CN113097112B - Closed type film box - Google Patents
Closed type film box Download PDFInfo
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- CN113097112B CN113097112B CN202110322053.5A CN202110322053A CN113097112B CN 113097112 B CN113097112 B CN 113097112B CN 202110322053 A CN202110322053 A CN 202110322053A CN 113097112 B CN113097112 B CN 113097112B
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- movable door
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- bottom plate
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- 238000000429 assembly Methods 0.000 claims description 12
- 230000000712 assembly Effects 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 63
- 238000000034 method Methods 0.000 description 26
- 238000007789 sealing Methods 0.000 description 12
- 239000000428 dust Substances 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application discloses a closed type wafer box, and relates to the field of semiconductor manufacturing. The closed type wafer box comprises a top plate, a bottom plate and a plurality of upright posts connected between the top plate and the bottom plate, wherein the upright posts are provided with a plurality of slots; the closed type wafer box further comprises a movable door and side plates, the movable door and the side plates are respectively arranged on the outer sides of the upright posts in a surrounding mode, the movable door, the side plates, the top plate and the bottom plate jointly form an accommodating space in a surrounding mode, the top of the movable door is movably connected with the top plate, the bottom of the movable door is movably connected with the bottom plate, and the movable door can be opened or closed in the accommodating space. The application can reduce the impurity on the surface of the wafer and effectively prevent the surface of the wafer from being polluted.
Description
Technical Field
The application belongs to the technical field of semiconductor manufacturing, and particularly relates to a closed type wafer box.
Background
An AlN magnetron sputtering apparatus is a thin film preparation apparatus widely used in the field of LEDs, which deposits an AlN thin film on the surface of a wafer (substrate) using a Physical Vapor Deposition (PVD). The AlN magnetron sputtering equipment in the related art mainly comprises a clean workbench, a loading cavity, a transmission cavity, a process cavity and a cooling cavity. The specific process of the process tray transmission comprises the following steps: the method comprises the steps that an operator loads a wafer by taking a SiC (silicon carbide) tray as a carrier on a clean workbench, then enters a loading cavity (atmosphere and vacuum interaction), a cavity is vacuumized, the tray enters a transmission cavity (the cavity is vacuumized), the tray is conveyed into a process cavity through a mechanical arm to carry out a process, the tray enters a cooling cavity to be cooled after the process is finished, then the tray is conveyed back to the loading cavity, and then the tray is subjected to a slice taking operation after nitrogen is filled into the atmosphere. Dust can be introduced due to interaction between the loading cavity and the outside, and the dust can influence the electrical performance and yield of the subsequent chips.
In order to transfer the pushing disc into the transmission cavity, a wafer box carrying wafer box is adopted in the related art, and specifically comprises the following steps: the SiC tray carrying the wafer is loaded into the groove of the wafer box by a wafer guide machine or an operator, and then the wafer box is conveyed to a loading cavity for AlN technology.
However, the wafer cassette cannot isolate the wafer from the atmosphere, which results in unavoidable contamination of the wafer surface with dust in the atmosphere during loading and handling, thereby increasing the number of particles in the AlN process, and at the same time, the wafer surface is contaminated due to the introduction of dust by the gas filling during loading or unloading of the wafer cassette by the loading chamber, thereby increasing the number of particles on the wafer surface.
Disclosure of Invention
The embodiment of the application aims to provide a closed type wafer box, which can solve the problem that the conventional wafer box cannot isolate a wafer from the external environment, so that the surface of the wafer is polluted and the number of particles on the surface of the wafer in the AlN process is increased.
In order to solve the technical problems, the application is realized as follows:
The embodiment of the application provides a closed type wafer box, which comprises:
the device comprises a top plate, a bottom plate and a plurality of upright posts connected between the top plate and the bottom plate, wherein the upright posts are provided with a plurality of slots;
The closed type wafer box further comprises a movable door and side plates, the movable door and the side plates are respectively arranged on the outer sides of the upright posts in a surrounding mode, the movable door, the side plates, the top plate and the bottom plate jointly form an accommodating space in a surrounding mode, the top of the movable door is movably connected with the top plate, the bottom of the movable door is movably connected with the bottom plate, and the movable door can be opened or closed in the accommodating space.
In the embodiment of the application, the top plate, the bottom plate, the side plates and the movable door jointly form a closed accommodating space, the movable door can be opened or closed, and when the tray carrying the wafers needs to be sent into the closed type wafer box, the movable door is opened, so that the tray carrying the wafers is conveniently sent; the wafer is loaded and carried along with the closed type wafer box, the movable door is closed, so that the wafer is sealed inside the closed type wafer box, the wafer is prevented from being directly contacted with the atmospheric environment in the loading and carrying process, the pollution of dust in the atmospheric environment to the surface of the wafer is reduced, the number of particles on the surface of the wafer is reduced, and the surface yield of the epitaxial wafer in the LED manufacturing process is improved.
Drawings
Fig. 1 is a schematic structural view of a closed type cassette with a movable door in a closed state according to an embodiment of the present application;
FIG. 2 is a schematic view of a closed cassette with side panels removed according to an embodiment of the present application;
FIG. 3 is a rear view of a closed cassette according to an embodiment of the present application;
FIG. 4 is a schematic view of a structure of a sliding door according to an embodiment of the present application;
FIG. 5 is a schematic view of a retaining member according to an embodiment of the present application;
FIG. 6 is a schematic view of a limiting portion according to an embodiment of the present application;
FIG. 7 is a schematic illustration of a first link or a second link disclosed in an embodiment of the present application;
FIG. 8 is an assembled cross-sectional view of a mount, cantilever shaft, first link or second link, and fastener disclosed in an embodiment of the present application;
FIG. 9 is an assembled cross-sectional view of a mount, cantilever shaft and first or second link disclosed in an embodiment of the present application;
FIG. 10 is a schematic diagram illustrating assembly of a left door, a right door, a link assembly, and a roof panel according to an embodiment of the present application;
FIG. 11 is a schematic diagram of a left guard plate and a right guard plate according to an embodiment of the present application;
FIG. 12 is a schematic view illustrating assembly of a left guard plate, a right guard plate and a movable door according to an embodiment of the present application;
FIG. 13 is an enlarged view of a portion of FIG. 12 at A;
Fig. 14 is a partial enlarged view at B in fig. 12.
Reference numerals illustrate:
100-top plate; 110-a limit part; 120-mounting seats; 130-cantilever shaft; 140-connecting shafts; 150-lifting handles;
200-a bottom plate;
300-upright posts; 310-slot;
400-a movable door; 410-left gate; 411-magnetic piece; 412-ruffles; 413-a first hook; 420-right door; 421-adsorption plate;
500-side plates; 510-left guard board; 511-a second hook; 520-right guard board; 530-a rear guard; 531-a movable pin; 540-a perspective window;
600-connecting rod assembly; 610-a first link; 611-receiving holes; 612-through groove; 620-a second link; 630-locking member; 640-fasteners.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The terms first, second and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type, and are not limited to the number of objects, such as the first object may be one or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.
The following describes embodiments of the present application in detail through specific embodiments and application scenarios thereof with reference to the accompanying drawings.
Referring to fig. 1 to 4, the embodiment of the present application discloses a closed type cassette including a top plate 100, a bottom plate 200, a plurality of columns 300, a movable door 400, and side plates 500.
Wherein, roof 100 and bottom plate 200 are opposite and spaced apart, and connection is achieved between roof 100 and bottom plate 200 through a plurality of columns 300, so that a basic skeleton of the closed type cassette is formed through roof 100, bottom plate 200 and a plurality of columns 300. Each of the columns 300 is provided with a plurality of slots 310, and the slots 310 are used for placing trays carrying wafers. Typically, the tray carrying the wafers is moved into a closed cassette and placed in each slot 310. In order to prevent the wafers on the tray from being affected by the external environment, in the embodiment of the present application, the side plates 500 and the movable doors 400 are provided on the outer sides of the plurality of columns 300, and the outer sides of the columns 300 can be sealed by the side plates 500 and the movable doors 400. In this way, the movable door 400, the side plate 500, the top plate 100 and the bottom plate 200 together enclose a closed accommodating space, that is, the top plate 100 closes the top, the bottom plate 200 closes the top, and the side plate 500 and the movable door 400 close the side, so that wafers on the tray of the slot 310 can be sealed from all directions, thereby isolating the wafers from the external environment, and further avoiding the wafers from being polluted due to direct contact with the external environment.
