CN112815871B - Surface shape absolute measurement system for large-caliber plane optical element - Google Patents
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Abstract
一种大口径平面光学元件面形绝对测量系统，包括一对位移传感器及其位姿调整机构、大行程直线导轨、待测大口径平面光学元件、旋转机构及其角度调整机构和倾角测量仪，一对位移传感器反向共轴设置；控制器位移传感器沿大行程直线导轨移动，同时位移传感器测量其距离大口径平面光学元件测量面上测量线的距离，其中测量前将三面待检测的大口径平面光学元件两两组合后，依次按角度线进行扫描测量；控制倾角测量仪测量大口径平面光学元件测量面倾角变化；根据测量的大口径平面光学元件测量面倾角变化、位移传感器距离大口径平面光学元件测量面上测量线的距离，进行三面互检面形分离算法以及三维面形的重建后对大口径平面光学元件测量面进行平面度评定。
An absolute measurement system for the surface shape of a large-caliber planar optical element, including a pair of displacement sensors and its position and posture adjustment mechanism, a large-stroke linear guide rail, a large-caliber planar optical element to be measured, a rotating mechanism and its angle adjustment mechanism, and an inclination measuring instrument. A pair of displacement sensors are arranged coaxially in reverse; the displacement sensor of the controller moves along the large-travel linear guide rail, and at the same time the displacement sensor measures the distance from the displacement sensor to the measurement line on the measurement surface of the large-caliber planar optical element. After the planar optical elements are combined in pairs, scan and measure according to the angle line in turn; control the inclination measuring instrument to measure the inclination angle change of the large-aperture planar optical element; The distance of the measurement line on the measurement surface of the optical element, the three-sided mutual inspection surface separation algorithm and the reconstruction of the three-dimensional surface shape are used to evaluate the flatness of the measurement surface of the large-aperture planar optical element.
Description
技术领域technical field
本发明涉及精密测量技术领域，更具体的说，特别涉及一种大口径平面光学元件面形绝对测量系统。The invention relates to the technical field of precision measurement, and more specifically relates to an absolute measurement system for the surface shape of a large-diameter flat optical element.
背景技术Background technique
大口径平面光学元件在惯性约束聚变激光驱动装置ICF等领域有着广泛的应用，大口径平面光学元件的面形质量直接影响高精度光学系统的性能，因此需要对其进行准确测量。Large-aperture planar optical elements are widely used in inertial confinement fusion laser driver ICF and other fields. The surface quality of large-aperture planar optical elements directly affects the performance of high-precision optical systems, so it needs to be accurately measured.
目前针对大口径平面光学元件的面形测量主要采用斐索型平面干涉仪，利用移项干涉技术将准直光束分成参考光和待测光，两束光相干叠加形成干涉图像，完成面形相对测量，测量过程中需要使用标准平晶，高精度大口径标准平晶加工难度大，基于移相干涉的斐索型平面干涉仪测量精度受制于标准平晶参考面的精度，同时标准平晶口径直接限制了平面光学元件最大测量口径。At present, the surface shape measurement of large-aperture planar optical components mainly uses Fizeau-type planar interferometers. The collimated beam is divided into reference light and light to be measured by using the transposition interference technology. The two beams are coherently superimposed to form an interference image, and the surface shape is compared. Measurement, the measurement process requires the use of standard flat crystals. It is difficult to process high-precision large-diameter standard flat crystals. It directly limits the maximum measurement aperture of the planar optical element.
因此，现有技术存在的问题，有待于进一步改进和发展。Therefore, the problems existing in the prior art need to be further improved and developed.
发明内容Contents of the invention
（一）发明目的：本发明的目的是提供一种有效扩大测量口径，不需要使用参考面，测量结果直接溯源到激光波长基准的大口径平面光学元件面形绝对测量系统的测量方法。(1) Purpose of the invention: The purpose of the invention is to provide a method for measuring the surface shape absolute measurement system of large-aperture planar optical elements that effectively expands the measurement aperture, does not need to use a reference surface, and directly traces the measurement results to the laser wavelength reference.
（二）技术方案：为了解决上述技术问题，本技术方案提供一种大口径平面光学元件面形绝对测量系统，包括控制器、一对位移传感器及其位姿调整机构、大行程直线导轨、待测大口径平面光学元件、旋转机构及其角度调整机构和倾角测量仪，所述控制器分别与所述的一对位移传感器及其位姿调整机构、所述大行程直线导轨、所述旋转机构及其角度调整机构和所述倾角测量仪连接，所述旋转机构和所述角度调整机构组成大口径平面光学元件的底座，大口径平面光学元件固定在所述底座上；(2) Technical solution: In order to solve the above technical problems, this technical solution provides an absolute measurement system for the surface shape of large-caliber planar optical elements, including a controller, a pair of displacement sensors and their pose adjustment mechanism, a large-stroke linear guide rail, and a Measuring a large-caliber planar optical element, a rotation mechanism and its angle adjustment mechanism, and an inclination measuring instrument, the controller is connected with the pair of displacement sensors and its posture adjustment mechanism, the large-stroke linear guide rail, and the rotation mechanism respectively. and its angle adjustment mechanism is connected to the inclinometer, the rotation mechanism and the angle adjustment mechanism form the base of the large-diameter planar optical element, and the large-diameter planar optical element is fixed on the base;
所述控制器向所述位移传感器和所述大行程直线导轨发出测量命令，所述位移传感器沿所述大行程直线导轨移动，同时所述位移传感器测量其距离大口径平面光学元件测量面上测量线的距离；所述控制器向所述倾角测量仪发出倾角测量命令，所述倾角测量仪测量大口径平面光学元件测量面倾角变化；所述控制器根据测量的大口径平面光学元件测量面倾角变化、所述位移传感器距离大口径平面光学元件测量面上测量线的距离，对大口径平面光学元件测量面进行平面度评定。The controller sends measurement commands to the displacement sensor and the large-stroke linear guide rail, the displacement sensor moves along the large-stroke linear guide rail, and at the same time, the displacement sensor measures the distance from the measurement surface of the large-caliber planar optical element. The distance of the line; the controller sends an inclination measurement command to the inclination measuring instrument, and the inclination measuring instrument measures the change of the inclination angle of the large-aperture planar optical element; the controller measures the inclination angle according to the measured large-aperture planar optical element Change the distance between the displacement sensor and the measuring line on the measuring surface of the large-diameter planar optical element, and evaluate the flatness of the measuring surface of the large-diameter planar optical element.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述的一对位移传感器包括左位移传感器和右位移传感器，所述测量系统具体实现方法如下：In the above-mentioned absolute measurement system for the surface shape of large-diameter planar optical elements, the pair of displacement sensors includes a left displacement sensor and a right displacement sensor, and the specific implementation method of the measurement system is as follows:
步骤1，所述控制器调整所述左位移传感器和所述右位移传感器反向共轴；Step 1, the controller adjusts the left displacement sensor and the right displacement sensor to be coaxial in opposite directions;
步骤2，所述控制器标记大口径平面光学元件测量面并按角度划分测量线；Step 2, the controller marks the measurement surface of the large-aperture planar optical element and divides the measurement line according to the angle;
步骤3，所述控制器将大口径平面光学元件测量面，平行对称放置于大行程直线导轨两侧；Step 3, the controller places the measuring surface of the large-caliber planar optical element parallel and symmetrically on both sides of the large-travel linear guide rail;
步骤4，所述控制器将大口径平面光学元件测量面的测量线，按角度依次对应，并旋转至水平位置；Step 4, the controller corresponds to the measurement lines of the measurement surface of the large-aperture planar optical element according to the angle, and rotates them to a horizontal position;
步骤5，所述控制器控制倾角测量仪测量大口径平面光学元件测量面倾角变化；Step 5, the controller controls the inclination measuring instrument to measure the inclination angle change of the large-aperture planar optical element;
步骤6，所述控制器控制所述左位移传感器、所述右位移传感器沿所述大行程直线导轨扫描测量大口径平面光学元件对应角度测量线；Step 6, the controller controls the left displacement sensor and the right displacement sensor to scan and measure the angle measurement line corresponding to the large-diameter planar optical element along the large-stroke linear guide rail;
步骤7，所述控制器计算剔除测量面倾斜分量；Step 7, the controller calculates and eliminates the tilt component of the measurement surface;
步骤8，判断当前大口径平面光学元件测量面内各角度测量线是否都完成测量，如果完成则执行步骤9，否则回到步骤4继续执行；Step 8, judging whether the measurement of each angle measurement line in the measurement plane of the current large-aperture planar optical element is completed, and if it is completed, perform step 9, otherwise return to step 4 and continue to execute;
步骤9，判断全部待测大口径平面光学元件的测量面是否都完成测量，如果完成则执行步骤10，否则回到步骤3继续执行；Step 9, judging whether the measurement of all the measurement surfaces of the large-aperture planar optical elements to be measured has been completed, and if it is completed, perform step 10, otherwise return to step 3 and continue to execute;
步骤10，所述控制器对大口径平面光学元件测量面进行平面度评定；Step 10, the controller evaluates the flatness of the measuring surface of the large aperture planar optical element;
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤1中，所述控制器通过所述位移传感器的位姿调整机构调整所述左位移传感器、所述右位移传感器，使所述左位移传感器、所述右位移传感器处于反向共轴状态。The above-mentioned system for measuring the absolute surface shape of large-diameter planar optical elements, wherein, in the step 1, the controller adjusts the left displacement sensor and the right displacement sensor through the position and posture adjustment mechanism of the displacement sensor, Make the left displacement sensor and the right displacement sensor in a reverse coaxial state.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述大口径平面光学元件包括有三块，所述步骤2具体包括将所述的三块大口径平面光学元件测量面分别标记为A、B、C，分别对三块大口径平面光学元件的每个测量面按角度划分测量线。The above-mentioned system for measuring the surface shape of a large-diameter planar optical element, wherein the large-diameter planar optical element includes three pieces, and the step 2 specifically includes marking the measurement surfaces of the three large-diameter planar optical elements as A, B, and C, respectively divide the measurement line according to the angle for each measurement surface of the three large-aperture planar optical elements.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤3具体为，所述控制器将大口径平面光学元件测量面A、B、C两两组合成AB、AC、BC，然后依次将AB、AC、BC平行对称放置于大行程直线导轨两侧。The above-mentioned system for measuring the surface shape of a large-diameter planar optical element, wherein, the step 3 is specifically, the controller combines the measuring surfaces A, B, and C of the large-diameter planar optical element into two groups AB, AC, and BC , and then place AB, AC, and BC in parallel and symmetrically on both sides of the large-travel linear guide.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤4具体为，所述控制器通过旋转机构旋转大口径平面光学元件测量面，将左右测量面上的测量线按角度依次对应起来，再将其旋转至水平位置。The above-mentioned system for measuring the surface shape of large-diameter planar optical elements, wherein the step 4 is specifically, the controller rotates the measuring surface of the large-diameter planar optical element through a rotating mechanism, and the measuring lines on the left and right measuring surfaces are divided into angles Correspond in turn, and then rotate it to the horizontal position.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤9中全部待测大口径平面光学元件的测量面，指AB、AC、BC三组测量面。The above-mentioned system for measuring the surface shape of a large-diameter planar optical element, wherein, in the step 9, the measurement surfaces of all the large-diameter planar optical elements to be measured refer to the three groups of measurement surfaces AB, AC, and BC.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤10包括：Said a large aperture planar optical element surface absolute measurement system, wherein said step 10 includes:
步骤101，所述控制器分别控制测量获取A、B、C测量面内各角度测量线面形数据，即获取AB、AC、BC各角度线扫描组合测量数据，利用三面互检面形分离算法分离出A、B、C各角度面形；Step 101, the controller separately controls the measurement to obtain the measurement line and surface shape data of each angle in the A, B, and C measurement planes, that is, obtains the combined measurement data of the line scans of the angles of AB, AC, and BC, and uses the three-plane mutual inspection surface shape separation algorithm Separate the angle surfaces of A, B, and C;
步骤102，所述控制器利用所述步骤101中的A、B、C各角度面形数据，对大口径平面光学元件A、B、C分别进行三维面形重构；Step 102, the controller uses the surface shape data of each angle of A, B, and C in the step 101 to reconstruct the three-dimensional surface shape of the large-aperture planar optical elements A, B, and C respectively;
步骤103，所述控制器对大口径平面光学元件测量面分别进行平面度评定。In step 103, the controller evaluates the flatness of the measurement surfaces of the large-aperture planar optical element respectively.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述控制器在剔除左右位移传感器线扫描过程中测量面倾斜分量后，通过三面互检面形分离算法如式(1)(2)所示，得到A、B、C测量面内各角度测量线面形分布：The above-mentioned system for measuring the surface shape absolute of a large-diameter planar optical element, wherein, after the controller eliminates the surface tilt component measured during the line scanning process of the left and right displacement sensors, the three-plane mutual detection surface shape separation algorithm is as shown in formula (1) ( As shown in 2), the shape distribution of the measurement line and surface of each angle in the measurement planes A, B, and C is obtained:
(1) (1)
(2) (2)
其中，/>，/>，/>分别表示大口径平面光学元件测量面A、B、C中角度为/>的测量线面形分布，即/>，/>，/>；/>表示组合测量面为AB，测量线角度为/>的左右位移传感器面形测量之和，/>、/>以此类推；/>表示组合测量面为AB，测量线角度为/>的单侧位移传感器面形测量结果，/>、/>等以此类推；/>表示线扫描过程中大行程直线导轨在位移传感器测量方向的变化量。in , /> , /> , /> Respectively represent the angles in the measurement planes A, B, and C of the large-aperture planar optical element as /> The measured line profile distribution, that is /> , /> , /> ;/> Indicates that the combined measuring surface is AB, and the angle of the measuring line is /> The sum of the surface shape measurements of the left and right displacement sensors, /> , /> and so on; /> Indicates that the combined measuring surface is AB, and the angle of the measuring line is /> The surface shape measurement results of the single-sided displacement sensor, /> , /> and so on; /> Indicates the amount of change of the large-travel linear guide in the measurement direction of the displacement sensor during the line scanning process.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤102具体为，将步骤101中三面互检的面形数据分离，二维数据转换成三维数据，完成大口径平面光学元件测量面三维面形重构。The above-mentioned system for measuring the surface shape of a large-diameter planar optical element, wherein the step 102 is specifically to separate the surface data of the three-plane mutual inspection in step 101, convert the two-dimensional data into three-dimensional data, and complete the large-diameter planar optical element. 3D surface shape reconstruction of component measurement surface.
所述一种大口径平面光学元件面形绝对测量系统，其中，所述步骤10中平面度评定，是用最小区域法对步骤102中三维面形重构结果做平面度评定，计算大口径平面光学元件测量面A、B、C的平面度。Said one kind of surface shape absolute measurement system of large-aperture planar optical element, wherein, said step 10 flatness evaluation is to use the minimum area method to evaluate the flatness of the three-dimensional surface shape reconstruction result in step 102, and calculate the large-aperture plane Optical elements measure the flatness of faces A, B, C.
（三）有益效果：本发明提供一种大口径平面光学元件面形绝对测量系统，利用反向共轴测量模式依靠大行程直线导轨扫描技术有效扩大测量口径；利用多角度旋转三面互检法不需要使用参考面，避免引入参考面不确定度分量，实现面形的绝对测量。(3) Beneficial effects: the present invention provides an absolute measurement system for the surface shape of large-diameter planar optical elements, which effectively expands the measurement aperture by using the reverse coaxial measurement mode and relying on the large-stroke linear guide rail scanning technology; It is necessary to use the reference surface to avoid introducing the uncertainty component of the reference surface and realize the absolute measurement of the surface shape.
附图说明Description of drawings
图1是本发明一种大口径平面光学元件面形绝对测量系统具体实现方法的步骤示意图；Fig. 1 is a schematic diagram of steps of a specific implementation method of a large-aperture planar optical element surface shape absolute measurement system of the present invention;
图2是左位移传感器和右位移传感器反向共轴示意图；Fig. 2 is a reverse coaxial schematic diagram of the left displacement sensor and the right displacement sensor;
图3是大口径平面光学元件测量面角度划分示意图；Fig. 3 is a schematic diagram of the angle division of the measurement surface of a large-aperture planar optical element;
图4是大口径平面光学元件测量面A、B、C两两组合后放置于平行对称放置于大行程直线导轨两侧的三面互检示意图；Figure 4 is a schematic diagram of the three-sided mutual inspection of the large-caliber planar optical element measuring surfaces A, B, and C, which are placed in parallel and symmetrically on both sides of the large-stroke linear guide rail after being combined in pairs;
图5是反向共轴测量模式俯视示意图；Fig. 5 is a top view schematic diagram of the reverse coaxial measurement mode;
100-位移传感器；200-大口径平面光学元件；300-大行程直线导轨。100-displacement sensor; 200-large-caliber planar optical element; 300-large-travel linear guide.
具体实施方式Detailed ways
下面结合优选的实施例对本发明做进一步详细说明，在以下的描述中阐述了更多的细节以便于充分理解本发明，但是，本发明显然能够以多种不同于此描述的其他方式来实施，本领域技术人员可以在不违背本发明内涵的情况下根据实际应用情况作类似推广、演绎，因此不应以此具体实施例的内容限制本发明的保护范围。The present invention will be described in further detail below in conjunction with preferred embodiment, set forth more details in the following description so as to fully understand the present invention, but, the present invention can obviously be implemented in a variety of other modes different from this description, Those skilled in the art can make similar promotions and deductions based on actual application situations without violating the connotation of the present invention, so the content of this specific embodiment should not limit the protection scope of the present invention.
附图是本发明的实施例的示意图，需要注意的是，此附图仅作为示例，并非是按照等比例的条件绘制的，并且不应该以此作为对本发明的实际要求保护范围构成限制。The accompanying drawings are schematic diagrams of the embodiments of the present invention. It should be noted that the accompanying drawings are only examples and are not drawn in accordance with the same scale conditions, and should not be taken as limitations on the actual scope of protection of the present invention.
一种大口径平面光学元件面形绝对测量系统，用于高精度大口径平面光学元件的面形测量。The invention relates to an absolute measurement system for the surface shape of large-caliber planar optical elements, which is used for measuring the surface shape of high-precision large-caliber planar optical elements.
所述大口径平面光学元件面形绝对测量系统包括控制器、一对位移传感器及其位姿调整机构、大行程直线导轨、待测大口径平面光学元件、旋转机构及其角度调整机构和倾角测量仪，所述的一对位移传感器反向共轴设置；所述控制器分别与所述位移传感器及其位姿调整机构、所述大行程直线导轨、所述旋转机构及其角度调整机构和所述倾角测量仪连接。所述位姿调整机构与所述位移传感器可以一体设置，用于调整所述位移传感器的反向共轴，具体的说调整所述位移传感器角度，并且调整所述卫位移传感器的平移。所述角度调整机构与所述旋转机构可以一体设置，也可以是所述旋转机构和所述角度调整机构组成大口径平面光学元件的底座，大口径平面光学元件固定在所述底座上。所述角度调整机构用于调整所述旋转机构的旋转角度（即控制旋转机构按指定角度进行旋转调整），另外还对待测的大口径平面光学元件进行平移，以及其面形倾角进行调整。如图5所示，所述位移传感器包括左位移传感器和右位移传感器，所述左位移传感器和所述右位移传感器为两个同种型号的高精度位移传感器，这里以位移传感器为例，包括但不限于位移传感器。所述左位移传感器和所述右位移传感器反向共轴安装于所述大行程直线导轨上，，所述左位移传感器和所述右位移传感器的测量方向分别垂直于所述大行程直线导轨的运动方向。The large-diameter planar optical element surface absolute measurement system includes a controller, a pair of displacement sensors and its pose adjustment mechanism, a large-stroke linear guide rail, a large-diameter planar optical element to be measured, a rotation mechanism and its angle adjustment mechanism, and an inclination measurement instrument, the pair of displacement sensors are arranged coaxially in reverse; connection to the inclinometer. The pose adjustment mechanism and the displacement sensor can be integrally arranged for adjusting the reverse coaxiality of the displacement sensor, specifically, adjusting the angle of the displacement sensor, and adjusting the translation of the displacement sensor. The angle adjustment mechanism and the rotation mechanism may be integrated, or the rotation mechanism and the angle adjustment mechanism may form a base of a large-aperture planar optical element, and the large-aperture planar optical element is fixed on the base. The angle adjustment mechanism is used to adjust the rotation angle of the rotation mechanism (that is, to control the rotation mechanism to rotate and adjust according to a specified angle), and also to translate and adjust the surface inclination angle of the large-aperture planar optical element to be measured. As shown in Figure 5, the displacement sensor includes a left displacement sensor and a right displacement sensor, and the left displacement sensor and the right displacement sensor are two high-precision displacement sensors of the same type. Here, the displacement sensor is taken as an example, including But not limited to displacement sensors. The left displacement sensor and the right displacement sensor are installed on the large-stroke linear guide rail in reverse coaxial directions, and the measurement directions of the left displacement sensor and the right displacement sensor are respectively perpendicular to the direction of the large-stroke linear guide rail. direction of motion.
所述大行程直线导轨可以是大行程精密大行程直线导轨，所述大行程直线导轨水平放置。所述左位移传感器和所述右位移传感器可以沿所述大行程直线导轨在水平方向上移动。The large-stroke linear guide rail may be a large-stroke precision large-stroke linear guide rail, and the large-stroke linear guide rail is placed horizontally. The left displacement sensor and the right displacement sensor can move in the horizontal direction along the large stroke linear guide rail.
所述大行程直线导轨的两侧分别设置所述旋转机构及其所述角度调整机构，也可以是大口径平面光学元件包括有底座，所述底座设置在所述大行程直线导轨的两侧，所述底座包括有旋转机构、角度调整机构，这里不做具体限制。所述旋转机构、所述角度调整机构靠近所述大行程直线导轨的一侧放置待测量的大口径平面光学元件。所述大口径平面光学元件为像光学平晶、平面反射镜等大口径平面光学元件。所述待测量的大口径平面光学元件圆周方向缠绕米尺，所述待测量的大口径平面光学元件通过所述米尺长度数据将所述待测量的大口径平面光学元件按角度划分为若干个各角度测量线。The two sides of the large-stroke linear guide rail are respectively provided with the rotation mechanism and the angle adjustment mechanism, and the large-caliber planar optical element may also include a base, and the base is arranged on both sides of the large-stroke linear guide rail. The base includes a rotation mechanism and an angle adjustment mechanism, which are not specifically limited here. The rotating mechanism and the angle adjusting mechanism place the large-aperture planar optical element to be measured on one side close to the large-travel linear guide rail. The large-diameter planar optical element is a large-diameter planar optical element such as an optical flat crystal or a planar mirror. The large-aperture planar optical element to be measured is wrapped around a meter stick in the circumferential direction, and the large-aperture planar optical element to be measured is divided into several according to the angle by the length data of the meter stick Measurement lines for each angle.
所述倾角测量仪设置在所述旋转机构远离所述大行程直线导轨的一侧，并且指向所述待测量的大口径平面光学元件。所述倾角测量仪用于测量，因旋转导致大行程直线导轨两侧的待测大口径平面光学元件测量面的倾角变化。所述倾角测量仪可以是光电自准值仪，也可以是其它用于测量倾角变化的倾角测量仪，这里不做具体限制。The inclinometer is arranged on the side of the rotating mechanism away from the large-travel linear guide rail, and is directed to the large-aperture planar optical element to be measured. The inclination measuring instrument is used to measure the inclination change of the measuring surface of the large-aperture planar optical element to be measured on both sides of the large-travel linear guide rail due to rotation. The inclination measuring instrument may be a photoelectric auto-calibration instrument, or other inclination measuring instruments for measuring inclination changes, and no specific limitation is made here.
一种大口径平面光学元件面形绝对测量系统的具体实现方法，如图1所示，具体包括以下步骤：A specific method for realizing the surface absolute measurement system of a large-aperture planar optical element, as shown in Figure 1, specifically includes the following steps:
步骤1，所述控制器调整所述左位移传感器和所述右位移传感器反向共轴；Step 1, the controller adjusts the left displacement sensor and the right displacement sensor to be coaxial in opposite directions;
步骤2，所述控制器标记大口径平面光学元件测量面并按角度划分测量线；Step 2, the controller marks the measurement surface of the large-aperture planar optical element and divides the measurement line according to the angle;
步骤3，所述控制器将大口径平面光学元件测量面，平行对称放置于大行程直线导轨两侧；Step 3, the controller places the measuring surface of the large-caliber planar optical element parallel and symmetrically on both sides of the large-travel linear guide rail;
步骤4，所述控制器将大口径平面光学元件测量面的测量线，按角度依次对应，并旋转至水平位置；Step 4, the controller corresponds to the measurement lines of the measurement surface of the large-aperture planar optical element according to the angle, and rotates them to a horizontal position;
步骤5，所述控制器控制倾角测量仪测量大口径平面光学元件测量面倾角变化；Step 5, the controller controls the inclination measuring instrument to measure the inclination angle change of the large-aperture planar optical element;
步骤6，所述控制器控制所述左位移传感器、所述右位移传感器沿所述大行程直线导轨扫描大口径平面光学元件对应角度测量线；Step 6, the controller controls the left displacement sensor and the right displacement sensor to scan the angle measurement line corresponding to the large-diameter planar optical element along the large-stroke linear guide rail;
步骤7，所述控制器计算剔除测量面倾斜分量；Step 7, the controller calculates and eliminates the tilt component of the measurement surface;
步骤8，判断当前大口径平面光学元件测量面内各角度测量线是否都完成测量，如果完成则执行步骤9，否则回到步骤4继续执行；Step 8, judging whether the measurement of each angle measurement line in the measurement plane of the current large-aperture planar optical element is completed, and if it is completed, perform step 9, otherwise return to step 4 and continue to execute;
步骤9，判断全部待测大口径平面光学元件的测量面是否都完成测量，如果完成则执行步骤10，否则回到步骤3继续执行；Step 9, judging whether the measurement of all the measurement surfaces of the large-aperture planar optical elements to be measured has been completed, and if it is completed, perform step 10, otherwise return to step 3 and continue to execute;
步骤10，所述控制器对大口径平面光学元件测量面进行平面度评定；Step 10, the controller evaluates the flatness of the measuring surface of the large aperture planar optical element;
所述步骤1中，所述控制器通过所述位移传感器的位姿调整机构调整所述左位移传感器、所述右位移传感器，使所述左位移传感器、所述右位移传感器处于反向共轴状态，具体说，使所述左位移传感器、所述右位移传感器发出的光束反向共轴，如图2所示。In the step 1, the controller adjusts the left displacement sensor and the right displacement sensor through the position and posture adjustment mechanism of the displacement sensor, so that the left displacement sensor and the right displacement sensor are in the opposite coaxial State, specifically, the light beams emitted by the left displacement sensor and the right displacement sensor are reversed and coaxial, as shown in FIG. 2 .
所述大口径平面光学元件包括有三块，所述步骤2具体包括将所述的三块大口径平面光学元件测量面分别标记为A、B、C，分别对三块大口径平面光学元件的每个测量面按角度划分测量线。The large-aperture planar optical element includes three pieces, and the step 2 specifically includes marking the measurement surfaces of the three large-aperture planar optical elements as A, B, and C, respectively, and each of the three large-aperture planar optical elements A measurement surface divides the measurement line by angle.
所述步骤3具体为，所述控制器将大口径平面光学元件测量面A、B、C两两组合成AB、AC、BC，然后依次将AB、AC、BC平行对称放置于大行程直线导轨两侧的旋转机构内。The specific step 3 is that the controller combines the measuring surfaces A, B, and C of the large-diameter planar optical element into AB, AC, and BC, and then sequentially places AB, AC, and BC on the large-stroke linear guide rail in parallel and symmetrically. Inside the rotating mechanism on both sides.
所述步骤4具体为，所述控制器通过旋转机构旋转大口径平面光学元件测量面，将左右测量面上的测量线按角度依次对应起来，再将其旋转至水平位置。当仅有一个大口径平面光学元件面形需要测量，可仅旋转此面依次将其各角度测量线与水平位置对齐的方式简化测量过程。The step 4 specifically includes that the controller rotates the measuring surface of the large-aperture planar optical element through the rotating mechanism, corresponds the measuring lines on the left and right measuring surfaces according to angles, and then rotates them to a horizontal position. When there is only one surface shape of a large-aperture flat optical element to be measured, the measurement process can be simplified by only rotating the surface and aligning the measurement lines of each angle with the horizontal position in sequence.
所述步骤6中所述左位移传感器、所述右位移传感器同时扫描大口径平面光学元件对应角度测量线，具体操作方式为：所述左位移传感器、所述右位移传感器沿所述大行程直线导轨移动，测量放置于大行程直线导轨两侧的待测量的大口径平面光学元件测量面的整条测量线。In the step 6, the left displacement sensor and the right displacement sensor scan the angle measurement line corresponding to the large-caliber planar optical element at the same time, and the specific operation method is: the left displacement sensor and the right displacement sensor move along the large stroke straight line The guide rail moves to measure the entire measurement line of the large-aperture planar optical element measurement surface placed on both sides of the large-travel linear guide rail.
所述步骤9中全部待测大口径平面光学元件的测量面，指AB、AC、BC三组测量面。The measurement surfaces of all the large-aperture planar optical elements to be measured in the step 9 refer to three groups of measurement surfaces AB, AC, and BC.
所述步骤10包括：Described step 10 comprises:
步骤101，所述控制器分别控制测量获取A、B、C测量面内各角度测量线面形分布数据，即获取AB、AC、BC各角度线扫描组合测量数据，利用三面互检面形分离算法分离出A、B、C各角度面形，具体说，是分别获得AB、AC、BC三组测量面中位移传感器与待测面的距离；Step 101, the controller separately controls the measurement to obtain the measurement line surface shape distribution data of each angle in the A, B, and C measurement planes, that is, obtains the combined measurement data of the line scans of the angles of AB, AC, and BC, and uses the three-plane mutual inspection surface shape separation The algorithm separates the surface shapes of angles A, B, and C. Specifically, the distances between the displacement sensor and the surface to be measured in the three groups of measuring surfaces AB, AC, and BC are respectively obtained;
步骤102，所述控制器利用所述步骤101中的A、B、C各角度面形数据，对大口径平面光学元件A、B、C分别进行三维面形重构；Step 102, the controller uses the surface shape data of each angle of A, B, and C in the step 101 to reconstruct the three-dimensional surface shape of the large-aperture planar optical elements A, B, and C respectively;
步骤103，所述控制器对大口径平面光学元件测量面分别进行平面度评定。In step 103, the controller evaluates the flatness of the measurement surfaces of the large-aperture planar optical element respectively.
所述控制器在剔除左右位移传感器线扫描过程中测量面倾斜分量后，通过三面互检面形分离算法如式(1)(2)所示，分离出大行程直线导轨传感器测量方向的直线度误差，得到A、B、C测量面内各角度测量线面形分布：After the controller eliminates the measurement surface inclination component during the line scanning process of the left and right displacement sensors, the straightness of the measurement direction of the large stroke linear guide sensor is separated through the three-surface mutual inspection surface shape separation algorithm as shown in formula (1) (2). Error, get A, B, C measuring line surface shape distribution of each angle in the measuring plane:
(1) (1)
(2) (2)
其中，/>，/>，/>分别表示大口径平面光学元件测量面A、B、C中角度为/>的测量线面形分布，即/>，/>，/>；/>表示组合测量面为AB，测量线角度为/>的左右位移传感器面形测量之和，/>、/>以此类推；/>表示组合测量面为AB，测量线角度为/>的单侧位移传感器面形测量结果，/>、/>等以此类推；/>表示线扫描过程中大行程直线导轨在位移传感器测量方向的变化量。in , /> , /> , /> Respectively represent the angles in the measurement planes A, B, and C of the large-aperture planar optical element as /> The measured line profile distribution, that is /> , /> , /> ;/> Indicates that the combined measurement plane is AB, and the angle of the measurement line is /> The sum of the surface shape measurements of the left and right displacement sensors, /> , /> and so on; /> Indicates that the combined measurement plane is AB, and the angle of the measurement line is /> The surface shape measurement results of the single-sided displacement sensor, /> , /> and so on; /> Indicates the amount of change of the large-travel linear guide in the measurement direction of the displacement sensor during the line scanning process.
所述步骤102具体为，利用大口径平面光学元件测量面内各测量线角度信息，即将步骤101中三面互检的面形数据分离，二维数据转换成三维数据，完成大口径平面光学元件测量面三维面形重构。The step 102 is specifically to use the large-aperture planar optical element to measure the angle information of each measurement line in the plane, that is, to separate the surface shape data of the three-plane mutual inspection in step 101, convert the two-dimensional data into three-dimensional data, and complete the measurement of the large-aperture planar optical element Surface 3D surface reconstruction.
所述步骤10中平面度评定，是用最小区域法对步骤92中三维面形重构结果做平面度评定，计算大口径平面光学元件测量面A、B、C的平面度。The evaluation of flatness in step 10 is to use the minimum area method to evaluate the flatness of the three-dimensional surface reconstruction results in step 92, and calculate the flatness of the measurement surfaces A, B, and C of the large-aperture planar optical element.
一种大口径平面光学元件面形绝对测量系统具有以下优势：A large-aperture planar optical element surface absolute measurement system has the following advantages:
1、本发明利用反向共轴测量模式依靠大行程直线导轨扫描技术能够有效扩大测量口径，其次通过更换高精度传感器能够测量非光滑、不同材质的表面形貌；另外不仅能对大口径平面光学元件进行面形绝对测量，还能进行面形相对测量，最后能够分离出大行程直线导轨传感器测量方向的直线度误差，大幅降低导轨的精度要求；1. The present invention uses the reverse coaxial measurement mode to rely on the large-stroke linear guide rail scanning technology to effectively expand the measurement aperture. Secondly, it can measure the surface topography of non-smooth and different materials by replacing the high-precision sensor; The component can perform absolute surface shape measurement, and can also perform surface shape relative measurement. Finally, the straightness error in the measurement direction of the large-stroke linear guide sensor can be separated, which greatly reduces the accuracy requirements of the guide rail;
2、本发明利用多角度旋转三面互检法，先将测量面两两组合再一一分离，不需要使用高精度参考面，能够避免引入参考面不确定度分量，测量结果直接溯源到激光波长基准。2. The present invention utilizes the method of multi-angle rotation and three-surface mutual inspection, firstly combining the measurement surfaces in pairs and then separating them one by one, without using a high-precision reference surface, which can avoid introducing the uncertainty component of the reference surface, and the measurement results can be directly traced to the laser wavelength benchmark.
以上内容是对本发明创造的优选的实施例的说明，可以帮助本领域技术人员更充分地理解本发明创造的技术方案。但是，这些实施例仅仅是举例说明，不能认定本发明创造的具体实施方式仅限于这些实施例的说明。对本发明创造所属技术领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出若干简单推演和变换，都应当视为属于本发明创造的保护范围。The above content is a description of the preferred embodiments of the present invention, which can help those skilled in the art to more fully understand the technical solution of the present invention. However, these Examples are only illustrations, and it cannot be considered that the specific embodiment of the present invention is limited to the description of these Examples. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, they can also make some simple deduction and transformation, which should be regarded as belonging to the protection scope of the present invention.
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