CN117966255A - Seed crystal system capable of eliminating resonance - Google Patents
Seed crystal system capable of eliminating resonance Download PDFInfo
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- CN117966255A CN117966255A CN202410381619.5A CN202410381619A CN117966255A CN 117966255 A CN117966255 A CN 117966255A CN 202410381619 A CN202410381619 A CN 202410381619A CN 117966255 A CN117966255 A CN 117966255A
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- 239000013078 crystal Substances 0.000 title claims abstract description 88
- 230000005540 biological transmission Effects 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims description 137
- 230000005484 gravity Effects 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000001105 regulatory effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Abstract
The application discloses a seed crystal system for pulling a rotary crystal bar, which comprises: the rotary base body, the revolving platform, offset portion and drive assembly, the revolving platform activity sets up on the rotary base body, and the revolving platform is connected with a flexible axle that is used for carrying the crystal bar, drive flexible axle circumference rotation through the revolving platform, offset portion activity sets up on the rotary base body, and offset portion and the focus of revolving platform all are located the axial central line of flexible axle, drive assembly is configured to be connected with revolving platform and offset portion transmission respectively, drive assembly is used for driving the revolving platform and rotates along first circumference, drive assembly still is used for driving offset portion and rotates along the second circumference, wherein, first circumference and second circumference are opposite. Through the arrangement, the seed crystal system is prevented from generating resonance when the rotating speed reaches the resonance rotating speed or the sub-resonance interval of the crystal bar, the stable operation of equipment is ensured, and the production risk is reduced.
Description
Technical Field
The application relates to the field of semiconductor growth, in particular to a seed crystal system capable of eliminating resonance.
Background
The monocrystalline silicon rods in the photovoltaic and semiconductor fields are drawn by a monocrystalline furnace, in order to ensure the shape and size requirements of the crystal rods, the crystal rods need to be pulled to rotate, the seed crystal system is driven by the seed crystal system, the seed crystal system is pulled in a flexible shaft wire winding wheel mode, but the flexible shaft system has the defects of being excessively sensitive to external interference, and due to the eccentricity of the flexible shaft and a rotating shaft, when the crystal rods rotate to reach the resonance frequency or sub-resonance of the flexible shaft system, the seed crystal system and related equipment can generate resonance phenomena, thereby influencing crystallization and causing safety accidents more seriously.
Because the rotation of the crystal bar is limited by the resonance rotation speed, no attempt is made to pull the crystal at the rotation speed in the resonance interval, or crystal shaking is generated during pulling the crystal by using the rotation speed in the resonance interval, so that the quality of the product is affected and the production safety risk is even increased.
Disclosure of Invention
In order to solve the defects in the prior art, the invention aims to provide a seed crystal system capable of eliminating resonance.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The utility model provides a seed crystal system for carry and draw back crystal bar, this seed crystal system includes rotatory base member, the revolving platform, offset portion and drive assembly, the revolving platform activity sets up on rotatory base member, and the revolving platform is connected with a flexible axle that is used for carrying and draw the crystal bar, drive flexible axle circumference rotation through the revolving platform, offset portion activity sets up on rotatory base member, and offset the center of gravity of portion and revolving platform all is located the axial central line of flexible axle, drive assembly is configured to be connected with revolving platform and offset portion transmission respectively, drive assembly is used for driving the revolving platform and rotates along first circumference, drive assembly still is used for driving offset portion and rotates along the second circumference, wherein, first circumference and second circumference are opposite.
Further, the counteracting portion is configured to be rotatably connected with the rotating base body through a first bearing assembly, the first bearing assembly is sleeved between the counteracting portion and the rotating base body, and the first bearing assembly limits the counteracting portion in the vertical direction.
Further, the rotary table is at least partially penetrated in the counteracting part, the rotary table is configured to be rotationally connected with the counteracting part through the second bearing assembly, the second bearing assembly is sleeved between the rotary table and the counteracting part, and the second bearing assembly is also used for limiting the rotary table in the vertical direction.
Further, the rotary base body includes a support table and a mounting bracket fixedly mounted on the support table, the canceling portion is rotatably connected with the mounting bracket through a first bearing assembly, and the mounting bracket is further configured to fix the driving assembly.
