CN112759274A - Automatic glass coating system and method - Google Patents
Automatic glass coating system and method Download PDFInfo
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- CN112759274A CN112759274A CN202011640192.4A CN202011640192A CN112759274A CN 112759274 A CN112759274 A CN 112759274A CN 202011640192 A CN202011640192 A CN 202011640192A CN 112759274 A CN112759274 A CN 112759274A
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- 238000000576 coating method Methods 0.000 title claims abstract description 230
- 239000011248 coating agent Substances 0.000 title claims abstract description 224
- 239000011521 glass Substances 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title abstract description 9
- 238000007789 sealing Methods 0.000 claims abstract description 122
- 238000005192 partition Methods 0.000 claims abstract description 62
- 239000011261 inert gas Substances 0.000 claims abstract description 29
- 239000007888 film coating Substances 0.000 claims abstract description 27
- 238000009501 film coating Methods 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 11
- 230000009286 beneficial effect Effects 0.000 claims abstract description 10
- 238000009792 diffusion process Methods 0.000 claims abstract description 6
- 239000010687 lubricating oil Substances 0.000 claims description 12
- 239000003921 oil Substances 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 5
- 230000008602 contraction Effects 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 7
- 230000001965 increasing effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
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- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an automatic glass coating system and a method, wherein the system comprises a conveying device and a coating chamber with a sealed bottom, a chamber partition plate driven to lift is arranged in the coating chamber, the chamber partition plate is matched with the inner wall of the coating chamber in a sliding and sealing manner through a sliding sealing assembly, a coating chamber is formed in the coating chamber through the chamber partition plate, a front slit and a rear slit for glass to pass through the coating chamber are formed in the coating chamber, and two ends of the chamber partition plate are respectively provided with a gate part driven to vertically slide and used for sealing the front slit and the rear slit. The method comprises the following steps that the chamber partition plate and the gate part move downwards before film coating, so that the film coating chamber is sealed, air is exhausted, then the chamber partition plate rises to enable the film coating chamber to have a volume beneficial to diffusion of a film coating material, after the film coating is finished, the gate part rises and the chamber partition plate falls, so that the inert gas in the film coating chamber can be rapidly recovered, and the phenomenon that the film coating is oxidized due to the fact that air is mixed in the inert gas during film coating again is avoided.
Description
Technical Field
The invention relates to the technical field of glass coating, in particular to an automatic glass coating system and method.
Background
With the technological progress, various new types of glass are continuously emerging, and coated glass is also one of the new types of glass. The coated glass is prepared by coating one or more layers of metal, alloy or metal compound films on the surface of glass to change the optical performance of the glass and meet certain specific requirements. The coated glass not only can play the function of common glass, but also can play the function of enhancing or weakening reflected light according to different coatings, and can even directly utilize sunlight to generate electricity.
The production method of the coated glass is many, and the cathode sputtering method and the evaporation method are the two most commonly adopted methods, however, in order to avoid the oxidation of the coated glass caused by the invasion of the external air into the coating chamber in the coating process, the coating chamber needs to be kept in the vacuum condition of coating or the purity of inert gases such as argon in the coating chamber needs to be kept.
Although the input end and the output end of the existing coating chamber prevent air intrusion by arranging a sealing component and a plurality of buffer chambers, the existing coating chamber is still difficult to avoid a small amount of air from invading into the coating chamber, and the vacuum degree of the coating chamber and the purity of inert gas in the coating chamber are difficult to ensure as time passes, thereby causing the reduction of coating quality.
Disclosure of Invention
The invention aims to provide an automatic glass coating system to solve the technical problem that the coating quality is reduced due to the fact that air easily enters a coating chamber in the prior art.
In order to solve the technical problems, the invention specifically provides the following technical scheme:
an automatic glass coating system comprises a conveying device and a coating chamber with a sealed bottom, wherein a chamber partition plate driven to lift is installed in the coating chamber, the chamber partition plate is in sliding seal fit with the inner wall of the coating chamber through a sliding seal assembly, a coating chamber with adjustable volume is formed in the coating chamber through the chamber partition plate, and a front slit and a rear slit for glass to pass through the coating chamber are formed in the coating chamber;
the conveying device conveys the glass to be coated into the coating chamber through the front slit, two ends of the chamber partition plate are respectively provided with a gate part which is driven to vertically slide and is used for sealing the front slit and the rear slit, the gate part is used for sealing the front slit and the rear slit after the chamber partition plate driven to descend exhausts air in the coating chamber, and the chamber partition plate is driven to ascend after the front slit and the rear slit are sealed.
As a preferable scheme of the invention, the conveying device comprises a rack rotatably provided with a plurality of conveying rollers, a plurality of vertical frames positioned between adjacent conveying rollers are respectively arranged at two sides of the rack and two ends of the coating chamber, the vertical frames at two sides are connected through lifting rollers which are rotatably arranged, the vertical frames are provided with vertical grooves, one ends of the vertical grooves are positioned between the adjacent conveying rollers, movable shafts connected with the lifting rollers are vertically and slidably arranged in the vertical grooves, jacking oil cylinders are arranged on the outer sides of the vertical frames far away from the lifting rollers, and one ends of the movable shafts penetrating through the vertical grooves are supported and arranged on the jacking oil cylinders.
As a preferable aspect of the present invention, the gate portion protrudes from the bottom of the chamber partition, and a height difference between the bottom surface of the gate portion and the bottom surface of the chamber partition is not smaller than a thickness of the glass to be coated, a backflow chamber is formed in the coating chamber above the coating chamber, an air suction pump and a three-way electromagnetic valve are installed in the backflow chamber, an air hole is formed in the chamber partition, the air hole is connected to the air suction pump through the three-way electromagnetic valve, and the air suction pump and the three-way electromagnetic valve are opened after the gate portion of the front slit and the rear slit is sealed, so that the air is further exhausted through the air suction pump after the coating chamber is sealed.
As a preferable scheme of the invention, the top of the film coating chamber is provided with a balance cylinder communicated with the backflow chamber, and a piston in sliding sealing fit with the inner wall of the balance cylinder is arranged in the balance cylinder.
In a preferred embodiment of the present invention, a piston driving mechanism for driving the piston to reciprocate is installed in the balance cylinder.
As a preferred scheme of the present invention, the sliding seal assembly includes an outer sealing ring and an inner sealing ring located in the same plane, the inner sealing ring is fixedly installed on an outer wall of the gate portion, a linkage slot is formed in an inner wall of the outer sealing ring facing the inner sealing ring, a linkage ring inserted into the linkage slot is installed on an outer wall of the inner sealing ring facing the outer sealing ring in a sleeved manner, a depth of the linkage ring inserted into the linkage slot is smaller than a depth of the linkage slot, and an inner wall of the outer sealing ring is in clearance fit with an outer wall of the inner sealing ring.
As a preferred scheme of the present invention, the outer wall of the inner seal ring is sleeved with a second rubber seal ring abutting against the inner wall of the outer seal ring, the inner seal ring is embedded and installed above and below the linkage ring, and the groove walls of the top and the bottom of the linkage slot are embedded and installed with third rubber seal rings abutting against the linkage ring.
As a preferable scheme of the invention, a plurality of clamping ring grooves are formed in the outer wall of the outer sealing ring at intervals in the vertical direction, sealing snap rings are installed in the clamping ring grooves and provided with separating ports for separating the sealing snap rings to adapt to thermal expansion and cold contraction, the outer sealing ring is connected with the inner wall of the corresponding film coating chamber in a sliding and sealing manner through the plurality of sealing snap rings, lubricating oil cavities located above the plurality of clamping ring grooves are formed in the outer sealing ring, and a plurality of capillary holes communicating the plurality of clamping ring grooves and the lubricating oil cavities are formed in the outer sealing ring.
As a preferable scheme of the present invention, a bottom plate for supporting glass is installed in the lower end of the coating chamber, a first rubber sealing ring is fixedly installed at the bottom of the gate portion, the top of the bottom plate, the bottoms of the front slit and the rear slit are located in the same plane, and two ends of the top of the bottom plate are both provided with sealing grooves adapted to the insertion of the first rubber sealing ring.
In a preferred embodiment of the present invention, the air hole has an "L" shape, a top of the air hole penetrates through a top of the gate, and a bottom of the air hole penetrates through the gate and faces an inner wall of the chamber partition.
In order to solve the above technical problems, the present invention further provides the following technical solutions:
an automated glass coating method comprising:
s100, conveying the glass to be coated into a coating cavity of a coating chamber through a front slit at the front end of the coating chamber;
s200, after the glass to be coated is conveyed into the coating chamber, driving the chamber partition plate and the gate part to move downwards until the gate part seals the front slit and the rear slit, so that the volume of the coating chamber is reduced and the coating chamber is sealed;
s300, vacuumizing the sealed film coating chamber;
s400, driving a chamber partition plate to ascend so that the coating chamber has a volume beneficial to diffusion of a coating material during coating, and selecting to keep the vacuum of the coating chamber or pump inert gas into the coating chamber according to a coating mode;
s500, coating the glass to be coated in the coating chamber, and after the coating is finished, driving a chamber partition plate to descend and extracting and recovering inert gas in the coating chamber;
s600, the driving gate part rises to open the front slit and the rear slit, and the coated glass is output from the rear slit to the coating chamber.
Compared with the prior art, the invention has the following beneficial effects:
the invention changes the volume of the coating cavity for coating by the lifting of the cavity partition plate, so as to be beneficial to the air pump to vacuumize the coating cavity sealed by the gate part, and when the cathode sputtering coating is carried out, the inert gas in the backflow cavity is sealed in the coating cavity, the volume of the inert gas is increased, and then the inert gas enters the coating cavity through the opened three-way electromagnetic valve, after the coating is finished, the cavity partition plate is driven to descend, so that the inert gas in the coating cavity flows back to the backflow cavity, and then, the air holes connecting the backflow cavity and the coating cavity are closed through the three-way electromagnetic valve, so as to ensure the purity of the inert gas, thereby ensuring the quality of the glass coating.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
FIG. 1 is a schematic overall structure diagram of an embodiment of the present invention;
FIG. 2 is a schematic structural view of a sliding seal assembly according to an embodiment of the present invention;
FIG. 3 is a schematic view of a sealing ring structure according to an embodiment of the present invention;
fig. 4 is a schematic view of a separation structure according to an embodiment of the present invention.
