CN112763064A - 一种基于mems的一体集成式光谱仪 - Google Patents
一种基于mems的一体集成式光谱仪 Download PDFInfo
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- CN112763064A CN112763064A CN202011537533.5A CN202011537533A CN112763064A CN 112763064 A CN112763064 A CN 112763064A CN 202011537533 A CN202011537533 A CN 202011537533A CN 112763064 A CN112763064 A CN 112763064A
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- 238000012360 testing method Methods 0.000 claims abstract description 129
- 238000001228 spectrum Methods 0.000 claims abstract description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1810819A1 (de) * | 2006-01-18 | 2007-07-25 | Fette GmbH | Vorrichtung und Verfahren zur Überwachung der Produktion von Tabletten in einer Rundläuferpresse |
CN101040184A (zh) * | 2004-09-07 | 2007-09-19 | 彼得罗模型公司 | 用于尺寸、外形和棱角性分析以及用于矿石和岩石颗粒的成分分析的设备和方法 |
CN103021899A (zh) * | 2012-12-21 | 2013-04-03 | 日月光半导体(昆山)有限公司 | 半导体产品检测机及其检测方法 |
CN105717085A (zh) * | 2010-01-04 | 2016-06-29 | Bt成像股份有限公司 | 用于对半导体材料的样品进行分析的系统和方法 |
WO2017098053A1 (en) * | 2015-12-11 | 2017-06-15 | Dsm Ip Assets B.V. | System and method for optical measurements on a transparent sheet |
CN108535209A (zh) * | 2018-03-16 | 2018-09-14 | 湖南科技大学 | 一种红外光谱仪试样压片模具 |
CN109827657A (zh) * | 2019-03-12 | 2019-05-31 | 深圳劲嘉集团股份有限公司 | 一种测量素面镭射材料光栅常数的方法和装置 |
CN110441267A (zh) * | 2019-08-09 | 2019-11-12 | 张建会 | 一种食品质量检测的食品组成元素光谱检测装置 |
CN111521744A (zh) * | 2020-06-09 | 2020-08-11 | 朱闪闪 | 一种检测精准的食品检测系统 |
CN211602887U (zh) * | 2020-02-19 | 2020-09-29 | 施煜 | 一种光谱分析仪试样夹 |
-
2020
- 2020-12-23 CN CN202011537533.5A patent/CN112763064B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101040184A (zh) * | 2004-09-07 | 2007-09-19 | 彼得罗模型公司 | 用于尺寸、外形和棱角性分析以及用于矿石和岩石颗粒的成分分析的设备和方法 |
EP1810819A1 (de) * | 2006-01-18 | 2007-07-25 | Fette GmbH | Vorrichtung und Verfahren zur Überwachung der Produktion von Tabletten in einer Rundläuferpresse |
CN105717085A (zh) * | 2010-01-04 | 2016-06-29 | Bt成像股份有限公司 | 用于对半导体材料的样品进行分析的系统和方法 |
CN103021899A (zh) * | 2012-12-21 | 2013-04-03 | 日月光半导体(昆山)有限公司 | 半导体产品检测机及其检测方法 |
WO2017098053A1 (en) * | 2015-12-11 | 2017-06-15 | Dsm Ip Assets B.V. | System and method for optical measurements on a transparent sheet |
CN108535209A (zh) * | 2018-03-16 | 2018-09-14 | 湖南科技大学 | 一种红外光谱仪试样压片模具 |
CN109827657A (zh) * | 2019-03-12 | 2019-05-31 | 深圳劲嘉集团股份有限公司 | 一种测量素面镭射材料光栅常数的方法和装置 |
CN110441267A (zh) * | 2019-08-09 | 2019-11-12 | 张建会 | 一种食品质量检测的食品组成元素光谱检测装置 |
CN211602887U (zh) * | 2020-02-19 | 2020-09-29 | 施煜 | 一种光谱分析仪试样夹 |
CN111521744A (zh) * | 2020-06-09 | 2020-08-11 | 朱闪闪 | 一种检测精准的食品检测系统 |
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Effective date of registration: 20210628 Address after: 570100 No.9, 59 Haifu Road, Meilan District, Haikou City, Hainan Province Applicant after: Li Maoen Applicant after: Zhejiang Traceable Light Technology Co.,Ltd. Address before: Room 613, 11 Weisan Road, Haining hi tech Industrial Park, Chang'an Town, Haining City, Jiaxing City, Zhejiang Province, 314400 Applicant before: Zhejiang Traceable Light Technology Co.,Ltd. |
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Effective date of registration: 20211102 Address after: Room 613, 11 Weisan Road, Haining hi tech Industrial Park, Chang'an Town, Haining City, Jiaxing City, Zhejiang Province, 314400 Applicant after: Zhejiang Traceable Light Technology Co.,Ltd. Address before: 570100 No.9, 59 Haifu Road, Meilan District, Haikou City, Hainan Province Applicant before: Li Maoen Applicant before: Zhejiang Traceable Light Technology Co.,Ltd. |
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