CN112893282A - 多晶硅清洗回收预处理单元、清洗机及清洗方法 - Google Patents
多晶硅清洗回收预处理单元、清洗机及清洗方法 Download PDFInfo
- Publication number
- CN112893282A CN112893282A CN202110121379.1A CN202110121379A CN112893282A CN 112893282 A CN112893282 A CN 112893282A CN 202110121379 A CN202110121379 A CN 202110121379A CN 112893282 A CN112893282 A CN 112893282A
- Authority
- CN
- China
- Prior art keywords
- cleaning
- polysilicon
- plate
- shell
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 150
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 142
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 71
- 238000004064 recycling Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 85
- 239000002910 solid waste Substances 0.000 claims abstract description 43
- 239000007788 liquid Substances 0.000 claims abstract description 33
- 239000002699 waste material Substances 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims description 56
- 239000002253 acid Substances 0.000 claims description 47
- 238000005530 etching Methods 0.000 claims description 39
- 238000009826 distribution Methods 0.000 claims description 22
- 238000001035 drying Methods 0.000 claims description 14
- 239000013049 sediment Substances 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 7
- 238000007781 pre-processing Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 15
- 239000000243 solution Substances 0.000 description 26
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 238000001556 precipitation Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 210000005056 cell body Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0217—Use of a detergent in high pressure cleaners; arrangements for supplying the same
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110121379.1A CN112893282A (zh) | 2021-01-28 | 2021-01-28 | 多晶硅清洗回收预处理单元、清洗机及清洗方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110121379.1A CN112893282A (zh) | 2021-01-28 | 2021-01-28 | 多晶硅清洗回收预处理单元、清洗机及清洗方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN112893282A true CN112893282A (zh) | 2021-06-04 |
Family
ID=76120054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110121379.1A Pending CN112893282A (zh) | 2021-01-28 | 2021-01-28 | 多晶硅清洗回收预处理单元、清洗机及清洗方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112893282A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113319058A (zh) * | 2021-06-16 | 2021-08-31 | 中国恩菲工程技术有限公司 | 多晶硅清洗装置 |
CN116329158A (zh) * | 2023-02-23 | 2023-06-27 | 广州市晶邦密封技术有限公司 | 一种聚四氟乙烯密封件表面清洁装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5299584A (en) * | 1991-04-23 | 1994-04-05 | Tokyo Electron Limited | Cleaning device |
JPH10177985A (ja) * | 1996-12-19 | 1998-06-30 | Kaijo Corp | 洗浄機 |
CN104766814A (zh) * | 2015-03-31 | 2015-07-08 | 上海华力微电子有限公司 | 一种防止湿法清洗工艺中自然氧化膜生长的装置及方法 |
CN206069573U (zh) * | 2016-10-13 | 2017-04-05 | 高峰 | 一种污水处理用沉淀池 |
CN108400201A (zh) * | 2018-03-14 | 2018-08-14 | 江苏大学 | 一种多晶硅表面金字塔绒面的刻蚀方法 |
CN109285772A (zh) * | 2018-07-06 | 2019-01-29 | 横店集团东磁股份有限公司 | 一种多晶硅电池片链式背抛光方法及其装置 |
CN209255355U (zh) * | 2018-11-15 | 2019-08-16 | 深圳市铭科科技有限公司 | 一种超声波清洗机 |
CN111524834A (zh) * | 2020-04-29 | 2020-08-11 | 西安奕斯伟硅片技术有限公司 | 一种多晶硅清洗装置及方法 |
CN212015366U (zh) * | 2020-04-17 | 2020-11-27 | 黄晓敏 | 一种日常生活用水果清洗装置 |
-
2021
- 2021-01-28 CN CN202110121379.1A patent/CN112893282A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5299584A (en) * | 1991-04-23 | 1994-04-05 | Tokyo Electron Limited | Cleaning device |
JPH10177985A (ja) * | 1996-12-19 | 1998-06-30 | Kaijo Corp | 洗浄機 |
CN104766814A (zh) * | 2015-03-31 | 2015-07-08 | 上海华力微电子有限公司 | 一种防止湿法清洗工艺中自然氧化膜生长的装置及方法 |
CN206069573U (zh) * | 2016-10-13 | 2017-04-05 | 高峰 | 一种污水处理用沉淀池 |
CN108400201A (zh) * | 2018-03-14 | 2018-08-14 | 江苏大学 | 一种多晶硅表面金字塔绒面的刻蚀方法 |
CN109285772A (zh) * | 2018-07-06 | 2019-01-29 | 横店集团东磁股份有限公司 | 一种多晶硅电池片链式背抛光方法及其装置 |
CN209255355U (zh) * | 2018-11-15 | 2019-08-16 | 深圳市铭科科技有限公司 | 一种超声波清洗机 |
CN212015366U (zh) * | 2020-04-17 | 2020-11-27 | 黄晓敏 | 一种日常生活用水果清洗装置 |
CN111524834A (zh) * | 2020-04-29 | 2020-08-11 | 西安奕斯伟硅片技术有限公司 | 一种多晶硅清洗装置及方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113319058A (zh) * | 2021-06-16 | 2021-08-31 | 中国恩菲工程技术有限公司 | 多晶硅清洗装置 |
CN116329158A (zh) * | 2023-02-23 | 2023-06-27 | 广州市晶邦密封技术有限公司 | 一种聚四氟乙烯密封件表面清洁装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN112893282A (zh) | 多晶硅清洗回收预处理单元、清洗机及清洗方法 | |
CN106903819A (zh) | 一种塑料米的清洗设备及其使用方法 | |
CN205143443U (zh) | 一种节水型花生清洗装置 | |
CN112452904A (zh) | 一种石英颗粒除杂清洗一体化加工设备及其工作方法 | |
CN218309688U (zh) | 一种加氢催化剂连续洗涤机 | |
CN103769389A (zh) | 一种银残极洗涤成套装置 | |
CN205074082U (zh) | 一种节水型滚动式洗矿机 | |
CN215467009U (zh) | 一种太阳能电池芯片回收装置 | |
CN206653557U (zh) | 一种塑料米的清洗设备 | |
CN108380581B (zh) | 一种金属铜表面氧化皮处理工艺 | |
CN215277879U (zh) | 一种芝麻水洗机 | |
CN202346774U (zh) | 一种活性炭生产用的设备 | |
JPH07242494A (ja) | シリコン片の洗浄方法 | |
CN115582330A (zh) | 一种方硅芯的清洗设备及其清洗工艺 | |
JP3162890U (ja) | サンドブラスト機に用いられるサンド交換システム | |
CN212787365U (zh) | 一种板栗清洗烘干装置 | |
CN209953388U (zh) | 石英石中液体真空脱除装置及含该装置的石英石真空清洗系统 | |
CN212284421U (zh) | 一种多晶硅颗粒料非硅有机碎屑处理装置 | |
CN210788397U (zh) | 一种硅处理碱洗槽硅杂质排出循环系统 | |
CN206298349U (zh) | 一种瓜籽料除杂装置 | |
CN213558799U (zh) | 一种化工生产用高效的化工原料漂洗装置 | |
KR101582112B1 (ko) | 칩 크기의 실리콘의 세정 방법 및 이를 위한 세정장치 | |
CN220179643U (zh) | 一种水循环节能型混凝土养护装置 | |
CN215142649U (zh) | 模组清洗装置 | |
CN206492738U (zh) | 用于螺栓的清洗装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220629 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710032 Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Applicant before: Xi'an yisiwei Material Technology Co.,Ltd. |
|
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Applicant after: Xi'an Yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant before: Xi'an yisiwei Material Technology Co.,Ltd. Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |