JP2010156418A - Collective magnet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize manufacture of a collective magnet 1 having strong magnetic force by suitably combining conventional permanent magnets 10 and magnetic substances 11 such as iron pieces; to provide a magnet with strong magnetic force while reducing usage of magnetic material along with the above; and to provide a magnet coupling using the collective magnet. <P>SOLUTION: A magnetic substance 11A provided with a magnetic force induction part 13A projecting to an optional direction in order to introduce magnetic force generated from the permanent magnets 10 is clipped between at least two permanent magnets 10 with their mutually repulsive polarities facing to each other, and is further clipped between magnetic substances 11B provided with magnetic force induction parts 13B in the same direction of the magnetic substance 11A from the outside of the permanent magnets 10 to be composed in a sinking comb-like manner. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention constitutes a magnet with an apparently strong magnetic force by inducing the magnetic force of a permanent magnet with a magnetic material, and particularly relates to adaptation to a non-contact type power transmission device and a magnetic bearing.

  In the manufacture of semiconductors, liquid crystals, etc., there is an operation process in which a thin film of photoresist is formed on the surface of a substrate such as a semiconductor wafer or a glass plate, or the surface is washed or dried. An apparatus such as a spin coater that rotates the substrate at high speed is used. Here, substrate processing of semiconductors and the like is performed in a clean room, and it is extremely important to suppress the mixing of impurities and increase the yield of substrate processing.

  However, since it is necessary to rotate the spin coater, a driving device and a seal material (bearing or the like) are required, and fine foreign matters are generated from the portion, thereby contaminating a clean environment in which the substrate processing is performed. There is a problem that this contamination cannot be completely prevented and the quality of the substrate after processing is reduced.

  In view of this, an invention of a spin coater that does not have a sealing material using superconductivity shown in FIG. 10 has been proposed (see, for example, Patent Document 1). The spin coater 40 shown in FIG. 10 includes a floating mechanism for floating the rotary head unit 48 and a rotating mechanism for rotating the rotary head unit 48.

  The levitation mechanism is composed of a levitation permanent magnet 50 and a superconductor 43 installed on the lower surface of the rotary head portion 48. The superconductor 43 is cooled by a coolant 44 and exhibits a pinning effect. The levitating permanent magnet 50 is levitated. With this effect, the rotary head unit 46 floats from the support base 47 while being stored in the sealed container 45.

  The rotating mechanism includes a rotating permanent magnet 41 installed on the lower surface of the rotating head portion 46 and a rotating permanent magnet 41 installed on the motor 42, and transmits the rotating force to the floating rotating head portion 46 via magnetic force. It constitutes a magnetic coupling.

  FIG. 11 is a schematic view showing the functions of the levitation mechanism and the rotation mechanism. The rotation head portion 46 is a magnetic flux of the levitation permanent magnet 50 installed in the rotation head portion 48 due to the pinning effect of the superconductor 43. 49 is held and is configured to maintain the height of the distance d shown in FIG.

  Further, the rotating mechanism rotates the rotating permanent magnet 41 in which the permanent magnets are arranged in a ring shape so that the polarities are alternately adjacent to each other by the motor 42, thereby allowing the rotating permanent magnet 41 to pass through the magnetic flux 49 of the rotating permanent magnet 41. The rotational force is transmitted to the rotary head portion 48.

  As described above, according to the invention described in Patent Document 1, the rotary head portion is accommodated in the sealed container, and the rotary head portion is lifted using the magnetic force from the outside of the sealed container so as to transmit the rotational force. By comprising, the location (for example, rotating parts, such as a bearing and a motor) where a fine particle foreign material generate | occur | produces can be installed out of an airtight container. According to the invention configured as described above, the rotary head unit installed in the sealed container can be rotated and operated in a non-contact state from the outside of the sealed container.

In addition, the floating position of the rotating head can be maintained by using the second type superconductor. The type 2 superconductor refers to a material in which superconducting and normal conducting parts begin to coexist within the material when the strength of the magnetic field exceeds a certain value, and an external magnetic flux passing through the type 2 superconductor. However, it is possible to maintain the rotating position of the rotary head portion by a magnetic pinning force which is a restoring force generated by being held in a normal conducting portion inside the material.

