CN112828470A - Laser correlation welding device and method - Google Patents

Laser correlation welding device and method Download PDF

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Publication number
CN112828470A
CN112828470A CN202011635103.7A CN202011635103A CN112828470A CN 112828470 A CN112828470 A CN 112828470A CN 202011635103 A CN202011635103 A CN 202011635103A CN 112828470 A CN112828470 A CN 112828470A
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China
Prior art keywords
glass
laser
pulse laser
generator
welding
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Granted
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CN202011635103.7A
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Chinese (zh)
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CN112828470B (en
Inventor
王雪辉
陈航
王建刚
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Wuhan Huagong Laser Engineering Co Ltd
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Wuhan Huagong Laser Engineering Co Ltd
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Priority to CN202011635103.7A priority Critical patent/CN112828470B/en
Publication of CN112828470A publication Critical patent/CN112828470A/en
Priority to PCT/CN2021/096098 priority patent/WO2022142100A1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20—Bonding
    • B23K26/32—Bonding taking account of the properties of the material involved
    • B23K26/324—Bonding taking account of the properties of the material involved involving non-metallic parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/54—Glass

Abstract

The invention discloses a laser correlation welding device and a laser correlation welding method, and relates to the technical field of laser welding. The laser device comprises a laser generator, a first focusing mirror, a second focusing mirror and a sample stage, wherein the laser generator is used for generating first pulse laser and second pulse laser, and first glass and second glass are arranged in a laminated mode. The first focusing mirror is arranged between the laser generator and the first glass and is used for enabling the first pulse laser to be incident to a gap between the first glass and the second glass from one side of the first glass, which is far away from the second glass; the second focusing mirror is used for enabling the second pulse laser to be incident to a gap between the first glass and the second glass from the side, far away from the first glass, of the second glass; the first pulse laser and the second pulse laser are shot oppositely, plasma is generated between the first glass and the second glass, and a melt is formed, so that the first glass and the second glass are welded, and the welding quality and efficiency are improved.

Description

Laser correlation welding device and method
Technical Field
The invention relates to the technical field of laser welding, in particular to a laser correlation welding device and method.
Background
The laser welding technique is a novel connecting technique using a laser beam with high energy density as a heat source, and has the advantages of selective welding, no contact, high efficiency and the like, so that the laser welding technique is widely applied and rapidly developed in engineering.
However, this welding technique is difficult to use for glass welding because glass is transparent to most lasers, i.e., the laser cannot interact with the glass to deposit energy, if a laser that does not transmit through the glass is used, such as CO2The laser emits laser light with a wavelength of 10.6 μm, which interacts with the glass surface and cannot penetrate the glass to deposit energy at its contact for welding. Therefore, when the glass is welded by using the laser welding technology, an intermediate absorption layer needs to be inserted into a glass gap, or a lower layer material is an opaque material, then laser with a transmission wavelength to the glass is adopted and focused to the glass contact gap, and the laser energy is deposited by using the absorption of the intermediate absorption layer or the lower layer material to the laser so as to realize the welding. Such a welding method obviously affects the overall light transmission performance of the device, and due to the introduction of heterogeneous materials, the difference of the thermal expansion coefficients can cause the welding seam to be affected by thermal stress, thereby causing the welding seam to fail.
Disclosure of Invention
The invention aims to provide a laser correlation welding device and a method, which can be directly used for welding two glass materials, does not need to introduce opaque materials, has low optical requirements on the glass surfaces to be welded, does not influence the light transmission performance of products after welding, and improves the welding quality and efficiency.
Embodiments of the invention may be implemented as follows:
in a first aspect, the invention provides a laser correlation welding device, which comprises a laser generator, a first focusing mirror, a second focusing mirror and a sample stage;
the laser generator is used for generating first pulse laser and second pulse laser, the sample table is used for placing first glass and second glass, and the first glass and the second glass are arranged in a laminated mode;
the first focusing mirror is arranged between the laser generator and the first glass and is used for enabling the first pulse laser to be incident to a gap between the first glass and the second glass from one side of the first glass, which is far away from the second glass; the first pulse laser is used for generating plasma on one side of the second glass close to the first glass and melting the second glass so as to weld the first glass and the second glass;
the second focusing mirror is arranged between the laser generator and the second glass and is used for enabling the second pulse laser to be incident from one side, away from the first glass, of the second glass to a gap between the first glass and the second glass; the second pulse laser is used for generating plasma on one side of the first glass close to the second glass and melting the first glass so as to weld the first glass and the second glass.
In an alternative embodiment, the incident direction of the first pulse laser on the side of the first glass far away from the second glass and the incident direction of the second pulse laser on the side of the second glass far away from the first glass are on the same straight line.
In an optional embodiment, the sample stage further comprises a polarization beam splitter, the polarization beam splitter is arranged between the laser generator and the sample stage, the polarization beam splitter is used for splitting the light beam emitted by the laser generator into the first pulse laser and the second pulse laser, the first pulse laser is used for being incident from the first glass after passing through the first focusing mirror, and the second pulse laser is used for being incident from the second glass after passing through the second focusing mirror.
In an optional embodiment, the polarization beam splitter further comprises a beam expanding collimator lens, and the beam expanding collimator lens is arranged between the laser generator and the polarization beam splitter.
In an optional embodiment, the laser generator includes a first generator and a second generator, the first generator and the second generator are respectively disposed on two sides of the sample stage, the first generator is configured to generate the first pulse laser, the second generator is configured to generate the second pulse laser, the first pulse laser is configured to be incident from the first glass after passing through the first focusing mirror, and the second pulse laser is configured to be incident from the second glass after passing through the second focusing mirror.
In an optional embodiment, the optical device further comprises a first light guide mirror and a second light guide mirror, wherein the first light guide mirror is arranged on one side of the first focusing mirror, which is far away from the first glass, and the second light guide mirror is arranged on one side of the second focusing mirror, which is far away from the second glass.
In an optional implementation mode, the device further comprises an industrial personal computer and a displacement platform, wherein the displacement platform is connected with the sample platform, and the industrial personal computer is respectively connected with the laser generator and the displacement platform.
In an optional embodiment, a fixing clamp is arranged on the sample stage, and the first glass and the second glass are mounted on the fixing clamp.
In a second aspect, the present invention provides a laser butt welding method for achieving welding of a first glass and a second glass, the first glass and the second glass being arranged in a stacked manner; the laser correlation welding method comprises the following steps:
a first pulse laser is incident from one side of the first glass far away from the second glass, and is focused at a gap between the first glass and the second glass; the first pulse laser is used for generating plasma on one side of the second glass close to the first glass and melting the second glass so as to weld the first glass and the second glass;
a second pulse laser is incident from one side of the second glass far away from the first glass, and is focused at a gap between the first glass and the second glass; the second pulse laser is used for generating plasma on one side of the first glass close to the second glass and melting the first glass so as to weld the first glass and the second glass.
In an alternative embodiment, in the step of injecting the first pulse laser from the side of the first glass far away from the second glass, the first pulse laser is injected from the first glass in a first direction after passing through a first focusing mirror;
and in the step of injecting second pulse laser from one side of the second glass far away from the first glass, the second pulse laser is injected from the second glass along a second direction after passing through a second focusing mirror, and the first direction and the second direction are positioned on the same straight line.
The laser correlation welding device and method provided by the embodiment of the invention have the beneficial effects that:
the laser correlation welding device comprises a laser generator, a first focusing mirror and a second focusing mirror, wherein first pulse laser and second pulse laser emitted by the laser generator are respectively correlated from two sides of first glass and second glass, namely the first pulse laser is incident to a gap between the first glass and the second glass from one side of the first glass, and the second pulse laser is incident to the gap between the first glass and the second glass from one side of the second glass. The first pulse laser is focused to one side, close to the first glass, of the second glass under the action of the first focusing mirror, nonlinear interaction is generated between the first pulse laser and the second glass, plasma is generated, strong absorption of the plasma on the laser can generate a shielding effect on the subsequent first pulse laser, and the subsequent first pulse laser cannot penetrate through the plasma and act on the original focus. As the number of laser pulses increases, the plasma region will appear to expand from the focal point toward the light source of the first pulse laser. At the same time, the plasma zone transfers energy to the surrounding material through the effect of thermal diffusion, forming an outer zone of melt modification to solder the first and second glasses. And because the first pulse laser and the second pulse laser are oppositely emitted, the second pulse laser is focused to one side of the first glass close to the second glass under the action of the second focusing mirror, generates nonlinear interaction with the first glass and generates plasma, and can generate shielding effect on the subsequent second pulse laser, so that the subsequent second pulse laser cannot penetrate through the plasma and acts on the original focus, and the plasma area can be expanded from the focus to the light source direction of the second pulse laser. And transferring energy to surrounding materials through a thermal diffusion effect to form an outer melt modified zone to solder the first glass and the second glass. The opposite-emitting welding device is simple in structure, light-tight materials do not need to be introduced between the first glass and the second glass, the optical requirement on the welding surface of the glass is low, the first glass and the second glass can be welded under the condition that a large gap exists, and the welding quality and efficiency are improved.
According to the laser correlation welding method, the first pulse laser and the second pulse laser are respectively incident from two sides of the first glass and the second glass to form correlation, nonlinear interaction is generated between the lasers and glass materials to generate plasma, and the plasma strongly absorbs the lasers to generate a shielding effect on the subsequent lasers, so that the subsequent lasers cannot penetrate through the plasma to act on the original focus. As the number of laser pulses increases, the plasma region will appear to expand from the focal point toward the laser source. Meanwhile, the energy of the plasma zone can be transferred to surrounding materials through the thermal diffusion effect to form an external melting modification zone so as to weld the first glass and the second glass.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of a welding principle of laser butt welding according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of another welding principle of laser butt welding according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a laser butt welding apparatus according to an embodiment of the present invention;
fig. 4 is another schematic structural diagram of a laser correlation welding apparatus according to an embodiment of the present invention.
Icon: 1-fixing a clamp; 2-a first pulsed laser; 3-second pulse laser; 4-a first glass; 5-a second glass; 6-a laser generator; 7-a beam expanding collimating lens; 8-a first generator; 9-a second generator; 10-a first beam expanding collimating lens; 20-a second beam expanding and collimating lens; 13-a polarizing beam splitter; 14-a first light guide; 15-a first focusing mirror; 16-a second light guide; 18-second focusing mirror.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
At present, the traditional laser welding method needs to introduce opaque materials between two pieces of glass to weld, the light transmission performance of the welded product can be reduced by the welding mode, and the introduced dissimilar materials can cause the welding seam to be affected by thermal stress due to the difference of thermal expansion coefficients, so that the welding seam is failed, and the welding quality is difficult to ensure.
The laser correlation welding device provided by the embodiment of the invention can be directly used for welding two glass materials or two transparent materials, a light-tight material does not need to be arranged between the two glass materials, and the welding efficiency is high. The optical performance requirement on the glass welding surface is low, the light transmittance of the product is not affected after welding, the welding quality is improved, the two glasses can be welded under the condition of a larger gap between the two glasses, the welding reliability requirement can be met, the shearing strength is good, the good sealing performance of the welded product can be realized, and the application range is wide.
Referring to fig. 1 to 4, the embodiment provides a laser correlation welding device, which includes a laser generator 6, a first focusing mirror 15, a second focusing mirror 18, a sample stage, a displacement stage, and an industrial personal computer. The laser generator 6 is used for generating a first pulse laser 2 and a second pulse laser 3, the sample platform is used for placing a first glass 4 and a second glass 5, and the first glass 4 and the second glass 5 are arranged in a stacked mode. The first focusing mirror 15 is arranged between the laser generator 6 and the first glass 4, and the first focusing mirror 15 is used for enabling the first pulse laser 2 to be incident to a gap between the first glass 4 and the second glass 5 from one side of the first glass 4 far away from the second glass 5; the first pulse laser 2 is used to generate plasma on the side of the second glass 5 near the first glass 4 and melt the second glass 5 to weld the first glass 4 and the second glass 5. The second focusing mirror 18 is arranged between the laser generator 6 and the second glass 5, and the second focusing mirror 18 is used for enabling the second pulse laser 3 to be incident to the gap between the first glass 4 and the second glass 5 from the side, far away from the first glass 4, of the second glass 5; the second pulse laser 3 is used to generate plasma on the side of the first glass 4 close to the second glass 5 and melt the first glass 4 to weld the first glass 4 and the second glass 5. Optionally, the first pulse laser 2 and the second pulse laser 3 in this application are ultrashort pulse lasers, where the ultrashort pulse laser mainly refers to picosecond or femtosecond pulse laser whose laser pulse width is less than nanosecond, and is suitable for welding of glass or a light-transmitting material whose contact gap is not greater than 5 micrometers, the ultrashort pulse laser wavelength may be 200nm to 2000nm, the pulse width may be less than or equal to 12ps, and the repetition rate may be greater than or equal to 1 kHz.
It should be noted that the lamination arrangement here may be a stacking in a vertical direction, as shown in fig. 1, and the first glass 4 and the second glass 5 are in contact with each other and in a substantially horizontal direction after stacking; or stacked in a horizontal direction, as shown in fig. 2, and the first glass 4 and the second glass 5 are in contact with each other and are in a substantially vertical direction after stacking. Of course, the first glass 4 and the second glass 5 after being stacked may have a certain inclination angle with respect to the horizontal direction, and is not particularly limited herein. Optionally, a fixing clamp 1 is arranged on the sample stage and used for installing and clamping the first glass 4 and the second glass 5. The gap between the first glass 4 and the second glass 5 after stacking is less than 5 micrometers, for example, 1 micrometer, 2 micrometers, 3 micrometers or 4 micrometers, and the like can be welded by using the laser butt welding device provided by this embodiment. The first glass 4 and the second glass 5 may be the same material or different materials. The surface to be welded between the first glass 4 and the second glass 5 does not need to be subjected to special optical treatment, the requirement on the surface quality of the glass is reduced, optical contact conditions are not needed, and welding can be directly carried out.
Further, the incident direction of the first pulse laser beam 2 on the side of the first glass 4 away from the second glass 5 and the incident direction of the second pulse laser beam 3 on the side of the second glass 5 away from the first glass 4 are on the same straight line. That is, the focus point of the first pulse laser 2 in the contact gap and the focus point of the second pulse laser 3 in the contact gap are located at the same point, but in other alternative embodiments, the focus points of the first pulse laser 2 and the second pulse laser 3 in the contact gap may also be located at different positions, that is, the incident directions of the two sides may also be different on the same straight line; further, the incident angle of the first pulse laser light 2 on the first glass 4 side may be 0 degree to 90 degrees, and the incident angle of the second pulse laser light 3 on the second glass 5 side may be 0 degree to 90 degrees. In the present embodiment, the first pulse laser 2 is incident at an angle substantially perpendicular to the surface of the first glass 4, and the second pulse laser 3 is incident at an angle substantially perpendicular to the surface of the second glass 5, which is not particularly limited herein.
Alternatively, the first pulse laser 2 and the second pulse laser 3 may be generated by the same laser generator 6, or may be generated by two laser generators 6 separately. As shown in fig. 3, if the first pulse laser 2 and the second pulse laser 3 are generated by the same laser generator 6, a polarization beam splitter 13 is disposed between the laser generator 6 and the first glass 4, that is, the polarization beam splitter 13 is disposed between the laser generator 6 and the sample stage, and the polarization beam splitter 13 is used for splitting the light beam generated by the laser generator 6 into the first pulse laser 2 and the second pulse laser 3. In order to adjust the beam diameter and the divergence angle of the laser generated by the laser generator 6 to optimize the optical path structure, a beam expanding collimator lens 7 is further disposed between the laser generator 6 and the polarization beam splitter 13 in this embodiment. Further, a first light guide mirror 14 is provided between the polarization beam splitter 13 and the first focusing mirror 15 to adjust the incident direction of the first pulse laser beam 2, and the first focusing mirror 15 is used to adjust the focusing point of the first pulse laser beam 2 to maximize the energy of the first pulse laser beam 2 for welding. A second light guide mirror 16 is further disposed between the polarization beam splitter 13 and the second focusing mirror 18 to adjust the incident direction of the second pulse laser 3, and the second focusing mirror 18 is used to adjust the focusing point of the second pulse laser 3 to maximize the energy of the second pulse laser 3 for welding. It is easy to understand that the number and position of the first light guiding mirror 14 and the second light guiding mirror 16 can be flexibly adjusted according to the relative position relationship of the laser generator 6, the polarization beam splitter 13, and the first glass 4 and the second glass 5, and the number can be one or more, and is not limited specifically here.
Thus, light beams emitted by the laser generator 6 reach the polarization beam splitter 13 through the beam expanding collimator 7, the light beams are divided into first pulse laser 2 and second pulse laser 3 through the polarization beam splitter 13, the first pulse laser 2 sequentially passes through the first light guide mirror 14 and the first focusing mirror 15, and enters the contact gap between the first glass 4 and the second glass 5 from the surface of the first glass 4 to form a first light path. Further, in the first optical path, the first light guide mirror 14 is disposed at an angle of 135 degrees with respect to the horizontal direction, so that the first pulse laser 2 is deflected by 90 degrees at the first light guide mirror 14 and enters one side of the first glass 4 through the first focusing mirror 15 in the vertical direction. The second pulse laser 3 sequentially passes through two second light guide mirrors 16 and a second focusing mirror 18, and is incident to the contact gap between the first glass 4 and the second glass 5 from the surface of the second glass 5 to form a second light path. Further, in the second optical path, two second light guiding mirrors 16 are disposed at an interval, the second light guiding mirror 16 (the first second light guiding mirror 16) close to the polarization beam splitter 13 is disposed at an angle of 135 degrees with respect to the horizontal direction, so that the second pulse laser 3 is 90-degree deflected at the first second light guiding mirror 16 and is emitted to the second light guiding mirror 16 (the second light guiding mirror 16 close to the second focusing mirror 18), the second light guiding mirror 16 is disposed at an angle of 45 degrees with respect to the horizontal direction, so that the second pulse laser 3 is 90-degree deflected at the second light guiding mirror 16 and is emitted to the second glass 5 side through the second focusing mirror 18 in the vertical direction. It is to be understood that the first light guide mirror 14 or the second light guide mirror 16 may be omitted if the relative position of the laser generator 6 to the sample stage is appropriately adjusted, and is not particularly limited herein.
As shown in fig. 4, if the first pulse laser 2 and the second pulse laser 3 are generated by two laser generators 6, the laser generators 6 include a first generator 8 and a second generator 9, the first generator 8 is used for generating the first pulse laser 2, and the second generator 9 is used for generating the second pulse laser 3. Optionally, the first generator 8 and the second generator 9 are separately disposed on two sides of the sample stage, that is, the first generator 8 is disposed on one side of the first glass 4, and the second generator 9 is disposed on one side of the second glass 5. A first beam expanding collimating lens 10, two first light guide lenses 14 and a first focusing lens 15 are sequentially arranged between a first generator 8 and a first glass 4, a first pulse laser 2 emitted by the first generator 8 reaches the first light guide lens 14 after passing through the first beam expanding collimating lens 10, the first light guide lens 14 is arranged at an angle of 135 degrees relative to the horizontal direction, so that the first pulse laser 2 is deflected at 90 degrees at the first light guide lens 14 and then is directed at a second first light guide lens 14, the second first light guide lens 14 is arranged at an angle of 135 degrees relative to the horizontal direction, so that the first pulse laser 2 is deflected at 90 degrees at the second first light guide lens 14 and vertically enters one side of the first glass 4 after passing through the first focusing lens 15. A second beam expanding collimating lens 20, two second light guiding lenses 16 and a second focusing lens 18 are sequentially arranged between the second generator 9 and the second glass 5, the second pulse laser 3 emitted by the second generator 9 passes through the second beam expanding collimating lens 20 and then reaches the first second light guiding lens 16, the second light guiding lens 16 is arranged at an angle of 45 degrees relative to the horizontal direction, so that the first pulse laser 2 is deflected at 90 degrees at the first light guiding lens 14 and then is directed at the second light guiding lens 16, the second first light guiding lens 14 is arranged at an angle of 45 degrees relative to the horizontal direction, and the second pulse laser 3 is deflected at 90 degrees at the second light guiding lens 16 and then is vertically incident to one side of the second glass 5 after passing through the second focusing lens 18. It should be noted that, if the arrangement position of the first generator 8 is adjusted so that the first pulse laser 2 emitted by the first generator 8 is perpendicular to the surface of the first glass 4 or enters at a practically required preset angle, the first light guide mirror 14 can be omitted. Similarly, if the arrangement position of the second generator 9 is adjusted so that the second pulse laser 3 emitted by the second generator 9 is perpendicular to the surface of the second glass 5 or enters at a preset angle actually required, the second light guide mirror 16 can be omitted.
Optionally, a fixing clamp 1 is arranged on the sample stage, and the first glass 4 and the second glass 5 are mounted on the fixing clamp 1. The displacement table is connected with the sample table and used for adjusting the position of the sample table. The industrial computer is connected with laser generator 6 and displacement platform respectively to be used for controlling laser generator 6 to send first pulse laser 2 and second pulse laser 3, control displacement platform removes, adjusts the frequency of first pulse laser 2, single pulse energy and at the incident angle and the speed etc. on first glass 4 surfaces, adjusts the frequency of second pulse laser 3, single pulse energy and at the incident angle and the speed etc. on second glass 5 surfaces, realize automatic, quick, accurate welding.
The laser correlation welding device provided by the embodiment of the invention has the following working principle:
taking the first glass 4 and the second glass 5 placed in a horizontal state as shown in fig. 1 as an example, the first glass 4 is an upper layer glass, and the second glass 5 is a lower layer glass. The first pulse laser 2 is incident to a contact gap between the first glass 4 and the second glass 5 from the surface of one side of the first glass 4, the first pulse laser 2 adopts ultrashort pulse laser, the first pulse laser 2 is focused to one side of the second glass 5 close to the first glass 4 under the action of the first focusing mirror 15, and generates nonlinear interaction with the second glass 5 and generates plasma, the plasma has strong absorption characteristics on the laser, and can generate a shielding effect on the subsequent first pulse laser 2, so that the subsequent first pulse laser 2 cannot penetrate through the plasma and act on the original focus, and therefore the acting point of the subsequent first pulse laser 2 is higher than the previous focusing point, which can cause the plasma to be generated by laser induction again. As the number of laser pulses increases, the plasma region spreads from the focal point toward the light source of the first pulse laser 2, that is, the plasma region spreads from the side of the second glass 5 close to the first glass 4 toward the side of the first glass 4 close to the second glass 5. Meanwhile, the plasma region can transfer energy to surrounding materials through a thermal diffusion effect to form an external melting modification region, the first glass 4 and the second glass 5 are melted, a droplet-shaped double-structure action region is formed under the dual action of the first pulse laser 2 and the plasma, and the lowest end of the double-structure action region is the focus position of the first pulse laser 2. Therefore, when welding is performed by focusing the ultrashort pulse laser at the glass contact gap, the laser action region always develops from the lower glass to the light source, and the connection between the upper glass and the lower glass is realized through the bulge or the splash generated by the lower glass material, namely, the action region of the first pulse laser 2 develops from the surface of the second glass 5 close to the first glass 4 to the light source of the first pulse laser 2 so as to weld the first glass 4 and the second glass 5.
Similarly, the second pulse laser 3 is incident from the side of the second glass 5, the action principle is consistent with that of the first pulse laser 2, the action area of the second pulse laser 3 is developed from the surface of the first glass 4 close to the side of the second glass 5 to the light source of the second pulse laser 3, and the first glass 4 and the second glass 5 are welded through the projection or the sputtering generated by the material of the first glass 4. It will be readily appreciated that since the melt produced at the focal point is very limited, the gap that can be joined is also limited. In the embodiment, the first pulse laser 2 and the second pulse laser 3 are adopted for opposite injection, so that more melts are generated at a focusing point, welding with larger gap can be realized, and the application range is wider.
The embodiment of the invention also provides a laser correlation welding method, which is used for realizing the welding of the first glass 4 and the second glass 5, wherein the first glass 4 and the second glass 5 are arranged in a laminated manner, and the laser correlation welding method comprises the following steps:
a first pulse laser 2 is incident from one side of the first glass 4 far away from the second glass 5, and the first pulse laser 2 is focused at a gap between the first glass 4 and the second glass 5; the first pulse laser 2 is used for generating plasma on one side of the second glass 5 close to the first glass 4 and melting the second glass 5 so as to weld the first glass 4 and the second glass 5; a second pulse laser 3 is incident from the side of the second glass 5 far away from the first glass 4, and the second pulse laser 3 is focused at the gap between the first glass 4 and the second glass 5; the second pulse laser 3 is used to generate plasma on the side of the first glass 4 close to the second glass 5 and melt the first glass 4 to weld the first glass 4 and the second glass 5. The mode that the first pulse laser 2 and the second pulse laser 3 are oppositely emitted is adopted, the first pulse laser 2 and the second pulse laser 3 adopt ultrashort pulse lasers, more plasmas and melts can be formed between the first glass 4 and the second glass 5, glass welding with larger gaps is achieved, welding quality is reliable, and the glass welding device has good shearing performance and sealing performance. And light-tight materials are not required to be introduced, the requirements on the surface quality of the glass are reduced, optical contact conditions are not required, the welding is more efficient, and the light transmittance of a welded product is not influenced.
Optionally, the first pulse laser 2 passes through the first focusing mirror 15 and then enters the first focusing point from the first glass 4 along the first direction, the second pulse laser 3 passes through the second focusing mirror 18 and then enters the second focusing point from the second glass 5 along the second direction, the first direction and the second direction are located on the same straight line, the first focusing point and the second focusing point may be the same point or different points, and of course, the first direction and the second direction may also be different on the same straight line; the first glass 4 and the second glass 5 may be the same material or different materials, and are not particularly limited herein. Further, in the embodiment, the first pulse laser 2 is incident perpendicularly to the surface of the first glass 4, and the second pulse laser 3 is incident perpendicularly to the surface of the second glass 5, so that the energy of the first pulse laser 2 and the energy of the second pulse laser 3 are fully exerted, the energy deposited at the first focusing point and the second focusing point are more sufficient, more melts are generated, the welding quality is improved, the welding method is suitable for welding the first glass 4 and the second glass 5 with larger gaps, and the shearing performance and the sealing performance of the welded product are enhanced.
The following specific examples are given:
example 1
The glass samples to be welded, namely the first glass 4 and the second glass 5 are soda-lime glass, the contact distance is pressed to be about 2 mu m by using a fixed clamp 1, the wavelength of the used ultrashort pulse laser is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 0.6 mu J, the speed is 20mm/s, through tests, the welded product can bear the push-pull force of about 20Kg, and the air tightness can reach 5 multiplied by 10-10Pa.m3And/s shows that the sample has good shear strength and sealing performance.
Example 2
The glass samples to be welded, i.e. the first glass 4 and the second glass 5, are both D263 borosilicate glass, the contact distance is pressed to about 3 mu m by using a fixed clamp 1, the used ultrashort pulse laser wavelength is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 1 mu J, and the speed is highThe degree is 24mm/s, and the welded product can bear about 15Kg of push-pull force and the air tightness can reach 2 x 10-10Pa.m3And/s shows that the sample has good shear strength and sealing performance.
Example 3
In the glass samples to be welded, the first glass 4 is D263 borosilicate glass, the second glass 5 is quartz glass, the contact distance is pressed to about 2 mu m by using a fixed clamp 1, the used ultrashort pulse laser wavelength is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 1 mu J, the speed is 12mm/s, through tests, the welded product can bear 25Kg of push-pull force, and the air tightness can reach 8 multiplied by 10-10Pa.m3And/s shows that the sample has good shear strength and sealing performance.
Therefore, the laser correlation welding device and the laser correlation welding method provided by the embodiment can be suitable for welding glass with a larger gap, namely less than or equal to 5 micrometers, reduce the requirements on the surface quality of the glass, do not need optical contact conditions, and have good shear strength and sealing performance. And a light-tight material is not required to be introduced independently, so that the welding efficiency and quality are improved, and meanwhile, the welding process requirement and the welding cost are reduced.
In summary, the embodiments of the present invention provide a laser correlation welding apparatus and method, which have the following beneficial effects:
the laser correlation welding device and the method adopt ultrashort pulse laser to respectively enter from two sides of two glasses to be welded (a first glass 4 and a second glass 5), namely, the laser correlation mode is adopted, the melt between the first glass 4 and the second glass 5 is increased, the laser correlation welding device is suitable for welding two glasses with larger gaps, a lightproof material is not required to be introduced, the light transmittance of a product after welding is not influenced, the requirements on the surface quality of the glass are reduced, the optical contact condition is not required, and the welded product has good shearing strength and sealing performance, the application range is wide, and the laser correlation welding device has great popularization and application values.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (10)

1. A laser correlation welding device is characterized by comprising a laser generator, a first focusing mirror, a second focusing mirror and a sample stage;
the laser generator is used for generating first pulse laser and second pulse laser, the sample table is used for placing first glass and second glass, and the first glass and the second glass are arranged in a laminated mode;
the first focusing mirror is arranged between the laser generator and the first glass and is used for enabling the first pulse laser to be incident to a gap between the first glass and the second glass from one side of the first glass, which is far away from the second glass; the first pulse laser is used for generating plasma on one side of the second glass close to the first glass and melting the second glass so as to weld the first glass and the second glass;
the second focusing mirror is arranged between the laser generator and the second glass and is used for enabling the second pulse laser to be incident from one side, away from the first glass, of the second glass to a gap between the first glass and the second glass; the second pulse laser is used for generating plasma on one side of the first glass close to the second glass and melting the first glass so as to weld the first glass and the second glass.
2. The laser butt-welding device according to claim 1, wherein an incident direction of the first pulse laser on a side of the first glass away from the second glass is on the same straight line as an incident direction of the second pulse laser on a side of the second glass away from the first glass.
3. The laser correlation welding device according to claim 1, further comprising a polarization beam splitter disposed between the laser generator and the sample stage, wherein the polarization beam splitter is configured to split the light beam generated by the laser generator into the first pulse laser and the second pulse laser, the first pulse laser is configured to be incident from the first glass after passing through the first focusing mirror, and the second pulse laser is configured to be incident from the second glass after passing through the second focusing mirror.
4. The laser correlation welding device of claim 3, further comprising a beam expanding collimator lens disposed between the laser generator and the polarization beam splitter.
5. The laser butt-welding apparatus according to claim 1, wherein the laser generator includes a first generator for generating the first pulse laser and a second generator for generating the second pulse laser, the first pulse laser being incident from the first glass after passing through the first focusing mirror, and the second pulse laser being incident from the second glass after passing through the second focusing mirror.
6. The laser correlation welding device of claim 1, further comprising a first light guide mirror and a second light guide mirror, wherein the first light guide mirror is disposed on a side of the first focusing mirror away from the first glass, and the second light guide mirror is disposed on a side of the second focusing mirror away from the second glass.
7. The laser correlation welding device of claim 1, further comprising an industrial personal computer and a displacement table, wherein the displacement table is connected with the sample table, and the industrial personal computer is respectively connected with the laser generator and the displacement table.
8. The laser correlation welding device of any one of claims 1 to 7, wherein a fixing clamp is arranged on the sample stage, and the first glass and the second glass are mounted on the fixing clamp.
9. A laser correlation welding method is characterized in that the method is used for welding a first glass and a second glass, and the first glass and the second glass are arranged in a laminated mode; the laser correlation welding method comprises the following steps:
a first pulse laser is incident from one side of the first glass far away from the second glass, and is focused at a gap between the first glass and the second glass; the first pulse laser is used for generating plasma on one side of the second glass close to the first glass and melting the second glass so as to weld the first glass and the second glass;
a second pulse laser is incident from one side of the second glass far away from the first glass, and is focused at a gap between the first glass and the second glass; the second pulse laser is used for generating plasma on one side of the first glass close to the second glass and melting the first glass so as to weld the first glass and the second glass.
10. The laser butt-welding method according to claim 9, wherein in the step of irradiating a first pulse laser from a side of the first glass remote from the second glass, the first pulse laser is irradiated from the first glass in a first direction after passing through a first focusing mirror;
and in the step of injecting second pulse laser from one side of the second glass far away from the first glass, the second pulse laser is injected from the second glass along a second direction after passing through a second focusing mirror, and the first direction and the second direction are positioned on the same straight line.
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