CN111443313A - F-P magnetic field sensor printed by 3D technology of two-photon femtosecond laser direct writing and manufacturing method thereof - Google Patents
F-P magnetic field sensor printed by 3D technology of two-photon femtosecond laser direct writing and manufacturing method thereof Download PDFInfo
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
- B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
- B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0052—Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips
Abstract
The invention discloses an F-P magnetic field sensor for 3D printing by utilizing a two-photon femtosecond laser direct writing technology, which is characterized by comprising a single-mode optical fiber, a capillary tube and an F-P cavity microstructure; the F-P cavity microstructure is directly printed and connected with one end of the single-mode optical fiber through 3D printing, a capillary tube is sleeved on the periphery of the F-P cavity microstructure, two ends of the capillary tube are sealed to form a sealed cavity, and the sealed cavity is filled with magnetic fluid; the other end of the single mode fiber is respectively connected with a wide spectrum light source and a spectrum analyzer through a fiber coupler; the principle of the sensor is different from that of a traditional optical fiber magnetic field sensor filled with magnetic fluid inside, and the limit of high absorptivity of the magnetic fluid on the sensitivity of the sensor magnetic field is broken through by an evanescent coupling effect generated by filling the magnetic fluid around a waveguide, so that the sensor magnetic field sensor has higher sensitivity of the magnetic field; the printed and prepared F-P magnetic field sensor is only in a micron size, and the encapsulated sensing head is in a millimeter level, so that the F-P magnetic field sensor has the advantage of miniaturization.
Description
Technical Field
The invention relates to the technical field of optical sensing, in particular to an F-P magnetic field sensor printed by 3D through a two-photon femtosecond laser direct writing technology and a manufacturing method thereof.
Background
The great demands of scientific research and industrial application promote the rapid development of magnetic field measurement technology. Various types of optical and electrical-based magnetic field sensors for detecting a magnetic field have been proposed, in which a Magnetofluid (MF) -based fiber optic magnetic field sensor is a potential magnetic field sensor using a magnetofluid consisting of magnetic nanoparticles (e.g., Fe) coated with a surfactant (oleic acid) as a sensitive substance3O4，CoFe2O4Or MnFe2O4Etc.) are suspended and dispersed in some solvent. The magnetic fluid has the magneto-optical characteristics of adjustable refractive index, evanescent field transmission dependence, Faraday effect, birefringence effect and the like, and can realize the precise detection of an external magnetic field by using an optical method.
The basic principle behind MF for magnetic field induction is that the refractive index of MF increases with increasing ambient magnetic field. Based on this principle, various fiber-based magnetic field sensors filled internally with MF have been proposed and designed, including Fabry-Perot interferometer (FPI) and Mach-Zehnder interferometer (MZI) based intracavity sensing schemes. However, due to the high absorption of MF, there is a contradiction between the sensing length and the MF concentration, i.e., the sensing length is shortened as the MF concentration increases, thereby limiting the improvement of the sensor sensitivity.
The existence of MF can change the characteristics of guided mode or evanescent field, thus leading to the change of optical path difference, and the principle can be applied to various sensing structures, such as Mach-Zehnder, Sagnac interferometer, multimode interferometer, long-period fiber grating and the like. The magnetic field sensor based on multimode interference in Single Mode Fiber (SMF) is difficult to realize high sensitivity, and the sensitivity to a magnetic field can be improved by increasing the interference length, but the size of the magnetic sensor can be increased, and in practical application, miniaturization is a key problem in the development of the high-sensitivity magnetic field sensor and equipment, and the requirement is to ensure the sensitivity of the magnetic field sensor and also have the miniaturization characteristic of the sensor. Although some miniaturized photonic crystal fiber sensors with inflatable MF air holes exist in the prior art, the structures have difficulties in preparation technology and poor stability, optical signals in the measurement process are directly transmitted through cavities filled with MF air holes, and the optical signal loss is high. If the magnetic field sensor has the advantages of high sensitivity, high stability, miniaturization and low loss, the design of the manufacturing process and the sensor structure needs to be considered at the same time, which has great challenge.
Disclosure of Invention
In order to solve the defects of low sensitivity and stability of a magnetic field sensor and large optical signal loss in the prior art, the invention provides an F-P magnetic field sensor printed by 3D (three-dimensional) technology of two-photon femtosecond laser direct writing and a manufacturing method thereof, a device manufactured by 3D printing of the two-photon femtosecond laser direct writing technology has the advantages of high resolution and high writing speed, and the problem of poor stability of a miniaturized magnetic field sensor caused by the manufacturing process can be solved. The invention designs a novel F-P cavity microstructure which is coated by the magnetic fluid, so that an optical signal is transmitted along the waveguide in the F-P cavity microstructure in the transmission process, and the problem of high optical signal loss caused by the fact that the optical signal is directly transmitted through the cavity filled with the magnetic fluid is solved.
In order to achieve the purpose, the invention adopts the following technical scheme:
an F-P magnetic field sensor printed by 3D through a two-photon femtosecond laser direct writing technology is characterized by comprising a single-mode optical fiber, a capillary tube and an F-P cavity microstructure; the F-P cavity microstructure is directly printed and connected with one end of the single-mode optical fiber through 3D printing, a capillary tube is sleeved on the periphery of the F-P cavity microstructure, two ends of the capillary tube are sealed to form a sealed cavity, and the sealed cavity is filled with magnetic fluid; the other end of the single mode fiber is respectively connected with a wide spectrum light source and a spectrum analyzer through a fiber coupler;
the F-P cavity microstructure comprises a waveguide, a first plane, a second plane and a support structure; the waveguide is aligned with a fiber core of the single-mode optical fiber, the first plane and the second plane are respectively and vertically connected with two ends of the waveguide, and the first plane is contacted with one end of the single-mode optical fiber; the periphery of the waveguide is provided with a support structure connecting the first plane and the second plane.
Preferably, both ends of the capillary tube are fixed and sealed by using an ultraviolet curing adhesive.
Preferably, the diameter of the capillary is larger than the diameter of the single-mode optical fiber.
Preferably, the diameters of the first plane and the second plane are the same as the diameter of a single mode fiber.
Preferably, the first plane is an interface between the single-mode fiber and the F-P cavity microstructure, and refractive index differences exist on two sides of the first plane; and a full-reflection film is plated on one side of the second plane, which is connected with the waveguide.
Preferably, the waveguide is composed of a cone and a cylinder, the small end face of the cone is connected with one end face of the cylinder in a matching mode, and the large end face of the cone is the same as the diameter of the fiber core of the single-mode optical fiber.
Preferably, the diameter of the cylinder is in the range of 0.5 μm to 10 μm.
The invention also discloses a manufacturing method of the F-P magnetic field sensor by utilizing the two-photon femtosecond laser direct writing technology for 3D printing, which comprises the following steps:
1) cutting one end face of the single-mode optical fiber, and fixing a cutting face on one side of the substrate;
2) directly printing the F-P cavity microstructure on a cutting surface of a single-mode optical fiber by using a two-photon femtosecond laser direct writing instrument, wherein in the printing process, a waveguide consists of a conical body and a cylinder, the diameter of the small end surface of the conical body is the same as that of the cylinder, the diameter of the large end surface of the conical body is the same as that of a fiber core of the single-mode optical fiber, and the diameters of a first plane and a second plane are the same as those of the single-mode optical fiber;
3) after the F-P cavity microstructure is printed, sleeving a capillary tube on the periphery of the F-P cavity microstructure, and sealing one end of the capillary tube at one end of the single-mode optical fiber through ultraviolet curing glue; communicating an injector sucking the magnetic fluid with the other end of the unsealed capillary tube, and sealing the other end of the capillary tube after the magnetic fluid is filled to form a sealed cavity surrounding the F-P cavity microstructure; and finishing the manufacturing of the F-P magnetic field sensor.
Preferably, in the 3D printing process, the printing material is a polymer fluid material.
The invention has the beneficial effects that:
the invention provides a high-sensitivity magnetic field sensor for 3D printing by utilizing a two-photon femtosecond laser direct writing technology, which has the principle different from that of the traditional optical fiber magnetic field sensor filled with magnetic fluid inside, and breaks through the limitation of high absorptivity of the magnetic fluid on the magnetic field sensitivity of the sensor by the evanescent coupling effect generated by filling the magnetic fluid around a waveguide, thereby having higher magnetic field sensitivity; in addition, the sensor adopts a 3D printing process of a two-photon femtosecond laser direct writing technology, solves the problems of difficult manufacture and poor stability, and has the advantages of high stability and easy processing; and finally, an F-P cavity microstructure in the F-P magnetic field sensor is directly printed on the end face of a single-mode optical fiber, the waveguide is only micron-sized, and the packaged sensing head is millimeter-sized and has the advantage of miniaturization.
