CN112924388A - Orthogonal dual channel acoustic resonance module and device comprising same - Google Patents

Orthogonal dual channel acoustic resonance module and device comprising same Download PDF

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CN112924388A
CN112924388A CN202110087822.8A CN202110087822A CN112924388A CN 112924388 A CN112924388 A CN 112924388A CN 202110087822 A CN202110087822 A CN 202110087822A CN 112924388 A CN112924388 A CN 112924388A
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resonant cavity
buffer chamber
cavity
resonance module
resonant
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CN112924388B (en
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朱文越
陈杰
刘强
钱仙妹
李学彬
郑健捷
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Hefei Institutes of Physical Science of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/391Intracavity sample

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Abstract

The utility model provides an orthogonal binary channels acoustics resonance module and include device of this module, resonance module include the square, and first side and second side are the adjacent side of square, be provided with the first chamber unit that passes first side and its opposite face on the square, pass the second chamber unit of second side and its opposite face, first chamber unit includes first resonant cavity and the coaxial first buffer chamber and the second buffer chamber that set up at first resonant cavity both ends of symmetry, the second chamber unit includes second resonant cavity and the coaxial third buffer chamber and the fourth buffer chamber that set up at the resonant cavity both ends of symmetry, the intersection area that first resonant cavity and second resonant cavity center formed is provided with the planar sound pipe of two resonant cavities constitution of perpendicular to, be provided with acoustic sensor on the other end of sound pipe. The invention realizes double-channel synchronous measurement, provides multiplied detection sensitivity, and increases the sampling flow of the measurement system, thereby greatly expanding the application range of the system.

Description

Orthogonal dual channel acoustic resonance module and device comprising same
Technical Field
The invention relates to the technical field of atmospheric environmental pollutant monitoring, in particular to an orthogonal double-channel acoustic resonance module and a device comprising the same.
Background
Photoacoustic spectroscopy is a spectroscopic technique based on the photoacoustic effect, and the basic principle is that sample particles absorb periodic light energy to generate weak pressure waves, i.e., sound waves. In photoacoustic spectroscopy, the weak acoustic signals of the acoustic resonant cavity are usually used for amplification, so that the good structural design of the acoustic resonant cavity can effectively improve the detection sensitivity and detection limit. For example, the invention patent CN104697933B in 2017, 6, month and 12 announced a three-channel acoustic resonant cavity photoacoustic spectroscopy sensing device. The invention adopts three parallel sound resonant cavities as absorption channels of three different light absorption components, three light sources generate sound signals through the sound resonant cavities, and the sound signals are transmitted to a microphone for detection through three sound guide pipes connected to the midpoint of the sound resonant cavities. Although the use of three resonant cavities can realize multi-wavelength multi-component trace gas absorption detection, the detection sensitivity of single component and single wavelength is not improved. With the development of the field of atmospheric detection, particularly the detection of weakly absorbing components.
Disclosure of Invention
In order to further improve the detection sensitivity and the detection limit, the invention provides an orthogonal dual-channel acoustic resonance module and a device comprising the same, and the specific scheme is as follows:
the orthogonal double-channel acoustic resonance module comprises a square block, wherein a first side face and a second side face are adjacent side faces of the square block, a first cavity unit penetrating through the first side face and the opposite face of the first side face and a second cavity unit penetrating through the second side face and the opposite face of the second side face are arranged on the square block, the first cavity unit comprises a first resonant cavity and a first buffer chamber and a second buffer chamber which are symmetrically and coaxially arranged at two ends of the first resonant cavity, the second cavity unit comprises a second resonant cavity and a third buffer chamber and a fourth buffer chamber which are symmetrically and coaxially arranged at two ends of the resonant cavity, an intersection area formed by the centers of the first resonant cavity and the second resonant cavity is provided with an acoustic guide pipe which is vertical to the plane formed by the two resonant cavities, and an acoustic sensor is arranged at the.
Preferably, the acoustic sensor is a microphone or a tuning fork.
Preferably, four holes which are respectively communicated with the buffer chambers correspondingly are formed in the upper surface of the square block, the holes in the first buffer chamber and the third buffer chamber are used as sample inlet holes, the holes in the second buffer chamber and the fourth buffer chamber are used as sample outlet holes, the outer end parts of the first buffer chamber and the third buffer chamber are used as incident windows, and the outer end parts of the second buffer chamber and the fourth buffer chamber are used as emergent windows.
Preferably, the sample inlet hole can input gas or aerosol particles.
Preferably, window sheets are arranged on the incident window and the emergent window.
Preferably, the diameter of the first resonant cavity and the diameter of the second resonant cavity are in the range of 2-4 times of the diameter of the laser beam.
Optimally, the length L1 of the first resonant cavity is equal to the length L2 of the second resonant cavity, and the dimensions of the first resonant cavity, the second resonant cavity and the buffer chamber conform to the equation: l1 ═ L2 ═ L, Lmin < L < Lmax, L ═ C/2f, C is the speed of sound, fmin ═ 1000Hz, fmax ═ 20000 Hz; the length H of the four buffer chambers is equal to L/2, and the diameter of the buffer chambers is 2-4 times of the diameter of the resonant cavity.
The device comprising the orthogonal double-channel acoustic resonance module is characterized by also comprising
A laser assembly for generating a beam of light to be transmitted to the entrance window;
the light splitting component divides the light beam emitted by the laser component into two beams which are respectively sent to the two incidence windows;
and the phase-locked amplifier is connected with the output end of the acoustic sensor and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the acousto-optic spectrum signal in the corresponding resonant cavity sensed by the acoustic sensor.
Preferably, the laser component comprises a control signal source, a laser controller and a laser which are arranged in sequence according to the light path.
Preferably, the light splitting component comprises a semi-transparent semi-reflecting mirror, a first plane reflecting mirror and a second plane reflecting mirror, the light beam of the laser is divided into a first light beam and a second light beam through the center of the semi-transparent semi-reflecting mirror, the first light beam is overlapped with the central axis of the first cavity unit, and the second light beam enters the second cavity unit and is overlapped with the central axis of the second cavity unit after being reflected by the first plane reflecting mirror and the second plane reflecting mirror in sequence.
The invention has the beneficial effects that: according to the invention, the second channel acoustic resonance module is added on the basis of the single channel acoustic resonance module, each acoustic resonance module independently realizes resonance amplification of an acoustic signal, and the maximum value of sound pressure is reached at the center of the cavity. The two acoustic modules are placed in an orthogonal mode, and the time of light passing through the two channels of acoustic resonance is far shorter than the thermal relaxation time of gas molecules or aerosol particles, so that acoustic signals respectively generated by the two acoustic resonance modules can be approximately considered to be generated at the same moment, and then the superposition of the acoustic signals after the two channels of resonance amplification can be realized at the intersection point, thereby providing doubled detection sensitivity, increasing the sampling flow of a measuring system, and greatly expanding the application range of the measuring system.
Drawings
Fig. 1 is a schematic diagram of a structure of a spectrum sensing apparatus including an orthogonal two-channel acoustic resonance module according to the present invention.
Fig. 2 is a cross-sectional view of a resonant module.
Fig. 3 is a perspective view of the first chamber unit and the second chamber unit.
Fig. 4 is an eigen-frequency distribution diagram of dual cavities in a resonant module.