To move wafers into or out of the cassette, in the embodiment of the present application, the top of the movable door 400 is movably connected to the top plate 100, and the bottom of the movable door 400 is movably connected to the bottom plate 200. In this way, the movable door 400 is enabled to open or close the accommodating space.
Based on the above arrangement, a closed accommodating space is defined by the top plate 100, the bottom plate 200, the side plate 500 and the movable door 400, and the movable door 400 can be opened or closed, when the tray carrying the wafer needs to be sent into the closed type wafer box, the movable door 400 is opened, so that the tray carrying the wafer is conveniently sent; the movable door 400 is closed along with the loading and carrying process of the closed type wafer box, so that the wafer is sealed inside the closed type wafer box, the wafer is prevented from being directly contacted with the atmospheric environment in the loading and carrying process, the pollution of dust in the atmospheric environment to the surface of the wafer is reduced, the number of particles on the surface of the wafer is reduced, and the surface yield of the epitaxial wafer in the LED manufacturing process is improved. Compared with the problem that the open type wafer box in the related art causes particles on the surface of the wafer, the closed type wafer box disclosed by the embodiment of the application can achieve the purpose of reducing the number of the particles on the surface of the wafer.
Referring to fig. 3, in some embodiments, the side panel 500 includes left and right guard plates 510 and 520 provided at left and right sides of the movable door 400, respectively, and a rear guard plate 530 provided opposite to the movable door 400, each of the left, right and rear guard plates 510, 520 and 530 being connected to at least one of the top and bottom panels 100 and 200. Alternatively, in the case that the movable door 400 is closed, the left guard plate 510 and the right guard plate 520 may be symmetrically disposed on both sides of the movable door 400, and the rear guard plate 530 is opposite to the movable door 400, so that the left guard plate 510 and the right guard plate 520 respectively close both sides, and the rear guard plate 530 and the movable door 400 respectively close both sides. When it is desired to move in or out of the tray, the movable door 400 is opened to facilitate movement of the tray. In view of the assembly of the left and right shields 510, 520 and the rear shield 530, the top of the left shield 510 may be coupled to the top panel 100, or the bottom of the left shield 510 may be coupled to the bottom panel 200, or the top of the left shield 510 may be coupled to the top panel 100 and the bottom may be coupled to the bottom panel 200. Preferably, the top of the left guard plate 510 is fixedly connected to the top plate 100, and the bottom is fixedly connected to the bottom plate 200, such as welding, fastening, clamping, riveting, bonding, etc., and the embodiment of the present application is not limited to a specific fixing manner. Similarly, the connection manner of the right guard 520 and the top plate 100, the bottom plate 200, and the connection manner of the rear guard 530 and the top plate 100, the bottom plate 200 may refer to the connection manner of the left guard 510, and will not be described herein.
Referring to fig. 1 and 2, in order to enable the movable door 400 to open or close the receiving space, in the embodiment of the present application, the top of the movable door 400 is movably coupled to the top plate 100 through a link assembly 600, and the bottom of the movable door 400 is movably coupled to the bottom plate 200 through another link assembly 600. Thus, on one hand, the top of the movable door 400 is mounted to the top plate 100 through one link assembly 600, and the bottom is mounted to the bottom plate 200 through the other link assembly 600, so that the movable door 400 can be supported and mounted; on the other hand, the movable door 400 can be moved with respect to the bottom plate 200 and the top plate 100 by the upper and lower link assemblies 600, so that the opening or closing of the movable door 400 can be achieved.
