrodes in the first piezoelectric element and the second piezoelectric element.
The invention has the advantages that the first piezoelectric element and the second piezoelectric element which are arranged opposite to the movable end share one moving part, and the slide bars of the piezoelectric elements at two sides mutually restrict the rotation of the opposite moving part, so that the rotation of the moving part under the action of gravity is limited.
Further, the length of the sliding groove along the length direction of the piezoelectric element is adapted to the height of the piezoelectric element moving up and down, namely when the piezoelectric element is in a balanced state, the sliding rod is positioned at the end part of the sliding groove on the side far away from the movable end, and when the piezoelectric element moves up or down to the highest or lowest position, the sliding rod is positioned at the end part of the sliding groove on the side close to the movable end. In this arrangement, when the driven member is lifted, the horizontal movement of the driven member in the longitudinal direction of the chute is minimized. Especially when the slide bar slides to the end of the slide groove, the movement of the driven member in the length direction of the slide groove can be completely restricted.
Further, the length of the slide groove in the width direction of the piezoelectric element is matched with the length of the slide groove, and the lateral movement of the moved member in the width direction of the piezoelectric element is restricted, thereby restricting the horizontal movement of the driven member in the width direction of the piezoelectric element.
Further, when the four piezoelectric actuators are symmetrically arranged around the driven part (two piezoelectric actuators are perpendicular to each other), the piezoelectric actuators restrict the horizontal movement of the driven part from two perpendicular directions, so that the lateral movement of the driven part in the whole horizontal plane is limited.
Drawings
Fig. 1A is a structural diagram of a piezoelectric actuator in an example, which is an ideal state after a sacrificial layer is released.
Fig. 1B shows the piezoelectric actuator of fig. 1A in a state where the movable member is rotated after the sacrificial layer is released.
Fig. 2A is an ideal state when the driven member moves upward in one example.
Fig. 2B shows an example in which the driven member moves horizontally when moving upward.
Fig. 3 is a schematic diagram of a piezoelectric actuator according to an embodiment of the invention.
Fig. 4 is a top view of the piezoelectric actuator shown in fig. 3.
Fig. 5 is a schematic structural diagram of a piezoelectric element according to an embodiment of the invention.
FIG. 6 is a schematic diagram of a distribution structure of sliding bars according to an embodiment of the present invention.
Fig. 7 is a schematic structural diagram of a chute according to an example.
FIG. 8 is a schematic view of a chute according to an embodiment of the invention
Fig. 9 is a schematic structural diagram of an imaging module according to an embodiment of the invention.
Fig. 10 is a top view of the imaging module shown in fig. 9.
Fig. 11 is a schematic structural diagram of piezoelectric actuators distributed around a driven component according to an embodiment of the present invention.
Description of the reference numerals: 400-a moving part; 30-a driven member; 20-a piezoelectric element; 20A-a first piezoelectric element; 20B-a second piezoelectric element; 201-a slide bar; 401 — a first moving part; 402-a second moving part; 40-a chute; 40A-a first chute; 40B-a second runner; 50A-a first support block; 50B-a second support block; 21-a first electrode; 22-a second electrode; 23-a piezoelectric film; 24-a support layer; 25-an insulating layer; 251-a first electrode connection end; 252-a second electrode connection end; 41-a first film layer; 42-a second film layer; 43-a third film layer; 61-a first electrical connection; 62-a second electrical connection; 63-conductive plug.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. The advantages and features of the present invention will become more apparent from the following description and drawings, it being understood, however, that the concepts of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. The drawings are in simplified form and are not to scale, but are provided for convenience and clarity in describing embodiments of the invention.
It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
If the method herein comprises a series of steps, the order in which these steps are presented herein is not necessarily the only order in which these steps may be performed, and some steps may be omitted and/or some other steps not described herein may be added to the method. Although elements in one drawing may be readily identified as such in other drawings, the present disclosure does not identify each element as being identical to each other in every drawing for clarity of description.
