CN112968559B - Magnetic levitation rotating device - Google Patents
Magnetic levitation rotating device Download PDFInfo
- Publication number
- CN112968559B CN112968559B CN202110194276.8A CN202110194276A CN112968559B CN 112968559 B CN112968559 B CN 112968559B CN 202110194276 A CN202110194276 A CN 202110194276A CN 112968559 B CN112968559 B CN 112968559B
- Authority
- CN
- China
- Prior art keywords
- ring
- coil
- magnet
- array
- driving unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
- H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
- H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
- H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Linear Motors (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention relates to the field of magnetic levitation devices, and discloses a magnetic levitation rotating device. The magnetic levitation rotating device comprises a first ring, a second ring, a first driving unit and a second driving unit. The second ring is coaxial with the first ring and is disposed at radial intervals. The first ring is provided with a first magnet array and a second magnet array. The second coil ring is provided with a first coil array and a second coil array. The first magnet array and the first coil array are respectively opposite to the second magnet array and the second coil array to form a first driving unit and a second driving unit. The first magnet array includes N, S magnets that alternate in the axial direction. The second magnet array includes N, S magnets alternating in the winding direction, and the first coil array includes a plurality of first coil groups in the winding direction, the first coil groups including first groups of three-phase coils arranged in the axial direction. The second coil array includes a plurality of second coil groups arranged in a circumferential direction, and the second coil groups include a second group of three-phase coils wound in an axial direction. The invention increases the degree of freedom of the device.
Description
Technical Field
The invention relates to the field of magnetic levitation devices, in particular to a magnetic levitation rotating device.
Background
Through half century development in the semiconductor industry, a mature industrial chain has been formed, and equipment required by each link in the semiconductor industrial chain is also relatively complicated, and heat treatment equipment in the manufacturing field mainly grows an oxide film on the surface of a silicon wafer in a heating environment to complete a furnace body of a heat treatment process such as doping or annealing. The Rapid Thermal Processing (RTP) technology realizes various processing techniques of very large scale integrated circuit wafers on the premise of improving the wafer throughput and reducing the throughput, and mainly comprises Rapid Thermal Annealing (RTA), rapid Thermal Cleaning (RTC), rapid Thermal Chemical Vapor Deposition (RTCVD), rapid Thermal Oxidation (RTO) and Rapid Thermal Nitridation (RTN).
The RTP equipment is internally provided with a rotating device and a heating cavity, the rotating device comprises a second ring and a first ring, the second ring and the first ring are coaxially arranged, the second ring is sleeved outside the first ring at intervals and is fixed with the RTP equipment, the heating cavity is also fixed with the RTP equipment, the second ring is arranged outside the heating cavity, the first ring is arranged inside the heating cavity, a wafer is arranged inside the heating cavity, the temperature in the cavity is usually about 1000 ℃, and the wafer is often fixed with the first ring so that the first ring can drive the wafer to rotate around a shaft for uniform heating. At present, rotating devices are generally classified into mechanical rotating devices and magnetic levitation rotating devices. The mechanical rotating device realizes the rotation of the first ring by means of the mechanical bearing, but the mechanical bearing can introduce impurity particles into the heating cavity to pollute the wafer, the structure is complex, the occupied volume is large, and the first ring is easy to generate eccentric phenomenon during rotation due to the fact that the matched structure is more. The first ring of the magnetic levitation rotating device is in a levitation state under the action of a magnetic field between the stator and the rotor, the first ring and the second ring are not connected, but only the degree of freedom of rotation of the first ring around the rotating shaft can be realized, the linear degree of freedom along the rotating shaft is avoided, and the lifting of the first ring is inconvenient, so that the magnetic levitation rotating device cannot be applied to some heat treatment processes, and is inconvenient for a manipulator to take a wafer, the practicability of the rotating device is reduced, the application range is narrowed, the processing procedures of the wafer are complicated, the number of devices is increased, and the cost is increased.
Based on this, a magnetic levitation rotating device is needed to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide a magnetic levitation rotating device, which avoids introducing impurity particles into a cavity between a second ring and a first ring, increases the degree of freedom of the magnetic levitation rotating device in linear movement along a rotating shaft, improves the practicability of the rotating device and expands the application range of the rotating device.
To achieve the purpose, the invention adopts the following technical scheme:
a magnetic levitation rotation device comprising:
a first ring;
the second ring is coaxially arranged with the first ring, and the second ring and the first ring are radially arranged at intervals;
the first driving unit comprises a first magnet array and a first coil array which are oppositely arranged, wherein the first magnet array is arranged on the first coil ring, the first coil array is arranged on the second coil ring, the first magnet array comprises a plurality of first N magnets and first S magnets which are alternately arranged along the axial direction of the first coil ring, the magnetization directions of the magnets in the first magnet array on the same plane perpendicular to the axis of the first coil ring are the same, the first coil array comprises at least two first coil groups which are circumferentially arranged along the second coil ring, and each first coil group comprises at least one first group of three-phase coils which are axially arranged along the first coil ring;
The second driving unit comprises a second magnet array and a second coil array which are oppositely arranged, the second magnet array is arranged on the first ring, the second coil array is arranged on the second ring, the second magnet array comprises a plurality of second N magnets and second S magnets which are alternately arranged along the circumferential direction of the first ring, the second coil array comprises at least two second coil groups which are arranged along the circumferential direction of the second ring, and each second coil group comprises at least one second group of three-phase coils which are arranged along the circumferential direction of the second ring; and the first driving unit and the second driving unit are arranged at intervals along the axial direction of the first annular ring.
Preferably, each of the first N magnets is annular and coaxial with the first ring, and each of the first S magnets is annular and coaxial with the first ring.
Preferably, the second N magnets and the second S magnets are uniformly distributed along the circumferential direction of the first ring at intervals.
Preferably, the first coil array includes four first coil groups uniformly distributed along the circumference of the second coil ring, and each first coil group is electrically connected with one first power amplifier.
Preferably, the second coil array includes four second coil groups uniformly distributed along the circumference of the second coil ring, and each second coil group is electrically connected with one second power amplifier.
Preferably, a first adhesive layer is arranged between the first magnet array and the first ring, and a second adhesive layer is arranged between the second magnet array and the first ring.
Preferably, a third adhesive layer is arranged between the first coil array and the second coil ring, and a fourth adhesive layer is arranged between the second coil array and the second coil ring.
Preferably, the first magnet array further comprises a first H-magnet located between the first S-magnet and the first N-magnet, and the magnetization direction of the first H-magnet is directed by the first S-magnet towards the first N-magnet, such that the first S-magnet, the first H-magnet and the first N-magnet form a halbach array.
Preferably, the second magnet array further comprises a second H-magnet, the second H-magnet being located between the second S-magnet and the second N-magnet, and the magnetization direction of the second H-magnet being directed by the second S-magnet towards the second N-magnet, such that the second S-magnet, the second H-magnet and the second N-magnet form a halbach array.
Preferably, at least two first driving units and/or at least two second driving units are provided, and the first driving units and the second driving units are alternately arranged along the axial direction of the first annular ring.
The invention has the beneficial effects that: in the first driving unit, after the first coil array is electrified, under the action of a magnetic field generated by the first coil array, the first magnet array can have a force along the axial direction of the rotor ring, namely, the rotor ring can move along the axial direction of the rotor ring. In the second driving unit, after the second coil array is electrified, under the action of a magnetic field generated by the second coil array, the second magnet array can have a torque rotating around the axial direction of the rotor ring, namely, the rotor ring can rotate around the axial direction of the rotor ring. The magnetic levitation rotating device provided by the embodiment realizes the relative rotation of the stator ring and the rotor ring, avoids the introduction of impurity particles into the cavity between the stator ring and the rotor ring by adopting a mechanical rotating structure, can enable the rotor ring to move along the direction of the rotating shaft, increases the degree of freedom of the magnetic levitation rotating device in linear movement along the rotating shaft, improves the practicability of the magnetic levitation rotating device, and expands the application range of the magnetic levitation rotating device.
Drawings
FIG. 1 is an exploded view of a magnetic levitation rotating device according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a magnetic levitation rotating device according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a first driving unit of a magnetic levitation rotation device according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a second driving unit of the magnetic levitation rotation device according to the first embodiment of the present invention;
FIG. 5 is a schematic diagram of a first driving situation of a first driving unit according to a first embodiment of the present invention;
FIG. 6 is a schematic diagram of a second driving situation of the first driving unit according to the first embodiment of the present invention;
fig. 7 is a schematic diagram of a third driving situation of the first driving unit according to the first embodiment of the present invention;
fig. 8 is a schematic diagram of a fourth driving situation of the first driving unit according to the first embodiment of the present invention;
fig. 9 is a schematic diagram of a fifth driving scenario of the first driving unit according to the first embodiment of the present invention;
fig. 10 is a schematic diagram of a first driving situation of a second driving unit according to a first embodiment of the present invention;
FIG. 11 is a schematic diagram of a second driving situation of a second driving unit according to a first embodiment of the present invention;
fig. 12 is a schematic diagram of a third driving situation of the second driving unit according to the first embodiment of the present invention;
Fig. 13 is a cross-sectional view of a magnetic levitation rotation device according to a third embodiment of the present invention;
fig. 14 is a cross-sectional view of a magnetic levitation rotating device according to a fourth embodiment of the present invention.
In the figure:
10. a first ring; 20. a second ring;
1. a first magnet array; 11. a first N magnet; 12. a first S magnet; 13. a first H magnet; 2. a first coil array; 21. a first coil group; 3. a second magnet array; 31. a second N magnet; 32. a second S magnet; 4. a second coil array; 41. and a second coil group.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
The technical scheme of the invention is further described below by the specific embodiments with reference to the accompanying drawings.
Example 1
At present, a mechanical rotating device has the defect that impurity particles are easy to introduce into a cavity between a second ring and a first ring, and a traditional magnetic levitation rotating device generally does not have the freedom degree of linear movement of a rotor along the direction of a rotating shaft.
The embodiment provides a magnetic levitation rotating device, can realize that second round ring and first round ring rotate relatively simultaneously, avoided introducing impurity particle to the cavity between second round ring and the first round ring again, can make the first round ring remove along the direction of pivot again, increased magnetic levitation rotating device along pivot rectilinear movement's degree of freedom, improved magnetic levitation rotating device's practicality, enlarged magnetic levitation rotating device's application scope.
Specifically, as shown in fig. 1 to 4, the magnetic levitation rotation device includes a first ring 10, a second ring 20, a first driving unit, and a second driving unit. The second ring 20 is arranged coaxially with the first ring 10, and the second ring 20 is arranged at a radial interval from the first ring 10. The first driving unit includes a first magnet array 1 and a first coil array 2 disposed opposite to each other, the first magnet array 1 is disposed on a first ring 10, the first coil array 2 is disposed on a second ring 20, the first magnet array 1 includes a plurality of first N magnets 11 and first S magnets 12 alternately arranged in an axial direction of the first ring 10, and magnetization directions of magnets in the first magnet array 1 on the same plane perpendicular to an axis of the first ring 10 are the same, the first coil array 2 includes at least two first coil groups 21 arranged in a circumferential direction of the second ring 20, each first coil group 21 includes at least one first group of three-phase coils arranged in an axial direction of the second ring 20, and each coil of each first group of three-phase coils is arranged in an axial direction of the second ring 20. Preferably, each coil of each first group of three-phase coils is identical in shape and takes a long flat shape. The second driving unit includes a second magnet array 3 and a second coil array 4 which are disposed opposite to each other, the second magnet array 3 being disposed on the first ring 10, the second coil array 4 being disposed on the second ring 20, the second magnet array 3 including a plurality of second N magnets 31 and second S magnets 32 alternately arranged in a circumferential direction of the first ring 10, the second coil array 4 including at least two second coil groups 41 arranged in a circumferential direction of the second ring 20, each second coil group 41 including at least one second group of three-phase coils arranged in a circumferential direction of the second ring 20; and the first driving unit and the second driving unit are disposed at intervals along the axial direction of the first ring 10. In the first driving unit, after the first coil array 2 is energized, the first magnet array 1 can be made to have a force in the axial direction of the first ring 10 by the magnetic field generated by the first coil array 2, that is, the first ring 10 can be moved in the axial direction of the first ring 10. In the second driving unit, after the second coil array 4 is energized, the second magnet array 3 can have a torque rotating around the axial direction of the first ring 10 under the action of the magnetic field generated by the second coil array 4, that is, the first ring 10 can rotate around the axial direction of the first ring 10. The magnetic levitation rotating device provided by the embodiment realizes the relative rotation of the second ring 20 and the first ring 10, avoids the risk that impurity particles are introduced into the cavity between the second ring 20 and the first ring 10 by adopting a mechanical rotating structure, and can enable the first ring 10 to move along the direction of the rotating shaft, so that the degree of freedom of the magnetic levitation rotating device in linear movement along the rotating shaft is increased, the practicability of the magnetic levitation rotating device is improved, and the application range of the magnetic levitation rotating device is enlarged.
For ease of understanding, an XYZ coordinate system is set in the figure, and X, Y directions are along the radial direction of the first ring 10, and Z directions are along the axial direction of the first ring 10, and directions of rotation about X, Y, Z axes are Rx, ry, and Rz directions, respectively. In this embodiment, three coils of a phase, B phase and C phase in the first set of three-phase coils are arranged equidistantly along the Z axis direction, wherein each coil strip is flat, and each first coil set 21 includes a set of first set of three-phase coils; the three coils of the a phase, the B phase and the C phase of the second group of three-phase coils are arranged along the Rz direction, and each second coil group 41 comprises two groups of second group of three-phase coils which are uniformly arranged along the Rz direction. In other embodiments, the number of first three-phase coils included in each first coil group 21 may be adjustable, preferably 1 to 10 groups; the number of second-group three-phase coils included in each second coil group 41 is also adjustable, preferably 1 to 6 groups.
In this embodiment, in order to facilitate the fixation of the magnetic levitation rotating device and avoid the winding of the circuit, the first ring 10 is used as the mover ring, the second ring 20 is used as the stator ring, the second ring 20 is sleeved outside the first ring 10 at intervals, the cavity wall of the heating cavity is arranged between the second ring 20 and the first ring 10, and the wafer is fixed on the first ring 10 through the mechanical switching device and is simultaneously arranged inside the heating cavity, so that the first ring 10 can drive the wafer to rotate. It will be appreciated that the first coil array 2 and the second coil array 4 are both disposed on the inner wall of the second ring 20, and the first magnet array 1 and the second magnet array 3 are both disposed on the outer wall of the first ring 10. In other embodiments, the first ring 10 may also be sleeved outside the second ring 20 at intervals, where the first coil array 2 and the second coil array 4 are both disposed on the outer wall of the second ring 20, and the first magnet array 1 and the second magnet array 3 are both disposed on the inner wall of the first ring 10, which is not limited herein.
Specifically, each first N magnet 11 is annular and coaxial with the first ring 10, and the first N magnets 11 may be integral or segmented; each of the first S-magnets 12 is annular and coaxial with the first ring 10, and the first S-magnets 12 may be integral or segmented. The annular magnet can ensure that magnetic fields are arranged on the circumferential direction of the first driving unit, so that the first driving unit can ensure that the first ring 10 and the second ring 20 generate relative axial linear displacement when the first ring 10 is at any circumferential position, and the functionality of the device is ensured. It will be appreciated that each first N magnet 11 and each first S magnet 12 are annular end to end in the Rz direction.
The first N magnet 11 and the first S magnet 12 in this embodiment are both segmented. As shown in fig. 2 and 3, each first N magnet 11 includes nine first N magnet segments arranged in the circumferential direction, i.e., the Rz direction, of the first ring 10, and each first S magnet 12 includes nine first S magnet segments arranged in the circumferential direction, i.e., the Rz direction, of the first ring 10, i.e., nine first N magnet segments in the same plane perpendicular to the axis of the first ring 10 are connected to form one first N magnet 11 in a ring shape around the Rz direction, and nine first S magnet segments in the same plane perpendicular to the axis of the first ring 10 are connected to form one first S magnet 12 in a ring shape around the Rz direction. The first N magnet 11 and the first S magnet 12 are arranged in a segmented mode, production and processing are facilitated, and production cost is reduced. In other embodiments, the number of the first magnet groups may be adjusted according to practical situations, which is not limited herein.
In this embodiment, the magnetization direction of the first N magnet 11 is opposite to the magnetization direction of the first S magnet 12, specifically, the magnetization direction of the first N magnet 11 points to the coil, i.e., radially outward of the first ring 10, and the magnetization direction of the first S magnet 12 points away from the coil, i.e., radially inward of the first ring 10. That is, for the first N magnets 11, S is the first N magnets 11 toward one side of the first annular ring 10 in the radial direction of the first annular ring 10, and N is the first N magnets 11 toward one side of the first annular ring 10 in the radial direction of the first annular ring 10. For the first S-magnet 12, S is the side of the first S-magnet 12 facing away from the first ring 10 in the radial direction of the first ring 10, and N is the side of the first S-magnet 12 facing toward the first ring 10 in the radial direction of the first ring 10.
Preferably, the first magnet array 1 further comprises a first H-magnet 13. The first H magnet 13 is located between the first S magnet 12 and the first N magnet 11, and the magnetization direction of the first H magnet 13 is directed from the first S magnet 12 to the first N magnet 11, specifically, from the S pole of the first S magnet 12 to the N pole of the first N magnet 11, so that the first S magnet 12, the first H magnet 13, and the first N magnet 11 form a Halbach Array (Halbach Array) to enhance the magnetic field strength of the first magnet Array 1 on the side close to the first coil Array 2. It will be appreciated that for the first H-magnets 13, S is the first H-magnets 13 facing one side of the first S-magnets 12 in the axial direction of the first annular ring 10, and N is the first H-magnets 13 facing one side of the first N-magnets 11 in the axial direction of the first annular ring 10. The magnetization directions of the first N magnet 11 and the first S magnet 12 have been marked with arrows in fig. 2. As described above, the magnetization direction of the magnets in the first magnet array 1 on the same plane perpendicular to the axis of the first ring 10 is the same, and the "magnets in the first magnet array 1 on the same plane perpendicular to the axis of the first ring 10" may be any one of the magnets in the first magnet array 1, for example, one of the first N magnet 11, the first S magnet 12, and the first H magnet 13.
In this embodiment, the magnets in the first magnet array 1 are arranged as halbach arrays, so that the magnetic field strength of the first magnet array 1 is improved, the magnetic field strength of the first coil array 2 is also improved, and the functionality of the magnetic levitation device is ensured. The first H-magnets 13 in the same plane perpendicular to the axis of the first ring 10 are also annular end to end along the circumferential direction of the first ring 10, and the first H-magnets 13 may be integral or segmented. In the present embodiment, the first H-magnet 13 includes nine first H-magnet segments, which are disposed between adjacent first N-magnet segments and first S-magnet segments, as the magnetization direction of the first H-magnet 13 has been marked with an arrow in fig. 2. In the present embodiment, each first magnet group includes four first H-magnet segments, two first N-magnet segments, and two first S-magnet segments, that is, the first magnet array 1 includes four first H-magnets 13, two first N-magnets 11, and two first S-magnets 12, which are arranged in an arrangement of H-N-H-S-H-N-H-S along the axial direction of the first ring 10. In other embodiments, the number of the various kinds of magnets in the first magnet array 1 may be adaptively adjusted, which is not limited herein. In addition, the first N magnet 11, the first S magnet 12, and the first H magnet 13 may also have an integrated ring structure.
Specifically, as shown in fig. 3, in the first driving unit of the present embodiment, the first coil array 2 includes four first coil groups 21 uniformly distributed along the circumferential direction of the second coil ring 20, each first coil group 21 is electrically connected with one first power amplifier, so that the current flowing in each first coil group 21 is controlled by different first power amplifiers, so that the first driving unit is divided into four first branch driving units, and the four first branch driving units can all drive the first coil ring 10 and the second coil ring 20 to generate relative displacement, thereby increasing the degrees of freedom of the first coil ring 10, improving the practicability of the magnetic levitation device, and expanding the application range. In other embodiments, the number of the first coil groups 21 in the first coil array 2 may be adjusted, preferably an even number between 2 and 16, and the plurality of first coil groups 21 may be arranged according to the degree of freedom, and not limited to the symmetrical arrangement with the Z axis as the central axis, but not limited thereto. In other embodiments, the first power amplifier and the first coil set 21 may be connected in a non-one-to-one correspondence, and may be adjusted according to the degree of freedom requirement, which is not limited herein.
As shown in fig. 5 to 9, in the present embodiment, four first branch driving units are respectively the first branch driving unit a 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 Labeled a in the figures respectively 1 、A 2 、A 3 And A 4 The four first branch driving units are respectively in one-to-one correspondence with the four first coil groups 21. Wherein the first branch driving unit A 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 Respectively in the positive X-axis direction, the negative Y-axis direction, the negative X-axis direction and the positive Y-axis direction. And the currents flowing in the four first branch driving units are controlled by the four first power amplifiers respectively, and each first branch driving unit can drive the first ring 10 and the second ring 20 to generate relative movement in the X-axis, Y-axis and Z-axis directions by changing the current magnitude and the direction of the three alternating current coils of the first group of three-phase coils in each first coil group 21, so that the first driving unit can enable the first ring 10 to obtain the relative displacement between the first ring 20 and the second ring 20 in five degrees of freedom in X, Y, Z, rx and Ry directions.
Wherein:
as shown in FIG. 5, the first driving situation of the first driving unit is shown, and all the four first coil groups 21 are supplied with the same current, and the supplied current can make the first branch driving unit A 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the positive or negative Z-axis direction, i.e. the first branch driving unit A 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the Z direction relative to the second ring 20. Four groups ofThe current flowing in one coil group 21 is consistent, and the input current of A phase in the first three-phase coil in each group of the first coil group 21 is preferably I f X sin ωt, where I f For maximum current, ω is the angular frequency of the current, the initial phase is 0, t is the energizing time, the corresponding B-phase input current is
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 6 shows a second driving situation of the first driving unit, corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 No current is supplied to the two first coil groups 21; corresponding to the first branch driving unit A 1 And a first branch driving unit A 3 The two first coil groups 21 are supplied with currents in opposite directions, and the supplied currents enable the first branch driving unit A to 1 And a first branch driving unit A 3 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the positive or negative direction of the X-axis, i.e. the first branch driving unit A 1 And a first branch driving unit A 3 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the X direction relative to the second ring 20. Corresponding to the first branch driving unit A 1 And a first branch driving unit A 3 The directions of the currents flowing in the two first coil groups 21 are opposite, and the three-phase coils in the first group 21 arePreferably the a-phase input current of (2)
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +. >
t is the power-on time. Then the a-phase input current in the first three-phase coils of the other first coil group 21 is preferably +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 7 shows a third driving situation of the first driving unit, corresponding to the first branch driving unit A 1 And a first branch driving unit A 3 No current is supplied to the two first coil groups 21; corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 The two first coil groups 21 are supplied with currents in opposite directions, and the supplied currents enable the first branch driving unit A to 2 And a first branch driving unit A 4 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the positive or negative direction of the Y-axis, i.e. the first branch driving unit A 2 And a first branch driving unit A 4 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the Y direction relative to the second ring 20. Corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 The directions of the currents flowing in the two first coil groups 21 are opposite, and the A-phase input current in the first three-phase coil in one first coil group 21 is preferably
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f At maximum current, ω is electricityAngular frequency of flow, initial phase +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time. Then the a-phase input current in the first three-phase coils of the other first coil group 21 is preferably +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 8 shows a fourth driving situation of the first driving unit, corresponding to the first branch driving unit A 1 And a first branch driving unitMeta A 3 No current is supplied to the two first coil groups 21; corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 The two first coil groups 21 are supplied with currents in opposite directions, and the supplied currents enable the first branch driving unit A to 2 And a first branch driving unit A 4 The first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the Z axis relative to the second ring 20, namely, the first branch driving unit A 2 And a first branch driving unit A 4 The direction of the relative displacement generated by driving the first ring 10 is opposite, and at this time, the first ring 10 can generate a relative displacement clockwise or counterclockwise along the Rx direction relative to the second ring 20. Corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 The directions of the currents flowing in the two first coil groups 21 are opposite, and the A-phase input current of the first three-phase coil of one first coil group 21 is preferably I f X sin ωt, where I f For maximum current, ω is the angular frequency of the current, the initial phase is 0, t is the energizing time, the corresponding B-phase input current is
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +. >
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time. Then, the a-phase input current of the first group three-phase coil of the other first coil group 21 is preferably-I f X sin ωt, where I f For maximum current, ω is the angular frequency of current, initial phase is 0, t is the energizing time, and corresponding B phase is inputThe current is->
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 9 shows a fifth driving scenario of the first driving unit, corresponding to the first branch driving unit A 2 And a first branch driving unit A 4 No current is supplied to the two first coil groups 21; corresponding to the first branch driving unit A 1 And a first branch driving unit A 3 The two first coil groups 21 are supplied with currents in opposite directions, and the supplied currents enable the first branch driving unit A to 1 And a first branch driving unit A 3 The first ring 10 is driven to generate relative displacement along the positive direction or the negative direction of the Z axis relative to the second ring 20, namely, the first branch driving unit A 1 And a first branch driving unit A 3 The direction of the relative displacement generated by driving the first ring 10 is opposite, and at this time, the first ring 10 can generate a relative displacement clockwise or counterclockwise along the Ry direction relative to the second ring 20. Corresponding to the first branch driving unit A 1 And a first branch driving unit A 3 The directions of the currents flowing in the two first coil groups 21 are opposite, and the A-phase input current of the first three-phase coil of one first coil group 21 is preferably I f X sin ωt, where I f For maximum current, ω is the angular frequency of the current, the initial phase is 0, t is the energizing time, the corresponding B-phase input current is
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time. Then, the a-phase input current of the first group three-phase coil of the other first coil group 21 is preferably-I f X sin ωt, where I f For maximum current, ω is the angular frequency of the current, the initial phase is 0, t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +. >
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
In other embodiments, the number of the first branch driving units may be adaptively adjusted, and the position of each first branch driving unit may also be adaptively adjusted according to the number of degrees of freedom of the magnetic levitation rotation device, which is not limited herein. The current flowing in each first coil group 21 is not limited to the above-mentioned relational expression, and is not limited thereto.
It will be appreciated that the second N magnets 31 are magnetized in opposite directions to the second S magnets 32, specifically that the magnetization of the second N magnets 31 is directed towards the coil, i.e. radially outwardly of the first ring 10, and that the magnetization of the second S magnets 32 is directed away from the coil, i.e. radially inwardly of the first ring 10. It will be appreciated that for the second N magnets 31, S is the second N magnets 31 facing one side of the first ring 10 in the radial direction of the first ring 10, and N is the second N magnets 31 facing one side of the first ring 10 facing away from the first ring 10 in the radial direction of the first ring 10. For the second S-magnets 32, S is the side of the second S-magnets 32 facing away from the first ring 10 in the radial direction of the first ring 10, and N is the side of the second S-magnets 32 facing toward the first ring 10 in the radial direction of the first ring 10. As shown in fig. 1, 2 and 4, preferably, the second N magnets 31 and the second S magnets 32 are uniformly distributed along the circumferential direction of the first ring 10 at intervals, so that the magnetic field received by the second coil array 4 is relatively uniform, the magnetic field is ensured to be arranged in the circumferential direction of the second driving unit, the first ring 10 is ensured to generate relative displacement with the second ring 20 at any position of the circumference, and the functionality of the device is ensured. The magnetization directions of the second N magnet 31 and the second S magnet 32 have been marked with arrows in fig. 2 and 4.
In the present embodiment, the second N magnets 31 and the second S magnets 32 are alternately arranged at intervals therebetween, and twenty second N magnets 31 and twenty second S magnets 32 are arranged in the circumferential direction of the first annular ring 10. In other embodiments, the second N magnet 31 and the second S magnet 32 may be bonded to each other, and the number of the second N magnet 31 and the second S magnet 32 may be adjusted, but the number of the second N magnet 31 and the second S magnet 32 should be kept equal, and the number relationship between the second N magnet 31 and the second S magnet 32 and the second coil set 41 is generally adjusted according to practical requirements.