Further, the counteracting part comprises a first rotating mechanism and a second rotating mechanism, the first rotating mechanism and the second rotating mechanism are kept relatively fixed, the first rotating mechanism is rotationally connected with the mounting bracket through a first bearing assembly, and the first rotating mechanism is configured to be in transmission connection with the driving assembly so as to drive the second rotating mechanism to rotate relative to the rotary table through the first rotating mechanism.
Further, the second rotating mechanism is rotatably connected with the turntable through the second bearing assembly, and the second rotating mechanism at least partially overlaps with the turntable as viewed from the radial direction of the second bearing assembly.
Further, the seed crystal system further comprises adjusting components, the adjusting components are used for adjusting the eccentric quantity of the offset portion compared with that of the flexible shaft, the number of the adjusting components is at least two, and the at least two adjusting components are distributed in a central symmetry mode relative to the axial center line of the flexible shaft.
Further, the adjusting component comprises an adjusting part and a fixing part, the adjusting part at least partially penetrates through the first rotating mechanism, one end of the adjusting part is propped against the second rotating mechanism, the eccentric position of the second rotating mechanism is adjusted by changing the radial acting force applied by the adjusting part to the second rotating mechanism along the first rotating mechanism, and the fixing part penetrates through the first rotating mechanism and the second rotating mechanism along the vertical direction so as to fix the eccentric position of the second rotating mechanism.
Further, the driving assembly comprises a first gear mechanism, a second gear mechanism and a driving motor, the first gear mechanism is in transmission connection with the rotary table, the second gear mechanism is in transmission connection with the counteracting part, the second gear mechanism is opposite to the first gear mechanism in rotation direction, and the driving motor is used for driving the first gear mechanism and/or the second gear mechanism to rotate.
Further, the outer edges of the rotary table and the counteracting part are respectively provided with a first belt wheel and a second belt wheel, the driving assembly further comprises a first transmission part and a second transmission part, the first belt wheel is in transmission connection with the first gear mechanism through the first transmission part, the second belt wheel is in transmission connection with the second gear mechanism through the second transmission part, the radial lengths of the first belt wheel and the second belt wheel are basically consistent, and the specifications of gears of the first gear mechanism and the second gear mechanism are the same, so that the moment generated by rotation of the rotary table and the counteracting part is the same.
Compared with the prior art, the seed crystal system provided by the invention has the advantages that the rotary table and the counteracting part capable of rotating in the same speed and in the opposite direction are arranged, when the rotary table drives the crystal bar to rotate along the first circumferential direction, the counteracting part rotates along the second circumferential direction so that the rotating speed of the crystal bar avoids the resonance frequency and the sub-resonance interval of the crystal bar, and therefore, the resonance of the seed crystal system and related equipment is eliminated, and the production risk is reduced.
Drawings
FIG. 1 is a schematic diagram of a seed crystal system according to an embodiment of the present application;
FIG. 2 is a cross-sectional view of a seed crystal system in an embodiment of the present application;
FIG. 3 is an exploded view of a seed crystal system according to an embodiment of the present application;
Fig. 4 is an exploded view of the canceling portion in the embodiment of the present application;
FIG. 5 is a top view of a seed crystal system according to an embodiment of the present application;
fig. 6 is a schematic structural diagram of a driving assembly according to an embodiment of the present application.
Detailed Description
In order to make the present application better understood by those skilled in the art, the technical solutions in the specific embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application.
In the description of the present application, if a certain part has a central axis or a hollow chamber, the "inside" of the part means that the part is located on the side of the central axis of the part or is disposed inside the hollow chamber; the "outside" of the part refers to the side of the part that is remote from the central axis of the part.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The terms "first," "second," "third," "fourth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "first", "second", "third", and "fourth" may explicitly or implicitly include at least one such feature. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
The single crystal furnace equipment melts high purity polysilicon raw material in a quartz crucible in a graphite heating mode, and under the protection of continuous low pressure argon, silicon crystals are gradually crystallized into a crystal bar on a fine seed crystal at proper temperature and growth speed. The flexible shaft for pulling the crystal bar is easily interfered by external factors, and in the process of pulling and rotating the existing crystal bar, due to the eccentricity of the flexible shaft and the rotating shaft, when the crystal bar rotates to reach the resonance frequency or sub-resonance of the seed crystal system, the seed crystal system and related equipment can generate resonance phenomenon.
