CN116879179B - Differential photoacoustic cell for multi-component gas measurement - Google Patents
Differential photoacoustic cell for multi-component gas measurement Download PDFInfo
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- CN116879179B CN116879179B CN202311149519.1A CN202311149519A CN116879179B CN 116879179 B CN116879179 B CN 116879179B CN 202311149519 A CN202311149519 A CN 202311149519A CN 116879179 B CN116879179 B CN 116879179B
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- 238000005259 measurement Methods 0.000 title claims abstract description 15
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 47
- 238000004088 simulation Methods 0.000 claims description 14
- 238000004458 analytical method Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000010521 absorption reaction Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000001834 photoacoustic spectrum Methods 0.000 abstract description 2
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 238000010895 photoacoustic effect Methods 0.000 description 2
- 238000004867 photoacoustic spectroscopy Methods 0.000 description 2
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention provides a differential photoacoustic cell for multi-component gas measurement, which comprises a laser irradiation cavity and a plurality of resonant cavities, wherein a plurality of sound transmission holes are arranged at different positions on the side wall of the laser irradiation cavity, each sound transmission hole is provided with a resonant cavity, one end of each sound transmission hole, which is far away from the laser irradiation cavity, is connected with a microphone, the side wall of the laser irradiation cavity is also provided with an air inlet hole and an air outlet hole, and the inlet and the outlet of the laser irradiation cavity are respectively provided with a plane reflector and a concave reflector, wherein the resonant frequencies of each resonant cavity are different. The invention provides a photoacoustic cell for photoacoustic spectrum detection of gas, which has a plurality of resonance frequencies, can realize multi-gas differential detection, and can realize multiple reflection of incident light to increase absorption of gas to light energy so as to increase sensitivity.
Description
Technical Field
The invention relates to the field of gas detection, in particular to a differential photoacoustic cell for multi-component gas measurement.
Background
Photoacoustic spectroscopy is a technique based on the photoacoustic effect, which is a technique of measuring a sound signal converted by a substance that generates heat energy by absorbing light energy. In the photoacoustic effect, a ground state molecule absorbs light of a specific wavelength to be excited to a high energy state, and the high energy state molecule returns to the ground state through a non-radiative transition, thereby generating thermal energy, and the temperature rises due to accumulation of thermal energy. The incident light is modulated such that the thermal energy generated varies periodically, resulting in the generation of sound waves. Since the sound wave frequency is related to the modulation frequency of the light source, the sound wave intensity is related to the concentration of the absorption gas, and therefore, the quantitative relation between the gas concentration and the sound wave intensity is established, and the concentration of the absorption gas can be obtained.
The gas photoacoustic spectroscopy technology does not consume the gas to be measured, so that the same gas can be measured for a plurality of times; because the gas absorption has selectivity, the detection of the multi-component gas can be realized by selecting lasers with different wavelengths, and different gases do not need to be separated; since the light energy absorbed by the gas is measured, reflection, scattering, and the like have little influence on the measurement.
The core influencing the sensitivity of the gas photoacoustic spectrum detection technology mainly comprises a light source, a photoacoustic cell and a sound sensor. Typically, photoacoustic cells resonate at one frequency, so to achieve multi-component gas measurements, different gases are measured at different times using either multiple photoacoustic cells or time division multiplexing.
Disclosure of Invention
Aiming at the technical problems existing in the prior art, the invention provides a differential photoacoustic cell for multi-component gas measurement, which comprises a laser irradiation cavity and a plurality of resonant cavities, wherein a plurality of sound transmission holes are arranged at different positions on the side wall of the laser irradiation cavity, each sound transmission hole is provided with a resonant cavity, one end of each sound transmission hole far away from the laser irradiation cavity is connected with a microphone, the side wall of the laser irradiation cavity is also provided with an air inlet hole and an air outlet hole, and the inlet and the outlet of the laser irradiation cavity are respectively provided with a plane reflector and a concave reflector, wherein the resonant frequencies of each resonant cavity are different;
laser is incident into a laser irradiation cavity filled with gas to be detected from the plane reflector at a certain incidence angle, after being reflected back and forth for many times between the plane reflector and the concave reflector, the resonant cavities with different resonant frequencies generate corresponding photoacoustic signals, the photoacoustic signals are transmitted to corresponding microphones through the microphone holes, the microphones detect the photoacoustic signals generated by the corresponding resonant cavities, and the gas concentrations of different gases are detected according to analysis of the photoacoustic signals.
On the basis of the technical scheme, the invention can also make the following improvements.
Optionally, the laser irradiation cavity is cylindrical, the radius and the length of the laser irradiation cavity are determined according to the number of the resonant cavities and the size of each resonant cavity, and at least two resonant cavities can be arranged on the side wall of the laser irradiation cavity.
Optionally, according to the length of the laser irradiation cavity, the preset reflection times of the laser in the laser irradiation cavity, the incidence position of the laser relative to the plane mirror and the maximum distance from the reflection light spot to the center of the plane mirror, the incidence angle of the laser relative to the plane mirror and the focal length of the concave mirror are calculated, so that the laser is reflected back and forth between the plane mirror and the concave mirror of the laser irradiation cavity for multiple times.
Optionally, the number of the resonant cavities is determined according to the number of the gases to be measured, and each gas needs to adopt two resonant cavities with opposite sound pressure phases to perform differential measurement.
Optionally, all the resonant cavities are arranged on different sections of the side wall of the laser irradiation cavity along the length direction of the laser irradiation cavity, a plurality of resonant cavities are arranged on each section to form a group of resonant cavities, a certain distance exists between different sections, and a certain distance exists between a plurality of resonant cavities on the same section.
Optionally, four resonant cavities are arranged on each section of the side wall of the laser irradiation cavity, wherein every two resonant cavities are arranged as a pair of opposite resonant cavities, and an included angle between the two pairs of resonant cavities is 0-90 degrees.
Optionally, the frequency distribution range of each set of resonant cavities is divided according to each section, and each resonant cavity in each set of resonant cavities selects a different resonant frequency in the frequency distribution range, wherein the frequency distribution range of each set of resonant cavities cannot include the resonant frequency of the laser irradiation cavity.
Optionally, according to the selected resonant frequency of each resonant cavity, obtaining structural parameters of each resonant cavity through COMSOL simulation, wherein the structural parameters comprise the radius, the length and the position of the resonant cavity on the side wall of the laser irradiation cavity, and the length and the radius of a sound transmission hole connecting the resonant cavity and the laser irradiation cavity, and the resonant cavity is cylindrical.
Optionally, the structure parameter of each resonant cavity is obtained through COMSOL simulation according to the selected resonant frequency of each resonant cavity, and then the method further comprises the following steps:
based on the obtained structural parameters of each resonant cavity, carrying out frequency simulation on the structure of the obtained photoacoustic cell;
and verifying whether the formants obtained through simulation are overlapped or not and whether the intervals among the formants meet the requirements or not, if the formants are not overlapped and the intervals meet the requirements, obtaining a corresponding photoacoustic cell according to the structural parameters of each resonant cavity, and otherwise, modifying the frequency of each resonant cavity.
The differential photoacoustic cell for multi-component gas measurement has a plurality of resonance frequencies, can realize multi-gas differential detection, and can realize multiple reflection of incident light to increase absorption of gas to light energy so as to increase sensitivity.
Drawings
FIG. 1 is a schematic diagram of a differential photoacoustic cell for multi-component gas measurement according to the present invention;
fig. 2 is a schematic flow chart for determining structural parameters of a differential photoacoustic cell.
In the drawings, the names of the components represented by the reference numerals are as follows:
1. the laser irradiation device comprises a laser irradiation cavity, 2, a sound transmission hole, 3, a resonant cavity, 4, an air inlet hole, 5, an air outlet hole, 6, a plane reflector, 7, a concave reflector, 8 and a shell.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. In addition, the technical features of each embodiment or the single embodiment provided by the invention can be combined with each other at will to form a feasible technical scheme, and the combination is not limited by the sequence of steps and/or the structural composition mode, but is necessarily based on the fact that a person of ordinary skill in the art can realize the combination, and when the technical scheme is contradictory or can not realize, the combination of the technical scheme is not considered to exist and is not within the protection scope of the invention claimed.
Based on the background technology, the invention provides a differential photoacoustic cell for multi-component gas measurement, as shown in fig. 1, the differential photoacoustic cell comprises a laser irradiation cavity 1 and a plurality of resonant cavities 3, a plurality of sound transmission holes 2 are arranged at different positions on the side wall of the laser irradiation cavity 1, one resonant cavity 3 is arranged on each sound transmission hole 2, one end, far away from the laser irradiation cavity 1, of each sound transmission hole 2 is connected with a microphone, an air inlet hole 4 and an air outlet hole 5 are also arranged on the side wall of the laser irradiation cavity 1, and a plane reflector 6 and a concave reflector 7 are respectively arranged at the inlet and the outlet of the laser irradiation cavity 1, wherein the resonant frequencies of the resonant cavities 3 are different;
the laser is incident into the laser irradiation cavity 1 filled with the gas to be measured from the plane mirror 6 at a certain incidence angle, and after being reflected back and forth for many times between the plane mirror 6 and the concave mirror 7, the resonant cavities 3 with different resonant frequencies generate corresponding photoacoustic signals, and the photoacoustic signals are transmitted to corresponding microphones through the microphone holes 2, the microphones detect the photoacoustic signals generated by the corresponding resonant cavities 3, and the gas concentrations of different gases are detected according to the analysis of the photoacoustic signals.
The laser irradiation chamber 1, the sound-transmitting hole 2, the air inlet hole 4 and the air outlet hole 5 are all dug in a solid shell 8.
Wherein, firstly, the radius and length of the laser irradiation cavity 1 are determined, the laser irradiation cavity 1 is cylindrical, the radius and length of the laser irradiation cavity 11 are selected according to the number and radius of the resonant cavities 3, the actual size requirement and the like, wherein the radius of the laser irradiation cavity 1 needs to be larger than the radius of the resonant cavities 3, at least 2 resonant cavities 3 can be arranged on the cylindrical side wall of the laser irradiation cavity 1, and the length needs to be enough to be provided with the number of the resonant cavities 3 and the air inlet holes 4 and the air outlet holes 5.
According to the length of the laser irradiation cavity 1, the preset reflection times of the laser in the laser irradiation cavity 1, the incidence position of the laser relative to the plane mirror 6 and the maximum distance from the reflection light spot to the center of the plane mirror 6, the incidence angle of the laser relative to the plane mirror 6 and the focal length of the concave mirror 7 are calculated, so that the laser is reflected back and forth between the plane mirror 6 and the concave mirror 7 of the laser irradiation cavity 1 for multiple times.
It is understood that by setting the number of reflections and the incidence position of the laser light in the laser light irradiation chamber 1, the incidence angle of the laser light and the focal length of the concave mirror 7 are calculated based on the number of reflections and the incidence position. Specifically, the number of reflections a of the laser between the plane mirror 6 and the concave mirror 7 of the laser irradiation cavity 1 and the incident positions x and y are set, wherein the incident position of the laser refers to the incident position of the laser relative to the plane mirror 6, the plane mirror 6 is circular, and the x, y and z axes are established by taking the center of the plane mirror 6 as the center of the circle. Meanwhile, in order to prevent the effective radius of the mirror surface of the plane mirror 6 from being exceeded during laser reflection, the maximum distance A from the reflection light spot to the center of the mirror surface of the plane mirror 6 needs to be set, and the focal length of the concave mirror 7 is calculated by the formula (1), wherein d represents the length of the laser irradiation cavity 11.
（1）；
（2）；
(3)；
(4)；
(5)；
Where f denotes the focal length of the concave mirror 7, x 'and y' are intermediate variables,，/>the incidence angle of the laser light with respect to the plane mirror 6 in the x, y directions is shown.
The number of the resonant cavities 3 is determined according to the number of the gases to be measured, and each gas needs to adopt two resonant cavities 3 with opposite sound pressure phases to perform differential measurement. All the resonant cavities 3 are arranged on different sections of the side wall of the laser irradiation cavity 1 along the length direction of the laser irradiation cavity 1, a plurality of resonant cavities 3 are arranged on each section to form a group of resonant cavities 3, a certain distance exists between different sections, and a certain distance exists between a plurality of resonant cavities 3 on the same section.
For example, four resonant cavities 3 are arranged on each section of the side wall of the laser irradiation cavity 1, wherein every two resonant cavities 3 are arranged as a pair of opposite resonant cavities, and an included angle between the two pairs of resonant cavities 3 is 0-90 degrees.
Each group of resonant cavities 3 is divided according to each section, and each resonant cavity 3 in each group of resonant cavities 3 selects different resonant frequencies within the frequency distribution range.
Here, the frequency of the resonant cavities 3 is selected so that the frequencies of the resonant cavities 3 are different, and there is a certain interval, the interval size depends on whether or not the resonant peaks overlap, and the like, and the frequency distribution range can be divided by dividing the same cross section. It is also noted that the laser irradiation chamber 1 also has a resonance frequency, and the frequency distribution of each group cannot include the resonance frequency of the laser irradiation chamber 1.
Wherein the resonant cavity 3 is cylindrical, and the resonant frequency can be changed by changing the radius and the length of the resonant cavity 3 and the radius and the length of the sound transmission hole 2 connecting the resonant cavity and the laser irradiation cavity. At the same time, the resonant frequency is also affected by its position on the side wall of the laser irradiation chamber 1, where the position of the resonant chamber 3 refers to its size from the center of the laser irradiation chamber 1. The structural parameters of the resonant cavities 3 corresponding to the resonant frequency of each resonant cavity 3 selected in advance are obtained through COMSOL simulation, wherein the structural parameters of the resonant cavities 3 comprise the radius and the length of the resonant cavities 3, the positions of the resonant cavities 3 on the side wall of the laser irradiation cavity 1, and the length and the radius of a sound transmission hole 2 connecting the resonant cavities 3 and the laser irradiation cavity 1.
Specifically, frequency simulation is performed on the whole photoacoustic cell to obtain frequency response, four resonant cavities 3 are placed at one section position of the laser irradiation cavity 1, two resonant cavities 3 are placed as a pair (differential detection is performed on gas by adopting the pair of resonant cavities 3), then the included angle between the two groups of resonant cavities 3 can be changed from 0 to 90 degrees, the resonant cavities 3 are placed, and then frequency simulation is performed in the resonant frequency range to obtain a frequency response curve of the tail end of each resonant cavity 3.
For example, the photoacoustic cell is formed by four resonant cavities 3, each resonant cavity 3 corresponds to a resonant peak with a larger peak value, and differential detection can be performed on the first peak and the third peak of the four resonant cavities 3 respectively, so that differential detection of two gases is realized. If more gas is to be measured, it is only necessary to provide other resonant cavities 3 with different frequencies at other positions from the center of the laser irradiation cavity 1.
Referring to fig. 2, in order to fabricate a photoacoustic cell, first, the radius and length of the laser irradiation chamber 1 are determined, then the number of reflections and the incidence position of the laser in the laser irradiation chamber 1 are set, and the incidence angle of the laser and the focal length of the concave mirror 7 are calculated from the number of reflections and the incidence position. The number of resonant cavities 3 and the approximate distribution range of the frequency of each resonant cavity 3 are determined according to the number of gases to be measured, the expected resonant frequency of each resonant cavity 3 and the radius and length of the corresponding resonant cavity 3 are obtained through COMSOL finite element simulation, the frequency simulation is carried out on the obtained structure of the photoacoustic cell, and whether the resonant peaks overlap or not and whether the interval meets the requirement or not are verified. And if the two resonant cavities 3 do not overlap and the interval meets the requirement, obtaining a corresponding photoacoustic cell according to the determined parameters, and if the two resonant cavities do not meet the requirement, modifying the frequency of each resonant cavity 3 until the simulation meets the requirement, and obtaining the corresponding photoacoustic cell.
The differential photoacoustic cell for measuring the multi-component gas provided by the embodiment of the invention is provided with a plurality of resonant cavities with different resonant frequencies, can realize the measurement of a plurality of gases, and has no crosstalk between the two gases; each gas adopts two resonant cavities with opposite sound pressure phases to carry out differential measurement, so that the signal-to-noise ratio of the signal is higher, and the sensitivity is higher; meanwhile, the multiple reflection of laser can be realized by designing the reflectors at the two ends of the laser irradiation cavity, so that the absorption of gas to light energy is increased, and the sensitivity is further increased.
In the foregoing embodiments, the descriptions of the embodiments are focused on, and for those portions of one embodiment that are not described in detail, reference may be made to the related descriptions of other embodiments.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (9)
1. The differential photoacoustic cell for measuring the multicomponent gas is characterized by comprising a laser irradiation cavity and a plurality of resonant cavities, wherein a plurality of sound transmission holes are formed in different positions on the side wall of the laser irradiation cavity, one resonant cavity is arranged on each sound transmission hole, one end, far away from the laser irradiation cavity, of each sound transmission hole is connected with a microphone, an air inlet hole and an air outlet hole are further formed in the side wall of the laser irradiation cavity, and a plane reflector and a concave reflector are respectively arranged at the inlet and the outlet of the laser irradiation cavity, wherein the resonant frequencies of each resonant cavity are different;
laser is incident into a laser irradiation cavity filled with gas to be detected from the plane reflector at a certain incidence angle, after being reflected back and forth for many times between the plane reflector and the concave reflector, the resonant cavities with different resonant frequencies generate corresponding photoacoustic signals, the photoacoustic signals are transmitted to corresponding microphones through the microphone holes, the microphones detect the photoacoustic signals generated by the corresponding resonant cavities, and the gas concentrations of different gases are detected according to analysis of the photoacoustic signals.
2. The differential photoacoustic cell of claim 1 wherein the laser irradiation cavities are cylindrical and the radius and length of the laser irradiation cavities are determined by the number of the resonant cavities and the size of each resonant cavity, and the side walls of the laser irradiation cavities can be provided with at least two resonant cavities.
3. The differential photoacoustic cell of claim 1 wherein the means for measuring,
according to the length of the laser irradiation cavity, the reflection times of the laser in the laser irradiation cavity, the incidence position of the laser relative to the plane mirror and the maximum distance from the reflection light spot to the center of the plane mirror, the incidence angle of the laser relative to the plane mirror and the focal length of the concave mirror are calculated, so that the laser is reflected back and forth between the plane mirror and the concave mirror of the laser irradiation cavity for multiple times.
4. The differential photoacoustic cell of claim 2 wherein the number of resonant cavities is determined based on the number of gases to be measured, each gas requiring differential measurement using two resonant cavities of opposite acoustic pressure phase.
5. The differential photoacoustic cell of claim 4 wherein all of the resonant cavities are disposed on different sections of the laser irradiation cavity side wall along the length of the laser irradiation cavity, the plurality of resonant cavities being disposed on each section to form a set of resonant cavities, the different sections being spaced apart by a distance and the plurality of resonant cavities being spaced apart by a distance on the same section.
6. The differential photoacoustic cell of claim 5 wherein four resonant cavities are disposed on each cross-section of the laser irradiation cavity side walls and wherein each two resonant cavities are disposed as a pair of opposed resonant cavities with an included angle of 0-90 °.
7. The differential photoacoustic cell of claim 5 wherein the frequency distribution range of each of the sets of resonant cavities is divided by each of the sections, each of the resonant cavities in each set of resonant cavities selecting a different resonant frequency within the frequency distribution range to which it belongs, wherein the frequency distribution range of each set of resonant cavities cannot include the resonant frequency of the laser irradiation cavity.
8. The differential photoacoustic cell of claim 5 wherein the means for measuring,
and obtaining structural parameters of each resonant cavity through COMSOL simulation according to the selected resonant frequency of each resonant cavity, wherein the structural parameters comprise the radius and the length of the resonant cavity, the position of the resonant cavity on the side wall of the laser irradiation cavity and the length and the radius of a sound transmission hole connecting the resonant cavity and the laser irradiation cavity, and the resonant cavity is cylindrical.
9. The differential photoacoustic cell of claim 8 wherein the obtaining of the structural parameters of each of the resonant cavities by COMSOL simulation is based on the resonant frequency of each of the resonant cavities selected and further comprising:
based on the obtained structural parameters of each resonant cavity, carrying out frequency simulation on the structure of the obtained photoacoustic cell;
and verifying whether the formants obtained through simulation are overlapped or not and whether the intervals among the formants meet the requirements or not, if the formants are not overlapped and the intervals meet the requirements, obtaining a corresponding photoacoustic cell according to the structural parameters of each resonant cavity, and otherwise, modifying the frequency of each resonant cavity.
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