Example 1
Fig. 3 is a schematic structural diagram of a piezoelectric actuator according to an embodiment of the present invention, and fig. 4 is a top view of fig. 3, referring to fig. 3, the piezoelectric actuator includes: the piezoelectric element includes a first piezoelectric element 20A and a second piezoelectric element 20B which are arranged to face each other in a first direction, which is a longitudinal direction of the piezoelectric element 20. The first piezoelectric element 20A and the second piezoelectric element 20B are identical and may be referred to as piezoelectric elements.
The piezoelectric element comprises a movable end and a fixed end, and two sides of the movable end are provided with slide bars 201 extending out of the movable end;
the piezoelectric actuator comprises a first supporting block 50A and a second supporting block 50B which are oppositely arranged, wherein the fixed end of the first piezoelectric element 20A is fixed on the first supporting block 50A, and the fixed end of the second piezoelectric element 20B is fixed on the second supporting block 50B; the movable ends of the first piezoelectric element 20A and the second piezoelectric element 20B are disposed opposite to each other;
a first moving member 401 having a first sliding slot 40A, and a second moving member 402 having a second sliding slot 40B, wherein the first sliding slot 40A and the second sliding slot 40B are disposed opposite to each other, and the sliding rod 201 extends into the sliding slots and can slide along the first direction; the first moving member 401 is fixedly connected to the second moving member 402 and disposed between the movable ends of the two piezoelectric elements; the first chute 40A and the second chute 40B have the same structure and can be called chutes.
When the piezoelectric element is in an energized state, the sliding rod 201 drives the first moving part and the second moving part to move upwards or downwards, and the surfaces of the first moving part and the second moving part are used for fixing the driven part. Since the first moving part and the second moving part are connected together, the moving part referred to herein is a combination of the first moving part and the second moving part.
The working principle of the piezoelectric actuator is as follows: the driving component of the piezoelectric actuator is a piezoelectric element (including a first piezoelectric element 20A and a second piezoelectric element 20B), one end of the first piezoelectric element 20A fixed to the first supporting block 50A is a fixed end, the other end is a movable end, one end of the second piezoelectric element 20B fixed to the second supporting block 50B is a fixed end, the other end is a movable end, and the movable end moves upwards or downwards when the piezoelectric element is in a power-on state. Specifically, referring to fig. 5, taking a piezoelectric element as an example, the specific structure of the piezoelectric element includes a support layer 24 and a piezoelectric stack structure located on the support layer 24, where the piezoelectric stack structure includes a second electrode 22, a piezoelectric film 23 and a first electrode 21 stacked in sequence from bottom to top, an insulating layer 25 is further disposed above the first electrode 21, the first electrode 21 and the second electrode 22 are respectively connected to a first electrode leading-out terminal 251 and a second electrode leading-out terminal 252, and the first electrode leading-out terminal 251 and the second electrode leading-out terminal 252 are both located in the insulating layer 25.
When the first electrode lead 251 and the second electrode lead 252 are energized, a voltage difference is generated between the upper surface and the lower surface of the piezoelectric film 23, and the piezoelectric film 23 contracts, and the support layer 24 cannot expand or contract, so that the piezoelectric element warps upward or downward (the direction of the warpage, the degree of the warpage depends on the voltages applied to the upper and lower surfaces of the piezoelectric film 23) after the energization, and the movable end of the piezoelectric element bends upward or downward. When the movable end of the piezoelectric element is provided with the element, the element can be driven to move up and down.
The piezoelectric film 23 is made of a piezoelectric material that can be deformed when energized, such as quartz crystal, aluminum nitride, zinc oxide, lead zirconate titanate, barium titanate, lithium gallate, lithium germanate, or titanium germanate. The material of the support layer 24 is a dielectric material that is not electrically conductive, such as silicon oxide, silicon nitride, etc.
