CN113049144A - Heat insulation cavity for temperature measurement system to perform full-system-width low-temperature comprehensive calibration equipment - Google Patents
Heat insulation cavity for temperature measurement system to perform full-system-width low-temperature comprehensive calibration equipment Download PDFInfo
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- CN113049144A CN113049144A CN202110331756.4A CN202110331756A CN113049144A CN 113049144 A CN113049144 A CN 113049144A CN 202110331756 A CN202110331756 A CN 202110331756A CN 113049144 A CN113049144 A CN 113049144A
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- 238000009529 body temperature measurement Methods 0.000 title claims abstract description 42
- 238000009413 insulation Methods 0.000 title abstract description 21
- 238000007789 sealing Methods 0.000 claims abstract description 115
- 239000001307 helium Substances 0.000 claims abstract description 35
- 229910052734 helium Inorganic materials 0.000 claims abstract description 35
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000010935 stainless steel Substances 0.000 claims description 50
- 229910001220 stainless steel Inorganic materials 0.000 claims description 50
- 238000001816 cooling Methods 0.000 claims description 36
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 28
- 239000007789 gas Substances 0.000 claims description 21
- 229910052697 platinum Inorganic materials 0.000 claims description 14
- -1 polytetrafluoroethylene Polymers 0.000 claims description 12
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 12
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 12
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 23
- 229910052802 copper Inorganic materials 0.000 abstract description 23
- 239000010949 copper Substances 0.000 abstract description 23
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
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- 238000009434 installation Methods 0.000 description 9
- 238000005057 refrigeration Methods 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
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- 239000007769 metal material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910000619 316 stainless steel Inorganic materials 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
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- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
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Abstract
The invention provides a heat insulation cavity of a device for carrying out total system width low-temperature comprehensive calibration on a temperature measurement system. In the calibration process, the temperature sensor with the cable passes through the sealing seat and then is arranged in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and the inner layer is filled with helium. After the temperature calibration system is ready, temperature control of the refrigerator and the heater calibration cavity is implemented according to a calibration flow under the control of the measurement and control cabinet, and after a calibration target temperature value is reached, the temperature measurement system collects a current or voltage value of a calibration temperature point. And (4) performing calibration curve fitting after all calibration points in the process are finished to obtain a calibration curve in the measurement range of the temperature measurement system.
Description
Technical Field
The invention relates to the field of temperature measurement system calibration, in particular to a heat insulation cavity of a full-system-width low-temperature comprehensive calibration device for a temperature measurement system.
Background
In the process of temperature measurement, a method for calibrating a temperature sensor is generally adopted to ensure the temperature measurement accuracy. However, in the actual temperature measurement process, measurement errors come from various links such as a temperature sensor, a measurement line, an amplifier, an acquisition system and the like, so that in a place with a high temperature measurement accuracy requirement (for example, the measurement accuracy of a low-temperature wind tunnel in a temperature range from 77K to 323K needs to reach 0.1K), the temperature sensor is only calibrated, and the temperature measurement accuracy requirement is difficult to meet, and the whole temperature measurement system needs to be calibrated.
In addition, in the process of an actual temperature calibration system, the temperature change process is slow, in order to improve the test efficiency, a plurality of temperature measurement points need to be calibrated at one time, each measurement point can only be calibrated independently by a method for calibrating each temperature sensor in the prior art, and dozens of days or even months are needed for calibrating a temperature measurement system with more measurement points (for example, a low-temperature wind tunnel system has hundreds of temperature measurement points).
If a plurality of sensors are calibrated at one time, the uniformity of the temperature field is reduced due to the increase of the volume of the calibration cavity of the temperature sensor, and the precision of the calibration equipment cannot meet the calibration requirement of the temperature measurement system.
Because the temperature sensor is calibrated in the prior art, and after each link such as a measurement line, an amplifier, an acquisition system and the like is additionally arranged in practical use, the numerical precision of the finally obtained measurement temperature has obvious errors, a device capable of integrally calibrating the multi-channel low-temperature measurement system is urgently needed to eliminate the measurement errors caused by each link such as the measurement line, the amplifier, the acquisition system and the like, and the calibration efficiency and the calibration precision are improved.
Disclosure of Invention
The invention aims to provide a heat insulation cavity of a device for carrying out full-system-width low-temperature comprehensive calibration on a temperature measurement system, aiming at the defects in the prior art, the scheme can calibrate the whole multichannel temperature measurement system, solves the problem that the whole measurement system cannot be calibrated only by calibrating a temperature sensor in the prior art, and can calibrate the temperature sensor measurement system with 45 measuring points to the maximum extent, thereby greatly improving the calibration efficiency.
The scheme is realized by the following technical measures:
a heat insulation cavity of a device for carrying out full-system-width low-temperature comprehensive calibration on a temperature measurement system comprises an external cylinder, a middle cylinder and an internal cylinder; the inner cylinder is arranged inside the middle cylinder; the middle cylinder body is arranged inside the outer cylinder body; sealing flanges with openings at the tops are arranged at the tops of the inner cylinder, the middle cylinder and the outer cylinder; the opening at the top of the sealing flange at the top of the inner cylinder body is in sealing connection with the opening of the sealing flange at the top of the middle cylinder body through a telescopic corrugated pipe; the opening of the middle cylinder top sealing flange is connected with the opening of the outer cylinder top sealing flange in a sealing way through a stainless steel guide pipe; a sealed lead wire cover is arranged above the opening of the sealing flange at the top of the external cylinder; a helium gas filling pipe and a helium gas exhaust pipe are arranged on the side surface of the lead cover; an auxiliary cooling sleeve is sleeved on the outer wall of the stainless steel guide pipe; the auxiliary cooling sleeve penetrates through a sealing flange at the top of the external cylinder body through an auxiliary cooling sleeve interface to be connected with the precooling device; the bottom of the middle cylinder is provided with a cold quantity distributor; the bottom of the inner cylinder body is directly connected with the cold energy distributor; the bottom of the external cylinder is provided with an external cylinder bottom sealing flange; the cold quantity distributor is connected with a refrigerating machine refrigerating head penetrating through a sealing flange at the bottom of the external cylinder; the bottom of inside barrel is provided with the sensor mount pad.
