WO2022142100A1 - Laser opposing emission welding apparatus and method - Google Patents

Abstract

A laser opposing emission welding apparatus comprising a laser generator (6), a first focusing lens (15), a second focusing lens (18), and a sample stage, the laser generator (6) being configured to generate a pulsed laser, and a first piece of glass (4) and a second piece of glass (5) being in a stacked arrangement in a manner where a gap is present; the first focusing lens (15) is arranged between the laser generator (6) and the first piece of glass (4), the first focusing lens (15) is configured to allow the pulsed laser generated by the laser generator (6) to serve as a first pulsed laser (2) and be emitted into a gap between the first piece of glass (4) and the second piece of glass (5) from the side of the first piece of glass (4) away from the second piece of glass (5); the second focusing lens (18) is configured to allow the pulsed laser generated by the laser generator (6) to serve as a second pulsed laser (3) and be emitted into the gap between the first piece of glass (4) and the second piece of glass (5) from the side of the second piece of glass (5) away from the first piece of glass (4); and by means of opposing emissions of the first pulsed laser (2) and the second pulsed laser (3), plasma is generated at the side of the first piece of glass (4) near the gap and the side of the second piece of glass (5) near the gap, and a melted material is formed, so as to weld the first piece of glass (4) and the second piece of glass (5). Additionally, the present application further comprises a laser opposing emission welding method. Utilizing the present apparatus for welding, surfaces to be welded between a first piece of glass (4) and a second piece of glass (5) do not need to undergo special optical treatment, a requirement on glass surface quality is lowered, no optical contacting is necessary, welding is more efficient, the light transmission performance of a welded product is unaffected, and the shearing performance and sealing performance of the welded product are enhanced.

Description

Laser butt beam welding device and method

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the priority of the Chinese Patent Application No. 2020116351037 and entitled "Laser Butt Beam Welding Apparatus and Method" filed with the Chinese Patent Office on December 31, 2020, the entire contents of which are incorporated herein by reference.

technical field

The present application relates to the technical field of laser welding, and in particular, to a laser butt beam welding device and method.

Background technique

Laser welding technology is a new type of connection technology that uses a high-energy-density laser beam as a heat source. It has the advantages of selective welding, non-contact, and high efficiency, so it has been widely used and developed rapidly in engineering.

However, it is more difficult to use this welding technology for glass welding, because glass is transparent to most _lasers , that is, the laser cannot interact with the glass to deposit energy. The emitted laser with a wavelength of 10.6 μm will interact with it on the surface of the glass, and cannot pass through the glass to deposit energy at its contact to achieve welding. Therefore, when using laser welding technology to weld glass, it is necessary to insert an intermediate absorption layer in the glass gap, or the underlying material is an opaque material, and then use a laser with a wavelength that transmits the glass to focus it on the glass gap. The absorption of the laser light by the intermediate absorbing layer or the underlying material deposits the laser energy for welding. Such a welding method will obviously affect the overall light transmission performance of the device, and due to the introduction of foreign materials, the difference in thermal expansion coefficient will cause the weld to be affected by thermal stress, resulting in weld failure.

SUMMARY OF THE INVENTION

The purpose of this application is to provide a laser butt beam welding device and method, which can directly weld two glass materials without introducing opaque materials, has low requirements on the glass surface to be welded, and does not affect the transparency of the product after welding. Optical performance to improve welding quality and efficiency.

The embodiments of the present application can be implemented as follows:

In a first aspect, the present application provides a laser butt beam welding device, which includes a laser generator, a first focusing mirror, a second focusing mirror and a sample stage; the laser generator is configured to generate pulsed laser light, and the sample stage It is configured to place a first glass and a second glass, and the first glass and the second glass are stacked with a gap; the first focusing mirror is arranged between the laser generator and the first glass. During the time, the first focusing mirror is configured to inject the pulsed laser generated by the laser generator as the first pulsed laser from the side of the first glass away from the second glass to the first glass and the second glass. the gap between the second glasses; the first pulsed laser is configured to generate plasma on the side of the second glass close to the first glass and melt the second glass to weld the first glass glass and the second glass; the second focusing mirror is arranged between the laser generator and the second glass, and the second focusing mirror is configured to use the pulsed laser generated by the laser generator as the first Two pulsed lasers are incident from the side of the second glass away from the first glass to the gap between the first glass and the second glass; the second pulsed laser is configured to A side of the glass close to the second glass generates plasma and melts the first glass to weld the first glass and the second glass.

Optionally, in the above-mentioned laser butt beam welding device, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the The second incident light paths from the second focusing mirror to the second glass are located on the same straight line.

Optionally, in the above-mentioned laser butt beam welding device, it also includes a polarization beam splitter, the polarization beam splitter is arranged between the laser generator and the sample stage, and the polarization beam splitter is configured to The pulsed laser generated by the laser generator is divided into the first pulsed laser and the second pulsed laser, and the first pulsed laser is configured to be incident from the first glass after passing through the first focusing mirror, The second pulsed laser light is configured to be incident from the second glass after passing through the second focusing mirror.

Optionally, in the above-mentioned laser butt beam welding device, wherein the laser generator includes a first generator and a second generator, the first generator is configured to generate the first pulsed laser, the A second generator is configured to generate the second pulsed laser light, the first pulsed laser light is configured to be incident from the first glass after passing through the first focusing mirror, and the second pulsed laser light is configured to pass through the first focusing mirror After two focusing mirrors are incident from the second glass.

Optionally, in the above-mentioned laser butt-beam welding device, it also includes a beam expander collimator for adjusting the beam diameter and divergence angle of the pulsed laser generated by the laser generator, and the beam expander collimator is provided on the downstream of the propagation direction of the pulsed laser light of the laser generator.

Optionally, in the above-mentioned laser butt beam welding device, it further includes a first light guide mirror and a second light guide mirror, the first light guide mirror is arranged at a position of the first focusing mirror away from the first glass. On one side, the second light guide mirror is arranged on the side of the second focusing mirror away from the second glass.

Optionally, in the above-mentioned laser butt beam welding device, it also includes an industrial computer and a displacement stage, the displacement stage is connected to the sample stage, and the industrial computer is respectively connected to the laser generator and the displacement stage. , to control the laser generator and the stage.

Optionally, in the above laser butt beam welding device, a fixing fixture is provided on the sample stage, and the fixing fixture fixes the first glass and the second glass.

Optionally, in the above-mentioned laser butt beam welding device, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the The second incident light path from the second focusing mirror to the second glass is parallel or intersecting with the extension line.

Optionally, in the above-mentioned laser butt beam welding device, the first focusing mirror is configured to focus the first pulsed laser light on the surface or inside of the second glass on the side of the first glass, The second focusing mirror is configured to focus the second pulsed laser light on a surface or inside of the first glass on the side of the second glass.

In a second aspect, the present application provides a laser butt beam welding device, comprising a laser generator, a first focusing mirror, a second focusing mirror and a sample stage; the laser generator is configured to generate pulsed laser light, and the sample stage is configured to A first glass and a second glass are placed, and the first glass and the second glass are stacked with a gap; the first focusing mirror is arranged between the laser generator and the first glass, The first focusing mirror is configured to inject the pulsed laser light generated by the laser generator into the first glass and the second glass from the side of the first glass away from the second glass as the first pulsed laser light at a gap between glasses; the first pulsed laser is configured to generate plasma on a side of the first glass close to the second glass and melt the first glass to weld the first glass and the second glass the second glass; the second focusing mirror is arranged between the laser generator and the second glass, and the second focusing mirror is configured to use the pulsed laser generated by the laser generator as the second pulse The laser is incident from the side of the second glass away from the first glass to the gap between the first glass and the second glass; the second pulsed laser is configured to be close to the second glass One side of the first glass generates plasma and melts the second glass to weld the first glass and the second glass.

Optionally, in the above-mentioned laser butt beam welding device, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the The second incident light paths from the second focusing mirror to the second glass are located on the same straight line.

Optionally, in the above-mentioned laser butt beam welding device, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the The second incident light path from the second focusing mirror to the second glass is parallel or intersecting with the extension line.

Optionally, in the above-mentioned laser butt beam welding device, the first focusing mirror is configured to focus the first pulsed laser light on the surface or inside of the first glass on the side of the second glass, The second focusing mirror is configured to focus the second pulsed laser light on a surface or inside of the second glass on the side of the first glass.

Optionally, in the above-mentioned laser butt beam welding device, the gap between the first glass and the second glass is 5 μm or less.

Optionally, in the above-mentioned laser butt beam welding device, the wavelengths of the first pulsed laser and the second pulsed laser are 200 nm to 2000 nm, the pulse width is less than 12 ps, and the repetition rate is more than 1 kHz.

In a third aspect, the present application provides a laser butt beam welding method, configured to realize welding of a first glass and a second glass, the first glass and the second glass being stacked with a gap; the laser beam beam welding method The welding method includes: incident a first pulsed laser light from a side of the first glass away from the second glass, and the first pulsed laser light is focused on a gap between the first glass and the second glass; the first pulsed laser is configured to generate plasma on a side of the second glass adjacent to the first glass and to melt the second glass to weld the first glass and the second glass; and A second pulsed laser is incident from the side of the second glass away from the first glass, and the second pulsed laser is focused on the gap between the first glass and the second glass; the second pulsed laser The pulsed laser is configured to generate plasma on a side of the first glass adjacent to the second glass and to melt the first glass to weld the first glass and the second glass.

Optionally, in the above-mentioned laser butt beam welding method, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through the first focusing mirror. Incident from the first glass; in the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light passes through the second focusing mirror and passes through the second glass. Incident, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the second focusing mirror to the second glass. The two incident light paths are located on the same straight line.

Optionally, in the above-mentioned laser butt beam welding method, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through the first focusing mirror. Incident from the first glass; in the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light passes through the second focusing mirror and passes through the second glass. Incident, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the second focusing mirror to the second glass. The parallel or extension lines of the two incident light paths intersect.

Optionally, in the above-mentioned laser butt beam welding method, the first pulsed laser is focused on the surface or inside of the second glass on the side of the first glass, and the second pulsed laser is focused on the second glass. The surface or interior of the first glass on the side of the second glass.

In a fourth aspect, the present application provides a laser butt-beam welding method configured to realize welding of a first glass and a second glass, the first glass and the second glass being stacked with a gap; the laser beam-beam welding method The welding method includes: incident a first pulsed laser light from a side of the first glass away from the second glass, and the first pulsed laser light is focused on a gap between the first glass and the second glass; the first pulsed laser is configured to generate plasma on a side of the first glass adjacent to the second glass and to melt the first glass to weld the first glass and the second glass; and A second pulsed laser is incident from the side of the second glass away from the first glass, and the second pulsed laser is focused on the gap between the first glass and the second glass; the second pulsed laser The pulsed laser is configured to generate plasma on a side of the second glass adjacent to the first glass and to melt the second glass to weld the first glass and the second glass.

Optionally, in the above-mentioned laser butt beam welding method, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through the first focusing mirror. Incident from the first glass; in the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light passes through the second focusing mirror and passes through the second glass. Incident, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the second focusing mirror to the second glass. The two incident light paths are located on the same straight line.

Optionally, in the above-mentioned laser butt beam welding method, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through the first focusing mirror. Incident from the first glass; in the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light passes through the second focusing mirror and passes through the second glass. Incident, the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser from the second focusing mirror to the second glass. The parallel or extension lines of the two incident light paths intersect.

Optionally, in the above laser butt beam welding method, the gap between the first glass and the second glass is 5 μm or less.

Optionally, in the above laser butt beam welding method, the wavelengths of the first pulsed laser and the second pulsed laser are 200 nm to 2000 nm, the pulse width is less than 12 ps, and the repetition rate is more than 1 kHz.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present application more clearly, the following drawings will briefly introduce the drawings that need to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore do not It should be regarded as a limitation of the scope, and for those of ordinary skill in the art, other related drawings can also be obtained according to these drawings without any creative effort.

1 is a schematic diagram of a welding principle of a laser butt beam welding method provided by an embodiment of the present application;

2 is a schematic diagram of a welding principle of a laser butt beam welding method provided by an embodiment of the present application;

3A and 3B are schematic diagrams of the welding principle of the laser butt beam welding method provided by the embodiment of the application;

4 is a schematic structural diagram of a laser butt beam welding device provided by an embodiment of the present application;

FIG. 5 is a schematic structural diagram of a laser butt beam welding device provided by an embodiment of the present application.

Description of reference numerals

1-fixed fixture; 2-first pulse laser; 3-second pulse laser; 4-first glass; 5-second glass; 6-laser generator; 7-beam expanding collimator; 8-first generation 9-second generator; 10-first beam expander collimator; 20-second beam expander collimator; 13-polarizing beam splitter; 14-first light guide mirror; 15-first focusing mirror ; 16 - the second light guide mirror; 18 - the second focusing mirror.

Detailed ways

In order to make the purposes, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are Some embodiments of the present application, but not all of the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.

Thus, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.

In the description of this application, it should be noted that, if the terms "upper", "lower", "inner", "outer", etc. appear, the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the drawings, or It is the orientation or positional relationship that the product of the application is usually placed in use, which is only for the convenience of describing the application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation , so it cannot be construed as a limitation on this application.

In addition, where the terms "first", "second" and the like appear, they are only used to differentiate the description, and should not be construed as indicating or implying relative importance.

It should be noted that the features in the embodiments of the present application may be combined with each other under the condition of no conflict.

At present, the traditional laser welding method needs to introduce an opaque material between the two glasses before welding. This welding method will reduce the light transmission performance of the welded product, and the introduced dissimilar materials may be due to differences in thermal expansion coefficients. It will cause the weld to be affected by thermal stress, which will lead to the failure of the weld, and it is difficult to ensure the welding quality.

The embodiment of the present application provides a laser butt beam welding device, which can directly weld two glass materials or two transparent materials, without disposing an opaque material between the two glasses, and the welding efficiency is high. And the requirements for the glass welding surface are low, the light transmission performance of the product is not affected after welding, the welding quality can be improved, and the welding of the two glasses can also be realized when there is a large gap between them, which can meet the welding requirements. Reliable requirements, good shear strength, and good sealing performance of welded products, a wide range of applications.

Referring to the drawings, this embodiment provides a laser butt beam welding device, including a laser generator 6 , a first focusing mirror 15 , a second focusing mirror 18 , a sample stage, a displacement stage not shown, and an industrial computer. The laser generator 6 is configured to generate pulsed laser light as the first pulsed laser light 2 and the second pulsed laser light 3, and the sample stage is configured to place the first glass 4 and the second glass 5 with a gap between the first glass 4 and the second glass 5. Cascading settings. The first focusing mirror 15 is arranged between the laser generator 6 and the first glass 4 , and the first focusing mirror 15 is configured so that the first pulsed laser 2 is incident on the first glass from the side of the first glass 4 away from the second glass 5 . At the gap between 4 and the second glass 5, the convergence point of the first pulsed laser 2 incident from the first glass 4 can be located at the gap, on the first glass 4, or on the second glass 5 The first pulsed laser 2 is configured to generate plasma on the side of the first glass 4 close to the second glass 5 to melt the first glass 4, or to generate plasma on the side of the second glass 5 close to the first glass 4 to The second glass 5 is melted to weld the first glass 4 and the second glass 5 . The second focusing mirror 18 is provided between the laser generator 6 and the second glass 5 , and the second focusing mirror 18 is configured so that the second pulsed laser 3 is incident on the first glass from the side of the second glass 5 away from the first glass 4 At the gap between 4 and the second glass 5, the convergence point of the second pulsed laser 3 incident from the second glass 5 can be located at the gap, on the first glass 4, or on the second glass 5 The second pulsed laser 3 is configured to generate plasma on the side of the first glass 4 close to the second glass 5 to melt the first glass 4, or to generate plasma on the side of the second glass 5 close to the first glass 4 to The second glass 5 is melted to weld the first glass 4 and the second glass 5 . Optionally, the first pulsed laser 2 and the second pulsed laser 3 in this application are respectively ultrashort pulsed lasers, and ultrashort pulsed lasers mainly refer to picosecond or femtosecond pulsed lasers with laser pulse widths less than nanoseconds, which are suitable for gaps. For welding of glass or light-transmitting materials not larger than 5 microns, the ultra-short pulse laser wavelength can be 200nm to 2000nm, the pulse width can be less than or equal to 12ps, and the repetition rate can be greater than or equal to 1kHz. By using such an ultra-short pulse laser, laser welding of glass can be realized.

It should be noted that the stacking arrangement here can either be stacked vertically, as shown in FIG. 1 , there is a gap between the first glass 4 and the second glass 5 after stacking and is approximately horizontal; When stacked in the horizontal direction, as shown in FIG. 2 , there is a gap between the first glass 4 and the second glass 5 after stacking, and the glass is approximately vertical. Of course, the stacked first glass 4 and the second glass 5 may also have a certain inclination angle relative to the horizontal direction, which is not specifically limited here. Optionally, a fixing fixture 1 is provided on the sample stage, which is configured to install and clamp the first glass 4 and the second glass 5 . The gap between the stacked first glass 4 and the second glass 5 is less than 5 microns, for example, 1 micron, 2 microns, 3 microns, or 4 microns, etc., can be welded by the laser beam welding device provided in this embodiment. The first glass 4 and the second glass 5 may be of the same material or may be of different materials. The surfaces to be welded between the first glass 4 and the second glass 5 do not need to be subjected to special optical treatment, which reduces the requirements for the quality of the glass surface, and can be directly welded without optical contact conditions.

Optionally, the first pulsed laser 2 and the second pulsed laser 3 may be generated by the same laser generator 6 , or may be generated by two laser generators 6 respectively. As shown in FIG. 4 , if the first pulsed laser 2 and the second pulsed laser 3 are generated by the same laser generator 6, a polarization beam splitter 13 is provided between the laser generator 6 and the first glass 4, that is, a polarization beam splitter 13 is provided. The beam splitter 13 is provided between the laser generator 6 and the sample stage, and the polarization beam splitter 13 is configured to divide the pulsed laser light emitted by the laser generator 6 into a first pulsed laser light 2 and a second pulsed laser light 3 . In order to adjust the beam diameter and divergence angle of the laser light emitted by the laser generator 6 to optimize the optical path structure, a beam expander collimator 7 may also be provided between the laser generator 6 and the polarization beam splitter 13 . In addition, a first light guide mirror 14 may also be provided between the polarization beam splitter 13 and the first focusing mirror 15 to adjust the incident direction of the first pulsed laser 2 , and the first focusing mirror 15 is configured to adjust the first pulsed laser 2, to maximize the energy of the first pulsed laser 2 for welding. A second light guide mirror 16 is further arranged between the polarization beam splitter 13 and the second focusing mirror 18 to adjust the incident direction of the second pulsed laser light 3 , and the second focusing mirror 18 is used to adjust the convergence of the second pulsed laser light 3 point to maximize the energy of the second pulsed laser 3 for welding. It is easy to understand that according to the relative positional relationship between the laser generator 6, the polarizing beam splitter 13, the first glass 4 and the second glass 5, the number and position of the first light guide mirror 14 and the second light guide mirror 16 can be flexibly adjusted , the number can be one or more, which is not specifically limited here.

In this way, the beam emitted by the laser generator 6 reaches the polarization beam splitter 13 after adjusting the beam diameter and divergence angle by the beam expander collimator 7, and is divided into the first pulse laser 2 and the second pulse laser 3 by the polarization beam splitter 13 , the first pulsed laser 2 passes through a first light guide mirror 14 and a first focusing mirror 15 in sequence, and is incident from the surface of the first glass 4 to form a first optical path. Further, in the first optical path, the first light guide mirror 14 is arranged at an angle of 135 degrees relative to the horizontal direction, so that the first pulsed laser 2 is reflected at the first light guide mirror 14 with a deflection angle of 90 degrees. The focusing mirror 15 is incident on the first glass 4 approximately perpendicularly. The second pulsed laser 3 passes through the two second light guide mirrors 16 and the second focusing mirror 18 in sequence, and is incident from the surface of the second glass 5 to form a second optical path. Further, in the second optical path, two second light guide mirrors 16 are arranged at intervals, and the second light guide mirror 16 (the first second light guide mirror 16 ) close to the polarization beam splitter 13 is 135 degrees relative to the horizontal direction. The angle is set so that the second pulsed laser light 3 is reflected at the first second light guide mirror 16 with a deflection angle of 90 degrees, and reaches the second second light guide mirror 16 (the second one near the second focusing mirror 18). Light guide mirror 16), the second second light guide mirror 16 is arranged at an angle of 45 degrees relative to the horizontal direction, so that the second pulsed laser 3 is reflected at the second second light guide mirror 16 with a deflection angle of 90 degrees, It is incident on the side of the second glass 5 approximately vertically through the second focusing mirror 18 .

Further, the first pulsed laser 2 is incident on the first glass 4 on the side of the first glass 4 away from the second glass 5 and the second pulsed laser 3 is incident on the side of the second glass 5 away from the first glass 4 . The directions of the second glass 5 are located on the same straight line, that is, as shown in FIG. 1 and FIG. 2 , the first incident optical path of the first pulsed laser 2 in the first optical path from the first focusing mirror 15 to the first glass 4 and the second In the optical path, the second incident optical path of the first pulsed laser 3 from the second focusing mirror 18 to the second glass 5 is located on the same straight line. That is, the converging point of the first pulsed laser light 2 and the converging point of the second pulsed laser light 3 are both located on the same straight line. In addition, the incident angle of the first pulsed laser 2 on the side of the first glass 4 can be greater than 0 degrees and less than or equal to 90 degrees, and the incident angle of the second pulsed laser 3 on the side of the second glass 5 can be greater than 0 degrees and less than or equal to 90 degrees Spend. In this embodiment, the first pulsed laser 2 is incident at an angle substantially perpendicular to the surface of the first glass 4 , and the second pulsed laser 3 is incident at an angle substantially perpendicular to the surface of the second glass 5 , which is not specifically limited here.

In addition, as shown in FIGS. 3A and 3B , the first incident optical path of the first pulsed laser 2 and the second incident optical path of the second pulsed laser 3 may not be located on the same straight line, but may be parallel to each other, or may be extended lines intersecting, The extension line crossing refers to that the extension line of the first incident light path intersects the extension line of the second incident light path. When the first incident light path and the second incident light path are parallel to each other, the converging point of the first pulsed laser light 2 and the converging point of the second pulsed laser light 3 are in a direction perpendicular to the arrangement direction of the first glass 4 and the second glass 5 When the extension lines of the first incident optical path and the second incident optical path cross each other, the converging point of the first pulsed laser 2 and the converging point of the second pulsed laser The vertical direction of the arrangement direction can be located at the same height or staggered from each other.

As shown in FIG. 5 , if the first pulsed laser 2 and the second pulsed laser 3 are generated by two laser generators, the laser generator 6 includes a first generator 8 and a second generator 9, and the first generator 8 is configured In order to generate the first pulsed laser light 2 , the second generator 9 is configured to generate the second pulsed laser light 3 . Optionally, the first generator 8 and the second generator 9 are respectively arranged on two sides of the sample stage, that is, the first generator 8 is located on the side of the first glass 4, and the second generator 9 is located on the side of the second glass 5. A first beam expander collimator 10, two first light guide mirrors 14 and a first focusing mirror 15 are arranged between the first generator 8 and the first glass 4 in sequence. The first pulse emitted by the first generator 8 The laser 2 reaches the first first light guide mirror 14 after adjusting the beam diameter and the divergence angle of the first beam expander collimator 10. The first light guide mirror 14 is arranged at an angle of 135 degrees relative to the horizontal direction, so that the first pulsed laser 2. A reflection with a deflection angle of 90 degrees occurs at the first first light guide mirror 14, and then reaches the second first light guide mirror 14. The second first light guide mirror 14 is arranged at an angle of 135 degrees relative to the horizontal direction , so that the first pulsed laser light 2 is reflected at the second first light guide mirror 14 with a deflection angle of 90 degrees, and after passing through the first focusing mirror 15 , it is incident on the side of the first glass 4 approximately vertically. A second beam expander collimator 20, two second light guide mirrors 16 and a second focusing mirror 18 are arranged between the second generator 9 and the second glass 5 in sequence. The second pulse emitted by the second generator 9 The laser 3 reaches the first second light guide mirror 16 after adjusting the beam diameter and the divergence angle of the second beam expander collimator 20. The second light guide mirror 16 is arranged at an angle of 45 degrees relative to the horizontal direction, so that the first pulsed laser 3. A reflection with a deflection angle of 90 degrees occurs at the first second light guide mirror 16, and then it is emitted to the second second light guide mirror 16, and the second second light guide mirror 16 is at an angle of 45 degrees relative to the horizontal direction. It is set so that the second pulsed laser 3 is reflected at the second second light guide mirror 16 with a deflection angle of 90 degrees, and is incident on the side of the second glass 5 approximately vertically after passing through the second focusing mirror 18 . It should be noted that, if the arrangement position of the first generator 8 is adjusted so that the first pulsed laser 2 emitted by the first generator 8 is perpendicular to the surface of the first glass 4 or incident at an actual required preset angle, then The provision of the first light guide mirror 14 may be omitted. Similarly, if the arrangement position of the second generator 9 is adjusted so that the second pulsed laser 3 emitted by the second generator 9 is perpendicular to the surface of the second glass 5 or incident at the actual required preset angle, it can be omitted. Arrangement of the second light guide mirror 16 .

Optionally, a fixing fixture 1 is provided on the sample stage, and the first glass 4 and the second glass 5 are mounted on the fixing fixture 1 . The translation stage is connected to the sample stage and configured to adjust the position of the sample stage. The industrial computer is respectively connected with the laser generator 6 and the displacement stage, and is configured to control the laser generator 6 to emit the first pulsed laser 2 and the second pulsed laser 3, control the movement of the displacement stage, and adjust the frequency and single pulse of the first pulsed laser 2. The frequency and single-pulse energy of the second pulse laser 3 and the incident angle and speed on the surface of the second glass 5 are adjusted according to the energy and the incident angle and speed on the surface of the first glass 4 to achieve automatic, fast and accurate welding.

The working principle of the laser butt beam welding device provided in the embodiment of the present application is as follows:

Taking the first glass 4 and the second glass 5 placed in a horizontal state as shown in FIG. 1 and the first incident light path and the second incident light path are on the same line as an example, the first glass 4 is the upper glass, and the second glass 5 is the lower layer. Glass. The first pulsed laser 2 is incident from the surface of the first glass 4 , the first pulsed laser 2 adopts an ultra-short pulsed laser, and the first pulsed laser 2 is focused on the side of the first glass 4 near the gap under the action of the first focusing mirror 15 On the surface or inside of the glass, it interacts with the first glass 4 nonlinearly to deposit laser energy and form a molten pool. The molten material in the molten pool will splash in the direction of the second glass 5 under the extrusion of thermal pressure and gravity, and The connection between the first glass 4 and the second glass 5 is finally achieved.

Similarly, the second pulsed laser 3 is incident from the surface of the second glass 5, which is the same as the first pulsed laser 2. The second pulsed laser 3 interacts with the second glass 5 nonlinearly to deposit laser energy and form a molten pool. The splash generated by the material of the second glass 5 realizes the welding of the first glass 4 and the second glass 5 . It is easy to understand that in the past, when two glasses were welded from one side by a laser, the molten material generated at the focal point was very limited, and the gap that could be connected was also limited. However, in this embodiment, the first pulsed laser 2 and the second pulsed laser 3 are used in opposite directions to generate more melts at their respective convergence points, which can realize welding with a larger gap and have a wider application range.

In addition, when the first incident light path and the second incident light path are not located on the same straight line but intersect with parallel or extended lines, as shown in FIG. 3A and FIG. 3B , the convergence point of the first pulsed laser 2 and the second pulsed laser 3 The convergence points are staggered in a direction perpendicular to the arrangement direction of the first glass 4 and the second glass 5 or are located at the same height. In this case, the first pulsed laser 2 is focused on the surface or inside of the first glass 4 on the side of the second glass 5 under the action of the first focusing mirror 15 , or on the second glass 5 on the side of the first glass 5 . On the surface or inside of one side of the glass 4, the second pulsed laser 3 is focused on the surface or inside of the second glass 5 on the side of the first glass 4 under the action of the second focusing mirror 18, or is focused on the first glass 4 on the surface or inside of the second glass 5 side, where the first pulsed laser 2 is focused on the surface or inside of the first glass 4 on the second glass 5 side, and the second pulsed laser 3 is focused on the second glass The case of the surface or the inside of the side close to the first glass 4 of 5 is the same as the above, so the description is omitted.

The following describes that the first pulsed laser 2 is focused on the surface or the inside of the second glass 5 on the side of the first glass 4 , and the second pulsed laser 3 is focused on the surface of the first glass 4 on the side of the second glass 5 . or internal conditions. In this case, the first pulsed laser 2 and the second glass 5 interact nonlinearly to deposit laser energy and form a molten pool, and the molten material in the molten pool will move towards the first glass 4 under the extrusion of thermal pressure and gravity Splashes are generated and the connection between the first glass 4 and the second glass 5 is finally achieved. That is to say, the first pulsed laser 2 interacts with the second glass 5 nonlinearly to generate plasma, and the plasma has strong absorption characteristics for the laser, which will have a shielding effect on the subsequent first pulsed laser 2, making it impossible to By penetrating the plasma and acting on the original focus, the acting point of the subsequent first pulsed laser 2 will be higher than the previous convergence point, which will cause the second glass 5 to be induced by the laser to generate plasma again. With the increase of the number of laser pulses, the plasma region will expand from the original convergence point to the light source direction of the first pulsed laser 2 , that is, the expansion direction of the plasma region will be from the gap side of the second glass 5 . The first glass 4 spreads in the direction of the light source of the first pulsed laser 2 . At the same time, the plasma area will transfer energy to the surrounding materials through the thermal diffusion effect, forming an external melting modification area, so that this area of the second glass 5 is melted. Under the dual action of the first pulsed laser 2 and the plasma, the The droplet-shaped double-structure action area, the lowermost end of the double-structure action area is the original converging point position of the first pulsed laser 2 . Therefore, when the ultra-short pulse laser is used to focus on the second glass 5 for welding, the laser action area always develops from the first glass 4 to the light source, and the first glass 5 is produced by protrusions or splashes generated by the second glass 5. The connection between the glass 4 and the second glass 5, that is, the action area of the first pulsed laser 2 develops from the surface of the second glass 5 near the gap to the light source of the first pulsed laser 2, so as to weld the first glass 4 and the second glass 5. The second glass 5 .

Similarly, when the second pulsed laser 3 is the same as the first pulsed laser 2, the action area of the second pulsed laser 3 is from the surface of the first glass 4 on the side of the second glass 5 to the light source of the second pulsed laser 3 Development, the welding of the first glass 4 and the second glass 5 is achieved by bulges or splashes produced by the material of the first glass 4 . It is easy to understand that in the past, when two glasses were welded from one side by a laser, the molten material generated at the focal point was very limited, and the gap that could be connected was also limited. However, in this embodiment, the first pulsed laser 2 and the second pulsed laser 3 are used in opposite directions to generate more melts at their respective convergence points, which can realize welding with a larger gap and have a wider application range.

Embodiments of the present application further provide a laser butt beam welding method, which is performed by a laser butt beam welding device and configured to realize welding of a first glass 4 and a second glass 5 that are stacked with a gap. The following steps of the laser butt-beam welding method are implemented by executing instructions or commands from the controller (not shown) of the laser-but-beam welding device:

The first pulsed laser 2 is incident from the side of the first glass 4 away from the second glass 5 , and the first pulsed laser 2 is focused on the first glass 4 or the second glass 5 ; Generate plasma on the side of the second glass 5 and melt the first glass 4 or generate plasma on the side of the second glass 5 close to the first glass 4 and melt the second glass 5 to weld the first glass 4 and the second glass 5. Two glasses 5; the second pulsed laser 3 is incident from the side of the second glass 5 away from the first glass 4, and the second pulsed laser 3 is focused on the first glass 4 or the second glass 5; the second pulsed laser 3 is configured to A glass 4 near the second glass 5 generates plasma and melts the first glass 4 or generates plasma on the side of the second glass 5 near the first glass 4 and melts the second glass 5 to weld the first glass 5 Glass 4 and second glass 5. The first pulsed laser 2 and the second pulsed laser 3 are used against each other, and the first pulsed laser 2 and the second pulsed laser 3 are ultra-short pulsed lasers, which can form more The plasma and molten material can be used to realize glass welding with a larger gap. The welding quality is reliable, and it has good shear performance and sealing performance. In addition, there is no need to introduce opaque materials, which reduces the requirements for the quality of the glass surface, and does not require optical contact conditions. The welding is more efficient, and the light transmission performance of the welded product is not affected.

Optionally, the first pulsed laser 2 is incident from the first glass 4 after passing through the first focusing mirror 15 and is focused on the first convergence point, and the second pulsed laser 3 is incident and focused from the second glass 5 after passing through the second focusing mirror 18 . At the second convergence point, the first incident light path of the first pulsed laser 2 from the first focusing mirror 15 to the first glass 4 and the second incident light path of the second pulsed laser 3 from the second focusing mirror 18 to the second glass 5 The optical paths are located on the same straight line, the first convergence point and the second convergence point are on the same straight line, the first convergence point is the intersection of the surface of the first glass 4 on the side of the gap and the above-mentioned same straight line, and the second convergence point is An intersection of the surface of the second glass 5 on the side of the gap and the same straight line described above.

In addition, the first incident light path and the second incident light path may not be on the same straight line, but parallel or intersect with each other, and the first converging point and the second converging point are in a direction perpendicular to the arrangement direction of the first glass 4 and the second glass 5 Staggered, the first convergence point is the intersection of the surface of the first glass 4 on the side of the gap and the first incident optical path or the intersection of the surface of the second glass 5 on the side of the gap and the first incident optical path, and the second convergence point is The intersection of the surface of the first glass 4 on the side of the gap and the second incident light path or the intersection of the surface of the second glass 5 on the side of the gap and the second incident light path; the first glass 4 and the second glass 5 may be the same It can also be a different material, which is not specifically limited here. Further, in this embodiment, the first pulsed laser 2 is incident perpendicular to the surface of the first glass 4, and the second pulsed laser 3 is incident perpendicular to the surface of the second glass 5, so as to give full play to the first pulsed laser 2 and the second pulsed laser 3. The energy deposited at the first convergence point and the second convergence point is more sufficient, more molten material is generated, the welding quality is improved, and the welding of the first glass 4 and the second glass 5 with a larger gap is suitable. Enhances shear and sealing properties of welded products.

The specific test examples are described as follows:

Test Example 1

The glass samples to be welded, that is, the first glass 4 and the second glass 5 are both soda lime glass, and the first glass 4 and the second glass 5 are fixed by the fixing fixture 1 so that the distance is about 2 μm, and the ultra-short pulse laser wavelength is used. It is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 0.6μJ, and the speed is 20mm/s. After testing, the welded product can withstand a push-pull force of about 20Kg, and the air tightness can reach 5×10 ^-10 Pa. m ³ /s, indicating that the sample has good shear strength and sealing performance.

Test Example 2

The glass samples to be welded, that is, the first glass 4 and the second glass 5 are both D263 borosilicate glass, and the first glass 4 and the second glass 5 are fixed by the fixing fixture 1 in a way that the distance is about 3 μm, and the ultra-short pulse laser is used. The wavelength is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 1μJ, and the speed is 24mm/s. After testing, the welded product can withstand a push-pull force of about 15Kg, and the air tightness can reach 2×10 ^-10 Pa. m ³ /s, indicating that the sample has good shear strength and sealing performance.

Test Example 3

Among the glass samples to be welded, the first glass 4 is D263 borosilicate glass, and the second glass 5 is quartz glass. The first glass 4 and the second glass 5 are fixed by the fixing jig 1 so that the distance is about 2 μm. The short pulse laser wavelength is 1030nm, the pulse width is 350fs, the repetition rate is 1MHz, the single pulse energy is 1μJ, and the speed is 12mm/s. After testing, the welded product can withstand a push-pull force of about 25Kg, and the air tightness can reach 8×10 ^{- 10} Pa.m ³ /s, indicating that the sample has good shear strength and sealing performance.

It can be seen from this that the laser butt-beam welding device and method provided in this embodiment can be applied to glass welding with a large gap, that is, less than or equal to 5 microns, which reduces the requirements for the quality of the glass surface and does not require optical contact conditions. And has good shear strength and sealing performance. There is no need to introduce opaque materials separately, which improves welding efficiency and quality, and reduces welding process requirements and welding costs.

To sum up, the embodiments of the present application provide a laser butt beam welding device and method, which have the following beneficial effects:

The laser butt welding device includes a laser generator, a first focusing mirror and a second focusing mirror. The pulsed laser emitted by the laser generator is used as the first pulsed laser and the second pulsed laser from two sides of the first glass and the second glass respectively. Opposite radiation, that is, the first pulsed laser is incident from the first glass side to the gap between the first glass and the second glass, and the second pulsed laser is incident from the second glass side to the space between the first glass and the second glass the gap. The first pulsed laser is focused on the side of the second glass close to the first glass or the side of the first glass close to the second glass under the action of the first focusing mirror, and produces nonlinear interaction with the second glass or the first glass. Plasma is generated, and the strong absorption of the laser by the plasma will produce a shielding effect on the subsequent first pulsed laser, so that it cannot penetrate the plasma and act on the original focus. As the number of laser pulses increases, the plasma region will expand from the focal point to the light source direction of the first pulsed laser. At the same time, the plasma zone transfers energy to the surrounding material through thermal diffusion effects, forming an external melt-modified zone for welding the first glass and the second glass. And, because the first pulsed laser and the second pulsed laser are opposed to each other, the second pulsed laser is focused on the side of the first glass close to the second glass or the side of the second glass close to the first glass under the action of the second focusing mirror , and produce a non-linear interaction with the first glass or the second glass to generate plasma, which will have a shielding effect on the subsequent second pulsed laser, making it unable to penetrate the plasma and act on the original focus, making the plasma The zone will exhibit a phenomenon of expanding from the focal point towards the light source of the second pulsed laser. And through the thermal diffusion effect, the energy is transferred to the surrounding material to form an external melting modification zone to weld the first glass and the second glass. The through-beam welding device has a simple structure, does not need to introduce an opaque material between the first glass and the second glass, has low optical requirements on the glass welding surface, and can realize the welding of the first glass with a large gap. Welding with the second glass to improve welding quality and efficiency.

The laser butt welding method utilizes the first pulsed laser and the second pulsed laser to be incident from the two sides of the first glass and the second glass respectively, that is to form an opposite beam, and uses the laser to generate nonlinear interaction with the glass material and generate plasma, The strong absorption of the laser by the plasma will have a shielding effect on the subsequent laser, making it impossible to penetrate the plasma and act on the original focus. As the number of laser pulses increases, the plasma region will expand from the focal point towards the laser source. At the same time, the plasma zone will transfer energy to the surrounding material through thermal diffusion effect, forming an external melting modification zone to weld the first glass and the second glass, this welding method does not need to be between the first glass and the second glass The introduction of opaque materials has lower optical requirements for the glass welding surface, which can realize the welding of the first glass and the second glass with a large gap, improve the welding quality and efficiency, and does not affect the light transmission of the welded product performance.

The above are only specific embodiments of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present application, All should be covered within the scope of protection of this application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Industrial Applicability

The present application provides a laser butt beam welding device and method, and relates to the technical field of laser welding. Through the laser irradiation, plasma is generated on the side of the two glasses near the gap to form a melt, so as to weld the two glasses and improve the welding quality and efficiency.

Claims (25)

1. A laser beam welding device, comprising a laser generator, a first focusing mirror, a second focusing mirror and a sample stage;

   the laser generator is configured to generate a pulsed laser light, the sample stage is configured to place a first glass and a second glass, the first glass and the second glass are stacked with a gap;

   The first focusing mirror is provided between the laser generator and the first glass, and the first focusing mirror is configured to use the pulsed laser generated by the laser generator as the first pulsed laser from the first The side of the glass away from the second glass is incident on the gap between the first glass and the second glass; the first pulsed laser is configured so that the second glass is close to the first glass. generating plasma on one side and melting the second glass to weld the first glass and the second glass;

   The second focusing mirror is provided between the laser generator and the second glass, and the second focusing mirror is configured to use the pulsed laser generated by the laser generator as a second pulsed laser from the second The side of the glass away from the first glass is incident on the gap between the first glass and the second glass; the second pulsed laser is configured so that the first glass is close to the second glass. One side generates plasma and melts the first glass to weld the first glass and the second glass.
2. The laser butt beam welding device according to claim 1, wherein the first incident optical path of the first pulsed laser from the first focusing mirror to the first glass and the second pulsed laser have different paths. The second incident light paths from the second focusing mirror to the second glass are located on the same straight line.
3. The laser butt beam welding device according to claim 1 or 2, further comprising a polarization beam splitter, the polarization beam splitter is arranged between the laser generator and the sample stage, and the polarization beam splitter The mirror is configured to divide the pulsed laser light generated by the laser generator into the first pulsed laser light and the second pulsed laser light, and the first pulsed laser light is configured to pass through the first focusing mirror from the first pulsed laser light. The glass is incident, and the second pulsed laser is configured to be incident from the second glass after passing through the second focusing mirror.
4. The laser butt welding apparatus of claim 1, wherein the laser generator comprises a first generator and a second generator, the first generator being configured to generate the first pulsed laser, the first generator A second generator is configured to generate the second pulsed laser light, the first pulsed laser light is configured to be incident from the first glass after passing through the first focusing mirror, and the second pulsed laser light is configured to pass through the second After focusing mirror incident from the second glass.
5. The laser butt beam welding device according to any one of claims 1 to 4, further comprising a beam expander collimator for adjusting the beam diameter and divergence angle of the pulsed laser generated by the laser generator, the The beam expander collimator is arranged downstream of the propagation direction of the pulsed laser light of the laser generator.
6. The laser butt beam welding device according to any one of claims 1 to 5, further comprising a first light guide mirror and a second light guide mirror, the first light guide mirror being arranged on the first focusing mirror On the side away from the first glass, the second light guide mirror is arranged on the side of the second focusing mirror away from the second glass.
7. The laser butt-beam welding device according to any one of claims 1 to 6, further comprising an industrial computer and a displacement stage, the displacement stage is connected to the sample stage, and the industrial computer is respectively connected to the laser A generator is connected with the displacement stage to control the laser generator and the displacement stage.
8. The laser butt-beam welding device according to any one of claims 1 to 7, wherein a fixing fixture is provided on the sample stage, and the fixing fixture fixes the first glass and the second glass.
9. The laser butt beam welding device according to claim 1, wherein,

   The first incident light path of the first pulsed laser light from the first focusing mirror to the first glass and the second incident light path of the second pulsed laser light from the second focusing mirror to the second glass Optical paths are parallel or extension lines cross.
10. The laser butt beam welding device according to claim 9, wherein,

    the first focusing mirror is configured to focus the first pulsed laser light on the surface or inside of the second glass on the side of the first glass,

    The second focusing mirror is configured to focus the second pulsed laser light on a surface or inside of the first glass on the side of the second glass.
11. A laser beam welding device, comprising a laser generator, a first focusing mirror, a second focusing mirror and a sample stage;

    the laser generator is configured to generate a pulsed laser light, the sample stage is configured to place a first glass and a second glass, the first glass and the second glass are stacked with a gap;

    The first focusing mirror is provided between the laser generator and the first glass, and the first focusing mirror is configured to use the pulsed laser generated by the laser generator as the first pulsed laser from the first The side of the glass away from the second glass is incident on the gap between the first glass and the second glass; the first pulsed laser is configured so that the first glass is close to the second glass. generating plasma on one side and melting the first glass to weld the first glass and the second glass;

    The second focusing mirror is provided between the laser generator and the second glass, and the second focusing mirror is configured to use the pulsed laser generated by the laser generator as a second pulsed laser from the second The side of the glass away from the first glass is incident on the gap between the first glass and the second glass; the second pulsed laser is configured so that the second glass is close to the first glass. One side generates plasma and melts the second glass to weld the first glass and the second glass.
12. The laser butt beam welding device according to claim 11, wherein the first incident optical path of the first pulsed laser light from the first focusing mirror to the first glass and the second pulsed laser light from the The second incident light paths from the second focusing mirror to the second glass are located on the same straight line.
13. The laser butt beam welding device according to claim 11, wherein the first incident optical path of the first pulsed laser light from the first focusing mirror to the first glass and the second pulsed laser light from the The second incident light path from the second focusing mirror to the second glass is parallel or intersecting with an extension line.
14. The laser butt beam welding device according to claim 11, wherein,

    the first focusing mirror is configured to focus the first pulsed laser light on the surface or inside of the first glass on the side of the second glass,

    The second focusing mirror is configured to focus the second pulsed laser light on a surface or inside of the second glass on the side of the first glass.
15. The laser butt beam welding device according to any one of claims 1 to 14, wherein,

    The gap between the first glass and the second glass is 5 μm or less.
16. The laser butt beam welding device according to any one of claims 1 to 15, wherein,

    The wavelengths of the first pulsed laser and the second pulsed laser are 200 nm to 2000 nm, the pulse width is 12 ps or less, and the repetition rate is 1 kHz or more.
17. A laser butt beam welding method, wherein it is configured to realize welding of a first glass and a second glass, and the first glass and the second glass are laminated with a gap; the laser butt beam welding method comprises:

    A first pulsed laser is incident from the side of the first glass away from the second glass, and the first pulsed laser is focused at the gap between the first glass and the second glass; the first pulsed laser a pulsed laser configured to generate a plasma on a side of the second glass adjacent to the first glass and to melt the second glass to weld the first glass and the second glass; and

    A second pulsed laser is incident from the side of the second glass away from the first glass, and the second pulsed laser is focused on the gap between the first glass and the second glass; the second pulsed laser The pulsed laser is configured to generate plasma on a side of the first glass adjacent to the second glass and to melt the first glass to weld the first glass and the second glass.
18. The laser butt beam welding method according to claim 17, wherein in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through a first focusing mirror then incident from the first glass;

    In the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light is incident from the second glass after passing through the second focusing mirror,

    The first incident light path of the first pulsed laser light from the first focusing mirror to the first glass and the second incident light path of the second pulsed laser light from the second focusing mirror to the second glass The optical paths are on the same straight line.
19. The laser butt beam welding method according to claim 17, wherein in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through a first focusing mirror then incident from the first glass;

    In the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light is incident from the second glass after passing through the second focusing mirror,

    The first incident light path of the first pulsed laser light from the first focusing mirror to the first glass and the second incident light path of the second pulsed laser light from the second focusing mirror to the second glass Parallel or extended lines of light paths intersect.
20. The laser butt welding method according to claim 19, wherein the first pulsed laser is focused on the surface or inside of the second glass on the side of the first glass, and the second pulsed laser is focused on The surface or interior of the first glass on the side of the second glass.
21. A laser butt beam welding method, wherein it is configured to realize welding of a first glass and a second glass, and the first glass and the second glass are laminated with a gap; the laser butt beam welding method comprises:

    A first pulsed laser is incident from the side of the first glass away from the second glass, and the first pulsed laser is focused at the gap between the first glass and the second glass; the first pulsed laser a pulsed laser configured to generate plasma on a side of the first glass adjacent to the second glass and to melt the first glass to weld the first glass and the second glass; and

    A second pulsed laser is incident from the side of the second glass away from the first glass, and the second pulsed laser is focused on the gap between the first glass and the second glass; the second pulsed laser The pulsed laser is configured to generate plasma on a side of the second glass adjacent to the first glass and to melt the second glass to weld the first glass and the second glass.
22. The laser butt beam welding method according to claim 21, wherein, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through a first focusing mirror then incident from the first glass;

    In the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light is incident from the second glass after passing through the second focusing mirror,

    The first incident light path of the first pulsed laser light from the first focusing mirror to the first glass and the second incident light path of the second pulsed laser light from the second focusing mirror to the second glass The optical paths are on the same straight line.
23. The laser butt beam welding method according to claim 21, wherein, in the step of injecting the first pulsed laser light from the side of the first glass away from the second glass, the first pulsed laser light passes through a first focusing mirror then incident from the first glass;

    In the step of injecting the second pulsed laser light from the side of the second glass away from the first glass, the second pulsed laser light is incident from the second glass after passing through the second focusing mirror,

    The first incident light path of the first pulsed laser light from the first focusing mirror to the first glass and the second incident light path of the second pulsed laser light from the second focusing mirror to the second glass Parallel or extended lines of light paths intersect.
24. The laser butt beam welding method according to any one of claims 21 to 23, wherein,

    The gap between the first glass and the second glass is 5 μm or less.
25. The laser butt beam welding method according to any one of claims 21 to 24, wherein,

    The wavelengths of the first pulsed laser and the second pulsed laser are 200 nm to 2000 nm, the pulse width is 12 ps or less, and the repetition rate is 1 kHz or more.

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