In this embodiment, two sides of the movable end of each of the first piezoelectric element 20A and the second piezoelectric element 20B are respectively provided with a sliding rod 201, and one side opposite to the movable end of the first piezoelectric element 20A is provided with a first moving member 401, and the first moving member is provided with a first sliding groove 40A; a second moving member 402 is provided on the side opposite to the movable end of the second piezoelectric element 20B, and the second moving member 402 is provided with a second slide groove 40B. The first moving member 401 and the second moving member 402 are connected, and the first slide groove 40A and the second slide groove 40B are away from each other. The first moving member 401 and the second moving member 402 are integrally located between the movable ends of the two piezoelectric elements. In this embodiment, the first sliding chute 40A and the second sliding chute 40B include a first sub-sliding chute and a second sub-sliding chute symmetrically arranged along the width direction of the piezoelectric element 20, and the two sliding rods 201 respectively extend into the corresponding sub-sliding chutes. The slide bar 201 is movable in the slide groove in the longitudinal direction of the piezoelectric element 20. When the movable end of the piezoelectric element moves up or down, the sliding rod 201 drives the moving member to move up or down.
In another embodiment, referring to fig. 6, the sliding rod 201 is located in the middle of the piezoelectric element 20, the rotating shaft 201 is distributed in the center of the end of the movable end of the piezoelectric element 20, and a gap is formed between the rotating shaft 201 and the piezoelectric element 20 in the direction perpendicular to the axial direction of the rotating shaft 201, so that after the rotating shaft 201 is placed in the sliding slot, the piezoelectric element 20 is not located in the sliding slot. In the present invention, the number of the rotating shafts 201 of each piezoelectric element 20 is not limited to 1, and a plurality of rotating shafts 201 may be uniformly distributed in the center of the end portion of the movable end of the piezoelectric element 20, a gap is formed between each rotating shaft 201 and the piezoelectric element 20 in the direction perpendicular to the axial direction of the rotating shaft 201, and each rotating shaft 201 is disposed in the sliding slot.
When the piezoelectric actuator is manufactured, the first supporting block 50A, the second supporting block 50B, the piezoelectric element 20, the first moving part 20A and the second moving part 20B are all embedded in a sacrificial layer, and as the first moving part 20A and the second moving part 20B are connected together, after the sacrificial layer is released, the sliding rod of the first piezoelectric element and the sliding rod of the second piezoelectric element jointly support the combination body of the first moving part and the second moving part, and the two sliding rods extending into the sliding grooves jointly restrict the rotation of the first moving part 20A and the second moving part 20B under the action of gravity.
The first moving part and the second moving part may be fixedly connected in various ways, for example, the first moving part and the second moving part are fixedly connected through a common connecting film layer. The connecting film can be located on the upper surface or the lower surface of the first moving component and the second moving component, or the connecting film is a film layer forming the first moving component and the second moving component, in this embodiment, the first moving component or the second moving component is provided with a first film layer, a second film layer and a third film layer which are stacked from top to bottom in sequence, two sides of the first film layer and the third film layer are opposite to each other, the second film layer extends outwards to form a protruding portion, and the protruding portion and the end portion of the second film layer enclose the first sliding groove or the second sliding groove. The common tie film layer includes at least one of the first, second, or third film layers. In this embodiment, the three film layers located between the movable end portions of the two piezoelectric elements together constitute the common connecting film.
In another embodiment, the fixed connection is achieved by adhesively connecting two opposite ends of the first moving part and the second moving part by means of an adhesive material.
Referring to fig. 7, in one example, the first moving member 20A and the second moving member 20B are provided with a first film 41, a second film 42, and a third film 43 stacked in sequence from top to bottom, and both sides of the first film 41 and the third film 43 protrude outward relative to the second film 42 to form protruding portions, and the protruding portions and the ends of the second film 42 enclose a sliding groove. The chute 40 has an opening in the direction in which the piezoelectric element 20 extends and contracts, and when the piezoelectric element 20 warps, the slide rod 201 moves in the direction in which the chute 40 opens.