The reference numerals in the drawings denote the following, respectively:
1-a film coating chamber; 2-a bottom plate; 3-chamber partition; 4-a lifting device; 5-a sliding seal assembly; 6-three-way electromagnetic valve; 7-an air pump; 8-a balance cylinder; 9-a piston; 10-a piston drive mechanism; 11-a first rubber sealing ring; 12-a second rubber sealing ring; 13-a third rubber seal ring; 14-sealing snap ring; 15-a conveying device;
101-front slit; 102-rear slit; 103-a reflow chamber; 104-a coating chamber;
201-sealing groove;
301-a gate portion; 302-air holes;
501-an outer sealing ring; 502-inner seal ring; 503-a linkage coil;
5011-linkage slot; 5012-a snap ring groove; 5013-lubricating oil cavity; 5014-capillary;
1401-separation;
1501-conveying rollers; 1502-a rack; 1503-vertical frame; 1504-lifting the stick; 1505-vertical slots; 1506-a movable shaft; 107-jacking oil cylinder.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 3, the present invention provides an automatic glass coating system, which comprises a coating chamber 1, wherein the coating chamber 1 is provided with a front slit 101 for glass input and a rear slit 102 for glass output, and a bottom plate 2 is installed in the coating chamber 1.
Install in the coating film room 1 rather than the inner wall sliding seal cooperation and be located the cavity baffle 3 directly over bottom plate 2, the coating film room 1 is separated into backward flow cavity 103 and has bottom plate 2's coating film cavity 104 by cavity baffle 3, and preceding slit 101 and back slit 102 all are linked together with coating film cavity 104, install the elevating gear 4 that is linked together with cavity baffle 3 in the backward flow cavity 103, all carry out sliding seal through sliding seal subassembly 5 and be connected between the inner wall of cavity baffle 3 and coating film room 1.
The edge of the chamber partition plate 3 is provided with a gate part 301 protruding out of the lower bottom surface of the chamber partition plate 3, the thickness of the gate part 301 protruding out of the lower bottom surface of the chamber partition plate 3 is not less than the opening height of the front slit 101 and the rear slit 102, the gate part 301 is provided with an air hole 302 communicating the backflow chamber 103 and the coating chamber 104, the bottom of the air hole 302 is always communicated with the coating chamber 104, the backflow chamber 103 is internally provided with a three-way electromagnetic valve 6 and an air suction pump 7, and the backflow chamber 103, the air hole 302 and the air suction pump 7 are all communicated with corresponding ports on the three-.
The chamber partition plate 3 moves below the glass to be coated before coating, and the volume of the coating chamber 104 is reduced along with the descending of the chamber partition plate 3, so that the air in the coating chamber 104 is exhausted and the air in the coating chamber 104 is further exhausted. The front slit 101 and the rear slit 102 are sealed in a manner of closing by the gate portion 301 in the coating chamber 104 in which air is evacuated, and the chamber partition plate 3 is driven to ascend along the sealed coating chamber 104, and the volume of the coating chamber 104 is increased along with the ascending of the chamber partition plate 3 to facilitate the diffusion of the coating material.
When the glass to be coated is conveyed into the coating chamber 1, the gate part 301 and the chamber partition 3 are driven to rise above the front slit 101 and the rear slit 102, and at this time, the coating chamber 104 has a small volume, so that the glass to be coated is discharged out of most of the air in the coating chamber 104 when entering the coating chamber 104. After the glass to be coated enters the coating chamber 1, the gate 301 is driven to descend to seal the front slit 101 and the rear slit 102, and the ports of the air pump 7 and the three-way electromagnetic valve 6, which communicate the coating chamber 104 and the air pump 7, are opened, so that the coating chamber 104 is vacuumized. Subsequently, the chamber partition 3 is driven to rise, so that the volume of the vacuum plating chamber 104 is increased. During coating, inert gases such as argon and the like are filled in the reflow chamber 103 in advance or vacuum is pumped according to different coating modes so as to meet the requirements of the coating modes such as cathode sputtering coating, evaporation coating and the like. Taking cathode sputtering coating and evaporation coating as examples:
when the coating is carried out by adopting a cathode sputtering mode, the bottom of the chamber partition plate 3 is provided with a cathode assembly, the bottom plate 2 is provided with an anode assembly, after the glass to be coated enters the coating chamber 1, the gate part 301 descends to close the front slit 101 and the rear slit 102, and the ports of the air pump 7 and the three-way electromagnetic valve 6, which are communicated with the coating chamber 104 and the air pump 7, are opened, so that the coating chamber 104 is vacuumized. Subsequently, the chamber partition 3 is driven to ascend by the elevating device 4 so that the particles of the coating material in the coating chamber 104 have a sufficient distribution space. Subsequently, the port of the three-way solenoid valve 6 connected to the suction pump 7 is closed, and the coating gas in the reflow chamber 103 is automatically replenished into the coating chamber 104 as the chamber partition 3 rises.