FIG. 5 is a graph of the pressure distribution at the 1742Hz resonant frequency for the dual cavity in the resonant module.
Fig. 6 is a frequency response diagram of a resonant module.
The components in the drawings are described as follows:
11. a function signal generator; 12. laser controller 13, laser; 21. a semi-transparent semi-reflective mirror; 22. a first planar mirror; 23. a second planar mirror; 31. a square block; 321. a first resonant cavity; 322. a first buffer chamber; 323. a second buffer chamber; 331. a second resonant cavity; 332. a third buffer chamber; 333. a fourth buffer chamber; 34. a sample inlet hole; 35. a sample outlet; 36. a window piece; 37. an acoustic conduit; 4. an acoustic sensor; 5. a phase-locked amplifier; 61. a first detector; 62. a second detector; 7. and (3) a PC.
Detailed Description
Example 1
As shown in fig. 1 to 4, an orthogonal two-channel acoustic resonator module includes a block 31, where a first cavity unit of a first side and an opposite side of the block 31, and a second cavity unit passing through a second side and an opposite side of the block 31 are disposed on the block 31, and the first side and the second side are adjacent sides of the block 31. The first cavity unit comprises a first resonant cavity 321, a first buffer chamber 322 and a second buffer chamber 323 which are symmetrically and coaxially arranged at two ends of the first resonant cavity 321, the second cavity unit comprises a second resonant cavity 331, a third buffer chamber 332 and a fourth buffer chamber 333 which are symmetrically and coaxially arranged at two ends of the second resonant cavity 331, an intersection area formed by the centers of the first resonant cavity 321 and the second resonant cavity 331 is provided with an acoustic guide tube 37 which is vertical to a plane formed by the two resonant cavities, and the other end of the acoustic guide tube 37 is provided with an acoustic sensor 4. The acoustic sensor 4 is a microphone or a tuning fork.
Four holes which are respectively communicated with the buffer chambers are formed in the upper surface of the block 31, the holes in the first buffer chamber 322 and the third buffer chamber 332 are used as sample inlet holes 34, the holes in the second buffer chamber 323 and the fourth buffer chamber 333 are used as sample outlet holes 35, the outer end parts of the first buffer chamber 322 and the third buffer chamber 332 are used as incident windows, and the outer end parts of the second buffer chamber 323 and the fourth buffer chamber 333 are used as emergent windows.
Preferably, the sample inlet 34 may be used to input gas molecules or aerosol particles, and in this embodiment, a concentration sensor is disposed at the sample inlet 34 and/or the sample outlet 35 to detect the concentration of the material entering from or exiting from the sample inlet 34 and/or the sample outlet 35. In this embodiment, the inlet hole 34 and the outlet hole 35 are both provided with concentration sensors.
And window sheets 36 are arranged on the incident window and the emergent window to form a closed environment, so that the interference of external environment noise on measurement is reduced.
The length L1 of the first resonant cavity 321 is equal to the length L2 of the second resonant cavity 331. The relationship among the first resonant cavity 321, the second resonant cavity 331 and the buffer chamber is as follows: l1 ═ L2 ═ L, Lmin < L < Lmax, L ═ C/2f, C is the speed of sound, fmin ═ 1000Hz, fmax ═ 20000 Hz; the length H of the four buffer chambers is equal to L/2, and the diameter of the buffer chambers is 2-4 times of the diameter of the resonant cavity. In this embodiment, the first cavity 321 and the second cavity 331 are both L ═ C/2000Hz long and have diameters 2 times the diameter of the laser spot.
The first cavity 321 and the second cavity 331 each have a diameter in the range of 2-4 laser spot diameters, and in this embodiment, the first cavity 321 and the second cavity 331 each have a diameter 2 laser spot diameters.
Example 2
The difference from embodiment 1 is that the first resonator 321 and the second resonator 331 in this embodiment are both L ═ C/4000Hz, and have diameters 4 times the laser spot diameter. The diameter of the buffer chamber is 4 times of the diameter of the resonant cavity.
Example 3
The difference from embodiment 1 is that the first resonator 321 and the second resonator 331 in this embodiment have a length L ═ C/3000Hz, a diameter 3 times the laser spot diameter, and a buffer chamber diameter 3 times the resonator diameter.
Example 4
As shown in fig. 4, a spectrum sensing apparatus including the orthogonal two-channel acoustic resonance module according to any one of embodiments 1, 2, and 3 further includes
A laser assembly for transmitting a light beam to the entrance window; the laser component comprises a control signal source, a laser controller 12 and a laser 13 which are arranged in sequence according to an optical path, wherein the control signal source is a function signal generator 11 in the embodiment. The light output by the laser 13 is pulsed light or modulated (mechanically chopped or modulated by an electrical signal) continuous light.
The light splitting component divides the light beam emitted by the laser component into two beams which are respectively sent to the two incidence windows; the light splitting component comprises a semi-transparent semi-reflecting mirror 21, a first plane reflecting mirror 22 and a second plane reflecting mirror 23, light beams of the laser 13 are divided into first light beams and second light beams through the center of the semi-transparent semi-reflecting mirror 21, the first light beams are overlapped with the central axis of the first cavity unit, and the second light beams enter the second cavity unit after being reflected by the first plane reflecting mirror 22 and the second plane reflecting mirror 23 in sequence and are overlapped with the central axis of the second cavity unit.
And the phase-locked amplifier 5 is connected with the output end of the acoustic sensor 4 and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the acousto-optic spectrum signal in the corresponding resonant cavity sensed by the acoustic sensor 4.
The device further comprises a first detector 61 and a second detector 62, wherein the first detector 61 and the second detector 62 respectively correspondingly receive the light beams corresponding to the exit windows.
The output ends of the first detector 61, the second detector 62 and the lock-in amplifier 5 are connected with a PC7, and data are uploaded to a PC7 for analysis.
The resonance frequencies at which both acoustic resonator modules exist are shown in fig. 4, and it can be seen from fig. 4 that the same sound pressure distribution as shown in fig. 5 occurs at the resonant frequency of 1742Hz only for both acoustic resonator modules. When the two acoustic resonant cavities resonate at the frequency of 1742Hz at the same time, the two same sound pressure distributions enable the sound pressure to be superposed at the intersection point of the two resonant modules. By scanning the cavity frequency, it can be seen that optimum acoustic signal amplification is achieved only at 1742Hz as shown in figure 6.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.

Claims (10)

1. An orthogonal two-channel acoustic resonance module, characterized in that it comprises a block (31), the first side and the second side being adjacent sides of the block (31), the square block (31) is provided with a first cavity unit passing through the first side surface and the opposite surface thereof and a second cavity unit passing through the second side surface and the opposite surface thereof, the first cavity unit comprises a first resonant cavity (321), a first buffer chamber (322) and a second buffer chamber (323) which are symmetrically and coaxially arranged at two ends of the first resonant cavity (321), the second cavity unit comprises a second resonant cavity (331), a third buffer chamber (332) and a fourth buffer chamber (333) which are symmetrically and coaxially arranged at two ends of the resonant cavity, an intersection area formed by the centers of the first resonant cavity (321) and the second resonant cavity (331) is provided with an acoustic guide pipe (37) which is vertical to a plane formed by the two resonant cavities, an acoustic sensor (4) is arranged at the other end of the acoustic conduit (37).
2. The orthogonal dual channel acoustic resonance module according to claim 1, characterized in that the acoustic sensor (4) is a microphone or a tuning fork.
3. The orthogonal dual-channel acoustic resonance module according to claim 1, wherein four holes are formed in the upper surface of the block (31) and respectively communicated with the buffer chambers, the holes in the first buffer chamber (322) and the third buffer chamber (332) are sample inlet holes (34), the holes in the second buffer chamber (323) and the fourth buffer chamber (333) are sample outlet holes (35), the outer ends of the first buffer chamber (322) and the third buffer chamber (332) are incident windows, and the outer ends of the second buffer chamber (323) and the fourth buffer chamber (333) are emergent windows.
4. The orthogonal dual channel acoustic resonance module as claimed in claim 3, wherein the inlet holes (34) can input gas or aerosol particles.
5. The orthogonal dual channel acoustic resonance module as claimed in claim 3, wherein a louver (36) is provided on both the entrance window and the exit window.
6. The orthogonal dual channel acoustic resonance module of claim 1, wherein the first resonant cavity (321) and the second resonant cavity (331) have diameters that are 2-4 times a diameter of a laser beam.
7. The orthogonal two-channel acoustic resonance module according to claim 1, wherein the length L1 of the first resonant cavity (321) and the length L2 of the second resonant cavity (331) are equal, and the dimensions of the first resonant cavity (321), the second resonant cavity (331), and the buffer chamber conform to the equation: l1 ═ L2 ═ L, Lmin < L < Lmax, L ═ C/2f, C is the speed of sound, fmin ═ 1000Hz, fmax ═ 20000 Hz; the length H of the four buffer chambers is equal to L/2, and the diameter of the buffer chambers is 2-4 times of the diameter of the resonant cavity.
8. An apparatus comprising the orthogonal dual channel acoustic resonance module as defined in any one of claims 1 to 7, further comprising
A laser assembly for generating a beam of light to be transmitted to the entrance window;
the light splitting component divides the light beam emitted by the laser component into two beams which are respectively sent to the two incidence windows;
and the phase-locked amplifier (5) is connected with the output end of the acoustic sensor (4) and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic signal in the corresponding resonant cavity sensed by the acoustic sensor (4).
9. The device according to claim 8, wherein the laser assembly comprises a control signal source, a laser controller (12) and a laser (13) which are arranged in sequence according to the optical path.
10. The device according to claim 8, wherein the light splitting component comprises a half mirror (21), a first plane mirror (22) and a second plane mirror (23), the light beam of the laser (13) is split into a first light beam and a second light beam through the center of the half mirror (21), the first light beam is coincident with the central axis of the first cavity unit, and the second light beam enters the second cavity unit and is coincident with the central axis of the second cavity unit after being reflected by the first plane mirror (22) and the second plane mirror (23).
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CN113109268A (en) * 2021-05-25 2021-07-13 武汉理工大学 Photoacoustic spectroscopy enhancement device and method for gas detection using same
CN116773455A (en) * 2023-08-18 2023-09-19 之江实验室 Dual resonant sensor device and method
CN116879179A (en) * 2023-09-07 2023-10-13 武汉格蓝若智能技术股份有限公司 Differential photoacoustic cell for multi-component gas measurement

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