The scheme is preferably as follows: an auxiliary connecting rod through hole is formed in the sealing flange at the top of the middle cylinder body; an auxiliary connecting rod threaded hole is formed in the sealing flange at the top of the inner cylinder; the auxiliary connecting rod can penetrate through the auxiliary connecting rod through hole to be connected with the auxiliary connecting rod threaded hole; the auxiliary connecting rod is provided with a stress nut.
The scheme is preferably as follows: the heater is arranged on the outer wall of the inner cylinder; a heater is arranged between the bottom of the inner cylinder and the bottom of the middle cylinder; the heater can be connected to a temperature control device.
The scheme is preferably as follows: platinum resistance thermometers are arranged at a plurality of positions in the sensor mounting seat; the platinum resistance thermometer is connected with the temperature control device.
The scheme is preferably as follows: the side wall of the outer cylinder body is double-layer; a vacuumizing tube KF joint is arranged on the side wall of the outer cylinder; the sealing flange at the bottom of the external cylinder body is sealed with the refrigerating head of the refrigerator through an O-shaped ring; an aviation plug for an internal lead to pass through is arranged on the sealing flange at the bottom of the external cylinder.
The scheme is preferably as follows: the top of the lead cover is provided with a lead cable mounting hole and a standard thermometer lead aviation plug; the leading-out cable mounting hole is provided with a leading-out cable sealing element; the leading-out cable sealing element comprises a polytetrafluoroethylene deformation body with a notch, two semicircular hole gaskets, a sealing element seat and a sealing nut; the sealing piece seat is fixed on the corresponding position of a lead-out cable mounting hole of the lead cover, the polytetrafluoroethylene deformation body with the notch and the two semicircular hole gaskets are sequentially sleeved on the lead-out cable and placed into the mounting hole, and then the sealing nut is screwed down to enable the polytetrafluoroethylene deformation body to be in close contact with the outer layer of the cable, so that the sealing of a channel for eliminating gas circulation is realized.
The scheme is preferably as follows: vacuumizing the inner parts of the outer cylinder and the middle cylinder; helium is filled in the inner cylinder.
The scheme is preferably as follows: the sensor mounting seat is of a cylindrical honeycomb structure.
The beneficial effect of this scheme can be known according to the statement to above-mentioned scheme, because in this scheme mesophragma thermal calibration chamber adopts three layer construction, the outer vacuum in middle level is thermal-insulated, and the inlayer is as calibration temperature source, places sensor installation copper seat, realizes that the temperature field is quick even through filling helium. In the calibration process, the temperature sensor with the cable passes through the sealing seat and then is arranged in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and the inner layer is filled with helium. After the temperature calibration system is ready, temperature control of the refrigerator and the heater calibration cavity is implemented according to a calibration flow under the control of the measurement and control cabinet, and after a calibration target temperature value is reached, the temperature measurement system collects a current or voltage value of a calibration temperature point. And (4) performing calibration curve fitting after all calibration points in the process are finished to obtain a calibration curve in the measurement range of the temperature measurement system.
Therefore, compared with the prior art, the invention has outstanding substantive features and remarkable progress, and the beneficial effects of the implementation are also obvious.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic structural view of a sensor mount.
Fig. 3 is a schematic structural view of the inner cylinder.
Fig. 4 is a schematic structural diagram of the middle cylinder.
FIG. 5 is a schematic view of the connection of the middle cylinder top sealing flange to the inner cylinder top sealing flange.
Fig. 6 is a schematic view of the connection of the cold distributor to the inner cylinder.
Fig. 7 is a schematic structural view of the outer cylinder.
Fig. 8 is a schematic structural view of the lead cover.
Fig. 9 is a schematic view of the construction of the outgoing cable seal.
In the figure, 6 is a lead cover, 7 is a lead-out cable sealing element, 8 is an external cylinder top sealing flange, 9 is an external cylinder, 10 is an external cylinder bottom sealing flange, 11 is a stainless steel guide pipe, 12 is an auxiliary cooling sleeve, 13 is an auxiliary cooling sleeve interface, 14 is a middle cylinder top sealing flange, 15 is a middle cylinder, and 16 is an auxiliary connecting rod via hole; 17 is telescopic bellows, 18 is inside barrel top sealing flange, 19 is inside barrel, 20 is cold volume distributor, 21 is refrigerator cooling head, 22 is the helium gas tube, 23 is the helium blast pipe, 24 is evacuation pipe KF connects, 25 is the heater, 26 is auxiliary connecting rod screw hole, 27 is the sensor mount pad, 28 is inside barrel and cold volume distributor connecting screw hole, 30 is interior barrel bottom flange, 32 is the aviation plug, 34 is standard thermometer lead wire aviation plug, 35 is the sensor cable, 36 is seal nut, 37 is the seal seat, 38 is connecting screw, 39 is the polytetrafluoroethylene variant of taking the breach, 40 is the sealing cone, 41 is two semicircle hole gaskets, 42 is the temperature sensor mounting hole, 43 is auxiliary connecting rod, 44 is the stress nut.
Detailed Description
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The heat insulation calibration cavity adopts a three-layer structure, the outer layer of the middle layer is in vacuum heat insulation, the inner layer is used as a calibration temperature source, a sensor mounting copper seat is placed, and the temperature field is rapidly and uniformly distributed by filling helium. In the calibration process, the temperature sensor with the cable passes through the sealing seat and then is arranged in the sensor mounting copper seat in the calibration cavity, then the lead is sealed, the middle and outer layers are vacuumized and insulated, and the inner layer is filled with helium. After the temperature calibration system is ready, temperature control of the refrigerator and the heater calibration cavity is implemented according to a calibration flow under the control of the measurement and control cabinet, and after a calibration target temperature value is reached, the temperature measurement system collects a current or voltage value of a calibration temperature point. And (4) performing calibration curve fitting after all calibration points in the process are finished to obtain a calibration curve in the measurement range of the temperature measurement system.