Furthermore, when transmitting the rotational force to the rotating head, non-contact power transmission is realized by using a magnet coupling using a permanent magnet. For this reason, there is almost no need for maintenance and repair because there is no drive part in the rotating head in the sealed container, and thin film formation can be performed while maintaining a clean environment in the sealed container. The quality of an object to be processed such as a wafer can be improved.
JP 2007-160282 A

  However, when using a magnetic coupling in the spin coater described in Patent Document 1, the transmittable rotational force tends to be smaller than when rotating by a motor directly connected by a shaft or the like. In particular, since the rotary head portion 46 floats in the sealed container 45 by superconductivity, there is a problem that the distance d between the opposing permanent magnets 41 for rotation becomes longer and the transmittable rotational force becomes smaller.

  In order to increase the transmittable rotational force as shown in FIG. 11, it is necessary to increase the density of the magnetic flux 49 generated between the opposing rotating permanent magnets 41. Here, when considering increasing the attractive force between the rotating permanent magnets 41 by using a large permanent magnet and increasing the transmittable rotational force, the size of the permanent magnet increases to increase the rotation head portion 46 overall. There is a possibility of a vicious circle that increases the weight and the rotational force required to rotate. Similarly, when considering the use of an electromagnet, the density of the magnetic flux 49 is increased by using a large amount of electric power. However, since it is impossible to use an electromagnet on the rotating head portion 46 side, in practice, it is not possible to obtain so many effects.

  Moreover, as magnets used for industrial purposes such as automobile hybrid motors and mobile phones, neodymium magnets that are small but have a strong magnetic force are often used. Minerals called rare earths, such as neodymium, dysprosium, and terbium, which are the raw materials for this neodymium magnet, are said to be unevenly distributed in China and India, and the necessary amount for use in many industrial products is obtained. It is difficult to do so, and it is thought that the trend will become stronger in the future.

  The present invention has been made to solve the above-described problems, and its object is to realize the production of a collective magnet having a strong magnetic force by appropriately combining a conventional permanent magnet and a magnetic material such as an iron piece. Accordingly, a magnet having a strong magnetic force is provided while reducing the amount of magnet raw material used. Furthermore, it aims at providing the magnet coupling using the said collective magnet.

  The present invention was obtained as a result in the process of developing a new technology related to JST's consignment development issue “Spin Processing Device for Superconductor Utilization Semiconductor Manufacturing”.

  The collective magnet according to the present invention for achieving the above object is provided in any one direction in order to induce a magnetic force generated from the permanent magnet between at least two permanent magnets having opposite polarities facing each other. It is characterized by sandwiching a magnetic body provided with a protruding magnetic force induction part and sandwiching and fixing with a magnetic body provided with a magnetic induction part in the same direction as the magnetic body from the outside of the permanent magnet. To do.

  In order to achieve the above object, a non-contact power transmission device according to the present invention is configured such that the collective magnets having a magnetic force induction portion of the magnetic body as an upper surface are arranged uniformly on a circular plate in a circumferential shape, It is characterized in that a disk and a collective magnet configured in the same manner as the disk are installed so as to face each other in a magnetically levitated state with their centers aligned.

  In the above non-contact power transmission device, a plurality of permanent magnets and magnetic bodies are combined and fixed in a ring shape on the disc, and the plurality of permanent magnets are arranged so that the surfaces of the repulsive polarities face each other, The magnetic body is provided with a magnetic force induction portion at an upper portion thereof, configured to induce a magnetic force at an upper portion of the disk, and configured so that the disks face each other.

  In order to achieve the above object, a magnetic bearing according to the present invention includes a plurality of the collective magnets arranged around a shaft so that permanent magnets and magnetic bodies are alternately arranged in the rotation direction of the shaft, The bearing provided with the said magnet is installed in the position which opposes the said magnet on the outer periphery of this.

  In the magnetic bearing described above, the permanent magnets and magnetic bodies are fixed around the shaft so that the magnets are alternately arranged in the rotation direction of the shaft, and the permanent magnets are arranged so that the surfaces having opposite polarities face each other, The magnetic body is provided with a magnetic force guiding portion in the outer peripheral direction of the shaft, and is fixed in a bearing supporting the shaft so that permanent magnets and magnetic bodies are alternately arranged in the rotation direction of the bearing, and the permanent magnets repel each other. The magnetic bodies are arranged so that the polar surfaces face each other, the magnetic body is provided with a magnetic force guiding portion in the center direction of the bearing, and the shaft is supported by the bearing in a non-contact manner.

  In the collective magnet, the non-contact power transmission device, and the magnetic bearing, an electromagnet is installed at the position of the permanent magnet.

