CN112763556A - 一种多层膜结构的海洋探测器电极及其制备方法 - Google Patents
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Abstract
本发明公开了一种多层膜结构的海洋探测器电极及其制备方法,该电极由下到上依次包括电极衬底、第一层硼掺杂金刚石膜、石墨烯层和第二层硼掺杂金刚石膜。本发明所公开的海洋探测器电极为两层硼掺杂金刚石膜中间夹一层石墨烯层的结构,利用石墨烯层提高电极的电导率,同时缓解金刚石膜的内应力,在金刚石层电化学窗口宽、背景电流低、机械强度高的基础上,利用石墨烯层高载流子浓度和化学稳定性的特点,能够进一步提高海洋探测器电极的灵敏度和稳定性。
Description
技术领域
本发明涉及一种海洋探测器电极,特别涉及一种多层膜结构的海洋探测器电极及其制备方法。
背景技术
石墨烯作为一种新型的二维碳纳米材料具有优异的光学、电学、热以及力学性能,在储能材料、显示屏、传感器、晶体管、航天航空等方面表现出广阔的应用前景。鉴于石墨烯有关材料优异的性能及其潜在的应用价值,研究者们正致力于在不同领域尝试优化和改进其性能以得到更广泛的应用。与陆地和天空上的应用不同,除海水淡化外石墨烯及其复合材料在海洋领域的应用报道较少。而其超级稳定的物理结构、超高的电导率、热导率、超大的比表面积等注定其会成为海洋器件制备上的优势材料。
现有的海洋探测器电极在灵敏度和稳定性方面还有待提高。
发明内容
为解决上述技术问题,本发明提供了一种多层膜结构的海洋探测器电极及其制备方法,在强化硼掺杂金刚石膜性能的同时,利用石墨烯层提高电极的电导率并降低金刚石膜的内应力,提高电极韧性,进而提高海洋探测器电极的灵敏度和稳定性。
为达到上述目的,本发明的技术方案如下:
一种多层膜结构的海洋探测器电极,该电极由下到上依次包括电极衬底、第一层硼掺杂金刚石膜、石墨烯层和第二层硼掺杂金刚石膜。
上述方案中,所述电极衬底材料为铌。
上述方案中,所述第一层硼掺杂金刚石膜的厚度为3μm。
上述方案中,所述石墨烯层为片层结构,且不超过3层。
上述方案中,所述石墨烯层的厚度小于2nm。
上述方案中,所述第二层硼掺杂金刚石膜的厚度为3μm。
一种多层膜结构的海洋探测器电极的制备方法,包括如下过程:
(1)电极衬底表面预处理:顺序采用物理抛光、后化学清洗的方法,对电极衬底表面进行清理;
(2)采用热丝化学气相沉积的方法,在电极衬底表面沉积第一层硼掺杂金刚石膜;
(3)在第一层硼掺杂金刚石膜表面通过化学气相沉积技术/等离子体增强化学气相沉积技术/金属诱导转变方法制备石墨烯层;
(4)采用热丝化学气相沉积的方法,在石墨烯层上再沉积第二层硼掺杂金刚石膜。
上述方案中,步骤(1)中的物理抛光包括砂纸和抛光布抛光,化学清洗包括丙酮和酒精各超声清洗10分钟。
上述方案中,步骤(2)和步骤(4)中,使用甲烷、氢气、三甲基硼烷,热丝15根,电流250A,沉积气压3Kpa,沉积第一层硼掺杂金刚石膜和第二层硼掺杂金刚石膜。
上述方案中,步骤(3)的具体方法如下:在第一层硼掺杂金刚石膜表面采用PVD方法先沉积一层500nm厚的铜膜,之后在真空管式炉中在900℃下保温70分钟,然后使用CuSO4和HCl混合溶液腐蚀掉剩余的铜,露出石墨烯层。
通过上述技术方案,本发明提供的多层膜结构的海洋探测器电极有益效果如下:
1、本发明用化学气相沉积的方法分别制备硼掺杂金刚石膜和石墨烯层,充分利用材料电化学窗口宽、背景电流低、机械强度高、化学性质稳定的优势,制备海洋探测器电极材料,有效提高器件的灵敏度和稳定性。
2、在强化硼掺杂金刚石膜性能的同时,利用石墨烯层提高电极的电导率并降低金刚石膜的内应力,提高电极韧性。石墨烯层可以调节其载流子浓度和电导率,以进一步提高海洋探测器电极的灵敏度和稳定性。
3、在具体指标上,控制石墨烯层的石墨烯层数不超过3层。在电导池和后端信号采集电路的高度匹配情况下,复合膜所制备的海洋盐度传感器的电导率测量范围:2-70mS/cm;测量误差:≤±0.007mS/cm。
4、本发明的电极为两层硼掺杂金刚石膜中间夹一层石墨烯的三明治结构,利用石墨烯层提高电极的电导率,同时缓解金刚石膜的内应力。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍。
