CN112968559A - Magnetic suspension rotating device - Google Patents

Magnetic suspension rotating device Download PDF

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Publication number
CN112968559A
CN112968559A CN202110194276.8A CN202110194276A CN112968559A CN 112968559 A CN112968559 A CN 112968559A CN 202110194276 A CN202110194276 A CN 202110194276A CN 112968559 A CN112968559 A CN 112968559A
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Prior art keywords
ring
magnet
coil
array
driving unit
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CN202110194276.8A
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CN112968559B (en
Inventor
胡兵
江旭初
蒋赟
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Shanghai Yinguan Semiconductor Technology Co Ltd
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Shanghai Yinguan Semiconductor Technology Co Ltd
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Linear Motors (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention relates to the field of magnetic suspension devices, and discloses a magnetic suspension rotating device. The magnetic suspension rotating device comprises a first ring, a second ring, a first driving unit and a second driving unit. The second ring and the first ring are coaxial and are arranged at intervals along the radial direction. A first magnet array and a second magnet array are arranged on the first ring. The first coil array and the second coil array are arranged on the second ring. The first magnet array and the first coil array are opposite to the second magnet array and the second coil array to form a first driving unit and a second driving unit respectively. The first magnet array includes N, S magnets alternating in the axial direction. The second magnet array includes N, S magnets alternating about the axial direction, and the first coil array includes a plurality of first coil groups about the axial direction, the first coil groups including a first group of three-phase coils arranged along the axial direction. The second coil array comprises a plurality of second coil groups arranged along the circumferential direction, and each second coil group comprises a second group of three-phase coils around the axial direction. The invention increases the degree of freedom of the device.

Description

Magnetic suspension rotating device
Technical Field
The invention relates to the field of magnetic suspension devices, in particular to a magnetic suspension rotating device.
Background
The semiconductor industry has already formed a more mature industrial chain after the development of half a century, the equipment required by each link in the semiconductor industrial chain is more complicated, and the heat treatment equipment in the manufacturing field is mainly a furnace body which grows an oxide film on the surface of a silicon wafer in a heating environment to finish the heat treatment process such as doping or annealing and the like. The Rapid Thermal Processing (RTP) technique achieves various processing processes for very large scale integrated circuit wafers, mainly including Rapid Thermal Annealing (RTA), Rapid Thermal Cleaning (RTC), Rapid Thermal Chemical Vapor Deposition (RTCVD), Rapid Thermal Oxidation (RTO), and Rapid Thermal Nitridation (RTN), on the premise of improving wafer throughput and reducing throughput.
Be fixed with rotary device and heating cavity in the RTP equipment, rotary device includes second circle ring and first circle ring, second circle ring and the coaxial setting of first circle ring, and second circle ring spacer sleeve establishes outside first circle ring and fixed with RTP equipment, it is also fixed with RTP equipment to heat the cavity, the heating cavity is arranged in outside the heating cavity in second circle ring, inside the heating cavity is arranged in to first circle ring, the wafer is arranged in the heating cavity, the temperature is usually about 1000 ℃ in the cavity, for the wafer can the even heating, the wafer often is fixed with first circle ring, so that first circle ring can drive the wafer and revolve around the axle. At present, rotating devices are generally classified into mechanical rotating devices and magnetic levitation rotating devices. Mechanical rotary device relies on mechanical bearing to realize that first circle ring is rotatory, but mechanical bearing can introduce the heating cavity with the impurity particle, and then pollutes the wafer, and its structure is more complicated moreover, and it is great to occupy the volume, because the complex structure is more, first circle ring is easy to take place eccentric phenomenon when rotating. The first ring of magnetic levitation rotating device keeps the suspension state by the action of the magnetic field between the stator and the rotor, the first ring is not mechanically connected with the second ring, but only can realize the degree of freedom that the first ring rotates around the rotating shaft, the linear degree of freedom along the rotating shaft does not exist, the lifting of the first ring is not convenient for, thereby being incapable of being applied to some heat treatment processes, the mechanical arm is not convenient for taking the wafer, the practicability of the rotating device is reduced, the application range is reduced, the processing procedure of the wafer is also complicated, the equipment quantity is increased, and the cost is increased.
Accordingly, there is a need for a magnetic levitation device to solve the above problems.
Disclosure of Invention
The invention aims to provide a magnetic suspension rotating device, which avoids introducing impurity particles into a cavity between a second ring and a first ring, increases the degree of freedom of linear movement of the magnetic suspension rotating device along a rotating shaft, improves the practicability of the rotating device and enlarges the application range of the rotating device.
In order to achieve the purpose, the invention adopts the following technical scheme:
a magnetic levitation rotation apparatus comprising:
a first ring;
the second ring is coaxial with the first ring and is arranged at intervals along the radial direction;
the first driving unit comprises a first magnet array and a first coil array which are oppositely arranged, the first magnet array is arranged on the first ring, the first coil array is arranged on the second ring, the first magnet array comprises a plurality of first N magnets and first S magnets which are alternately arranged along the axial direction of the first ring, the magnetization directions of the magnets in the first magnet array on the same plane which is vertical to the axis of the first ring are the same, the first coil array comprises at least two first coil groups which are circumferentially arranged along the second ring, and each first coil group comprises at least one first group of three-phase coils which are arranged along the axial direction of the first ring;
the second driving unit comprises a second magnet array and a second coil array which are oppositely arranged, the second magnet array is arranged on the first ring, the second coil array is arranged on the second ring, the second magnet array comprises a plurality of second N magnets and second S magnets which are alternately arranged along the circumferential direction of the first ring, the second coil array comprises at least two second coil groups which are arranged along the circumferential direction of the second ring, and each second coil group comprises at least one second group of three-phase coils which are arranged along the circumferential direction of the second ring; and the first driving unit and the second driving unit are arranged at intervals along the axial direction of the first ring.
Preferably, each of the first N magnets is annular and coaxial with the first ring, and each of the first S magnets is annular and coaxial with the first ring.
Preferably, the second N magnet and the second S magnet are uniformly spaced along the circumference of the first ring.