In this embodiment, referring to fig. 8, a schematic structural diagram of the chute 40 is shown, and with reference to fig. 7, the chute 40 is provided with an opening along the length direction (arrow X direction) of the piezoelectric element 20, and the slide rod 201 moves to the opening and risks falling from the opening, and fig. 8 is a schematic structural diagram of a cross section of the chute 40 viewed along the width direction (arrow Y direction) of the piezoelectric element after the opening is closed. Two ends of the sliding groove 40 in the first direction are provided with blocking walls, and the distance between the blocking walls is adapted to the vertical moving height of the piezoelectric element. Specifically, the cross section of the sliding chute 40 is annular, and when the sliding rod 201 slides to the edge of the sliding chute 40, the sliding rod cannot fall out of the sliding chute 40 due to being blocked.
In addition, the length of the sliding groove 40 along the length direction of the piezoelectric element is adapted to the height of the piezoelectric element moving up and down. That is, when the piezoelectric element 20 is in the equilibrium state, the slide rod 201 is located at the end of the slide groove 40 on the side away from the movable end, and when the piezoelectric element 20 moves up or down to the highest or lowest position, the slide rod 201 is located at the end of the slide groove 40 on the side close to the movable end. In this arrangement, when the driven member is lifted, the horizontal movement of the driven member in the longitudinal direction of the chute is minimized. Especially when the slide bar 201 slides to the end of the slide groove 40, the movement of the driven member in the length direction of the slide groove 40 can be completely restricted.
In this embodiment, the depth and height of the chute 40 match the length and height of the chute. The depth of the sliding groove 40 is the length of the sliding groove in the width direction of the piezoelectric element, and the depth is matched with the length of the sliding rod 201, which means that the gap between the end of the sliding rod 201 and the inner wall of the sliding groove 40 opposite to the end of the sliding rod 201 is small, in this embodiment, the sliding rod 201 extends out of two sides of the movable end, and the top ends of the sliding rods 201 on two sides are provided with small gaps with the inner wall of the sliding groove 40, so that the horizontal movement of the driven part in the width direction of the piezoelectric element can be restricted. When the slide rod 201 is positioned in the middle of the movable end of the piezoelectric element, the gap between both ends of the slide rod 201 and the two opposite side walls of the chute 40 is also small, thereby controlling the horizontal movement of the driven member in the width direction of the piezoelectric element.
The first support block 50A and the second support block 50B are used to support the first piezoelectric element 20A and the second piezoelectric element 20B, and may be separate bodies or may be an integral body. When the first supporting block is fixedly connected with the second supporting block, a closed annular supporting block is formed, and the first piezoelectric element, the second piezoelectric element, the first moving part and the second moving part are located in the annular part. It can be understood that when the first supporting block and the second supporting block are an integral body, the stability of the piezoelectric actuator structure is better enhanced, and in addition, the piezoelectric element and the moving part are arranged in the space enclosed by the supporting blocks, so that the piezoelectric element can be protected.
The piezoelectric element 20 may be fixed above the surface of the supporting block 50, or may be fixed inside the supporting block 50, for example, the supporting block 50 includes a first layer supporting block 51 and a second layer supporting block 52 stacked in sequence from bottom to top, and the fixed end of the piezoelectric element 20 is fixed between the first layer supporting block 51 and the second layer supporting block 52. The supporting wall 50 of the present invention is not limited to include two layers, but may include three layers, four layers, etc., as long as the fixing end of the piezoelectric element 20 is inserted into the supporting block 50 to be fixed.
Referring to fig. 3, in the present embodiment, a space is provided between the first supporting block 20A and the second supporting block 20B, and the movable end of the piezoelectric element is located in the space and suspended in the space. In this arrangement, the piezoelectric element can be moved both upwards and downwards. In another embodiment, a support block is arranged below the movable end of the piezoelectric element, and the support block can support the piezoelectric element and the movable part, but the piezoelectric element can only be lifted upwards and can not move downwards.
The connection mode of the fixed end of the piezoelectric element and the supporting block comprises: adhesive bonding, or by dry film bonding.
Example 2
An embodiment of the present invention further provides an imaging module, fig. 9 shows a schematic structural diagram of an imaging module according to an embodiment of the present invention, fig. 10 is a top view of fig. 9, and referring to fig. 9 and 10, the imaging module includes the piezoelectric actuator described above, and further includes a driven part 30, the driven part includes a lens group, an imaging sensing element, a diaphragm or a lens sheet, and the driven part is fixed on the surfaces of the first moving part and the second moving part;
and the electric connection end is electrically connected with the piezoelectric driver.