The main uses of the thermally insulated calibration cavity system are: (1) providing a high-precision temperature source with technical indexes such as accuracy, uniformity, temperature rise and drop rate and the like meeting the calibration requirement for a temperature measurement system; (2) the calibration cavity is subjected to heat insulation protection and measurement system lead sealing, and the uniformity of a temperature field of the calibration cavity is ensured; (3) the temperature rise and drop process control and the temperature fixed point control of the calibration cavity are realized, so that the GM refrigerator and the heater auxiliary equipment are installed in the calibration cavity.
The main body of the thermal insulation calibration cavity system adopts a three-layer structure form: the device comprises an external barrel, a middle barrel and an internal barrel, wherein a lead protection cover is installed at the top of the external barrel, a refrigerator is installed at the bottom of the external barrel, a refrigeration head of the refrigerator is connected with the middle barrel and the internal barrel through a cold quantity distributor, and an auxiliary heater is installed on the internal barrel close to the outer side of the bottom. The middle cylinder and the outer cylinder are connected by a stainless steel thin-wall pipe, an auxiliary cooling sleeve is arranged on the outer side of the stainless steel pipe, and the inner cylinder and the middle cylinder are connected by a flexible corrugated pipe.
The functions of the three layers of cylinders of the heat insulation calibration cavity system are respectively as follows: the external cylinder body is protected in a heat insulation way; the middle cylinder body is protected from radiation heat; the sensor installation copper seat is placed to inside barrel, carries out temperature control, as the calibration source. In order to enhance the heat insulation effect, the outer cylinder body adopts a double-layer structure, and a vacuum environment is arranged between the two layers. In order to reduce heat losses. Before calibration, the middle cylinder body and the inner cylinder body and the middle cylinder body and the outer cylinder body need to be vacuumized to keep a vacuum environment. In thermal-insulated calibration chamber working process, need reduce the difference in temperature of intermediate level and inlayer to reduce the heat transfer volume that carries on through the heat radiation between the two, improve the temperature homogeneity and the stability in inside barrel calibration chamber. The refrigerator adopts a first-stage refrigeration head, in order to reduce the temperature of the middle barrel and the inner barrel at the same part, a cold quantity distributor is designed between the middle barrel and the outer barrel, and the cold quantity distribution is realized through the contact area of the cold quantity distributor and the bottom of the inner barrel and the bottom of the middle barrel.
In the calibration preparation stage of the temperature measurement system, firstly, the top sealing flange of the external cylinder body is loosened, the top sealing flange of the external cylinder body, the top sealing flange of the middle cylinder body and the internal cylinder body are lifted out of a calibration cavity of the thermal insulation calibration cavity system, then, the top sealing flange of the internal cylinder body is loosened, a sensor mounting copper disc is placed into the calibration cavity, then, the temperature sensor and a connecting cable thereof respectively penetrate through a leading-out cable sealing piece on a lead cover, a stainless steel thin-wall pipe between the middle cylinder body and the external cylinder body, and a flexible corrugated pipe between the internal cylinder body and the middle cylinder body, the temperature sensor is mounted in a sensor mounting seat, and then, after the top sealing flange of the internal cylinder body is screwed, the top sealing flange of the external cylinder body. After the sealing flange at the top of the external cylinder body is screwed tightly and sealed, the external cylinder body and the middle cylinder body are vacuumized, helium is filled in the internal cylinder body, and the pressure is higher than the external atmospheric pressure.
After the calibration is started, the measurement and control cabinet controls the refrigerator and the heater according to a preset calibration flow to realize the temperature rise and fall process of the heat insulation calibration cavity, after a calibration temperature point is reached, the measured system is informed to collect electric signals, then the next calibration temperature point control process is started, and after all calibration points are completed, calibration curve fitting is carried out on each measuring point of the measuring system, and the calibration process of the temperature measuring system is completed.
Among the common metal materials, stainless steel, aluminum and copper are materials frequently used in low temperature studies, and the characteristics of the three materials are different. In technical requirements, there are clear requirements on the cooling rate of the cryostat and the temperature uniformity of the temperature sensor mounting seat, so the material must be screened. Through simulation calculation, the influence of the thermal conductivity, specific heat capacity, density and thermal diffusivity of the material and the influence of the weight of the material on the strength and the mobility of the cryostat are fully considered. And through various comparative analysis, the material combination mode is determined to be shown in table 1.
Table 1 table of component material selection
| Name of component | Material | Name of component | Material |
| External cylinder | Stainless steel 316 | Middle barrel top sealing flange | Aluminum 6061 |
| Top sealing flange of external cylinder | Stainless steel 316 | Middle barrel | Aluminum 6061 |
| Lead wire cover | Stainless steel 316 | Internal cylinder top sealing flange | Aluminum 6061 |
| Stainless steel conduit and bellows | Stainless steel 316 | Inner cylinder | Aluminum 6061 |
| Sensor mounting copper seat | Red copper |
The inner cylinder is the most important part of the thermal insulation calibration cavity system, and the sensor mounting copper seat is installed in the cylinder inside the calibration cavity. After the temperature sensor of the calibrated measurement system is installed on the sensor installation copper seat, the leading-out wire of the calibrated measurement system passes through the flexible corrugated pipe and the stainless steel thin-wall pipe and reaches the inside of the lead cover, and then the gap between the lead cover and the cable is sealed through the leading-out cable sealing element and is led out of the calibration cavity.