When the evaporation method is adopted for coating, a heating device and a vessel for placing the coating material or an input device for inputting the coating material are arranged in the bottom plate 2 or the coating chamber 104, and the ports of the air pump 7 and the three-way electromagnetic valve 6 which are communicated with the coating chamber 104 and the air pump 7 are opened, so that the coating chamber 104 is vacuumized. Subsequently, the chamber partition 3 is driven by the elevating device 4 to ascend, so that the volume of the coating chamber 104 is increased while the degree of vacuum is maintained.
The invention changes the volume of a coating chamber 104 for coating by the lifting of a chamber partition plate 3, the chamber partition plate 3 and a gate part 301 are driven to descend after glass to be coated enters a coating chamber 1, the volume of the coating chamber 104 is reduced, simultaneously, a front slit 101 and a rear slit 102 are sealed by the gate part 301, so that the coating chamber 104 sealed by the gate part 301 is vacuumized by an air suction pump 7, subsequently, the chamber partition plate 3 is driven to ascend, the volume of the coating chamber 104 is increased, the requirement of uniform and rapid diffusion of coating materials in the coating chamber 104 is met, in addition, when cathode sputtering coating is carried out, inert gas in a backflow chamber 103 enters the coating chamber 104 from an opened three-way electromagnetic valve 6 after the coating chamber 104 is sealed and the volume is increased, after the coating is finished, the chamber partition plate 3 is driven to descend, and the inert gas in the coating chamber 104 flows back to the backflow chamber 103, then, the air holes 302 connecting the reflow chamber 103 and the coating chamber 104 are closed by the three-way electromagnetic valve 6 to ensure the purity of the inert gas, thereby ensuring the quality of the glass coating.
The conveying device 15 comprises a rack 1502 installed with a plurality of conveying rollers 1501 in a rotating mode, a plurality of vertical frames 1503 located between adjacent conveying rollers 1501 are installed on two sides of the rack 1502 and located at two ends of a film coating chamber 1, the vertical frames 1503 on two sides are connected through lifting rollers 1504 arranged in a rotating mode, vertical grooves 1505 with one ends located between adjacent conveying rollers 1501 are formed in the vertical frames 1503, movable shafts 1506 connected with the lifting rollers 1503 are vertically installed in the vertical grooves 1505 in a sliding mode, jacking oil cylinders 1507 are installed on the outer sides, far away from the lifting rollers 1503, of the vertical frames 1503, and one ends, penetrating through the vertical grooves 1505, of the movable shafts 1506 are installed on the jacking oil cylinders 1507.
The plurality of conveying rollers 1501 are driven by external power or are inclined downwards to the conveying direction as a whole, the glass to be coated is conveyed to the coating chamber 1 by the plurality of conveying rollers 1501 at the front end in the conveying direction, and in the process, when the glass to be coated passes through the plurality of lifting rollers 1504 at the front end in the conveying direction, the plurality of lifting rollers 1504 positioned right below the glass to be coated are driven by the jacking oil cylinder 1507 to jack the glass to be coated to the same height as the front slit 101 and convey the glass to the coating chamber 1. The glass entering the coating chamber is intercepted by the gate part 301 descending along the chamber partition plate 3, and after the coating is finished, the gate part 301 ascends along the chamber partition plate 4 to simultaneously open the front slit 101 and the rear slit 102, so that the coated glass moves towards the rear slit 102 along the bottom inclined coating chamber 1 under the action of gravity, and meanwhile, the plurality of lifting rollers 1504 at the rear end in the conveying direction are lifted to receive the coated glass output by the coating chamber 1, and the coated glass falls onto the plurality of rollers at the rear end in the conveying direction through the descending of the plurality of lifting rollers 1504 after the coated glass is separated from the coating chamber 1.
The conveying rollers are matched with the lifting rollers which are arranged between the adjacent conveying rollers in a staggered mode and can ascend and descend, so that the coating chamber 1 with the sealed bottom is suitable for conveying glass to be coated and outputting the coated glass from the coating chamber 1.
In this embodiment, it is preferable that the plurality of feed rollers 1501, the plurality of lift rollers 1504, and the entire coating chamber 1 are arranged obliquely downward in the feed direction to automatically feed the glass by its own weight during the coating process, but the glass may be fed by other methods, for example, the feed rollers 1501 and the lift rollers 1504 are driven by a motor and a transmission system, and a belt conveyor or other devices are arranged in the coating chamber 1.
The top of the film coating chamber 1 is provided with a balance cylinder 8 communicated with the backflow chamber 103, and a piston 9 in sliding sealing fit with the inner wall of the balance cylinder 8 is arranged in the balance cylinder 8. When the air hole 302 is closed and the chamber partition 3 is driven to descend, the piston 9 at the upper end of the balancing cylinder 8 slides downward due to the reduction of the air pressure in the return chamber 103 to reduce the resistance of the downward movement of the chamber partition 3. And, the balance cylinder 8 is installed with a piston driving mechanism 10 for driving the piston 9 to reciprocate, after the cathode sputtering coating is finished, the piston driving mechanism 10 drives the piston 9 to move upwards, so that the inert gas in the coating chamber 104 is fully recovered to the backflow chamber 103, thereby avoiding the loss of the inert gas.