The application provides a seed crystal system 100 capable of eliminating resonance, which is shown in fig. 1, and is used for pulling and driving a crystal bar to rotate, wherein the seed crystal system 100 comprises a rotary base body 11, a rotary table 12, a counteracting part 13 and a driving assembly 14, and the rotary base body 11 forms a main body frame of the seed crystal system 100 and is used for supporting the rotary table 12, the counteracting part 13 and the driving assembly 14. The turntable 12 is used as a rotatable component, the turntable 12 is movably arranged on the rotary base body 11, a flexible shaft 15 for pulling the crystal bar is connected below the turntable 12, and the flexible shaft 15 is fixedly connected with the turntable 12. When the rotary table 12 rotates, the rotary table 12 drives the crystal bar to circumferentially rotate through the flexible shaft 15. The counteracting part 13 is movably arranged on the rotary base 11, and the gravity centers of the counteracting part 13 and the rotary table 12 are both positioned on the axial center line of the flexible shaft 15. The driving assembly 14 is configured to be in driving connection with the turntable 12 and the counteracting part 13, respectively, the driving assembly 14 is used for driving the turntable 12 to rotate along a first circumferential direction, and the driving assembly 14 is also used for driving the counteracting part 13 to rotate along a second circumferential direction, wherein the first circumferential direction and the second circumferential direction are directions around the axial center line of the flexible shaft 15, and the first circumferential direction and the second circumferential direction are opposite. In order to clearly illustrate the technical solution of the present application, up-down, left-right, and front-rear directions as shown in fig. 1 are also provided as up-down, left-right, and front-rear directions of the seed crystal system 100. The vertical direction hereinafter refers to the up-down direction of the seed crystal system 100.
As shown in fig. 2, as one implementation, the seed crystal system 100 includes a first bearing assembly 16 mounted on the rotating base 11, and the counteracting portion 13 is configured to be rotatably connected to the rotating base 11 by the first bearing assembly 16, where the first bearing assembly 16 is sleeved between the rotating base 11 and the counteracting portion 13.
Specifically, the outer edge of the first bearing assembly 16 is connected to the rotary base 11, the inner edge of the first bearing assembly 16 is connected to the canceling portion 13, the canceling portion 13 is supported in the vertical direction by the cooperation of the rotary base 11 and the first bearing assembly 16, and the canceling portion 13 is restrained in the vertical direction so that the canceling portion 13 can rotate about the axial center line of the flexible shaft 15.
Illustratively, the first bearing assembly 16 may be connected to the rotating base 11 and the counter portion 13, respectively, by interference.
Further, the turntable 12 is at least partially disposed through the counteracting portion 13, and the seed crystal system 100 further includes a second bearing assembly 17 disposed on the counteracting portion 13, wherein the turntable 12 is configured to be rotatably connected to the counteracting portion 13 through the second bearing assembly 17, and the second bearing assembly 17 is disposed between the counteracting portion 13 and the turntable 12.
More specifically, the outer edge of the second bearing assembly 17 is connected to the canceling portion 13, the inner edge of the second bearing assembly 17 is connected to the turntable 12, and the turntable 12 is supported in the vertical direction by the cooperation of the canceling portion 13 and the second bearing assembly 17 and is restrained in the vertical direction to allow the turntable 12 to rotate about the axial center line of the flexible shaft 15.
Illustratively, the second bearing assembly 17 may be connected to the counter 13 and the turntable 12, respectively, by interference.
Through the arrangement, the counteracting part 13 and the rotary table 12 can rotate relatively in opposite directions, and the counteracting part 13 rotating in opposite directions can avoid the resonance frequency and the sub-resonance interval of the rotation speed of the crystal bar, so as to eliminate the resonance generated by the seed crystal system 100 and related equipment when the crystal bar rotates.