The collective magnet configured as described above is formed in a comb-like shape, so that the magnetic force induced from the N pole to the magnetic force induction unit can be dissipated further, and the magnetic force dissipated further away. Is induced to the south pole from a magnetic force induction unit different from the above, it is possible to form a rapidly curved magnetic field as shown in FIG. A strong magnetic force can be obtained by flying this magnetic force far away and bending the magnetic field to increase the gradient of the magnetic field.

  By using the collective magnet 1 having a strong magnetic force, power can be transmitted even if the distance between the disks 22 and 23 of the non-contact power transmission device 20 as shown in FIG. 5 is increased. By forming and arranging the collective magnet 1 in a circular shape on the discs 22 and 23 of the non-contact power transmission device 20, it is possible to increase the torque generated between the discs 22 and 23, which is larger. Power can be transmitted without contact.

  When the magnetic bearing 21 as shown in FIG. 6 is formed, for example, even when a partition wall or the like is provided between the shaft 25 and the bearing 24, the collective magnet 1 has sufficient magnetic force to transmit sufficient power. It was possible. By changing the permanent magnet 10 of the collective magnet 1 to an electromagnet, an effect of generating power can be added regardless of whether it is in the form of FIGS. 5 and 6 or other linear motor cars. it can.

  Further, the collective magnet 1 makes it possible to suppress the amount of magnet raw material used to obtain the same magnetic force. As a result, the collective magnet 1 of the present invention can alleviate problems such as depletion of rare earth resources such as neodymium, dysprosium, and terbium, and rising prices.

When a large magnetic force is required, the size of the conventional magnet has been increased. However, according to the collective magnet 1 of the present invention, the size can be reduced. For example, by changing the magnet used for the linear motor car to the collective magnet 1 of the present invention, the vehicle body can be made lighter. Similarly, in a hybrid vehicle, the mounted motor can be lightly formed, the vehicle weight is reduced, fuel efficiency is expected to be improved, and the environmental load can be reduced.

  Hereinafter, an assembly magnet according to an embodiment of the present invention will be described with reference to the drawings.

(Gathering magnet structure)
FIG. 4 shows a collective magnet according to the present invention. Between permanent magnets 10 such as neodymium magnets, alnico magnets, and ferrite magnets that face each other with repulsive polarities, magnets such as iron pieces, cobalt, nickel, gadolinium, etc. The body 11 is sandwiched and fixed. Further, the magnetic body 11 is fixed so as to sandwich the permanent magnet 10 from both sides, thereby forming a comb-like aggregate magnet.

  Next, the principle of the collective magnet will be described. FIG. 3 shows the state of the magnetic flux 12 when the normal permanent magnet 10 is placed with the repulsive polarities facing each other. The magnetic fluxes 12 released from the north pole of the permanent magnet 10 are generated so that they collide with each other and spread to flow sideways and turn to return to the south pole.

  Here, even when the permanent magnet 10 and the magnetic body 11 such as an iron piece having the same length in the vertical direction in the figure are sandwiched and fixed between the permanent magnet 10 in FIG. 3, the path of the magnetic flux 12 to be formed does not change. Further, even when the same magnetic body 11 as described above is fixed to the outside of the permanent magnet 10, the shape of the magnetic flux 12 does not change.

  However, as shown in FIG. 4, the magnetic force guiding portion 13 is provided in any one direction (upward in FIG. 4) of the magnetic body 11, and the remaining directions (downward, frontward, and rearward in FIG. 4) are nonmagnetic. By constituting the body (for example, air), the magnetic flux 12 is guided to the magnetic force induction part 13 of the magnetic body 11.

  Magnetism has a property of being induced by a magnetic material when a magnetic material and a non-magnetic material are present in the surroundings. By utilizing this property, magnetism generated from the permanent magnet 10 is unidirectional (see FIG. 4), the density of the magnetic flux 12 can be increased. That is, it was realized that the magnetic force of the apparent magnet was strengthened by guiding the magnetic flux 12 generated uniformly around the permanent magnet 10 in one direction.

  Similarly, by fixing the magnetic body 11B to the outside of the permanent magnet 10, the magnetic flux 12 induced by the magnetic force induction portion 13A between the permanent magnets 10 is made permanent through the magnetic force induction portion 13B of the outer magnetic body 11B. By guiding to the south pole of the magnet 10, the magnetic flux density between the magnetic force guiding portion 13A and the magnetic force guiding portion 13B can be increased, and the collective magnet 1 having a strong apparent magnetic force of the entire element is realized. Further, the permanent magnet 10 can be replaced with an electromagnet to constitute the collective magnet 1.

(Principle of collective magnet)
As described above, by providing the magnetic body 11A with the magnetic force induction portion 13A, it is possible to induce the magnetism and fly away. Further, by constructing the magnetic body 11B so as to guide the magnetism blown to the south pole, the magnetic field lines drawn from the north pole to the south pole while drawing an elliptical shape draw a substantially rectangular shape as shown in FIG. Thus, the magnetic field is distorted. As the magnetic field is distorted, the gradient of the magnetic field increases, and as a result, the magnetic field becomes stronger. Equation 1 shows the relationship between the strength of magnetic force and the gradient.

  Here, Fα is the force [N], H is the magnetic field strength (A / m), and grandH indicates the gradient of the magnetic field. It can be seen that the force generated by the permanent magnet 10 is proportional to the gradient of the magnetic field.

(Manufacturing method of collective magnet)
The comb-shaped collective magnet 1 shown in FIG. 4 has a permanent magnet 10 and magnetic bodies 11A and 11B in contact with a hydraulic jack or the like, and has no magnetic influence on the permanent magnet 10 and the magnetic body 11 and is a non-magnetic body such as epoxy. It is manufactured by fixing the periphery with resin. Since the permanent magnets 10 face each other with repulsive polarities, a device for generating a force such as a hydraulic jack is required.

  Here, the collective magnet is configured by using the two permanent magnets 10 and the three magnetic bodies 11, but the present invention is not limited to this, and the number of the permanent magnets 10 is increased as necessary. It is possible. For example, when the four magnetic bodies 11 are fixed between the three permanent magnets 10 and at both ends, respectively, and configured in a comb shape, the same effect as that of the collective magnet 1 can be obtained.

  Furthermore, the permanent magnet 10 and the magnetic body 11 can be alternately arranged in a ring shape, and fixed with a non-magnetic body such as epoxy to constitute the collective magnet 1. At this time, it is necessary to fix the permanent magnet 10 so that the surfaces that repel each other face each other.

(Application to magnet coupling)
1 and 2 are schematic views when the magnet assembly 1 of the present invention is used as a magnet coupling facing each other.

  The upper magnet assembly 1 is arranged so that the N poles of the permanent magnet 10 face each other, with a magnetic body 11A sandwiched between them, and further with a magnetic body 11B sandwiched from both sides. Therefore, the magnetic force is guided to the magnetic force guiding portion 13A of the magnetic body 11A, and the magnetic force emitted from the magnetic force guiding portion 13A is guided to the magnetic force guiding portion 13B and reaches the S pole. At this time, the magnetic force lines are deformed from a normal radial shape to a shape close to a rectangle by the magnetic force induction unit 13, so that the magnetic force gradient is increased and the generated force is increased.

  Similarly, the lower collecting magnet 1 in FIG. 2 is configured to face the south poles. Here, you may use what comprised the lower magnet assembly 1 so that N pole might face each other like an upper part. In the case of the combination of the collective magnets 1 shown in FIG. 2, the upper and lower collective magnets 1 operate so that their centers (the positions of the magnetic bodies 11A) coincide with each other. When moved, the other collective magnet 1 acts to follow it.

(Application to disk-type magnet coupling)
FIG. 5 shows an embodiment when the collective magnet 1 of the present invention is applied to a disk-like non-contact power transmission device 20 (disk-type magnet coupling). Four collective magnets 1 are arranged circumferentially on a disc (power transmission side) 22 and a disc (power reception side) 23 so that the magnetic induction portions 13 face each other.

  Here, in a state where the disks 22 and 23 are brought close to each other, the disk (power transmission side) 22 is rotated by a rotational force given by a driving device (not shown). With the rotation of the rotated disk (power transmission side) 22, the movement of the collective magnet 1 starts, and the collective magnet 1 of the disk (power reception side) 22 follows the movement of the collective magnet 1. The disk (power receiving side) 23 is rotated by the magnetic force.

  Here, since the non-contact type drive transmission device 20 of the present invention has a stronger magnetic force than that using a conventional magnet, the rotational force transmitted even when the distance between the disks 22 and 23 is wide. Can be secured.