Specifically, in the second driving unit of the present embodiment, the second coil array 4 includes four second coil groups 41 uniformly distributed along the circumference of the second coil ring 20, and each second coil group 41 is electrically connected to one second power amplifier. The current flowing in each second coil group 41 is controlled by different second power amplifiers, so that the second driving unit is divided into four second branch driving units, and the four second branch driving units can drive the first ring 10 and the second ring 20 to generate relative axial linear movement or axial rotation, thereby increasing the degree of freedom of the first ring 10, improving the practicability of the magnetic levitation device and expanding the application range. In other embodiments, the number of the second coil groups 41 in the second coil array 4 may be adjusted, preferably an even number between 2 and 16, and the positions of the plurality of second coil groups 41 may be arranged according to the degree of freedom requirement of the magnetic levitation rotation device, and the arrangement is not limited to the symmetrical arrangement with the Z axis as the central axis, but is not limited thereto. In other embodiments, the second power amplifier and the second coil set 41 may be connected in a non-one-to-one correspondence, and may be adjusted according to the degree of freedom requirement, which is not limited herein.
As shown in fig. 10 to 12, in the present embodiment, four second branch driving units are respectively the second branch driving units B 1 Second branch driving unit B 2 Second branch driving unit B 3 And a second branch driving unit B 4 Labeled B in the figures respectively 1 、B 2 、B 3 And B 4 The four second branch driving units are respectively in one-to-one correspondence with the four second coil groups 41. Wherein the second branch driving unit B 1 Second branch driving unit B 2 Second branch driving unit B 3 And a second branch driving unit B 4 Respectively in the positive X-axis direction, the negative Y-axis direction, the negative X-axis direction and the positive Y-axis direction. And the currents input in the four second branch driving units are controlled by four second power amplifiers respectively, and by changing the current magnitude and the direction of the three alternating current coils of the second group three-phase coils in each second coil group 41, each second branch driving unit can drive the first ring 10 and the second ring 20 to generate relative movement in X, Y and Rz directions, so that the second driving unit can enable the first ring 10 to obtain the relative displacement between the first ring 20 and the second ring 20 in X, Y and three degrees of freedom in Rz directions.
Wherein:
as shown in FIG. 10, is a second drive unitIn the first driving situation, the four second coil sets 41 are all supplied with current in the same direction, and the supplied current can make the second branch driving unit B 1 Second branch driving unit B 2 Second branch driving unit B 3 And a second branch driving unit B 4 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the Rz direction, i.e. the second branch driving unit B 1 Second branch driving unit B 2 Second branch driving unit B 3 And a second branch driving unit B 4 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the Rz direction and clockwise or anticlockwise around the Z axis relative to the second ring 20. The currents flowing into the four second coil groups 41 are consistent, and the input current of A phase in the second three-phase coils in each second coil group 41 is preferably I f X sin ωt, where I f For maximum current, ω is the angular frequency of the current, the initial phase is 0, t is the energizing time, the corresponding B-phase input current is
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 11 shows a second driving situation of the second driving unit, corresponding to the second branch driving unit B 2 And a second branch driving unit B 4 No current is supplied to the two second coil groups 41; corresponding to the second branch driving unit B 1 And a second branch driving unit B 3 The two second coil groups 41 are supplied with currents in opposite directions, and the supplied currents enable the second branch driving unit B 1 And a second branch driving unit B 3 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the positive or negative direction of the X-axis, i.e. the second branch driving unit B 1 And a second branch driving unit B 3 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the X direction relative to the second ring 20. Corresponding to the second branch driving unit B 1 And a second branch driving unit B 3 The directions of the currents flowing in the two second coil groups 41 are opposite, and the A-phase input current in the second three-phase coil in one second coil group 41 is preferably
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +. >
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time. Then the a-phase input current in the second set of three-phase coils in the further second set of coils 41 is preferably +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
FIG. 12 shows a third driving situation of the second driving unit, corresponding to the second branch driving unit B 1 And a second branch driving unit B 3 No current is supplied to the two second coil groups 41; corresponding to the second branch driving unit B 2 And a second branch driving unit B 4 The two second coil groups 41 are supplied with currents in opposite directions, and the supplied currents enable the second branch driving unit B 2 And a second branch driving unit B 4 Simultaneously driving the first ring 10 to displace relative to the second ring 20 in the positive or negative direction of the Y-axis, i.e. the second branch driving unit B 2 And a second branch driving unit B 4 The direction of the relative displacement generated by driving the first ring 10 is the same, and at this time, the first ring 10 can generate relative displacement along the Y direction relative to the second ring 20. Corresponding to the second branch driving unit B 2 And a second branch driving unit B 4 Is not equal to the second oneThe current flowing in the coil groups 41 is opposite in direction, and the A-phase input current in the second three-phase coil in one second coil group 41 is preferably
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time. Then the a-phase input current in the second set of three-phase coils in the further second set of coils 41 is preferably +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the energizing time, the corresponding B-phase input current is +.>
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time, and the corresponding C-phase input current is +. >
Wherein I is f For maximum current, ω is the angular frequency of the current, initial phase is +.>
t is the power-on time.
In other embodiments, the number of the second branch driving units may be adaptively adjusted, and the position of each second branch driving unit may also be adaptively adjusted according to the number of degrees of freedom of the magnetic levitation rotation device, which is not limited herein. The current flowing in each second coil group 41 is not limited to the above-mentioned relational expression, and is not limited thereto.
It will be appreciated that the first driving unit and the second driving unit in this embodiment can cooperate, that is, the first coil array 2 includes four first coil groups 21 uniformly distributed along the circumference of the second coil ring 20, and the second coil array 4 includes four second coil groups 41 uniformly distributed along the circumference of the second coil ring 20, so that the first coil ring 10 in the magnetic levitation rotation device has six degrees of freedom of relative displacement with respect to the second coil ring 20.
When the first ring 10 and the second ring 20 need to generate relative displacement in the X-axis direction, current can be simultaneously supplied to the first driving unit and the second driving unit, so that the first driving unit is in a second driving condition, and the second driving unit is also in a second driving condition, and the first driving unit and the second driving unit jointly drive the first ring 10 to generate displacement in the X-axis direction relative to the second ring 20; the first driving unit may be only supplied with current, and the second driving unit may not be supplied with current, and at this time, the first driving unit is in the second driving condition, and may also be capable of driving the first ring 10 to generate displacement in the X-axis direction with respect to the second ring 20; the second driving unit may be supplied with current only, and the first driving unit may not be supplied with current, and at this time, the second driving unit may be in the second driving condition, so that the first ring 10 may be driven to displace in the X-axis direction with respect to the second ring 20.
When the first ring 10 and the second ring 20 need to generate relative displacement in the Y-axis direction, current can be simultaneously supplied to the first driving unit and the second driving unit, so that the first driving unit is in a third driving condition, the second driving unit is also in a third driving condition, and the first driving unit and the second driving unit jointly drive the first ring 10 to generate displacement in the Y-axis direction relative to the second ring 20; the first driving unit may be only supplied with current, and the second driving unit may not be supplied with current, and at this time, the first driving unit is in a third driving situation, and may also be capable of driving the first ring 10 to generate displacement in the Y-axis direction relative to the second ring 20; the second driving unit may be supplied with current only, and the first driving unit may not be supplied with current, and at this time, the second driving unit may be in the third driving condition, so that the first ring 10 may be driven to displace in the Y-axis direction with respect to the second ring 20.
When the first ring 10 needs to generate the relative displacement in the Z-axis direction with the second ring 20, current can be only supplied to the first driving unit, so that the first driving unit is in the first driving condition, and the first driving unit drives the first ring 10 to generate the displacement in the Z-axis direction with respect to the second ring 20.
When the first ring 10 needs to generate relative displacement in the Rx direction with the second ring 20, current may be applied to the first driving unit only, so that the first driving unit is in the fourth driving condition, and the first driving unit drives the first ring 10 to generate rotational displacement in the Rx direction with respect to the second ring 20.
When the first ring 10 needs to generate relative displacement in the Ry direction with the second ring 20, current can be only supplied to the first driving unit, so that the first driving unit is in a fifth driving situation, and the first driving unit drives the first ring 10 to generate rotational displacement in the Ry direction with respect to the second ring 20.
When the first ring 10 needs to generate relative displacement in the Rz direction with the second ring 20, current can be only supplied to the second driving unit, so that the second driving unit is in the first driving condition, and the second driving unit drives the first ring 10 to generate rotational displacement in the Rz direction with respect to the second ring 20.
Further, when it is necessary to achieve a linear movement in any direction in the XY plane, a first branch driving unit A of the first driving units 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 Or a second branch drive unit B of the second drive units 1 And a second branch driving unit B 3 Second branch driving unit B 2 And a second branch driving unit B 4 Can be simultaneously electrified, or the first branch driving unit A 1 First branch driving unit A 2 First branch driving unit A 3 And a first branch driving unit A 4 Second branch driving unit B 1 And a second branch driving unit B 3 Second branch driving unit B 2 And a second branch driving unit B 4 The power can be simultaneously supplied, and the force generated in the combination of the two branch driving units can be regulated by regulating the magnitude and the direction of the current, so that the linear movement in any direction in the XY plane can be realized. It is understood that the XY plane is a plane perpendicular to the Z axis.
Preferably, a first bonding layer is arranged between the first magnet array 1 and the first ring 10, a second bonding layer is arranged between the second magnet array 3 and the first ring 10, and the first magnet array 1 and the second magnet array 3 are bonded on the first ring 10 through glue, so that the structure of the first ring 10 can be simplified, the cost is reduced, and the connection firmness degree between the first magnet array 1 and the second magnet array 3 and the first ring 10 can be ensured. In other embodiments, a plurality of magnet pits may be concavely formed on the outer wall of the first ring 10, and the magnets in the first magnet array 1 and the second magnet array 3 are disposed in the magnet pits in a one-to-one correspondence manner, so as to facilitate positioning of the first magnet array 1 and the second magnet array 3 during installation. The number of the magnet pits can be the same as the total number of the magnets in the first magnet array 1 and the second magnet array 3, so that the magnets in the first magnet array 1 and the second magnet array 3 are fixed in the magnet pits in a one-to-one correspondence manner; the number of magnet pockets may also be different from the total number of magnets in the first magnet array 1 and the second magnet array 3, simplifying the machining process of the first ring 10.
Preferably, a third adhesive layer is provided between the first coil array 2 and the second coil ring 20, and a fourth adhesive layer is provided between the second coil array 4 and the second coil ring 20. The first coil array 2 and the second coil array 4 are adhered to the second coil ring 20 through glue, so that the structure of the second coil ring 20 can be simplified, the cost is reduced, and the connection firmness degree between the first coil array 2 and the second coil array 4 and the second coil ring 20 can be ensured. In other embodiments, a plurality of coil protruding columns may be further protruding on the inner wall of the second coil ring 20, and coils in the first coil array 2 and coils in the second coil array 4 are disposed on the coil protruding columns in a one-to-one correspondence manner, so as to facilitate positioning of the first coil array 2 and the second coil array 4 during installation. The number of the coil convex columns can be the same as the total number of the coils in the first coil array 2 and the second coil array 4, so that the coils in the first coil array 2 and the second coil array 4 are fixed in the coil convex columns in a one-to-one correspondence manner; the number of coil studs may also be different from the total number of coils in the first coil array 2 and the second coil array 4, simplifying the machining process of the second coil loop 20.
Example two
The structure of the first driving unit in this embodiment is the same as that of the first embodiment, except that the structure in the second magnet array 3 in the second driving unit on the magnetic levitation rotation device is different. Preferably, the second magnet array 3 further comprises a second H-magnet (not shown in the figures). The second H-magnet is located between the second S-magnet 32 and the second N-magnet 31, and the magnetization direction of the second H-magnet is directed by the second S-magnet 32 toward the second N-magnet 31, specifically, the S-pole of the second S-magnet 32 toward the N-pole of the second N-magnet 31, so that the second S-magnet 32, the second H-magnet, and the second N-magnet 31 form a halbach array to enhance the magnetic field strength of the side of the second magnet array 3 close to the second coil array 4. It will be appreciated that for the second H-magnet, S is oriented to one side of the second S-magnet 32 and N is oriented to one side of the second N-magnet 31. The magnets in the second magnet array 3 are arranged as halbach arrays, so that the magnetic field intensity of the second magnet array 3 is improved, the magnetic field intensity of the second coil array 4 is also improved, and the functionality of the magnetic levitation device is ensured.
Example III
The first driving unit and the second driving unit in this embodiment have the same structure as the first embodiment, except that the number of the first driving unit and the second driving unit on the magnetic levitation rotation device is different. Preferably, on the magnetic levitation rotation device, at least two first driving units and/or second driving units are provided, and the first driving units and the second driving units are alternately arranged along the axial direction of the first ring 10. In this embodiment, as shown in fig. 13, two second driving units are provided, one first driving unit is provided, two second driving units and one first driving unit are provided along the axial direction of the first ring 10, and the first driving unit is disposed between the two second driving units, and this arrangement improves the acceleration of the first ring 10 in the direction of the degree of freedom that the second driving units can achieve, that is, when it is required to move a fixed distance in the X and Y directions, or rotate a fixed angle around the Rz direction, the time taken for the first ring 10 in this embodiment is shorter.
Example IV
In this embodiment, the first driving unit and the second driving unit have the same structure as the three phases of the embodiment, except that the number of the first driving unit and the second driving unit on the magnetic levitation rotation device is different. In this embodiment, as shown in fig. 14, two first driving units are provided, one second driving unit is provided, two first driving units and one second driving unit are provided along the axial direction of the first ring 10, and the second driving unit is interposed between the two first driving units, and this arrangement improves the acceleration of the first ring 10 in the direction of the degree of freedom that the first driving unit can achieve, that is, when it is required to move a fixed distance in X, Y and Z directions, or rotate a fixed angle around the Rx and Ry directions, the time taken for the first ring 10 in this embodiment is shorter.
