CN112815871B - Surface shape absolute measurement system for large-caliber plane optical element - Google Patents
Surface shape absolute measurement system for large-caliber plane optical element Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The surface shape absolute measurement system of the large-caliber plane optical element comprises a pair of displacement sensors, a pose adjusting mechanism, a large-stroke linear guide rail, a large-caliber plane optical element to be measured, a rotating mechanism, an angle adjusting mechanism and an inclination angle measuring instrument, wherein the pair of displacement sensors are reversely and coaxially arranged; the controller displacement sensor moves along the large-stroke linear guide rail, and simultaneously the displacement sensor measures the distance from the displacement sensor to a measuring line on a measuring surface of the large-caliber plane optical element, wherein the three large-caliber plane optical elements to be detected are combined two by two before measurement, and then scanning measurement is sequentially carried out according to an angle line; controlling an inclination angle measuring instrument to measure the inclination angle change of the large-caliber plane optical element; and carrying out three-face cross detection surface shape separation algorithm and three-dimensional surface shape reconstruction according to the measured change of the inclination angle of the large-caliber plane optical element and the distance between the displacement sensor and the measuring line on the measuring surface of the large-caliber plane optical element, and carrying out flatness assessment on the measuring surface of the large-caliber plane optical element.
Description
Technical Field
The invention relates to the technical field of precise measurement, in particular to a large-caliber plane optical element surface shape absolute measurement system.
Background
The large-caliber plane optical element has wide application in the fields of inertial confinement fusion laser driving device ICF and the like, and the surface shape quality of the large-caliber plane optical element directly influences the performance of a high-precision optical system, so that the large-caliber plane optical element needs to be accurately measured.
At present, a Fizeau type plane interferometer is mainly adopted for surface shape measurement of a large-caliber plane optical element, a collimated light beam is divided into reference light and light to be measured by using a phase-shifting interference technology, two light beams are coherently overlapped to form an interference image, standard flat crystals are required to be used in the process of completing surface shape relative measurement, the processing difficulty of high-precision large-caliber standard flat crystals is high, the measurement precision of the Fizeau type plane interferometer based on phase-shifting interference is limited by the precision of a standard flat crystal reference surface, and meanwhile, the maximum measurement caliber of the plane optical element is directly limited by the standard flat crystal caliber.
Accordingly, the problems of the prior art are to be further improved and developed.
Disclosure of Invention
(one) object of the invention: the invention aims to provide a measuring method of a large-caliber plane optical element surface shape absolute measuring system, which can effectively enlarge the measuring caliber, does not need to use a reference surface and directly trace the measuring result to a laser wavelength standard.
(II) technical scheme: in order to solve the technical problems, the technical scheme provides a surface shape absolute measurement system of a large-caliber plane optical element, which comprises a controller, a pair of displacement sensors, a pose adjusting mechanism of the displacement sensors, a large-stroke linear guide rail, a large-caliber plane optical element to be measured, a rotating mechanism, an angle adjusting mechanism of the rotating mechanism and an inclination angle measuring instrument, wherein the controller is respectively connected with the pair of displacement sensors, the pose adjusting mechanism of the rotating mechanism, the angle adjusting mechanism of the rotating mechanism and the inclination angle measuring instrument, the rotating mechanism and the angle adjusting mechanism form a base of the large-caliber plane optical element, and the large-caliber plane optical element is fixed on the base;
the controller sends a measurement command to the displacement sensor and the large-stroke linear guide rail, the displacement sensor moves along the large-stroke linear guide rail, and simultaneously the displacement sensor measures the distance from the displacement sensor to a measurement line on a large-caliber plane optical element measurement surface; the controller sends an inclination angle measurement command to the inclination angle measuring instrument, and the inclination angle measuring instrument measures the inclination angle change of the plane optical element with large caliber; and the controller evaluates the flatness of the measuring surface of the large-caliber plane optical element according to the measured change of the inclination angle of the measuring surface of the large-caliber plane optical element and the distance between the displacement sensor and the measuring line on the measuring surface of the large-caliber plane optical element.