  For example, when applied to the spin coater 40 shown in FIG. 11, the density of the magnetic flux 49 generated by the rotating permanent magnet 41 installed in the motor 42 is increased, so that the distance d (air gap) from the rotating head portion 46 is increased. It becomes possible.

  Specifically, in the conventional spin coater 40, the air gap d allowed for transmitting the rotational force necessary for the rotary head portion 46 is about 1 mm, but by using the collective magnet 1 of the present invention, The allowable air gap d was 10 mm or more.

  Therefore, it is possible to transmit a sufficient rotational force to the rotating head portion 46 that is accommodated in the sealed container 45 shown in FIG. For example, when the weight of the rotary head portion 46 in the spin coater 40 is about 20 kg and the required number of rotations is 2000 rpm to 3000 rpm, it is possible to transmit the necessary rotational force by the collective magnet 1 of the present invention.

  Further, in FIG. 5, four collective magnets 1 are installed on each disc, but this number can be arbitrarily determined, and the permanent magnets 10 and the magnetic bodies 11 are alternately fixed in an annular shape. Thus, it is also possible to form an annular collective magnet 1 and use the annular collective magnet 1 on the discs 22 and 23, respectively.

(Application to bearing type magnetic coupling)
FIG. 6 shows an embodiment when the collective magnet 1 of the present invention is applied to a magnetic bearing 21 (bearing type magnet coupling). An annular collective magnet 1 formed by alternately fixing the permanent magnets 10 and the magnetic bodies 11 is installed on the outer peripheral side of the shaft 25 and the inner peripheral side of the bearing 24, respectively. The shaft 25 is fixed in space in a non-contact state at the center of the bearing 24 by magnetic force, and can rotate freely when a rotational force is applied from the outside.

  The magnetic bearing 21 can take a large distance (air gap) between the shaft 25 and the bearing 24 by using the collective magnet 1 of the present invention. Can be installed between the shaft 25 and the bearing 24, and the thickness of the isolation wall can be increased compared to the conventional one.

  Here, it is also possible to install a driving device on the shaft 25 or the bearing 24 so as to transmit the rotational force from one shaft to the other.

  Further, the magnetic bearing 21 can be configured by fixing a plurality of collective magnets 1 shown in FIG. 1 to the wall surfaces of the shaft 25 and the bearing 24 facing each other.

  Further, by changing the permanent magnet 10 of the collective magnet 1 used in the above-described disk-type and bearing-type magnet coupling to an electromagnet, it is possible to configure a rotation transmission device that does not require a drive device. It is also possible to configure so that the position of the collective magnet 1 to be controlled is actively controlled.

  That is, by controlling the polarity of one electromagnet of the magnet coupling 1 of the magnet coupling, power (rotational force) is generated like a linear motor car, or the voltage applied to the electromagnet of the magnet 1 is controlled. Thus, it is possible to generate and control a force in the horizontal direction so as to maintain the center position of the disks 22 and 23 or the shafts 24 and 25.

(Experimental result of magnet coupling)
FIG. 12 shows a graph of experimental results obtained by measuring the force acting on the magnetic coupling using the collective magnet 1 of the present invention. The experiment was performed by a device in which the non-contact power transmission device 20 in which the four magnets 1 shown in FIG. 5 are installed on the spin coater 40 shown in FIG.

The collective magnet 1 shown in FIG. 1 is used, the sizes are x = 40 mm, y = 20 mm, and z = 30 mm. In the rotary head unit 46 shown in FIG. 11, the collective magnet 1 is located at a position r _mc = 90 mm from the center. And the permanent magnet 50 for levitation is installed at the position of r _lpm = 170 mm, the position of r _tb = 200 mm is the end of the rotary head portion 46, and the mass of the rotary head portion 46 is 20 kg. .

  When the rotational speed is set to 2000 rpm, the length of the circumferential deviation (0ff-set) of the opposing collective magnet 1 and the circumferential force Fx generated between the collective magnets 1 (the receiving side tries to follow the power transmission side). FIG. 12 is a graph showing the relationship between the force to force) and the force Fy in the vertical direction (the force at which the disks 22 and 23 are about to separate or approach in the vertical direction). Since the circumferential force Fx, which is a rotational force, is maximized when the opposing collective magnet 1 is displaced by 10 mm, the disk (power receiving side) 23 is the disk (power transmitting side) 22 while maintaining this distance. Follow the rotation.