As shown in fig. 2, as an implementation, the rotary base 11 includes a support base 111 and a mounting bracket 112 fixedly mounted on the support base 111, and the support base 111 is mainly used for supporting the mounting bracket 112, the turntable 12 and the canceling portion 13, and the structure and shape of the support base 111 are not particularly limited. The driving assembly 14 is at least partially disposed on the mounting bracket 112, and is relatively fixed to the support table 111 by the mounting bracket 112.
As shown in fig. 3, in particular, the mounting bracket 112 extends at least partially in a vertical direction and forms a mounting slot 1121 that can receive the first bearing assembly 16. When the first bearing assembly 16 is mounted in the mounting groove 1121, the axis of the first bearing assembly 16 substantially coincides with the axial center line of the flexible shaft 15, thereby improving the stability of the canceling portion 13 during rotation.
Further, the mounting bracket 112 also extends at least partially along the radial direction of the flexible shaft 15, and forms an extension 1122 for mounting the driving assembly 14, and the driving assembly 14 is mounted on the extension 1122 of the mounting bracket 112, so that the driving assembly 14 avoids the counteracting portion 13 and/or the turntable 12.
As shown in fig. 3 and 4, as an implementation manner, the counteracting portion 13 includes a first rotating mechanism 131 and a second rotating mechanism 132, where the first rotating mechanism 131 and the second rotating mechanism 132 are relatively fixed, and the first rotating mechanism 131 is configured to be in driving connection with the driving assembly 14, so that the first rotating mechanism 131 drives the second rotating mechanism 132 to rotate relative to the turntable 12.
Specifically, the first rotating mechanism 131 is disposed below the second rotating mechanism 132, one end of the first rotating mechanism 131 facing away from the second rotating mechanism 132 is disposed in the first bearing assembly 16 in a penetrating manner, and the other end of the first rotating mechanism 131 is detachably connected to the second rotating mechanism 132.
It should be noted that, in the seed crystal system 100 of the present application, the counteracting portion 13 capable of rotating relative to the turntable 12 is provided, so that when the turntable 12 drives the ingot to rotate, resonance generated by the seed crystal system 100 and related equipment due to rotation of the ingot is eliminated by the counteracting portion 13 opposite to the rotation direction of the turntable 12. Therefore, whether the center of gravity of the canceling portion 13 and the turntable 12 is located on the axial center line of the flexible shaft 15 directly affects the effect of canceling resonance, and the position of the center of gravity of the canceling portion 13 and/or the turntable 12 is adjusted by the canceling portion 13 composed of the detachable first rotating mechanism 131 and the detachable second rotating mechanism 132.
Optionally, one end of the first rotating mechanism 131, which is away from the second rotating mechanism 132, is disposed in the first bearing assembly 16 in a penetrating manner, the first rotating mechanism 131 and the second rotating mechanism 132 are integrally formed, and even the counteracting portion 13 formed by the first rotating mechanism 131 and the second rotating mechanism 132 can be used as a part of the components in the rotating base 11, so that the overall structure of the seed crystal system 100 is more compact, and the requirement of the light weight of the seed crystal system 100 is met.
Further, the second rotating mechanism 132 is rotatably connected to the turntable 12 through the second bearing assembly 17, and the second rotating mechanism 132 at least partially overlaps the turntable 12 as viewed from the radial direction of the second bearing assembly 17.
Illustratively, the second bearing assembly 17 includes at least two bearings arranged in a vertical direction. In an example of the application, the second bearing assembly 17 may be a ball bearing. The turntable 12 is penetrated in the two bearings along the vertical direction, and the turntable 12 is limited in the radial direction through the two bearings, so that the turntable 12 has better stability when rotating.
In some examples, the second bearing assembly 17 may also be a needle bearing such that the turntable 12 passes through the needle bearing in a vertical direction, thereby increasing the contact area of the turntable 12 with the second bearing assembly 17.
As shown in fig. 4, as an implementation manner, the seed crystal system 100 further includes an adjusting component 18, where the adjusting component 18 is installed on the counteracting portion 13 and is used to adjust the eccentric amount of the counteracting portion 13 compared to the flexible shaft 15, so as to improve the working stability of the device.
It should be noted that the eccentricity refers to a case where the center of the rotor of the apparatus is not aligned with the center of the stator (or the other rotor), and the eccentricity may have a significant influence on the performance of the apparatus, and if not solved, may cause problems such as increased vibration, reduced efficiency, and even malfunction of the apparatus.
In the example of the present application, a longitudinal line is defined, the extension direction of which is substantially parallel to the vertical direction, and when the axial center line of the flexible shaft 15 forms an included angle with the longitudinal line, the eccentric amount of the flexible shaft 15 is β. The included angle between the axial center line of the counteracting part 13 and the longitudinal straight line is adjusted by the adjusting component 18, so that the axial center line of the counteracting part 13 and the longitudinal straight line form an included angle with the size of-beta, and the eccentric amount of the counteracting part 13 is-beta. Thereby avoiding resonance of the seed crystal system 100 and its associated equipment due to rotation of the ingot.
Specifically, the number of the adjusting assemblies 18 is at least two, and the at least two adjusting assemblies 18 are distributed in a central symmetry manner with respect to the axial center line of the flexible shaft 15.
In the example of the present application, the number of the regulating members 18 is set to four, and the four regulating members 18 are distributed in the front-rear, left-right directions of the canceling portion 13, thereby increasing the accuracy of the adjustment of the eccentric amount of the canceling portion 13.
As shown in fig. 4, as an alternative implementation, the adjusting assembly 18 includes an adjusting member 181 and a fixing member 182, where the adjusting member 181 is used to adjust the eccentric position of the second rotating mechanism 132, and the fixing member 182 is used to maintain the eccentric position of the second rotating mechanism 132.
Specifically, the adjusting member 181 is at least partially disposed through the first rotating mechanism 131, and one end of the adjusting member 181 abuts against the second rotating mechanism 132. When the eccentric amount of the flexible shaft 15 is greater than 0, the eccentric amount of the second rotating mechanism 132 is adjusted by changing the force applied to the second rotating mechanism 132 by the adjusting member 181. Since the second rotation mechanism 132 and the first rotation mechanism 131 are kept relatively fixed, when the amount of eccentricity of the second rotation mechanism 132 is changed, the amount of eccentricity of the canceling portion 13 composed of the first rotation mechanism 131 and the second rotation mechanism 132 is changed.
Further, the fixing member 182 is disposed through the first rotation mechanism 131 and the second rotation mechanism 132 along the vertical direction, so that the first rotation mechanism 131 and the second rotation mechanism 132 remain relatively fixed. When the eccentric position of the second rotating mechanism 132 is changed, the second rotating mechanism 132 is fixed on the first rotating mechanism 131 by the fixing member 182, thereby preventing the second rotating mechanism 132 from deviating from the eccentric position due to loosening of the regulating member 181.
In some examples, the second rotating mechanism 132 is provided with a plurality of positioning holes (not shown), and the fixing member 182 selects the corresponding positioning holes according to the eccentric position of the second rotating mechanism 132, so as to fix the first rotating mechanism 131 and the second rotating mechanism 132. The fixing mode is more flexible, the stress of the components after being connected is smaller, and the service life of the components in the counteracting part 13 is prolonged.
As shown in fig. 5 and 6, as one implementation, the driving assembly 14 includes a first gear mechanism 141, a second gear mechanism 142, and a driving motor 143, the first gear mechanism 141 being configured to be in driving connection with the turntable 12 through a first transmission member 144, and the second gear mechanism 142 being configured to be in driving connection with the canceling portion 13 through a second transmission member 145. When the first gear mechanism 141 and the second gear mechanism 142 rotate, the turntable 12 and the counteracting part 13 can rotate in opposite directions under the driving of the first transmission member 144 and the second transmission member 145, respectively.
Specifically, the first gear mechanism 141 includes at least one gear, the second gear mechanism 142 also includes at least one gear, the gears of the first gear mechanism 141 are meshed with the gears of the second gear mechanism 142, and the driving motor 143 drives the meshed other gear mechanism to rotate by driving any one gear mechanism, so that the number of the driving motors 143 is reduced, and thus the equipment cost is reduced.
As shown in fig. 6, in the example of the present application, the outer edge of the turntable 12 is provided with a first pulley for mounting the first transmission member 144, the outer edge of the canceling portion 13 is provided with a second pulley for mounting the second transmission member 145, wherein the radial lengths of the first pulley and the second pulley are substantially identical, and the gears of the first gear mechanism 141 and the gears of the second gear mechanism 142 are identical in specification, that is, the gears of the first gear mechanism 141 and the gears of the second gear mechanism 142 are identical in radial length and the number of teeth are identical. When the driving motor 143 drives any one of the gear mechanisms, the rotation speeds of the two gear mechanisms are ensured to be the same, and the directions are opposite, so that the moment generated by the rotation of the turntable 12 and the offset part 13 is the same.
Specifically, the first gear mechanism 141 includes a first gear and a first fixing portion, where the first gear and the first fixing portion are coaxially disposed, the first fixing portion is configured to be connected to the first transmission assembly, and the first fixing portion is further used for limiting the first transmission assembly. The second gear mechanism 142 includes a second gear and a second fixed portion, the second gear and the second fixed portion are coaxially disposed, the second fixed portion is configured to be connected with the second transmission assembly, and the second fixed portion is further configured to limit the second transmission assembly.
In the embodiment of the application, a gear set formed by meshing a first gear and a second gear is provided, and a first fixing part and a second fixing part are respectively arranged at the upper side and the lower side of the gear set, so that interference between a first transmission member 144 and a second transmission member 145 in the transmission process is avoided.
In the above arrangement, the mode of driving the first gear mechanism 141 and the second gear mechanism 142 simultaneously by one driving motor 143 ensures that the rotation speeds of the two gear mechanisms are the same, and when the rotation directions are opposite, a complex logic control circuit is not needed, so that the overall cost and the operation difficulty of the equipment are reduced.
As another alternative implementation, the drive motor 143 includes a first motor configured to be in driving connection with the first gear mechanism 141 and a second motor configured to be in driving connection with the second gear mechanism 142.
Specifically, since the first gear mechanism 141 and the second gear mechanism 142 each have an independent power source, the sizes and the number of teeth of the first gear mechanism 141 and the second gear mechanism 142 may be set to be the same or different, and the rotational speeds of the first gear mechanism 141 and the second gear mechanism 142 are the same and the rotational directions are opposite by logic control of the first motor and the second motor, thereby flexibly adjusting the resonance frequency or the sub-resonance frequency of the seed crystal system 100.
In other examples, the first pulley in the above-described embodiment is replaced by providing a ring gear engaged with the first gear mechanism 141 at the outer edge of the turntable 12, and the second pulley in the above-described embodiment is replaced by providing a ring gear engaged with the second gear mechanism 142 at the outer edge of the canceling portion 13. The first gear mechanism 141 drives the intermeshed rotary table 12 to rotate along the first circumferential direction, and the second gear mechanism 142 drives the intermeshed counteracting part 13 to rotate along the second circumferential direction. By the arrangement, the kinetic energy loss in the transmission process is reduced, the transmission efficiency is improved, and the structural compactness of the seed crystal system 100 is higher.
In summary, the present application provides a seed crystal system 100 capable of eliminating resonance, which eliminates resonance generated by the seed crystal system 100 and related equipment during the production process of a crystal bar by providing a counteracting part 13 and a turntable 12 capable of rotating relatively, thereby improving the crystallization quality of the crystal bar, ensuring the stability of the equipment and reducing the production risk.
It will be understood that modifications and variations will be apparent to those skilled in the art from the foregoing description, and it is intended that all such modifications and variations be included within the scope of the following claims.
Claims (10)
1. A resonance-eliminating seed crystal system for pulling a rotary ingot, comprising:
rotating the substrate;
The rotary table is movably arranged on the rotary substrate, is connected with a flexible shaft for lifting the crystal bar, and drives the flexible shaft to circumferentially rotate through the rotary table;
the counteracting part is movably arranged on the rotary base body, and the gravity centers of the counteracting part and the rotary table are both positioned on the axial center line of the flexible shaft;
The driving assembly is configured to be in transmission connection with the rotary table and the counteracting part respectively, the driving assembly is used for driving the rotary table to rotate along a first circumferential direction, and the driving assembly is also used for driving the counteracting part to rotate along a second circumferential direction, wherein the first circumferential direction is opposite to the second circumferential direction.
2. The seed crystal system of claim 1, wherein the seed crystal system comprises,
The counteracting part is configured to be rotationally connected with the rotating base body through a first bearing assembly, the first bearing assembly is sleeved between the counteracting part and the rotating base body, and the first bearing assembly limits the counteracting part in the vertical direction.
3. The seed crystal system of claim 2, wherein the seed crystal system comprises,
The rotary table is at least partially arranged in the counteracting part in a penetrating way, the rotary table is configured to be in rotary connection with the counteracting part through a second bearing assembly, the second bearing assembly is sleeved between the rotary table and the counteracting part, and the second bearing assembly is further used for limiting the rotary table in the vertical direction.
4. A seed crystal system as claimed in claim 3, wherein,
The rotary base body comprises a supporting table and a mounting bracket fixedly arranged on the supporting table, the counteracting part is rotationally connected with the mounting bracket through the first bearing assembly, and the mounting bracket is further used for fixing the driving assembly.
5. The seed crystal system of claim 4, wherein the seed crystal system comprises,
The offset part comprises a first rotating mechanism and a second rotating mechanism, the first rotating mechanism and the second rotating mechanism are kept relatively fixed, the first rotating mechanism is rotationally connected with the mounting bracket through the first bearing assembly, and the first rotating mechanism is configured to be in transmission connection with the driving assembly so as to drive the second rotating mechanism to rotate relative to the rotary table through the first rotating mechanism.
6. The seed crystal system of claim 5, wherein the seed crystal system comprises,
The second rotating mechanism is rotatably connected with the rotary table through the second bearing assembly, and at least partially overlaps with the rotary table when viewed from the radial direction of the second bearing assembly.
7. The seed crystal system of claim 5, wherein the seed crystal system comprises,
The seed crystal system further comprises adjusting components, wherein the adjusting components are used for adjusting the eccentric quantity of the offset part compared with that of the flexible shaft, the number of the adjusting components is at least two, and the at least two adjusting components are distributed in a central symmetry mode relative to the axial center line of the flexible shaft.
8. The seed crystal system of claim 7, wherein the seed crystal system comprises,
The adjusting component comprises an adjusting part and a fixing part, wherein the adjusting part at least partially penetrates through the first rotating mechanism, one end of the adjusting part is propped against the second rotating mechanism, the eccentric position of the second rotating mechanism is adjusted by changing the acting force applied by the adjusting part to the second rotating mechanism, and the fixing part penetrates through the first rotating mechanism and the second rotating mechanism along the vertical direction so as to fix the eccentric position of the second rotating mechanism.
9. The seed crystal system of claim 1, wherein the seed crystal system comprises,
The drive assembly includes:
a first gear mechanism configured to be in driving connection with the turntable;
A second gear mechanism configured to be in driving connection with the canceling portion, the second gear mechanism being opposite in rotational direction to the first gear mechanism;
And the driving motor is used for driving the first gear mechanism and/or the second gear mechanism to rotate.
10. The seed crystal system of claim 9, wherein the seed crystal system comprises,
The outer fringe of revolving platform with offset portion is equipped with first band pulley and second band pulley respectively, drive assembly still includes first driving medium and second driving medium, first band pulley passes through first driving medium with first gear mechanism transmission is connected, the second band pulley passes through the second driving medium with second gear mechanism transmission is connected, first band pulley with the radial length of second band pulley is unanimous basically, just first gear mechanism's gear with the specification of second gear mechanism's gear is the same, so that revolving platform with offset the moment that the rotation of portion produced is the same.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202410381619.5A CN117966255A (en) | 2024-04-01 | 2024-04-01 | Seed crystal system capable of eliminating resonance |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410381619.5A CN117966255A (en) | 2024-04-01 | 2024-04-01 | Seed crystal system capable of eliminating resonance |
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| CN117966255A true CN117966255A (en) | 2024-05-03 |
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| CN202410381619.5A Pending CN117966255A (en) | 2024-04-01 | 2024-04-01 | Seed crystal system capable of eliminating resonance |
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