图1为本发明实施例所公开的一种多层膜结构的海洋探测器电极结构示意图。
图中,1、电极衬底;2、第一层硼掺杂金刚石膜;3、石墨烯层;4、第二层硼掺杂金刚石膜。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。
本发明提供了一种多层膜结构的海洋探测器电极,如图1所示,该电极由下到上依次包括电极衬底1、第一层硼掺杂金刚石膜2、石墨烯层3和第二层硼掺杂金刚石膜4。
本实施例中,电极衬底1材料为铌。第一层硼掺杂金刚石膜2的厚度为3μm。石墨烯层3为片层结构,且不超过3层。石墨烯层3的厚度为1nm。第二层硼掺杂金刚石膜4的厚度为3μm。
一种多层膜结构的海洋探测器电极的制备方法,包括如下过程:
(1)电极衬底1表面预处理:顺序采用物理抛光、后化学清洗的方法,对电极衬底1表面进行清理;
物理抛光包括砂纸和抛光布抛光,化学清洗包括丙酮和酒精各超声清洗10分钟。
(2)采用热丝化学气相沉积的方法,在电极衬底1表面沉积第一层硼掺杂金刚石膜2,具体如下:
使用甲烷(1%)、氢气、三甲基硼烷(4000ppm),热丝15根,电流250A,沉积气压3Kpa,沉积第一层硼掺杂金刚石膜2。
(3)在第一层硼掺杂金刚石膜2表面通过化学气相沉积技术/等离子体增强化学气相沉积技术/金属诱导转变方法制备石墨烯层3,具体如下:
在第一层硼掺杂金刚石膜2表面采用PVD方法先沉积一层500nm厚的铜膜,之后在真空管式炉中在900℃下保温70分钟,然后使用CuSO4和HCl混合溶液腐蚀掉剩余的铜,露出石墨烯层3。
(4)采用热丝化学气相沉积的方法,在石墨烯层3上再沉积第二层硼掺杂金刚石膜4,具体如下:
使用甲烷(1%)、氢气、三甲基硼烷(4000ppm),热丝15根,电流250A,沉积气压3Kpa,沉积第二层硼掺杂金刚石膜4。
对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。
Claims (10)
1.一种多层膜结构的海洋探测器电极,其特征在于,该电极由下到上依次包括电极衬底、第一层硼掺杂金刚石膜、石墨烯层和第二层硼掺杂金刚石膜。
2.根据权利要求1所述的一种多层膜结构的海洋探测器电极,其特征在于,所述电极衬底材料为铌。
3.根据权利要求1所述的一种多层膜结构的海洋探测器电极,其特征在于,所述第一层硼掺杂金刚石膜的厚度为3μm。
4.根据权利要求1所述的一种多层膜结构的海洋探测器电极,其特征在于,所述石墨烯层为片层结构,且不超过3层。
5.根据权利要求1所述的一种多层膜结构的海洋探测器电极,其特征在于,所述石墨烯层的厚度小于2nm。
6.根据权利要求1所述的一种多层膜结构的海洋探测器电极,其特征在于,所述第二层硼掺杂金刚石膜的厚度为3μm。
7.一种多层膜结构的海洋探测器电极的制备方法,其特征在于,包括如下过程:
(1)电极衬底表面预处理:顺序采用物理抛光、后化学清洗的方法,对电极衬底表面进行清理;
(2)采用热丝化学气相沉积的方法,在电极衬底表面沉积第一层硼掺杂金刚石膜;
(3)在第一层硼掺杂金刚石膜表面通过化学气相沉积技术/等离子体增强化学气相沉积技术/金属诱导转变方法制备石墨烯层;
(4)采用热丝化学气相沉积的方法,在石墨烯层上再沉积第二层硼掺杂金刚石膜。
8.根据权利要求7所述的一种多层膜结构的海洋探测器电极的制备方法,其特征在于,步骤(1)中的物理抛光包括砂纸和抛光布抛光,化学清洗包括丙酮和酒精各超声清洗10分钟。
9.根据权利要求7所述的一种多层膜结构的海洋探测器电极的制备方法,其特征在于,步骤(2)和步骤(4)中,使用甲烷、氢气、三甲基硼烷,热丝15根,电流250A,沉积气压3Kpa,沉积第一层硼掺杂金刚石膜和第二层硼掺杂金刚石膜。
10.根据权利要求7所述的一种多层膜结构的海洋探测器电极的制备方法,其特征在于,步骤(3)的具体方法如下:在第一层硼掺杂金刚石膜表面采用PVD方法先沉积一层500nm厚的铜膜,之后在真空管式炉中在900℃下保温70分钟,然后使用CuSO4和HCl混合溶液腐蚀掉剩余的铜,露出石墨烯层。
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