Drawings
FIG. 1 is a schematic diagram of an F-P magnetic field sensor 3D printed by using a two-photon femtosecond laser direct writing technology in the working process;
FIG. 2 is a schematic structural diagram of an F-P magnetic field sensor 3D printed by using a two-photon femtosecond laser direct writing technology in the invention;
FIG. 3 is a partial experimental test spectrum of the present invention;
FIG. 4 is a graph of experimental test results of the present invention;
in the figure: 1. the device comprises a wide-spectrum light source, 2. an optical fiber coupler, 3. an F-P magnetic field sensor, 4. a spectrum analyzer, 3-1. a single-mode optical fiber, 3-2. a first plane, 3-3. a waveguide, 3-4. a second plane, 3-5. a capillary and 3-6. a supporting structure.
Detailed Description
The invention is further illustrated with reference to the following figures and examples. The technical features of the embodiments of the present invention can be combined correspondingly without mutual conflict.
As shown in FIG. 2, an F-P magnetic field sensor printed by 3D printing by using a two-photon femtosecond laser direct writing technology comprises a single-mode optical fiber 3-1, a capillary 3-5 and an F-P cavity microstructure; the F-P cavity microstructure is directly printed and connected with one end of the single-mode optical fiber 3-1 through 3D printing, a capillary tube 3-5 is sleeved on the periphery of the F-P cavity microstructure, two ends of the capillary tube 3-5 are sealed to form a sealed cavity, and the sealed cavity is filled with magnetic fluid; when the F-P magnetic field sensor works, as shown in figure 1, the other end of the single mode fiber 3-1 is respectively connected with a wide spectrum light source 1 and a spectrum analyzer 4 through a fiber coupler 2.
The F-P cavity microstructure comprises a single-mode optical fiber 3-1, a first plane 3-2, a waveguide 3-3, a second plane 3-4 capillary 3-5 and a supporting structure 3-6, wherein the first plane 3-2, the waveguide 3-3 and the second plane 3-4 form an F-P cavity; the waveguide 3-3 is aligned with a fiber core of the single mode fiber 3-1, the first plane 3-2 and the second plane 3-4 are respectively and vertically connected with two ends of the waveguide 3-3, and the first plane 3-2 is contacted with one end of the single mode fiber 3-1; the supporting structure 3-6 is used for connecting the first plane 3-2 and the second plane 3-4, so that the F-P cavity microstructure structure is more stable. The first plane is an interface of the single-mode fiber and the F-P cavity microstructure, the diameter of the first plane is the same as that of the single-mode fiber, the two sides of the first plane have refractive index differences, and according to the Fresnel law, due to the refractive index differences, optical signals incident to the first plane can be partially reflected and partially transmitted; the second plane is positioned at the tail end of the waveguide 3-3, the diameter of the second plane is the same as that of the single-mode optical fiber, and the surface of the second plane is plated with a full-reflection film.
In one specific implementation of the invention, the front end and the tail end of the waveguide are both in a sheet shape and used for fixing the waveguide, the diameter of the waveguide is the same as that of a single-mode optical fiber, the middle part of the waveguide is in a conical shape and a cylindrical shape, the diameter of the cylindrical part is 1 mu m, the diameter of the conical bottom surface is the same as that of an optical fiber core, and the diameter of the front end part is the same as that of the cylindrical part; the diameter of the capillary tube is larger than that of the single-mode optical fiber, two ends of the capillary tube are fixed and sealed by ultraviolet curing adhesive, and magnetic fluid is filled around the waveguide 3-3 in the capillary tube.
In a typical example, a corning model SMF-28 single mode fiber with a core/cladding diameter of 8/125 μm was used, and the material used to print the waveguide structure was an IP-DIP polymer with a refractive index of 1.52, a total waveguide length of 100 μm, and a cylindrical waveguide diameter of 1 μm.
The printing process of the F-P magnetic field sensor comprises the following steps: firstly, cleaning a cut single-mode optical fiber by using isopropanol, and mounting the single-mode optical fiber on an optical fiber bracket or a substrate; then, covering the tip of the optical fiber with a small drop of photoresist, focusing femtosecond laser by using a 63-time immersion lens, and printing the designed F-P cavity microstructure on the cut end surface of the single-mode optical fiber by a two-photon femtosecond laser direct writing technology; after printing was complete, the device was developed with Propylene Glycol Monomethyl Ether Acetate (PGMEA) and then rinsed with IPA.
After the primary manufacturing is finished, the magnetic fluid filling and sealing are carried out in three steps. Firstly, sleeving a capillary tube (3-5) on the periphery of an F-P cavity microstructure, and sealing one end, close to a single-mode optical fiber, of the capillary tube by using ultraviolet curing adhesive (NOA61, Thorlab); secondly, injecting the magnetic fluid into the capillary tube by using the hollow optical fiber with the needle tube, and controlling the hollow optical fiber through a microscope system and a five-axis displacement table to avoid the hollow optical fiber from touching the printed waveguide structure; thirdly, the other end of the capillary tube is sealed by a piece of flat glass and ultraviolet curing glue.
The working process of the invention is as follows:
the wide-spectrum light source 1 emits wide-spectrum light, the wide-spectrum light enters the F-P magnetic field sensor 3 after passing through the optical fiber coupler 2, an optical signal entering the F-P magnetic field sensor is transmitted in the single-mode optical fiber 3-1, after passing through the first plane 3-2, part of the optical signal is reflected, the other part of the optical signal is transmitted and enters the waveguide 3-3 for transmission, the optical signal transmitted in the waveguide is totally reflected after passing through the second plane 3-4, the optical signal is transmitted and coupled into the single-mode optical fiber 3-1 again through the waveguide 3-3, two beams of reflected light interfere at the output end, and the interference signal periodically fluctuates. The waveguide 3-3 is surrounded by the capillary 3-5 to form a closed space, magnetic fluid is filled in the space, the magnetic fluid influences the phase of an optical signal through an evanescent coupling effect, when an external magnetic field changes, the characteristics of the magnetic fluid change, the phase of the optical signal also changes, so that the valley of an interference spectrum drifts, the interference optical signal enters the optical spectrum analyzer 4 after passing through the optical fiber coupler 2, and the magnetic field can be measured by measuring the drift size of the wave trough of the spectrum through the optical spectrum analyzer.
The working principle of the invention is as follows:
optical signal I reflected by the first and second planes respectivelyR1And IR2After the interference occurs, the interference light signal can be expressed as:
where λ is the wavelength, L is the length of the waveguide, neIs the effective refractive index (influenced by the magnetic fluid) of the waveguide, phi0Is the initial phase. As can be seen from formula (1), the output intensity reached a trough under the following conditions:
wherein m is an integer, λmIs the wavelength of the tilt angle of the mth order fringe of the interference spectrum. The fringes correspond to the interference spectrum, and the free spectral range Δ λ of the FPI can be expressed as:
effective refractive index n of waveguide when MF refractive index is changedeAlso subsequently generate neThe corresponding drift amount λ generated by the mth order stripe can be expressed as:
therefore, the effective refractive index of the magnetic fluid can be obtained by calculating the drift of the interference spectrum, and the information of the external magnetic field can be obtained according to the relationship between the refractive index of the magnetic fluid and the magnetic field.
An S L ED broad spectrum light source used in a magnetic field experiment has an optical wave band of 1430nm to 1630nm, a magnetic field is generated by two electromagnets which are parallel to each other, an F-P magnetic field sensor is arranged at the center of the two electromagnets, a magnetic field sensing head of a gaussmeter (F.W.BE LL, 6010) is arranged at the center of the electromagnets, the size of the magnetic field is adjustable within the range of 0-300 gauss through a current source, the adjustment precision is 0.1 gauss, the environmental temperature is 25 ℃ in the experiment process, and a spectrum analyzer (OSA, AQ6317B) is used for detection and analysis.
Part of the spectrum obtained by experimental tests is shown in fig. 3, and it can be seen that the interference spectrum shows obvious red shift with the increase of the magnetic field intensity. Data near 1618nm were taken for analysis and the relationship between the position of the trough and the peak-to-trough intensity and the intensity of the applied magnetic field is shown in FIG. 4. It can be seen that when the magnetic field strength is less than 20 gauss, the peak-to-valley intensity decreases rapidly with increasing magnetic field strength, and when the magnetic field strength is greater than 20 gauss, the peak-to-valley intensity gradually stabilizes. The relation between the positions of the wave troughs and the magnetic field intensity can be divided into four parts, and the resonant wavelength corresponding to the positions of the wave troughs slowly increases in a nonlinear manner along with the increase of the magnetic field intensity in the range of 0 gauss to 10 gauss; in the range of 10 gauss to 80 gauss, the resonance wavelength increases significantly linearly with increasing magnetic field strength; in the range of 80 gauss to 220 gauss, the resonance wavelength increases linearly with the increase of the magnetic field intensity, but the slope is smaller than the former range; in the range of more than 220 gauss, the resonant wavelength is substantially invariant with magnetic field strength. In the second range, the measured rate of change of the resonant wavelength with magnetic field strength was 0.154 nm/gauss, and when the resolution of the spectrum analyzer was 1pm, the corresponding magnetic field resolution was about 66.7 nT.
The foregoing lists merely illustrate specific embodiments of the invention. It is obvious that the invention is not limited to the above embodiments, but that many variations are possible. All modifications which can be derived or suggested by a person skilled in the art from the disclosure of the present invention are to be considered within the scope of the invention.
Claims (9)
1. An F-P magnetic field sensor printed by 3D through a two-photon femtosecond laser direct writing technology is characterized by comprising a single-mode optical fiber (3-1), a capillary tube (3-5) and an F-P cavity microstructure; the F-P cavity microstructure is directly printed and connected with one end of the single-mode optical fiber (3-1) through 3D printing, a capillary tube (3-5) is sleeved on the periphery of the F-P cavity microstructure, two ends of the capillary tube (3-5) are sealed to form a sealed cavity, and a magnetic fluid is filled in the sealed cavity; the other end of the single-mode optical fiber (3-1) is respectively connected with a wide-spectrum light source (1) and a spectrum analyzer (4) through an optical fiber coupler (2);
the F-P cavity microstructure comprises a waveguide (3-3), a first plane (3-2), a second plane (3-4) and a supporting structure; the waveguide (3-3) is aligned with a fiber core of the single-mode optical fiber (3-1), the first plane (3-2) and the second plane (3-4) are respectively and vertically connected with two ends of the waveguide (3-3), and the first plane (3-2) is contacted with one end of the single-mode optical fiber (3-1); the periphery of the waveguide (3-3) is provided with a support structure connecting the first plane (3-2) and the second plane (3-4).
2. The F-P magnetic field sensor using two-photon femtosecond laser direct writing technique 3D printing according to claim 1, wherein both ends of the capillary tube (3-5) are fixed and sealed using an ultraviolet curing adhesive.
3. An F-P magnetic field sensor 3D printed using two-photon femtosecond laser direct writing technology according to claim 2, wherein the diameter of the capillary (3-5) is larger than that of the single-mode optical fiber (3-1).
4. An F-P magnetic field sensor using two-photon femtosecond laser direct writing technology 3D printing according to claim 1, wherein the diameters of the first plane (3-2) and the second plane (3-4) are the same as the diameter of the single-mode optical fiber (3-1).
5. The F-P magnetic field sensor using two-photon femtosecond laser direct writing 3D printing according to claim 1, wherein the second plane (3-4) is coated with a full-reflection film on the side connected to the waveguide (3-3).
6. The F-P magnetic field sensor for 3D printing by using the two-photon femtosecond laser direct writing technology as claimed in claim 1, wherein the waveguide (3-3) is composed of a cone and a cylinder, the small end face of the cone is connected with one end face of the cylinder in a matching manner, and the large end face of the cone has the same diameter as the fiber core of the single-mode optical fiber (3-1).
7. The F-P magnetic field sensor using two-photon femtosecond laser direct writing technology for 3D printing as claimed in claim 6, wherein the diameter of the cylinder is in the range of 0.5 μm to 10 μm.
8. A method for manufacturing the F-P magnetic field sensor 3D printed by using the two-photon femtosecond laser direct writing technology according to claim 1, comprising the following steps:
1) cutting one end face of the single-mode optical fiber (3-1), and fixing the cut face;
2) directly printing the F-P cavity microstructure 3D on a cutting surface of a single-mode optical fiber (3-1) by using a two-photon femtosecond laser direct writing instrument, wherein in the printing process, a waveguide (3-3) is composed of a conical body and a cylinder, the diameter of the small end surface of the conical body is the same as that of the cylinder, the diameter of the large end surface of the conical body is the same as that of a fiber core of the single-mode optical fiber (3-1), and the diameters of a first plane (3-2) and a second plane (3-4) are the same as that of the single-mode optical fiber (3-1);
3) after the F-P cavity microstructure is printed, sleeving a capillary tube (3-5) on the periphery of the F-P cavity microstructure, and sealing one end of the capillary tube (3-5) at one end of a single-mode optical fiber (3-1) through ultraviolet curing glue; communicating the injector sucking the magnetic fluid with the other end of the unsealed capillary tube (3-5), and sealing the other end of the capillary tube after the magnetic fluid is filled to form a sealed cavity surrounding the F-P cavity microstructure; and finishing the manufacturing of the F-P magnetic field sensor.
9. The method for manufacturing the F-P magnetic field sensor through 3D printing by using the two-photon femtosecond laser direct writing technology according to claim 8, wherein in the 3D printing process, a polymer fluid material is adopted as a printing material.
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