The surface of the driven member 30 fixed to the first moving member and the second moving member includes: when the imaging module is driven by only one piezoelectric actuator, the driven member 30 may be bonded to the upper surface or the lower surface of the moving member. When the imaging module includes a plurality of piezoelectric actuators, the driven members may be all located on the upper surface or the lower surface of the moving member, or a part of the moving member may be fixed to the upper surface of the driven member and another part of the moving member may be fixed to the lower surface of the driven member.
In this embodiment, the number of the piezoelectric actuators is 1, and the driven member is fixed above the surfaces of the first moving member and the second moving member, where the fixing manner includes dry film bonding or adhesive bonding. In another embodiment, referring to fig. 11, four piezoelectric actuators are symmetrically disposed on the outer periphery of the driven member 30, and the outer peripheral edge of the driven member 30 is bonded to the edge of the moving member (including the first moving member and the second moving member). This arrangement constrains the horizontal movement of the driven member 30 from two perpendicular directions, thereby limiting the lateral movement of the driven member in the entire horizontal plane, the principle of which is described above. In other embodiments, the piezoelectric actuators may be two symmetrically distributed or a plurality symmetrically or asymmetrically distributed.
Referring to fig. 9, the first electrode tap 251 and the second electrode tap 252 (not shown) of the piezoelectric element 20 are located at the bottom surface of the piezoelectric element 20. The first supporting block 50A and the second supporting block 50B have a first electrical connection end 61 and a second electrical connection end 62 on the lower surface thereof, which are located right below the piezoelectric element 20. Only the support block on the left side is shown in the figures, it being understood that the left and right configurations are identical. The supporting block 50 is provided therein with a conductive plug 63 connected to the first electrical connection terminal 61, the other end of the conductive plug is electrically connected to the first electrode terminal 251 of the piezoelectric element 20, and the second electrical connection terminal 62 is electrically connected to the second electrode terminal 252 of the piezoelectric element 20 through another conductive plug 63. The lower end of the conductive plug is electrically connected to the circuit board 10 to supply power to the piezoelectric driving part.
When the first electrode leading-out end and the second electrode leading-out end are both positioned on the top surface of the piezoelectric element, the first electrode leading-out end and the second electrode leading-out end can be respectively and electrically connected with a circuit board through a lead wire, so that the circuit board can apply voltage to the piezoelectric driver.
The invention is not limited to directly connecting the first electrode leading-out end, the second electrode leading-out end and the circuit board through leads, and an electric connection end can be arranged on the top surface of the supporting block, the first electrode leading-out end, the second electrode leading-out end and the electric connection end are electrically connected through leads, and then the electric connection end on the top surface of the supporting block is electrically connected with the circuit board through another interconnection structure (such as a lead or a conductive plug), so that the length of the lead can be shortened.
When the fixed end of the piezoelectric element is fixed between the upper layer supporting block and the lower layer supporting block, the first electrode leading-out end of the piezoelectric element is located on the upper surface of the piezoelectric element, the first electric connection end and the second electric connection end can be both arranged on the upper surface of the upper layer supporting block, and the first electrode leading-out end and the second electrode leading-out end are respectively connected to the first electric connection end and the second electric connection end through the conductive plug penetrating through the upper layer supporting block right above the piezoelectric element.
When the fixed end of the piezoelectric element is fixed between the upper layer supporting block and the lower layer supporting block, one of the first electrode leading-out end and the second electrode leading-out end is positioned on the upper surface of the piezoelectric element, and the other one is positioned on the lower surface of the piezoelectric element. The upper surface of the upper layer supporting block and the lower surface of the lower layer supporting block are respectively provided with an electric connection end, and the electrode leading-out end is electrically connected with the electric connection end through a conductive plug.
Example 3
The difference from embodiment 1 is that the driven member is an imaging sensor element.
The top surface of the first piezoelectric element or the second piezoelectric element is also provided with a wiring layer, the wiring layer is positioned in the insulating layer, and the two ends of the wiring layer are provided with a third electric connection end and a fourth electric connection end which are exposed out of the insulating layer. The third electric connection end is closer to the driven part than the fourth electric connection end, a fifth electric connection end is arranged on the upper surface of the driven part, the third electric connection end and the fifth electric connection end are electrically connected through a flexible connecting piece, and the fourth electric connection end is electrically connected with the circuit board through a lead so that the circuit board supplies power or provides signals for the imaging sensing element. Compared with the way of directly electrically connecting the fifth electrical connection end of the imaging sensing element with the circuit board by using a lead, the length of the flexible connection member in this embodiment can be shorter (the closer the third electrical connection end is to the imaging sensing element, the shorter the length of the flexible connection member is), and the flexible connection member is not pulled by the driven member when the driven member moves up or down.
In the present invention, the third electrical connection end is not limited to be located on the top surface of the piezoelectric element, for example, when the support block includes a first layer of support block and a second layer of support block stacked in sequence from bottom to top, and the fixed end of the piezoelectric element is fixed between the first layer of support block and the second layer of support block, the third electrical connection end may be directly located on the top of the support block and electrically connected to the circuit board by using a lead. It should be understood that, in the present invention, the third electrical connection end is not limited to be electrically connected to the circuit board through a lead, and a sixth electrical connection end may also be directly formed on the top surface of the supporting block, the fourth electrical connection end is electrically connected to the sixth electrical connection end through a lead, and another interconnection structure is further disposed in the supporting block and electrically connects the sixth electrical connection end and the circuit board, so that the circuit board can supply power to the moved element or transmit signals. The flexible connecting piece in this embodiment is a flexible interconnection line, and the interconnection structure is a conductive plug.
In the present invention, the sixth electrical connection end may also be electrically connected to the circuit board by other interconnection manners, and the flexible connection member and the interconnection structure may also be other structures, which is not limited in the present invention.
Example 4
In this embodiment, the driven member is a mirror.
The moving part of the piezoelectric actuator is connected with one side of the reflector, the other side, opposite to the reflector, of the reflector is rotatably connected with a supporting surface, and when the piezoelectric element is electrified and warped upwards or downwards, the reflector is inclined, so that the purpose of changing the reflection angle is achieved.
In the present invention, one side of the mirror is not limited to one piezoelectric actuator, and two or more piezoelectric actuators may be provided.
It should be understood that the mirror is not limited to having the piezo actuators distributed on only one side, but may also have the piezo actuators distributed on two sides, four sides, circumferentially.
It should be noted that, in the present specification, all the embodiments are described in a related manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, for the structural embodiment, since it is substantially similar to the method embodiment, the description is relatively simple, and for the relevant points, reference may be made to the partial description of the method embodiment.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (20)
1. A piezoelectric actuator, comprising:
the piezoelectric element comprises a first piezoelectric element and a second piezoelectric element which are oppositely arranged along a first direction, wherein the first direction is the length direction of the piezoelectric elements;
the piezoelectric element comprises a movable end and a fixed end, and the movable end is provided with a sliding rod;
the piezoelectric actuator comprises a first supporting block and a second supporting block which are oppositely arranged, wherein the fixed end of a first piezoelectric element is fixed on the first supporting block, and the fixed end of a second piezoelectric element is fixed on the second supporting block; the movable ends of the piezoelectric elements are arranged oppositely;
the sliding rod comprises a first moving component with a first sliding groove and a second moving component with a second sliding groove, wherein the first sliding groove and the second sliding groove are arranged in a back-to-back manner, and the sliding rod extends into the sliding grooves and can slide along the first direction; the first moving part is fixedly connected with the second moving part and arranged between the movable ends;
when the piezoelectric element is in an electrified state, the sliding rod drives the first moving part and the second moving part to move upwards or downwards, and the surfaces of the first moving part and the second moving part are used for fixing the driven part.
