CN112763944B - Disc-shaped probe type magnetic field sensor based on 3D printing technology and manufacturing method thereof - Google Patents
Disc-shaped probe type magnetic field sensor based on 3D printing technology and manufacturing method thereof Download PDFInfo
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0047—Housings or packaging of magnetic sensors ; Holders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The invention relates to a disk-shaped probe type magnetic field sensor based on a 3D printing technology and a manufacturing method thereof, and belongs to the field of weak magnetic field sensors. The invention adopts a two-photon femtosecond laser direct writing technology, establishes a 3D printing model according to the refractive index of a material and the geometric shape of a disc-shaped waveguide structure, fixes a glass capillary tube after the plane disc-shaped waveguide structure is printed, controls a micro-fluidic pump to inject a magnetic fluid material into the glass capillary tube through a hollow optical fiber, extracts the glass capillary tube after the magnetic fluid material is filled in the glass capillary tube, and seals the magnetic fluid injection end of the glass capillary tube by a glass plate, thus forming the completely packaged disc-shaped microstructure probe type magnetic field sensor. Compared with the existing magnetic field sensor, the disc-shaped microstructure probe type magnetic field sensor and the manufacturing method thereof provided by the invention have the advantages of easiness in operation, high speed, high precision, high success rate and the like, and have good application prospects in the field of magnetic field measurement.
Description
Technical Field
The invention relates to the field of weak magnetic field sensors, in particular to a disk-shaped probe type magnetic field sensor based on a 3D printing technology and a manufacturing method thereof.
Background
In the 21 st century of advanced scientific and technological development, in order to better evaluate the external environment and living conditions, people have higher and higher requirements on the precision, stability and portability of measuring equipment, and various micro-integrated electrical measuring systems are widely applied along with the improvement of semiconductor processing technology, but in actual measurement, the micro-electrical measuring systems are greatly influenced by environmental noise such as temperature, humidity, magnetic fields and the like and have poor stability, so that a sensing device prepared by a planar microstructure waveguide according to the evanescent wave effect of light is favored by people due to the advantages of strong anti-interference capability, high precision and the like.
The planar microstructure waveguide has the characteristics of easy molding, miniaturization, high stability and the like, and is widely applied to various sensing devices, such as an optical fiber temperature sensor, an optical fiber humidity sensor, an optical fiber stress sensor and the like.
The traditional magnetic field measuring equipment is difficult to be used for high-precision weak magnetic field measurement due to the defects of large volume, complex use, poor stability and the like, and is different from the traditional magnetic field measuring equipment.
Disclosure of Invention
Compared with the existing magnetic field sensor, the manufactured disc-shaped micro-structure weak magnetic field sensor has the advantages of easiness in operation, high speed, high precision, high success rate and the like, and has a good application prospect in the field of magnetic field measurement.
In order to achieve the purpose, the invention adopts the following technical scheme:
one of the purposes of the invention is to provide a disc-shaped probe type magnetic field sensor based on 3D printing technology, which comprises a single-mode optical fiber, a Y waveguide, a disc-shaped waveguide structure and a glass capillary;
the cross section of the disc-shaped waveguide structure is an outer single curved surface and an inner single curved surface which are adjacent and complementary, and a waveguide is arranged at the center of the interface of the two single curved surfaces; the inner part of the outer single curved surface is a hollow area, and the inner part of the inner single curved surface is a nano material area;
one end of the glass capillary is sleeved on the single-mode optical fiber, one end of the single-mode optical fiber is positioned in the glass capillary, and the other end of the single-mode optical fiber is a free end; the single-mode fiber core positioned in the glass capillary is connected with one side port of the Y waveguide, and two ports on the other side of the Y waveguide are respectively coupled with the waveguides at two ports of the disc-shaped waveguide structure; the Y waveguide and the disc-shaped waveguide structure are packaged in the glass capillary, and the glass capillary is filled with a magnetic fluid material.
Another object of the present invention is to provide a method for manufacturing the above disk-shaped probe type magnetic field sensor, comprising the steps of:
1) selecting a polymer material according to design requirements and the material of the glass substrate;
2) printing a glass substrate as a substrate for 3D printing to obtain a preliminary disc-shaped waveguide structure on the substrate according to the established 3D printing model of the disc-shaped waveguide structure;
3) connecting one end of a hollow optical fiber with a micro-fluidic pump, sealing an interface, fixing the other end of the hollow optical fiber on a glass substrate, pouring cleaning liquid into the interior and the surface of the printed disc-shaped waveguide structure through the micro-fluidic pump, and cleaning inner and outer residue particles;
4) sealing the two glue sealing boxes in the disc-shaped waveguide structure by using a UV adhesive to prepare the disc-shaped waveguide structure;
5) coupling a glass substrate printed with a disc-shaped waveguide structure and a Y waveguide with a fiber core of a single-mode optical fiber, fixing one end of the glass substrate with the end face of the single-mode optical fiber, and fixing a coupling fixing interface by using a UV adhesive;
6) fixing one end of a hollow optical fiber in a needle head of an injector by using a UV adhesive, pumping a magnetic fluid material into the injector, fixing the injector filled with the magnetic fluid material on a three-axis electric control displacement table, and pouring the magnetic fluid material into a glass capillary tube through the hollow optical fiber; in the process of filling, the position of the needle head is controlled by a three-axis electric control displacement table, so that the injection end of the hollow optical fiber is aligned to the glass capillary tube and does not touch the disc-shaped waveguide structure;
7) after the magnetofluid material is filled, the injection end of the hollow optical fiber is slowly drawn away from the glass capillary tube, the glass capillary tube is sealed by a packaging glass plate and is fixed by a UV adhesive, and the disc-shaped probe type magnetic field sensor is obtained.
Compared with the prior art, the invention has the beneficial effects that:
1) the invention provides a disc-shaped probe type magnetic field sensor, which adopts a waveguide structure that an inner core of a disc-shaped structure is provided with a hollow core area and a nano material area which are asymmetric materials, when the magnetic field around the sensor changes, the refractive index of magnetic fluid in a single-curved-surface rectangular area at the inner side changes, and the change of the magnetic field can be solved by measuring the spectrum change through the sagnac effect, so that the change of the external magnetic field is measured;
2) the waveguide structure adopts a double-helix structure, and the forward light beam and the backward light beam are respectively transmitted along respective transmission directions and then transmitted in the reverse direction when transmitted, so that the error of the traditional sensor based on the sagnac effect, which is caused by the sensitivity to the angular velocity, is eliminated, the volume of the device is reduced, and the measurement precision and the stability are improved, and the volume of the device is also reduced.
3) The invention encapsulates the disc-shaped waveguide structure through the glass capillary, so that the measurement process is easier to operate, and the invention has good application prospect in the field of magnetic field measurement.
Drawings
FIG. 1 is a diagram illustrating an overall structure of a disk waveguide structure coupled with a Y-waveguide;
FIG. 2 shows a top view of a slab waveguide structure;
FIG. 3 shows a block diagram of a slab waveguide structure;
FIG. 4 shows a schematic cross-sectional view of the right-hand spiral of a slab waveguide structure;
FIG. 5 is a schematic view showing the internal structure of a disk-shaped probe-type magnetic field sensor after packaging is completed;
FIG. 6 is a schematic view of a disk probe type magnetic field sensor after packaging is complete;
in the figure, 1 disc probe type magnetic field sensor, 11 single mode fiber, 12 single mode fiber core, 13 glass capillary, 14 packaging glass plate, 15 glass capillary inner space, 16 glass substrate 2 disc waveguide structure, 21 outer single-curved rectangle, 22 inner single-curved rectangle, 23 cylindrical waveguide, 24 hollow area, 25 nano material area, 26 right side glue sealing box, 27 left side glue sealing box, 28 groove, 3Y waveguide.
Detailed Description
The invention is further illustrated with reference to the following figures and examples. The technical features of the embodiments of the present invention can be combined correspondingly without mutual conflict.