The existing film coating chamber 1 adopting cathode sputtering film coating inevitably leads to the situation that inert gas overflows the film coating chamber 1 in the process of glass entering and exiting, and because the volume of the existing film coating chamber 1 can not be adjusted, if the inert gas is sucked into a container for recycling before and after film coating, the defect of film coating efficiency is caused because the inert gas is more and the recycling speed is slow. Similarly, the conventional coating chamber 1 for evaporation coating has a large volume, and the efficiency of re-vacuuming after the inside of the chamber is filled with air is low, thereby achieving the efficiency of hard glass coating.
It should be noted that when sputtering is used for coating, a filter layer for filtering the vapor coating material should be disposed in the gas hole 302 to ensure the purity of the inert gas in the reflow chamber 103.
It is further optimized in the above embodiment that the first rubber sealing ring 11 is fixedly installed at the bottom of the gate portion 301, the top of the bottom plate 2 is located in the same plane as the bottoms of the front slit 101 and the rear slit 102, and two ends of the top of the bottom plate 2 are both provided with sealing grooves 201 adapted to the insertion of the first rubber sealing ring 11. The gate 301 is driven to descend until the first rubber sealing ring 11 is inserted into the sealing groove 201, and the sealing of the gate 301 to the coating chamber 104 is ensured by the cooperation of the first rubber sealing ring 11 and the sealing groove 201, so that the external air is further prevented from entering the vacuum coating chamber 104 under the action of the atmospheric pressure.
Preferably, the air hole 302 has an "L" shape, a top of the air hole 302 penetrates through a top of the gate portion 301, and a bottom of the air hole 302 penetrates through the gate portion 301 toward an inner wall of the chamber partition 3. The gas hole 302 arranged laterally at the bottom opening is beneficial to the inert gas to flow back and forth in the reflow chamber 103 and the coating chamber 104, and is beneficial to increasing the aperture at the bottom of the gas hole 302.
The sliding seal assembly 5 comprises an outer sealing ring 501 and an inner sealing ring 502 which are located on the same plane, the inner wall of the outer sealing ring 501 is in clearance fit with the outer wall of the inner sealing ring 502, the inner sealing ring 502 is fixedly installed on the outer wall of the gate portion 301, a linkage slot 5011 is formed in the inner wall, facing the inner sealing ring 502, of the outer sealing ring 501, and a linkage ring 503 which is inserted into the linkage slot 5011 and is in sealing fit with the slot wall of the linkage slot 5011 is installed on the outer wall, facing the outer sealing ring 501, of the inner sealing ring 502. The outer sealing ring 501 and the inner sealing ring 502 which are in clearance fit are used for avoiding that the sliding seal assembly 5 cannot keep the seal between the gate part 301 and the coating chamber 1 due to expansion caused by heat and contraction caused by cold, and avoiding that the gate part 301, the chamber partition plate 3, the outer sealing ring 501 and the inner sealing ring 502 are damaged due to extrusion caused by expansion of the outer sealing ring 501 and the inner sealing ring 502, so that the sealing effect and the service life of the sliding seal assembly 5 are ensured, and similarly, the depth of the linkage ring 503 inserted into the linkage slot 5011 is smaller than that of the linkage slot 5011.
The outer wall of the inner sealing ring 502 is sleeved with a second rubber sealing ring 12 which is abutted to the inner wall of the outer sealing ring 501, and the inner sealing ring 502 is embedded with the second rubber sealing ring 12 above and below the linkage ring 503, so that sealing between the outer sealing ring 501 and the inner sealing ring 502 is ensured, and gas is prevented from leaking from a gap between the linkage ring 503 and the linkage slot 5011.
In the above embodiment, it is further preferable that the groove walls of the top and bottom of the interlocking slot 5011 are respectively fitted with the third rubber packing 13 abutting against the interlocking ring 503, so as to further prevent the gas from leaking from the gap between the interlocking ring 503 and the interlocking slot 5011.
Preferably, the first rubber sealing ring 11, the second rubber sealing ring 12 and the third rubber sealing ring 13 are made of high-temperature resistant rubber materials so as to adapt to the high temperature of the evaporation coating.
In the embodiment, it is further optimized that the outer wall of the outer sealing ring 501 is provided with a plurality of clamping ring grooves 5012 which are vertically distributed at intervals, the clamping ring grooves 5012 are internally provided with sealing clamping rings 14, the sealing clamping rings 14 are provided with separating ports 1401 which separate the sealing clamping rings to adapt to thermal expansion and cold contraction, the outer sealing ring 501 is connected with the inner wall of the corresponding film coating chamber 1 in a sliding and sealing manner through the plurality of sealing clamping rings 14, the outer sealing ring 501 is internally provided with lubricating oil cavities 5013 which are positioned above the plurality of clamping ring grooves 5012, and the outer sealing ring 501 is provided with a plurality of capillary holes 5014 which communicate the plurality of clamping ring grooves 5012 and the lubricating oil cavities 5013.
The principle of the sealing snap ring 14 is the same as that of a piston ring for sealing a cylinder piston and a cylinder, a plurality of sealing snap rings 14 enter the snap ring groove 5012 through the capillary holes 5014 through lubricating oil in the lubricating oil cavity 5013, so that a layer of oil film is formed on the surface of the sealing snap ring 14 in the snap ring groove 5012, on one hand, the sealing snap rings 14 with the oil films are beneficial to sealing between the outer sealing ring 501 and the inner wall of the film coating chamber 1, and on the other hand, the existence of the oil films reduces friction between the sealing snap rings 14 and the inner wall of the film coating chamber 1, and is beneficial to prolonging the service life and sealing performance of the sealing snap rings 14.
It should be noted that the plurality of capillary holes 5014 in the same layer are distributed on the outer sealing ring 501 at intervals, and the capillary holes 5014 in two adjacent layers are distributed in a staggered manner in the horizontal direction, so as to avoid gas leakage caused by the fact that the plurality of layers of capillary holes 5014 are located in the same straight line, and gas enters the lubricating oil cavity 5013 through the plurality of layers of capillary holes 5014, so as to further improve the sealing property between the outer sealing ring 501 and the film coating chamber 1, and avoid excessive replenishment of the lubricating oil in the lubricating oil cavity 5013 into the multilayer snap ring slot 5012 due to increase of gas pressure.
The invention also provides an automatic glass coating method, which comprises the following steps:
s100, conveying the glass to be coated into a coating cavity of a coating chamber through a front slit at the front end of the coating chamber;
s200, after the glass to be coated is conveyed into the coating chamber, driving the chamber partition plate and the gate part to move downwards until the gate part seals the front slit and the rear slit, so that the volume of the coating chamber is reduced and the coating chamber is sealed;
s300, vacuumizing the sealed film coating chamber;
s400, driving a chamber partition plate to ascend so that the coating chamber has a volume beneficial to diffusion of a coating material during coating, and selecting to keep the vacuum of the coating chamber or pump inert gas into the coating chamber according to a coating mode;
s500, coating the glass to be coated in the coating chamber, and after the coating is finished, driving a chamber partition plate to descend and extracting and recovering inert gas in the coating chamber;
s600, the driving gate part rises to open the front slit and the rear slit, and the coated glass is output from the rear slit to the coating chamber.
The invention reduces the volume of the coating cavity before coating to facilitate the vacuum pumping of the coating cavity, drives the partition plate of the cavity to rise after the coating cavity is sealed, and keeps the vacuum of the coating cavity (evaporation coating) or pumps inert gases such as argon into the coating cavity (cathode sputtering coating) according to different coating modes, and after the coating is finished, avoids the defect of coating caused by the fact that the inert gases are oxidized when the inert gases are mixed with air during secondary coating by recovering the inert gases, thereby ensuring the stability of the coating quality.
The above embodiments are only exemplary embodiments of the present application, and are not intended to limit the present application, and the protection scope of the present application is defined by the claims. Various modifications and equivalents may be made by those skilled in the art within the spirit and scope of the present application and such modifications and equivalents should also be considered to be within the scope of the present application.
Claims (10)
1. An automatic glass coating system is characterized by comprising a conveying device (15) and a coating chamber (1) with a sealed bottom, wherein a chamber partition plate (3) driven to lift is installed in the coating chamber (1), the chamber partition plate (3) is in sliding sealing fit with the inner wall of the coating chamber (1) through a sliding sealing assembly (5), a coating chamber (104) with an adjustable volume is formed in the coating chamber (1) through the chamber partition plate (3), and a front slit (101) and a rear slit (102) for glass to pass through the coating chamber (104) are formed in the coating chamber (1);
the conveying device (15) conveys the glass to be coated into the coating chamber (104) through the front slit (101), two ends of the chamber partition plate (3) are respectively provided with a gate part (301) which is driven to vertically slide and is used for sealing the front slit (101) and the rear slit (102), the gate parts (301) seal the front slit (101) and the rear slit (102) after the chamber partition plate (3) driven to descend exhausts the air in the coating chamber (104), and the chamber partition plate (3) is driven to ascend after the front slit (101) and the rear slit (102) are sealed.
2. The automated glass coating system of claim 1, wherein the conveyor (15) comprises a frame (1502) rotatably mounted with a plurality of conveyor rollers (1501), a plurality of vertical frames (1503) positioned between adjacent conveying rollers (1501) are arranged at two sides of the rack (1502) and at two ends of the film coating chamber (1), the vertical frames (1503) at two sides are connected through lifting rollers (1504) which are rotatably arranged, the vertical frame (1503) is provided with a vertical groove (1505) with one end positioned between the adjacent conveying rollers (1501), a movable shaft (1506) connected with the lifting roller (1503) is vertically and slidably arranged in the vertical groove (1505), a jacking oil cylinder (1507) is arranged on the outer side of the vertical frame (1503) far away from the lifting roller (1503), one end of the movable shaft (1506) penetrating through the vertical groove (1505) is supported and installed on the jacking oil cylinder (1507).
