CN112985543B - Liquid storage tank liquid storage state detection method and device - Google Patents
Liquid storage tank liquid storage state detection method and device Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims abstract description 263
- 238000003860 storage Methods 0.000 title claims abstract description 206
- 238000001514 detection method Methods 0.000 title claims description 107
- 238000000034 method Methods 0.000 claims abstract description 27
- 239000013307 optical fiber Substances 0.000 claims description 53
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000012545 processing Methods 0.000 abstract description 8
- 239000000523 sample Substances 0.000 description 24
- 238000010586 diagram Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/284—Electromagnetic waves
- G01F23/292—Light, e.g. infrared or ultraviolet
- G01F23/2921—Light, e.g. infrared or ultraviolet for discrete levels
- G01F23/2928—Light, e.g. infrared or ultraviolet for discrete levels using light reflected on the material surface
Abstract
The invention provides a method and a device for detecting the liquid storage state of a liquid storage tank, which adopt different preset values as reference bases when judging the liquid storage state of the liquid storage tank, avoid false alarm caused by adopting the same preset value as the reference base in the prior art, avoid influencing the processing of a semiconductor device, greatly reduce the shutdown times of a semiconductor machine and greatly improve the production efficiency.
Description
Technical Field
The invention relates to the field of integrated circuit manufacturing, in particular to a liquid storage tank liquid storage state detection method and device.
Background
In some semiconductor machines, it is necessary to perform a cleaning or drying process on a semiconductor device using a liquid. Generally, the liquid storage state of the liquid in the liquid storage tank needs to be monitored to judge whether the requirements are met. The stock state of the liquid includes both full (full) and empty (empty). Generally, a sensor is used to detect a liquid storage state of liquid in a drying tank, and in practical applications, a situation that a machine false alarm is triggered due to a sensor detection error often occurs.
The machine station false alarm has the disadvantages that on one hand, a semiconductor device stays in a liquid storage tank and the processing of the semiconductor device is influenced; on the other hand, the number of times of shutdown of the semiconductor machine is increased, and the production efficiency is reduced.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a method and a device for detecting a liquid storage state of a liquid storage tank, which can avoid false alarm of a semiconductor machine, avoid influence on processing of a semiconductor device, and improve processing efficiency of the semiconductor device, thereby improving production efficiency.
In order to solve the above problems, the present invention provides a method for detecting a liquid storage state of a liquid storage tank, where the liquid storage state includes a first state and a second state, the method includes: when the liquid storage state needs to be detected to be a first state, measuring the liquid storage tank to obtain a first light detection value, judging whether the first light detection value is larger than a first preset value, and if so, judging that the liquid storage state is the first state; when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank to obtain a second light detection value, judging whether the second light detection value is smaller than a second preset value, and if so, judging that the liquid level is in the second state; wherein the first preset value is smaller than the second preset value.
Further, the first preset value and the second preset value are adjusted according to the refractive index of the liquid in the liquid storage tank.
Further, the first preset value and the second preset value are adjusted according to the viscosity of the liquid in the liquid storage tank.
Further, the first state is set to be a state when the liquid in the liquid storage tank is at a low liquid level, and the second state is set to be a state when the liquid in the liquid storage tank is at a high liquid level.
Further, the first light detection value is larger than the second light detection value.
Further, the first light detection value and the second light detection value are light intensities of reflected light detected by an optical fiber sensor arranged at a preset position of the liquid storage tank.
Further, the method further comprises: when the liquid storage state needs to be detected to be in a first state, obtaining first reflected light intensity through an optical fiber sensor arranged at a preset position of the liquid storage tank, and taking the ratio of the first reflected light intensity to the total light intensity of the optical fiber sensor as a first light detection value; and when the liquid storage state needs to be detected to be in a second state, obtaining second reflected light intensity through the optical fiber sensor, and taking the ratio of the second reflected light intensity to the total light intensity of the optical fiber sensor as the second light detection value.
Further, when the liquid storage state needs to be detected to be in a first state, measuring the liquid storage tank to obtain a first light detection value, judging whether the first light detection value is larger than a first preset value, if not, judging that the liquid storage state is not in the first state, and giving an alarm; and when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank to obtain a second light detection value, judging whether the second light detection value is smaller than a second preset value, if not, judging that the liquid level is not in the second state, and giving an alarm.
The present invention also provides a detection device for the detection method, which comprises: the optical fiber sensor is arranged at a preset position of the liquid storage tank and used for carrying out light measurement on the liquid storage tank when the liquid storage state is required to be detected to be a first state or a second state; the detector comprises a first channel and a second channel, when the liquid storage state needs to be detected whether to be in a first state or not, the first channel is electrically connected with the optical fiber sensor and used for acquiring a first light detection value, and when the liquid storage state needs to be detected whether to be in a second state or not, the second channel is electrically connected with the optical fiber sensor and used for acquiring a second light detection value; and the controller is electrically connected with the detector and used for judging whether the first light detection value is greater than a first preset value when the liquid storage state needs to be detected to be in a first state or not, and judging whether the second light detection value is smaller than a second preset value when the liquid storage state needs to be detected to be in a second state or not, wherein the first preset value is smaller than the second preset value.
Further, the preset position is set to be that when the liquid storage state of the liquid storage tank is in a first state, the sensing end face of the optical fiber sensor is located above the liquid level of the liquid storage tank, and when the liquid storage state of the liquid storage tank is in a second state, the sensing end face of the optical fiber sensor is located below the liquid level of the liquid storage tank.
The invention has the advantages that different preset values are adopted as reference bases when the liquid storage state of the liquid storage tank is judged, false alarm caused by the fact that the same preset value is adopted as the reference bases in the prior art is avoided, processing of semiconductor devices is avoided being influenced, the number of times of stopping a semiconductor machine is greatly reduced, and production efficiency is greatly improved.
Drawings
FIGS. 1A to 1D illustrate the measurement principle of a fiber sensor in the prior art;
fig. 2 is a schematic flow chart illustrating a method for detecting a liquid storage state of a liquid storage tank according to a first embodiment of the present invention;
fig. 3A and 3B are schematic diagrams illustrating a detection principle of a liquid storage state detection method of a liquid storage tank according to a first embodiment of the present invention;
fig. 4 is a schematic structural diagram of a detection device according to an embodiment of the present invention.
Detailed Description
The following describes in detail embodiments of the method and apparatus for detecting a liquid storage state of a liquid storage tank according to the present invention with reference to the accompanying drawings.
In some semiconductor machines, the liquid storage state of the liquid storage tank is usually detected by only one sensor. For example, in an FC3100 machine, the liquid storage state of the reservoir of the reduced pressure drying system is detected by only one fiber sensor. Fiber optic sensors rely on the principle of light emission to trigger the on-off state of the sensor. Specifically, when the probe of the optical fiber sensor end face is positioned in the air, the light rays conducted by the optical fiber are totally reflected at the probe, and when the probe of the optical fiber sensor is positioned in the liquid, the light rays conducted by the optical fiber are partially reflected at the probe and partially refracted into the liquid. In the two cases, the received reflected light intensity is different, so that the effect of detecting the liquid level is achieved. Generally, when the received reflected light intensity is greater than a preset value, the liquid storage state of the liquid storage tank is judged to be empty, and when the received reflected light intensity is less than the preset value, the liquid storage state of the liquid storage tank is judged to be full.
In practical application, the condition of false alarm of a machine table often occurs because the liquid storage state is not ideal when the optical fiber sensor is used for measuring the liquid storage state, the processing of a semiconductor device is influenced, and the production efficiency can be reduced. Through research, the inventor finds that the machine false alarm has the following two conditions.