The invention adopts a two-photon femtosecond laser direct writing technology, establishes a 3D printing model of a plane disc-shaped waveguide structure according to the refractive index of a material and the geometric shape of the disc-shaped waveguide structure, fixes the printed model in a glass capillary tube after printing, controls a micro-fluidic pump to inject a magnetic fluid material into the glass capillary tube through a hollow optical fiber, extracts the glass capillary tube after the magnetic fluid material is filled in the glass capillary tube, and seals the magnetic fluid injection end of the glass capillary tube by a glass plate, thus forming the completely packaged disc-shaped microstructure probe type magnetic field sensor. Compared with the existing magnetic field sensor, the disc-shaped microstructure probe type magnetic field sensor and the manufacturing method thereof provided by the invention have the advantages of easiness in operation, high speed, high precision, high success rate and the like, and have good application prospects in the field of magnetic field measurement.
As shown in fig. 5, the disk-shaped probe type magnetic field sensor based on the 3D printing technology mainly includes a single-mode optical fiber 11, a Y waveguide 3, a disk-shaped waveguide structure 2, and a glass capillary 13; the Y waveguide 3, the disc-shaped waveguide structure 2 and the single-mode optical fiber core 12 connected with the Y waveguide are fixed through a support. One end of the glass capillary 13 sleeved on the single-mode optical fiber 11 is sealed by a UV adhesive, and the other end of the glass capillary 13 far away from the single-mode optical fiber 11 is sealed by a packaging glass plate 14. The Y waveguide 3, the disc-shaped waveguide structure 2 and the single-mode optical fiber core 12 connected with the Y waveguide are all fixed on a glass substrate 16.
The cross section of the disc-shaped waveguide structure 2 is an outer single curved surface and an inner single curved surface which are adjacent and complementary, the inner single curved surface is a convex surface, the outer single curved surface is a concave surface, and a waveguide is arranged at the center of the interface of the two single curved surfaces; the inside of the outer single curved surface is a hollow area 24, and the inside of the inner single curved surface is a nano material area 25;
one end of the glass capillary 13 is sleeved on the single-mode optical fiber 11, one end of the single-mode optical fiber 11 is positioned inside the glass capillary 13, and the other end of the single-mode optical fiber 11 is a free end; a single-mode optical fiber core 12 positioned in the glass capillary 13 is connected with a port on one side of the Y waveguide 3, as shown in fig. 1, two ports on the other side of the Y waveguide 3 are respectively coupled with waveguides at two ports of the disc-shaped waveguide structure 2; the Y waveguide 3 and the disc-shaped waveguide structure 2 are packaged in the glass capillary 13, the internal space 15 of the glass capillary is filled with magnetic fluid materials, and the packaged structure is shown in FIG. 6.
As shown in fig. 4, the curvature center of the inner single-curved surface is located outside the cross section of the disc-shaped waveguide structure, and when the region is used as a nano material region, the arc-shaped structure can counteract the pressure of the nano material on the wall, thereby increasing the durability and reliability of the structure. The waveguide is a cylindrical waveguide 23, and the coupling input and output ports of the cylindrical waveguide 23 are IO respectively1And IO2Half of the cylindrical waveguide is exposed in the void region 24 and the other half is exposed in the nanomaterial region 25; the hollow core region 24 is isolated from the nanomaterial region 25, and nanomaterial does not flow into the hollow core region.
In one embodiment of the invention, the side walls of the slab waveguide structure 2 are provided with grooves 28, said grooves communicating with the nanomaterial region 25. On one hand, the groove can facilitate the cleaning of the disc-shaped waveguide structure after the disc-shaped waveguide structure 2 is printed; on the other hand, the slot enables the ferrofluid material inside the glass capillary to be poured into the nanomaterial region, leaving half of the cylindrical waveguide 23 exposed to the ferrofluid material.
In a specific implementation of the present invention, two ports of the disc-shaped waveguide structure 2 are provided with a sealant box, as shown in fig. 3, which is a left sealant box 27 and a left sealant box 26, respectively, and the sealant box is communicated with the hollow core region 24 for facilitating sealant sealing of the hollow core region 24 after cleaning is completed, and if the sealant box is not designed, when sealant sealing is performed on the hollow core region, a sealant region is too small to increase a processing difficulty.
In one embodiment of the present invention, as shown in fig. 2, the disc-shaped waveguide structure 2 is formed by integrally connecting a series of semi-arc units with linear radius, and the center of the disc-shaped waveguide structure 2 is provided with two semi-arc units C with equal radius r1Semi-circular arc unit C2Two semicircular arc units C1And C2Tangent and opposite opening direction.
By semi-circular arc unit C1Arc center O of1As the center of circle, there are m concentric semi-circular arc units with radius R from inside to outsideiR + (i-1) × (d + l) (i ═ 1, …, m), direction of opening and C1Same, r is a semicircular arc unit C1The radius of (a);
by semi-circular arc unit C2Arc center O of2As the center of circle, there are m concentric semi-circular arc units with radius R from inside to outsideiR + (i-1) × (d + l) (i ═ 1, …, m), direction of opening and C2The same;
with O1M concentric semi-circular arc units as circle center and O2The m concentric semi-circular arc units which are the circle centers are connected pairwise to form the whole disc-shaped waveguide structure 2, the two semi-circular arc units which are positioned at the outermost periphery form two ports, and the opening directions of the two ports are consistent; wherein d is the width of the semi-circular arc unit, and l is the distance between two adjacent sections of the semi-circular arc units.
In order to facilitate the connection of the disc waveguide structure with the double-Y branch structure, the opening directions of the two ports of the disc waveguide structure 2 are set to be the same, and the half-arc unit port (IO) at the outermost periphery of one of the ports can be used1Or IO2) Bending 180 degrees to obtain the structure shown in fig. 2.
In one specific implementation of the invention, a two-photon femtosecond laser direct writing technology is adopted to 3D print a disc-shaped waveguide structure in a hollow optical fiber, and packaging is completed under a microscope and a three-axis displacement platform, and the specific process steps are as follows:
1. the 3D printing process of the disc-shaped waveguide structure 2 comprises the following steps:
(1) printing a glass substrate as a substrate for 3D printing to obtain a primary disc-shaped waveguide structure 2 on the substrate according to the established disc-shaped waveguide structure 3D printing model;
(2) connecting one end of a hollow optical fiber with a micro-fluidic pump, sealing an interface, fixing the other end of the hollow optical fiber on a glass substrate, pouring cleaning liquid into the interior and the surface of the printed disc-shaped structure through the micro-fluidic pump, and cleaning inner and outer residue particles;
(3) the disc-like structure left and right glue- sealing boxes 27, 26 are sealed with UV adhesive.
2. The packaging process of the disc-shaped waveguide structure 2 comprises the following steps:
(1) after the disc-shaped waveguide structure 2 is printed by the 3D printing technology, the waveguide sheet printed with the disc-shaped waveguide structure 2 is fixedly coupled with the single-mode optical fiber 11,
(2) placing the waveguide sheet printed with the disc-shaped waveguide structure 2 at the center of the glass capillary 13, and fixing an interface by using a UV adhesive;
(3) fixing one end of a hollow optical fiber in a needle head of an injector by using a UV adhesive, pumping magnetic fluid into the injector, and pouring the magnetic fluid into the glass capillary tube through the hollow optical fiber;
(4) fixing the injector with the magnetic fluid on a three-axis displacement electric control platform, and controlling the position of the needle head through microscope observation and the three-axis electric control displacement platform, so that the injection end of the hollow optical fiber is aligned to the glass capillary 13 and does not contact the disc-shaped waveguide structure 2;
(5) controlling the injector to inject the magnetic fluid, and after the injection is finished, slowly pumping the injection end of the hollow optical fiber out of the glass capillary tube 13 through microscope observation and a three-axis electric control displacement platform, and paying attention not to touch the disc-shaped waveguide structure 2;
(6) packaging the glass capillary tube by using a packaging glass plate, and fixing by using a UV adhesive;
after the encapsulation is completed, the glass capillary 13 is filled with the magnetic fluid material, and the magnetic fluid material enters the nano material region 25 through the cleaning tank 28 of the disc-shaped waveguide structure 2, so that the cylindrical waveguide 23 is exposed in the magnetic fluid material.
