CN104697933A - Photoacoustic spectrometry sensing device for three-channel acoustics resonance cavity - Google Patents
Photoacoustic spectrometry sensing device for three-channel acoustics resonance cavity Download PDFInfo
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- CN104697933A CN104697933A CN201510096806.XA CN201510096806A CN104697933A CN 104697933 A CN104697933 A CN 104697933A CN 201510096806 A CN201510096806 A CN 201510096806A CN 104697933 A CN104697933 A CN 104697933A
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Abstract
The invention discloses a photoacoustic spectrometry sensing device for a three-channel acoustics resonance cavity. The photoacoustic spectrometry sensing device comprises laser controllers (2) and control signal sources which are electrically connected with laser devices in sequence, a tubular acoustics resonance cavity which is coaxially communicated with the light path of the laser device and is provided with sound transmission tubes, and an acoustics sensor (5) which is arranged at the port of the sound transmission tubes and of which the output end is electrically connected with a lock-in amplifier (6), wherein particularly, three laser controllers (2), three laser devices and three signal generators (1) serving as the control signal sources are provided; the tubular acoustics resonance cavity consists of three resonance cavities which are arranged in a cylinder (7), and the tubular cavity axial lines of the resonance cavities are parallel to the axial line of the cylinder (7); the ports of the three sound transmission tubes are formed in the sensing surface of the acoustics sensor (5); three channels of the lock-in amplifier (6) are respectively connected with the three signal output ends of the signal generators (1) and are used for demodulating three photoacoustic spectrometry signals sensed by the acoustics sensor (5) according to a reference signal. The photoacoustic spectrometry sensing device can synchronously measure three components in gas in real time.
Description
Technical field
The present invention relates to a kind of optoacoustic spectroscopy sensing device, especially a kind of triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device.
Background technology
Optoacoustic spectroscopy is a kind of spectral technique based on optoacoustic effect, detection by the luminous energy of absorption of sample instead of transmitted light intensity.When the light source irradiation being in molecule absorption wave band is to sample, sample molecule absorbs luminous energy and transits to excited state, the molecule being in excited state gets back to ground state by collision relaxation, and the luminous energy of simultaneously stability is converted into the interior energy of molecule, and causes the local temperature of molecule to raise.So when being irradiated to the light on sample molecule and being subject to modulating, the local temperature of molecule will produce periodic change, thus produces the change of periodic pressure, i.e. sound wave.When with the variation relation of acoustic sensor record acoustical signal with optical source wavelength, just obtain photoacoustic spectrum signals.Because the photoacoustic signal of optoacoustic spectroscopy is only relevant with the absorption of material to light, not by the impact of the factors such as scattered light, therefore be well suited for for the detection to material optical absorption characteristics, as a kind of optoacoustic spectroscopy gas sensor that Chinese invention patent CN 102954948B announced on November 12nd, 2014.This patent of invention adopts the T-shaped acoustic resonance cavity be made up of supervisor and arm vertical connection, and make the tubular axis line of supervisor coaxial with light source optical path, the focus of the condenser lens in light path is positioned at the connectivity part of supervisor and arm, as the prong plane of the quartz tuning-fork of sonic transducer and slit center respectively with the axis perpendicular of arm and the structure that is positioned on axis; During detection, by T-shaped acoustic resonance cavity, the acoustic resonance of photoacoustic signal is amplified, detect and determine the content of trace gas.Though it can realize the coupling between optical excitation acoustic wave energy and quartz tuning-fork in maximum efficiency, for detection trace gas field, be difficult to realize the multi-wavelength of gas to be measured, multi-component synchronous real-time measurement.In reality, using same optoacoustic spectroscopy gas sensor to realize the demand of the synchronous real-time measurement of different component in gas is outwardness, as in the research of gasoloid absorption characteristic, just multi-wavelength synchro measure be need carry out to aerocolloidal absorption characteristic, and then its wavelength-dependent behavior absorbed, gasoloid absorption analyzed
coefficient etc.
Summary of the invention
The technical problem to be solved in the present invention, for overcoming shortcoming part of the prior art, provides the triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device of various ingredients in a kind of energy synchronous real-time measurement gas.