Further, referring to fig. 10, the link assembly 600 includes a first link 610 and a second link 620, a first end of the first link 610 is rotatably connected to the movable door 400, a second end of the first link 610 is rotatably connected to the top plate 100 or the bottom plate 200, a first end of the second link 620 is rotatably connected to the movable door 400, and a second end of the second link 620 is rotatably connected to the top plate 100 or the bottom plate 200. The positional relationship and the size of the first link 610 and the second link may be flexibly set as required so that the movable door 400 moves according to a preset trajectory. Preferably, the first and second links 610 and 620 are provided such that the movable door 400 can move around the top and bottom plates 100 and 200 to open or close the receiving space. Optionally, the closed type cassette may include a movable door 400, at this time, the top of the movable door 400 is movably connected with the top plate 100 through a first link 610 and a second link 620 in one set of link assemblies 600, the bottom of the movable door 400 is movably connected with the second link 620 through a first link 610 and a second link 620 in the other set of link assemblies 600, and the first links 610 in the upper and lower sets of link assemblies 600 are correspondingly arranged up and down, and the second links 620 are correspondingly arranged up and down, that is, the movement tracks of the first links 610 in the upper and lower sets of link assemblies 600 are the same, and the movement tracks of the second links 620 are the same, so that the top and bottom of the movable door 400 can be ensured to synchronously move, and further deformation of the movable door 400 caused by movement interference of the top and the bottom of the movable door 400 is avoided. Based on the above arrangement, the top plate 100 is a fixed member, the movable door 400 is a movable member, the movable door 400 and the top plate 100 are connected by the first link 610 and the second link 620, so that the movable door 400, the first link 610 and the second link 620 at the top of the movable door 400, and the top plate 100 constitute an upper plane four-bar mechanism, and similarly, the movable door 400, the first link 610 and the second link 620 at the bottom of the movable door 400, and the bottom plate 200 constitute a lower plane four-bar mechanism, and the movement forms of the upper plane four-bar mechanism and the lower plane four-bar mechanism are the same. The movable door 400 can be supported by the upper-layer plane four-bar mechanism and the lower-layer plane four-bar mechanism, so that the movable door 400 is prevented from tilting to scratch the top plate 100 or the bottom plate 200 in the opening or closing process, the movable door 400 can be kept in a designed shape in the long-time use process without obvious deformation affecting the use of the closed type box, and the stability of the movable door 400 is further ensured.
Referring to fig. 2, 5 and 6, in some embodiments, a locking member 630 is provided on the first link 610 and/or the second link 620, and a limiting portion 110 is provided on the top plate 100 and/or the bottom plate 200, and in the case that the movable door 400 is opened, the locking member 630 is engaged with the limiting portion 110 to limit the movable door 400. Alternatively, the locking member 630 may be a knob plunger, and a mounting hole, such as a threaded hole, is formed in the first link 610 or the second link 620, into which the knob plunger is mounted. Correspondingly, the limiting part 110 may be a limiting block disposed on the top plate 100 or the bottom plate 200, and a limiting hole or a limiting groove is formed on the limiting block. When the movable door 400 is opened, the knob plunger is aligned with the limit hole or the limit groove, and then the knob plunger is inserted into the limit hole or the limit groove, so that the movable door 400 can be locked in a mechanical mode, and the movable door 400 is prevented from moving easily to interfere the manipulator when the manipulator moves into or moves out of the tray.
Referring to fig. 1, in some embodiments, the movable door 400 includes a left door 410 and a right door 420 symmetrically disposed about each other, wherein the left door 410 and the right door 420 correspond to two sets of link assemblies 600, respectively, specifically, the top of the left door 410 is movably connected to the top plate 100 through one set of link assemblies 600, and the bottom of the left door 410 is movably connected to the bottom plate 200 through the other set of link assemblies 600. Likewise, the top of the right door 420 is movably coupled to the top plate 100 by a set of link assemblies 600, and the bottom of the right door 420 is movably coupled to the bottom plate 200 by another set of link assemblies 600. Based on the above arrangement, the left door 410 and the right door 420 are allowed to move toward and away from each other around the top plate 100 and the bottom plate 200, respectively. Therefore, when the robot moves into or out of the tray, the left door 410 and the right door 420 can be simultaneously opened to enlarge the opening of the closed cassette, facilitating the movement of the tray.
Referring to fig. 10, in some embodiments, one of the left door 410 and the right door 420 is provided with a magnetic member 411, and the other is provided with an adsorption plate 421 made of a magnetic material, and when the movable door 400 is closed, the left door 410 and the right door 420 are attracted by the magnetic member 411 and the adsorption plate 421. Optionally, a magnet mounting plate is disposed on the left door 410 or the right door 420, the magnetic member 411 is a magnet, and is fixed on the magnet mounting plate by a screw, and the magnetically conductive attraction plate 421 is disposed opposite to the magnetic member 411. When the left door 410 and the right door 420 are closed, the magnetic member 411 and the adsorption plate 421 tightly close the left door 410 and the right door 420 under the magnetic force, so that the left door 410 and the right door 420 are kept in a closed state at any time during the carrying process of the closed type cassette, and do not move relatively.
Referring to fig. 12 and 14, in some embodiments, the end of the left door 410 near the right door 420, and the end of the right door 420 near the left door 410 are each provided with a hem 412, the hem 412 of the end of the left door 410 being in close abutment with the hem 412 of the end of the right door 420 when the movable door 400 is closed. In the embodiment of the application, the factors such as installation errors are considered, and when the left door 410 and the right door 420 are closed, the ruffles 412 at the respective end parts are closely abutted, so that good sealing performance between the left door 410 and the right door 420 can be ensured, and further, the sealing performance of the closed type box can be ensured.
Referring to fig. 1,2, and 7 to 10, in some embodiments, a mount 120 is provided on the top plate 100 or the bottom plate 200, a cantilever shaft 130 is rotatably provided on the mount 120, the cantilever shaft 130 is fixedly connected to the second end of the first link 610 or the second end of the second link 620, a connection shaft 140 is rotatably provided on the movable door 400, and the connection shaft 140 is fixedly connected to the first end of the first link 610 or the first end of the second link 620. Alternatively, the mount 120 may be a bearing housing, and a rolling bearing and a retainer ring are provided in the mount 120, so that the cantilever shaft 130 and the mount 120 may be rotatably connected by the rolling bearing. The second end of the first link 610 is connected to the mount 120 through the cantilever shaft 130 such that the second end of the first link 610 is rotatable about the cantilever shaft 130. Likewise, the second end of the second link 620 is connected to the other mount 120 through the other cantilever shaft 130, so that the second end of the second link 620 can rotate about the other cantilever shaft 130. Further, the movable door 400 is provided with a connection shaft 140, and the connection shaft 140 can rotate on the movable door 400, so that the first end of the first link 610 is connected with the movable door 400 through the connection shaft 140, and the first end of the first link 610 can rotate around the connection shaft 140. Likewise, the first end of the second link 620 is connected to the movable door 400 through the other connection shaft 140 such that the first end of the second link 620 is connected to the movable door 400 through the other connection shaft 140, thereby allowing the first end of the second link 620 to rotate about the other connection shaft 140.
Referring to fig. 7 and 9, in some embodiments, two ends of the first connecting rod 610 and two ends of the second connecting rod 620 are respectively provided with a receiving hole 611, a through groove 612 is formed on a side wall of each receiving hole 611, and the cantilever shaft 130 or the connecting shaft 140 correspondingly penetrates through the receiving hole 611. For the fixed connection, the first link 610 and the second link 620 are provided with a fastening member 640, such as a fastening screw, and the fastening member 640 can make two opposite groove walls of the through groove 612 approach each other, so that the wall of the receiving hole 611 presses the cantilever shaft 130 or the connecting shaft 140. Based on the above arrangement, when the fastener 640 is a fastening screw, it is screwed from the end of the first link 610 or the end of the second link 620, passes through the through groove 612, and is connected with the groove wall of the through groove 612. In this way, when the fastening screw is screwed, the through groove 612 can be narrowed, and finally the cantilever shaft 130 or the connecting shaft 140 is clamped by the wall of the accommodating hole 611, thereby achieving fixation. Of course, other fixing methods, such as a clamping method, a screwing method, etc., may be used in the embodiment of the present application, and the specific fixing method of the connecting shaft 140 or the cantilever shaft 130 and the first link 610 or the second link 620 is not limited herein.
Referring to fig. 12 and 13, in some embodiments, an end of the movable door 400 near the left guard plate 510 or the right guard plate 520 is formed with a first hook 413, and accordingly, an end of the left guard plate 510 near the movable door 400 or an end of the right guard plate 520 near the movable door 400 is provided with a second hook 511. In the closed state of the movable door 400, the first hooks 413 and the second hooks 511 are hooked with each other to form a labyrinth seal structure between the movable door 400 and the left guard plate 510 or between the movable door 400 and the right guard plate 520. Based on the above arrangement, when the first hooks 413 and the second hooks 511 are hooked with each other, the side wall of the first hooks 413 can be abutted against the side wall of the second hooks 511, so that the clearance can be prevented from remaining and air or foreign matters can not be blocked from entering the inside of the closed type cassette. In order to further improve the sealing performance, sealing elements, such as a sealing gasket, may be respectively disposed on the first hook 413 and the second hook 511, and when the first hook 413 and the second hook 511 are hooked with each other, the first hook 413 and the second hook 511 may be further sealed by the sealing elements, so that the sealing performance between the movable door 400 and the left guard plate 510 and the sealing performance between the movable door 400 and the right guard plate 520 are further ensured.
Referring to fig. 1 and 11, in some embodiments, the movable door 400 is a polygonal plate or an arc-shaped plate, which may be enclosed in the front of the closed cassette. In order to improve the sealing performance of the closed type cassette, in the embodiment of the present application, the outline of the outer edge of the top plate 100 close to the movable door 400 is the same as the outline of the inner surface of the movable door 400, so that when the movable door 400 is closed, the inner surface of the movable door 400 can be abutted against the outer edge of the top plate 100 to improve the sealing performance. However, in consideration of manufacturing errors, assembly errors, and the like, the distance h between the outer edge profile of the top plate 100 and the inner surface of the movable door 400 may be made not to exceed 2mm, e.g., 0.5mm, 1mm, 2mm, and the like. Based on the gap, the movement interference between the movable door 400 and the top plate 100 caused by factors such as manufacturing errors, assembly errors and the like can be effectively relieved, the tightness of the closed type box can be ensured to a certain extent, and dust, impurities and the like can be effectively prevented from entering the inside of the closed type box.
Similarly, the outer edge profile of the base plate 200 near the movable door 400 is the same shape as the inner surface profile of the movable door 400, and the distance h between the outer edge profile of the base plate 200 and the inner surface profile of the movable door 400 is not more than 2mm. Based on the above arrangement, when the movable door 400 is closed, the inner surface of the movable door 400 abuts against the outer edge of the bottom plate 200, thereby improving sealability. Meanwhile, due to the existence of the gap, the movable door 400 and the top plate 100 do not interfere with each other, and the sealing performance of the closed type cassette can be ensured to a certain extent, so that dust, impurities and the like can be effectively prevented from entering the inside of the closed type cassette.
Referring to FIG. 3, in some embodiments, at least one of the left guard 510, right guard 520, and rear guard 530 has a see-through window 540 open thereon. Based on the arrangement of the perspective window 540, the part of the closed type box can transmit infrared detection signals, so that the tray in the closed type box can be conveniently detected.
In addition, the whole rear guard plate 530 can be arranged on the top plate 100 through the movable pins 531, so that the tray can be turned over and opened, and further, whether the tray slides in the process of carrying can be checked conveniently, so that the automatic detection system can be prevented from generating false alarm information. To prevent the rear guard 530 from being opened at random, the end of the rear guard 530 facing away from the movable pins 531 is attracted between the bottom plates 200 by a magnet, thereby preventing the rear guard 530 from being opened accidentally by being turned up and down at random.
In some embodiments, the left guard plate 510, the right guard plate 520 and the rear guard plate 530 may be made of aluminum alloy plates, so that on one hand, sufficient strength can be ensured, on the other hand, the weight can be reduced, rust is not easy to generate, and the service life of the closed type cassette is ensured.
In some embodiments, a handle 150 may also be provided on top panel 100 to facilitate handling of the closed cassette by an operator.
The operation process of the closed type wafer box in the embodiment of the application is as follows:
the left door 410 and the right door 420 of the movable door 400 are opened, and the locking member 630 is inserted into the limiting part 110 to mechanically limit, so that the movable door 400 is ensured not to be closed under the action of external force; loading a tray onto a slot 310 in the closed cassette by a robot or operator; after the tray is loaded, the locking piece 630 is pulled out, the movable door 400 is closed, and the closed type wafer box is conveyed to the loading cavity of the machine table to prepare for the process; after the closed cassette is loaded into the loading chamber, the movable door 400 is opened, the locking member 630 is inserted into the limiting part 110 to mechanically limit, and then the process picking and placing tray can be performed.
In summary, the sealed type wafer box disclosed by the embodiment of the application has good sealing performance, so that the wafer inside the sealed type wafer box can be effectively prevented from being directly in release contact with the atmosphere in the assembly and carrying processes, the pollution of dust in the atmosphere environment to the surface of the wafer is reduced, the number of particles on the surface of the wafer is further reduced, and the surface yield of the epitaxial wafer in the LED manufacturing process generation process is improved. The left door 410 and the right door 420 which are installed by adopting the planar four-bar mechanism ensure the stability of the movable door 400 in the opening or closing process and meet the use requirement of the closed type film box in the appointed space range; the tray prevents inside the closed cassette, while all moving parts are disposed outside the closed cassette, such as the mounting base 120, the locking member 630, etc., thereby preventing dust caused by the moving parts during rotation and collision from contaminating the wafer surface. The closed type film box in the embodiment of the application is simple to operate, and an operator only needs to execute actions such as opening the movable door 400, locking the locking piece 630, closing the movable door 400 and the like, and does not need other auxiliary actions; the closed type film box is high in applicability, and is not only suitable for manual operation, but also suitable for automatic unloading.
The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are to be protected by the present application.
Claims (10)
1. A closed cassette comprising: the device comprises a top plate (100), a bottom plate (200) and a plurality of stand columns (300) connected between the top plate (100) and the bottom plate (200), wherein the stand columns (300) are provided with a plurality of groove positions (310);
The closed type wafer box further comprises a movable door (400) and side plates (500), wherein the movable door (400) and the side plates (500) are respectively arranged on the outer sides of the upright posts (300) in a surrounding mode, the movable door (400), the side plates (500), the top plate (100) and the bottom plate (200) jointly form an accommodating space, the top of the movable door (400) is movably connected with the top plate (100), the bottom of the movable door (400) is movably connected with the bottom plate (200), and the movable door (400) can open or close the accommodating space;
The top of the movable door (400) is movably connected with the top plate (100) through a connecting rod assembly (600), and the bottom of the movable door (400) is movably connected with the bottom plate (200) through another connecting rod assembly (600);
The connecting rod assembly (600) comprises a first connecting rod (610) and a second connecting rod (620), wherein the first end of the first connecting rod (610) is rotationally connected with the movable door (400), the second end of the first connecting rod (610) is rotationally connected with the top plate (100) or the bottom plate (200), the first end of the second connecting rod (620) is rotationally connected with the movable door (400), the second end of the second connecting rod (620) is rotationally connected with the top plate (100) or the bottom plate (200), and the movable door (400) can move around the top plate (100) and the bottom plate (200) through the connecting rod assembly (600) so as to open or close the accommodating space;
the first connecting rod (610) and/or the second connecting rod (620) are/is provided with a locking member (630), the top plate (100) and/or the bottom plate (200) are/is provided with a limiting portion (110), and when the movable door (400) is opened, the locking member (630) is matched with the limiting portion (110) to limit the movable door (400).
2. The closed cassette according to claim 1, wherein the side plates (500) include left and right guard plates (510, 520) provided on left and right sides of the movable door (400), respectively, and a rear guard plate (530) provided opposite to the movable door (400), the left guard plate (510), the right guard plate (520), and the rear guard plate (530) being each connected to at least one of the top plate (100) and the bottom plate (200).
3. The closed type wafer box according to claim 1, wherein the movable door (400) comprises a left door (410) and a right door (420) which are symmetrically arranged left and right, the left door (410) is movably connected with the top plate (100) and the bottom plate (200) through two groups of connecting rod assemblies (600), the right door (420) is movably connected with the top plate (100) and the bottom plate (200) through two groups of connecting rod assemblies (600), and the left door (410) and the right door (420) can move around the top plate (100) and the bottom plate (200) respectively in opposite directions or in opposite directions.
4. A closed cassette according to claim 3, wherein one of the left door (410) and the right door (420) is provided with a magnetic member (411), and the other is provided with an adsorption plate (421) made of a magnetically conductive material, and when the movable door (400) is closed, the left door (410) and the right door (420) are attracted to the adsorption plate (421) through the magnetic member (411).
5. A closed cassette according to claim 3, wherein the end of the left door (410) adjacent to the right door (420) and the end of the right door (420) adjacent to the left door (410) are each provided with a hem (412), the hem (412) of the end of the left door (410) being in close abutment with the hem (412) of the end of the right door (420) when the moveable door (400) is closed.
6. The closed type wafer box according to claim 1, wherein the top plate (100) or the bottom plate (200) is provided with a mounting seat (120), a cantilever shaft (130) is rotatably arranged on the mounting seat (120), and the cantilever shaft (130) is fixedly connected with the second end of the first connecting rod (610) or the second end of the second connecting rod (620);
the movable door (400) is rotatably provided with a connecting shaft (140), and the connecting shaft (140) is fixedly connected with the first end of the first connecting rod (610) or the first end of the second connecting rod (620).
7. The sealed type wafer box according to claim 6, wherein two ends of the first connecting rod (610) and two ends of the second connecting rod (620) are respectively provided with a containing hole (611), a through groove (612) penetrating through the containing hole (611) is formed in the side wall of the containing hole (611), the cantilever shaft (130) or the connecting shaft (140) is arranged in the containing hole (611) in a penetrating manner, fastening pieces (640) are arranged on the first connecting rod (610) and the second connecting rod (620), and the fastening pieces (640) can enable two groove walls which are oppositely arranged in the through groove (612) to be close to each other, so that the hole wall of the containing hole (611) is pressed against the cantilever shaft (130) or the connecting shaft (140).
8. The closed type cassette according to claim 2, wherein a first hook (413) is formed at an end of the movable door (400) adjacent to the left guard plate (510) or the right guard plate (520), a second hook (511) is provided at an end of the left guard plate (510) adjacent to the movable door (400) or an end of the right guard plate (520) adjacent to the movable door (400), and the first hook (413) and the second hook (511) are hooked with each other in a closed state of the movable door (400) to form a labyrinth seal structure between the movable door (400) and the left guard plate (510) or between the movable door (400) and the rear guard plate (530).
9. The closed cassette according to claim 1, wherein the movable door (400) is a polygonal plate or an arc-shaped plate;
The outline of the outer edge of the top plate (100) close to the movable door (400) is the same as the outline of the inner surface of the movable door (400), and the distance between the outline of the outer edge and the outline of the inner surface is less than or equal to 2mm; and/or, the outline of the outer edge of the bottom plate (200) close to the movable door (400) is the same as the outline of the inner surface of the movable door (400), and the distance between the outline of the outer edge and the outline of the inner surface is less than or equal to 2mm.
10. The closed cassette of claim 2, wherein at least one of the left guard (510), the right guard (520), and the rear guard (530) is provided with a see-through window (540);
and/or, the top end of the rear guard plate (530) is rotatably connected with the top plate (100) through a movable pin (531), and the bottom end of the rear guard plate (530) is magnetically adsorbed and connected with the bottom plate (200).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110322053.5A CN113097112B (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110322053.5A CN113097112B (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113097112A CN113097112A (en) | 2021-07-09 |
| CN113097112B true CN113097112B (en) | 2024-05-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110322053.5A Active CN113097112B (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
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| Country | Link |
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| CN (1) | CN113097112B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080043456A (en) * | 2006-11-14 | 2008-05-19 | 삼성전자주식회사 | Wafer keeping apparatus of semiconductor device manufacturing equipment |
| KR20080092049A (en) * | 2007-04-11 | 2008-10-15 | 엘지디스플레이 주식회사 | Apparatus and method of cleaing cassette |
| KR101736351B1 (en) * | 2016-08-16 | 2017-05-16 | 오세덕 | Load port for transporting wafer |
| KR20200134079A (en) * | 2019-05-21 | 2020-12-01 | 세메스 주식회사 | Unit for supporting cassette and vehicle having the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4264115B2 (en) * | 2007-07-31 | 2009-05-13 | Ｔｄｋ株式会社 | Containment processing method and lid opening / closing system used in the method |
-
2021
- 2021-03-25 CN CN202110322053.5A patent/CN113097112B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080043456A (en) * | 2006-11-14 | 2008-05-19 | 삼성전자주식회사 | Wafer keeping apparatus of semiconductor device manufacturing equipment |
| KR20080092049A (en) * | 2007-04-11 | 2008-10-15 | 엘지디스플레이 주식회사 | Apparatus and method of cleaing cassette |
| KR101736351B1 (en) * | 2016-08-16 | 2017-05-16 | 오세덕 | Load port for transporting wafer |
| KR20200134079A (en) * | 2019-05-21 | 2020-12-01 | 세메스 주식회사 | Unit for supporting cassette and vehicle having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113097112A (en) | 2021-07-09 |
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