Referring to fig. 1A and 1B, when the liquid storage state of the liquid storage tank 10 is empty, that is, there is no liquid in the liquid storage tank 10, or the liquid level of the liquid is low, the probe of the optical fiber sensor is located in the air, light transmitted by the optical fiber (as indicated by an arrow in fig. 1A) is totally reflected at the probe, and at this time, it can be determined that the liquid storage tank is in an empty state according to the fact that the reflected light intensity is greater than a preset value; in this state, if condensed droplets or incompletely dried droplets are attached to the probe, as shown in fig. 1B, light transmitted by the optical fiber (as shown by an arrow in fig. 1B) is partially reflected and partially refracted at the probe, the reflected light intensity is reduced, and when the reflected light intensity is smaller than the preset value, the machine determines that the liquid storage state of the liquid storage tank is not empty, and then an alarm is given out, so that a false alarm is caused.
Referring to fig. 1C and fig. 1D, when the liquid storage state of the liquid storage tank 10 is full, that is, the liquid storage tank 10 is full of liquid, or the liquid level of the liquid is high, a probe of the optical fiber sensor is located in the liquid, light transmitted by the optical fiber (as indicated by an arrow in fig. 1C) is partially reflected at the probe, and partially refracted to enter the liquid, and at this time, the liquid storage tank 10 can be determined to be in the full state according to the fact that the reflected light intensity is smaller than a preset value; in this state, if bubbles are attached to the probe, as shown in fig. 1D, light transmitted by the optical fiber (as indicated by an arrow in fig. 1D) is totally reflected at the probe, so that the reflected light intensity is increased, and when the reflected light intensity is greater than the preset value, the machine determines that the liquid storage state of the liquid storage tank is not full, and then sends an alarm, thereby causing false alarm.
In view of the above, the present invention provides a method for detecting a liquid storage state of a liquid storage tank, which can reduce the false alarm probability of a semiconductor machine and improve the production efficiency.
Fig. 2 is a schematic flow chart of a liquid storage state detection method for a liquid storage tank according to a first embodiment of the present invention, referring to fig. 2, where the liquid storage state includes a first state and a second state, where the first state is set as a state when liquid in the liquid storage tank is at a low liquid level, and the second state is set as a state when liquid in the liquid storage tank is at a high liquid level. For the liquid storage tank, after the liquid in the liquid storage tank is discharged, in the subsequent process, it is necessary to detect whether the liquid storage tank is in the first state to avoid affecting the subsequent process, and after the liquid is filled into the liquid storage tank, in the subsequent process, it is necessary to detect whether the liquid storage tank is in the second state to avoid affecting the subsequent process.
The liquid storage state detection method of the liquid storage tank comprises the following steps:
when the liquid storage state needs to be detected to be in the first state, the liquid storage tank is measured to obtain a first light detection value, whether the first light detection value is larger than a first preset value or not is judged, and if yes, the liquid storage state is judged to be in the first state. And when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank to obtain a second light detection value, judging whether the second light detection value is smaller than a second preset value, and if so, judging that the liquid storage state is in the second state.
When the liquid storage state needs to be detected to be in a first state, an optical fiber sensor arranged at a preset position of the liquid storage tank is used for measuring the liquid storage tank to obtain reflected light intensity, and the reflected light intensity is used as the first light detection value. And judging whether the first light detection value is larger than a first preset value or not, and if so, judging that the liquid storage state of the liquid storage tank is a first state. Further, in this specific embodiment, the method further includes determining whether the first light detection value is greater than a first preset value, and if not, determining that the liquid storage state is not the first state, and sending an alarm to remind an operator to perform an inspection.
And when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank by adopting an optical fiber sensor arranged at a preset position of the liquid storage tank to obtain the reflected light intensity, wherein the reflected light intensity is used as the second light detection value. And judging whether the second light detection value is smaller than a second preset value or not, and if so, judging that the liquid storage state of the liquid storage tank is a second state. Further, in this specific embodiment, the method further includes determining whether the second light detection value is smaller than a second preset value, and if not, determining that the liquid storage state is not the second state, and sending an alarm to remind an operator to perform an inspection.
Wherein the first preset value is smaller than the second preset value. That is to say, when judging whether the liquid storage state of the liquid storage tank is in the first state, a smaller preset value is adopted, and when judging whether the liquid storage state of the liquid storage tank is in the second state, a larger preset value is adopted, so that false alarm caused by the adoption of the same preset value can be avoided.
Fig. 3A and 3B are schematic diagrams illustrating a detection principle of the method for detecting a liquid storage state of a liquid storage tank according to the first embodiment of the present invention, wherein an abscissa represents time, and an ordinate represents light intensity.
Referring to fig. 3A, when it is required to detect whether the liquid storage state is the first state, the reflected light intensity is obtained as the first light detection value, and the reflected light intensity curve is shown as the solid line in fig. 3A. And if the first light detection value is larger than a first preset value A, judging that the liquid storage state of the liquid storage tank is a first state, otherwise, judging that the liquid storage state is not the first state, and giving an alarm to remind an operator to check. When condensed droplets or incompletely dried droplets are attached to the probe (as shown in fig. 1B), although the reflected light intensity is reduced, since the first preset value is smaller and the reflected light intensity is not lower than the first preset value, the liquid storage state of the liquid storage tank is still determined to be the first state, and false alarm cannot occur.
Referring to fig. 3B, when it is required to detect whether the liquid storage state is the second state, the reflected light intensity is obtained as the first light detection value, and the curve of the reflected light intensity is shown by the solid line in fig. 3B. And if the second light detection value is smaller than a second preset value B, judging that the liquid storage state of the liquid storage tank is in a second state, otherwise, judging that the liquid storage state is not in the second state, and giving an alarm to remind an operator to check. When bubbles are attached to the probe (as shown in fig. 1D), although the reflected light intensity is increased, since the second preset value is larger, the reflected light intensity is still smaller than the second preset value B, the liquid storage state of the liquid storage tank is still determined to be the second state, and no false alarm occurs.
The liquid storage state detection method of the liquid storage tank adopts different preset values as reference bases when judging the liquid storage state of the liquid storage tank, avoids false alarm caused by the fact that the same preset value is adopted as the reference bases in the prior art, avoids influencing the processing of semiconductor devices, greatly reduces the shutdown frequency of a semiconductor machine, and greatly improves the production efficiency.
Further, in this embodiment, in order to improve the sensitivity of the detection method, the first preset value a may be a reflected light intensity when all the probes of the optical fiber sensor are located below the liquid level, and the second preset value B may be a reflected light intensity when all the probes of the optical fiber sensor are located above the liquid level. Further, the first preset value a and the second preset value B may be an average value of the reflected light intensities measured multiple times.
Further, in this embodiment, since the first state is a low liquid level state and the second state is a high liquid level state, the first light detection value is larger than the second light detection value.
Further, because different liquids have different refractive indexes for light, the first preset value and the second preset value can be dynamically adjusted according to the refractive indexes of the liquids stored in the liquid storage tank, so that false alarm is reduced, and the detection accuracy is improved. For example, for a liquid with a larger refractive index, the first preset value and the second preset value can be properly reduced to reduce false alarm and improve detection accuracy; for the liquid with smaller refractive index, the first preset value and the second preset value can be properly increased so as to reduce false alarm and improve detection accuracy.
Further, the viscosity of different liquids may be different, and the viscosity of the same liquid may also be different, and the viscosity may affect the difficulty of forming liquid droplets or bubbles on the surface of the probe by the liquid, for example, the greater the viscosity of the liquid, the easier the liquid droplets are formed on the surface of the probe after the liquid is discharged; the higher the viscosity of the liquid, the less easily the bubbles will be discharged, and the more easily the bubbles will adhere to the surface of the probe when the probe is positioned in the liquid. Therefore, the first preset value and the second preset value can be adjusted according to the viscosity of the liquid in the liquid storage tank, so that false alarm is reduced, and the detection accuracy is improved. For example, for a liquid with a high viscosity, the first preset value can be properly reduced and the second preset value can be properly increased, so that false alarm is reduced, and the detection accuracy is improved; for the liquid with low viscosity, the first preset value can be properly increased and the second preset value can be properly decreased so as to reduce false alarm and improve the detection accuracy.