3. The automatic glass coating system according to claim 1, wherein the gate part (301) protrudes from the bottom of the chamber partition plate (3), the height difference between the bottom surface of the gate part (301) and the bottom surface of the chamber partition plate (3) is not less than the thickness of the glass to be coated, a backflow chamber (103) is formed in the coating chamber (1) above the coating chamber (104), an air suction pump (7) and a three-way electromagnetic valve (6) are installed in the backflow chamber (103), an air hole (302) is formed in the chamber partition plate (3), the air hole (302) is connected with the air suction pump (7) through the three-way electromagnetic valve (6), the air suction pump (7) and the three-way electromagnetic valve (6) are opened after the gate part (301) of the front slit (101) and the rear slit (102) are sealed, so that the air is further exhausted by the air pump (7) after the coating chamber (104) is sealed.
4. An automatic glass coating system according to claim 3, characterized in that the top of the coating chamber (1) is provided with a balance cylinder (8) communicated with the backflow chamber (103), the balance cylinder (8) is internally provided with a piston (9) in sliding sealing fit with the inner wall of the balance cylinder, and the balance cylinder (8) is internally provided with a piston driving mechanism (10) for driving the piston (9) to reciprocate.
5. The automatic glass coating system of claim 1, wherein the sliding seal assembly (5) comprises an outer sealing ring (501) and an inner sealing ring (502) which are located in the same plane, the inner sealing ring (502) is fixedly installed on the outer wall of the brake part (301), a linkage slot (5011) is formed in the inner wall, facing the inner sealing ring (502), of the outer sealing ring (501), a linkage ring (503) inserted into the linkage slot (5011) is sleeved on the outer wall, facing the outer sealing ring (501), of the inner sealing ring (502), the depth of the linkage ring (503) inserted into the linkage slot (5011) is smaller than that of the linkage slot (5011), and the inner wall of the outer sealing ring (501) is in clearance fit with the outer wall of the inner sealing ring (502).
6. The automatic glass coating system of claim 5, wherein a second rubber sealing ring (12) abutting against the inner wall of the outer sealing ring (501) is sleeved on the outer wall of the inner sealing ring (502), the second rubber sealing ring (12) is embedded and installed on the inner sealing ring (502) above and below the linkage ring (503), and a third rubber sealing ring (13) abutting against the linkage ring (503) is embedded and installed on the groove wall of the top and the bottom of the linkage slot (5011).
7. The automatic glass coating system of claim 5, wherein a plurality of clamping ring grooves (5012) are formed in the outer wall of the outer sealing ring (501) and are distributed along the vertical interval, a sealing clamping ring (14) is installed in each clamping ring groove (5012), the sealing clamping ring (14) is provided with a fracture (1401) which is broken to adapt to expansion with heat and contraction with cold, the outer sealing ring (501) is connected with the inner wall of the coating chamber (1) in a sliding sealing mode through a plurality of the sealing clamping rings (14), a plurality of lubricating oil cavities (5013) above the clamping ring grooves (5012) are formed in the outer sealing ring (501), and a plurality of capillary holes (5014) which are communicated with the clamping ring grooves (5012) and the lubricating oil cavities (5013) are formed in the outer sealing ring (501).
8. The automatic glass coating system of claim 1, wherein a bottom plate (2) for supporting glass is installed in a lower end of the coating chamber (104), a first rubber sealing ring (11) is fixedly installed at the bottom of the gate portion (301), the top of the bottom plate (2) is located in the same plane with the bottom of the front slit (101) and the bottom of the rear slit (102), and two ends of the top of the bottom plate (2) are provided with sealing grooves (201) adapted to the insertion of the first rubber sealing ring (11).
9. An automated glass coating system according to claim 1, wherein the air hole (302) is "L" shaped, the top of the air hole (302) penetrates the top of the gate portion (301), and the bottom of the air hole (302) penetrates the gate portion (301) towards the inner wall of the chamber partition (3).