Preferably, the first coil array comprises four first coil groups uniformly distributed along the circumferential direction of the second coil ring, and each first coil group is electrically connected with one first power amplifier.
Preferably, the second coil array comprises four second coil groups uniformly distributed along the circumferential direction of the second ring, and each second coil group is electrically connected with one second power amplifier.
Preferably, a first bonding layer is arranged between the first magnet array and the first ring, and a second bonding layer is arranged between the second magnet array and the first ring.
Preferably, a third bonding layer is arranged between the first coil array and the second ring, and a fourth bonding layer is arranged between the second coil array and the second ring.
Preferably, the first magnet array further comprises a first H magnet located between the first S magnet and the first N magnet, and the magnetization direction of the first H magnet is directed from the first S magnet to the first N magnet, such that the first S magnet, the first H magnet and the first N magnet form a halbach array.
Preferably, the second magnet array further comprises a second H magnet located between the second S magnet and the second N magnet, and the magnetization direction of the second H magnet is directed from the second S magnet to the second N magnet, so that the second S magnet, the second H magnet, and the second N magnet form a halbach array.
Preferably, at least two first driving units and/or at least two second driving units are provided, and the first driving units and the second driving units are alternately arranged along the axial direction of the first ring.
The invention has the beneficial effects that: in the first driving unit, after the first coil array is electrified, the first magnet array can have force along the axial direction of the rotor ring under the action of a magnetic field generated by the first coil array, namely, the rotor ring can move along the axial direction of the rotor ring. In the second driving unit, after the second coil array is electrified, the second magnet array can have torque rotating around the axial direction of the rotor ring under the action of a magnetic field generated by the second coil array, namely the rotor ring can rotate around the axial direction of the rotor ring. The magnetic levitation rotating device provided by the embodiment has the advantages that when the stator ring and the rotor ring rotate relatively, the mechanical rotating structure is prevented from being adopted to introduce impurity particles into the cavity between the stator ring and the rotor ring, the rotor ring can move along the direction of the rotating shaft, the degree of freedom of the magnetic levitation rotating device along the linear movement of the rotating shaft is increased, the practicability of the magnetic levitation rotating device is improved, and the application range of the magnetic levitation rotating device is enlarged.
Drawings
Fig. 1 is an exploded view of a magnetic levitation rotating apparatus according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a magnetic levitation rotation device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first driving unit of a magnetic levitation rotating apparatus according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second driving unit of the magnetic levitation rotating apparatus according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a first driving situation of a first driving unit according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a second driving situation of the first driving unit according to the first embodiment of the invention;
fig. 7 is a schematic diagram illustrating a third driving situation of the first driving unit according to the first embodiment of the invention;
fig. 8 is a schematic diagram illustrating a fourth driving situation of the first driving unit according to the first embodiment of the invention;
fig. 9 is a schematic diagram of a fifth driving situation of the first driving unit according to the first embodiment of the invention;
fig. 10 is a schematic diagram of a first driving situation of a second driving unit according to an embodiment of the present invention;
fig. 11 is a schematic diagram of a second driving situation of the second driving unit according to the first embodiment of the invention;
fig. 12 is a schematic diagram illustrating a third driving situation of the second driving unit according to the first embodiment of the invention;
fig. 13 is a cross-sectional view of a magnetic levitation rotation apparatus provided in a third embodiment of the present invention;
fig. 14 is a cross-sectional view of a magnetic levitation rotation apparatus according to a fourth embodiment of the present invention.
In the figure:
10. a first ring; 20. a second ring;
1. a first array of magnets; 11. a first N magnet; 12. a first S magnet; 13. a first H magnet; 2. a first array of coils; 21. a first coil group; 3. a second magnet array; 31. a second N magnet; 32. a second S magnet; 4. a second coil array; 41. and a second coil assembly.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
Example one
At present, the mechanical rotating device has the defect that impurity particles are easily introduced into a cavity between the second ring and the first ring, and the traditional magnetic levitation rotating device generally does not have the freedom degree that a rotor linearly moves along the rotating shaft direction.
This embodiment provides a magnetism rotary device, when can having realized that second circle ring and first circle ring rotate relatively, avoided again to the second circle ring with the first circle ring in the cavity between the cavity introduce the foreign particle, can make first circle ring move along the direction of pivot again moreover, increased magnetism rotary device along pivot rectilinear movement's degree of freedom, improved magnetism rotary device's practicality, enlarged magnetism rotary device's application scope.
Specifically, as shown in fig. 1 to 4, the magnetic levitation rotating apparatus includes a first ring 10, a second ring 20, a first driving unit and a second driving unit. The second ring 20 is coaxially disposed with the first ring 10, and the second ring 20 is spaced apart from the first ring 10 in a radial direction. The first driving unit comprises a first magnet array 1 and a first coil array 2 which are oppositely arranged, the first magnet array 1 is arranged on a first ring 10, the first coil array 2 is arranged on a second ring 20, the first magnet array 1 comprises a plurality of first N magnets 11 and first S magnets 12 which are alternately arranged along the axial direction of the first ring 10, the magnetization directions of the magnets in the first magnet array 1 on the same plane which is vertical to the axial line of the first ring 10 are the same, the first coil array 2 comprises at least two first coil groups 21 which are circumferentially arranged along the second ring 20, each first coil group 21 comprises at least one first group of three-phase coils which are arranged along the axial direction of the second ring 20, and each coil in each first group of three-phase coils is arranged along the axial direction of the second ring 20. Preferably, each coil of each first group of three-phase coils is identical in shape and is in a long flat shape. The second driving unit comprises a second magnet array 3 and a second coil array 4 which are oppositely arranged, the second magnet array 3 is arranged on the first ring 10, the second coil array 4 is arranged on the second ring 20, the second magnet array 3 comprises a plurality of second N magnets 31 and second S magnets 32 which are alternately arranged along the circumferential direction of the first ring 10, the second coil array 4 comprises at least two second coil groups 41 which are arranged along the circumferential direction of the second ring 20, and each second coil group 41 comprises at least one second group of three-phase coils which are arranged along the circumferential direction of the second ring 20; and the first driving unit and the second driving unit are arranged at intervals along the axial direction of the first ring 10. In the first driving unit, after the first coil array 2 is energized, the first magnet array 1 can have a force along the axial direction of the first ring 10 under the action of the magnetic field generated by the first coil array 2, that is, the first ring 10 can move along the axial direction of the first ring 10. In the second driving unit, after the second coil array 4 is energized, the second magnet array 3 can have a torque rotating around the axial direction of the first ring 10 under the action of the magnetic field generated by the second coil array 4, that is, the first ring 10 can rotate around the axial direction of the first ring 10. The magnetic levitation rotating device provided by the embodiment realizes the relative rotation of the second ring 20 and the first ring 10, and avoids the risk that the mechanical rotating structure can introduce impurity particles into the cavity between the second ring 20 and the first ring 10, and can move along the direction of the rotating shaft of the first ring 10, thereby increasing the degree of freedom of the magnetic levitation rotating device along the linear movement of the rotating shaft, improving the practicability of the magnetic levitation rotating device, and expanding the application range of the magnetic levitation rotating device.