In the first embodiment of the present invention, the reflected light intensity is used as the first light detection value and the second light detection value, and the present invention further provides a second embodiment, different from the first embodiment, in which the ratio of the reflected light intensity to the total light intensity of the optical fiber sensor is used as the first light detection value and the second light detection value.
Specifically, in a second embodiment, the method for detecting a liquid storage state of a liquid storage tank according to the present invention includes:
when the liquid storage state needs to be detected to be in a first state, obtaining first reflected light intensity through an optical fiber sensor arranged at a preset position of the liquid storage tank, and taking the ratio of the first reflected light intensity to the total light intensity of the optical fiber sensor as a first light detection value; and judging whether the first light detection value is larger than a first preset value or not, and if so, judging that the liquid storage state is a first state. Further, in this specific embodiment, the method further includes determining whether the first light detection value is greater than a first preset value, and if not, determining that the liquid storage state is not the first state, and issuing an alarm to prompt an operator to perform an inspection.
And when the liquid storage state needs to be detected to be in a second state, obtaining second reflected light intensity through the optical fiber sensor, and taking the ratio of the second reflected light intensity to the total light intensity of the optical fiber sensor as the second light detection value. And judging whether the second light detection value is smaller than a second preset value or not, and if so, judging that the liquid storage state of the liquid storage tank is a second state. Further, in this specific embodiment, the method further includes determining whether the second light detection value is smaller than a second preset value, and if not, determining that the liquid storage state is not the second state, and sending an alarm to remind an operator to perform an inspection.
Wherein the total light intensity is the light intensity of the incident light transmitted by the optical fiber sensor through the optical fiber.
In this embodiment, since the first light detection value and the second light detection value are a ratio, the first preset value and the second preset value are percentages. Further, the range of the first preset value is 20% -30%, and the range of the second preset value is 70% -80%.
For example, if the first preset value is 25%, when it is required to detect whether the liquid storage state is the first state, obtaining a first reflected light intensity by an optical fiber sensor arranged at a preset position of the liquid storage tank, and taking a ratio of the first reflected light intensity to a total light intensity of the optical fiber sensor as the first light detection value; and judging whether the first light detection value is larger than 25%, if so, judging that the liquid storage state is the first state, otherwise, judging that the liquid storage state is not the first state, and giving an alarm to remind an operator to check.
For another example, if the second preset value is 75%, obtaining a second reflected light intensity by using an optical fiber sensor arranged at a preset position of the liquid storage tank when the liquid storage state needs to be detected to be in a second state, and taking a ratio of the second reflected light intensity to the total light intensity of the optical fiber sensor as the second light detection value; and judging whether the second light detection value is less than 75%, if so, judging that the liquid storage state is the second state, otherwise, judging that the liquid storage state is not the second state, and giving an alarm to remind an operator to check.
The principle of preventing false alarms according to the second embodiment of the present invention is the same as that of the first embodiment. Specifically, when it is required to detect whether the liquid storage state is the first state, if a condensed droplet or an incompletely dried droplet is attached to the probe (as shown in fig. 1B), the first reflected light intensity is reduced, and the ratio of the first reflected light intensity to the total light intensity (i.e., the first light detection value) is also reduced, but since the first preset value is smaller, the first light detection value is not lower than the first preset value, it is still determined that the liquid storage state of the liquid storage tank is the first state, and thus a false alarm is not generated. When it is required to detect whether the liquid storage state is in the second state, if bubbles are attached to the probe (as shown in fig. 1D), the second reflected light intensity is increased, and the ratio of the second reflected light intensity to the total light intensity (i.e., the second light detection value) is also increased, but since the second preset value is larger, the second light detection value is still smaller than the second preset value B, it is still determined that the liquid storage state of the liquid storage tank is in the second state, and no false alarm occurs.
The invention also provides a detection device for the detection method. Please refer to fig. 4, which is a schematic structural diagram of a detecting device according to an embodiment of the present invention, the detecting device includes an optical fiber sensor 40, a detector 50 and a controller 60.
The optical fiber sensor 40 is disposed at a preset position of the reservoir 10, and is configured to perform optical measurement on the reservoir 10 when it is required to detect whether the storage state of the reservoir 10 is the first state or the second state. Specifically, the optical fiber sensor 40 has a probe, and the intensity of reflected light at the probe is measured to realize the light measurement.
The preset position is set such that when the liquid storage state of the liquid storage tank 10 is a first state, the sensing end face of the optical fiber sensor 40 is located above the liquid level of the liquid storage tank 10, and when the liquid storage state of the liquid storage tank 10 is a second state, the sensing end face of the optical fiber sensor 40 is located below the liquid level of the liquid storage tank.
The detector 50 includes a first channel and a second channel, and when it is necessary to detect whether the liquid storage state of the liquid storage tank is the first state, the first channel is electrically connected to the optical fiber sensor 40 and is configured to obtain a first light detection value, and when it is necessary to detect whether the liquid storage state of the liquid storage tank is the second state, the second channel is electrically connected to the optical fiber sensor 40 and is configured to obtain a second light detection value. The first light detection value and the second light detection value can be the reflected light intensity or the ratio of the reflected light intensity to the total light intensity.
The controller 60 is electrically connected to the detector 50, and configured to determine whether the first light detection value is greater than a first preset value when it is required to detect whether the liquid storage state is a first state, and determine whether the second light detection value is smaller than a second preset value when it is required to detect whether the liquid storage state is a second state, where the first preset value is smaller than the second preset value.
The detection device respectively acquires the first optical detection value and the second optical detection value through the first channel and the second channel of the detector, and respectively uses the first preset value and the second preset value as the reference values of the first optical detection value and the second optical detection value, so that the first state and the second state of the liquid storage tank are respectively judged, the condition of false alarm caused by the fact that the same preset value is adopted when the liquid storage tank is judged to be in the first state or the second state in the prior art is avoided, the processing of a semiconductor device is prevented from being influenced, and the problem of production efficiency reduction caused by the halt of a semiconductor machine table can be avoided.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, many modifications and adaptations can be made without departing from the principle of the present invention, and such modifications and adaptations should also be considered as the scope of the present invention.
Claims (10)
1. A method for detecting a liquid storage state of a liquid storage tank, wherein the liquid storage state includes a first state and a second state, the method comprising:
when the liquid storage state needs to be detected to be a first state, measuring the liquid storage tank to obtain a first light detection value, judging whether the first light detection value is larger than a first preset value, and if so, judging that the liquid storage state is the first state;
when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank to obtain a second light detection value, judging whether the second light detection value is smaller than a second preset value, and if so, judging that the liquid storage state is in the second state;
wherein the first preset value is smaller than the second preset value.
2. The method of claim 1, wherein the first predetermined value and the second predetermined value are adjusted according to a refractive index of a liquid in the reservoir.
3. The method of claim 1, wherein the first and second predetermined values are adjusted according to a viscosity of the liquid in the reservoir.
4. The method as claimed in claim 1, wherein the first state is set to a low level and the second state is set to a high level.
5. The method as claimed in claim 1, wherein the first light detection value is greater than the second light detection value.
6. The method for detecting a liquid storage state in a liquid storage tank according to claim 1, wherein the first and second light detection values are light intensities of reflected light detected by an optical fiber sensor disposed at a predetermined position in the liquid storage tank.
7. The method of detecting the state of a liquid stored in a reservoir according to claim 1, further comprising:
when the liquid storage state needs to be detected to be in a first state, obtaining first reflected light intensity through an optical fiber sensor arranged at a preset position of the liquid storage tank, and taking the ratio of the first reflected light intensity to the total light intensity of the optical fiber sensor as a first light detection value; and when the liquid storage state needs to be detected to be in a second state, obtaining second reflected light intensity through the optical fiber sensor, and taking the ratio of the second reflected light intensity to the total light intensity of the optical fiber sensor as the second light detection value.
8. The method for detecting the liquid storage state of the liquid storage tank according to claim 1, wherein when it is required to detect whether the liquid storage state is a first state, the liquid storage tank is measured to obtain a first light detection value, and whether the first light detection value is greater than a first preset value is determined, if not, it is determined that the liquid storage state is not the first state, and an alarm is issued; and when the liquid storage state needs to be detected to be in a second state, measuring the liquid storage tank to obtain a second light detection value, judging whether the second light detection value is smaller than a second preset value, if not, judging that the liquid storage state is not in the second state, and giving an alarm.
9. A detection device for use in the detection method as claimed in any one of claims 1 to 8, comprising:
the optical fiber sensor is arranged at a preset position of the liquid storage tank and used for carrying out light measurement on the liquid storage tank when the liquid storage state is required to be detected to be a first state or a second state;
the detector comprises a first channel and a second channel, wherein when the liquid storage state needs to be detected to be in a first state, the first channel is electrically connected with the optical fiber sensor and used for acquiring a first optical detection value, and when the liquid storage state needs to be detected to be in a second state, the second channel is electrically connected with the optical fiber sensor and used for acquiring a second optical detection value; and the controller is electrically connected with the detector and used for judging whether the first light detection value is greater than a first preset value when the liquid storage state needs to be detected to be in a first state or not, and judging whether the second light detection value is smaller than a second preset value when the liquid storage state needs to be detected to be in a second state or not, wherein the first preset value is smaller than the second preset value.
10. The detection device as claimed in claim 9, wherein the predetermined position is set such that the sensing end surface of the optical fiber sensor is located above the liquid level of the reservoir when the liquid storage state of the reservoir is the first state, and the sensing end surface of the optical fiber sensor is located below the liquid level of the reservoir when the liquid storage state of the reservoir is the second state.
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| CN202110208668.5A CN112985543B (en) | 2021-02-25 | 2021-02-25 | Liquid storage tank liquid storage state detection method and device |
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| CN202110208668.5A CN112985543B (en) | 2021-02-25 | 2021-02-25 | Liquid storage tank liquid storage state detection method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5743135A (en) * | 1993-08-27 | 1998-04-28 | Vlsi Technology, Inc. | Optical-fiber liquid-level monitor |
| US6274880B1 (en) * | 1998-07-31 | 2001-08-14 | Hewlett-Packard Company | Fluid level sensing system and method having controlled surface pairs |
| NL1031010C2 (en) * | 2006-01-26 | 2007-07-27 | Bravilor Holding Bv | Filling condition detection device for powdered material and method for detecting a filling condition in a storage unit. |
| WO2012170743A1 (en) * | 2011-06-07 | 2012-12-13 | Sentelligence, Inc. | Optical sensing device for fluid sensing and methods therefor |
| DE102011089703B3 (en) * | 2011-12-22 | 2013-05-23 | Continental Automotive Gmbh | Optical measuring arrangement for determination of e.g. light speed within diesel fuel in motor car, has light sources whose light is incident at certain angle different from another angle and reflected to light sensors |
| JP2017026493A (en) * | 2015-07-23 | 2017-02-02 | シャープ株式会社 | Electrical equipment |
| CN206177411U (en) * | 2016-09-30 | 2017-05-17 | 天津市誉航润铭科技发展有限公司 | Explosion -proof level sensor of raman scattering optic fibre |
| CN109557027B (en) * | 2017-09-26 | 2022-09-02 | 深圳市新产业生物医学工程股份有限公司 | Automatic analysis device and detection method for container state in working process thereof |
| CN212432284U (en) * | 2018-11-15 | 2021-01-29 | 深圳市赫兹科技有限公司 | Liquid level detecting system |
| TWI718797B (en) * | 2019-12-04 | 2021-02-11 | 國立臺北科技大學 | Liquid detecting device and automatic discriminating method thereof |
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