10. An automated glass coating process for use in any of claims 1-9, comprising:
s100, conveying the glass to be coated into a coating cavity of a coating chamber through a front slit at the front end of the coating chamber;
s200, after the glass to be coated is conveyed into the coating chamber, driving the chamber partition plate and the gate part to move downwards until the gate part seals the front slit and the rear slit, so that the volume of the coating chamber is reduced and the coating chamber is sealed;
s300, vacuumizing the sealed film coating chamber;
s400, driving a chamber partition plate to ascend so that the coating chamber has a volume beneficial to diffusion of a coating material during coating, and selecting to keep the vacuum of the coating chamber or pump inert gas into the coating chamber according to a coating mode;
s500, coating the glass to be coated in the coating chamber, driving the gate part to ascend after the coating is finished so as to open the front slit and the rear slit, and outputting the coated glass from the rear slit to the coating chamber.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114272829A (en) * | 2021-12-31 | 2022-04-05 | 扬州升阳电子有限公司 | Magnetic stirring device for preparing electrolyte of solid capacitor |
| CN115321830A (en) * | 2021-10-20 | 2022-11-11 | 江苏城乡建设职业学院 | Conductive glass coating method and device with self-repairing function |
| CN115321832A (en) * | 2022-10-17 | 2022-11-11 | 烟台沃泰特新材料科技有限责任公司 | Glass surface treatment modification device |
| CN115818969A (en) * | 2022-11-30 | 2023-03-21 | 青岛融合智能科技有限公司 | Display cover plate glass coating device |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060278164A1 (en) * | 2005-06-10 | 2006-12-14 | Petrach Philip M | Dual gate isolating maintenance slit valve chamber with pumping option |
| JP2007100219A (en) * | 2007-01-04 | 2007-04-19 | Canon Anelva Corp | High temperature reflow sputtering system and high temperature reflow sputtering method |
| JP2008045219A (en) * | 2007-10-22 | 2008-02-28 | Canon Anelva Corp | Reflow sputtering method and reflow sputtering system |
| US20120009348A1 (en) * | 2009-01-12 | 2012-01-12 | Xia Shenjiang | Method and apparatus for continuous thin film deposition process in vacuum |
| CN103663996A (en) * | 2013-11-20 | 2014-03-26 | 中国南玻集团股份有限公司 | Glass film coating system |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| CN206607309U (en) * | 2017-03-03 | 2017-11-03 | 吴江南玻华东工程玻璃有限公司 | A kind of magnetic-controlled sputtering coating equipment vacuum chamber return-air guiding device |
| CN208632637U (en) * | 2018-07-17 | 2019-03-22 | 北京铂阳顶荣光伏科技有限公司 | Sputtering coating equipment |
| CN110004427A (en) * | 2019-05-14 | 2019-07-12 | 南京汇金锦元光电材料有限公司 | Flexible continuity magnetron sputtering deposition plating work chamber partition method |
| CN209155371U (en) * | 2018-09-28 | 2019-07-26 | 天津南玻节能玻璃有限公司 | A kind of coating wire transition buffer room filter device |
| CN110344002A (en) * | 2019-06-11 | 2019-10-18 | 惠科股份有限公司 | A kind of evaporation coating device and evaporation coating method |
| CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
-
2020
- 2020-12-31 CN CN202011640192.4A patent/CN112759274B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060278164A1 (en) * | 2005-06-10 | 2006-12-14 | Petrach Philip M | Dual gate isolating maintenance slit valve chamber with pumping option |
| JP2007100219A (en) * | 2007-01-04 | 2007-04-19 | Canon Anelva Corp | High temperature reflow sputtering system and high temperature reflow sputtering method |
| JP2008045219A (en) * | 2007-10-22 | 2008-02-28 | Canon Anelva Corp | Reflow sputtering method and reflow sputtering system |
| US20120009348A1 (en) * | 2009-01-12 | 2012-01-12 | Xia Shenjiang | Method and apparatus for continuous thin film deposition process in vacuum |
| WO2014089948A1 (en) * | 2012-12-14 | 2014-06-19 | 广东志成冠军集团有限公司 | Multi-functional continuous magneto-controlled sputter coating device |
| US20150136598A1 (en) * | 2013-11-20 | 2015-05-21 | Csg Holding Co., Ltd. | Glass Coating System |
| CN103663996A (en) * | 2013-11-20 | 2014-03-26 | 中国南玻集团股份有限公司 | Glass film coating system |
| CN206607309U (en) * | 2017-03-03 | 2017-11-03 | 吴江南玻华东工程玻璃有限公司 | A kind of magnetic-controlled sputtering coating equipment vacuum chamber return-air guiding device |
| CN208632637U (en) * | 2018-07-17 | 2019-03-22 | 北京铂阳顶荣光伏科技有限公司 | Sputtering coating equipment |
| CN209155371U (en) * | 2018-09-28 | 2019-07-26 | 天津南玻节能玻璃有限公司 | A kind of coating wire transition buffer room filter device |
| CN110004427A (en) * | 2019-05-14 | 2019-07-12 | 南京汇金锦元光电材料有限公司 | Flexible continuity magnetron sputtering deposition plating work chamber partition method |
| CN110344002A (en) * | 2019-06-11 | 2019-10-18 | 惠科股份有限公司 | A kind of evaporation coating device and evaporation coating method |
| CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115321830A (en) * | 2021-10-20 | 2022-11-11 | 江苏城乡建设职业学院 | Conductive glass coating method and device with self-repairing function |
| CN114272829A (en) * | 2021-12-31 | 2022-04-05 | 扬州升阳电子有限公司 | Magnetic stirring device for preparing electrolyte of solid capacitor |
| CN114272829B (en) * | 2021-12-31 | 2022-11-08 | 扬州升阳电子有限公司 | Magnetic stirring device for preparing electrolyte of solid capacitor |
| CN115321832A (en) * | 2022-10-17 | 2022-11-11 | 烟台沃泰特新材料科技有限责任公司 | Glass surface treatment modification device |
| CN115818969A (en) * | 2022-11-30 | 2023-03-21 | 青岛融合智能科技有限公司 | Display cover plate glass coating device |
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Address after: No. 2 Fengxiang East Road, Shuinan Town, Zizhong County, Neijiang City, Sichuan Province, 641299 Patentee after: China National Building Materials Yaohua (Neijiang) Energy Saving Glass Co.,Ltd. Country or region after: China Address before: 641200 No.2, Fengxiang East Road, Shuinan Town, Zizhong County, Neijiang City, Sichuan Province Patentee before: CNBM (NEIJIANG) GLASS HI-TECH CO.,LTD. Country or region before: China |