For convenience of understanding, an XYZ coordinate system is provided in the drawing, and the X, Y direction is along the radial direction of the first ring 10, the Z direction is along the axial direction of the first ring 10, and the directions of rotation around the X, Y, Z axis are Rx, Ry, and Rz directions, respectively. In the present embodiment, three coils of phase a, phase B, and phase C in the first group of three-phase coils are arranged equidistantly along the Z-axis direction, wherein each coil strip is flat, and each first coil group 21 includes a group of three-phase coils; the three coils of the a phase, the B phase, and the C phase of the second group of three-phase coils are arranged along the Rz direction, and each second coil group 41 includes two groups of three-phase coils of the second group, and the two groups of three-phase coils of the second group are uniformly arranged along the Rz direction. In other embodiments, the number of the first group of three-phase coils included in each first coil group 21 is adjustable, preferably 1 to 10 groups; the number of the second three-phase coils included in each second coil group 41 is also adjustable, and preferably 1 to 6 groups.
In this embodiment, in order to facilitate the fixing of the magnetic levitation rotation device and avoid the line winding, the first ring 10 is used as a rotor ring, the second ring 20 is used as a stator ring, the second ring 20 is sleeved outside the first ring 10 at intervals, the cavity wall of the heating cavity is disposed between the second ring 20 and the first ring 10, and the wafer is fixed on the first ring 10 by the mechanical adapter and is disposed inside the heating cavity at the same time, so that the first ring 10 can drive the wafer to rotate. It is understood that the first coil array 2 and the second coil array 4 are disposed on the inner wall of the second ring 20, and the first magnet array 1 and the second magnet array 3 are disposed on the outer wall of the first ring 10. In other embodiments, the first ring 10 may further be sleeved outside the second ring 20 at intervals, in which case, the first coil array 2 and the second coil array 4 are both disposed on the outer wall of the second ring 20, and the first magnet array 1 and the second magnet array 3 are both disposed on the inner wall of the first ring 10, which is not limited herein.
Specifically, each first N magnet 11 is annular and coaxial with the first ring 10, and the first N magnets 11 may be integral or segmented; each first S magnet 12 is annular and coaxial with the first ring 10, and the first S magnet 12 may be integral or segmented. The annular magnet can ensure that magnetic fields are arranged on the circumferential direction of the first driving unit, the first driving unit can ensure that the first ring 10 and the second ring 20 generate relative axial linear displacement when the first ring 10 is at any position in the circumferential direction, and the functionality of the device is ensured. It will be appreciated that each first N magnet 11 and each first S magnet 12 are annular end to end in the Rz direction.
The first N magnet 11 and the first S magnet 12 in this embodiment are both segmented. As shown in fig. 2 and 3, each first N magnet 11 includes nine first N magnet segments arranged along the circumferential direction, i.e., Rz direction, of the first ring 10, each first S magnet 12 includes nine first S magnet segments arranged along the circumferential direction, i.e., Rz direction, of the first ring 10, i.e., nine first N magnet segments in the same plane perpendicular to the axis of the first ring 10 are connected to form a first N magnet 11 having a ring shape around the Rz direction, and nine first S magnet segments in the same plane perpendicular to the axis of the first ring 10 are connected to form a first S magnet 12 having a ring shape around the Rz direction. The first N magnet 11 and the first S magnet 12 are arranged in a segmented mode, so that production and processing are facilitated, and production cost is reduced. In other embodiments, the number of the first magnet groups may be adjusted according to practical situations, and is not limited herein.
In the present embodiment, the magnetization direction of the first N magnet 11 is opposite to that of the first S magnet 12, specifically, the magnetization direction of the first N magnet 11 is directed to the coil, i.e., outward along the radial direction of the first ring 10, and the magnetization direction of the first S magnet 12 is directed away from the coil, i.e., inward along the radial direction of the first ring 10. That is, for the first N magnet 11, the S pole is the side of the first N magnet 11 facing the first ring 10 in the radial direction of the first ring 10, and the N pole is the side of the first N magnet 11 facing away from the first ring 10 in the radial direction of the first ring 10. For the first S magnet 12, the S pole is the side of the first S magnet 12 facing away from the first ring 10 in the radial direction of the first ring 10, and the N pole is the side of the first S magnet 12 facing the first ring 10 in the radial direction of the first ring 10.
Preferably, the first magnet array 1 further comprises a first H magnet 13. The first H magnet 13 is located between the first S magnet 12 and the first N magnet 11, and the magnetization direction of the first H magnet 13 is directed from the first S magnet 12 to the first N magnet 11, specifically, from the S pole of the first S magnet 12 to the N pole of the first N magnet 11, so that the first S magnet 12, the first H magnet 13, and the first N magnet 11 form a Halbach Array (Halbach Array) to enhance the magnetic field strength of the first magnet Array 1 on the side close to the first coil Array 2. It will be appreciated that for the first H magnet 13, the S pole is the side of the first H magnet 13 facing the first S magnet 12 in the axial direction of the first ring 10, and the N pole is the side of the first H magnet 13 facing the first N magnet 11 in the axial direction of the first ring 10. The magnetization directions of the first N magnet 11 and the first S magnet 12 have been indicated with arrows in fig. 2. As described above, the magnetization directions of the magnets in the first magnet array 1 on the same plane perpendicular to the axis of the first ring 10 are the same, and the "magnet in the first magnet array 1 on the same plane perpendicular to the axis of the first ring 10" may be any one of the magnets in the first magnet array 1, such as one of the first N magnet 11, the first S magnet 12, and the first H magnet 13.
In this embodiment, the magnets in the first magnet array 1 are set to be halbach arrays, which improves the magnetic field strength of the first magnet array 1, also improves the magnetic field strength of the first coil array 2, and ensures the functionality of the magnetic levitation device. The first H magnets 13 in the same plane perpendicular to the axis of the first ring 10 are also annular end to end along the circumferential direction of the first ring 10, and the first H magnets 13 may be integrated or segmented. In the present embodiment, the first H-magnet 13 includes nine first H-magnet segments, and the first H-magnet segments are disposed between adjacent first N-magnet segments and first S-magnet segments, as indicated by arrows in fig. 2, to indicate the magnetization direction of the first H-magnet 13. In the present embodiment, each first magnet group includes four first H magnet segments, two first N magnet segments, and two first S magnet segments, that is, the first magnet array 1 includes four first H magnets 13, two first N magnets 11, and two first S magnets 12, which are arranged along the axial direction of the first ring 10 in an arrangement of H-N-H-S-H-N-H-S. In other embodiments, the number of the various types of magnets in the first magnet array 1 may be adaptively adjusted, and is not limited herein. Further, the first N magnet 11, the first S magnet 12, and the first H magnet 13 may also be in an integrated annular structure.
Specifically, as shown in fig. 3, in the first driving unit of this embodiment, the first coil array 2 includes four first coil groups 21 uniformly distributed along the circumferential direction of the second coil ring 20, each first coil group 21 is electrically connected to one first power amplifier, so that the current flowing through each first coil group 21 is controlled by different first power amplifiers, and the first driving unit is divided into four first branch driving units, each of the four first branch driving units can drive the first coil ring 10 to generate relative displacement with the second coil ring 20, thereby increasing the degree of freedom of the first coil ring 10, improving the practicability of the magnetic levitation device, and expanding the application range. In other embodiments, the number of the first coil groups 21 in the first coil array 2 is adjustable, and is preferably an even number between 2 and 16, and the plurality of first coil groups 21 may be arranged according to the requirement of a degree of freedom, and is not limited to being symmetrically arranged with the Z axis as the central axis, and is not limited herein. In other embodiments, the first power amplifier and the first coil assembly 21 may not be correspondingly connected, and may be adjusted according to the requirement of the degree of freedom, which is not limited herein.
As shown in fig. 5 to 9, in the present embodiment, the four first branch driving units are the first branch driving units a respectively1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4Are respectively marked as A in the figure1、A2、A3And A4The four first branch driving units correspond to the four first coil groups 21 one to one, respectively. Wherein the first branch driving unit A1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4Respectively in the positive X-axis direction, the negative Y-axis direction, the negative X-axis direction and the positive Y-axis direction. The currents flowing in the four first branch driving units are respectively controlled by four first power amplifiers, and each first branch driving unit can drive the three alternating-current coils of the first group of three-phase coils in each first coil group 21 to rotate around the X axis,The Y-axis and Z-axis directions drive the first ring 10 and the second ring 20 to move relatively, so that the first driving unit can make the first ring 10 obtain X, Y, Z, Rx and relative displacement of five degrees of freedom in the Ry direction with the second ring 20.
Wherein:
fig. 5 shows a first driving situation of the first driving unit, in which the four first coil sets 21 are all supplied with currents in the same direction, and the supplied currents enable the first branch driving unit a to operate1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4Simultaneously, the first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the Z axis relative to the second ring 20, namely, the first branch driving unit A1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4The direction of the relative displacement generated by driving the first ring 10 is the same, and the first ring 10 can generate the relative displacement along the Z direction relative to the second ring 20. The currents led into the four groups of first coil groups 21 are the same, and the a-phase input current in the first group of three-phase coils in each group of first coil groups 21 is preferably IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000111
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000112
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000121
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000122
t is the energization time.
FIG. 6 shows a second driving situation of the first driving unit, which corresponds to the first branch driving unit A2And a first branch driving unit A4The two first coil groups 21 are not electrified; corresponding to the first branch driving unit A1And a first branch driving unit A3The two first coil sets 21 are supplied with currents in opposite directions, and the supplied currents can enable the first branch driving unit a to1And a first branch driving unit A3Simultaneously, the first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the X axis relative to the second ring 20, namely, the first branch driving unit A1And a first branch driving unit A3The direction of the relative displacement generated by driving the first ring 10 is the same, and the first ring 10 can generate the relative displacement along the X direction relative to the second ring 20. Corresponding to the first branch driving unit A1And a first branch driving unit A3The directions of the currents led into the two first coil groups 21 are opposite, wherein the a-phase input current in the first three-phase coil group in one first coil group 21 is preferably
Figure BDA0002945717990000123
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000124
t is the power-on time, the corresponding B-phase input current is
Figure BDA0002945717990000125
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000126
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000127
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000128
t is the energization time. Then, the a-phase input current in the first-group three-phase coil in the other first coil group 21 is preferably
Figure BDA0002945717990000129
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA00029457179900001210
t is the power-on time, the corresponding B-phase input current is
Figure BDA00029457179900001211
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA00029457179900001212
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000131
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000132
t is the energization time.
