CN113097112A - Closed type film box - Google Patents
Closed type film box Download PDFInfo
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- CN113097112A CN113097112A CN202110322053.5A CN202110322053A CN113097112A CN 113097112 A CN113097112 A CN 113097112A CN 202110322053 A CN202110322053 A CN 202110322053A CN 113097112 A CN113097112 A CN 113097112A
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- plate
- movable door
- door
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- bottom plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
Abstract
The application discloses closed spool box relates to the semiconductor manufacturing field. The closed type wafer box comprises a top plate, a bottom plate and a plurality of stand columns connected between the top plate and the bottom plate, wherein a plurality of groove positions are arranged on the stand columns; the closed type wafer box further comprises a movable door and side plates, the movable door and the side plates are respectively arranged in a plurality of surrounding modes, the outer sides of the stand columns are arranged, the movable door, the side plates, the top plate and the bottom plate jointly form a containing space, the top of the movable door is movably connected with the top plate, the bottom of the movable door is movably connected with the bottom plate, and the movable door can be opened or closed the containing space. The method and the device can reduce impurities on the surface of the wafer, and effectively prevent the surface of the wafer from being polluted.
Description
Technical Field
The application belongs to the technical field of semiconductor manufacturing, and particularly relates to a closed type wafer box.
Background
AlN magnetron sputtering equipment is film preparation equipment widely applied to the field of LEDs, and a Physical Vapor Deposition (PVD) method is used for depositing an AlN film on the surface of a wafer (a substrate). AlN magnetron sputtering equipment in the related art mainly comprises a clean bench, a loading cavity, a transmission cavity, a process cavity and a cooling cavity. The specific process of the process tray transmission comprises the following steps: an operator loads a wafer on a clean workbench by taking a SiC (silicon carbide) tray as a carrier, then the clean workbench enters a loading cavity (atmosphere and vacuum interaction), the cavity is pumped to a vacuum state, the tray enters a transmission cavity (the cavity is in a vacuum state), the tray is introduced into a process cavity through a manipulator to carry out a process, the process is cooled in a cooling cavity after being completed, then the process is returned to the loading cavity, and the wafer taking operation is carried out after nitrogen is filled to the atmosphere state. Dust is introduced by interaction of the loading cavity and the outside, and the dust affects the electrical performance and yield of subsequent chips.
In order to introduce the pushing disc into the transmission cavity, a wafer box is adopted to carry the wafer box in the related technology, and the method specifically comprises the following steps: and loading the SiC tray loaded with the wafer into a groove of the wafer box through a wafer guide machine or an operator, and then transporting the wafer box to a loading cavity for carrying out an AlN process.
However, the above-mentioned wafer cassette cannot isolate the wafer from the atmosphere, resulting in inevitable contamination of the wafer surface with dust in the atmospheric environment during loading and transportation, thereby increasing the number of particles during the AlN process, and at the same time, the loading chamber introduces dust due to inflation during loading or unloading of the wafer cassette, thereby contaminating the wafer surface, thereby increasing the number of particles on the wafer surface.
Disclosure of Invention
The embodiment of the application aims to provide a closed wafer box, which can solve the problem that the conventional wafer box cannot isolate a wafer from the external environment, so that the surface of the wafer is polluted and the quantity of particles on the surface of the wafer in the AlN process is increased.
In order to solve the technical problem, the present application is implemented as follows:
the embodiment of the application provides a closed spool box, and this closed spool box includes:
the device comprises a top plate, a bottom plate and a plurality of upright columns connected between the top plate and the bottom plate, wherein a plurality of groove positions are arranged on the upright columns;
the closed type wafer box further comprises a movable door and side plates, the movable door and the side plates are respectively arranged in a plurality of surrounding modes, the outer sides of the stand columns are arranged, the movable door, the side plates, the top plate and the bottom plate jointly form a containing space, the top of the movable door is movably connected with the top plate, the bottom of the movable door is movably connected with the bottom plate, and the movable door can be opened or closed the containing space.
In the embodiment of the application, a closed accommodating space is defined by the top plate, the bottom plate, the side plates and the movable door, the movable door can be opened or closed, and when the tray carrying the wafer is required to be fed into the closed type wafer box, the movable door is opened, so that the tray carrying the wafer is convenient to feed; in the process of loading and carrying the wafer along with the closed type wafer box, the movable door is closed, so that the wafer is sealed in the closed type wafer box, the wafer is prevented from directly contacting with the atmospheric environment in the process of loading and carrying, the pollution of dust in the atmospheric environment to the surface of the wafer is reduced, the quantity of particles on the surface of the wafer is reduced, and the surface yield of the epitaxial wafer in the process of producing the LED is improved.
Drawings
FIG. 1 is a schematic structural diagram of a closed cassette with a closed movable door according to an embodiment of the present disclosure;
FIG. 2 is a schematic view of a structure of a closed cassette with a side plate removed, according to an embodiment of the present disclosure;
FIG. 3 is a rear view of a closed cassette disclosed in an embodiment of the present application;
FIG. 4 is a schematic structural diagram of a movable door disclosed in an embodiment of the present application;
FIG. 5 is a schematic view of a retaining member according to the disclosed embodiment;
FIG. 6 is a schematic view of a limiting portion according to an embodiment of the present disclosure;
FIG. 7 is a schematic view of a first link or a second link as disclosed in an embodiment of the present application;
FIG. 8 is an assembled cross-sectional view of a mount, a cantilevered shaft, a first link or a second link, and a fastener as disclosed in an embodiment of the present application;
FIG. 9 is an assembled cross-sectional view of a mount, a cantilevered shaft, and a first link or a second link as disclosed in an embodiment of the present application;
FIG. 10 is a schematic view of the assembly of the left door, the right door, the linkage assembly and the top plate disclosed in the embodiments of the present application;
FIG. 11 is a schematic view of a left fender and a right fender disclosed in embodiments of the present application;
FIG. 12 is a schematic view of the assembly of the left and right panels and the movable door disclosed in the embodiment of the present application;
FIG. 13 is an enlarged view of a portion of FIG. 12 at A;
fig. 14 is a partial enlarged view at B in fig. 12.
Description of reference numerals:
100-a top plate; 110-a limiting part; 120-a mount; 130-cantilever shaft; 140-a connecting shaft; 150-a handle;
200-a base plate;
300-column; 310-slot position;
400-a movable door; 410-left door; 411-a magnetic member; 412-ruffle; 413-a first hook; 420-right door; 421-an adsorption plate;
500-side plate; 510-left guard board; 511-a second hook; 520-right guard plate; 530-rear guard board; 531-a removable pin; 540-see-through window;
600-a linkage assembly; 610-a first link; 611-receiving holes; 612-through slots; 620-second link; 630-a locking member; 640-fasteners.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/" generally means that a preceding and succeeding related objects are in an "or" relationship.
The embodiments of the present application are described in detail below with reference to the accompanying drawings through specific embodiments and application scenarios thereof.
Referring to fig. 1 to 4, an embodiment of the present application discloses a closed type sheet cassette including a top plate 100, a bottom plate 200, a plurality of columns 300, a movable door 400, and a side plate 500.
Wherein, top plate 100 and bottom plate 200 are relative and the interval sets up, realize connecting through a plurality of stands 300 between top plate 100 and the bottom plate 200, like this, form the basic skeleton of closed magazine through top plate 100, bottom plate 200 and a plurality of stands 300. Each shaft 300 has a plurality of slots 310 formed therein, and the slots 310 are used for receiving trays loaded with wafers. Typically, the tray with the wafers is moved into the enclosed cassette and placed in each slot 310. In order to protect the wafers on the tray from the external environment, in the embodiment of the present invention, a side plate 500 and a movable door 400 are disposed on the outer sides of the plurality of columns 300, and the outer sides of the columns 300 can be closed by the side plate 500 and the movable door 400. So, dodge gate 400, curb plate 500, roof 100 and bottom plate 200 enclose into a confined accommodation space jointly, and that is, roof 100 seals the top, and bottom plate 200 seals the top, and curb plate 500 and dodge gate 400 seal the lateral part to can seal the wafer that sets up on the tray of trench 310 from each position, thereby can make wafer and external environment isolated, and then avoided wafer and external environment direct contact and receive the pollution.
In order to move the wafer into or out of the closed cassette, the top of the movable door 400 is movably connected to the top plate 100, and the bottom of the movable door 400 is movably connected to the bottom plate 200 in the embodiment of the present application. In this manner, the movable door 400 can open or close the accommodation space.
Based on the above arrangement, a closed accommodating space is defined by the top plate 100, the bottom plate 200, the side plates 500 and the movable door 400, and the movable door 400 can be opened or closed, when a tray carrying wafers needs to be sent into the closed cassette, the movable door 400 is opened, so that the tray carrying wafers is conveniently sent; in the process of loading and transporting the wafer along with the closed type wafer box, the movable door 400 is closed, so that the wafer is sealed inside the closed type wafer box, the wafer is prevented from directly contacting with the atmospheric environment in the process of loading and transporting, the pollution of dust in the atmospheric environment on the surface of the wafer is reduced, the quantity of particles on the surface of the wafer is reduced, and the surface yield of the epitaxial wafer in the process of producing the LED is improved. Compared with the problem that particles are generated on the surface of a wafer due to an open type wafer box in the related art, the closed type wafer box disclosed by the embodiment of the application can achieve the purpose of reducing the number of the particles on the surface of the wafer.
Referring to fig. 3, in some embodiments, the side panel 500 includes left and right guard plates 510 and 520 respectively disposed at left and right sides of the movable door 400, and a rear guard plate 530 disposed opposite to the movable door 400, the left guard plate 510, the right guard plate 520, and the rear guard plate 530 each being connected to at least one of the top panel 100 and the bottom panel 200. Alternatively, in a case where the movable door 400 is closed, the left guard plate 510 and the right guard plate 520 may be disposed on both sides of the movable door 400 in bilateral symmetry, and the rear guard plate 530 is disposed right opposite to the movable door 400, so that the left guard plate 510 and the right guard plate 520 respectively close the left and right sides, and the rear guard plate 530 and the movable door 400 respectively close the front and rear sides. When it is desired to move the tray in or out, the movable door 400 is opened to facilitate the movement of the tray. In consideration of the assembly of the left guard plate 510, the right guard plate 520, and the rear guard plate 530, the top of the left guard plate 510 may be coupled to the top plate 100, or the bottom of the left guard plate 510 may be coupled to the bottom plate 200, or the top of the left guard plate 510 may be coupled to the top plate 100 and the bottom may be coupled to the bottom plate 200. Preferably, the top of the left guard plate 510 is fixedly connected to the top plate 100, and the bottom is fixedly connected to the bottom plate 200, such as welding, fastening, clamping, riveting, bonding, etc., and the embodiment of the present invention is not limited to a specific fixing manner. Similarly, the connection manner of the right guard plate 520 and the top plate 100 and the bottom plate 200, and the connection manner of the rear guard plate 530 and the top plate 100 and the bottom plate 200 can refer to the connection manner of the left guard plate 510, which is not described herein again.
Referring to fig. 1 and 2, in order to enable the movable door 400 to open or close the accommodating space, in the embodiment of the present application, the top of the movable door 400 is movably connected to the top plate 100 by a link assembly 600, and the bottom of the movable door 400 is movably connected to the bottom plate 200 by another link assembly 600. As such, on one hand, the top of the movable door 400 is mounted to the top plate 100 by a link assembly 600, and the bottom is mounted to the bottom plate 200 by another link assembly 600, so that the movable door 400 can be supported and mounted; on the other hand, the upper and lower link assemblies 600 move the movable door 400 with respect to the bottom plate 200 and the top plate 100, thereby opening or closing the movable door 400.
Further, referring to fig. 10, the link assembly 600 includes a first link 610 and a second link 620, a first end of the first link 610 is rotatably connected to the movable door 400, a second end of the first link 610 is rotatably connected to the top plate 100 or the bottom plate 200, a first end of the second link 620 is rotatably connected to the movable door 400, and a second end of the second link 620 is rotatably connected to the top plate 100 or the bottom plate 200. The positional relationship and the size of the first link 610 and the second link may be flexibly set as needed, so that the movable door 400 moves according to a predetermined trajectory. Preferably, the first and second links 610 and 620 are provided such that the movable door 400 can move around the top and bottom plates 100 and 200 to open or close the receiving space. Optionally, the enclosure type cassette may include a movable door 400, at this time, the top of the movable door 400 is movably connected to the top plate 100 through a first connecting rod 610 and a second connecting rod 620 in one group of connecting rod assemblies 600, the bottom of the movable door 400 is movably connected through a first connecting rod 610 and a second connecting rod 620 in another group of connecting rod assemblies 600, the first connecting rods 610 in the upper and lower groups of connecting rod assemblies 600 are correspondingly arranged up and down, and the second connecting rods 620 are correspondingly arranged up and down, that is, the movement trajectories of the first connecting rods 610 in the upper and lower groups of connecting rod assemblies 600 are the same, and the movement trajectories of the second connecting rods 620 are the same, so that the top and the bottom of the movable door 400 can be ensured to synchronously move, and further, the deformation of the movable door 400 caused by the movement interference of. Based on the above arrangement, the top plate 100 is a fixed member, the movable door 400 is a movable member, and the movable door 400 and the top plate 100 are connected by the first link 610 and the second link 620, so that the movable door 400, the first link 610 and the second link 620 on the top of the movable door 400, and the top plate 100 form an upper plane four-bar linkage, and similarly, the movable door 400, the first link 610 and the second link 620 on the bottom of the movable door 400, and the bottom plate 200 form a lower plane four-bar linkage, and the upper plane four-bar linkage and the lower plane four-bar linkage have the same movement form. The movable door 400 can be supported through the upper and lower layers of plane four-bar mechanisms, so that the movable door 400 is prevented from being inclined and scratched on the top plate 100 or the bottom plate 200 in the opening or closing process, the designed shape of the movable door 400 can be kept in the long-time use process, the deformation which influences the use of a closed type wafer box is avoided, and the stability of the movable door 400 is further ensured.
Referring to fig. 2, 5 and 6, in some embodiments, the first link 610 and/or the second link 620 is provided with a locking member 630, the top plate 100 and/or the bottom plate 200 is provided with a stopper 110, and the locking member 630 is engaged with the stopper 110 to stop the movable door 400 when the movable door 400 is opened. Alternatively, the locking member 630 may be a knob plunger, and a mounting hole, such as a threaded hole, is formed in the first connecting rod 610 or the second connecting rod 620, and the knob plunger is mounted in the mounting hole. Correspondingly, the limiting part 110 may be a limiting block disposed on the top plate 100 or the bottom plate 200, and a limiting hole or a limiting groove is formed on the limiting block. After the dodge gate 400 is opened, the knob plunger is aligned with the limiting hole or the limiting groove, and then the knob plunger is inserted into the limiting hole or the limiting groove, so that the dodge gate 400 can be locked in a mechanical mode, and the dodge gate 400 is guaranteed to be not easy to move when a manipulator moves in or out of the tray and interfere with the manipulator.
Referring to fig. 1, in some embodiments, the movable door 400 includes a left door 410 and a right door 420 symmetrically disposed left and right, wherein the left door 410 and the right door 420 correspond to two sets of link assemblies 600, respectively, specifically, a top of the left door 410 is movably connected to the top plate 100 through one set of link assemblies 600, and a bottom of the left door 410 is movably connected to the bottom plate 200 through another set of link assemblies 600. Similarly, the top of the right door 420 is movably connected to the top plate 100 by one set of linkage assemblies 600, and the bottom of the right door 420 is movably connected to the bottom plate 200 by another set of linkage assemblies 600. Based on the above arrangement, the left door 410 and the right door 420 can be moved toward or away from each other around the top plate 100 and the bottom plate 200, respectively. Therefore, when the manipulator moves in or out of the tray, the left door 410 and the right door 420 can be opened at the same time to enlarge the opening of the closed cassette, thereby facilitating the movement of the tray.
Referring to fig. 10, in some embodiments, one of the left door 410 and the right door 420 is provided with a magnetic member 411, and the other is provided with an adsorption plate 421 made of a magnetic conductive material, and when the movable door 400 is closed, the left door 410 and the right door 420 are attracted by the magnetic member 411 and the adsorption plate 421. Alternatively, a magnet mounting plate is disposed on the left door 410 or the right door 420, the magnetic member 411 is a magnet and is fixed to the magnet mounting plate by a screw, and the magnetic conductive adsorption plate 421 is disposed opposite to the magnetic member 411. When left door 410 and right door 420 are closed, magnetic member 411 and attraction plate 421 enable left door 410 and right door 420 to be closed tightly under the action of magnetic force, so that left door 410 and right door 420 are kept closed at any time during the carrying process of the closed cassette and do not move relatively.
Referring to fig. 12 and 14, in some embodiments, the end of the left door 410 near the right door 420 and the end of the right door 420 near the left door 410 are provided with a hem 412, and the hem 412 at the end of the left door 410 is closely abutted against the hem 412 at the end of the right door 420 when the movable door 400 is closed. In the embodiment of the present application, when the left door 410 and the right door 420 are closed, the hems 412 at the respective ends are tightly abutted, so that the left door 410 and the right door 420 can be ensured to have good sealing performance, and the sealing performance of the closed cassette can be ensured.
Referring to fig. 1, 2, and 7 to 10, in some embodiments, the top plate 100 or the bottom plate 200 is provided with a mounting base 120, the mounting base 120 is rotatably provided with a cantilever shaft 130, the cantilever shaft 130 is fixedly connected to the second end of the first link 610 or the second end of the second link 620, the movable door 400 is rotatably provided with a connecting shaft 140, and the connecting shaft 140 is fixedly connected to the first end of the first link 610 or the first end of the second link 620. Alternatively, the mounting seat 120 may be a bearing seat, and a rolling bearing and a retainer ring are disposed in the mounting seat 120, so that the cantilever shaft 130 and the mounting seat 120 may be rotatably connected through the rolling bearing. The second end of the first link 610 is connected to the mounting base 120 through the cantilever shaft 130, so that the second end of the first link 610 can rotate around the cantilever shaft 130. Similarly, the second end of the second link 620 is connected to the other mounting base 120 through the other cantilever shaft 130, so that the second end of the second link 620 can rotate around the other cantilever shaft 130. Further, the movable door 400 is provided with a connecting shaft 140, and the connecting shaft 140 can rotate on the movable door 400, so that the first end of the first connecting rod 610 is connected with the movable door 400 through the connecting shaft 140, and the first end of the first connecting rod 610 can rotate around the connecting shaft 140. Likewise, the first end of the second link 620 is connected to the movable door 400 through another connecting shaft 140, so that the first end of the second link 620 can rotate about the other connecting shaft 140.
Referring to fig. 7 and 9, in some embodiments, two ends of the first link 610 and two ends of the second link 620 are respectively provided with receiving holes 611, a through groove 612 is formed on a sidewall of each receiving hole 611, and the cantilever shaft 130 or the connecting shaft 140 correspondingly penetrates through the receiving holes 611. For fixed connection, the first link 610 and the second link 620 are each provided with a fastener 640, such as a fastening screw, and the fastener 640 can enable two opposite groove walls of the through groove 612 to approach each other, so that the hole wall of the receiving hole 611 presses the cantilever shaft 130 or the connecting shaft 140. With the above arrangement, when the fastener 640 is a fastening screw, it is screwed from the end of the first link 610 or the end of the second link 620, passes through the through groove 612, and is connected with the groove wall of the through groove 612. In this way, when the fastening screw is screwed, the through groove 612 may be narrowed, and finally the cantilever shaft 130 or the connecting shaft 140 may be clamped by the hole wall of the receiving hole 611, thereby achieving fixation. Of course, in addition to the above manners, other fixing manners, such as a snap-fit manner, a screw-on manner, etc., may also be adopted in the embodiments of the present application, and here, the specific fixing manner of the connection shaft 140 or the cantilever shaft 130 and the first link 610 or the second link 620 is not limited.
Referring to fig. 12 and 13, in some embodiments, an end of the movable door 400 adjacent to the left or right guard plate 510 or 520 is formed with a first hook 413, and accordingly, an end of the left guard plate 510 adjacent to the movable door 400 or an end of the right guard plate 520 adjacent to the movable door 400 is provided with a second hook 511. In the closed state of the movable door 400, the first hook 413 and the second hook 511 are engaged with each other to form a labyrinth sealing structure between the movable door 400 and the left protective plate 510 or between the movable door 400 and the right protective plate 520. Based on the above arrangement, when the first hook 413 and the second hook 511 are hooked with each other, the side wall of the first hook 413 can abut against the side wall of the second hook 511, so that it is possible to prevent the remaining gap from blocking air or impurities from entering the inside of the closed type sheet cassette. In order to further improve the sealing performance, sealing members, such as gaskets, may be further disposed on the first hook 413 and the second hook 511, respectively, and when the first hook 413 and the second hook 511 are hooked with each other, the two hooks may be further sealed by the sealing members, so as to further ensure the sealing performance between the movable door 400 and the left protective plate 510, and the sealing performance between the movable door 400 and the right protective plate 520.
Referring to fig. 1 and 11, in some embodiments, the movable door 400 is a polygonal plate or an arc-shaped plate, which may be enclosed at the front of the closed type sheet cassette. In order to improve the sealing performance of the closed type cassette, in the embodiment of the present application, the contour of the outer edge of the top plate 100 near the movable door 400 has the same shape as the contour of the inner surface of the movable door 400, so that the inner surface of the movable door 400 can abut against the outer edge of the top plate 100 when the movable door 400 is closed, thereby improving the sealing performance. However, the distance h between the outer edge profile of the top plate 100 and the inner surface of the movable door 400 may be made not to exceed 2mm, e.g., 0.5mm, 1mm, 2mm, etc., in consideration of manufacturing errors, assembly errors, etc. Based on this clearance, both can effectively alleviate and produce the motion interference between dodge gate 400 and the roof 100 that leads to because factors such as manufacturing error, assembly error, can guarantee the leakproofness of closed film box to a certain extent again, prevent effectively that dust, impurity etc. from entering into inside the closed film box.
Similarly, the outer edge profile of the bottom plate 200 close to the movable door 400 has the same shape as the inner surface profile of the movable door 400, and the distance h between the outer edge profile of the bottom plate 200 and the inner surface profile of the movable door 400 is not more than 2 mm. Based on the above arrangement, when the movable door 400 is closed, the inner surface of the movable door 400 abuts against the outer edge of the bottom plate 200, thereby improving the sealing property. Meanwhile, due to the existence of the gap, the movable door 400 and the top plate 100 do not generate movement interference, the sealing performance of the closed type wafer box can be ensured to a certain extent, and dust, impurities and the like are effectively prevented from entering the inside of the closed type wafer box.
Referring to fig. 3, in some embodiments, at least one of the left guard plate 510, the right guard plate 520, and the rear guard plate 530 has a see-through window 540 formed therein. Based on the arrangement of the perspective window 540, the local part of the closed film box can transmit infrared detection signals, so that the tray in the closed film box can be conveniently detected.
In addition, backplate 530 is whole can set up on roof 100 through activity round pin 531 to can overturn and open, and then conveniently inspect whether the tray slides in the handling, in order to avoid automatic check system to produce wrong alarm information. In order to prevent the rear cover 530 from being opened randomly, the end of the rear cover 530 facing away from the movable pin 531 is attracted by a magnet between the bottom plates 200, thereby preventing the rear cover 530 from being opened accidentally by being turned up and down randomly.
In some embodiments, the left guard plate 510, the right guard plate 520 and the rear guard plate 530 may be made of aluminum alloy plates, which may ensure sufficient strength, reduce weight, prevent rusting, and ensure the service life of the enclosed cassette.
In some embodiments, a handle 150 may also be provided on the top panel 100 to facilitate handling of the enclosed cassettes by an operator.
The operation process of the closed type wafer box in the embodiment of the application is as follows:
the left door 410 and the right door 420 of the movable door 400 are opened, and the locking member 630 is inserted into the limiting part 110 for mechanical limiting, so that the movable door 400 is not closed under the action of external force; loading a tray into the slot 310 in the closed cassette by a manipulator or an operator; after the tray is loaded, pulling out the locking piece 630, closing the movable door 400, and transporting the closed type wafer box to a machine platform loading cavity to prepare for the process; after the closed type wafer box is loaded into the loading cavity, the movable door 400 is opened, the locking member 630 is inserted into the limiting part 110 for mechanical limiting, and then the process taking and placing tray can be carried out.
To sum up, the closed film box disclosed in the embodiment of the present application has good leakproofness to can effectively avoid its inside wafer directly to alleviate the contact with the atmosphere in assembly and handling, reduce the pollution of dust in the atmospheric environment to the wafer surface, and then reduce the quantity of wafer surface granule, improve the epitaxial wafer surface yield in the LED processing procedure generation process. The left door 410 and the right door 420 which are installed by adopting a plane four-bar linkage mechanism ensure the stability of the movable door 400 in the opening or closing process and meet the use requirement of the closed type film box in a specified space range; the tray is prevented from being inside the closed cassette and all the moving parts are arranged outside the closed cassette, e.g., the mounting seat 120, the locking member 630, etc., thereby preventing dust, which is caused by the moving parts in the rotation and collision processes, from contaminating the surface of the wafer. The operation of the closed type wafer box in the embodiment of the application is simple, and an operator only needs to open the movable door 400, the locking piece 630, close the movable door 400 and the like without other auxiliary actions; and the closed type wafer box has stronger applicability, is not only suitable for manual operation, but also suitable for automatic loading and unloading.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (12)
1. A closed cassette, comprising: the device comprises a top plate (100), a bottom plate (200) and a plurality of upright posts (300) connected between the top plate (100) and the bottom plate (200), wherein the upright posts (300) are provided with a plurality of groove positions (310);
closed spool box still includes dodge gate (400) and curb plate (500), dodge gate (400) with curb plate (500) enclose respectively and establish a plurality ofly the outside of stand (300), dodge gate (400) curb plate (500) roof (100) with bottom plate (200) enclose into accommodation space jointly, the top of dodge gate (400) with roof (100) swing joint, the bottom of dodge gate (400) with bottom plate (200) swing joint, dodge gate (400) can be opened or close accommodation space.
2. The closed sheet cassette of claim 1, wherein the side plate (500) comprises a left guard plate (510) and a right guard plate (520) respectively disposed at left and right sides of the movable door (400), and a rear guard plate (530) disposed opposite to the movable door (400), the left guard plate (510), the right guard plate (520), and the rear guard plate (530) each being connected to at least one of the top plate (100) and the bottom plate (200).
3. The cassette of claim 1, wherein the top of the movable door (400) is movably connected to the top plate (100) by a link assembly (600), and the bottom of the movable door (400) is movably connected to the bottom plate (200) by another link assembly (600);
the connecting rod assembly (600) comprises a first connecting rod (610) and a second connecting rod (620), a first end of the first connecting rod (610) is rotatably connected with the movable door (400), a second end of the first connecting rod (610) is rotatably connected with the top plate (100) or the bottom plate (200), a first end of the second connecting rod (620) is rotatably connected with the movable door (400), a second end of the second connecting rod (620) is rotatably connected with the top plate (100) or the bottom plate (200), and the movable door (400) can move around the top plate (100) and the bottom plate (200) through the connecting rod assembly (600) to open or close the accommodating space.
4. The closed type cartridge of claim 3, wherein a locking member (630) is provided on the first connecting rod (610) and/or the second connecting rod (620), a position-limiting portion (110) is provided on the top plate (100) and/or the bottom plate (200), and when the movable door (400) is opened, the locking member (630) is engaged with the position-limiting portion (110) to limit the movable door (400).
5. The cassette of claim 3, wherein the movable door (400) comprises a left door (410) and a right door (420) symmetrically disposed at left and right sides, the left door (410) is movably connected to the top plate (100) and the bottom plate (200) through two sets of the link assemblies (600), the right door (420) is movably connected to the top plate (100) and the bottom plate (200) through two sets of the link assemblies (600), and the left door (410) and the right door (420) can move around the top plate (100) and the bottom plate (200) respectively toward or away from each other.
6. The enclosed cassette of claim 5, wherein one of the left door (410) and the right door (420) has a magnetic member (411) and the other has an adsorption plate (421) made of magnetic material, and when the movable door (400) is closed, the left door (410) and the right door (420) are attracted to the adsorption plate (421) through the magnetic member (411).
7. The closed cassette of claim 5, wherein the end of the left door (410) near the right door (420) and the end of the right door (420) near the left door (410) are each provided with a hem (412), the hem (412) at the end of the left door (410) abutting the hem (412) at the end of the right door (420) when the movable door (400) is closed.
8. The enclosed cassette of claim 3, wherein the top plate (100) or the bottom plate (200) is provided with a mounting seat (120), the mounting seat (120) is rotatably provided with a cantilever shaft (130), and the cantilever shaft (130) is fixedly connected with the second end of the first link (610) or the second end of the second link (620);
the movable door (400) is rotatably provided with a connecting shaft (140), and the connecting shaft (140) is fixedly connected with the first end of the first connecting rod (610) or the first end of the second connecting rod (620).
9. The enclosed type box of claim 8, wherein two ends of the first link (610) and two ends of the second link (620) are respectively provided with an accommodating hole (611), a through groove (612) penetrating the accommodating hole (611) is formed in a side wall of the accommodating hole (611), the cantilever shaft (130) or the connecting shaft (140) is inserted into the accommodating hole (611), the first link (610) and the second link (620) are both provided with a fastening member (640), and the fastening member (640) can enable two opposite groove walls of the through groove (612) to approach each other, so that a hole wall of the accommodating hole (611) presses the cantilever shaft (130) or the connecting shaft (140).
10. The closed type cassette of claim 2, wherein a first hook (413) is formed at an end of the movable door (400) adjacent to the left cover plate (510) or the right cover plate (520), a second hook (511) is provided at an end of the left cover plate (510) adjacent to the movable door (400) or an end of the right cover plate (520) adjacent to the movable door (400), and the first hook (413) and the second hook (511) are engaged with each other in a closed state of the movable door (400) to form a labyrinth type closed structure between the movable door (400) and the left cover plate (510) or between the movable door (400) and the rear cover plate (530).
11. The closed sheet cassette of claim 1, wherein the movable door (400) is a polygonal plate or an arc-shaped plate;
the outer edge profile of the top plate (100) close to the movable door (400) is the same as the inner surface profile of the movable door (400), and the distance between the outer edge profile and the inner surface profile is less than or equal to 2 mm; and/or the outer edge profile of the bottom plate (200) close to the movable door (400) is the same as the inner surface profile of the movable door (400), and the distance between the outer edge profile and the inner surface profile is less than or equal to 2 mm.
12. The enclosed cassette of claim 2, wherein at least one of the left guard plate (510), the right guard plate (520), and the rear guard plate (530) is provided with a see-through window (540);
and/or the top end of the rear protection plate (530) is rotatably connected with the top plate (100) through a movable pin (531), and the bottom end of the rear protection plate (530) is connected with the bottom plate (200) in a magnetic adsorption manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110322053.5A CN113097112A (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110322053.5A CN113097112A (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113097112A true CN113097112A (en) | 2021-07-09 |
Family
ID=76669626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110322053.5A Pending CN113097112A (en) | 2021-03-25 | 2021-03-25 | Closed type film box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113097112A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080043456A (en) * | 2006-11-14 | 2008-05-19 | 삼성전자주식회사 | Wafer keeping apparatus of semiconductor device manufacturing equipment |
| KR20080092049A (en) * | 2007-04-11 | 2008-10-15 | 엘지디스플레이 주식회사 | Apparatus and method of cleaing cassette |
| US20090035100A1 (en) * | 2007-07-31 | 2009-02-05 | Tdk Corporation | Method of processing an object in a container and lid opening/closing system used in the method |
| KR101736351B1 (en) * | 2016-08-16 | 2017-05-16 | 오세덕 | Load port for transporting wafer |
| KR20200134079A (en) * | 2019-05-21 | 2020-12-01 | 세메스 주식회사 | Unit for supporting cassette and vehicle having the same |
-
2021
- 2021-03-25 CN CN202110322053.5A patent/CN113097112A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20080043456A (en) * | 2006-11-14 | 2008-05-19 | 삼성전자주식회사 | Wafer keeping apparatus of semiconductor device manufacturing equipment |
| KR20080092049A (en) * | 2007-04-11 | 2008-10-15 | 엘지디스플레이 주식회사 | Apparatus and method of cleaing cassette |
| US20090035100A1 (en) * | 2007-07-31 | 2009-02-05 | Tdk Corporation | Method of processing an object in a container and lid opening/closing system used in the method |
| KR101736351B1 (en) * | 2016-08-16 | 2017-05-16 | 오세덕 | Load port for transporting wafer |
| KR20200134079A (en) * | 2019-05-21 | 2020-12-01 | 세메스 주식회사 | Unit for supporting cassette and vehicle having the same |
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