In a typical example, the photosensitive polymer material is IP-DIP material two-photon femtosecond laser direct writing base material of Nanoscib company, and YIG (yttrium iron garnet) nano-particles are mixed into the IP-DIP polymer to prepare magnetic fluid material.
The measuring principle of the disc-shaped probe type magnetic field sensor provided by the invention is as follows:
in the disc-shaped waveguide structure inner core, one side of a cylindrical waveguide is exposed in a nano material area, the other side of the cylindrical waveguide is exposed in a hollow core area, the hollow core area considers that the medium of the cylindrical waveguide is air, light propagating along the forward direction propagates in the cylindrical waveguide exposed in the nano material area, light propagating along the reverse direction propagates in the cylindrical waveguide exposed in the hollow core area, when an external magnetic field changes, the refractive index of the nano material area solidified with the magnetic fluid material changes, and due to evanescent wave effect of the light, when the forward and reverse beams of light propagate in the disc-shaped waveguide structure, a phase difference can be generated
And sampling and analyzing the dryness signals of the two beams of light at the photoelectric sensor end, and solving the change size of the magnetic field.
The foregoing lists merely illustrate specific embodiments of the invention. It is obvious that the invention is not limited to the above embodiments, but that many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the present invention are to be considered within the scope of the invention.
Claims (8)
1. A disc-shaped probe type magnetic field sensor based on a 3D printing technology is characterized by comprising a single-mode optical fiber (11), a Y waveguide (3), a disc-shaped waveguide structure (2) and a glass capillary tube (13); the disc-shaped waveguide structure is obtained by 3D printing through a two-photon femtosecond laser direct writing technology;
the cross section of the disc-shaped waveguide structure (2) is an outer single curved surface and an inner single curved surface which are adjacent and complementary, and a waveguide is arranged at the center of the interface of the two single curved surfaces; the inner part of the outer single curved surface is a hollow area (24), and the inner part of the inner single curved surface is a nano material area (25); a groove (28) is formed in the side wall of the disc-shaped waveguide structure (2), and the groove is communicated with the nano material region (25); the waveguide is a cylindrical waveguide (23), one half of the cylindrical waveguide is exposed in the hollow core region (24), and the other half of the cylindrical waveguide is exposed in the nano material region (25); the hollow core area (24) is isolated from the nano material area (25);
one end of the glass capillary tube (13) is sleeved on the single-mode optical fiber (11), one end of the single-mode optical fiber (11) is positioned in the glass capillary tube (13), and the other end of the single-mode optical fiber (11) is a free end; a single-mode optical fiber core (12) positioned in the glass capillary (13) is connected with a port on one side of the Y waveguide (3), and two ports on the other side of the Y waveguide (3) are respectively coupled with waveguides on two ports of the disc-shaped waveguide structure (2); the Y waveguide (3) and the disc-shaped waveguide structure (2) are packaged in the glass capillary tube (13), and the glass capillary tube (13) is filled with magnetic fluid materials.
2. Disc-shaped probe type magnetic field sensor based on 3D printing technology as claimed in claim 1, characterized in that a glue sealing box is arranged at two ports of the disc-shaped waveguide structure (2), and the glue sealing box is communicated with the hollow area (24).
3. Disc probe type magnetic field sensor based on 3D printing technology, characterized in that the center of curvature of the inner single curved surface is located outside the cross section of the disc shaped waveguide structure.
4. Disc probe type magnetic field sensor based on 3D printing technology as claimed in claim 1, characterized in that the disc waveguide structure (2) is formed by integrally connecting a series of semi-arc units with linear radius, the center of the disc waveguide structure (2) is two semi-arc units C with equal radius r1Semi-circular arc unit C2Two semicircular arc units C1And C2Tangent and opposite opening direction.
5. Disc probe type magnetic field sensor based on 3D printing technology, characterized in that it is in a half-arc unit C1Arc center O of1As the center of circle, there are m concentric semi-circular arc units with radius R from inside to outsideiR + (i-1) × (d + l) (i ═ 1, …, m), direction of opening and C1Same, r is a semicircular arc unit C1The radius of (a);
by semi-circular arc unit C2Arc center O of2As the center of circle, there are m concentric semi-circular arc units with radius R from inside to outsideiR + (i-1) × (d + l) (i ═ 1, …, m), direction of opening and C2The same;
with O1M concentric semi-circular arc units as circle center and O2The m concentric semi-circular arc units which are the circle centers are connected pairwise to form the whole disc-shaped waveguide structure (2), the two semi-circular arc units which are positioned at the outermost periphery form two ports, and the opening directions of the two ports are consistent; wherein d is the width of the semi-circular arc unit, and l is the distance between two adjacent sections of the semi-circular arc units.
6. Disc probe type magnetic field sensor based on 3D printing technology as claimed in claim 1 characterized in that one end of the glass capillary (13) that is sleeved on the single mode fiber (11) is sealed by UV adhesive and the other end of the glass capillary (13) that is far away from the single mode fiber (11) is sealed by encapsulation glass plate (14).
7. Disc probe type magnetic field sensor based on 3D printing technology, characterized in that the Y-waveguide (3), the disc waveguide structure (2) and the single mode fiber core (12) connecting the Y-waveguide are all fixed on a glass substrate (16).
8. A method for manufacturing a disk-shaped probe type magnetic field sensor based on 3D printing technology according to any of claims 1 to 7, comprising the steps of:
1) selecting a polymer material according to design requirements and the material of the glass substrate;
2) printing a glass substrate as a substrate for 3D printing to obtain a preliminary disc-shaped waveguide structure on the substrate according to the established 3D printing model of the disc-shaped waveguide structure;
3) connecting one end of a hollow optical fiber with a micro-fluidic pump, sealing an interface, fixing the other end of the hollow optical fiber on a glass substrate, pouring cleaning liquid into the interior and the surface of the printed disc-shaped waveguide structure through the micro-fluidic pump, and cleaning inner and outer residue particles;
4) sealing two glue sealing boxes in the disc-shaped waveguide structure by using a UV (ultraviolet) adhesive to prepare a disc-shaped waveguide structure (2);
5) coupling a glass substrate (16) printed with a disc-shaped waveguide structure (2) and a Y waveguide (3) with a fiber core (14) of a single-mode optical fiber (11), fixing one end of the glass substrate (16) with the end face of the single-mode optical fiber, and fixing a coupling fixing interface by using a UV adhesive;
6) fixing one end of a hollow optical fiber in a needle head of an injector by using UV adhesive, pumping magnetic fluid material into the injector, fixing the injector filled with the magnetic fluid material on a three-axis electric control displacement table, and pouring the magnetic fluid material into a glass capillary tube (13) through the hollow optical fiber; in the process of filling, the position of the needle head is controlled by a three-axis electric control displacement table, so that the injection end of the hollow optical fiber is aligned to the glass capillary tube and does not touch the disc-shaped waveguide structure;
7) after the magnetofluid material is filled, the injection end of the hollow optical fiber is slowly drawn away from the glass capillary tube (13), the glass capillary tube (13) is sealed by a packaging glass flat plate (14) and is fixed by a UV adhesive, and the disc-shaped probe type magnetic field sensor is obtained.
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| CN111443312B (en) * | 2020-04-26 | 2024-07-05 | 浙江大学 | High-sensitivity magnetic field sensor for 3D printing by utilizing two-photon femtosecond laser direct writing technology and manufacturing method thereof |
| CN111443313B (en) * | 2020-04-26 | 2024-06-25 | 浙江大学 | F-P magnetic field sensor for 3D printing by utilizing two-photon femtosecond laser direct writing technology and manufacturing method thereof |
| CN111521582A (en) * | 2020-05-31 | 2020-08-11 | 桂林电子科技大学 | Near-infrared band double-D type photonic crystal fiber SPR sensor |
| CN112763784B (en) * | 2020-12-20 | 2022-05-20 | 复旦大学 | Current detection device and method |
| CN112936855B (en) * | 2021-01-29 | 2022-05-24 | 东南大学 | General quick micro mixer based on surface curing 3D prints |
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