CN112951957B - 一种耦合量子阱结构深紫外AlGaN基发光二极管 - Google Patents
一种耦合量子阱结构深紫外AlGaN基发光二极管 Download PDFInfo
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- CN112951957B CN112951957B CN202110299287.2A CN202110299287A CN112951957B CN 112951957 B CN112951957 B CN 112951957B CN 202110299287 A CN202110299287 A CN 202110299287A CN 112951957 B CN112951957 B CN 112951957B
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- 229910002704 AlGaN Inorganic materials 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 238000002955 isolation Methods 0.000 claims abstract description 5
- 238000005036 potential barrier Methods 0.000 claims abstract 2
- 230000004888 barrier function Effects 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004020 luminiscence type Methods 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 230000006798 recombination Effects 0.000 abstract description 17
- 238000005215 recombination Methods 0.000 abstract description 17
- 230000002269 spontaneous effect Effects 0.000 abstract description 11
- 230000000694 effects Effects 0.000 abstract description 8
- 150000004767 nitrides Chemical class 0.000 abstract description 8
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 10
- 238000010168 coupling process Methods 0.000 description 10
- 238000005859 coupling reaction Methods 0.000 description 10
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910016920 AlzGa1−z Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
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CN112951957B true CN112951957B (zh) | 2021-12-21 |
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CN113725326B (zh) * | 2021-08-10 | 2024-09-24 | 广州市众拓光电科技有限公司 | 一种紫外led外延结构及其制备方法和应用 |
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JP2007281257A (ja) * | 2006-04-07 | 2007-10-25 | Toyoda Gosei Co Ltd | Iii族窒化物半導体発光素子 |
CN102222760B (zh) * | 2011-06-20 | 2013-05-15 | 厦门市三安光电科技有限公司 | 一种深紫外半导体发光器件 |
CN103325903A (zh) * | 2013-06-19 | 2013-09-25 | 中国科学院半导体研究所 | 可调控能带的uv led多量子阱结构装置及生长方法 |
CN105895759B (zh) * | 2016-06-24 | 2018-07-17 | 太原理工大学 | 一种duv led外延片结构 |
CN105957936B (zh) * | 2016-06-24 | 2018-04-13 | 太原理工大学 | 一种duv led外延片结构 |
CN109524519B (zh) * | 2018-12-18 | 2020-12-25 | 南通大学 | 一种氮化物量子阱结构发光二极管 |
CN109950374B (zh) * | 2019-04-02 | 2021-04-16 | 南通大学 | 一种氮化物量子阱结构深紫外发光二极管 |
CN111063753B (zh) * | 2019-10-31 | 2021-08-03 | 厦门大学 | 一种Mg掺杂量子阱的AlGaN基深紫外LED外延结构及其制备方法 |
CN111628059B (zh) * | 2020-04-28 | 2021-03-23 | 北京大学 | AlGaN基深紫外发光二极管器件及其制备方法 |
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