CN102909474A - Method for welding transparent material - Google Patents
Method for welding transparent material Download PDFInfo
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- CN102909474A CN102909474A CN2012104107047A CN201210410704A CN102909474A CN 102909474 A CN102909474 A CN 102909474A CN 2012104107047 A CN2012104107047 A CN 2012104107047A CN 201210410704 A CN201210410704 A CN 201210410704A CN 102909474 A CN102909474 A CN 102909474A
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Abstract
A method for welding transparent material includes: selecting two types of laser capable of transmitting the transparent material to be welded, one being ultrashort pulse laser and the other being long pulse laser, and synchronizing the two laser beams and combining the beams; stacking two blocks of transparent material to be welded; allowing the laser beams to focus on an interface of the two blocks of transparent material to be welded through an objective lens; when the energy (or power) of the ultrashort pulse laser is larger than or equal to multiphoton absorption threshold intensity, allowing occurrence of multiphoton absorption (ionization) near the focus center (of the two pulse laser beams) to generate free electrons which are seed electrons capable of absorbing the long pulse laser; and when the energy of the long pulse laser (absorbed by the seed electrons) reaches a melting threshold of the material to be welded, and allowing the material near the focus center to melt and fuse and connect together so as to achieve connecting or welding. Compared with the welding method using the ultrashort pulse laser only, the method has lowered cost and improved welding efficiency. Welding of the transparent material is achieved.
Description
Technical field
The present invention relates to the welding to material, particularly a kind of method that transparent material is welded.
Background technology
Transparent material is in optics, electronic device, biological medicine and low-light electronic mechanical system (MOEMS) field extensive application.But the connectivity problem of transparent material never is well solved, and mainly is now to utilize Chemical bonding agent or intermediate layer, and such connection can not guarantee good mechanical performance, and good heat endurance and chemical stability.
People have proposed the ultra-short pulse laser welding method recently.The ultra-short pulse laser peak power is high, can realize Multiphoton Absorbtion (ionization), be laser beam can permeable material the surface, energy-flux density at the laser spot place can meet or exceed Multiphoton Absorbtion (ionization) threshold value, material melts, if Laser Focusing is on two transparent material interfaces, with the movement of laser spot, material occurs to solidify again, realizes laser weld.But the ultra-short pulse laser cost is high, power is less, and welding efficiency is restricted, and becomes the bottleneck of practical application.
Long Pulse LASER technology maturation is applied to industrial production, but, peak power is lower, after the transparent material internal focus, be not enough to realize Multiphoton Absorbtion (ionization), can only utilize the metal impurities in the transparent material to absorb Long Pulse LASER, and metal impurities distribute and can't be effectively controlled, therefore Long Pulse LASER can not carry out effective material internal and process in the situation of not dosing absorbed layer, can only carry out material surface and process.
Summary of the invention
The invention provides a kind of method that transparent material is welded, reduced cost, improved welding efficiency, see for details hereinafter and describe:
A kind of method that transparent material is welded said method comprising the steps of:
(1) select two kinds of laser that can see through transparent material to be welded, a kind of is ultra-short pulse laser, and another kind is Long Pulse LASER, and the power of two bundle laser is complementary, and regulates behind the two bundle laser synchronizations and bundle;
(2) two blocks of transparent materials to be welded are stacked together, wherein, two blocks of transparent materials to be welded are identical or different;
(3) regulate laser optical path, so that laser focuses on the interface of two blocks of transparent materials to be welded by object lens;
(4) when ultra-short pulse laser energy (or power) during more than or equal to Multiphoton Absorbtion threshold value light intensity, Multiphoton Absorbtion (ionization) occurs near (two bundle of pulsed laser) focus center, produce free electron, i.e. seed electrons, seed electrons absorbs Long Pulse LASER;
When the energy of the Long Pulse LASER that (5) absorbs when seed electrons reached melting threshold, fusing occured and also merges near the material the focus center, and along with the movement of laser spot, the cooling of the material of fusing is solidified, and links together, and realizes connecting or welding.
Do not use absorbed layer between two blocks of transparent materials to be welded, transparent material comprises: glass, crystal or polymer, two kinds of laser transmittances are all greater than 50%.
The beneficial effect of technical scheme provided by the invention is: utilize ultra-short pulse laser at the inner Multiphoton Absorbtion (ionization) that produces of transparent material, seed electrons is provided, utilizes seed electrons just can absorb Long Pulse LASER, when reaching melting threshold, realize ionization by collision, just can realize welding.This method has reduced only uses the cost of ultra-short pulse laser, and has improved welding efficiency, has realized the welding to material internal.
Description of drawings
Fig. 1 is the laser intensity scatter chart;
Fig. 2 is the schematic diagram that the present invention adopts device;
Fig. 3 is the flow chart of a kind of method that transparent material is welded provided by the invention.
In the accompanying drawing, the list of parts of each label representative is as follows:
1: Multiphoton Absorbtion threshold value light intensity; 2: spot diameter;
3: the laser intensity distribution curve; 4: the femtosecond laser light beam;
5: object lens; 6: the first transparent material;
7: the second transparent materials; 8: the weld zone.
The specific embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, embodiment of the present invention is described further in detail below in conjunction with accompanying drawing.
In order to reduce cost, improve welding efficiency, the embodiment of the invention provides a kind of method that transparent material is welded, and referring to Fig. 1, Fig. 2 and Fig. 3, the method may further comprise the steps:
101: select two kinds of laser that can see through transparent material to be welded, a kind of is ultra-short pulse laser, and another kind is Long Pulse LASER, and the power of two bundle laser is complementary, and regulates behind the two bundle laser synchronizations and bundle;
During specific implementation, determine the power of two kinds of laser according to the material require in the practical application, it is femtosecond or picosecond level that ultra-short pulse laser is chosen pulse width usually; Long Pulse LASER is chosen any one in nanosecond, microsecond, millisecond or the continuous laser usually, and the embodiment of the invention does not limit this.
Wherein, transparent material comprises: glass, crystal and polymer, two kinds of laser are had higher transmitance, and percent of pass is usually greater than 50%.
Wherein, two kinds of pulse lasers are regulated so that laser pulse is synchronous, and also the step of bundle is conventionally known to one of skill in the art that the embodiment of the invention is not done at this and given unnecessary details.
102: two blocks of transparent materials 6 and 7 to be welded are stacked together, and wherein, two blocks of transparent materials to be welded 6 and 7 are identical or different;
103: regulate laser optical path, so that laser focuses on the interface of two blocks of transparent materials to be welded by object lens 5;
104: when light intensity corresponding to ultra-short pulse laser energy (or power) during more than or equal to Multiphoton Absorbtion threshold value light intensity 1, Multiphoton Absorbtion (ionization) occurs near the focus center of two bundle of pulsed laser, produce free electron, i.e. seed electrons, seed electrons absorbs Long Pulse LASER;
During specific implementation, when ultra-short pulse laser energy (or power) reaches (or surpassing) Multiphoton Absorbtion (ionization) threshold value, Multiphoton Absorbtion (ionization) can occur near (greater than the Multiphoton Absorbtion threshold value) subregion focus center, produces free electron in this zone.
105: when the energy of the Long Pulse LASER that absorbs when seed electrons reached the material melting threshold, fusing occured and also merges near the material the focus center, and along with the movement of laser spot, the cooling of the material of fusing is solidified, and links together, and realizes connecting or welding.
Wherein, melting threshold is set according to the material require in the practical application, and the embodiment of the invention does not limit this during specific implementation.
The below is described in detail this method with specific embodiment:
Quartz glass as transparent material 6 to be welded and 7, is at first stacked two pieces of quartz glass substrates, realize close contact.Secondly, ultra-short pulse laser employing pulse width is that 1 ~ 10000 femtosecond, repetition rate are that 0.001 ~ 100MHz, power are that 0.01 ~ 100W, wavelength are femtosecond or the picosecond laser oscillator (or amplifier) of 1040nm; Long pulse (nanosecond/microsecond/millisecond/continuous) laser (repetition rate and ultra-short pulse laser coupling, power are that 1 ~ 1000W, wavelength are 1040nm), behind the adjusting two bundle laser synchronizations and is restrainted as lasing light emitter; Making and restrainting rear laser is that 0.01 ~ 2.0 object lens 5 focus on two pieces of quartz glass (substrate) interface to be welded by numerical aperture, regulate laser energy so that reach quartz glass multiphoton absorption ionization threshold value light intensity 1 near the focus center place, produce free electron, it is seed electrons, these seed electrons absorb Long Pulse LASER, when the energy (or power) of the Long Pulse LASER that absorbs during more than or equal to the quartz glass melting threshold, the interior quartz glass in (namely reaching the Multiphoton Absorbtion threshold value) zone occurs to melt and merge near (quartz glass interface both sides) focus center, movement along with laser spot, the quartz glass of fusing is lowered the temperature rapidly, solidify, link together, realize connecting or welding.
It will be appreciated by those skilled in the art that accompanying drawing is the schematic diagram of a preferred embodiment, the invention described above embodiment sequence number does not represent the quality of embodiment just to description.
The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (2)
1. the method that transparent material is welded is characterized in that, said method comprising the steps of:
(1) select two kinds of laser that can see through transparent material to be welded, a kind of is ultra-short pulse laser, and another kind is Long Pulse LASER, and it is femtosecond or picosecond level that ultra-short pulse laser is chosen pulse width usually; Long Pulse LASER is chosen any one in nanosecond, microsecond, millisecond or the continuous laser usually, and the power of two bundle laser is complementary, and regulates behind the two bundle laser synchronizations and bundle;
(2) two blocks of transparent materials to be welded are stacked together, wherein, two blocks of transparent materials to be welded are identical or different;
(3) regulate laser optical path, so that laser focuses on the interface of two blocks of transparent materials to be welded by object lens;
(4) when ultra-short pulse laser energy or power during more than or equal to Multiphoton Absorbtion threshold value light intensity, multiphoton absorption ionization occuring near the focus center of two bundle of pulsed laser, produces free electron, i.e. seed electrons, seed electrons absorbs Long Pulse LASER;
When the energy of the Long Pulse LASER that (5) absorbs when seed electrons reached the material melting threshold, fusing occured and also merges near the material the focus center, and along with the movement of laser spot, the cooling of the material of fusing is solidified, and links together, and realizes connecting or welding.
2. a kind of method that transparent material is welded according to claim 1 is characterized in that, does not use absorbed layer between two blocks of transparent materials to be welded, and transparent material comprises: glass, crystal or polymer, two kinds of laser transmittances are all greater than 50%.
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| CN201210410704.7A CN102909474B (en) | 2012-10-24 | 2012-10-24 | Method for welding transparent material |
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| CN201210410704.7A CN102909474B (en) | 2012-10-24 | 2012-10-24 | Method for welding transparent material |
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| CN102909474B CN102909474B (en) | 2015-05-13 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360642A (en) * | 2014-11-17 | 2015-02-18 | 深圳市大族激光科技股份有限公司 | Laser cutting machine numerical control system |
| CN107199400A (en) * | 2017-07-06 | 2017-09-26 | 北京万恒镭特机电设备有限公司 | A kind of laser soldering device |
| CN107892469A (en) * | 2017-12-15 | 2018-04-10 | 华中科技大学 | A kind of multi-laser beam closes the method and equipment of beam glass for bonding material |
| CN108581188A (en) * | 2018-06-21 | 2018-09-28 | 华中科技大学 | A kind of recombination laser welds the method and device of transparent fragile material |
| CN110788486A (en) * | 2019-11-07 | 2020-02-14 | 武汉华工激光工程有限责任公司 | Systematic precision machining method for brittle transparent material special-shaped 3D structure |
| CN111153709A (en) * | 2020-01-16 | 2020-05-15 | 南京理工大学 | Method for connecting transparent ceramics by adopting ultra-narrow laser |
| CN111229733A (en) * | 2020-01-08 | 2020-06-05 | 天津大学 | Surface treatment method for fiber reinforced composite material |
| CN111302609A (en) * | 2020-02-28 | 2020-06-19 | 江苏大学 | Method and device for double-laser-beam composite welding of glass |
Families Citing this family (2)
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| CN104889565A (en) * | 2015-05-27 | 2015-09-09 | 广东高聚激光有限公司 | Laser machining method and system |
| CN108520854B (en) * | 2018-04-25 | 2020-03-31 | 哈尔滨工业大学 | Method for activating, bonding and stacking glass and other materials by utilizing ultraviolet light |
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2012
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Patent Citations (6)
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| US20020050488A1 (en) * | 2000-03-01 | 2002-05-02 | Dmitri Nikitin | Method and apparatus for thermally processing quartz using a plurality of laser beams |
| JP2005028784A (en) * | 2003-07-07 | 2005-02-03 | Hamamatsu Photonics Kk | Laser welding method |
| EP1741510A1 (en) * | 2005-06-30 | 2007-01-10 | Samsung SDI Co., Ltd. | Glass-to-glass welding method using laser; vacuum envelope manufactured by the method; electron emission display comprising such vacuum envelope |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360642A (en) * | 2014-11-17 | 2015-02-18 | 深圳市大族激光科技股份有限公司 | Laser cutting machine numerical control system |
| CN107199400A (en) * | 2017-07-06 | 2017-09-26 | 北京万恒镭特机电设备有限公司 | A kind of laser soldering device |
| CN107199400B (en) * | 2017-07-06 | 2019-07-09 | 北京中科镭特电子有限公司 | A kind of laser soldering device |
| CN107892469A (en) * | 2017-12-15 | 2018-04-10 | 华中科技大学 | A kind of multi-laser beam closes the method and equipment of beam glass for bonding material |
| CN108581188A (en) * | 2018-06-21 | 2018-09-28 | 华中科技大学 | A kind of recombination laser welds the method and device of transparent fragile material |
| CN110788486A (en) * | 2019-11-07 | 2020-02-14 | 武汉华工激光工程有限责任公司 | Systematic precision machining method for brittle transparent material special-shaped 3D structure |
| CN110788486B (en) * | 2019-11-07 | 2022-04-15 | 武汉华工激光工程有限责任公司 | Systematic precision machining method for brittle transparent material special-shaped 3D structure |
| CN111229733A (en) * | 2020-01-08 | 2020-06-05 | 天津大学 | Surface treatment method for fiber reinforced composite material |
| CN111153709A (en) * | 2020-01-16 | 2020-05-15 | 南京理工大学 | Method for connecting transparent ceramics by adopting ultra-narrow laser |
| CN111302609A (en) * | 2020-02-28 | 2020-06-19 | 江苏大学 | Method and device for double-laser-beam composite welding of glass |
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