CN112926821A - 一种基于制程能力指数预测晶圆良率的方法 - Google Patents
一种基于制程能力指数预测晶圆良率的方法 Download PDFInfo
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- CN112926821A CN112926821A CN202110065960.6A CN202110065960A CN112926821A CN 112926821 A CN112926821 A CN 112926821A CN 202110065960 A CN202110065960 A CN 202110065960A CN 112926821 A CN112926821 A CN 112926821A
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- 238000000034 method Methods 0.000 title claims abstract description 44
- 230000007547 defect Effects 0.000 claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 claims abstract description 30
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 238000007477 logistic regression Methods 0.000 claims abstract description 8
- 238000000513 principal component analysis Methods 0.000 claims description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 59
- 238000003062 neural network model Methods 0.000 description 2
- 238000013528 artificial neural network Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0639—Performance analysis of employees; Performance analysis of enterprise or organisation operations
- G06Q10/06395—Quality analysis or management
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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- G06Q10/04—Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
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- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
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- G06Q10/067—Enterprise or organisation modelling
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
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CN202110065960.6A CN112926821A (zh) | 2021-01-18 | 2021-01-18 | 一种基于制程能力指数预测晶圆良率的方法 |
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CN202110065960.6A CN112926821A (zh) | 2021-01-18 | 2021-01-18 | 一种基于制程能力指数预测晶圆良率的方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI822210B (zh) * | 2022-07-28 | 2023-11-11 | 力晶積成電子製造股份有限公司 | 識別異常分佈的方法及電子裝置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1790314A (zh) * | 2004-12-13 | 2006-06-21 | 台湾积体电路制造股份有限公司 | 产品良率分析系统及方法 |
TW200638171A (en) * | 2005-04-26 | 2006-11-01 | Powerchip Semiconductor Corp | Real-time management systems and methods for manufacture management and yield rate analysis integration |
TW201120667A (en) * | 2009-12-04 | 2011-06-16 | Inotera Memories Inc | Yield loss prediction method and associated computer readable medium |
CN103579035A (zh) * | 2012-08-06 | 2014-02-12 | 无锡华润上华科技有限公司 | 缺陷密度计算方法 |
CN111667111A (zh) * | 2020-06-02 | 2020-09-15 | 上海哥瑞利软件有限公司 | 一种集成电路晶圆制造中的良率预测方法 |
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2021
- 2021-01-18 CN CN202110065960.6A patent/CN112926821A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1790314A (zh) * | 2004-12-13 | 2006-06-21 | 台湾积体电路制造股份有限公司 | 产品良率分析系统及方法 |
TW200638171A (en) * | 2005-04-26 | 2006-11-01 | Powerchip Semiconductor Corp | Real-time management systems and methods for manufacture management and yield rate analysis integration |
TW201120667A (en) * | 2009-12-04 | 2011-06-16 | Inotera Memories Inc | Yield loss prediction method and associated computer readable medium |
CN103579035A (zh) * | 2012-08-06 | 2014-02-12 | 无锡华润上华科技有限公司 | 缺陷密度计算方法 |
CN111667111A (zh) * | 2020-06-02 | 2020-09-15 | 上海哥瑞利软件有限公司 | 一种集成电路晶圆制造中的良率预测方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI822210B (zh) * | 2022-07-28 | 2023-11-11 | 力晶積成電子製造股份有限公司 | 識別異常分佈的方法及電子裝置 |
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Effective date of registration: 20220819 Address after: 510535 building a, 136 Kaiyuan Avenue, Guangzhou Development Zone, Guangzhou City, Guangdong Province Applicant after: Guangdong Dawan District integrated circuit and System Application Research Institute Applicant after: Ruili flat core Microelectronics (Guangzhou) Co.,Ltd. Address before: 510535 building a, 136 Kaiyuan Avenue, Guangzhou Development Zone, Guangzhou City, Guangdong Province Applicant before: Guangdong Dawan District integrated circuit and System Application Research Institute Applicant before: AoXin integrated circuit technology (Guangdong) Co.,Ltd. |
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