Similarly, the first driving unit and the second driving unit may be provided in two, and the first driving unit and the second driving unit may be alternately provided in the axial direction of the first ring 10. In addition, the number of the first driving units and the second driving units can be changed according to actual requirements, and the method is not limited herein.
It is to be understood that the above examples of the present invention are provided for clarity of illustration only and are not limiting of the embodiments of the present invention. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the invention are desired to be protected by the following claims.
Claims (10)
1. A magnetic levitation rotating device, comprising:
a first ring (10), the first ring (10) having a hollow sleeve-like structure;
the second ring (20) is coaxially arranged with the first ring (10), the second ring (20) and the first ring (10) are arranged at intervals along the radial direction, and a gap for accommodating a heating cavity is formed between the outer wall of the first ring (10) and the inner wall of the second ring (20);
The first driving unit comprises a first magnet array (1) and a first coil array (2) which are oppositely arranged, wherein the first magnet array (1) is arranged on the first coil ring (10), the first coil array (2) is arranged on the second coil ring (20), the first magnet array (1) comprises a plurality of first N magnets (11) and first S magnets (12) which are alternately arranged along the axial direction of the first coil ring (10), the magnetization directions of the magnets in the first magnet array (1) on the same plane which is perpendicular to the axis of the first coil ring (10) are the same, the first coil array (2) comprises at least two first coil groups (21) which are circumferentially arranged along the second coil ring (20), each first coil group (21) comprises at least one first group of three-phase coils which are circumferentially arranged along the axial direction of the first coil ring (10), and the first driving unit can move along the first, second coil and the second coil groups (20) along the first, the second coil groups (21) and the first, the second coil groups (20) and the first coil groups) and the second coil groups (20) can move along the first, second coil groups (20) and the second coil groups) along the first coil groups and the second coil groups;
A second driving unit including a second magnet array (3) and a second coil array (4) which are disposed opposite to each other, the second magnet array (3) being disposed on the first ring (10), the second coil array (4) being disposed on the second ring (20), the second magnet array (3) including a plurality of second N magnets (31) and second S magnets (32) alternately arranged in a circumferential direction of the first ring (10), the second coil array (4) including at least two second coil groups (41) arranged in a circumferential direction of the second ring (20), each of the second coil groups (41) including at least one set of second three-phase coils arranged in a circumferential direction of the second ring (20), the second driving unit being capable of driving the first ring (10) to rotate around the Z direction, move in the Y direction, and move in the Y direction by varying a magnitude and a direction of current flowing into each of the second coil groups (41);
the first driving unit and the second driving unit are arranged at intervals along the axial direction of the first annular ring (10).
2. The magnetic levitation rotation device of claim 1, wherein each of the first N magnets (11) is annular and coaxial with the first ring (10) and each of the first S magnets (12) is annular and coaxial with the first ring (10).
3. The magnetic levitation rotation device according to claim 1, wherein the second N magnets (31) and the second S magnets (32) are uniformly distributed along the circumferential direction of the first ring (10) at intervals.
4. The magnetic levitation rotation device according to claim 1, wherein the first coil array (2) comprises four first coil groups (21) uniformly distributed along the circumference of the second coil ring (20), and each first coil group (21) is electrically connected to one first power amplifier.
5. The magnetic levitation rotation device according to claim 1, wherein the second coil array (4) comprises four second coil groups (41) uniformly distributed along the circumference of the second coil ring (20), and each second coil group (41) is electrically connected with one second power amplifier.
6. The magnetic levitation rotation device according to claim 1, characterized in that a first adhesive layer is arranged between the first magnet array (1) and the first ring (10), and a second adhesive layer is arranged between the second magnet array (3) and the first ring (10).
7. The magnetic levitation rotation device according to claim 1, wherein a third adhesive layer is provided between the first coil array (2) and the second coil ring (20), and a fourth adhesive layer is provided between the second coil array (4) and the second coil ring (20).
8. The magnetic levitation rotation device of any of claims 1-7, wherein the first magnet array (1) further comprises a first H-magnet (13), the first H-magnet (13) being located between the first S-magnet (12) and the first N-magnet (11), and the magnetization direction of the first H-magnet (13) being directed from the first S-magnet (12) towards the first N-magnet (11) such that the first S-magnet (12), the first H-magnet (13) and the first N-magnet (11) form a halbach array.
9. A magnetic levitation rotation device according to any of claims 1-7, characterized in that the second magnet array (3) further comprises a second H-magnet, which is located between the second S-magnet (32) and the second N-magnet (31), and in that the magnetization direction of the second H-magnet is directed by the second S-magnet (32) towards the second N-magnet (31) such that the second S-magnet (32), the second H-magnet and the second N-magnet (31) form a halbach array.
10. The magnetic levitation rotation device according to any of claims 1-7, characterized in that at least two first drive units and/or second drive units are provided, the first drive units and the second drive units being alternately arranged in the axial direction of the first annular ring (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110194276.8A CN112968559B (en) | 2021-02-20 | 2021-02-20 | Magnetic levitation rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110194276.8A CN112968559B (en) | 2021-02-20 | 2021-02-20 | Magnetic levitation rotating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112968559A CN112968559A (en) | 2021-06-15 |
| CN112968559B true CN112968559B (en) | 2023-06-09 |
Family
ID=76285317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110194276.8A Active CN112968559B (en) | 2021-02-20 | 2021-02-20 | Magnetic levitation rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112968559B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113446486B (en) * | 2021-07-22 | 2023-02-28 | 上海隐冠半导体技术有限公司 | Integrated two-way driven fine motion platform and telecontrol equipment |