FIG. 7 shows a third driving situation of the first driving unit, which corresponds to the first branch driving unit A1And a first branch driving unit A3The two first coil groups 21 are not electrified; corresponding to the first branch driving unit A2And a first branch driving unit A4The two first coil sets 21 are supplied with currents in opposite directions, and the supplied currents can enable the first branch driving unit a to2And a first branch driving unit A4Simultaneously, the first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the Y axis relative to the second ring 20, namely, the first branch driving unit A2And a first branch driving unit A4Driving the first ringThe direction of the relative displacement of the rings 10 is the same, and the first ring 10 can be displaced relative to the second ring 20 in the Y direction. Corresponding to the first branch driving unit A2And a first branch driving unit A4The directions of the currents led into the two first coil groups 21 are opposite, wherein the a-phase input current in the first three-phase coil group in one first coil group 21 is preferably
Figure BDA0002945717990000133
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000134
t is the power-on time, the corresponding B-phase input current is
Figure BDA0002945717990000135
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000136
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000137
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000138
t is the energization time. Then, the a-phase input current in the first-group three-phase coil in the other first coil group 21 is preferably
Figure BDA0002945717990000139
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA00029457179900001310
t is the power-on time, the corresponding B-phase input current is
Figure BDA00029457179900001311
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA00029457179900001312
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000141
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000142
t is the energization time.
FIG. 8 shows a fourth driving situation of the first driving unit, which corresponds to the first branch driving unit A1And a first branch driving unit A3The two first coil groups 21 are not electrified; corresponding to the first branch driving unit A2And a first branch driving unit A4The two first coil sets 21 are supplied with currents in opposite directions, and the supplied currents can enable the first branch driving unit a to2And a first branch driving unit A4The first ring 10 is driven to generate a relative displacement along the positive direction or the negative direction of the Z axis relative to the second ring 20, namely, the first branch driving unit A2And a first branch driving unit A4The relative displacement generated by driving the first ring 10 is in the opposite direction, and the first ring 10 can generate the relative displacement clockwise or counterclockwise along the Rx direction relative to the second ring 20. Corresponding to the first branch driving unit A2And a first branch driving unit A4The directions of the currents led into the two first coil groups 21 are opposite, wherein the a-phase input current of the first group three-phase coil of one first coil group 21 is preferably IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000143
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000144
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000145
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000146
t is the energization time. Then the a-phase input current of the first set of three-phase coils of the other first coil set 21 is preferably-IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000147
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000148
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000149
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000151
t is the energization time.
FIG. 9 shows a fifth driving situation of the first driving unit, which corresponds to the first branch driving unit A2And a first branch driving unit A4The two first coil groups 21 are not electrified; corresponding to the first branch driving unit A1And a first branch driving unit A3The two first coil sets 21 are provided with currents in opposite directions, and the provided currents can enable the first branchDrive unit A1And a first branch driving unit A3The first ring 10 is driven to generate a relative displacement along the positive direction or the negative direction of the Z axis relative to the second ring 20, namely, the first branch driving unit A1And a first branch driving unit A3The direction of the relative displacement generated by driving the first ring 10 is opposite, and the first ring 10 can generate the clockwise or counterclockwise relative displacement in the Ry direction relative to the second ring 20. Corresponding to the first branch driving unit A1And a first branch driving unit A3The directions of the currents led into the two first coil groups 21 are opposite, wherein the a-phase input current of the first group three-phase coil of one first coil group 21 is preferably IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000152
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000153
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000154
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000155
t is the energization time. Then the a-phase input current of the first set of three-phase coils of the other first coil set 21 is preferably-IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000156
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000157
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000158
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000159
t is the energization time.
In other embodiments, the number of the first branch driving units may be adaptively adjusted, and the position of each first branch driving unit may also be adaptively adjusted according to the requirement of the number of degrees of freedom of the magnetic levitation rotation device, which is not limited herein. The current flowing through each first coil set 21 is not limited to the above-mentioned relational expression, and is not limited herein.
It will be understood that the magnetization direction of the second N magnet 31 is opposite to the magnetization direction of the second S magnet 32, specifically, the magnetization direction of the second N magnet 31 is directed toward the coil, i.e., radially outward of the first ring 10, and the magnetization direction of the second S magnet 32 is directed away from the coil, i.e., radially inward of the first ring 10. It can be understood that, for the second N magnet 31, the S pole is the side of the second N magnet 31 facing the first ring 10 in the radial direction of the first ring 10, and the N pole is the side of the second N magnet 31 facing away from the first ring 10 in the radial direction of the first ring 10. For the second S magnet 32, the S pole is a side of the second S magnet 32 facing away from the first ring 10 in the radial direction of the first ring 10, and the N pole is a side of the second S magnet 32 facing toward the first ring 10 in the radial direction of the first ring 10. As shown in fig. 1, 2 and 4, preferably, the second N magnets 31 and the second S magnets 32 are uniformly distributed at intervals along the circumferential direction of the first ring 10, so that the magnetic field received by the second coil array 4 is relatively uniform, a magnetic field is ensured to be arranged in the circumferential direction of the second driving unit, the first ring 10 and the second ring 20 can be relatively displaced at any position of the circumference, and the functionality of the device is ensured. The magnetization directions of the second N magnet 31 and the second S magnet 32 have been indicated using arrows as in fig. 2 and 4.
In the present embodiment, the second N magnets 31 and the second S magnets 32 are alternately arranged at intervals, and twenty second N magnets 31 and twenty second S magnets 32 are arranged along the circumferential direction of the first ring 10. In other embodiments, the second N magnet 31 and the second S magnet 32 may be attached to each other, and the number of the second N magnet 31 and the number of the second S magnet 32 may be adjusted, which is not limited herein, but it should be noted that the number of the second N magnet 31 and the number of the second S magnet 32 are required to be equal, and the number relationship between the second N magnet 31, the second S magnet 32 and the second coil group 41 is usually adjusted according to the practical application requirement.
Specifically, in the second driving unit of the present embodiment, the second coil array 4 includes four second coil groups 41 uniformly distributed along the circumferential direction of the second ring 20, and each second coil group 41 is electrically connected to one second power amplifier. The current flowing through each second coil assembly 41 is controlled by different second power amplifiers, so that the second driving unit is divided into four second branch driving units, and the four second branch driving units can drive the first ring 10 and the second ring 20 to generate relative axial linear movement or axial rotation, thereby increasing the degree of freedom of the first ring 10, improving the practicability of the magnetic levitation device and enlarging the application range. In other embodiments, the number of the second coil sets 41 in the second coil array 4 can be adjusted, preferably an even number between 2 and 16, and the positions of the second coil sets 41 can be arranged according to the requirement of the degree of freedom of the magnetic levitation rotation device, and are not limited to being symmetrically arranged with the Z-axis as the central axis, and are not limited herein. In other embodiments, the second power amplifier and the second coil assembly 41 may not be correspondingly connected, and may be adjusted according to the requirement of the degree of freedom, which is not limited herein.
As shown in fig. 10 to 12, in the present embodiment, the four second branch driving units are respectively the second branch driving units B1A second branch driving unit B2A second branch driving unit B3And a second branch drive unit B4Are respectively marked as B in the figure1、B2、B3And B4The four second branch driving units are respectively corresponding to the four second coil groups 41 one by one. Wherein the second branch driving unit B1A second branch driving unit B2A second branch driving unit B3And a second branch drive unit B4Respectively in the positive X-axis direction, the negative Y-axis direction, the negative X-axis direction and the positive Y-axis direction. And the currents input into the four second branch driving units are respectively controlled by four second power amplifiers, and by changing the current magnitude and direction of the three alternating-current coils of the second group of three-phase coils in each second coil group 41, each second branch driving unit can drive the first ring 10 and the second ring 20 to move relatively in X, Y and Rz directions, so that the second driving unit can enable the first ring 10 to obtain relative displacement with the second ring 20 with three degrees of freedom in X, Y and Rz directions.
Wherein:
as shown in fig. 10, a first driving condition of the second driving unit is shown, in which the currents in the same direction are conducted in the four second coil groups 41, and the conducted currents can make the second branch driving unit B1A second branch driving unit B2A second branch driving unit B3And a second branch drive unit B4Simultaneously driving the first ring 10 to generate clockwise or counterclockwise relative displacement along Rz direction relative to the second ring 20, i.e. the second branch driving unit B1A second branch driving unit B2A second branch driving unit B3And a second branch drive unit B4The direction of the relative displacement generated by driving the first ring 10 is the same, and the first ring 10 can generate the relative displacement along Rz direction and clockwise or counterclockwise around the Z axis with respect to the second ring 20. The currents led into the four groups of second coil groups 41 are the same, and the a-phase input current in the second group of three-phase coils in each group of second coil groups 41 is preferably IfX sin ω t, wherein IfIs the maximum current value, omega is the angular frequency of the current, the initial phase is 0, t is the energizing time, and the corresponding B-phase input current is
Figure BDA0002945717990000181
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000182
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000183
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000184
t is the energization time.
FIG. 11 shows a second driving situation of the second driving unit, which corresponds to the second branch driving unit B2And a second branch drive unit B4The two second coil groups 41 are not electrified with current; corresponding second branch driving unit B1And a second branch drive unit B3The two second coil groups 41 are supplied with currents in opposite directions, and the supplied currents can enable the second branch driving unit B to drive the second branch driving unit B1And a second branch drive unit B3Simultaneously, the first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the X axis relative to the second ring 20, i.e. the second branch driving unit B1And a second branch drive unit B3The direction of the relative displacement generated by driving the first ring 10 is the same, and the first ring 10 can generate the relative displacement along the X direction relative to the second ring 20. Corresponding second branch driving unit B1And a second branch drive unit B3The directions of the currents conducted in the two second coil groups 41 are opposite, wherein the a-phase input current in the second three-phase coil group in one second coil group 41 is preferably
Figure BDA0002945717990000185
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000186
t is the power-on time, the corresponding B-phase input current is
Figure BDA0002945717990000187
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000191
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000192
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000193
t is the energization time. Then the a-phase input current in the second set of three-phase coils in the other second coil set 41 is preferably
Figure BDA0002945717990000194
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000195
t is the power-on time, the corresponding B-phase input current is
Figure BDA0002945717990000196
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000197
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000198
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000199
t is the energization time.
FIG. 12 shows a third driving situation of the second driving unit, which corresponds to the second branch driving unit B1And a firstTwo-branch driving unit B3The two second coil groups 41 are not electrified with current; corresponding second branch driving unit B2And a second branch drive unit B4The two second coil groups 41 are supplied with currents in opposite directions, and the supplied currents can enable the second branch driving unit B to drive the second branch driving unit B2And a second branch drive unit B4Simultaneously, the first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the Y axis relative to the second ring 20, i.e. the second branch driving unit B2And a second branch drive unit B4The direction of the relative displacement generated by driving the first ring 10 is the same, and the first ring 10 can generate the relative displacement along the Y direction relative to the second ring 20. Corresponding second branch driving unit B2And a second branch drive unit B4The directions of the currents conducted in the two second coil groups 41 are opposite, wherein the a-phase input current in the second three-phase coil group in one second coil group 41 is preferably
Figure BDA00029457179900001910
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA00029457179900001911
t is the power-on time, the corresponding B-phase input current is
Figure BDA00029457179900001912
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000201
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000202
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000203
t is the energization time. Then another one isThe a-phase input current in the second group of three-phase coils in the two-coil group 41 is preferably
Figure BDA0002945717990000204
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000205
t is the power-on time, the corresponding B-phase input current is
Figure BDA0002945717990000206
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000207
t is the energizing time, and the corresponding C-phase input current is
Figure BDA0002945717990000208
Wherein IfIs the maximum value of the current, omega is the angular frequency of the current, and the initial phase is
Figure BDA0002945717990000209
t is the energization time.
In other embodiments, the number of the second branch driving units may be adaptively adjusted, and the position of each second branch driving unit may also be adaptively adjusted according to the requirement of the number of degrees of freedom of the magnetic levitation rotation device, which is not limited herein. The current flowing through each second coil assembly 41 is not limited to the above-mentioned relational expression, and is not limited herein.
It can be understood that the first driving unit and the second driving unit in this embodiment can work together, that is, the first coil array 2 includes four first coil groups 21 uniformly distributed along the circumferential direction of the second ring 20, and the second coil array 4 includes four second coil groups 41 uniformly distributed along the circumferential direction of the second ring 20, so that the first ring 10 in the magnetic levitation rotation apparatus has a relative displacement with six degrees of freedom with respect to the second ring 20.
When the first ring 10 needs to generate relative displacement with the second ring 20 in the X-axis direction, current can be simultaneously applied to the first driving unit and the second driving unit, so that the first driving unit is in a second driving condition, the second driving unit is also in the second driving condition, and the first driving unit and the second driving unit jointly drive the first ring 10 to generate displacement in the X-axis direction relative to the second ring 20; the current can be only led into the first driving unit, and the current is not led into the second driving unit, at this time, the first driving unit is in the second driving condition, and can also drive the first ring 10 to generate the displacement in the X-axis direction relative to the second ring 20; the current may be only supplied to the second driving unit, but not to the first driving unit, and at this time, the second driving unit is in the second driving condition, and can also drive the first ring 10 to generate the displacement in the X-axis direction relative to the second ring 20.
When the first ring 10 needs to generate a relative displacement in the Y-axis direction with the second ring 20, current can be simultaneously applied to the first driving unit and the second driving unit, so that the first driving unit is in a third driving condition, the second driving unit is also in a third driving condition, and the first driving unit and the second driving unit jointly drive the first ring 10 to generate a displacement in the Y-axis direction with respect to the second ring 20; the current can be only led into the first driving unit, and the current is not led into the second driving unit, at this time, the first driving unit is in the third driving condition, and can also drive the first ring 10 to generate the displacement in the Y-axis direction relative to the second ring 20; the current may be only supplied to the second driving unit, but not to the first driving unit, and at this time, the second driving unit is in the third driving condition, and can also drive the first ring 10 to generate the Y-axis displacement relative to the second ring 20.
When the first ring 10 needs to generate a relative displacement in the Z-axis direction with the second ring 20, a current may be applied to the first driving unit only, so that the first driving unit is in the first driving condition, and the first driving unit drives the first ring 10 to generate a displacement in the Z-axis direction with respect to the second ring 20.
When the first ring 10 needs to generate a relative displacement in the Rx direction with the second ring 20, the current may be applied to the first driving unit only, so that the first driving unit is in the fourth driving condition, and the first driving unit drives the first ring 10 to generate a rotational displacement in the Rx direction with respect to the second ring 20.
When the first ring 10 needs to generate relative displacement in the Ry direction with the second ring 20, current may be applied to the first driving unit only, so that the first driving unit is in the fifth driving condition, and the first driving unit drives the first ring 10 to generate rotational displacement in the Ry direction with respect to the second ring 20.
When the first ring 10 needs to generate a relative displacement in the Rz direction with the second ring 20, the current can be applied to the second driving unit only, so that the second driving unit is in the first driving condition, and the second driving unit drives the first ring 10 to generate a rotational displacement in the Rz direction with respect to the second ring 20.
Further, when it is necessary to realize linear movement in an arbitrary direction in the XY plane, the first branch driving unit A in the first driving unit1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4Or a second branch drive unit B of the second drive unit1And a second branch driving unit B3A second branch driving unit B2And a second branch driving unit B4Can be energized simultaneously, or first branch drive unit A1The first branch driving unit A2The first branch driving unit A3And a first branch driving unit A4A second branch driving unit B1And a second branch driving unit B3A second branch driving unit B2And a second branch driving unit B4The power can be simultaneously electrified, the magnitude and the direction of the current are adjusted, so that the magnitude of the force generated in the combination of the two branch driving units is adjusted, and the linear movement in any direction in an XY plane can be realized. It is understood that the XY plane is a plane perpendicular to the Z axis.
Preferably, a first bonding layer is arranged between the first magnet array 1 and the first ring 10, a second bonding layer is arranged between the second magnet array 3 and the first ring 10, and the first magnet array 1 and the second magnet array 3 are bonded on the first ring 10 through glue, so that the structure of the first ring 10 can be simplified, the cost is reduced, and the firm connection degree between the first magnet array 1 and the first ring 10 and the firm connection degree between the second magnet array 3 and the first ring 10 can be ensured. In other embodiments, a plurality of magnet pits are further recessed in the outer wall of the first ring 10, and the magnets in the first magnet array 1 and the second magnet array 3 are correspondingly disposed in the magnet pits, so as to facilitate the positioning of the first magnet array 1 and the second magnet array 3 during installation. The number of the magnet pits can be the same as the total number of the magnets in the first magnet array 1 and the second magnet array 3, so that the magnets in the first magnet array 1 and the second magnet array 3 are fixed in the magnet pits in a one-to-one correspondence manner; the number of the magnet pits can be different from the total number of the magnets in the first magnet array 1 and the second magnet array 3, so that the processing process of the first ring 10 is simplified.
Preferably, a third adhesive layer is disposed between the first coil array 2 and the second coil ring 20, and a fourth adhesive layer is disposed between the second coil array 4 and the second coil ring 20. Bond first coil array 2 and second coil array 4 on second circle ring 20 through gluing, can simplify the structure of second circle ring 20, the cost is reduced can guarantee the firm in connection degree between first coil array 2 and second coil array 4 and the second circle ring 20 again. In other embodiments, the inner wall of the second ring 20 may further have a plurality of coil protruding columns, and the coils in the first coil array 2 and the coils in the second coil array 4 are all disposed on the coil protruding columns in a one-to-one correspondence manner, so as to facilitate positioning of the first coil array 2 and the second coil array 4 during installation. The number of the coil convex columns can be the same as the total number of the coils in the first coil array 2 and the second coil array 4, so that the coils in the first coil array 2 and the second coil array 4 are fixed in the coil convex columns in a one-to-one correspondence manner; the number of the coil convex columns can be different from the total number of the coils in the first coil array 2 and the second coil array 4, so that the processing process of the second ring 20 is simplified.
Example two
The structure of the first driving unit in this embodiment is the same as that of the first embodiment, except that the structure in the second magnet array 3 in the second driving unit on the magnetic levitation rotation device is different. Preferably, the second magnet array 3 further comprises a second H magnet (not shown in the figure). The second H magnet is located between the second S magnet 32 and the second N magnet 31, and the magnetization direction of the second H magnet is directed from the second S magnet 32 to the second N magnet 31, specifically, from the S pole of the second S magnet 32 to the N pole of the second N magnet 31, so that the second S magnet 32, the second H magnet, and the second N magnet 31 form a halbach array to enhance the magnetic field strength of the side of the second magnet array 3 close to the second coil array 4. It will be appreciated that for the second H magnet, the S pole is the side of the second H magnet facing the second S magnet 32 and the N pole is the side of the second H magnet facing the second N magnet 31. The magnets in the second magnet array 3 are arranged into the Halbach array, so that the magnetic field intensity of the second magnet array 3 is improved, the magnetic field intensity of the second coil array 4 is also improved, and the functionality of the magnetic suspension device is ensured.
EXAMPLE III
In this embodiment, the first driving unit and the second driving unit have the same structure as the first embodiment, except that the number of the first driving unit and the second driving unit on the magnetic levitation rotation device is different. Preferably, at least two first driving units and/or at least two second driving units are arranged on the magnetic levitation rotating device, and the first driving units and the second driving units are alternately arranged along the axial direction of the first ring 10. In the present embodiment, as shown in fig. 13, two second driving units are provided, one first driving unit is provided, two second driving units and one first driving unit are provided along the axial direction of the first ring 10, and the first driving unit is disposed between the two second driving units, which improves the acceleration of the first ring 10 in the direction of the degree of freedom that the second driving unit can realize, that is, when it is necessary to move a fixed distance in the X and Y directions or rotate a fixed angle around the Rz direction, the time taken by the first ring 10 in the present embodiment is shorter.
Example four
The first driving unit and the second driving unit in this embodiment have the same structure as that in this embodiment, except that the number of the first driving unit and the second driving unit on the magnetic levitation rotation device is different. In the present embodiment, as shown in fig. 14, the first driving unit is provided in two, the second driving unit is provided in one, two first driving units and one second driving unit are provided along the axial direction of the first ring 10, and the second driving unit is disposed between the two first driving units, which improves the acceleration of the first ring 10 in the direction of the degree of freedom that the first driving unit can achieve, i.e., when it is necessary to move a fixed distance in the X, Y and Z directions or rotate a fixed angle around the Rx and Ry directions, the time taken by the first ring 10 in the present embodiment is shorter.
Similarly, the number of the first driving units and the number of the second driving units may also be two, and the first driving units and the second driving units are alternately arranged along the axial direction of the first ring 10. In addition, the number of the first driving unit and the second driving unit may also be changed according to actual requirements, and is not limited herein.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (10)

1. A magnetic levitation rotation apparatus, comprising:
a first ring (10);
the second ring (20) is coaxially arranged with the first ring (10), and the second ring (20) and the first ring (10) are arranged at intervals along the radial direction;
a first drive unit comprising a first magnet array (1) and a first coil array (2) arranged oppositely, the first magnet array (1) is arranged on the first ring (10), the first coil array (2) is arranged on the second ring (20), the first magnet array (1) comprises a plurality of first N magnets (11) and first S magnets (12) which are alternately arranged along the axial direction of the first ring (10), and the magnetization directions of the magnets in the first magnet array (1) on the same plane perpendicular to the axis of the first ring (10) are the same, the first coil array (2) comprises at least two first coil groups (21) arranged along the circumferential direction of the second ring (20), and each first coil group (21) comprises at least one first group of three-phase coils arranged along the axial direction of the first ring (10);
a second driving unit, which comprises a second magnet array (3) and a second coil array (4) that are oppositely arranged, wherein the second magnet array (3) is arranged on the first ring (10), the second coil array (4) is arranged on the second ring (20), the second magnet array (3) comprises a plurality of second N magnets (31) and second S magnets (32) that are alternately arranged along the circumferential direction of the first ring (10), the second coil array (4) comprises at least two second coil groups (41) that are arranged along the circumferential direction of the second ring (20), and each second coil group (41) comprises at least one second group of three-phase coils that are arranged along the circumferential direction of the second ring (20); and the first driving unit and the second driving unit are arranged at intervals along the axial direction of the first ring (10).
2. A magnetic levitation rotation device according to claim 1, wherein each first N magnet (11) is annular and coaxial with the first ring (20), and each first S magnet (12) is annular and coaxial with the first ring (20).
3. The magnetic levitation rotation device according to claim 1, wherein the second N magnet (31) and the second S magnet (32) are uniformly distributed at intervals along the circumference of the first ring (10).
4. The magnetic levitation rotation device according to claim 1, wherein the first coil array (2) comprises four first coil groups (21) uniformly distributed along the circumference of the second ring (20), and each first coil group (21) is electrically connected with a first power amplifier.
5. The magnetic levitation rotation device according to claim 1, wherein the second coil array (4) comprises four second coil groups (41) uniformly distributed along the circumference of the second ring (20), and each second coil group (41) is electrically connected with a second power amplifier.
6. The magnetic levitation rotation device according to claim 1, wherein a first adhesive layer is arranged between the first magnet array (1) and the first ring (10), and a second adhesive layer is arranged between the second magnet array (3) and the first ring (10).
7. The magnetic levitation rotation device according to claim 1, wherein a third adhesive layer is arranged between the first coil array (2) and the second coil ring (20), and a fourth adhesive layer is arranged between the second coil array (4) and the second coil ring (20).
8. The magnetic levitation rotation device according to any one of claims 1-7, characterized in that the first magnet array (1) further comprises a first H magnet (13), the first H magnet (13) being located between the first S magnet (12) and the first N magnet (11), and the magnetization direction of the first H magnet (13) being directed from the first S magnet (12) to the first N magnet (11), such that the first S magnet (12), the first H magnet (13) and the first N magnet (11) form a Halbach array.
9. The magnetic levitation rotation device according to any one of claims 1-7, wherein the second magnet array (3) further comprises a second H magnet located between the second S magnet (32) and the second N magnet (31), and the magnetization direction of the second H magnet is directed from the second S magnet (32) to the second N magnet (31) such that the second S magnet (32), the second H magnet and the second N magnet (31) form a Halbach array.
10. The magnetic levitation rotation device according to any one of claims 1-7, characterized in that at least two first drive units and/or second drive units are provided, and the first drive units and the second drive units are arranged alternately in the axial direction of the first ring (10).
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