CN112960690A - Method for recycling waste ITO targets efficiently - Google Patents
Method for recycling waste ITO targets efficiently Download PDFInfo
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- CN112960690A CN112960690A CN202110242917.2A CN202110242917A CN112960690A CN 112960690 A CN112960690 A CN 112960690A CN 202110242917 A CN202110242917 A CN 202110242917A CN 112960690 A CN112960690 A CN 112960690A
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- 239000002699 waste material Substances 0.000 title claims abstract description 82
- 238000000034 method Methods 0.000 title claims abstract description 48
- 238000004064 recycling Methods 0.000 title claims abstract description 22
- 239000000843 powder Substances 0.000 claims abstract description 68
- 238000004140 cleaning Methods 0.000 claims abstract description 15
- 238000011084 recovery Methods 0.000 claims abstract description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000002309 gasification Methods 0.000 claims abstract description 12
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 238000001035 drying Methods 0.000 claims abstract description 6
- 238000010891 electric arc Methods 0.000 claims abstract description 6
- 238000010791 quenching Methods 0.000 claims abstract description 6
- 230000000171 quenching effect Effects 0.000 claims abstract description 6
- 239000004744 fabric Substances 0.000 claims description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 238000010009 beating Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 8
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000008213 purified water Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000000428 dust Substances 0.000 claims description 3
- 239000012716 precipitator Substances 0.000 claims description 2
- 239000013077 target material Substances 0.000 abstract description 8
- 238000004134 energy conservation Methods 0.000 abstract description 2
- 230000007613 environmental effect Effects 0.000 abstract description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052718 tin Inorganic materials 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 6
- 238000000926 separation method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010079 rubber tapping Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G19/00—Compounds of tin
- C01G19/02—Oxides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G15/00—Compounds of gallium, indium or thallium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B58/00—Obtaining gallium or indium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B7/00—Working up raw materials other than ores, e.g. scrap, to produce non-ferrous metals and compounds thereof; Methods of a general interest or applied to the winning of more than two metals
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention discloses a method for recycling an efficient ITO (indium tin oxide) waste target, belonging to the technical field of ITO target material recycling, and comprising the following steps of: s1, cleaning: wiping the surface of the ITO waste target with acetone, cleaning the ITO waste target with ultrasonic waves, and drying the ITO waste target for later use; s2, arc gasification: putting the cleaned ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 100-200V direct current voltage to melt and gasify the ITO waste target; s3, powder recovery: and (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder. The method has the advantages of high In recovery rate, high efficiency, environmental protection, energy conservation and the like.
Description
Technical Field
The invention relates to the technical field of ITO target material recovery, in particular to a method for efficiently recycling an ITO waste target.
Background
Indium Tin Oxide (ITO) is an important semiconductor ceramic material, and the main component is In2O3、SnO2The conductivity is enhanced by doping tetravalent tin into the indium oxide lattice. The ITO film has wide application prospect in the high-technology fields of photoelectrons, sensors, solar energy, wide-spectrum stealth and the like due to the excellent comprehensive properties of transparency, conductivity, heat insulation, infrared reflection, radar wave transmission and the like, and can be used as an electrode of electrochemical reaction to effectively decompose industrial waste. Adopts ITO target material to pass throughThe ITO thin film prepared by the way of the blank coating and the like becomes an indispensable key material of flat panel displays such as TFT-LCD, PDP and the like, and the ITO target is promoted to develop into a remarkable strategic high-tech industry.
In industrial application, the utilization rate of ITO target sputtering coating is only 30-40%, the rest part becomes waste target, and scrap materials, cutting and waste products generated In the target forming process are added, and metal In recovered by the waste target becomes the main source of regenerated In, accounting for 50-60% of the total regenerated In. Therefore, it is significant to research the economic and efficient recovery technology of the ITO waste target.
The core of the traditional ITO waste target recovery technology lies In the effective separation of In and Sn. The method for separating In and Sn by utilizing the property difference of In and Sn comprises the methods of electrolysis, hydrolysis precipitation, alkaline separation, replacement and the like, and the methods have the defects of incomplete separation of In and Sn, low efficiency and the like. The noble metal In the target material cannot be completely recovered, and the metal Sn is also wasted In the form of scrap and also pollutes the air.
In view of the above, the present invention provides a method for recycling waste ITO targets with high efficiency.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a method for recycling an ITO waste target with high efficiency, which has the advantages of high efficiency, environmental protection, energy conservation and the like.
In order to achieve the purpose, the invention provides the following technical scheme:
a method for recycling an ITO waste target efficiently comprises the following steps:
s1, cleaning
Wiping the surface of the ITO waste target with acetone, cleaning the ITO waste target with ultrasonic waves, and drying the ITO waste target for later use;
s2 arc gasification
Putting the cleaned ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 100-200V direct current voltage to melt and gasify the ITO waste target;
s3, powder recovery
And (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder.
More preferably: in step S1, the ITO waste target is ultrasonically cleaned for 30-40min by purified water at 60-70 ℃.
More preferably: in step S1, the purity of the ITO waste target is 99.99%, In2O3/SnO2The mass ratio of (A) to (B) is 9: 1.
More preferably: in step S3, the classifying and powder collecting system includes a precipitator, a blower, a cyclone powder collector, and a cloth bag powder collector, which are connected in sequence by pipes.
More preferably: the cloth bag powder collector comprises supporting legs, a fixing block, a supporting rod, a barrel, a powder outlet pipe, an ash discharge mechanism, a filter bag, a bottom barrel and an air inlet pipe;
the filter bag comprises a fixed filter bag and a movable filter bag, the fixed filter bag is fixed in the fixed cylinder, and the movable filter bag is detachably connected to the lower end of the movable filter bag so as to communicate the movable filter bag with the fixed filter bag;
the fixed block is fixed on the outer surface of the fixed barrel, the upper end of the supporting leg is fixed on the fixed block, the lower end of the supporting leg is used for supporting on the ground or a foundation plane, the supporting rod is fixed on the supporting leg and used for upwards supporting the bottom barrel, the lower end of the movable filter bag is sleeved on the bottom barrel and detachably connected with the bottom barrel, and the lower end of the bottom barrel is provided with a powder outlet pipe;
the air inlet pipe penetrates through the fixed cylinder and extends into the fixed filter bag, a round hole is formed in the bottom of the movable cylinder, and the diameter of the round hole is larger than the outer diameter of the movable filter bag, so that the movable cylinder can slide up and down on the periphery outside the movable filter bag;
the ash discharging mechanism is used for beating the fixed filter bag.
More preferably: the ash discharging mechanism comprises a motor, a rotating shaft and a beating rod;
the motor is installed fixed barrel top, pivot upper end with the motor output shaft is fixed, and the lower extreme passes fixed barrel and extends in the fixed filter bag, clap the stick and be located in the fixed filter bag and one end is fixed in the pivot, the other end with fixed filter bag inner wall contact, pivot axial direction with fixed filter bag axial direction is unanimous.
More preferably: the intake pipe is in for slope setting and lower extreme extension fixed straining in the bag, the intake pipe is given vent to anger and is held outwards to be the flaring setting, the intake pipe is given vent to anger and is held to be located beat excellent below.
More preferably: the fixed cylinder and the movable cylinder are both cylindrical, the outer diameter of the movable cylinder is the same as the inner diameter of the fixed cylinder, a sliding groove used for enabling the movable cylinder to slide up and down in the fixed cylinder is formed in the inner wall of the fixed cylinder, a sliding block matched with the sliding groove is fixed on the movable cylinder, and the sliding block is inserted into the sliding groove and is in sliding fit with the sliding groove.
More preferably: the movable barrel is characterized in that a layer of iron sheet is arranged on the top surface of the movable barrel, a magnet positioning block is fixed on the inner wall of the fixed barrel and is magnetically connected with the iron sheet on the top surface of the movable barrel, so that the movable barrel is positioned in the fixed barrel.
More preferably: a positioning ring is fixed at the top in the fixed cylinder, the upper end of the fixed filter bag is fixed on the positioning ring, a first fixing ring is fixed at the lower end of the fixed filter bag, a connecting rod is fixed on the first fixing ring, one end of the connecting rod is fixed on the first fixing ring, and the other end of the connecting rod is fixed on the inner wall of the fixed cylinder;
the upper end of the movable filter bag is fixedly provided with a second fixing ring, the second fixing ring is in bolted connection with the first fixing ring, the bottom of the bottom cylinder is provided with a slot, and the support rod is inserted in the slot so as to be supported at the bottom of the bottom cylinder.
In conclusion, the invention has the following beneficial effects: the waste target material is gasified by the direct current arc method and then is recycled In a grading way, the method does not need any metal separation and extraction link, the ITO waste target is directly converted into nano ITO powder, In addition, the direct current arc method can not cause the waste of noble metals In and Sn, the method is environment-friendly and energy-saving, and the directly generated ITO alloy powder can be directly used for manufacturing the ITO target material. Melting and gasifying the waste ITO target, and rapidly nucleating, crystallizing and growing to obtain ITO powder. Other impurities are not introduced In the recovery process, and the purity of the ITO powder depends on the original purity of the ITO waste target, so that the recovery rate of In is higher and is generally more than 98%.
Drawings
FIG. 1 is a block flow diagram of an embodiment, which is mainly used for embodying a method of recycling an ITO waste target;
FIG. 2 is a schematic sectional view of the embodiment, which is mainly used for showing the internal structure of the cloth bag powder collector;
FIG. 3 is a schematic sectional view of the embodiment, which is mainly used for showing the internal structure of the cloth bag powder collector;
FIG. 4 is a schematic sectional view of the embodiment, which is mainly used for embodying the fixing structure for fixing the lower end of the filter bag.
In the figure, 1, a support leg; 2. a fixed block; 3. a support bar; 41. fixing the cylinder; 42. a movable barrel; 5. a powder outlet pipe; 6. a circular hole; 71. a motor; 72. a rotating shaft; 73. beating the rod; 81. fixing the filter bag; 82. a movable filter bag; 9. a bottom cylinder; 10. a chute; 11. a slider; 12. a magnet positioning block; 13. an air inlet pipe; 14. a first retaining ring; 15. a second retaining ring; 16. positioning the circular ring; 17. a connecting rod.
Detailed Description
The invention is described in detail below with reference to the figures and examples.
Example 1: a method for recycling waste ITO targets with high efficiency is shown in figure 1 and comprises the following steps:
s1, cleaning
Wiping the surface of the ITO waste target with acetone, then ultrasonically cleaning the ITO waste target with purified water of 64 ℃ for 35min, and drying the cleaned ITO waste target for later use.
Preferably, the ITO waste target is a high-density ITO waste target with the purity of 99.99 percent and In2O3/SnO2The mass ratio of (A) to (B) is 9: 1.
S2 arc gasification
And (3) putting the cleaned and dried ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 150V direct current voltage to melt and gasify the ITO waste target.
S3, powder recovery
And (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder.
Preferably, the grading powder collecting system comprises a settler, a fan, a cyclone powder collector and a cloth bag powder collector which are sequentially connected through pipelines, wherein the fan is used as a power source so that the ITO powder is graded through the settler, the cyclone powder collector and the cloth bag powder collector sequentially.
In the technical scheme, the waste target materials are gasified by the direct current arc method and then are recycled In a grading manner, the method does not need any metal separation and extraction link, the ITO waste target is directly converted into nano ITO powder, In addition, the direct current arc method does not cause waste of noble metals In and Sn, the method is environment-friendly and energy-saving, and the directly generated ITO alloy powder can be directly used for manufacturing the ITO target material. Melting and gasifying the waste ITO target, and rapidly nucleating, crystallizing and growing to obtain ITO powder. Other impurities are not introduced in the recovery process, and the purity of the ITO powder depends on the original purity of the ITO waste target.
Referring to fig. 2-4, the cloth bag powder collector comprises supporting legs 1, a fixing block 2, a supporting rod 3, a barrel, a powder outlet pipe 5, a dust discharging mechanism, a filter bag, a bottom barrel 9 and an air inlet pipe 13. The cylinder comprises a fixed cylinder 41 and a movable cylinder 42 which is in up-down sliding fit with the fixed cylinder 41, the fixed cylinder 41 and the movable cylinder 42 are both cylindrical, and the outer diameter of the movable cylinder 42 is the same as the inner diameter of the fixed cylinder 41. The inner wall of the fixed cylinder 41 is provided with a chute 10 for the movable cylinder 42 to slide up and down in the fixed cylinder 41, the chute 10 is vertically arranged, and the lower end of the chute is close to the bottom surface of the fixed cylinder 41. The lower end of the fixed cylinder 41 and the upper end of the movable cylinder 42 are both arranged in an open manner, and the central axis of the fixed cylinder 41 is coincided with that of the movable cylinder 42. The movable cylinder 42 is fixed with a sliding block 11 matched with the sliding groove 10, and the sliding block 11 is inserted in the sliding groove 10 and is in sliding fit with the sliding groove 10. The top surface of the movable cylinder 42 is provided with a layer of iron sheet, the inner wall of the fixed cylinder 41 is fixed with a magnet positioning block 12, and the magnet positioning block 12 is used for being magnetically connected with the iron sheet on the top surface of the movable cylinder 42, so that the movable cylinder 42 is positioned in the fixed cylinder 41.
Referring to fig. 2 to 4, the filter bags include a fixed filter bag 81 and a movable filter bag 82. The fixed filter bag 81 is fixed in the fixed cylinder 41, and the movable filter bag 82 is detachably connected to the lower end of the movable filter bag 82, so that the movable filter bag 82 is communicated with the fixed filter bag 81. The central axis of the movable filter bag 82 coincides with the central axis of the fixed filter bag 81. The fixed block 2 is fixed on the outer surface of the fixed cylinder 41, the upper end of the supporting leg 1 is fixed on the fixed block 2, and the lower end of the supporting leg is used for supporting on the ground or a foundation plane. The two supporting legs 1 are symmetrically arranged on two opposite sides of the fixed filter bag 81. The supporting rod 3 is fixed on the supporting leg 1 and used for upwards supporting the bottom barrel 9, preferably, a slot is formed in the bottom of the bottom barrel 9, and the supporting rod 3 is inserted into the slot so that the supporting rod 3 is supported at the bottom of the bottom barrel 9. The lower end of the movable filter bag 82 is sleeved on the surface of the bottom cylinder 9 and is detachably connected with the bottom cylinder 9 through a screw or a bolt, and the lower end of the bottom cylinder 9 is provided with a powder outlet pipe 5. Preferably, the bottom of the bottom cylinder 9 is funnel-shaped, and the powder outlet pipe 5 is positioned at the center of the bottom cylinder 9.
Referring to fig. 2 to 4, an ash discharging mechanism for tapping the fixed filter bags 81 includes a motor 71, a rotating shaft 72, and a tapping rod 73. The motor 71 is installed above the top of the fixed cylinder 41, the upper end of the rotating shaft 72 is fixed with the output shaft of the motor 71, and the lower end of the rotating shaft passes through the fixed cylinder 41 and extends into the fixed filter bag 81. The beating rod 73 is positioned in the fixed filter bag 81, one end of the beating rod is fixed on the rotating shaft 72, the other end of the beating rod is in contact with the inner wall of the fixed filter bag 81, and the axial direction of the rotating shaft 72 is consistent with the axial direction of the fixed filter bag 81. The air inlet pipe 13 penetrates through the fixed cylinder 41 from outside to inside and extends into the fixed filter bag 81, the air inlet pipe 13 is obliquely arranged, and the lower end of the air inlet pipe extends into the fixed filter bag 81. The air outlet end of the air inlet pipe 13 is arranged in an outward flaring manner, and the air outlet end of the air inlet pipe 13 is positioned below the beating rod 73.
Referring to fig. 2-4, the bottom of the movable cylinder 42 is provided with a circular hole 6, and the diameter of the circular hole 6 is larger than the outer diameter of the movable filter bag 82, so that the movable cylinder 42 slides up and down around the outside of the movable filter bag 82, and clean air is discharged through the circular hole 6. The fixed cylinder 41 is fixed with a positioning ring 16 at the top, the fixed filter bag 81 is fixed with a first fixing ring 14 at the upper end and the lower end on the positioning ring 16. A connecting rod 17 is fixed on the first fixing ring 14, one end of the connecting rod 17 is fixed on the first fixing ring 14, and the other end is fixed on the inner wall of the fixing cylinder 41. Since the dust discharging mechanism can only flap the fixed filter bag 81, the movable filter bag 82 does not have a self-cleaning function and needs to be manually replaced, and therefore the upper end of the movable filter bag 82 is fixed with the second fixing ring 15, and the second fixing ring 15 is connected with the first fixing ring 14 through bolts or screws. When the movable filter bag 82 is detached and replaced, the movable cylinder 42 can be pushed upwards until the movable cylinder 42 is positioned on the magnet positioning block 12, and at the moment, the movable filter bag 82 can be detached through the gap between the side wall of the circular hole 6 and the movable filter bag 82. For the convenience of classification, it is preferable that valves are installed on both the inlet pipe 13 and the powder outlet pipe 5. The air inlet pipe 13 is used for being connected with an air outlet of the fan.
In the technical scheme, the traditional cloth bag powder collecting device is generally formed by connecting a plurality of long and thin cloth bags in parallel, then the cloth bags are cleaned in a back flushing type cleaning mode to prevent the cloth bags from being blocked, however, the manufacturing cost of the plurality of long and thin cloth bags in parallel is high, the installation is complex, and the back flushing type cleaning mode can only clean powder with poor adhesion on the cloth bags. Because the filter bag is slender, if a plurality of ash discharge mechanisms are arranged for full-range flapping, the installation is difficult and the manufacturing cost is high, therefore, the cylinder body and the filter bag are both designed in a split mode, and because the flapping rod 73 is arranged in the fixed filter bag 81, powder adhered to the fixed filter bag 81 can be easily flapped down, so that mixed gas containing ITO powder enters the fixed filter bag 81 and the movable filter bag 82 through the air inlet pipe 13, can smoothly enter the fixed filter bag 81 and can be discharged outwards through the round hole 6. When the movable filter bag 82 is detached and replaced, the movable cylinder 42 can be pushed upwards firstly until the movable cylinder 42 is positioned on the magnet positioning block 12, and at the moment, the movable filter bag 82 can be detached through the gap between the side wall of the circular hole 6 and the movable filter bag 82, so that the use is simple and convenient.
Example 2: a method for recycling waste ITO targets is different from the method in embodiment 1 in that the method comprises the following steps:
s1, cleaning
Wiping the surface of the ITO waste target with acetone, then ultrasonically cleaning the ITO waste target with purified water at 60 ℃ for 30min, and drying the cleaned ITO waste target for later use.
Preferably, the ITO waste target is a high-density ITO waste target with the purity of 99.99 percent and In2O3/SnO2The mass ratio of (A) to (B) is 9: 1.
S2 arc gasification
And (3) putting the cleaned and dried ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 100V direct current voltage to melt and gasify the ITO waste target.
S3, powder recovery
And (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder.
Preferably, the grading powder collecting system comprises a settler, a fan, a cyclone powder collector and a cloth bag powder collector which are sequentially connected through pipelines, wherein the fan is used as a power source so that the ITO powder is graded through the settler, the cyclone powder collector and the cloth bag powder collector sequentially.
Example 3: a method for recycling waste ITO targets is different from the method in embodiment 1 in that the method comprises the following steps:
s1, cleaning
Wiping the surface of the ITO waste target with acetone, then ultrasonically cleaning the ITO waste target with purified water at 60 ℃ for 30min, and drying the cleaned ITO waste target for later use.
Preferably, the ITO waste target is a high-density ITO waste target with the purity of 99.99 percent and In2O3/SnO2The mass ratio of (A) to (B) is 9: 1.
S2 arc gasification
And (3) putting the cleaned and dried ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 100V direct current voltage to melt and gasify the ITO waste target.
S3, powder recovery
And (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder.
Preferably, the grading powder collecting system comprises a settler, a fan, a cyclone powder collector and a cloth bag powder collector which are sequentially connected through pipelines, wherein the fan is used as a power source so that the ITO powder is graded through the settler, the cyclone powder collector and the cloth bag powder collector sequentially.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that several improvements and modifications without departing from the principle of the present invention will occur to those skilled in the art, and such improvements and modifications should also be construed as within the scope of the present invention.
Claims (10)
1. A method for recycling waste ITO targets is characterized by comprising the following steps: the method comprises the following steps:
s1, cleaning
Wiping the surface of the ITO waste target with acetone, cleaning the ITO waste target with ultrasonic waves, and drying the ITO waste target for later use;
s2 arc gasification
Putting the cleaned ITO waste target into a direct current arc gasification reaction chamber, and introducing an electric arc generated by 100-200V direct current voltage to melt and gasify the ITO waste target;
s3, powder recovery
And (3) quenching the gasified ITO waste target, and then passing through a grading powder collecting system to obtain ITO powder.
2. The method for recycling the waste ITO target according to claim 1, wherein the method comprises the following steps: in step S1, the ITO waste target is ultrasonically cleaned for 30-40min by purified water at 60-70 ℃.
3. The method for recycling the waste ITO target according to claim 1, wherein the method comprises the following steps: in step S1, the purity of the ITO waste target is 99.99%, In2O3/SnO2The mass ratio of (A) to (B) is 9: 1.
4. The method for recycling the waste ITO target according to claim 1, wherein the method comprises the following steps: in step S3, the classifying and powder collecting system includes a precipitator, a blower, a cyclone powder collector, and a cloth bag powder collector, which are connected in sequence by pipes.
5. The method for recycling the waste ITO target according to claim 4, wherein the method comprises the following steps: the cloth bag powder collector comprises supporting legs (1), a fixing block (2), a supporting rod (3), a barrel, a powder outlet pipe (5), a dust discharging mechanism, a filter bag, a bottom barrel (9) and an air inlet pipe (13);
the cylinder comprises a fixed cylinder (41) and a movable cylinder (42) which is in up-down sliding fit with the fixed cylinder (41), the filter bag comprises a fixed filter bag (81) and a movable filter bag (82), the fixed filter bag (81) is fixed in the fixed cylinder (41), and the movable filter bag (82) is detachably connected to the lower end of the movable filter bag (82) so that the movable filter bag (82) is communicated with the fixed filter bag (81);
the fixed block (2) is fixed on the outer surface of the fixed cylinder (41), the upper end of the supporting leg (1) is fixed on the fixed block (2), the lower end of the supporting leg (1) is used for supporting the ground or a base plane, the supporting rod (3) is fixed on the supporting leg (1) and is used for upwards supporting the bottom cylinder (9), the lower end of the movable filter bag (82) is sleeved on the bottom cylinder (9) and is detachably connected with the bottom cylinder (9), and the lower end of the bottom cylinder (9) is provided with a powder outlet pipe (5);
the air inlet pipe (13) penetrates through the fixed cylinder body (41) and extends into the fixed filter bag (81), a round hole (6) is formed in the bottom of the movable cylinder body (42), and the diameter of the round hole (6) is larger than the outer diameter of the movable filter bag (82) so that the movable cylinder body (42) can slide up and down on the periphery of the outer part of the movable filter bag (82);
the ash discharging mechanism is used for beating the fixed filter bag (81).
6. The method for recycling the waste ITO target according to claim 5, wherein the method comprises the following steps: the ash discharging mechanism comprises a motor (71), a rotating shaft (72) and a beating rod (73);
the motor (71) is installed above the top of the fixed cylinder body (41), the upper end of the rotating shaft (72) is fixed with an output shaft of the motor (71), the lower end of the rotating shaft penetrates through the fixed cylinder body (41) and extends into the fixed filter bag (81), the beating rod (73) is located in the fixed filter bag (81), one end of the beating rod is fixed on the rotating shaft (72), the other end of the beating rod is in contact with the inner wall of the fixed filter bag (81), and the axial direction of the rotating shaft (72) is consistent with the axial direction of the fixed filter bag (81).
7. The method for recycling the waste ITO target according to claim 6, wherein the method comprises the following steps: the air inlet pipe (13) is obliquely arranged, the lower end of the air inlet pipe extends into the fixed filter bag (81), the air outlet end of the air inlet pipe (13) is arranged in an outward flaring manner, and the air outlet end of the air inlet pipe (13) is located below the patting rod (73).
8. The method for recycling the waste ITO target according to claim 5, wherein the method comprises the following steps: the fixed cylinder body (41) and the movable cylinder body (42) are both cylindrical, the outer diameter of the movable cylinder body (42) is the same as the inner diameter of the fixed cylinder body (41), the inner wall of the fixed cylinder body (41) is provided with a sliding groove (10) which is used for the movable cylinder body (42) to slide up and down in the fixed cylinder body (41), a sliding block (11) which is matched with the sliding groove (10) is fixed on the movable cylinder body (42), and the sliding block (11) is inserted in the sliding groove (10) and is in sliding fit with the sliding groove (10).
9. The method for recycling the waste ITO target according to claim 8, wherein the method comprises the following steps: the top surface of the movable barrel body (42) is provided with a layer of iron sheet, the inner wall of the fixed barrel body (41) is fixed with a magnet positioning block (12), the magnet positioning block (12) is used for being magnetically connected with the iron sheet on the top surface of the movable barrel body (42), so that the movable barrel body (42) is positioned in the fixed barrel body (41).
10. The method for recycling the waste ITO target according to claim 5, wherein the method comprises the following steps: a positioning circular ring (16) is fixed at the inner top of the fixed cylinder body (41), the upper end of the fixed filter bag (81) is fixed on the positioning circular ring (16), a first fixing ring (14) is fixed at the lower end of the fixed filter bag, a connecting rod (17) is fixed on the first fixing ring (14), one end of the connecting rod (17) is fixed on the first fixing ring (14), and the other end of the connecting rod is fixed on the inner wall of the fixed cylinder body (41);
a second fixing ring (15) is fixed at the upper end of the movable filter bag (82), the second fixing ring (15) is connected with the first fixing ring (14) through a bolt, a slot is formed in the bottom of the bottom cylinder (9), and the support rod (3) is inserted into the slot so that the support rod (3) is supported at the bottom of the bottom cylinder (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110242917.2A CN112960690A (en) | 2021-03-05 | 2021-03-05 | Method for recycling waste ITO targets efficiently |
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| CN104828857A (en) * | 2015-04-24 | 2015-08-12 | 柳州百韧特先进材料有限公司 | Device for preparing nano ITO powder by electric arc method |
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- 2021-03-05 CN CN202110242917.2A patent/CN112960690A/en active Pending
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| CN104828857A (en) * | 2015-04-24 | 2015-08-12 | 柳州百韧特先进材料有限公司 | Device for preparing nano ITO powder by electric arc method |
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Application publication date: 20210615 |