  Fy, which is an axial force, generates an attractive force when the opposing collective magnet 1 is in the state shown in FIG. This is because a magnetic force is induced from the magnetic force guiding portion 13A at the center of the upper magnet assembly 1 to the lower magnetic force guiding portion 13A. Similarly, when the upper and lower collective magnets 1 are both configured to emit magnetism from the central magnetic force guiding portion 13A, a repulsive force is generated.

  Moreover, as shown in FIGS. 7 to 9, the collective magnet can change the shape of the magnetic force guiding portion 13, and different performances can be brought out by this shape.

  As described above, according to the present invention, by appropriately combining a conventional permanent magnet and a magnetic material such as an iron piece, a magnet having a strong magnetic force can be manufactured. Can provide powerful magnets. Furthermore, it is possible to provide a magnet coupling capable of transmitting a large force using the collective magnet.

It is a perspective view of the collective magnet of this invention. It is the schematic which showed the path | route of the magnetic flux when the collective magnet of this invention was made to oppose. It is the schematic which showed the path | route of the magnetic flux of the permanent magnet made to oppose when not using a magnetic body. It is the schematic which showed the path | route of the magnetic flux in the collective magnet of this invention. It is the schematic which showed one example of the non-contact-type power transmission device using the collective magnet of this invention. It is the schematic which showed an example of the magnetic bearing using the collective magnet of this invention. It is the schematic which showed one example which changed the shape of the magnetic body in the collective magnet of this invention. It is the schematic which showed one example which changed the shape of the magnetic body in the collective magnet of this invention. It is the schematic which showed one example which changed the shape of the magnetic body in the collective magnet of this invention. It is a schematic diagram of a spin coater using superconductivity. It is the schematic which showed the path | route of the magnetic flux which acts on the spin coater using superconductivity. It is a graph of the experimental result which measured the force which acts on the magnet coupling in this invention.

Explanation of symbols

1 Collective magnet 10 Permanent magnet 11 Magnetic body (iron piece)
12 Magnetic flux 13 Magnetic induction part 20 Non-contact power transmission device 21 Magnetic bearing 22 Disk (power transmission side)
23 disc (power receiving side)
24 Bearing 25 Shaft 30 Collective magnet 31 Collective magnet 32 Collective magnet

Claims (8)

  The permanent magnet is sandwiched between at least two permanent magnets having opposite polarities facing each other and provided with a magnetic force guiding portion protruding in any one direction in order to induce a magnetic force generated from the permanent magnet. An assembled magnet comprising a comb-like structure sandwiched and fixed by a magnetic body provided with a magnetic force guiding portion in the same direction as the magnetic body from the outside.   The collective magnet with the magnetic force induction portion of the magnetic body as an upper surface is arranged on the disc evenly in a circumferential shape, and the disc and the collective magnet configured similarly to the disc are centered on each other and magnetically levitated A non-contact power transmission device characterized by being installed and configured to face each other.   A plurality of permanent magnets and magnetic bodies are combined and fixed in a ring shape on the disk, and the plurality of permanent magnets are arranged so that their repulsive polar surfaces face each other, and the magnetic body has a magnetic force induction portion on the top. The non-contact power transmission device according to claim 2, wherein the non-contact power transmission device is provided so as to induce a magnetic force in an upper part of the disk, and the disks are configured to face each other.   A plurality of the collective magnets are installed around the shaft so that permanent magnets and magnetic bodies are alternately arranged in the rotation direction of the shaft, and the collective magnet is disposed at a position facing the collective magnet on the outer periphery of the collective magnet. A magnetic bearing characterized by being installed as a bearing. Around the shaft, permanent magnets and magnetic bodies are fixed alternately in the rotation direction of the shaft, the permanent magnets are arranged so that the surfaces of the polarities that repel each other face each other, and the magnetic body has an outer periphery of the shaft A magnetic induction part in the direction,
In the bearing that supports the shaft, permanent magnets and magnetic bodies are fixed alternately in the rotation direction of the bearing, the permanent magnets are arranged so that the surfaces with opposite polarities face each other, and the magnetic body is The magnetic bearing according to claim 4, wherein a magnetic force guiding portion is provided in a center direction of the bearing, and the shaft is supported by the bearing in a non-contact manner.   The collective magnet according to claim 1, wherein an electromagnet is installed at a position of the permanent magnet.   The non-contact power transmission device according to claim 2, wherein an electromagnet is installed at a position of the permanent magnet.   The magnetic bearing according to claim 4, wherein an electromagnet is installed at a position of the permanent magnet.

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