The large-caliber plane optical element surface shape absolute measurement system comprises a large-caliber plane optical element surface shape absolute measurement system, a large-caliber plane optical element surface shape absolute measurement system and a large-caliber plane optical element surface shape absolute measurement system, the pair of displacement sensors comprises a left displacement sensor and a right displacement sensor, and the specific implementation method of the measuring system is as follows:
step 1, the controller adjusts the left displacement sensor and the right displacement sensor to be coaxial in opposite directions;
step 2, the controller marks the measuring surface of the large-caliber plane optical element and divides the measuring line according to the angle;
step 3, the controller symmetrically places the measuring surfaces of the large-caliber plane optical element on two sides of the large-stroke linear guide rail in parallel;
step 4, the controller sequentially corresponds measuring lines of the measuring surface of the large-caliber plane optical element according to angles and rotates the measuring lines to a horizontal position;
step 5, the controller controls the inclination measuring instrument to measure the inclination change of the large-caliber plane optical element;
step 6, the controller controls the left displacement sensor and the right displacement sensor to scan and measure angle measuring lines corresponding to the large-caliber plane optical element along the large-stroke linear guide rail;
step 7, the controller calculates and eliminates the inclination component of the measuring surface;
step 8, judging whether all angle measuring lines in the measuring surface of the current large-caliber plane optical element are measured, if so, executing step 9, otherwise, returning to step 4 and continuing to execute;
step 9, judging whether all the measuring surfaces of the large-caliber plane optical element to be measured are measured, if so, executing step 10, otherwise, returning to step 3 to continue execution;
step 10, the controller evaluates the flatness of the measuring surface of the large-caliber plane optical element;
in the step 1, the controller adjusts the left displacement sensor and the right displacement sensor through a pose adjusting mechanism of the displacement sensor, so that the left displacement sensor and the right displacement sensor are in a reverse coaxial state.
The step 2 specifically includes marking the measurement surfaces of the three large-caliber plane optical elements as A, B, C, and dividing measurement lines for each measurement surface of the three large-caliber plane optical elements according to angles.
The step 3 is specifically that the controller combines the measurement surfaces A, B, C of the large-caliber planar optical elements into AB, AC and BC two by two, and then sequentially and symmetrically places the AB, AC and BC on two sides of the large-stroke linear guide rail in parallel.
The step 4 is specifically that the controller rotates the measuring surface of the large-caliber plane optical element through a rotating mechanism, sequentially corresponds measuring lines on the left measuring surface and the right measuring surface according to angles, and rotates the measuring lines to a horizontal position.
The surface shape absolute measurement system of the large-caliber plane optical element, wherein all measurement surfaces of the large-caliber plane optical element to be measured in the step 9 refer to three groups of measurement surfaces AB, AC and BC.
The system for absolute measurement of the surface shape of a large-caliber plane optical element, wherein the step 10 comprises the following steps:
step 101, the controller respectively controls measurement to acquire the surface shape data of each angle measurement line in the A, B, C measurement surface, namely, acquires the combined measurement data of each angle line scanning of AB, AC and BC, and separates A, B, C each angle surface shape by using a three-surface cross detection surface shape separation algorithm;
step 102, the controller uses the data of each angle surface shape of A, B, C in step 101 to reconstruct the three-dimensional surface shape of the large-caliber plane optical element A, B, C;
and 103, the controller respectively carries out flatness assessment on the measuring surfaces of the large-caliber plane optical elements.
The controller obtains A, B, C measurement line surface shape distribution of each angle in the measurement surface through three-surface cross-detection surface shape separation algorithm as shown in formulas (1) and (2) after eliminating the inclination component of the measurement surface in the line scanning process of the left and right displacement sensors:
(1)
(2)
wherein the method comprises the steps of，/>，/>，/>Respectively represents the angle of the measuring surface A, B, C of the large-caliber plane optical element as +.>Is the measurement line profile of>，/>，/>；/>Indicating the combined measuring surface as AB and the measuring line angle as +.>Left and right displacement sensor surface shape measurement sum, < ->、/>And so on; />Indicating the combined measuring surface as AB and the measuring line angle as +.>Is a measurement of the surface shape of the unilateral displacement sensor, < >>、/>And so on; />The variable quantity of the large-stroke linear guide rail in the measuring direction of the displacement sensor in the line scanning process is shown.
The step 102 specifically includes separating three-face-shape data of mutual inspection in the step 101, converting two-dimensional data into three-dimensional data, and completing three-dimensional face-shape reconstruction of the measuring face of the large-caliber plane optical element.
The flatness evaluation in the step 10 is to evaluate the flatness of the three-dimensional surface shape reconstruction result in the step 102 by using a minimum area method, and calculate the flatness of the measurement surface A, B, C of the large-caliber planar optical element.
(III) beneficial effects: the invention provides a large-caliber plane optical element surface shape absolute measurement system, which utilizes a reverse coaxial measurement mode to effectively enlarge the measurement caliber by means of a large-stroke linear guide rail scanning technology; the multi-angle rotation three-face mutual detection method is utilized, a reference face is not needed, uncertainty components of the reference face are prevented from being introduced, and absolute measurement of the surface shape is achieved.
Drawings
FIG. 1 is a schematic diagram of the steps of a method for implementing the absolute measurement system for the surface shape of a large-caliber planar optical element;
FIG. 2 is a schematic diagram of the left and right displacement sensors in reverse coaxial;
FIG. 3 is a schematic view of the angular division of the measuring surface of a large aperture planar optical element;
FIG. 4 is a schematic diagram of three mutually inspected surfaces of the large-caliber plane optical element after the measurement surfaces A, B, C are combined in pairs and placed on two sides of a large-stroke linear guide rail in parallel and symmetrical manner;
FIG. 5 is a schematic top view of a reverse coaxial measurement mode;
a 100-displacement sensor; 200-large aperture planar optical element; 300-large travel linear guide rail.
Detailed Description
The present invention will be described in further detail with reference to the preferred embodiments, and more details are set forth in the following description in order to provide a thorough understanding of the present invention, but it will be apparent that the present invention can be embodied in many other forms than described herein, and that those skilled in the art may make similar generalizations and deductions depending on the actual application without departing from the spirit of the present invention, and therefore should not be construed to limit the scope of the present invention in the context of this particular embodiment.
The drawings are schematic representations of embodiments of the invention, it being noted that the drawings are by way of example only and are not drawn to scale and should not be taken as limiting the true scope of the invention.
An absolute measurement system for the surface shape of a large-caliber plane optical element is used for measuring the surface shape of the large-caliber plane optical element with high precision.
The surface shape absolute measurement system of the large-caliber plane optical element comprises a controller, a pair of displacement sensors, a pose adjusting mechanism, a large-stroke linear guide rail, a large-caliber plane optical element to be measured, a rotating mechanism, an angle adjusting mechanism and an inclination angle measuring instrument, wherein the pair of displacement sensors are reversely coaxially arranged; the controller is respectively connected with the displacement sensor, the pose adjusting mechanism, the long-stroke linear guide rail, the rotating mechanism and the angle adjusting mechanism thereof and the dip angle measuring instrument. The pose adjustment mechanism and the displacement sensor may be integrally provided for adjusting the reverse co-axis of the displacement sensor, in particular for adjusting the displacement sensor angle, and for adjusting the translation of the Wei Weiyi sensor. The angle adjusting mechanism and the rotating mechanism can be integrally arranged, or the rotating mechanism and the angle adjusting mechanism form a base of the large-caliber plane optical element, and the large-caliber plane optical element is fixed on the base. The angle adjusting mechanism is used for adjusting the rotation angle of the rotating mechanism (namely controlling the rotating mechanism to rotate and adjust according to a designated angle), and in addition, the large-caliber plane optical element to be measured is translated and the surface inclination angle of the large-caliber plane optical element is adjusted. As shown in fig. 5, the displacement sensor includes a left displacement sensor and a right displacement sensor, which are two high-precision displacement sensors of the same type, and herein, the displacement sensors are exemplified as, but not limited to, displacement sensors. The left displacement sensor and the right displacement sensor are reversely and coaxially arranged on the large-stroke linear guide rail, and the measuring directions of the left displacement sensor and the right displacement sensor are respectively perpendicular to the moving direction of the large-stroke linear guide rail.
The large-stroke linear guide rail can be a large-stroke precise large-stroke linear guide rail, and the large-stroke linear guide rail is horizontally arranged. The left displacement sensor and the right displacement sensor can move in the horizontal direction along the long-stroke linear guide rail.
The two sides of the large-stroke linear guide rail are respectively provided with the rotating mechanism and the angle adjusting mechanism, or the large-caliber plane optical element comprises a base, the base is arranged at the two sides of the large-stroke linear guide rail, and the base comprises the rotating mechanism and the angle adjusting mechanism, and is not particularly limited. And the rotating mechanism and the angle adjusting mechanism are arranged on one side, close to the large-stroke linear guide rail, of the large-caliber plane optical element to be measured. The large-caliber plane optical element is a large-caliber plane optical element such as an optical flat crystal, a plane reflector and the like. The meter ruler is wound on the large-caliber plane optical element to be measured in the circumferential direction, and the large-caliber plane optical element to be measured is divided into a plurality of angle measuring lines according to angles by the length data of the meter ruler.
The inclination measuring instrument is arranged on one side of the rotating mechanism away from the large-stroke linear guide rail and points to the large-caliber plane optical element to be measured. The inclination angle measuring instrument is used for measuring inclination angle change of the measuring surface of the large-caliber plane optical element to be measured on two sides of the large-stroke linear guide rail due to rotation. The inclinometer may be an optoelectronic alignment meter, or may be other inclinometers for measuring inclination changes, and is not particularly limited herein.
A specific implementation method of a large-caliber plane optical element surface shape absolute measurement system is shown in fig. 1, and specifically comprises the following steps:
step 1, the controller adjusts the left displacement sensor and the right displacement sensor to be coaxial in opposite directions;
step 2, the controller marks the measuring surface of the large-caliber plane optical element and divides the measuring line according to the angle;
step 3, the controller symmetrically places the measuring surfaces of the large-caliber plane optical element on two sides of the large-stroke linear guide rail in parallel;
step 4, the controller sequentially corresponds measuring lines of the measuring surface of the large-caliber plane optical element according to angles and rotates the measuring lines to a horizontal position;
step 5, the controller controls the inclination measuring instrument to measure the inclination change of the large-caliber plane optical element;
step 6, the controller controls the left displacement sensor and the right displacement sensor to scan angle measuring lines corresponding to the large-caliber plane optical element along the large-stroke linear guide rail;
step 7, the controller calculates and eliminates the inclination component of the measuring surface;
step 8, judging whether all angle measuring lines in the measuring surface of the current large-caliber plane optical element are measured, if so, executing step 9, otherwise, returning to step 4 and continuing to execute;
step 9, judging whether all the measuring surfaces of the large-caliber plane optical element to be measured are measured, if so, executing step 10, otherwise, returning to step 3 to continue execution;
step 10, the controller evaluates the flatness of the measuring surface of the large-caliber plane optical element;
in the step 1, the controller adjusts the left displacement sensor and the right displacement sensor through the pose adjusting mechanism of the displacement sensor, so that the left displacement sensor and the right displacement sensor are in a reverse coaxial state, specifically, the light beams emitted by the left displacement sensor and the right displacement sensor are in a reverse coaxial state, as shown in fig. 2.
The large-caliber plane optical element comprises three large-caliber plane optical elements, and the step 2 specifically comprises the steps of respectively marking the measuring surfaces of the three large-caliber plane optical elements as A, B, C, and respectively dividing measuring lines for each measuring surface of the three large-caliber plane optical elements according to angles.
In step 3, the controller combines the measuring surfaces A, B, C of the large-caliber plane optical elements into AB, AC and BC in pairs, and then sequentially and symmetrically places the AB, AC and BC in the rotating mechanisms at two sides of the large-stroke linear guide rail in parallel.
And step 4, specifically, the controller rotates the measuring surfaces of the large-caliber plane optical element through the rotating mechanism, sequentially corresponds measuring lines on the left measuring surface and the right measuring surface according to angles, and rotates the measuring lines to a horizontal position. When only one large-caliber plane optical element surface shape needs to be measured, the measuring process can be simplified by only rotating the surface to sequentially align each angle measuring line with the horizontal position.
In the step 6, the left displacement sensor and the right displacement sensor scan the angle measuring line corresponding to the large-caliber plane optical element at the same time, and the specific operation mode is as follows: the left displacement sensor and the right displacement sensor move along the large-stroke linear guide rail, and the whole measuring line of the large-caliber plane optical element measuring surface to be measured, which is arranged on two sides of the large-stroke linear guide rail, is measured.
And in the step 9, all measuring surfaces of the large-caliber plane optical element to be measured refer to three groups of measuring surfaces AB, AC and BC.
The step 10 includes:
step 101, the controller respectively controls measurement to obtain the distribution data of each angle measurement line surface shape in A, B, C measurement surfaces, namely, obtains the combined measurement data of each angle line scanning of AB, AC and BC, and separates A, B, C each angle surface shape by using a three-surface cross detection surface shape separation algorithm, specifically, respectively obtains the distances between a displacement sensor and a surface to be measured in three groups of AB, AC and BC;
step 102, the controller uses the data of each angle surface shape of A, B, C in step 101 to reconstruct the three-dimensional surface shape of the large-caliber plane optical element A, B, C;
and 103, the controller respectively carries out flatness assessment on the measuring surfaces of the large-caliber plane optical elements.
After removing inclination components of a measuring surface in the line scanning process of the left and right displacement sensor, the controller separates out straightness errors of the measuring direction of the large-stroke linear guide rail sensor through a three-surface cross-detection surface shape separation algorithm as shown in (1) and (2), and obtains the surface shape distribution of each angle measuring line in a A, B, C measuring surface:
(1)
(2)
wherein the method comprises the steps of，/>，/>，/>Respectively represents the angle of the measuring surface A, B, C of the large-caliber plane optical element as +.>Is the measurement line profile of>，/>，/>；/>Indicating the combined measuring surface as AB and the measuring line angle as +.>Left and right displacement sensor surface shape measurement sum, < ->、/>And so on; />Indicating the combined measuring surface as AB and the measuring line angle as +.>Is a measurement of the surface shape of the unilateral displacement sensor, < >>、/>And so on; />The variable quantity of the large-stroke linear guide rail in the measuring direction of the displacement sensor in the line scanning process is shown.
The step 102 specifically includes separating the surface shape data of three mutually inspected surfaces in the step 101 by using angle information of each measuring line in the measuring surface of the large-caliber plane optical element, converting the two-dimensional data into three-dimensional data, and completing three-dimensional surface shape reconstruction of the measuring surface of the large-caliber plane optical element.
In the flatness evaluation in the step 10, the flatness of the measurement surface A, B, C of the large-caliber planar optical element is calculated by performing flatness evaluation on the three-dimensional surface shape reconstruction result in the step 92 by using a minimum area method.
The absolute measurement system for the surface shape of the large-caliber plane optical element has the following advantages:
1. according to the invention, the measuring caliber can be effectively enlarged by utilizing a reverse coaxial measuring mode and depending on a large-stroke linear guide rail scanning technology, and secondly, the surface morphology of non-smooth and different materials can be measured by replacing a high-precision sensor; in addition, the surface shape absolute measurement and the surface shape relative measurement can be carried out on the large-caliber plane optical element, and finally, the straightness error of the measuring direction of the large-stroke linear guide rail sensor can be separated, so that the accuracy requirement of the guide rail is greatly reduced;
2. the invention utilizes a multi-angle rotation three-face mutual detection method to combine the measuring faces one by one, does not need to use a high-precision reference face, can avoid introducing uncertainty components of the reference face, and directly trace the measuring result to the laser wavelength standard.
The foregoing is a description of a preferred embodiment of the invention to assist those skilled in the art in more fully understanding the invention. However, these examples are merely illustrative, and the present invention is not to be construed as being limited to the descriptions of these examples. It should be understood that, to those skilled in the art to which the present invention pertains, several simple deductions and changes can be made without departing from the inventive concept, and these should be considered as falling within the scope of the present invention.
Claims (9)
1. The surface shape absolute measurement system of the large-caliber plane optical element is characterized by comprising a controller, a pair of displacement sensors, a pose adjusting mechanism, a large-stroke linear guide rail, a large-caliber plane optical element to be measured, a rotating mechanism, an angle adjusting mechanism and an inclination measuring instrument, wherein the controller is respectively connected with the pair of displacement sensors, the pose adjusting mechanism, the large-stroke linear guide rail, the rotating mechanism, the angle adjusting mechanism and the inclination measuring instrument, the rotating mechanism and the angle adjusting mechanism form a base of the large-caliber plane optical element, and the large-caliber plane optical element is fixed on the base;
the controller sends a measurement command to the displacement sensor and the large-stroke linear guide rail, the displacement sensor moves along the large-stroke linear guide rail, and simultaneously the displacement sensor measures the distance from the displacement sensor to a measurement line on a large-caliber plane optical element measurement surface; the controller sends an inclination angle measurement command to the inclination angle measuring instrument, and the inclination angle measuring instrument measures the inclination angle change of the plane optical element with large caliber; the controller evaluates the flatness of the measuring surface of the large-caliber plane optical element according to the measured change of the inclination angle of the measuring surface of the large-caliber plane optical element and the distance between the displacement sensor and the measuring line on the measuring surface of the large-caliber plane optical element;
the pair of displacement sensors comprises a left displacement sensor and a right displacement sensor, and the specific implementation method of the measuring system is as follows: step 1, the controller adjusts the left displacement sensor and the right displacement sensor to be coaxial in opposite directions; step 2, the controller marks the measuring surface of the large-caliber plane optical element and divides the measuring line according to the angle; step 3, the controller symmetrically places the measuring surfaces of the large-caliber plane optical element on two sides of the large-stroke linear guide rail in parallel; step 4, the controller sequentially corresponds measuring lines of the measuring surface of the large-caliber plane optical element according to angles and rotates the measuring lines to a horizontal position; step 5, the controller controls the inclination measuring instrument to measure the inclination change of the large-caliber plane optical element; step 6, the controller controls the left displacement sensor and the right displacement sensor to scan and measure angle measuring lines corresponding to the large-caliber plane optical element along the large-stroke linear guide rail; step 7, the controller calculates and eliminates the inclination component of the measuring surface; step 8, judging whether all angle measuring lines in the measuring surface of the current large-caliber plane optical element are measured, if so, executing step 9, otherwise, returning to step 4 and continuing to execute; step 9, judging whether all the measuring surfaces of the large-caliber plane optical element to be measured are measured, if so, executing step 10, otherwise, returning to step 3 to continue execution; and 10, evaluating the flatness of the measuring surface of the large-caliber plane optical element by the controller.
2. The system according to claim 1, wherein in the step 1, the controller adjusts the left displacement sensor and the right displacement sensor through a pose adjusting mechanism of the displacement sensor, so that the left displacement sensor and the right displacement sensor are in a reverse coaxial state.
3. The absolute measurement system of the surface shape of the large-caliber plane optical element according to claim 1, wherein the large-caliber plane optical element comprises three large-caliber plane optical elements, and the step 2 specifically comprises the steps of respectively marking the measurement surfaces of the three large-caliber plane optical elements as A, B, C, and respectively dividing the measurement lines according to angles for each measurement surface of the three large-caliber plane optical elements.
4. The absolute measurement system of the surface shape of the large-caliber plane optical element according to claim 1, wherein in the step 3, the controller combines the measurement surfaces A, B, C of the large-caliber plane optical element into AB, AC and BC two by two, and then sequentially and symmetrically places the AB, AC and BC on two sides of the large-stroke linear guide rail in parallel.
5. The absolute measurement system of the surface shape of the large-caliber plane optical element according to claim 1, wherein the step 4 is specifically that the controller rotates the measurement surface of the large-caliber plane optical element through the rotating mechanism, sequentially corresponds the measurement lines on the left measurement surface and the right measurement surface according to angles, and rotates the measurement lines to the horizontal position.
6. The absolute measurement system of the surface shape of the large-caliber plane optical element according to claim 1, wherein all the measurement surfaces of the large-caliber plane optical element to be measured in the step 9 refer to three groups of measurement surfaces of AB, AC and BC.
7. The absolute measurement system of the surface shape of a large-caliber plane optical element according to claim 1, wherein the step 10 comprises:
step 101, the controller respectively controls measurement to acquire the surface shape data of each angle measurement line in the A, B, C measurement surface, namely, acquires the combined measurement data of each angle line scanning of AB, AC and BC, and separates A, B, C each angle surface shape by using a three-surface cross detection surface shape separation algorithm;
step 102, the controller uses the data of each angle surface shape of A, B, C in step 101 to reconstruct the three-dimensional surface shape of the large-caliber plane optical element A, B, C;
and 103, the controller respectively carries out flatness assessment on the measuring surfaces of the large-caliber plane optical elements.
8. The system for absolute measurement of surface shape of large-caliber plane optical element according to claim 7, wherein step 102 is specifically implemented by separating three mutually inspected surface shape data in step 101, converting two-dimensional data into three-dimensional data, and completing three-dimensional surface shape reconstruction of the measurement surface of the large-caliber plane optical element.
9. The system of claim 7, wherein the flatness assessment in step 10 is to calculate the flatness of the measurement surface A, B, C of the large-caliber planar optical element by performing flatness assessment on the three-dimensional surface reconstruction result in step 102 by using a minimum area method.
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| CN102735184B (en) * | 2012-06-15 | 2014-09-10 | 中国科学院光电技术研究所 | Optical surface shape detection device and detection method |
| CN109099859B (en) * | 2018-09-26 | 2021-07-27 | 中国科学院上海光学精密机械研究所 | Device and method for measuring surface defect three-dimensional morphology of large-caliber optical element |
| CN109668512B (en) * | 2018-12-21 | 2024-06-04 | 清华大学深圳研究生院 | Light beam alignment device and alignment method for symmetrically arranged laser displacement sensors |
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