The inner cylinder is in a thin-wall cylinder shape and is processed by aluminum alloy 6061. The upper part of the inner cylinder body is connected by an aluminum alloy flange and is sealed with the inner cylinder body through indium wires. In order to ensure the sealing performance of the inner cylinder top sealing flange and the inner cylinder in the installation process and avoid installation interference, the inner cylinder top sealing flange is connected with the middle cylinder top sealing flange through a corrugated pipe. Helium is a heat conductor with the best heat conducting property in gas, and in order to ensure the temperature uniformity of the inner cylinder, in the calibration process, helium is firstly filled into the inner cylinder through a helium gas filling pipe under the control of a pressurization system, the pressure of the helium is slightly greater than the atmospheric pressure, and the permeation of external air is avoided.
During actual operation, the cold quantity exchange is carried out between the bottom of the inner cylinder and the cold quantity distributor, and meanwhile, the film heater is arranged on the side face of the bottom of the inner cylinder. The bottom of the inner cylinder body is provided with a mounting hole, the inner cylinder body is connected with the cold energy distributor through a bolt, and the main control heater is placed between the bottom of the inner cylinder body and the cold energy distributor during connection; the cold quantity distributor is connected with the bottom of the middle cylinder and the cold head of the refrigerator through bolts. A sensor mount is disposed within the inner barrel.
The middle cylinder is cylindrical and is processed by aluminum alloy 6061. The upper part of the middle cylinder body is in flange connection, and the top sealing flange of the outer cylinder body is connected with the flange of the middle cylinder body through a stainless steel pipe. The cold quantity distributor is positioned between the bottom of the middle cylinder and the bottom of the inner cylinder, the bottom of the middle cylinder is in direct contact with the cold head of the refrigerator, and the cold quantity distributor and the bottom of the middle cylinder are in threaded connection with the cold head of the refrigerator.
In the use process, the cold quantity of the refrigerating machine mainly reaches the bottom of the inner cylinder body through the bottom of the middle cylinder body and is further transmitted to the installation copper seat of the calibrated sensor, and therefore, the transmission of the controlled cold quantity is vital to the temperature control of the installation seat of the sensor. And a main control heater is arranged between the bottom of the middle barrel and the bottom of the inner barrel.
In consideration of installation requirements, the cold quantity distributor is respectively connected with the inner cylinder body and the middle cylinder body. Firstly, the cold quantity distributor and the middle barrel are connected together, then the main control heater is arranged between the cold quantity distributor and the inner barrel, and then the cold quantity distributor is connected with the inner barrel through bolts.
Because inside barrel is full of the helium, arrange inside barrel sensor installation copper seat in and pass through stainless steel pipe, scalable stainless steel corrugated pipe to the lead wire cover by school temperature sensor connecting cable, sensor wire and helium heat transfer all can lead to inside barrel temperature gradient big, consequently set up supplementary cooling jacket in the stainless steel pipe outside between middle part barrel and outside barrel, carry the constant temperature medium after will cooling to supplementary cooling jacket through the low temperature circulation groove and carry out the circulation flow and cool down. By adopting the auxiliary cooling sleeve, the influence of the leading-out cable on the temperature field of the low-temperature constant-temperature calibration cavity can be reduced, and the auxiliary cooling can be carried out in the cooling process of the calibration equipment so as to meet the requirement of cooling rate.
The outer cylinder top sealing flange is connected with the middle cylinder top stainless steel flange through a stainless steel pipe, the middle cylinder top stainless steel flange is connected with the inner cylinder top stainless steel flange through a flexible and compressible stainless steel corrugated pipe, and the conflict of air-tight sealing of the outer cylinder and the outer cylinder top sealing flange, the inner cylinder and the inner cylinder top stainless steel sealing flange can be solved through a soft and hard connection combination mode. However, when the sensor is calibrated, the sensor needs to be mounted after the sensor mounting copper seat, the inner cylinder, the middle cylinder and the sealing flange at the top of the outer cylinder are separated from the heat insulation calibration cavity system, and then the sensor is placed into the heat insulation calibration cavity system. Because the sensor mounting copper seat and the flange are made of metal materials, the weight of the sensor mounting copper seat exceeds the bearing capacity of the flexible corrugated pipe, and the corrugated pipe can be damaged when the sensor mounting copper seat and the flange bear the weight through the corrugated pipe when the sensor mounting copper seat is taken out. In addition, after the sensor is installed, the air tightness of the connection between the stainless steel sealing flange at the top of the inner cylinder and the inner cylinder needs to be ensured. Therefore, the stress of the corrugated pipe when the flange, the inner cylinder and the like move out of the heat insulation calibration cavity system is avoided in a mode of an auxiliary connecting rod; through processing auxiliary connecting rod via hole on middle part barrel top stainless steel flange, at inside barrel top stainless steel sealing flange processing auxiliary connecting rod screw hole, auxiliary connecting rod passes auxiliary connecting rod via hole, passes through threaded connection with auxiliary connecting rod screw hole, screws up the atress nut on the auxiliary connecting rod.
In the calibration process, in order to ensure the temperature consistency between the middle cylinder and the inner cylinder and prevent the temperature field of the inner cylinder from being uneven due to radiation heat transfer, the cold quantity of the cold head of the refrigerator needs to be distributed. Therefore, a cold quantity distributor which is connected with the bottom of the inner cylinder and the bottom of the middle cylinder at the same time and is provided with a flange is specially designed, and the cold quantity distribution is realized by adjusting the connection areas of the bottom of the inner cylinder and the bottom of the middle cylinder and the cold quantity distributor. The design of cold volume distributor adopts thermal resistance theoretical model, calculates the cold volume of transmitting to inside barrel wall and middle part barrel wall respectively by the refrigerator cold head, realizes the thermal resistance and matches, and the material of cold volume distributor is red copper.
The outer cylinder body adopts a double-layer structure mode and is made of 316 stainless steel. The top sealing flange and the bottom stainless steel sealing flange of the external cylinder are sealed by O-shaped rings, and the flange plate is connected with the external cylinder by a stainless steel clamp. The stainless steel sealing flange at the bottom of the external cylinder body is used for fixing a refrigerating machine refrigerating head, the refrigerating machine refrigerating head and the stainless steel sealing flange are fixed through bolts, and an O-shaped ring is sealed. The side wall of the outer cylinder body is welded with a KF joint for vacuumizing, and the bottom flange is provided with 2 aviation plugs for leading out leads of a heater and a temperature control temperature sensor. And welding a stainless steel lead cover on the upper flange.
And an outgoing cable sealing piece is arranged on the periphery of the lead cover, and the connected lead of the calibrated sensor is sealed by the outgoing cable sealing piece. In addition, in the calibration process, three standard platinum resistance thermometers are used as the standard devices, so that an aviation plug mounting hole is processed in the middle of the sensor mounting cover and is used for leading out three standard platinum resistance thermometer leads. Because the lead wire cover is communicated with the inner cylinder through the stainless steel guide pipe and the stainless steel corrugated pipe, the helium is filled in the inner cylinder through the helium gas filling pipe on the lead wire cover before calibration under the control of the pressure regulating system, the pressure is slightly higher than the atmospheric pressure, and the helium is discharged through the helium gas exhaust pipe after the calibration is finished.
In the calibration process of the temperature measurement system, the cable of the sensor and the sensor are not detachable, and the sealing element for leading out the cable adopts a deformed cone combined sealing mode. Before the calibration was carried out, fixed the sealing member seat to the lead wire cover through connecting screw, the sealing member seat was crossed the line hole, the sealing nut internal diameter is greater than the sensor external diameter, and sensor bandeau cable passes the sealing member seat and crosses line hole and sealing nut, will take the breach polytetrafluoroethylene variant body card to the cable on, put into the sealed hole, then put two half round hole gaskets in sensor cable both sides and polytetrafluoroethylene variant body. And screwing the sealing nut, extruding the deformation body through the pressing mechanism, and enabling the deformation body to be in close contact with the outer layer of the cable, so that a channel for gas circulation is eliminated, and sealing is realized.
The measurement and control cabinet comprises a temperature measurement and control system and a pressure measurement and control system.
The temperature measuring and controlling system mainly comprises a temperature control part and a temperature measuring part. In order to stabilize the temperature of the thermostatic system, a temperature control system must be employed to control the heater output power installed by the calibration system. The temperature controller was selected from Eurotherm 2704 temperature controller manufactured by euro british. When the calibration cavity is used for temperature control, 2 heaters are installed on the outer wall of the inner cylinder body, and 1 heater is installed at the bottom of the cylinder body. A polyimide insulated film heater is used as a heater for temperature control, rated power is respectively 30W, 35W and 250W, and output power of the heater in the operation process is regulated by a Eurotherm 2704 temperature controller. The temperature control sensor for temperature control adopts Pt100 industrial platinum resistors with reliable performance, and each control loop is provided with a Pt100 platinum resistor sensor. In order to accurately measure the temperature distribution of the sensor mounting seat, three standard sleeve platinum resistance thermometers are adopted to measure the temperatures of different positions of the sensor mounting seat, the average value of the three temperatures is used as the temperature of the sensor mounting seat, and the difference value between the maximum value and the minimum value of the 3 standard platinum resistance thermometers is used as the uniform value of the effective temperature field of the mounting seat.
In order to accurately measure the temperature distribution of the sensor mounting seat, three standard sleeve platinum resistance thermometers are adopted to measure the temperatures of different positions of the sensor mounting seat, the average value of the three temperatures is used as the temperature of the sensor mounting seat, and the difference value between the maximum value and the minimum value of the 3 standard platinum resistance thermometers is used as the uniform value of the effective temperature field of the mounting seat. The accuracy rating of a standard thimble platinum resistance thermometer is an equal grade. To measure the uniformity of the mount, 3 standard thimble platinum resistance thermometers were mounted in the thermowells of the sensor mount, respectively.
The pressure measurement and control system comprises a helium pressure control part of a cylinder body in the calibration cavity and a vacuum pressure control part of a cylinder body in the middle of the outside. The helium pressure control part of the internal cylinder has the main functions of: during the working process of the calibration cavity, the pressure of helium in the inner cylinder is maintained to be slightly higher than the atmospheric pressure, so that the external air is prevented from entering the inner cylinder. Because the temperature range of the calibration chamber is 77K-323K, if there are substances in the inner cylinder that may condense in this temperature range, liquid or even solid may appear in the chamber during use, which may affect the normal operation of the calibration tank. The helium pressure control part of the inner cylinder comprises a helium supply system, a helium pressure monitoring and controlling table, a corresponding valve, a corresponding pipe fitting and the like. Helium gas used in the inner cylinder can be used as a gas source, and the pressure of the helium gas in the calibration cavity is controlled through a gas pressure controller.
The main functions of the vacuum pressure control part of the outer middle cylinder body are as follows: before carrying out the sensor calibration at every turn, carry out the evacuation to the outside barrel of calibrating device and middle part barrel, appear liquid condensation when avoiding the temperature to reduce, simultaneously in calibration process, reduce heat or cold volume loss that gaseous heat transfer brought. The vacuum pressure control part comprises a vacuum pump with good performance and a vacuum display device. In order to exhaust the unnecessary gas as far as possible, the ultimate vacuum of the vacuum pump is less than 0.1Pa, and the air exhaust rate is more than or equal to 4L/min. The vacuum system pipeline is made of stainless steel materials, and all valves are high-vacuum baffle valves.
The high vacuum measurement adopts a typical triode type structure ZJ-27 gauge and a noble metal oxide cathode, has the characteristics of oxidation resistance and instantaneous atmospheric impact resistance, has stable performance and long service life, and is suitable for medium and high vacuum measurement. The vacuum gauge adopts 5227B, the vacuum gauge is formed by combining a two-way Pirani resistance vacuum gauge (ZJ-52T) and a one-way hot cathode ionization gauge (ZJ-27), and an ARM system is adopted to carry out nonlinear processing and error correction on measurement data, so that the vacuum gauge has high accuracy and repeatability, quick response, stable and reliable measurement and strong anti-interference capability.
In the integral calibration device of the multi-channel low-temperature measurement system, a G-M refrigerator adopting primary refrigeration provides main cooling capacity required by cooling, and the refrigeration power can still be kept about 200W. The G-M refrigerator generates a large amount of heat in the refrigeration process and needs to be provided with a special water cooling system. The water cooling system of the refrigerator consists of a compressor and a water chiller. The water cooler cools the compressor, and the compressor generates cold.
The water cooling machine mainly requires the following technical indexes:
and (3) control precision: plus or minus 1 ℃;
cooling air volume: 7000m 3/h;
stainless steel water tank capacity: 70L;
flow rate of chilled water: 2.5m 3/h;
standard refrigerating capacity: 12.8 by 10 ethanol; 14.9 KW;
the working range is as follows: the outlet temperature of the chilled water is 5-35 ℃; the difference between the temperature of the inlet and the temperature of the outlet of the chilled water is 2.5-6.5 ℃.
The main technical indexes of the compressor are as follows:
power: 7.7 kW;
cooling water flow rate: 5.7L/min (water temperature < 20 ℃), water supply pressure > 40 psig;
refrigerant: helium gas.
In the integral calibration device of the multi-channel low-temperature measurement system, an auxiliary cooling sleeve is used between the middle barrel and the outer barrel to reduce the temperature of a thin-walled tube led out by a stainless steel cable, so that the loss of cooling capacity is reduced, and the temperature uniformity and stability of the sensor seat are improved. In order to achieve the purpose of cooling, a metering low-temperature tank is selected, absolute ethyl alcohol is used as a constant-temperature medium, the lowest temperature can reach-80 ℃, and low-temperature ethyl alcohol output by the low-temperature constant-temperature tank is conveyed to a cooling jacket through a low-temperature resistant pipe and then returns to the low-temperature tank along a pipeline. In order to reduce the loss of cold energy, a rubber-plastic heat-insulating sponge is selected to wrap the medium conveying pipe, and the temperature of the thermostatic bath changes along with the change of a calibration target temperature value.
The technical indexes are mainly required:
temperature range: -75 ℃ to 20 ℃;
temperature fluctuation: + -0.1 deg.C, and temperature is uniform + -0.01 deg.C (when external circulation is not started);
the small-sized leakage-free magnetic pump can resist the temperature of minus 90 ℃ at the lowest temperature and 180 ℃ at the highest temperature, and the rotating speed is 2800R/min; the inlet and outlet are directly 10 mm;
the maximum power is 3 kW.
The specific calibration operation flow of the whole system is as follows:
the specific operation flow is as follows:
the first step is as follows: temperature sensor for installing calibrated measurement system
Removing the lead cover;
removing the sealing flange at the top of the outer cylinder;
removing the sealing flange at the top of the middle cylinder;
the auxiliary connecting rod penetrates through the through hole of the auxiliary connecting rod of the stainless steel flange at the top of the middle barrel body and is connected with the threaded hole of the auxiliary connecting rod of the stainless steel sealing flange at the top of the inner barrel body, and the stress nut of the auxiliary connecting rod is screwed on the upper part of the stainless steel flange at the top of the middle barrel body.
Taking out the whole body: taking out the top cylinder, the top stainless sealing flange, the stainless steel guide pipe, the middle cylinder top sealing flange, the telescopic stainless steel corrugated pipe, the inner cylinder top sealing flange and the sensor mounting copper seat;
after a sensor head belt cable penetrates through a sealing piece seat wire passing hole, a sealing nut, a stainless steel guide pipe and a telescopic stainless steel corrugated pipe, the sensor head belt cable is placed in a temperature sensor mounting copper seat;
putting in the whole: the sensor comprises a top cylinder top stainless sealing flange, a stainless steel conduit, a middle cylinder top sealing flange, a telescopic stainless steel corrugated pipe, an inner cylinder top sealing flange and a sensor mounting copper seat;
installing a top sealing flange of the inner cylinder and a top stainless sealing flange of the top cylinder;
restoring the lead cover;
clamping the polytetrafluoroethylene deformable body with the notch on the cable, putting the polytetrafluoroethylene deformable body into the sealing hole, and then putting the two semicircular hole gaskets on the two sides of the sensor cable and the polytetrafluoroethylene deformable body. And screwing the sealing nut, extruding the deformation body through the pressing mechanism, and enabling the deformation body to be in close contact with the outer layer of the cable, so that a channel for gas circulation is eliminated, and sealing is realized.
The second step is that: recovery system external connection
A cable connecting the control cabinet and the device main body;
connecting the auxiliary cooling groove and the auxiliary cooling sleeve;
a high-pressure helium pipeline and a power cable which are connected with the compressor and the equipment main body;
and the circulating water pipeline is connected with the water cooler and the compressor.
The third step: vacuum pumping
When the main vacuum system operates, the backing pump P2 is started first, the backing valve and the main valve are opened, the main vacuum pump P1 is started after the vacuum degree is less than 5Pa, and the vacuum less than 9 x 10 < -2 > Pa is quickly established.
The fourth step: calibration cavity helium gas charge
Setting inflation pressure through a touch screen;
opening an air inlet valve, and automatically closing a program after the pressure reaches a set value;
and the exhaust valve is automatically opened to exhaust after the pressure is higher than the set pressure, and the air inlet valve is automatically opened to supplement air after the pressure is lower than the set pressure.
The fifth step: temperature control start calibration procedure
The target temperature is set through the touch screen, the water chiller is started manually, and the compressor is started. Under the control of the measurement and control cabinet, the temperature control of the refrigerator and the heater calibration cavity is implemented according to the calibration process, and after the calibration target temperature value is reached, the temperature measurement system collects the current or voltage value of the calibration temperature point. And (4) performing calibration curve fitting after all calibration points in the process are finished to obtain a calibration curve in the measurement range of the temperature measurement system.
The invention has the main technical characteristics that:
(1) the comprehensive errors generated by the temperature measuring system, including the temperature sensor, the connecting cable, the conditioning amplifier, the data acquisition system, the environment and other factors, are calibrated, so that the temperature measuring precision is effectively improved;
(2) the number of one-time calibration channels reaches 45, the temperature accuracy reaches 50mK within the temperature range of 77K to 323K, and the effective temperature field uniformity reaches 50 mK. The efficiency is high, the low-temperature range is wide, and the precision is high;
(3) the circuit of the temperature measurement system is not changed in the calibration process, and the electric driving refrigerator is adopted for refrigeration, so that the security is good.
The key technologies mainly adopted comprise:
(1) the main body of the thermal insulation calibration cavity system adopts a three-layer structure form: the device comprises an external barrel, a middle barrel and an internal barrel, wherein a lead protection cover is installed at the top of the external barrel, a refrigerator is installed at the bottom of the external barrel, a refrigeration head of the refrigerator is connected with the middle barrel and the internal barrel through a cold quantity distributor, and an auxiliary heater is installed on the internal barrel close to the outer side of the bottom. The middle cylinder and the outer cylinder are connected by a stainless steel thin-wall pipe, an auxiliary cooling sleeve is arranged on the outer side of the stainless steel pipe, and the inner cylinder and the middle cylinder are connected by a flexible corrugated pipe. The heat insulation effect is ensured, and the installation and the flange sealing of the inner and outer cylinder bodies are convenient.
(2) In the calibration process, the temperature consistency between the middle barrel and the inner barrel needs to be ensured, so that the temperature field of the inner barrel is prevented from generating gradient due to radiation heat transfer, and the temperature field is not uniform. Therefore, a cold quantity distributor which is connected with the bottom of the inner cylinder and the bottom of the middle cylinder at the same time and is provided with a flange is specially designed, and the cold quantity distribution is realized by adjusting the connection areas of the bottom of the inner cylinder and the bottom of the middle cylinder and the cold quantity distributor.
(3) An auxiliary refrigeration sleeve is adopted, a cooling sleeve is processed on the outer side of the stainless steel guide pipe between the middle barrel body and the outer barrel body, and the cooled constant-temperature medium is conveyed to the cooling sleeve through the low-temperature circulation tank to perform circulating flow so as to reduce the temperature. By the mode, the influence of the leading-out cable on the temperature field of the low-temperature constant-temperature calibration cavity can be reduced, and the auxiliary cooling can be performed in the cooling process of the calibration equipment so as to meet the requirement of cooling rate.
(4) The cable assembling and disassembling and sealing element for the calibration sensor is designed, a deformation cone combined type sealing mode is adopted, and a pressing mechanism is used for extruding a deformation body to enable the deformation body to be in close contact with the outer layer of the cable, so that gas circulation is eliminated, and sealing is realized.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (8)
1. The utility model provides a thermal-insulated chamber that is used for temperature measurement system to carry out wide low temperature of full system and synthesizes calibration equipment, characterized by: comprises an external cylinder, a middle cylinder and an internal cylinder; the inner cylinder is arranged inside the middle cylinder; the middle cylinder body is arranged inside the outer cylinder body; sealing flanges with openings at the tops are arranged at the tops of the inner cylinder, the middle cylinder and the outer cylinder; the opening at the top of the sealing flange at the top of the inner cylinder body is in sealing connection with the opening of the sealing flange at the top of the middle cylinder body through a telescopic corrugated pipe; the opening of the middle cylinder top sealing flange is connected with the opening of the outer cylinder top sealing flange in a sealing way through a stainless steel guide pipe; a sealed lead wire cover is arranged above the opening of the sealing flange at the top of the external cylinder; a helium gas filling pipe and a helium gas exhaust pipe are arranged on the side surface of the lead cover; an auxiliary cooling sleeve is sleeved on the outer wall of the stainless steel guide pipe; the auxiliary cooling sleeve penetrates through a sealing flange at the top of the external cylinder body through an auxiliary cooling sleeve interface to be connected with the precooling device; the bottom of the middle cylinder is provided with a cold quantity distributor; the bottom of the inner cylinder body is directly connected with the cold energy distributor; the bottom of the external cylinder is provided with an external cylinder bottom sealing flange; the cold quantity distributor is connected with a refrigerating machine refrigerating head penetrating through a sealing flange at the bottom of the external cylinder; and a sensor mounting seat is arranged at the bottom of the inner cylinder.
2. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: an auxiliary connecting rod through hole is formed in the sealing flange at the top of the middle cylinder body; an auxiliary connecting rod threaded hole is formed in the sealing flange at the top of the inner cylinder; the auxiliary connecting rod can penetrate through the auxiliary connecting rod through hole to be connected with the auxiliary connecting rod threaded hole; and a stress nut is arranged on the auxiliary connecting rod.
3. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: the outer wall of the inner cylinder body is provided with a heater; a heater is arranged between the bottom of the inner cylinder and the bottom of the middle cylinder; the heater can be connected to a temperature control device.
4. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: platinum resistance thermometers are arranged at a plurality of positions in the sensor mounting seat; the platinum resistance thermometer is connected with the temperature control device.
5. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: the side wall of the outer cylinder body is double-layer; a vacuumizing tube KF joint is arranged on the side wall of the outer cylinder; the sealing flange at the bottom of the external cylinder body is sealed with the refrigerating head of the refrigerator through an O-shaped ring; and an aviation plug for an internal lead to pass through is arranged on the sealing flange at the bottom of the external cylinder.
6. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: the top of the lead cover is provided with a lead cable mounting hole and a standard thermometer lead aviation plug; the leading-out cable mounting hole is provided with a leading-out cable sealing element; the leading-out cable sealing element comprises a polytetrafluoroethylene deformation body with a notch, two semicircular hole gaskets, a sealing element seat and a sealing nut; the sealing piece seat is fixed on the corresponding position of a leading-out cable mounting hole of the lead cover, the polytetrafluoroethylene deformation body with the notch and the two semicircular hole gaskets are sequentially sleeved on the leading-out cable and are placed in the mounting hole, and then the sealing nut is screwed down to enable the polytetrafluoroethylene deformation body to be in close contact with the outer layer of the cable, so that the sealing of a channel for eliminating gas circulation is realized.
7. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: the inner parts of the outer cylinder and the middle cylinder are vacuumized; helium is filled in the inner cylinder.
8. The insulated chamber of claim 1, wherein the insulated chamber is used for a temperature measurement system to perform a full system wide low temperature integrated calibration, and comprises: the sensor mounting seat is of a cylindrical honeycomb structure.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114353953A (en) * | 2022-01-13 | 2022-04-15 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN116448280A (en) * | 2023-03-20 | 2023-07-18 | 北京东方计量测试研究所 | Constant temperature cavity |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070206653A1 (en) * | 2006-03-02 | 2007-09-06 | National Institute Of Advanced Industrial Science And Technology | Low-temperature comparison calibrator for thermometers |
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN103234661A (en) * | 2013-04-10 | 2013-08-07 | 中国科学院理化技术研究所 | Calibrating device with independent vacuum chamber |
| CN103245434A (en) * | 2013-04-10 | 2013-08-14 | 中国科学院理化技术研究所 | Dividing device of thermometer |
| CN203643083U (en) * | 2013-10-14 | 2014-06-11 | 西安航天计量测试研究所 | Low temperature pressure sensor automatic calibration device |
| CN104515788A (en) * | 2015-01-14 | 2015-04-15 | 中国计量学院 | Multilayer metal soaking thermostatic bath |
| CN205236003U (en) * | 2015-12-10 | 2016-05-18 | 上海利正卫星应用技术有限公司 | Wide warm area low -temperature constant -temperature groove equipment |
| CN106568794A (en) * | 2016-11-04 | 2017-04-19 | 上海交通大学 | Low temperature refrigerating machine-based visual experiment observation apparatus of controlled liquefaction and solidification process of fluid |
| CN108225618A (en) * | 2018-04-08 | 2018-06-29 | 中国科学院理化技术研究所 | A kind of width warm area high-precision temperature caliberating device |
| US20180269089A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Non-contact temperature calibration tool for a substrate support and method of using the same |
| CN208076063U (en) * | 2018-04-08 | 2018-11-09 | 中国科学院理化技术研究所 | A kind of temperature calibration system coupling fixed point using refrigeration machine as low-temperature receiver |
| CN208206347U (en) * | 2018-04-08 | 2018-12-07 | 中国科学院理化技术研究所 | A kind of width warm area high-precision temperature caliberating device |
| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
-
2021
- 2021-03-29 CN CN202110331756.4A patent/CN113049144B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070206653A1 (en) * | 2006-03-02 | 2007-09-06 | National Institute Of Advanced Industrial Science And Technology | Low-temperature comparison calibrator for thermometers |
| CN102998424A (en) * | 2012-11-29 | 2013-03-27 | 安徽万瑞冷电科技有限公司 | High temperature and low temperature testing device |
| CN103115699A (en) * | 2013-02-06 | 2013-05-22 | 北京东方计量测试研究所 | Temperature equalizing system for calibration of temperature sensors in vacuum |
| CN103234661A (en) * | 2013-04-10 | 2013-08-07 | 中国科学院理化技术研究所 | Calibrating device with independent vacuum chamber |
| CN103245434A (en) * | 2013-04-10 | 2013-08-14 | 中国科学院理化技术研究所 | Dividing device of thermometer |
| CN203643083U (en) * | 2013-10-14 | 2014-06-11 | 西安航天计量测试研究所 | Low temperature pressure sensor automatic calibration device |
| CN104515788A (en) * | 2015-01-14 | 2015-04-15 | 中国计量学院 | Multilayer metal soaking thermostatic bath |
| CN205236003U (en) * | 2015-12-10 | 2016-05-18 | 上海利正卫星应用技术有限公司 | Wide warm area low -temperature constant -temperature groove equipment |
| CN106568794A (en) * | 2016-11-04 | 2017-04-19 | 上海交通大学 | Low temperature refrigerating machine-based visual experiment observation apparatus of controlled liquefaction and solidification process of fluid |
| US20180269089A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Non-contact temperature calibration tool for a substrate support and method of using the same |
| CN108225618A (en) * | 2018-04-08 | 2018-06-29 | 中国科学院理化技术研究所 | A kind of width warm area high-precision temperature caliberating device |
| CN208076063U (en) * | 2018-04-08 | 2018-11-09 | 中国科学院理化技术研究所 | A kind of temperature calibration system coupling fixed point using refrigeration machine as low-temperature receiver |
| CN208206347U (en) * | 2018-04-08 | 2018-12-07 | 中国科学院理化技术研究所 | A kind of width warm area high-precision temperature caliberating device |
| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114353953A (en) * | 2022-01-13 | 2022-04-15 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN114353953B (en) * | 2022-01-13 | 2024-04-12 | 浙江珏芯微电子有限公司 | Dewar cold head for rapid refrigeration and infrared detector Dewar assembly |
| CN116448280A (en) * | 2023-03-20 | 2023-07-18 | 北京东方计量测试研究所 | Constant temperature cavity |
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Effective date of registration: 20231113 Address after: 621000 No.6, 2nd Ring Road, Fucheng District, Mianyang City, Sichuan Province Applicant after: Institute of equipment design and test technology, China Aerodynamics Research and Development Center Applicant after: BEIJING DONGFANG MEASUREMENT AND TEST INSTITUTE Address before: 621000 No.6, south section of the Second Ring Road, Fucheng District, Mianyang City, Sichuan Province Applicant before: Institute of equipment design and test technology, China Aerodynamics Research and Development Center |
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