For solving technical matters of the present invention, the technical scheme adopted is: triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device comprises the laser controller and control signal source that are electrically connected with laser instrument successively, and the tubulose acoustic resonant cavity that be communicated with acoustic conducting pipe coaxial with laser light path, the acoustic sensor being placed in acoustic conducting pipe port, the lock-in amplifier that is electrically connected with acoustic sensor output terminal, particularly
Described laser instrument is the first laser instrument, second laser and the 3rd laser instrument, the first control output end of its input end tap laser controller, the second control output end and the 3rd control output end;
Described control signal source is signal generator, the respective input of its first signal output part, secondary signal output terminal and the 3rd signal output part tap laser controller;
Described tubulose acoustic resonant cavity by right cylinder, its tubular cavity axis all forms with the first resonator cavity of cylinder axis line parallel, the second resonator cavity and the 3rd resonator cavity, wherein, first cavity length L1, pass between the second cavity length L2 and the 3rd cavity length L3 are L1<L3<L2, and the first resonator cavity, radial angle between the 3rd resonator cavity and the second resonator cavity are 85 ~ 95 degree;
Described acoustic conducting pipe is first sound conduit, second sound conduit and the 3rd acoustic conducting pipe, the pipe port of described first sound conduit, second sound conduit and the 3rd acoustic conducting pipe is all positioned on the sensitive face of described acoustic sensor, wherein, first sound conduit, the tubular axis line of the 3rd acoustic conducting pipe and the angle of described sensitive face are 40 ~ 50 degree, and the tubular axis line of second sound conduit and the angle of described sensitive face are 85 ~ 95 degree;
First signal output part of signal generator described in the first passage of described lock-in amplifier, second channel and third channel tap, secondary signal output terminal and the 3rd signal output part, for the reference signal that Received signal strength generator provides, with the photoacoustic spectrum signals in the corresponding resonator cavity of demodulation acoustic sensor perception.
Further improvement as triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device:
Preferably, laser instrument is semiconductor laser, or quantum cascade laser, or optical parameter concussion light source.
Preferably, first cavity length L1 >=5cm, second cavity length L2≤35cm.
Preferably, the tubular cavity diameter of the first resonator cavity, the second resonator cavity and the 3rd resonator cavity is 1 ~ 15mm.
Preferably, the center of the tubular cavity axis of the first resonator cavity, the second resonator cavity and the 3rd resonator cavity is all in circumferentially same.
Preferably, first sound conduit, second sound conduit and the 3rd acoustic conducting pipe respectively with the first resonator cavity, the second resonator cavity and the 3rd resonator cavity vertical connection, and its connectivity part is all positioned at the mid point of corresponding resonator cavity.
Preferably, acoustic sensor is tuning fork, or microphone, or poly meta fluoroethylene piezoelectric film.
Preferably, the tubulose acoustic resonant cavity of cylindrical shape is located thereon and is equipped with incidence window, exit window and injection port, outlet respectively, and front surge chamber, rear surge chamber photoacoustic cell in.
Relative to the beneficial effect of prior art be:
After adopting such structure, the present invention can separate, do not interfere with each other and the photoacoustic signal of synchronous real-time measurement three resonator cavitys without distortion.It achieves multi-wavelength, multi-component synchro measure with just settling at one go under the condition only using an optoacoustic spectroscopy sensing device, and each passage all works in respective optimum frequency, while guarantee synchro measure, both best detection performance and detection sensitivity had been provided, reduce again the volume of measuring system and the volume of sample widely, thus greatly extend its scope be suitable for.
Accompanying drawing explanation
Fig. 1 is a kind of basic structure schematic diagram of the present invention.
Fig. 2 is triple channel acoustic resonant cavity and corresponding acoustic conducting pipe in the present invention, and the connection connection diagram between acoustic sensor.
Fig. 3 is the length distribution schematic diagram of triple channel acoustic resonant cavity in the present invention.
Fig. 4 is the frequency characteristic curve diagram of triple channel acoustic resonant cavity in the present invention.
Embodiment
Below in conjunction with accompanying drawing, optimal way of the present invention is described in further detail.
See Fig. 1, Fig. 2 and Fig. 3, being constructed as follows of triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device:
The input end of the first laser instrument 301, second laser 302 and the 3rd laser instrument 303 is electrically connected the first control output end 202, control output end 201, second and the 3rd control output end 203 of laser controller 2 and the first signal output part 101 of signal generator 1, secondary signal output terminal 102 and the 3rd signal output part 103 respectively successively; Wherein, three laser instruments are semiconductor laser (or quantum cascade laser, or optical parameter concussion light source).
With the coaxial tubulose acoustic resonant cavity being communicated with acoustic conducting pipe of the first laser light path 311 of above-mentioned three laser instruments, second laser light path 312 and the 3rd laser light path 313 by right cylinder 7, its tubular cavity axis all forms with the first resonator cavity 401, second resonator cavity 402 of right cylinder 7 axis being parallel and the 3rd resonator cavity 403.Wherein, pass between the first resonator cavity 401 length L1, the second resonator cavity 402 length L2 and the 3rd resonator cavity 403 length L3 is L1<L3<L2, now chooses that the first resonator cavity 401 length L1 is 5cm, the second resonator cavity 402 length L2 is 35cm, the 3rd resonator cavity 403 length L3 is 15cm; The tubular cavity diameter of the first resonator cavity 401, second resonator cavity 402 and the 3rd resonator cavity 403 is 10 (can be 1 ~ 15) mm; The center of the tubular cavity axis of the first resonator cavity 401, second resonator cavity 402 and the 3rd resonator cavity 403 is all in circumferentially same, and the first resonator cavity 401, radial angle between the 3rd resonator cavity 403 and the second resonator cavity 402 are 90 (can be 85 ~ 95) and spend.
The acoustic conducting pipe be communicated with respectively with above-mentioned three resonator cavitys is first sound conduit 441, second sound conduit 442 and the 3rd acoustic conducting pipe 443; Wherein, first sound conduit 441, second sound conduit 442 and the 3rd acoustic conducting pipe 443 respectively with the first resonator cavity 401, second resonator cavity 402 and the 3rd resonator cavity 403 vertical connection, and its connectivity part is all positioned at the mid point of corresponding resonator cavity.The pipe port of first sound conduit 441, second sound conduit 442 and the 3rd acoustic conducting pipe 443 is all positioned on the sensitive face of acoustic sensor 5; Wherein, first sound conduit 441, the tubular axis line of the 3rd acoustic conducting pipe 443 and the angle of sensitive face are 45 (can be 40 ~ 50) and spend, and the tubular axis line of second sound conduit 442 and the angle of sensitive face are that 90 (can be 85 ~ 95) are spent.
Acoustic sensor 5 is microphone (or tuning fork, or poly meta fluoroethylene piezoelectric film), and its output terminal is electrically connected with the input end of lock-in amplifier 6.
First signal output part 101 of the first passage 601 of lock-in amplifier 6, second channel 602 and third channel 603 tapped off signal generator 1, secondary signal output terminal 102 and the 3rd signal output part 103, for the reference signal that Received signal strength generator 1 provides, with the photoacoustic spectrum signals in the corresponding resonator cavity of demodulation acoustic sensor 5 perception.
The tubulose acoustic resonant cavity of right cylinder 7 shape is located thereon and is equipped with incidence window 421, exit window 422 and injection port 411, outlet 412 respectively, and front surge chamber 431, rear surge chamber 432 photoacoustic cell 4 in.
During use, gas to be measured enters the first resonator cavity 401, second resonator cavity 402 and the 3rd resonator cavity 403 of tubulose acoustic resonant cavity respectively via the injection port 411 on photoacoustic cell 4 and front surge chamber 431, and after interacting with the first laser light path 311, second laser light path 312 and the 3rd laser light path 313 that the first signal output part 101 through signal generator 1 in its tubular cavity of approach, secondary signal output terminal 102 and the 3rd signal output part 103 are modulated, create the change of periodic pressure---sound wave.This sound wave---photoacoustic signal is delivered on the acoustic sensor 5 of its pipe port by first sound conduit 441, second sound conduit 442 and the 3rd acoustic conducting pipe 443, acoustic sensor 5 is sent to the first passage 601 of lock-in amplifier 6, second channel 602 and third channel 603 after photoacoustic signal is converted to electric signal thus, obtains as or be similar to the content of three kinds of components in the gas to be measured shown in the frequency characteristic in Fig. 4.
Obviously, those skilled in the art can carry out various change and modification to triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device of the present invention and not depart from the spirit and scope of the present invention.Like this, if belong within the scope of the claims in the present invention and equivalent technologies thereof to these amendments of the present invention and modification, then the present invention is also intended to comprise these change and modification.
Claims (8)
1. a triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device, comprise the laser controller (2) and control signal source that are electrically connected with laser instrument successively, and the tubulose acoustic resonant cavity that be communicated with acoustic conducting pipe coaxial with laser light path, the acoustic sensor (5) being placed in acoustic conducting pipe port, the lock-in amplifier (6) that is electrically connected with acoustic sensor (5) output terminal, it is characterized in that:
Described laser instrument is the first laser instrument (301), second laser (302) and the 3rd laser instrument (303), first control output end (201) of its input end tap laser controller (2), the second control output end (202) and the 3rd control output end (203);
Described control signal source is signal generator (1), the respective input of its first signal output part (101), secondary signal output terminal (102) and the 3rd signal output part (103) tap laser controller (2);
Described tubulose acoustic resonant cavity is by right cylinder (7), its tubular cavity axis all with first resonator cavity (401) of right cylinder (7) axis being parallel, second resonator cavity (402) and the 3rd resonator cavity (403) composition, wherein, first resonator cavity (401) length L1, pass between the second resonator cavity (402) length L2 and the 3rd resonator cavity (403) length L3 is L1<L3<L2, first resonator cavity (401), radial angle between the 3rd resonator cavity (403) and the second resonator cavity (402) is 85 ~ 95 degree,
Described acoustic conducting pipe is first sound conduit (441), second sound conduit (442) and the 3rd acoustic conducting pipe (443), the pipe port of described first sound conduit (441), second sound conduit (442) and the 3rd acoustic conducting pipe (443) is all positioned on the sensitive face of described acoustic sensor (5), wherein, first sound conduit (441), the tubular axis line of the 3rd acoustic conducting pipe (443) and the angle of described sensitive face are 40 ~ 50 degree, and the tubular axis line of second sound conduit (442) and the angle of described sensitive face are 85 ~ 95 degree;
First signal output part (101) of signal generator (1) described in the first passage (601) of described lock-in amplifier (6), second channel (602) and third channel (603) tap, secondary signal output terminal (102) and the 3rd signal output part (103), for the reference signal that Received signal strength generator (1) provides, with the photoacoustic spectrum signals in the corresponding resonator cavity of demodulation acoustic sensor (5) perception.
2. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, is characterized in that laser instrument is semiconductor laser, or quantum cascade laser, or optical parameter concussion light source.
3. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, is characterized in that the first resonator cavity (401) length L1 >=5cm, the second resonator cavity (402) length L2≤35cm.
4. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, is characterized in that the tubular cavity diameter of the first resonator cavity (401), the second resonator cavity (402) and the 3rd resonator cavity (403) is 1 ~ 15mm.
5. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, is characterized in that the center of the tubular cavity axis of the first resonator cavity (401), the second resonator cavity (402) and the 3rd resonator cavity (403) is all in circumferentially same.
6. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, it is characterized in that first sound conduit (441), second sound conduit (442) and the 3rd acoustic conducting pipe (443) respectively with the first resonator cavity (401), the second resonator cavity (402) and the 3rd resonator cavity (403) vertical connection, and its connectivity part is all positioned at the mid point of corresponding resonator cavity.
7. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, is characterized in that acoustic sensor (5) is tuning fork, or microphone, or poly meta fluoroethylene piezoelectric film.
8. triple channel acoustic resonant cavity optoacoustic spectroscopy sensing device according to claim 1, it is characterized in that the tubulose acoustic resonant cavity of right cylinder (7) shape is located thereon and be equipped with incidence window (421), exit window (422) and injection port (411), outlet (412) respectively, and front surge chamber (431), rear surge chamber (432) photoacoustic cell (4) in.
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| CN111122445A (en) * | 2018-11-01 | 2020-05-08 | 西安电子科技大学 | Multiple resonance type T-shaped enhanced simultaneous detection method for multiple trace gases |
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| CN112858184A (en) * | 2021-01-29 | 2021-05-28 | 山西大学 | Gas measuring device and method based on piezoelectric material |
| CN112924388A (en) * | 2021-01-22 | 2021-06-08 | 中国科学院合肥物质科学研究院 | Orthogonal dual channel acoustic resonance module and device comprising same |
| CN113109268A (en) * | 2021-05-25 | 2021-07-13 | 武汉理工大学 | Photoacoustic spectroscopy enhancement device and method for gas detection using same |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN113295628A (en) * | 2020-02-23 | 2021-08-24 | 亘冠智能技术（杭州）有限公司 | Device for simultaneously detecting black carbon, organic carbon and gas |
| CN112924388A (en) * | 2021-01-22 | 2021-06-08 | 中国科学院合肥物质科学研究院 | Orthogonal dual channel acoustic resonance module and device comprising same |
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| CN113109268A (en) * | 2021-05-25 | 2021-07-13 | 武汉理工大学 | Photoacoustic spectroscopy enhancement device and method for gas detection using same |
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