2. The piezoelectric driver of claim 1, wherein the fixed connection comprises:
the first moving part and the second moving part are fixedly connected through a common connecting film layer.
3. The piezoelectric driver according to claim 2, wherein the first moving member or the second moving member is provided with a first film layer, a second film layer and a third film layer stacked in sequence from top to bottom, two sides of the first film layer and the third film layer extend outward relative to the second film layer to form a protruding portion, and the protruding portion and an end of the second film layer enclose the first sliding groove or the second sliding groove.
4. The piezoelectric driver of claim 3, wherein the common connecting membrane layer comprises at least one of the first, second, or third membrane layers.
5. The piezoelectric actuator according to claim 2, wherein the common connection film layer is provided on an upper surface or a lower surface of the first moving member, the second moving member.
6. The piezoelectric driver of claim 1, wherein the fixed connection comprises:
the two opposite ends of the first moving part and the second moving part are adhesively connected by an adhesive material.
7. The piezoelectric actuator according to claim 3, wherein the slide bar is disposed on both sides of the movable end or between both side surfaces of the movable end.
8. The piezoelectric driver of claim 3, wherein a depth and a height of the first runner or the second runner match a length and a height of the runner.
9. The piezoelectric driver according to claim 3, wherein the first runner or the second runner has blocking walls at both ends in the first direction, and a distance between the blocking walls is adapted to a height at which the piezoelectric element moves up and down.
10. The piezoelectric actuator according to claim 1, wherein the first support block and the second support block are separated from each other or the first support block and the second support block are fixedly connected.
11. The piezoelectric actuator according to claim 10, wherein the first support block is fixedly connected to the second support block to form a closed loop support block, and the first piezoelectric element, the second piezoelectric element, the first moving member, and the second moving member are located inside the loop.
12. The piezoelectric actuator according to claim 1, wherein a support block is provided below the movable end or the movable end is suspended.
13. The piezoelectric actuator according to claim 1, wherein the piezoelectric element is fixed to an upper surface of the support block or,
the supporting blocks comprise a first layer of supporting blocks and a second layer of supporting blocks which are sequentially stacked from bottom to top, and the piezoelectric elements are fixed between the first layer of supporting blocks and the second layer of supporting blocks.
14. The piezoelectric driver according to claim 1, wherein the piezoelectric element includes: the piezoelectric actuator comprises a support layer and a piezoelectric laminated structure positioned on the support layer, wherein the piezoelectric laminated structure comprises: the upper surface and the lower surface of each piezoelectric film are distributed with electrodes, and two adjacent piezoelectric films share the electrode positioned between the two piezoelectric films;
the electrodes are counted from bottom to top in sequence, the electrodes in odd layers are electrically connected together, and the electrodes in even layers are electrically connected together;
the first leading-out end is electrically connected with the odd layer electrode; the second leading-out terminal is electrically connected with the even layer electrode;
the first leading-out end and the second leading-out end are both positioned on the top surface or the bottom surface of the piezoelectric element, or one of the first leading-out end and the second leading-out end is positioned on the top surface and the other one is positioned on the bottom surface.
15. The piezoelectric actuator of claim 1, wherein the slide bar and the movable end are insulated from each other.
16. An imaging module comprising the piezoelectric actuator of any one of claims 1 to 15, further comprising:
a driven part including a lens group, an imaging sensor element, a diaphragm or a lens sheet, the driven part being fixed to a surface of the moving part;
and the electric connection end is electrically connected with the piezoelectric driver.
17. The imaging module of claim 16, wherein the piezoelectric actuator is one, and the driven member is fixed to a surface of the first moving member and the second moving member.
18. The imaging module of claim 16, wherein there are two piezoelectric actuators, the two piezoelectric actuators are symmetrically disposed, and the driven member is fixed between the two first moving members and the second moving member.
19. The imaging module of claim 16, wherein the piezoelectric actuator is a plurality of piezoelectric actuators distributed around the periphery of the driven member.
20. The imaging module of claim 16, wherein the plurality of piezoelectric actuators are symmetrically disposed.
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