CN112945385A - Multi-reflection interference automatic measuring system - Google Patents
Multi-reflection interference automatic measuring system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The invention provides a multi-reflection interference automatic measuring system, which belongs to the technical field of spectrum and has the characteristics that: a light source section that emits incident light; a multi-reflection interferometer for receiving incident light and outputting emergent light; the optical sensor receives the emergent light and converts an optical signal into an electrical signal; an analog-to-digital conversion section converting the electric signal into a digital signal; and a control section which controls operations of the light source section, the multi-reflection interferometer, the optical sensor, and the analog-to-digital conversion section, and converts the digital signal into an interferogram to output, wherein the multi-reflection interferometer includes: the second reflecting unit comprises a second long reflecting mirror, a second short reflecting mirror, a second terminal reflecting mirror and a moving assembly, and the second long reflecting mirror is arranged on the moving assembly.
Description
Technical Field
The invention relates to the technical field of spectrums, in particular to a multi-reflection interference automatic measuring system.
Background
Spectral analysis is a method for sensitively and rapidly identifying substances and analyzing chemical compositions and relative contents of the substances, is an important technical means for researching atomic energy levels and structures of the substances, and is widely applied to the fields of remote sensing technology, environmental science, agriculture and forestry industry, jewelry identification and the like. The spectrum instrument is divided into a prism spectrometer, a diffraction grating spectrometer and an interference spectrometer according to the light splitting principle, wherein the interference type light splitting principle applied to the interference spectrometer is called as a third-generation light splitting technology, and the spectrum instrument designed based on the interference spectrometer gradually becomes a main technical means of the current spectrum analysis because of the advantages of high luminous flux, high spectral resolution and the like.
The interferometers used in prior art interferometer measurement systems are typically conventional michelson interferometers, which suffer from the following drawbacks: when the lower spectral resolution is set, the moving distance of the movable mirror is larger, so that the total time of spectral movement and scanning is longer, namely the scanning speed is low; in addition, the michelson interferometer has low magnification and low spectral resolution.
Disclosure of Invention
The present invention has been made to solve the above problems, and an object of the present invention is to provide a multi-reflection interference automatic measurement system.
The invention provides a multi-reflection interference automatic measuring system, which is characterized by comprising the following components: a light source section that emits incident light; a multi-reflection interferometer that receives incident light and outputs emitted light; the optical sensor receives the emergent light and converts an optical signal into an electrical signal; an analog-to-digital conversion section converting the electric signal into a digital signal; and a control section which controls operations of the light source section, the multi-reflection interferometer, the optical sensor, and the analog-to-digital conversion section, and converts the digital signal into an interferogram to output, wherein the multi-reflection interferometer includes: a first supporting unit; a beam splitter fixed on the first support unit for splitting incident light into a first beam and a second beam; the first reflecting unit is fixedly arranged on the first supporting unit and comprises a first long reflecting mirror, a first short reflecting mirror and a first terminal reflecting mirror, the first long reflecting mirror and the first short reflecting mirror are parallel to each other and are arranged oppositely, the first terminal reflecting mirror and the first short reflecting mirror are arranged on the same side of the first long reflecting mirror, and a first light beam is vertically incident into the first terminal reflecting mirror after being reflected for multiple times by the first long reflecting mirror and the first short reflecting mirror and returns to the beam splitter in the original way; and a second reflection unit arranged on the first support unit and including a second long reflector, a second short reflector, a second terminal reflector and a moving assembly, wherein the second long reflector and the second short reflector are parallel and opposite to each other, the second terminal reflector and the second short reflector are arranged on the same side of the second long reflector, the moving assembly includes a ball screw, a slider, a stepping motor and a movable mirror support, the ball screw is arranged on the first support unit and is perpendicular to the second short reflector, the slider is sleeved on the ball screw, an output shaft of the stepping motor is connected with the ball screw through a coupling for driving the ball screw to rotate and further driving the slider to move along the length direction of the ball screw, the movable mirror support is arranged on the slider, the second long reflector is arranged on the movable mirror support, and the second light beam is reflected for multiple times by the second long reflector and the second short reflector, and the first light beam and the second light beam are converged at the beam splitter and then output as emergent light.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: wherein, the control part comprises an upper computer and a singlechip which are in communication connection.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the single chip microcomputer is in communication connection with the stepping motor and used for controlling the operation of the stepping motor so that the second long reflector gradually moves from an initial position to a final position far away from the second short reflector at a preset time interval, the second long reflector is moved from one preset position to another preset position at each time interval, the time interval comprises moving time and static time, and the control part controls the optical sensor to collect electric signals of emergent light of the second long reflector at different preset positions.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the second reflection unit further comprises a grating ruler arranged in parallel with the ball screw, the grating ruler is provided with a probe, the probe is connected to the sliding block through a connecting piece and used for moving along with the sliding block, the control portion is in communication connection with the probe, and the position of the sliding block is positioned according to a position signal of the probe.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the first long reflector, the first short reflector, the first terminal reflector, the second long reflector, the second short reflector and the second terminal reflector are all plane reflectors.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the length of the first long reflector and the length of the second long reflector are both 105mm, the length of the first short reflector and the length of the second short reflector are both 68mm, the horizontal distance between the first long reflector and the first short reflector is 30mm, the horizontal distance between the second long reflector and the second short reflector is 30mm at the minimum and 50mm at the maximum, and the number of times of light beam reflection on the first long reflector and the second long reflector is 2.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the maximum optical path difference between the second reflection unit and the first reflection unit is 132.65mm, the optical path magnification is 6.63, and the spectral resolution of the multi-reflection interferometer is 0.075cm-1。
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: the first support unit is provided with a support plate and a first Contraband-shaped plate, a plurality of through holes, namely a first through groove 21274are uniformly formed in the support plate, the shaped plate is inverted on the support plate, two ends of the bottom of the shaped plate extend outwards to form an extension plate, a first through groove matched with the through holes is formed in the extension plate, and the first through groove 21274is fixed on the support plate in a mode that a bolt penetrates through the first through groove and the through holes.
In the multi-reflection interference automatic measuring system provided by the invention, the system can also have the following characteristics: wherein, the top of first Contraband shaped plate evenly is provided with a plurality of through holes, the multiple reflection interferometer still includes six second supporting element, six second supporting element are used for fixed beam splitter respectively, first long speculum, first short speculum, first terminal speculum, second short speculum and second terminal speculum, the second supporting element includes the installed part, first bracing piece and first mounting, the installed part has first logical groove, pass the mode of first logical groove and through hole through the bolt and fix the installed part at the top of first Contraband shaped plate, first bracing piece vertical connection is on the installed part, first mounting cover is established on first bracing piece, and first mounting is fixed on the second bracing piece with the mode of bolt fastening, fixed draw-in groove has.
In the multi-reflection interferometric automatic measuring system provided by the present invention, the system may further include: a third supporting unit, which comprises a second Contraband-shaped plate, a detector positioning plate and a light screen positioning plate, wherein the second 21274is inverted on the supporting plate, the light source part and the third supporting unit are respectively positioned at two sides of the beam splitter, two ends of the bottom of the third supporting unit extend outwards to form an extension plate, the extension plate is provided with a second through groove matched with the through hole, the second 21274is fixed on the supporting plate in a mode that a bolt penetrates through the second through groove and the through hole, the top of the second Contraband-shaped plate is provided with a threaded hole, the detector positioning plate is an L-shaped plate and is provided with a first horizontal plate body and a first vertical plate body which are connected together, the bottom of the first horizontal plate body is provided with a third through groove, the detector positioning plate is fixed on the second Contraband-shaped plate in a mode that the bolt penetrates through the third through groove and the threaded hole, an optical sensor is fixedly installed on the first vertical plate body, and, the L-shaped plate is provided with a second horizontal plate body and a second vertical plate body which are connected together, the second horizontal plate body is connected to the first horizontal plate body, the second vertical plate body is parallel to the first vertical plate body, and the second vertical plate body is provided with a light screen slot.
Action and Effect of the invention
According to the multi-reflection interference automatic measuring system related by the invention, because the multi-reflection interferometer comprises the multi-reflection interferometer which is provided with the beam splitter, the first reflection unit and the second reflection unit, the first reflection unit is provided with the first long reflector, the first short reflector and the first terminal reflector, the second reflection unit is provided with the second long reflector, the second short reflector, the second terminal reflector and the moving component, the second long reflector can be moved by the moving component, so that the distance between the second long reflector and the second short reflector is gradually increased, the incident light is divided into the first light beam and the second light beam after being split by the beam splitter, the first light beam is reflected for a plurality of times by the first long reflector and the first short reflector, the incident light beam is vertically reflected into the first terminal reflector and then returns to the beam splitter, the second light beam is reflected for a plurality of times by the second long reflector and the second short reflector, the multi-reflection interferometer has the advantages that the multi-reflection interferometer is vertically injected into the second terminal reflector and then returns to the beam splitter in the original path, the first light beam and the second light beam are converged at the beam splitter and then output as emergent light, so that compared with the traditional Michelson interferometer, under the same spectral resolution, the multi-reflection interferometer has high amplification factor, the moving distance of the movable mirror is shortened, the interference field measuring time is further shortened, and the measuring time is about one third of that of the Michelson interferometer; in addition, the optical path difference amplification factor can be realized by changing the distance between the second long reflector and the second short reflector and the incident angle of the light source according to actual needs, and the amplification factor can be adjusted to an actually required value on the premise that the process and the sampling rate are allowed, so that higher spectral resolution is obtained.
In addition, the multi-reflection interferometer reduces the influence on the vibration in the time modulation type interferometer and the control difficulty. In interferometers with lower magnification, if higher spectral resolution is desired, longer moving mirror distances are required, and therefore, high demands are placed on the process and control of the moving mirror moving structure. When the interferometer of the scheme is applied to obtain the same spectral resolution, the amplification factor can be adjusted to a higher numerical value to reduce the moving distance of the movable mirror, so that the influence of structural vibration and environmental jitter on measurement in the moving process of the movable mirror is greatly reduced.
In addition, the multi-reflection interference automatic measuring system has a compact design and is convenient to miniaturize. Because the moving distance of the second long reflecting mirror is shortened under the condition of obtaining the same spectral resolution, a shorter moving mirror moving track can be designed, and the whole interference field automatic measuring system can be scaled according to a certain proportion without affecting the performance.
In addition, because the multi-reflection interference automatic measuring system also comprises the light source part, the optical sensor, the analog-digital conversion part and the control part, the control part can control the automatic operation of the light source part, the multi-reflection interferometer, the optical sensor and the analog-digital conversion part, and the multi-reflection interference automatic measuring system has remarkable superiority in the aspects of spectral resolution, scanning process control and optical path difference amplification factor control, so that real-time measurement becomes possible.
In addition, the multi-reflection interference automatic measurement system realizes interference field measurement with high system stability, short sampling period and adjustable optical path difference amplification factor on the premise of facilitating actual engineering construction. The influence caused by light path adjustment, return stroke error and reading error in the interferometer is eliminated.
Drawings
FIG. 1 is a schematic flow chart of the operation of an automatic multi-reflection interferometric measuring system in an embodiment of the present invention;
FIG. 2 is a schematic diagram of the operation of a multi-reflection interferometer in an embodiment of the present invention;
FIG. 3 is a schematic diagram of a multi-reflection interferometer in an embodiment of the present invention;
FIG. 4 is a schematic diagram of the structure of the moving assembly and the second long mirror in an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a third supporting unit in the embodiment of the present invention;
FIG. 6 is a schematic flow diagram for controlling a multi-reflection interferometer and a light sensor by a single chip in an embodiment of the invention;
fig. 7 is a schematic control flow diagram of the upper computer to the lower computer in the embodiment of the present invention.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the effects of the invention easy to understand, the following embodiments are specifically described in the automatic multi-reflection interference measuring system of the invention with reference to the attached drawings.
FIG. 1 is a schematic flow chart of the operation of a multi-reflection interferometric automatic measuring system in an embodiment of the present invention.
As shown in fig. 1, the automatic multi-reflection interference measurement system 100 in the present embodiment includes a light source unit 10, a multi-reflection interferometer 20, a light sensor 40, an amplifier circuit 50, an analog-to-digital conversion unit 60, and a control unit (not shown).
The light source section 10 includes a laser light source (not shown), a collector (not shown), and a collimator (not shown). The laser light source emits laser light, which is collected by the collector and collimated by the collimator, and then emitted to the multi-reflection interferometer 20 as incident light.
FIG. 2 is a schematic diagram of the operation of a multi-reflection interferometer in an embodiment of the present invention; FIG. 3 is a schematic diagram of a multi-reflection interferometer in an embodiment of the present invention; fig. 4 is a schematic view of the moving assembly and the second long mirror in an embodiment of the present invention.
As shown in fig. 2 to 4, the multi-reflection interferometer 20 includes a first supporting unit 21, a second supporting unit 22, a beam splitter 23, a first reflecting unit 24, and a second reflecting unit 25.
The first supporting unit 21 has supporting plates 211 and a v 21274and a shape plate 212. A plurality of through holes are uniformly formed on the supporting plate 211. The Contraband-shaped plate 212 is inverted on the supporting plate 211, and both ends of the bottom thereof extend outward to form extension plates 2121. The extending plate 2121 is provided with a through groove 2122 matched with the through hole. The Contraband shaped plate 212 is secured to the support plate 211 by bolts passing through the through slots 2122 and the through holes. The Contraband-shaped plate 212 has a larger plane top and a plurality of through holes 2123 uniformly distributed on its surface.
As shown in fig. 3, the second supporting units 22 are provided on Contraband-shaped plates 212, which are six in number. Each of the second support units 22 includes a mounting part 221, a first support bar 222, a first fixing part 223, and a first fastening bolt 224.
The mounting member 221 has through slots and the mounting member 221 is secured Contraband on top of the shaped plate 212 by means of bolts passing through the through slots and through holes 2123. The first support bar 222 is vertically connected to the slider. The first fixing member 223 is fitted over the first support bar 222 and is fixed to the second support bar 222 in a bolt-fixing manner by a first fastening bolt 224. When the first fastening bolt 224 is tightened, the first fixing member 223 is fixed on the second support bar 222; when the first fastening bolt 224 is loosened, the first fixing member 223 can be horizontally rotated around the second support bar 222 to adjust the horizontal position of the first fixing member 223. In this embodiment, the first fixing member 223 can be adjusted to a horizontal angle of ± 3 °. The first fixing member 223 has a vertically arranged fixing groove 2231, and the fixing groove 2231 is used for placing a corresponding reflector or a spectroscope.
The beam splitter 23 is provided on one second support unit 22 and is mounted on the fixed card slot 2231 of the second support unit 22. The beam splitter 23 is a beam splitter for receiving the incident light and splitting it into two beams, a first beam S1 and a second beam S2. In the present embodiment, the incident angle between the incident light and the beam splitter 23 is 34 °, and the degree of linearity of the incident light is 10m m.
The first light beam S1 is a reflected light beam and the second light beam S2 is a transmitted light beam, or the first light beam S1 is a transmitted light beam and the second light beam S2 is a reflected light beam. In the present embodiment, the first light beam S1 is a reflected light beam, and the second light beam S2 is a transmitted light beam.
The first reflection unit 24 is disposed at one side of the beam splitter 23 to process the first light beam S1, and includes a first long mirror 241, a first short mirror 242, and a first terminal mirror 243. The first long mirror 241, the first short mirror 242, and the first terminal mirror 243 are respectively disposed on the three second support units 22 and are mounted on the corresponding fixed card slots 2231. The first long mirror 241 and the first short mirror 242 are disposed parallel to and opposite to each other at the same height. The first terminal reflecting mirror 243 is disposed on the same side of the first long reflecting mirror 241 as the first short reflecting mirror 242. First long mirror 241 is farther from beam splitter 23 than first short mirror 242. The first long mirror 241, the first short mirror 242, and the first terminal mirror 243 are all plane mirrors.
The first light beam S1 first impinges on the first long mirror 241, then reflects a plurality of times between the first long mirror 241 and the first short mirror 242, then perpendicularly enters the first end mirror 243, and returns to the beam splitter 23.
In the present embodiment, the length of the first long mirror 241 is 105mm, the length of the first short mirror 242 is 68mm, and the horizontal distance between the first long mirror 241 and the first short mirror 242 is 40 mm. The number of reflections of the first light beam S1 on the first long mirror 241 is 2.
The second reflecting unit 25 is disposed on the other side of the beam splitter 23, processes the second light beam S2, and includes a second long mirror 251, a second short mirror 252, a second end mirror 253, a moving assembly 254, and a grating scale 255. The second long mirror 251, the second short mirror 252, and the second end mirror 253 are all planar mirrors.
The second short mirror 252 and the second terminal mirror 253 are respectively provided on the two second support units 22. That is, the six second support units 22 mount the beam splitter 23, the first long mirror 241, the first short mirror 242, and the first end mirror 243, the second short mirror 252, and the second end mirror 253, respectively.
As shown in fig. 4, the moving assembly 254 includes a ball screw 2541, a slider 2542, a stepping motor 2543, and a moving mirror support 2544.
The ball screw 2541 is installed on the support plate 211 to be vertically disposed with respect to the second short reflecting mirror 252. The slider 2542 is sleeved on the ball screw 2541 and forms a ball-screw pair with the ball screw 2541. An output shaft of the stepping motor 2543 is connected with the ball screw 2541 through a coupling, and is used for driving the ball screw 2541 to rotate so as to drive the slider 2542 to move along the length direction of the ball screw 2541. In this embodiment, the optical slide table with a 75mm stroke and a 1.6kg weight and a torque of less than 0.05N · cm is used as the slider 5242, and the stepping motor 2543 is a five-phase stepping motor.
The moving mirror support 2544 is mounted on the slide block 2542 and includes a second support bar 25441, a second fixing member 25442 and a second fastening bolt 25443. The second support bar 25441 is vertically disposed on the slider 5242. The second fixing member 25442 is sleeved on the second support rod 25441 and fixed on the second support rod 222 in a bolt fixing manner through a second fastening bolt 25443. In this embodiment, the second fixing member 25442 can be adjusted to a horizontal angle of ± 3 °. The second fixing member 25442 has a vertically arranged fixing slot for placing the second long reflecting mirror 251.
The scale 255 is mounted on the support plate 211 and is disposed in parallel with the ball screw 2541. The linear scale 255 has a probe (not shown) connected to the slider 5242 through a connector 2511, and is used for moving with the slider 5242 to position the slider 5242, so as to generate linear scale data, thereby allowing precise adjustment and limitation of the position of the movable mirror. The grating scale 255 is an incremental grating scale with a stroke of 60mm, a resolution of 1 μm and a zero point.
As shown in fig. 2 and 3, the second long reflecting mirror 251, also called as an operating mirror 251, is disposed in the fixing slot of the second fixing member 25442, and the second long reflecting mirror 251 and the second short reflecting mirror 252 are parallel to each other and are disposed at the same height position relatively. The second end mirror 253 is disposed on the same side of the second long mirror 251 as the second short mirror 252.
The second light beam S2 first impinges on the second long mirror 251, then reflects a plurality of times on the second long mirror 251 and the second short mirror 252, and then enters the second end mirror 253 perpendicularly, and returns to the beam splitter 23. The first beam S1 and the second beam S2 are converged by the beam splitter 23 and output as outgoing light (laser interference signal).
In the present embodiment, the length of the second long mirror 251 is 105mm, and the length of the second short mirror 252 is 68 mm. When the second long mirror 251 is located at its initial position, the horizontal spacing between the second long mirror 251 and the second short mirror 252 is a minimum of 40 mm; the horizontal spacing between the second long mirror 251 and the second short mirror 252 is at a maximum of 60mm when the second long mirror 251 is in its final position. The number of reflections of the first light beam S1 on the first long mirror 241 is 2. The maximum optical path difference between the second reflection unit 25 and the first reflection unit 24 is 132.65mm, the optical path magnification is 6.63, and the spectral resolution of the multi-reflection interferometer 20 is 0.075cm-1。
FIG. 5 is a schematic structural diagram of a third supporting unit according to an embodiment of the present invention
The third support unit 30 includes a second Contraband-shaped plate 31, a detector positioning plate 32, and a light screen positioning plate 33.
The second Contraband-shaped plate 31 is placed upside down on the supporting plate 211, and is located at two sides of the beam splitter 23 with the light source 10, and two ends of the bottom of the second Contraband-shaped plate extend outwards to form an extension plate, the extension plate is provided with a second through slot 311 matched with the through hole, and the second Contraband-shaped plate 31 is fixed on the supporting plate 211 by means of bolts passing through the second through slot 311 and the through hole. The top of the second Contraband shaped plate 31 is provided with a threaded hole (not shown).
The detector positioning plate 32 is an L-shaped plate, and has a first horizontal plate 321 and a first vertical plate 322 connected together, a third through groove 3211 is formed at the bottom of the first horizontal plate 321, and the detector positioning plate 32 is fixed on the second Contraband-shaped plate 31 by passing a bolt through the third through groove 3211 and a threaded hole. The first vertical plate 322 is used to mount the light sensor 40.
The light screen positioning plate 33 is mounted on the detector positioning plate 32, is an L-shaped plate, and has a second horizontal plate 331 and a second vertical plate 332 connected together, the second horizontal plate 331 is connected to the first horizontal plate 321, and the second vertical plate 332 is parallel to the first vertical plate 322. The second vertical plate body 332 has a screener slot 3321, and the screener slot 3321 is used for inserting a screener to debug the interfering light signals.
The optical sensor 40 is mounted on the first vertical plate body 322, and is configured to receive outgoing light (laser interference signal) from the multi-reflection interferometer 20 and convert the optical signal into an electrical signal.
The amplifier circuit 50 is electrically connected to the optical sensor 40 and amplifies the electrical signal.
The analog-to-digital conversion unit 60 is electrically connected to the amplification circuit 50, and converts the amplified electrical signal into a digital signal.
The control unit includes an upper computer 71 and a lower computer 72 connected to each other in communication. The lower computer 72 is a single chip microcomputer, and the upper computer 71 is a computer, a PC (personal computer) end and the like with an input display function. The lower computer 72 is in communication connection with the probe of the grating ruler and in communication connection with the analog-to-digital conversion part 60, and is used for collecting data and digital signals of the grating ruler and transmitting the data and the digital signals to the upper computer 71. The lower machine 72 is also in communication with the step motor 2543 for directly controlling the operation of the step motor 2543 such that the second long mirror 251 is gradually moved from its initial position to a final position away from the second short mirror 252 along the length of the ball screw 2541 at predetermined time intervals. At each time interval, the second long mirror 251 goes from one predetermined position to another predetermined position, and the time interval includes a moving time and a stationary time. The lower machine 72 is also used to directly control the stepping motor 2543 so that the second long mirror 251 is reset to its initial position.
The upper computer 71 is used for controlling and receiving the working instruction and commanding the lower computer 72 to control the operation of the light source part 10, the multi-reflection interferometer 20, the amplifying circuit 50 and the analog-to-digital conversion part 60, and processing the digital signal sent by the lower computer 72 to obtain an interference pattern and output the interference pattern. For example, after receiving the operation start instruction, the upper computer 71 commands the lower computer 72 to control the light source unit 10 to turn on, the multi-reflection interferometer 20 starts to operate the optical sensor 40 to turn on, and the amplifying circuit 50 and the analog-to-digital conversion unit 60 start to operate, so that the multi-reflection interferometry automatic measurement system 100 operates.
As shown in FIG. 1, the operation of the multi-reflection interferometric automatic measurement system 100 includes the following steps:
in step S1, the light source section 10 emits incident light.
In step S2, incident light enters the multi-reflection interferometer 20 to generate outgoing light and grating scale data. The process is a multi-reflection interference light splitting method, which comprises the following substeps:
in step S2-1, the incident light reaches the beam splitter 23, and is split into the first light beam S1 and the second light beam S2 by the beam splitter.
In step S2-2, the first light beam S1 enters the first reflection unit 24, is reflected a plurality of times between the first long mirror 241 and the first short mirror 242, then perpendicularly enters the first end mirror 243, and returns to the beam splitter 23.
Step S2-3, the second light beam S2 enters the second reflecting unit 25, is reflected between the second long mirror 251 and the second short mirror 252 for a plurality of times, then enters the second end mirror 253 vertically, and returns to the beam splitter 23, during which the second long mirror 251 is continuously moved under the control of the lower computer 72 so that the distance between the second long mirror 251 and the second short mirror 252 gradually increases.
And step S2-4, the first light beam S1 and the second light beam S2 returning to the beam splitter are output as emergent light after being converged by the beam splitter.
In step S3, the optical sensor 40 converts the optical signal of the emergent light into an electrical signal, and the electrical signal passes through the amplifying circuit 50 and then reaches the analog-to-digital conversion module 60 to obtain a digital signal. Since the second long mirror 251 is gradually moved, the optical sensor 40 converts the optical signal of the outgoing light into an electrical signal every time the second long mirror 251 is moved to a predetermined position.
In step S4, the lower computer 72 collects the converted digital signal and the grating scale data in the interferometer multi-reflection interferometer 20, and then performs serial communication with the upper computer 71 to upload the data, and the upper computer processes the data to obtain the moving distance between the interferogram and the first long reflector 241 (moving mirror).
The upper computer 71 receives the work starting instruction and then commands the lower computer 72 to carry out grating scale calibration work, then the second long reflecting mirror 251 is moved to a preset position, the scanning process is started, data are uploaded to the upper computer 71 after the scanning process is finished, and the upper computer 71 carries out calculation and analysis in the next step. The detailed process is shown in figures 6 and 7.
FIG. 6 is a flow chart of a single-chip microcomputer controlled multi-reflection interferometer and light sensor in an embodiment of the invention.
As shown in fig. 6, the process of the lower computer 72 controlling the multi-reflection interferometer 20 and the optical sensor includes the following steps:
and step SA-1, the grating ruler searches for a zero point, and then step SA-2 is carried out.
In step SA-2, the second long mirror (movable mirror) 251 is moved to the initial position, and then the process proceeds to step SA-3.
In step SA-3, the lower computer 72 collects data including grating scale data and digital signals, and then proceeds to step SA-4.
Step SA-4, the lower computer 72 judges whether the number of the sampling points corresponding to the acquired data reaches a preset number or exceeds a preset range, and if so, the step SA-6 is performed; if not, the process then proceeds to step SA-5.
In step SA-5, the second long mirror (moving mirror) 251 is moved to the next predetermined position at predetermined time intervals, step SA-3.
And step SA-6, the lower computer 72 finishes the acquisition and sends the acquired data to the upper computer 71.
Fig. 7 is a schematic control flow diagram of the upper computer to the lower computer in the embodiment of the present invention.
As shown in fig. 7, the process of the upper computer 71 controlling the lower computer 72 includes the following steps:
in step SB-1, the upper computer 71 notifies the lower computer 72 to start working, and then the process goes to step SB-2.
And step SB-2, the upper computer 71 monitors the lower computer 72 and then the step SB-3 is carried out.
Step SB-3, the upper computer 71 judges whether a transmission start signal from the lower computer 72 is obtained, and if so, the step SB-4 is carried out; if not, then go to step SB-2.
And step SB-4, the upper computer 71 receives the acquired data from the lower computer 72, and then the step SB-5 is carried out.
Step SB-5, the upper computer 71 judges whether the received collected data is cut-off data, if so, the transmission is finished, and then the step SB-6 is carried out; if not, indicating that the transmission is not complete, then go to step SB-4.
In step SB-6, the upper computer 71 performs data processing on the acquired data, thereby generating and outputting an interferogram and a moving distance of the first long mirror 241 (moving mirror).
Effects and effects of the embodiments
According to the multi-reflection interference automatic measuring system related to the embodiment, because the multi-reflection interferometer comprises a multi-reflection interferometer, the multi-reflection interferometer comprises a beam splitter, a first reflection unit and a second reflection unit, the first reflection unit comprises a first long reflector, a first short reflector and a first terminal reflector, the second reflection unit comprises a second long reflector, a second short reflector, a second terminal reflector and a moving assembly, the second long reflector can be moved by the moving assembly, the distance between the second long reflector and the second short reflector is gradually increased, incident light is split by the beam splitter and is divided into a first light beam and a second light beam, the first light beam is reflected by the first long reflector and the first short reflector for multiple times and is vertically incident to the first terminal reflector, the second light beam returns to the beam splitter in a primary path, and is reflected by the second long reflector and the second short reflector for multiple times, the multi-reflection interferometer has the advantages that the multi-reflection interferometer is vertically injected into the second terminal reflector and then returns to the beam splitter in the original path, the first light beam and the second light beam are converged at the beam splitter and then output as emergent light, so that compared with the traditional Michelson interferometer, under the same spectral resolution, the multi-reflection interferometer has high amplification factor, the moving distance of the movable mirror is shortened, the interference field measuring time is further shortened, and the measuring time is about one third of that of the Michelson interferometer; in addition, the optical path difference amplification factor can be realized by changing the distance between the second long reflector and the second short reflector and the incident angle of the light source according to actual needs, and the amplification factor can be adjusted to an actually required value on the premise that the process and the sampling rate are allowed, so that higher spectral resolution is obtained.
In addition, the multi-reflection interferometer reduces the influence on the vibration in the time modulation type interferometer and the control difficulty. In interferometers with lower magnification, if higher spectral resolution is desired, longer moving mirror distances are required, and therefore, high demands are placed on the process and control of the moving mirror moving structure. When the interferometer of the scheme is applied to obtain the same spectral resolution, the amplification factor can be adjusted to a higher numerical value to reduce the moving distance of the movable mirror, so that the influence of structural vibration and environmental jitter on measurement in the moving process of the movable mirror is greatly reduced.
In addition, the multi-reflection interference automatic measuring system of the embodiment has a compact design and is convenient to miniaturize. Because the moving distance of the second long reflecting mirror is shortened under the condition of obtaining the same spectral resolution, a shorter moving mirror moving track can be designed, and the whole interference field automatic measuring system can be scaled according to a certain proportion without affecting the performance.
In addition, because the multi-reflection interference automatic measuring system of the embodiment further comprises the light source part, the optical sensor, the analog-to-digital conversion part and the control part, the control part can control the automatic operation of the light source part, the multi-reflection interferometer, the optical sensor and the analog-to-digital conversion part, and the multi-reflection interference automatic measuring system has remarkable advantages in the aspects of spectral resolution, scanning process control and optical path difference amplification factor control, so that real-time measurement becomes possible.
In addition, the multi-reflection interference automatic measurement system of the embodiment realizes interference field measurement with high system stability, short sampling period and adjustable optical path difference amplification factor on the premise of being convenient for actual engineering construction. The influence caused by light path adjustment, return stroke error and reading error in the interferometer is eliminated.
Further, because, the second reflection unit still includes the grating chi that has the probe, and the probe passes through the connecting piece to be connected at the slider, and control part and probe communication connection can be according to the position signal location slider's of probe position to be convenient for realize the accurate control to second field reflection mirror position.
Further, the lengths of the first long reflector and the second long reflector are both 105mm, the lengths of the first short reflector and the second short reflector are both 68mm, the horizontal distance between the first long reflector and the first short reflector is 40mm, the horizontal distance between the second long reflector and the second short reflector is 40mm at the minimum and 60mm at the maximum, the number of times of light beam reflection on the first long reflector and the second long reflector is 2, the maximum optical path difference between the second reflection unit and the first reflection unit is 132.65mm, the optical path amplification factor of the system of the embodiment can reach 6.63 under the optimized parameters, the system is 3.315 times of the traditional michelson interferometer, more interference light information is provided in shorter moving mirror displacement, and the spectral resolution can reach 0.075cm-1Is superior to the standard of a precision analysis spectrometer.
Further, since the first supporting unit has a supporting plate and a square plate, a plurality of through holes are formed in the supporting plate, 21274, and the square plate has a through groove, the 21274can be very conveniently fixed to the supporting plate by means of bolts passing through the through grooves and the through holes.
Furthermore, a plurality of through holes are arranged at the top of the Contraband-shaped plate, the second supporting unit comprises a mounting part, a first supporting rod and a first fixing part, the mounting part is provided with a through groove, and the mounting part can be very conveniently fixed at the top of the Contraband-shaped plate by a bolt passing through the through groove and the through holes; first bracing piece is vertical to be connected on the installed part, and first mounting cover is established on first bracing piece to first mounting is fixed on the second bracing piece with bolt fastening's mode, has fixed slot, and the position of fixed slot in the horizontal direction is adjusted to the elasticity of consequently being convenient for through adjusting bolt. The number of the second supporting units is six, the beam splitter, the first long reflector, the first short reflector, the first terminal reflector, the second short reflector and the second terminal reflector are respectively fixed, and the structures are fixed on the fixing clamping grooves of the corresponding supporting units, so that the first long reflector and the first short reflector can be guaranteed to be parallel to each other through the bolt structure, and the first light beam can be vertically shot into the first terminal reflector after being reflected for multiple times by the first long reflector and the first short reflector.
Further, since the Contraband shaped plate is inverted on the support plate with the first reflection unit etc. structure disposed above the v 21274, the volume of the overall multi-reflection interferometer can be reduced by disposing a portion of the moving assembly below the v 21274, and such Contraband shaped plate also facilitates the installation of the first reflection unit etc. structure.
Furthermore, because the main elements of the multi-reflection interferometer are a six-sided plane mirror and a one-sided beam splitter, and other parts with high requirements on the processing technology are not provided, the optical elements are easy to obtain; on the other hand, most of the elements are fixed in positions and independent from each other, and are not required to be adjusted according to subsequent operation after being placed, so that assembly is facilitated.
The above embodiments are preferred examples of the present invention, and are not intended to limit the scope of the present invention.
Claims (10)
1. A multi-reflection interferometric automatic measurement system, comprising:
a light source section that emits incident light;
the multi-reflection interferometer receives the incident light and outputs emergent light;
the optical sensor receives the emergent light and converts an optical signal into an electrical signal;
an analog-to-digital conversion section that converts the electric signal into a digital signal; and
a control part for controlling the operation of the light source part, the multi-reflection interferometer, the optical sensor and the analog-to-digital conversion part, converting the digital signal into an interference pattern and outputting the interference pattern,
wherein the multi-reflection interferometer comprises:
a first supporting unit;
a beam splitter fixed on the first support unit for splitting the incident light into a first beam and a second beam;
the first reflecting unit is fixedly arranged on the first supporting unit and comprises a first long reflecting mirror, a first short reflecting mirror and a first terminal reflecting mirror, the first long reflecting mirror and the first short reflecting mirror are parallel to each other and are arranged oppositely, the first terminal reflecting mirror and the first short reflecting mirror are arranged on the same side of the first long reflecting mirror, and after multiple reflections of the first light beam by the first long reflecting mirror and the first short reflecting mirror, the first light beam vertically enters the first terminal reflecting mirror and returns to the beam splitter in an original way; and
a second reflection unit arranged on the first support unit and including a second long reflector, a second short reflector, a second terminal reflector and a moving assembly, wherein the second long reflector and the second short reflector are parallel and opposite to each other, the second terminal reflector and the second short reflector are arranged on the same side of the second long reflector,
the moving assembly comprises a ball screw, a sliding block, a stepping motor and a moving mirror bracket, the ball screw is arranged on the first supporting unit and is vertical to the second short reflecting mirror, the sliding block is sleeved on the ball screw, an output shaft of the stepping motor is connected with the ball screw through a coupler and is used for driving the ball screw to rotate so as to drive the sliding block to move along the length direction of the ball screw, the moving mirror bracket is arranged on the sliding block, the second long reflecting mirror is arranged on the moving mirror bracket,
the second light beam passes through the second long reflector and the second short reflector and is reflected for multiple times, perpendicularly enters the second terminal reflector and returns to the beam splitter in the original path, and the first light beam and the second light beam are output as emergent light after being converged by the beam splitter.
2. The system of claim 1, wherein:
the control part comprises an upper computer and a single chip microcomputer which are in communication connection.
3. The system of claim 2, wherein:
wherein the single chip microcomputer is in communication connection with the stepping motor and is used for controlling the operation of the stepping motor so as to enable the second long reflector to gradually move from an initial position to a final position far away from the second short reflector at preset time intervals, each time interval is from one preset position to another preset position, and the time intervals comprise moving time and static time,
the control part controls the optical sensor to collect the electric signals of the emergent light when the second long reflector is at different preset positions.
4. The system of claim 1, wherein:
wherein the second reflection unit further comprises a grating ruler arranged in parallel with the ball screw, the grating ruler is provided with a probe,
the probe is connected to the sliding block through a connecting piece and is used for moving along with the sliding block,
the control part is in communication connection with the probe and positions the position of the sliding block according to the position signal of the probe.
5. The system of claim 1, wherein:
the first long reflector, the first short reflector, the first terminal reflector, the second long reflector, the second short reflector and the second terminal reflector are all plane reflectors.
6. The system of claim 1, wherein:
the length of the first long reflector and the length of the second long reflector are both 105mm, the length of the first short reflector and the length of the second short reflector are both 68mm, the horizontal distance between the first long reflector and the first short reflector is 30mm, the horizontal distance between the second long reflector and the second short reflector is 30mm at the minimum and 50mm at the maximum, and the number of times of reflecting light beams on the first long reflector and the second long reflector is 2 times.
7. The multi-reflection interferometric automatic measurement system of claim 6, characterized in that:
the maximum optical path difference between the second reflection unit and the first reflection unit is 132.65mm, the optical path magnification is 6.63, and the spectral resolution of the multi-reflection interferometer is 0.075cm-1。
8. The system of claim 1, wherein:
wherein the first support unit has a support plate and a first Contraband-shaped plate,
a plurality of through holes are uniformly arranged on the supporting plate,
the first 21274and the second 21274are arranged on the supporting plate in an inverted mode, two ends of the bottom of the first 21274are extended outwards to form an extending plate, a first through groove matched with the through hole is formed in the extending plate, and the first 21274and the second Y-shaped plate are fixed on the supporting plate in a mode that a bolt penetrates through the first through groove and the through hole.
9. The system of claim 8, wherein:
wherein the top of the first Contraband shaped plate is uniformly provided with a plurality of through holes,
the multi-reflection interferometer further includes six second supporting units for fixing the beam splitter, the first long mirror, the first short mirror, the first terminal mirror, the second short mirror, and the second terminal mirror, respectively, the second supporting units including a mounting member, a first supporting rod, and a first fixing member,
the mounting member has a first channel and is secured to the top of the first Contraband shaped panel by means of a bolt passing through the first channel and the through-going hole,
the first support rod is vertically connected to the mounting member,
the first fixing piece is sleeved on the first supporting rod, is fixed on the second supporting rod in a bolt fixing mode and is provided with a fixing clamping groove.
10. The multi-reflection interferometric automatic measurement system of claim 8, further comprising:
a third supporting unit including a second Contraband-shaped plate, a detector positioning plate, and a light screen positioning plate,
the second 21274; shaped plate is arranged on the supporting plate in an inverted manner, is respectively positioned at two sides of the beam splitter together with the light source part, the two ends of the bottom of the second 21274; shaped plate extend outwards to form an extension plate, a second through groove matched with the through hole is arranged on the extension plate, the second 21274; shaped plate is fixed on the supporting plate in a manner that a bolt penetrates through the second through groove and the through hole,
the top of the second Contraband shaped plate is provided with a threaded hole, the detector positioning plate is an L-shaped plate and is provided with a first horizontal plate body and a first vertical plate body which are connected together, the bottom of the first horizontal plate body is provided with a third through groove, the detector positioning plate is fixed on the second Contraband shaped plate by a mode that a bolt penetrates through the third through groove and the threaded hole, the first vertical plate body is fixedly provided with the optical sensor,
the light screen positioning plate is installed on the detector positioning plate and is an L-shaped plate, the light screen positioning plate is provided with a second horizontal plate body and a second vertical plate body which are connected together, the second horizontal plate body is connected onto the first horizontal plate body, the second vertical plate body is parallel to the first vertical plate body, and the second vertical plate body is provided with a light screen inserting groove.
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| CN113566714A (en) * | 2021-07-29 | 2021-10-29 | 同济大学 | Self-tracing type grating interference precision displacement measurement system |
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