| CN113460662A (en) * | 2021-07-22 | 2021-10-01 | 上海隐冠半导体技术有限公司 | Bidirectional driving device and micropositioner |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4908558A (en) * | 1988-04-22 | 1990-03-13 | Contraves Goerz Corporation | Spherical motion simulator |
| JP3220559B2 (en) * | 1993-04-27 | 2001-10-22 | オリエンタルモーター株式会社 | Linear pulse motor |
| JP3045935B2 (en) * | 1994-09-01 | 2000-05-29 | 富士電気化学株式会社 | Permanent magnet type stepping motor |
| JP2001190043A (en) * | 2000-01-05 | 2001-07-10 | Sankyo Seiki Mfg Co Ltd | Magnetically-levitated motor |
| KR100352937B1 (en) * | 2000-05-20 | 2002-09-16 | 미래산업 주식회사 | Linear Electric Motor of Rotational and Linear Movement Type |
| FR2876228B1 (en) * | 2004-10-05 | 2007-06-08 | Alstom Transport Sa | ROTOR FOR ELECTRIC MOTOR AND CORRESPONDING ELECTRIC MOTOR |
| DE102005057370B4 (en) * | 2005-12-01 | 2011-12-29 | Siemens Ag | Rotary linear drive assembly |
| CN100545474C (en) * | 2008-03-17 | 2009-09-30 | 南京化工职业技术学院 | Low power consumption 5-freedom permanent magnetism off-set magnetic suspension bearing system |
| KR100977466B1 (en) * | 2008-07-04 | 2010-08-23 | 한국전기연구원 | Cylindrical Magnetic Levitation Stage |
| CN101355290B (en) * | 2008-09-11 | 2010-11-03 | 上海理工大学 | Dual radial directions magnetic field reaction type straight-line rotating stepper motor |
| CN101761454B (en) * | 2009-10-30 | 2012-11-14 | 北京航空航天大学 | Vertical shaft maglev wind power generator |
| KR20110101968A (en) * | 2010-03-10 | 2011-09-16 | 박정일 | A ring-shape-solenoid generator using maglev |
| JP5387760B2 (en) * | 2010-04-07 | 2014-01-15 | 株式会社安川電機 | θZ drive device and stage device |
| CN101806323A (en) * | 2010-04-29 | 2010-08-18 | 苏州同心医疗器械有限公司 | Five degree-of-freedom permanent magnet biased magnetic bearing |
| CN201854100U (en) * | 2010-11-08 | 2011-06-01 | 东南大学 | Permanent magnetic actuator capable of realizing straight line and rotation coordinated control |
| CN102297202B (en) * | 2011-08-15 | 2013-01-23 | 江苏大学 | Single shaft controlled type five-degrees-of-freedom (DOF) miniature magnetic bearing |
| CN102347718B (en) * | 2011-10-17 | 2014-04-09 | 江苏大学 | Bearingless switched reluctance generator |
| CN102497080B (en) * | 2011-12-15 | 2013-07-17 | 哈尔滨工业大学深圳研究生院 | Moving magnet type linear rotation two-degree-of-freedom motor |
| CN102843015A (en) * | 2012-09-06 | 2012-12-26 | 东南大学 | Linearly-rotating two-degrees-of-freedom magnetic levitation bearing-free permanent magnetic actuator |
| CN103490572B (en) * | 2013-05-28 | 2016-08-24 | 南京航空航天大学 | A kind of three-degree-of-freemagnetic magnetic suspension switch reluctance motor |
| JP2015177587A (en) * | 2014-03-13 | 2015-10-05 | 学校法人大同学園 | Rotary direct-acting synchronous motor |
| CN105471212B (en) * | 2014-09-04 | 2018-07-06 | 中国科学院宁波材料技术与工程研究所 | A kind of rotational alignment magneto |
| CN105811809B (en) * | 2014-12-31 | 2018-03-02 | 上海微电子装备（集团）股份有限公司 | Magnetic floats electric rotating machine |
| CN204371940U (en) * | 2015-01-05 | 2015-06-03 | 山东大学 | A kind of annular poles structure and there is the axial magnetic bearing of annular poles structure |
| CN106300874B (en) * | 2015-05-24 | 2019-06-25 | 上海微电子装备（集团）股份有限公司 | A kind of multiple degrees of freedom long stroke linear motor |
| CN105914952B (en) * | 2016-04-29 | 2018-06-15 | 东南大学 | A kind of method for detecting position of straight line rotation two-freedom magneto |
| WO2018018671A1 (en) * | 2016-07-26 | 2018-02-01 | 江苏大学 | Fault-tolerant permanent-magnet vernier cylindrical electric motor with electromagnetic suspension and fault-tolerant vector control method for short circuit of two adjacent phases |
| EP3422545B1 (en) * | 2017-06-27 | 2020-10-07 | Etel S. A.. | Electromechanical actuator |
| EP3422544A1 (en) * | 2017-06-27 | 2019-01-02 | Etel S. A.. | Electromechanical actuator |
| CN109586433B (en) * | 2018-11-27 | 2021-02-09 | 东南大学 | Modularized rotary linear flux switching permanent magnet motor |
| CN109600015B (en) * | 2018-12-20 | 2020-09-25 | 江苏大学 | Stator excitation type linear rotating motor structure |
| CN109905011B (en) * | 2019-03-15 | 2020-05-26 | 广东极迅精密仪器有限公司 | Motor and chip picking and placing device with same |
| CN111865042B (en) * | 2019-04-24 | 2022-01-11 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Suspension propulsion integrated rotary platform |
| CN210724529U (en) * | 2019-09-30 | 2020-06-09 | 青岛海洋科学与技术国家实验室发展中心 | Linear rotation magnetic transmission mechanism and wing changing device of underwater vehicle |
| CN211151791U (en) * | 2019-12-18 | 2020-07-31 | 郑州大学 | Stator permanent magnet type annular winding two-degree-of-freedom motor |
| CN111082551B (en) * | 2020-01-19 | 2023-04-07 | 山东大学 | Stator and rotating linear two-degree-of-freedom permanent magnet motor with modular structure |
| CN112968558B (en) * | 2021-02-20 | 2022-05-17 | 复旦大学 | Magnetic suspension hub motor |
-
2021
- 2021-02-20 CN CN202110194276.8A patent/CN112968559B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN112968559A (en) | 2021-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112968559B (en) | Magnetic levitation rotating device | |
| CN102305242B (en) | Radial-axial three-degree-of-freedom alternating current-direct current hybrid magnetic bearing | |
| CN109039004B (en) | Magnetic suspension device based on Halbach array | |
| KR20050004286A (en) | Rotary electric motor having a plurality of skewed stator poles and/or rotor poles | |
| CN110518724B (en) | Stator permanent magnet type bearingless sheet motor and working method thereof | |
| CN105673688B (en) | A kind of self-regulated integer five degree of freedom magnetic bearing | |
| CN113202869B (en) | Three-degree-of-freedom hybrid bias magnetic bearing | |
| CN107147227A (en) | A kind of permanent magnet machine rotor containing asymmetric magnetic pole | |
| CN109450204A (en) | A kind of outer Structure of mover straight line rotary actuator of block form bimorph transducer | |
| CN106979225A (en) | A kind of taper axial magnetic bearing | |
| CN209892624U (en) | Electromagnetic radial magnetic bearing with E-shaped structure | |
| CN107289003A (en) | Homopolarity formula permanent magnet offset radial magnetic bearing | |
| CN105864293B (en) | A kind of integrated suspension of five-freedom degree magnetic electro spindle | |
| CN113178961B (en) | Axial modularized magnetic flux reversing motor | |
| CN110798037A (en) | Permanent magnet synchronous motor | |
| CN106438693A (en) | Two-freedom-degree permanent magnet biased radial hybrid magnetic bearing | |
| CN215009934U (en) | Five-degree-of-freedom single-winding bearingless magnetic suspension motor | |
| CN114221580A (en) | Magnetic levitation device and rotor position adjustment method | |
| CN110017329B (en) | Electromagnetic radial magnetic bearing with E-shaped structure | |
| CN103490577A (en) | Stator permanent magnet vernier motor with modules evenly distributed at circumference | |
| MXPA04012144A (en) | Rotary electric motor having a plurality of shifted stator poles and/or rotor poles. | |
| CN206221508U (en) | A kind of two degrees of freedom permanent magnet offset radial hybrid magnetic bearing | |
| EP4086470B1 (en) | Magnetic suspension bearing, compressor, and air conditioner | |
| CN220254374U (en) | Magnetic suspension device and semiconductor processing equipment | |
| CN116979833B (en) | Magnetic suspension device and magnetic suspension turntable |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |