CN113061974A - Vacuum straight pulling furnace production mechanism and straightening and crystal taking method thereof - Google Patents
Vacuum straight pulling furnace production mechanism and straightening and crystal taking method thereof Download PDFInfo
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- CN113061974A CN113061974A CN202110308694.5A CN202110308694A CN113061974A CN 113061974 A CN113061974 A CN 113061974A CN 202110308694 A CN202110308694 A CN 202110308694A CN 113061974 A CN113061974 A CN 113061974A
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The invention discloses a vacuum straight pulling furnace production mechanism which comprises a first bottom plate, wherein a first support is arranged on the first bottom plate, a single crystal furnace is arranged on the first support, the single crystal furnace comprises a furnace body, a crucible lifting rotating assembly is arranged below the furnace body, a rotary valve is arranged on the furnace body, an auxiliary chamber is arranged on the rotary valve, a guide assembly is arranged at the upper end of the furnace body, a rotating disc is arranged at the upper end of the auxiliary chamber, a crystal taking assembly is arranged on one side of the first bottom plate, and the crystal taking assembly comprises a clamping assembly and a tail support assembly. The production mechanism is stable and reliable in structure, the silicon crystal bar is straightened simply and quickly, the guide assembly can effectively avoid the phenomenon of deviation caused by unstable rotation of the pull rope when the single crystal furnace is pulled up, the same heart rate of the silicon crystal bar is improved, the product quality is improved, the clamping assembly and the tail support assembly can effectively adjust the position when crystal taking is carried out, the clamping and supporting effects are good, the falling probability is reduced, and the stability is greatly improved.
Description
Technical Field
The invention relates to the technical field of single crystal furnaces, in particular to a vacuum straight pulling furnace production mechanism and a straightening and crystal taking method thereof.
Background
A single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by a Czochralski method, a semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature, the semiconductor is widely applied to the fields of consumer electronics, communication systems, medical instruments and the like, the importance of the semiconductor is very huge from the viewpoint of technology and economic development, most of electronic products such as computers, mobile phones or digital recorders at present have very close relation with the semiconductor, common semiconductor materials such as silicon, germanium, gallium arsenide and the like, the existing forms of substances are various, and materials with poor electric conductivity such as coal, artificial crystals, gas, plasma and the like are generally used, Amber, ceramic, etc. are called insulators, metals having relatively good conductivity, such as gold, silver, copper, iron, tin, aluminum, etc., are called conductors, and materials interposed between conductors and insulators can be simply called semiconductors. When the existing single crystal furnace is used for pulling up, due to the fact that a pull rope is unstable in rotation, the deviation phenomenon occasionally occurs, the silicon crystal bar is not concentric, the product quality is affected, and when crystal taking is carried out, a stable and reliable crystal taking device is needed. Aiming at the situation, a production mechanism of a vacuum straight pulling furnace and a straightening and crystal taking method thereof are provided.
Disclosure of Invention
The invention aims to provide a production mechanism of a vacuum straight pulling furnace and a straightening and crystal taking method thereof, which can effectively solve the problems that a silicon crystal bar is not concentric and the product quality is influenced because the deviation phenomenon happens occasionally because a pull rope is unstable when the existing single crystal furnace is pulled up, and a stable and reliable crystal taking device is needed when crystal taking is carried out. The production mechanism is stable and reliable in structure, the silicon crystal bar is straightened simply and quickly, the guide assembly can effectively avoid the phenomenon of deviation caused by unstable rotation of the pull rope when the single crystal furnace is pulled up, the same heart rate of the silicon crystal bar is improved, the product quality is improved, the clamping assembly and the tail support assembly can effectively adjust the position when crystal taking is carried out, the clamping and supporting effects are good, the falling probability is reduced, and the stability is greatly improved.
The purpose of the invention can be realized by the following technical scheme:
the utility model provides a vacuum vertical pulling furnace production facility, production facility includes first bottom plate, be equipped with first support on the first bottom plate, be equipped with single crystal growing furnace on the first support, single crystal growing furnace includes the furnace body, the furnace body below is equipped with crucible lift runner assembly, be equipped with the ooff valve on the furnace body, be equipped with the subchamber on the ooff valve, the furnace body upper end is equipped with the direction subassembly, subchamber upper end is equipped with the rolling disc, first bottom plate one side is equipped with gets brilliant subassembly, it includes clamping component and tail support subassembly to get brilliant subassembly, clamping component includes the first tight piece of clamp of mirror image distribution, it is equipped with the tail support subassembly to press from both sides tight piece below, the tail support subassembly includes the clamping jaw of axial distribution, be.
Furthermore, a first support and a second support are arranged on the first bottom plate, a first telescopic rod is arranged on one side of the first support and fixed on the first bottom plate, a first telescopic plate is arranged at the upper end of the first telescopic rod, and a first sliding rod is arranged on the second support.
Furthermore, a third support is arranged at the upper end of the first support, a first sliding block is arranged on the third support, the first sliding block is in sliding fit with the first sliding rod, a first rotating block, a second support and a third support are arranged on one side of the third support in an array distribution, a first rotating shaft is arranged in the first rotating block and is rotatably connected with the first rotating block, first mounting blocks in an array distribution are arranged on the first rotating shaft, the first mounting blocks are fixedly connected with the first rotating shaft, and a first bevel gear is arranged at the lower end of the first rotating shaft;
the support is characterized in that a first motor is arranged on the second support, a second conical gear is arranged at the power end of the first motor, the first conical gear is meshed with the second conical gear, a rotating support is arranged on one side of the first installation block, the rotating support is fixedly connected with the first installation block, a fixing frame is arranged on one side of the rotating support, fixing rings distributed in an array mode are arranged on the fixing frame, the third support is fixed on the first expansion plate, the first expansion link pushes the first support to lift, and the first motor drives the fixing frame to rotate.
