CN112928212B - 基于MOFs和有机半导体异质结的气体传感器件及其制备方法 - Google Patents
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Abstract
本发明属于功能器件技术领域,具体为基于MOFs和有机半导体异质结的气体传感器件及其制备方法。本发明方法包括:采用带有SiO2层的硅片剪切成小面积于4 cm2的正方形或者圆形,而后使用匀胶机,将导电MOFs和有机半导体材料的混合溶液均匀地滴在硅片上,高转速下将多余的溶液甩飞;将以上器件退火处理,即得到导电MOFs和有机半导体聚合物的异质结的器件;将其应用于有害气体氛围中,定性检测有害气体。本发明用制备的基于导电MOFs材料和有机半导体材料的异质结结构搭建的器件,运用于有害气体检测,检测灵敏度高,拓宽了其应用领域。
Description
技术领域
本发明属于功能器件技术领域,具体涉及一类基于导电MOFs和有机半导体材料异质结的气体传感器件及其制备方法。
背景技术
金属有机框架(Metal Organic Frameworks,MOFs),也称配位聚合物,是一类由有机配体和无机金属离子(或簇)通过配位键自组装杂化而形成的高度有序的多孔材料,在材料、物理、化学等领域具有广泛应用。它具有高的比表面积、可调控的孔直径、易于功能化和富有较多的活性位点等特点,成为较有前景的功能材料。将不同的配体和金属在在几何结构中有不同的排列组合,使得MOFs具有丰富多样的结构特性,这种多样的结构,拓展了这类材料在不同领域应用的可能性。
有机场效应晶体管除了传统的电学开关功能,还具有信号转换和信号放大功能。这一特性使其成为传感性能研究和功能应用的理想载体。将不同的外界被分析物引入到有机场效应晶体管,构筑性能优异的传感器成为 OFET 功能化研究中的重要分支,在环境检测、健康监测以及人工智能领域显示出重要的应用前景。
但是大多数有机场效应晶体管,其活性位点并没有足够丰富,因此限制了它在气体传感领域的应用。基于以上问题,本发明提供了一类基于导电MOFs和有机半导体材料的异质结结构搭建的气体传感器件的制备方法。
发明内容
本发明的目的在于提供一种能够高灵敏度检测有毒气体的、基于导电MOFs和有机半导体材料异质结的气体传感器件及其制备方法。
本发明提供的导电MOFs和有机半导体异质结的气体传感器件的制备方法,具体步骤如下:
(1)采用带有SiO2层的硅片剪切成小于4 cm2(如2-4 cm2)的正方形或者圆形,分别用丙酮,异丙醇各超声(5-8min),以除去表面残留的杂质;
(2)将步骤(1)得到的硅片采用掩膜的方法在薄膜表面蒸镀上金电极,备用;
(3)分别配置六巯基苯和Cu(NO3)2﹒3H2O溶液,六巯基苯溶液的溶剂为二氯苯,Cu(NO3)2﹒3H2O的溶剂为水,分别超声至完全溶解,而后将这两种溶液混合,超声0.5-2小时,静止1小时;然后用乙醇和DMF过滤,之后冷冻干燥机干燥,备用;
(4)取4-10mg的有机半导体DPPTT,用氯仿或二氯苯等含氯溶剂在80-120℃下,搅拌1h,制备4mg/ml的溶液,备用;
(5)将步骤(3)中制得的混合溶液和步骤(4)的溶液混合, 50-90℃搅拌1-3h;其中,前者溶液为后者溶液的1-20wt%;
(6)将步骤(2)得到的硅片放置在匀胶机上,用移液枪将配置好混合溶液均匀地滴在硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,然后在80℃-170℃下退火10-180min,即得到基于异质结材料的气体传感器件。
这里,导电MOFs为Cu,有机半导体材料为DPPTT。
将所得的器件置于有毒气体NO氛围中,具有较高灵敏度。
本发明提供了一种新型的导电MOFs和有机半导体材料的异质结结构搭建的气体传感器件。此种传感器件的检测灵敏度极高,可达到3730%。
附图说明
图1 为Cu-MOF和有机半导体DPPTT异质结的SEM。
图2为图1上3个区域的元素分布及含量图。
图3为图1上3个区域的能谱分布图。
图4 为Cu-MOFs和DPPTT的异质结器件的光学显微镜图。
图5 为Cu-MOFs器件在10ppm下的I-T图。
图6 为DPPTT器件在10ppm下的I-T图。
图7为5wt% Cu-MOF/DPPTT异质结器件在10ppm下的I-T图。
图8为10wt% Cu-MOF/DPPTT异质结器件在10ppm下的I-T图。
具体实施方式
下面通过具体实施例,并结合附图,进一步介绍本发明。
实施例1
步骤1:采用带有SiO2层的硅片剪切成小于4 cm2(如2-4 cm2)的正方形或者圆形,将切好的硅片分别用丙酮,异丙醇各超声5min,以除去表面残留的杂质;
步骤2:将步骤1得到的硅片采用掩膜的方法在薄膜表面上蒸镀上金电极,备用;
步骤3:称取1 .1mg的六巯基苯加入到20mL的氯代苯溶液中,超声至完全溶解后取出备用;称取4.8mg的Cu(NO3)2﹒3H2O加入到20mL水溶液中,超声至完全溶解,而后将这两种溶液混合,超声半小时,静止1小时;而后用乙醇和DMF过滤,之后冷冻干燥机干燥,备用;
步骤4:取步骤3的产物4mg,用氯仿或二氯苯超声溶解,制备4mg/ml的溶液,备用;
步骤5:将步骤2处理后的硅片放置于匀胶机上,用移液枪取20µl步骤4的溶液均匀地滴在步骤2处理后的硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,而后高温下退火,即得到基于MOFs材料的器件;
步骤6:将该器件置于10ppm的NO氛围下,检测其灵敏度可达66%。
实施例2
步骤1:采用带有SiO2层的硅片剪切成小于4 cm2(如2-4 cm2)的正方形或者圆形,将切好的硅片分别用丙酮,异丙醇各超声5min,以除去表面残留的杂质;
步骤2:将步骤1得到的硅片采用掩膜的方法在薄膜表面上蒸镀上金电极,备用;
步骤3:将有机半导体DPPTT聚合物称取4mg, 用氯仿或二氯苯等含氯溶剂在90℃下,搅拌1h,待其完全溶解后备用;
步骤4:将步骤2处理后的硅片放置于匀胶机上,用移液枪取20µl步骤3的溶液均匀地滴在硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,而后高温下退火,即得到OFET器件;
步骤5:将该器件置于10ppm的NO氛围下,检测其灵敏度可达120%。
实施例3
步骤1:采用带有SiO2层的硅片剪切成小于4 cm2(如2-4 cm2)的正方形或者圆形,将切好的硅片分别用丙酮,异丙醇各超声5min,以除去表面残留的杂质;
步骤2:将步骤1得到的硅片采用掩膜的方法在薄膜表面上蒸镀上金电极,备用;
步骤3:称取1 .1mg的六巯基苯加入到20mL的氯代苯溶液中,超声至完全溶解后取出备用;称取4.8mg的Cu(NO3)2﹒3H2O加入到20mL水溶液中,超声至完全溶解,而后将这两种溶液混合,超声半小时,静止1小时,备用;而后用乙醇和DMF过滤,之后冷冻干燥机干燥,备用;
步骤4:将步骤3的产物,取4mg,用氯仿或二氯苯超声溶解,制备4mg/ml的溶液,备用;
步骤5:将有机半导体DPPTT聚合物称取4mg, 用氯仿或二氯苯等含氯溶剂在90℃下,搅拌1h,待其完全溶解后备用;
步骤6:将步骤4中制的溶液以含量5wt%的比例和步骤5的溶液混合,搅拌1h后备用;
步骤7:将步骤2处理后的硅片放置于匀胶机上,用移液枪取20µl步骤6的混合溶液均匀地滴在硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,而后高温下退火,即得到基于MOFs/DPPTT异质结材料的气体传感器件;
步骤8:将该器件置于10ppm的NO氛围下,检测其灵敏度可达到1730%。
实施例4
步骤1:采用带有SiO2层的硅片剪切成小于4 cm2(如2-4 cm2)的正方形或者圆形,将切好的硅片分别用丙酮,异丙醇各超声5min,以除去表面残留的杂质;
步骤2:将步骤1得到的硅片采用掩膜的方法在薄膜表面上蒸镀上金电极,备用;
步骤3:称取1 .1mg的六巯基苯加入到20mL的氯代苯溶液中,超声至完全溶解后取出备用;称取4.8mg的Cu(NO3)2﹒3H2O加入到20mL水溶液中,超声至完全溶解,而后将这两种溶液混合,超声半小时,静止1小时,备用;而后用乙醇和DMF过滤,之后冷冻干燥机干燥,备用;
步骤4:将步骤3的产物,取4mg,用氯仿或二氯苯超声溶解,制备4mg/ml的溶液,备用;
步骤5:将有机半导体DPPTT聚合物称取4mg, 用氯仿或二氯苯等含氯溶剂在90℃下,搅拌1h,待其完全溶解后备用;
步骤6:将步骤4中制的溶液以含量10 wt%的比例和步骤5的溶液混合,搅拌1h后备用;
步骤7:将步骤2处理后的硅片放置于匀胶机上,用移液枪取20µl步骤6的混合溶液均匀地滴在硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,而后高温下退火,即得到基于MOFs/DPPTT异质结材料的气体传感器件;
步骤8:将该器件置于10ppm的NO氛围下,检测其灵敏度可达到3730%。
Claims (2)
1.一种基于MOFs和有机半导体异质结的气体传感器件的制备方法,其特征在于,具体步骤如下:
(1)采用带有SiO2层的硅片剪切成小于4 cm2的正方形或者圆形,分别用丙酮,异丙醇各超声,以除去表面残留的杂质;
(2)将步骤(1)得到的硅片采用掩膜的方法在薄膜表面蒸镀上金电极;
(3)分别配置六巯基苯和Cu(NO3)2﹒3H2O溶液,六巯基苯溶液的溶剂为二氯苯,Cu(NO3)2﹒3H2O的溶剂为水,分别超声至完全溶解,而后将这两种溶液混合,超声0.5-2小时,静止1小时;然后用乙醇和DMF过滤,之后冷冻干燥机干燥;
(4)取4-10mg的有机半导体DPPTT,用氯仿或二氯苯等含氯溶剂在80-120℃下,搅拌1h,制备4mg/ml的溶液;
(5)将步骤(3)中制得的混合溶液和步骤(4)的溶液混合, 在50-90℃下搅拌1-3h;其中,前者溶液为后者溶液的1-20wt%;
(6)将步骤(2)得到的硅片放置在匀胶机上,用移液枪将配置好混合溶液均匀地滴在硅片上,然后开启匀胶机,在高转速下将多余的盐溶液甩飞,然后在80℃-170℃下退火10-180min,即得到基于异质结材料的气体传感器件。
2.一种由权利要求1所述制备方法得到的基于导电MOFs和有机半导体异质结的气体传感器件。
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