Further, the furnace body is fixed on the first support, an air exhaust hole is formed in one side of the furnace body, an air inlet and a laser diameter measuring instrument are arranged at the upper end of the furnace body, a first groove is formed in the furnace body, a flange is arranged outside the first groove, a sealing door is arranged on the outer side of the first groove, second telescopic rods are arranged on two sides of the furnace body, a second telescopic plate is arranged at the upper end of the second telescopic rod and fixedly connected with the sealing door, and the second telescopic rod pushes the sealing door to lift.
Further, the direction subassembly includes the third telescopic link of mirror image distribution, and third telescopic link one end all is equipped with the flexible post of third, and the flexible post one end of third is equipped with the guide block, is equipped with the direction steel ball of axial array distribution in the guide block.
Further, the crucible lifting and rotating assembly comprises sliding cylinders distributed in a mirror image manner, the sliding cylinders are fixed on a first base plate, cylinder sliding blocks are arranged on the sliding cylinders, first lifting plates are arranged between the sliding cylinders and fixedly connected with the cylinder sliding blocks, a second motor and a fourth support are arranged on the first lifting plates, a first gear is arranged at the power end of the second motor, a second gear is arranged on the fourth support and meshed with the first gear, a second rotating shaft is arranged on the second gear, the lower end of the second rotating shaft is fixedly connected with the second gear, a graphite heater is arranged at the upper end of the second rotating shaft and fixedly connected with a furnace body, a graphite support is arranged in the graphite heater, a crucible is arranged in the graphite support, the sliding cylinders drive the graphite support to lift and the crucible, the second motor drives the second rotating shaft to rotate, and the second rotating shaft drives the graphite support to rotate and the crucible to rotate.
Furthermore, the rotary valve is fixed at the upper end of the furnace body, an observation port is arranged on one side of the rotary valve, clamping columns which are distributed axially are arranged at the upper end of the rotary valve, a rotary ring is arranged on the rotary valve, clamping grooves which are distributed axially are arranged on the rotary ring, and the rotary ring and the rotary valve are closed or opened by rotating the rotary ring;
an auxiliary chamber is arranged above the rotating ring and fixedly connected with the rotating ring, a top end column is arranged at the upper end of the auxiliary chamber, a fifth support is arranged on the top end column, a fourth motor is arranged on the fifth support, a rotating wheel is arranged at the power end of the fourth motor, a rotating disc is arranged at the upper end of the top end column and rotatably connected with the top end column, a synchronous belt is arranged on the rotating wheel and the rotating disc together, a sixth support is arranged on the rotating disc, a fifth motor and a bearing seat are arranged on the sixth support, a worm is arranged at one end of the fifth motor, a third rotating shaft is arranged in the bearing seat, a worm wheel and a coil are arranged on the third rotating shaft and fixedly connected with the third rotating shaft, and the;
the seed crystal clamping device is characterized in that a steel rope is arranged in the coil, a seed crystal shaft is arranged at the lower end of the steel rope, clamping blocks which are distributed axially are arranged at the lower end of the seed crystal shaft, a screw cap is arranged on the outer side of each clamping block, seed crystals are arranged in the clamping blocks, and the screw caps are rotated to enable the clamping blocks to contract inwards to clamp the seed crystals.
Furthermore, the crystal taking assembly comprises a second floor, a seventh support is arranged on the second floor, a clamping assembly is arranged on the seventh support, the clamping assembly comprises a fourth support, the fourth support is fixed on the seventh support, a first mounting plate and a second mounting plate are arranged on the fourth support, first sliding rods distributed in an array mode are arranged between the first mounting plate and the second mounting plate, a first air cylinder is arranged on the second mounting plate, a first sliding block is arranged at the telescopic end of the first air cylinder and is in sliding fit with the first sliding rods, and the first air cylinder pushes the first sliding blocks to lift;
the silicon wafer clamping device is characterized in that a rotating cylinder is arranged on the first sliding block, a rotating plate is arranged on the rotating cylinder, a gas claw is arranged on the rotating plate, clamping plates are arranged at two ends of the gas claw, a first clamping block with mirror image distribution is arranged in each clamping plate, a second rotating block is arranged on each first clamping block, the second rotating blocks are in running fit with the clamping plates, the first cylinder drives the first clamping block to lift, the rotating cylinder drives the first clamping block to rotate, and the gas claw drives the first clamping block to clamp a silicon wafer column.
Furthermore, the tail support assembly comprises second mounting blocks distributed in an array manner, the second mounting blocks are provided with first holes distributed in an array manner and second holes distributed in a mirror image manner, a mounting frame is arranged between the second mounting blocks and fixedly connected with the rotating plate, one side of each second mounting block is provided with a second air cylinder, one end of each second air cylinder is provided with a second air cylinder telescopic rod, a second lifting plate is arranged on each second air cylinder telescopic rod, second sliding rods distributed in a mirror image manner are arranged on the second lifting plate and are in sliding fit with the second holes, third air cylinders are arranged on the second lifting plates, second clamping blocks distributed in an axial direction are arranged around the third air cylinders, clamping jaws are arranged on the second clamping blocks, and anti-skid pads are arranged on the clamping jaws;
the other end of the second cylinder is provided with a fixed plate, the fixed plate is fixedly connected with the second cylinder, a fourth cylinder with mirror image distribution is arranged on the fixed plate, a fourth telescopic column is arranged on the fourth cylinder, a movable plate is jointly arranged on the fourth telescopic column, third sliding rods with array distribution are arranged on the movable plate, the third sliding rods are in sliding fit with the first holes, one end of each third sliding rod is fixedly connected with the movable plate, the other end of each third sliding rod is provided with a supporting block, and a groove is formed in the supporting block.
A method for straightening and taking crystal by a vacuum Czochralski furnace comprises the following steps:
the method comprises the following steps: adjusting the levels of the graphite heater, the graphite support and the crucible, adding a polycrystalline silicon bar into the crucible, installing seed crystals in a clamping block, rotating a screw cap to enable the clamping block to contract inwards to clamp the seed crystals, pushing a guide block to clamp a seed crystal shaft by a third telescopic rod, enabling the guide steel balls to be in contact with the seed crystal shaft, and driving a closing door to descend and close by a second telescopic rod;
step two: the vacuum pump is used for vacuumizing the inside of the single crystal furnace through the air exhaust hole, when the vacuum degree reaches a required value, the vacuum pump is closed, argon is quickly filled into the inside of the single crystal furnace through the air inlet hole, when the inflation pressure reaches 1-6 bar relative pressure, quick inflation is stopped, slow inflation is used instead, argon flowing is carried out, after the inflation is finished, preheating and material melting are carried out on the polycrystalline silicon bar, the fifth motor drives the seed crystal shaft to descend, and the seed crystal shaft drives the seed crystal to descend into the liquid surface for shaping and seeding;
step three: the sliding cylinder drives the graphite support and the crucible to descend, the second motor drives the graphite support and the crucible to rotate, the fourth motor drives the rotating disc to rotate, the rotating disc drives the seed crystal shaft to rotate, the seed crystal shaft drives the seed crystal to rotate, the rotation direction of the seed crystal is opposite to that of the crucible, after seeding is finished, the growth of a thin neck is carried out, after Chinese imperial crystal is grown and formed, shoulder expansion is carried out, the crucible descending speed is slowly reduced to 3 +/-2 mm/min, meanwhile, the speed is reduced to 8 +/-4 rpm along with the increase of the shoulder expansion diameter, in addition, the seed crystal rotating speed is slowly reduced to 1 +/-0.5 rpm, in order to prevent high-pressure ionization, a certain proportion of nitrogen gas is filled into the argon gas protective atmosphere, and the mixing proportion of the nitrogen gas is 0.01% -5;
step four: when the single crystal is pulled to the tail part, ending, continuously rotating the crucible to move downwards, driving the seed crystal shaft to ascend by the fifth motor, and changing the seed crystal into rotating and moving upwards;
step five: after production is finished, the second motor, the fourth motor and the fifth motor are stopped, argon is filled to normal pressure, the argon is closed, the third telescopic rod drives the guide block to retreat to loosen the seed shaft, the fifth motor drives the seed shaft to ascend to lift the silicon crystal bar into the auxiliary chamber, the rotating ring is rotated to open the clamping column and the clamping groove, the first telescopic rod starts to ascend to the auxiliary chamber, and the first motor drives the auxiliary chamber to slowly rotate to the side face;
step six: the fifth motor drives the seed shaft to descend, the seed shaft drives the silicon crystal bar to descend, when the silicon crystal bar is completely extended out of the auxiliary chamber, the silicon crystal bar stops, the first air cylinder drives the air claw and the tail support assembly to ascend, the air claw drives the first clamping block to clamp the silicon crystal bar, the fourth air cylinder drives the support block to ascend and contact with the tail portion of the silicon crystal bar, the tail portion of the silicon crystal bar enters the groove, the second air cylinder drives the third air cylinder to ascend to a designated height, the third air cylinder drives the clamping jaw to clamp the silicon crystal bar, the nut is rotated to loosen the clamped seed crystal, the first air cylinder drives the silicon crystal bar to descend, the rotating air cylinder drives the silicon crystal bar to rotate 90.
The invention has the beneficial effects that:
1. the production mechanism has a stable and reliable structure, the silicon crystal bar is simply and quickly straightened, and the guide assembly can effectively avoid the phenomenon of deviation caused by unstable rotation of the pull rope when the single crystal furnace is pulled up, so that the same heart rate of the silicon crystal bar is improved;
2. the production mechanism improves the product quality, the clamping assembly and the tail support assembly can effectively adjust the position when crystal taking is carried out, the clamping and supporting effects are good, the falling probability is reduced, and the stability is greatly improved.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic view of the production mechanism of the present invention;
FIG. 2 is a schematic view of a crystal-taking rotating structure of the production mechanism of the present invention;
FIG. 3 is a schematic view of a part of the structure of the production mechanism of the present invention;
FIG. 4 is a schematic view of a part of the structure of the production mechanism of the present invention;
FIG. 5 is a schematic view of a part of the structure of the production mechanism of the present invention;
FIG. 6 is a schematic view of a partial structure of a single crystal furnace according to the present invention;
FIG. 7 is a schematic view of a partial structure of a single crystal furnace according to the present invention;
FIG. 8 is a schematic view of the guide assembly of the present invention;
FIG. 9 is a schematic view of the crucible elevating and rotating assembly according to the present invention;
FIG. 10 is a schematic view of a stopcock of the present invention;
FIG. 11 is a schematic view showing a partial structure of a single crystal furnace according to the present invention;
FIG. 12 is an enlarged view of the structure of FIG. 11 at A in accordance with the present invention;
FIG. 13 is an exploded view of a portion of the single crystal furnace according to the present invention;
FIG. 14 is a schematic view of a crystal taking assembly according to the present invention;
FIG. 15 is a schematic view of the clamp assembly of the present invention;
FIG. 16 is a schematic view of the tail stock assembly of the present invention;
FIG. 17 is a schematic view of a portion of the tail stock assembly of the present invention;
fig. 18 is a schematic view of a portion of the tail stock assembly of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "opening," "upper," "lower," "thickness," "top," "middle," "length," "inner," "peripheral," and the like are used in an orientation or positional relationship that is merely for convenience in describing and simplifying the description, and do not indicate or imply that the referenced component or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present invention.
A vacuum straight pulling furnace production mechanism is shown in figures 1-18 and comprises a first bottom plate 1, a first support 11 is arranged on the first bottom plate 1, a single crystal furnace 2 is arranged on the first support 11, the single crystal furnace 2 comprises a furnace body 21, a crucible lifting rotating assembly 23 is arranged below the furnace body 21, a rotary valve 24 is arranged on the furnace body 21, an auxiliary chamber 25 is arranged on the rotary valve 24, a guide assembly 23 is arranged at the upper end of the furnace body 21, a rotating disc 27 is arranged at the upper end of the auxiliary chamber 25, a crystal taking assembly 3 is arranged on one side of the first bottom plate 1 and comprises a clamping assembly 4 and a tail support assembly 5, the clamping assembly 4 comprises a first clamping block 46 with mirror image distribution, a tail support assembly 5 is arranged below the first clamping block 46 and comprises a clamping jaw 532 with axial distribution, and a support block 56 is arranged in the clamping jaw 532 with axial distribution.
A first support 12 and a second support 14 are arranged on the first base plate 1, a first telescopic rod 13 is arranged on one side of the first support 12, the first telescopic rod 13 is fixed on the first base plate 1, a first telescopic plate 131 is arranged at the upper end of the first telescopic rod 13, and a first sliding rod 141 is arranged on the second support 14;
a third support column 15 is arranged at the upper end of the first support column 12, a first sliding block 151 is arranged on the third support column 15, the first sliding block 151 is in sliding fit with the first sliding rod 141, a first rotating block 152, a second support 156 and a third support 18 which are distributed in an array manner are arranged on one side of the third support column 15, a first rotating shaft 153 is arranged in the first rotating block 152, the first rotating shaft 153 is rotatably connected with the first rotating block 152, first mounting blocks 154 which are distributed in an array manner are arranged on the first rotating shaft 153, the first mounting blocks 154 are fixedly connected with the first rotating shaft 153, and a first bevel gear 155 is arranged at the lower end of the first rotating shaft 153;
the second bracket 156 is provided with a first motor 157, the power end of the first motor 157 is provided with a second conical gear 158, the first conical gear 155 is meshed with the second conical gear 158, one side of the first mounting block 154 is provided with a rotating bracket 16, the rotating bracket 16 is fixedly connected with the first mounting block 154, one side of the rotating bracket 16 is provided with a fixing frame 17, the fixing frame 17 is provided with fixing rings 171 distributed in an array manner, the third bracket 18 is fixed on the first expansion plate 131, the first expansion link 13 pushes the first support 12 to ascend and descend, and the first motor 157 drives the fixing frame 17 to rotate.
The furnace body 21 is fixed on the first support 11, an extraction hole 211 is arranged on one side of the furnace body 21, an air inlet 212 and a laser diameter measuring instrument 213 are arranged at the upper end of the furnace body 21, a first open slot 214 is arranged in the furnace body 21, a flange 215 is arranged outside the first open slot 214, a closed door 216 is arranged outside the first open slot 214, second telescopic rods 217 are arranged on two sides of the furnace body 21, a second telescopic plate 218 is arranged at the upper end of the second telescopic rod 217, the second telescopic plate 218 is fixedly connected with the closed door 216, and the second telescopic rod 217 pushes the closed door 216 to lift;
the guide assembly 22 comprises third telescopic rods 221 distributed in a mirror image manner, one ends of the third telescopic rods 221 are respectively provided with a third telescopic column 222, one end of each third telescopic column 222 is provided with a guide block 223, and guide steel balls 224 distributed in an axial array manner are arranged in each guide block 223;
the crucible lifting and rotating assembly 23 comprises sliding cylinders 231 distributed in a mirror image manner, the sliding cylinders 231 are fixed on the first base plate 1, cylinder sliding blocks 232 are arranged on the sliding cylinders 231, first lifting plates 233 are arranged between the sliding cylinders 231, the first lifting plates 233 are fixedly connected with the cylinder sliding blocks 232, second motors 234 and fourth supports 236 are arranged on the first lifting plates 233, first gears 235 are arranged at power ends of the second motors 234, second gears 237 are arranged on the fourth supports 236, the first gears 235 are meshed with the second gears 237, second rotating shafts 238 are arranged on the second gears 237, lower ends of the second rotating shafts 238 are fixedly connected with the second gears 237, graphite heaters 239 are arranged at upper ends of the second rotating shafts 238, the graphite heaters 239 are fixedly connected with the furnace body 21, graphite supports 2310 are arranged in the graphite heaters 239, crucibles 2311 are arranged in the graphite supports 2310, the sliding cylinders 231 drive the graphite supports 2310 and the crucibles 2311 to lift, the second motor 234 drives the second rotating shaft 238 to rotate, and the second rotating shaft 238 drives the graphite holder 2310 and the crucible 2311 to rotate;
the rotary valve 24 is fixed at the upper end of the furnace body 21, one side of the rotary valve 24 is provided with an observation port 241, the upper end of the rotary valve 24 is provided with clamping columns 242 which are distributed axially, the rotary valve 24 is provided with a rotary ring 243, the rotary ring 243 is provided with clamping grooves 244 which are distributed axially, and the rotary ring 243 is rotated to enable the rotary ring 243 and the rotary valve 24 to be closed or opened;
an auxiliary chamber 25 is arranged above the rotating ring 243, the auxiliary chamber 25 is fixedly connected with the rotating ring 243, a top end column 26 is arranged at the upper end of the auxiliary chamber 25, a fifth support 261 is arranged on the top end column 26, a fourth motor 262 is arranged on the fifth support 261, a rotating wheel 263 is arranged at the power end of the fourth motor 262, a rotating disc 27 is arranged at the upper end of the top end column 26, the rotating disc 27 is rotatably connected with the top end column 26, a synchronous belt 264 is jointly arranged on the rotating wheel 263 and the rotating disc 27, a sixth support 271 is arranged on the rotating disc 27, a fifth motor 272 and a bearing seat 274 are arranged on the sixth support 271, a worm 273 is arranged at one end of the fifth motor 272, a third rotating shaft 275 is arranged in the bearing seat 274, a worm wheel 276 and a coil 277 are arranged on the third rotating shaft 275, the worm wheel 276 and the coil 277;
a steel rope 28 is arranged in the coil 277, a seed crystal shaft 281 is arranged at the lower end of the steel rope 28, clamping blocks 282 which are axially distributed are arranged at the lower end of the seed crystal shaft 281, screw caps 283 are arranged on the outer sides of the clamping blocks 282, seed crystals 29 are arranged in the clamping blocks 282, and the clamping blocks 282 are contracted inwards to clamp the seed crystals 29 by rotating the screw caps 283.
The crystal taking assembly 3 comprises a second floor 31, a seventh support 311 is arranged on the second floor 31, a clamping assembly 4 is arranged on the seventh support 311, the clamping assembly 4 comprises a fourth support 41, the fourth support 41 is fixed on the seventh support 311, a first mounting plate 411 and a second mounting plate 412 are arranged on the fourth support 41, first sliding rods 413 distributed in an array mode are arranged between the first mounting plate 411 and the second mounting plate 412, a first air cylinder 42 is arranged on the second mounting plate 412, a first sliding block 421 is arranged at the telescopic end of the first air cylinder 42, the first sliding block 421 is in sliding fit with the first sliding rods 413, and the first air cylinder 42 pushes the first sliding block 421 to lift;
be equipped with on the first sliding block 421 and rotate the cylinder 43, be equipped with the rotor plate 44 on the rotation cylinder 43, be equipped with gas claw 45 on the rotor plate 44, gas claw 45 both ends all are equipped with clamping plate 451, be equipped with the first tight piece 46 of clamp that the mirror image distributes in the clamping plate 451, all be equipped with second rotor block 461 on the first tight piece 46 of clamp, second rotor block 461 and clamping plate 451 normal running fit, first cylinder 42 drives first tight piece 46 of clamp and goes up and down, rotation cylinder 43 drives first tight piece 46 of clamp and rotates, gas claw 45 drives first tight piece 46 of clamp and presss from both sides the tight silicon column.
The tail holds in palm subassembly 5 including the second installation piece 51 of array distribution, be equipped with the first trompil 511 that the array distributes and the second trompil 512 that the mirror image distributes on the second installation piece 51, be equipped with mounting bracket 513 between the second installation piece 51, mounting bracket 513 and rotor plate 44 fixed connection, second installation piece 51 one side is equipped with second cylinder 52, second cylinder 52 one end is equipped with second cylinder telescopic link 521, be equipped with second lifter plate 522 on the second cylinder telescopic link 521, be equipped with the second slide bar 523 that the mirror image distributes on the second lifter plate 522, second slide bar 523 and second trompil 512 sliding fit, be equipped with third cylinder 53 on the second lifter plate 522, third cylinder 53 model is: NKE Zhongcun CHW236, axially distributed second clamping blocks 531 are arranged around the third cylinder 53, clamping jaws 532 are arranged on the second clamping blocks 531, and anti-skid pads 533 are arranged on the clamping jaws 532;
the other end of the second cylinder 52 is provided with a fixed plate 54, the fixed plate 54 is fixedly connected with the second cylinder 52, the fixed plate 54 is provided with fourth cylinders 55 distributed in a mirror image manner, the fourth cylinders 55 are provided with fourth telescopic columns 551, the fourth telescopic columns 551 are provided with a moving plate 552 together, the moving plate 552 is provided with third sliding rods 553 distributed in an array manner, the third sliding rods 553 are in sliding fit with the first holes 511, one end of each third sliding rod 553 is fixedly connected with the moving plate 552, the other end of each third sliding rod 553 is provided with a support block 56, and a groove 561 is arranged in each support block 56.
A method for straightening and taking crystal by a vacuum Czochralski furnace comprises the following steps:
the method comprises the following steps: adjusting the levels of the graphite heater 239, the graphite holder 2310 and the crucible 2311, adding a polycrystalline silicon bar into the crucible 2311, installing the seed crystal 29 into the clamping block 282, rotating the screw cap 283 to enable the clamping block 282 to contract inwards to clamp the seed crystal 29, pushing the guide block 223 to clamp the seed crystal shaft 281 by the third telescopic rod 221, enabling the guide steel ball 224 to be in contact with the seed crystal shaft 281, and driving the closing door 216 to descend and close by the second telescopic rod 217;
step two: the vacuum pump is used for vacuumizing the inside of the single crystal furnace 2 through the air exhaust hole 211, when the vacuum degree reaches a required value, the vacuum pump is turned off, argon is rapidly filled into the inside of the single crystal furnace 2 through the air inlet hole 212, when the inflation pressure reaches 1-6 bar relative pressure, rapid inflation is stopped, slow inflation is used instead, argon flowing is carried out, after the inflation is finished, preheating and material melting are carried out on the polycrystalline silicon bar, the fifth motor 272 drives the seed shaft 281 to descend, and the seed shaft 281 drives the seed crystal 29 to descend to the liquid surface for shaping and seeding;
step three: the sliding cylinder 231 drives the graphite holder 2310 and the crucible 2311 to descend, the second motor 234 drives the graphite holder 2310 and the crucible 2311 to rotate, the fourth motor 262 drives the rotating disc 27 to rotate, the rotating disc 27 drives the seed shaft 281 to rotate, the seed shaft 281 drives the seed crystal 29 to rotate, the rotation direction of the seed crystal 29 is opposite to that of the crucible 2311, after seeding is finished, growth of a narrow neck is carried out, shoulder expansion is carried out after the growth of the narrow neck is finished, the descending speed of the crucible 2311 is slowly reduced to 3 +/-2 mm/min, meanwhile, the speed is reduced to 8 +/-4 rpm along with the increase of the diameter of the shoulder expansion, in addition, the rotating speed of the seed crystal 29 is slowly reduced to 1 +/-0.5 rpm, and in order to prevent high-pressure ionization, a certain proportion of nitrogen is filled into the argon protective atmosphere, and the doping proportion of the nitrogen is 0.01-5;
step four: when the single crystal is pulled to the tail part, ending is carried out, the crucible 2311 continues to rotate and move downwards, the fifth motor 272 drives the seed crystal shaft 281 to ascend, and the seed crystal 29 turns to rotate and move upwards;
step five: after production is finished, the second motor 234, the fourth motor 262 and the fifth motor 272 are stopped, argon gas is filled to normal pressure, the argon gas is closed, the third telescopic rod 221 drives the guide block 223 to retreat to release the seed shaft 281, the fifth motor 272 drives the seed shaft 281 to ascend to lift the silicon crystal bar into the auxiliary chamber 25, the rotating ring 243 is rotated to open the clamping column 242 and the clamping groove 244, the first telescopic rod 13 is started to ascend to the auxiliary chamber 25, and the first motor 157 drives the auxiliary chamber 25 to slowly rotate to the side;
step six: the fifth motor 272 drives the seed shaft 281 to descend, the seed shaft 281 drives the silicon crystal bar to descend, when the silicon crystal bar extends out of the auxiliary chamber 25 completely, the first air cylinder 42 drives the air claw 45 and the tail support assembly 5 to ascend, the air claw 45 drives the first clamping block 46 to clamp the silicon crystal bar, the fourth air cylinder 55 pushes the support block 56 to ascend and contact the tail portion of the silicon crystal bar, the tail portion of the silicon crystal bar enters the groove 561, the second air cylinder 52 pushes the third air cylinder 53 to ascend to a designated height, the third air cylinder 53 drives the clamping jaw 532 to clamp the silicon crystal bar, the nut 283 is rotated to loosen the clamping seed crystal 29, the first air cylinder 42 drives the silicon crystal bar to descend, the rotating air cylinder 43 drives the silicon crystal bar to rotate by 90 degrees, and the subsequent production equipment takes.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. A vacuum straight-pull furnace production mechanism comprises a first bottom plate (1) and is characterized in that a first support (11) is arranged on the first bottom plate (1), a single crystal furnace (2) is arranged on the first support (11), the single crystal furnace (2) comprises a furnace body (21), a crucible lifting rotating assembly (23) is arranged below the furnace body (21), a rotary valve (24) is arranged on the furnace body (21), an auxiliary chamber (25) is arranged on the rotary valve (24), a guide assembly (23) is arranged at the upper end of the furnace body (21), a rotating disc (27) is arranged at the upper end of the auxiliary chamber (25), a crystal taking assembly (3) is arranged on one side of the first bottom plate (1), the crystal taking assembly (3) comprises a clamping assembly (4) and a tail support assembly (5), the clamping assembly (4) comprises first clamping blocks (46) distributed in a mirror image mode, the tail support assembly (5) is arranged below the first clamping blocks (46), and the tail support assembly (5) comprises clamping jaws, the clamping jaws (532) distributed in the axial direction are internally provided with supporting blocks (56).
2. The vacuum straight pulling furnace production mechanism is characterized in that a first support column (12) and a second support column (14) are arranged on the first bottom plate (1), a first telescopic rod (13) is arranged on one side of the first support column (12), the first telescopic rod (13) is fixed on the first bottom plate (1), a first telescopic plate (131) is arranged at the upper end of the first telescopic rod (13), and a first sliding rod (141) is arranged on the second support column (14).
3. The vacuum straight pulling furnace production mechanism is characterized in that a third support column (15) is arranged at the upper end of the first support column (12), a first sliding block (151) is arranged on the third support column (15), the first sliding block (151) is in sliding fit with the first sliding rod (141), a first rotating block (152), a second support frame (156) and a third support frame (18) which are distributed in an array manner are arranged on one side of the third support column (15), a first rotating shaft (153) is arranged in the first rotating block (152), the first rotating shaft (153) is rotatably connected with the first rotating block (152), a first mounting block (154) which is distributed in an array manner is arranged on the first rotating shaft (153), the first mounting block (154) is fixedly connected with the first rotating shaft (153), and a first bevel gear (155) is arranged at the lower end of the first rotating shaft (153);
be equipped with first motor (157) on second support (156), first motor (157) power end is equipped with second conical gear (158), first conical gear (155) and second conical gear (158) meshing, first installation piece (154) one side is equipped with rotates support (16), rotate support (16) and first installation piece (154) fixed connection, it is equipped with mount (17) to rotate support (16) one side, be equipped with solid fixed ring (171) of array distribution on mount (17), third support (18) are fixed on first expansion plate (131), first telescopic link (13) promote first pillar (12) and go up and down, first motor (157) drive mount (17) and rotate.
4. The vacuum straight pulling furnace production mechanism is characterized in that the furnace body (21) is fixed on the first support (11), one side of the furnace body (21) is provided with an air suction hole (211), the upper end of the furnace body (21) is provided with an air inlet hole (212) and a laser diameter measuring instrument (213), the furnace body (21) is internally provided with a first open slot (214), the first open slot (214) is externally provided with a flange (215), the outer side of the first open slot (214) is provided with a closed door (216), the two sides of the furnace body (21) are respectively provided with a second telescopic rod (217), the upper end of the second telescopic rod (217) is provided with a second telescopic plate (218), the second telescopic plate (218) is fixedly connected with the closed door (216), and the second telescopic rod (217) pushes the closed door (216) to lift.
5. The production mechanism of the vacuum straight pulling furnace as claimed in claim 1, wherein the guide assembly (22) comprises third telescopic rods (221) which are distributed in a mirror image manner, one ends of the third telescopic rods (221) are respectively provided with a third telescopic column (222), one ends of the third telescopic columns (222) are respectively provided with a guide block (223), and guide steel balls (224) which are distributed in an axial array manner are arranged in the guide blocks (223).
6. The production mechanism of the vacuum straight pulling furnace as claimed in claim 1, wherein the crucible lifting and rotating assembly (23) comprises sliding cylinders (231) distributed in a mirror image manner, the sliding cylinders (231) are fixed on the first bottom plate (1), cylinder sliding blocks (232) are arranged on the sliding cylinders (231), first lifting plates (233) are arranged between the sliding cylinders (231), the first lifting plates (233) are fixedly connected with the cylinder sliding blocks (232), a second motor (234) and a fourth bracket (236) are arranged on the first lifting plates (233), a first gear (235) is arranged at the power end of the second motor (234), a second gear (237) is arranged on the fourth bracket (236), the first gear (235) is engaged with the second gear (237), a second rotating shaft (238) is arranged on the second gear (237), and the lower end of the second rotating shaft (238) is fixedly connected with the second gear (237), the graphite heater (239) is arranged at the upper end of the second rotating shaft (238), the graphite heater (239) is fixedly connected with the furnace body (21), a graphite support (2310) is arranged in the graphite heater (239), a crucible (2311) is arranged in the graphite support (2310), the sliding cylinder (231) drives the graphite support (2310) and the crucible (2311) to lift, the second motor (234) drives the second rotating shaft (238) to rotate, and the second rotating shaft (238) drives the graphite support (2310) and the crucible (2311) to rotate.
7. The vacuum straight pulling furnace production mechanism is characterized in that the rotary valve (24) is fixed at the upper end of the furnace body (21), one side of the rotary valve (24) is provided with an observation port (241), the upper end of the rotary valve (24) is provided with clamping columns (242) which are distributed axially, the rotary valve (24) is provided with a rotary ring (243), the rotary ring (243) is provided with clamping grooves (244) which are distributed axially, and the rotary ring (243) is rotated to enable the rotary ring (243) and the rotary valve (24) to be closed or opened;
an auxiliary chamber (25) is arranged above the rotating ring (243), the auxiliary chamber (25) is fixedly connected with the rotating ring (243), a top end column (26) is arranged at the upper end of the auxiliary chamber (25), a fifth support (261) is arranged on the top end column (26), a fourth motor (262) is arranged on the fifth support (261), a rotating wheel (263) is arranged at the power end of the fourth motor (262), a rotating disc (27) is arranged at the upper end of the top end column (26), the rotating disc (27) is rotatably connected with the top end column (26), a synchronous belt (264) is jointly arranged on the rotating wheel (263) and the rotating disc (27), a sixth support (271) is arranged on the rotating disc (27), a fifth motor (272) and a bearing seat (274) are arranged on the sixth support (271), a worm (273) is arranged at one end of the fifth motor (272), a third rotating shaft (275) is arranged in the bearing seat (274), a worm wheel (276) and a coil (277) are, the worm wheel (276) and the coil (277) are fixedly connected with the third rotating shaft (275), and the worm (273) drives the worm wheel (276) to rotate;
be equipped with steel cable (28) in coil (277), steel cable (28) lower extreme is equipped with seed axle (281), and seed axle (281) lower extreme is equipped with axially distributed grip block (282), and the grip block (282) outside is equipped with nut (283), is equipped with seed crystal (29) in grip block (282), rotates nut (283) and makes grip block (282) internal contraction press from both sides tight seed crystal (29).
8. The vacuum straight pulling furnace production mechanism is characterized in that the crystal taking assembly (3) comprises a second floor (31), a seventh support (311) is arranged on the second floor (31), a clamping assembly (4) is arranged on the seventh support (311), the clamping assembly (4) comprises a fourth support (41), the fourth support (41) is fixed on the seventh support (311), a first mounting plate (411) and a second mounting plate (412) are arranged on the fourth support (41), first sliding rods (413) distributed in an array mode are arranged between the first mounting plate (411) and the second mounting plate (412), a first air cylinder (42) is arranged on the second mounting plate (412), a first sliding block (421) is arranged at the telescopic end of the first air cylinder (42), the first sliding block (421) is in sliding fit with the first sliding rod (413), and the first sliding block (421) is pushed to ascend and descend by the first air cylinder (42);
be equipped with on first sliding block (421) and rotate cylinder (43), be equipped with rotor plate (44) on rotating cylinder (43), be equipped with gas claw (45) on rotor plate (44), gas claw (45) both ends all are equipped with clamp plate (451), be equipped with first clamp tight piece (46) that the mirror image distributes in clamp plate (451), all be equipped with second rotor plate (461) on first clamp tight piece (46), second rotor plate (461) and clamp plate (451) normal running fit, first cylinder (42) drive first clamp tight piece (46) and go up and down, it rotates to rotate cylinder (43) and drives first clamp tight piece (46), gas claw (45) drive first clamp tight piece (46) and press from both sides the tight silicon crystal column.
9. The vacuum straight pulling furnace production mechanism is characterized in that the tail support assembly (5) comprises second mounting blocks (51) distributed in an array manner, first holes (511) distributed in an array manner and second holes (512) distributed in a mirror image manner are formed in the second mounting blocks (51), a mounting frame (513) is arranged between the second mounting blocks (51), the mounting frame (513) is fixedly connected with the rotating plate (44), a second air cylinder (52) is arranged on one side of each second mounting block (51), one end of each second air cylinder (52) is provided with a second air cylinder telescopic rod (521), a second lifting plate (522) is arranged on each second air cylinder telescopic rod (521), second sliding rods (523) distributed in a mirror image manner are arranged on each second lifting plate (522), the second sliding rods (523) are in sliding fit with the second holes (512), and a third air cylinder (53) is arranged on each second lifting plate (522), second clamping blocks (531) which are axially distributed are arranged on the periphery of the third air cylinder (53), clamping jaws (532) are arranged on the second clamping blocks (531), and anti-skid pads (533) are arranged on the clamping jaws (532);
the other end of the second air cylinder (52) is provided with a fixing plate (54), the fixing plate (54) is fixedly connected with the second air cylinder (52), a fourth air cylinder (55) distributed in a mirror image mode is arranged on the fixing plate (54), a fourth telescopic column (551) is arranged on the fourth air cylinder (55), a moving plate (552) is arranged on the fourth telescopic column (551) jointly, third sliding rods (553) distributed in an array mode are arranged on the moving plate (552), the third sliding rods (553) are in sliding fit with the first opening holes (511), one end of each third sliding rod (553) is fixedly connected with the moving plate (552), the other end of each third sliding rod (553) is provided with a supporting block (56), and a groove (561) is formed in the supporting block (56).
10. The silicon crystal bar straightening and crystal taking method based on the production mechanism of any one of claims 1 to 9, characterized by comprising the following steps:
the method comprises the following steps: adjusting the levels of a graphite heater (239), a graphite support (2310) and a crucible (2311), adding a polycrystalline silicon bar into the crucible (2311), installing a seed crystal (29) into a clamping block (282), rotating a screw cap (283) to enable the clamping block (282) to contract inwards to clamp the seed crystal (29), pushing a guide block (223) by a third telescopic rod (221) to clamp a seed crystal shaft (281), enabling a guide steel ball (224) to be in contact with the seed crystal shaft (281), and driving a closing door (216) to descend and close by a second telescopic rod (217);
step two: the vacuum pump is used for vacuumizing the interior of the single crystal furnace (2) through the air exhaust hole (211), when the vacuum degree reaches a required value, the vacuum pump is closed, argon is rapidly filled into the single crystal furnace (2) through the air inlet hole (212), when the inflation pressure reaches 1-6 bar relative pressure, rapid inflation is stopped, slow inflation is used, argon flowing is carried out, after the inflation is finished, preheating and material melting are carried out on the polycrystalline silicon bar, the fifth motor (272) drives the seed crystal shaft (281) to descend, and the seed crystal shaft (281) drives the seed crystal (29) to descend into the liquid surface for shaping and seeding;
step three: the sliding cylinder (231) drives the graphite holder (2310) and the crucible (2311) to descend, the second motor (234) drives the graphite holder (2310) and the crucible (2311) to rotate, the fourth motor (262) drives the rotating disc (27) to rotate, the rotating disc (27) drives the seed crystal shaft (281) to rotate, the seed crystal shaft (281) drives the seed crystal (29) to rotate, the rotation directions of the seed crystal (29) and the crucible (2311) are opposite, after seeding is finished, growing thin neck, expanding shoulder after the thin neck grows to Chinese imperial, meanwhile, the rotation speed is reduced to 8 plus or minus 4rpm along with the increasing of the diameter of the shoulder expanding, in addition, the rotation speed of the seed crystal (29) is slowly reduced to 1 plus or minus 0.5rpm, in order to prevent high-voltage ionization, nitrogen is filled into the argon protective atmosphere in a certain proportion, and the doping proportion of the nitrogen is 0.01-5% of that of the argon;
step four: when the single crystal is pulled to the tail part, ending is carried out, the crucible (2311) continues to rotate and move downwards, the fifth motor (272) drives the seed crystal shaft (281) to ascend, and the seed crystal (29) changes to rotate and move upwards;
step five: after production is finished, the second motor (234), the fourth motor (262) and the fifth motor (272) are stopped, argon is filled to normal pressure, the argon is closed, the third telescopic rod (221) drives the guide block (223) to retreat to loosen the seed shaft (281), the fifth motor (272) drives the seed shaft (281) to ascend to lift the silicon crystal bar into the auxiliary chamber (25), the rotating ring (243) is rotated to open the clamping column (242) and the clamping groove (244), the first telescopic rod (13) starts to ascend the auxiliary chamber (25), and the first motor (157) drives the auxiliary chamber (25) to slowly rotate to the side face;
step six: a fifth motor (272) drives a seed shaft (281) to descend, the seed shaft (281) drives a silicon crystal bar to descend, when the silicon crystal bar completely extends out of the auxiliary chamber (25), the silicon crystal bar stops, a first air cylinder (42) drives an air claw (45) and a tail support assembly (5) to ascend, the air claw (45) drives a first clamping block (46) to clamp the silicon crystal bar, a fourth air cylinder (55) pushes a support block (56) to ascend to contact the tail portion of the silicon crystal bar, the tail portion of the silicon crystal bar enters a groove (561), a second air cylinder (52) pushes a third air cylinder (53) to ascend to a specified height, the third air cylinder (53) drives a clamping jaw (532) to clamp the silicon crystal bar, a nut (283) is rotated to loosen a clamped seed crystal (29), the first air cylinder (42) drives the silicon crystal bar to descend, a rotating air cylinder (43) drives the silicon crystal bar to rotate 90 degrees, and subsequent.
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| CN114232073A (en) * | 2021-12-18 | 2022-03-25 | 中山市汇创精密科技有限公司 | Crystal taking device applicable to long-size silicon crystal bar |
| CN114277440A (en) * | 2021-11-23 | 2022-04-05 | 浙江晶盛机电股份有限公司 | Clamp, crystal bar grabbing device and single crystal furnace |
| WO2024045994A1 (en) * | 2022-08-31 | 2024-03-07 | Tcl Zhonghuan Renewable Energy Technology Co., Ltd. | Process of automatic crystal bar collection |
| CN117966255A (en) * | 2024-04-01 | 2024-05-03 | 浙江晶盛机电股份有限公司 | Seed crystal system capable of eliminating resonance |
| CN117966255B (en) * | 2024-04-01 | 2024-06-25 | 浙江晶盛机电股份有限公司 | Seed crystal system capable of eliminating resonance |
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