CN112705423B - Intelligent chip manufacturing equipment and manufacturing method - Google Patents

Intelligent chip manufacturing equipment and manufacturing method Download PDF

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Publication number
CN112705423B
CN112705423B CN202110064088.3A CN202110064088A CN112705423B CN 112705423 B CN112705423 B CN 112705423B CN 202110064088 A CN202110064088 A CN 202110064088A CN 112705423 B CN112705423 B CN 112705423B
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Prior art keywords
isolation structure
plate
isolation
ring body
frame body
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CN202110064088.3A
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CN112705423A (en
Inventor
梁艳凤
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Fano Information Industry Co ltd
Tang Zhilin
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Jinan Fanuo Trading Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1015Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target
    • B05C11/1021Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to a conditions of ambient medium or target, e.g. humidity, temperature ; responsive to position or movement of the coating head relative to the target responsive to presence or shape of target
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention belongs to the technical field of chip manufacturing, and particularly relates to intelligent chip manufacturing equipment which comprises a motor, a frame body, a dispensing head, a control switch, a chip centering mechanism, a screw rod, a threaded sleeve and a guide sleeve, wherein a first isolation structure, a second isolation structure and a third isolation structure which are designed by the invention are distributed from top to bottom, and whether three isolation channels are used for dispensing glue or not can be controlled by controlling the movement of the three isolation structures; thereby being suitable for gluing chips with different sizes; according to the invention, after the corresponding clip-shaped channel of the isolation structure is closed, the pneumatic module applies work to blow air into the isolation structure, and the air blows glue solution on the lower side of the isolation structure after passing through the isolation structure to flow out; the glue solution is blown out by air, so that the glue solution can be prevented from being stuck in the return channel, the wire drawing phenomenon is caused, and the gluing can be quickly finished.

Description

Intelligent chip manufacturing equipment and manufacturing method
Technical Field
The invention belongs to the technical field of chip manufacturing, and particularly relates to intelligent chip manufacturing equipment.
Background
In the chip packaging, the chip needs to be packaged in the base material, and at this time, a dispenser needs to be used. When dispensing is carried out on chips with different sizes, generally used glue dispensers are different in model; namely, a certain dispensing machine, especially for a dispensing head, can dispense chips of only one size; for the dispensing machines of chips with different sizes, the dispensing heads are generally replaced to adapt to the chips with different sizes or the small dispensing heads are used for dispensing the chips with tracks, and the larger chip tracks are more.
For the dispensing of the chips with different sizes, the dispensing head is replaced or different tracks are needed to be taken; when the chips with different sizes are switched to dispense, the dispensing efficiency is low.
The invention designs a dispenser, which can efficiently complete dispensing work aiming at chips with different sizes; particularly, when different chips are frequently switched, it is necessary to ensure high dispensing efficiency.
The invention designs intelligent chip manufacturing equipment to solve the problems.
Disclosure of Invention
In order to solve the defects in the prior art, the invention discloses intelligent chip manufacturing equipment which is realized by adopting the following technical scheme.
An intelligent chip manufacturing equipment which characterized in that: the automatic glue dispensing device comprises a motor, a frame body, a glue dispensing head, a control switch, a chip centering mechanism, a screw rod, a threaded sleeve and a guide sleeve, wherein the frame body consists of a transverse plate and a vertical plate; the motor is fixedly arranged on the vertical plate, and the upper end of the screw rod is arranged on an output shaft of the motor through a coupler; the guide sleeve is fixedly arranged on the vertical plate, the thread sleeve is slidably arranged on the guide sleeve, and the thread sleeve is in thread fit with the screw; the dispensing head is arranged at the lower end of the threaded sleeve.
The dispensing head consists of a shell, a first ring body, a second ring body and a middle separation body; the middle isolating body, the second ring body and the first ring body are fixedly arranged in the shell through the connecting blocks in sequence from inside to outside; the shell, the first ring body, the second ring body and the middle separator form three clip-shaped channels with equal cross section width; the upper end of the shell is connected with the rubber box through a rubber tube.
The dispensing head is provided with a control switch; the outer side of the dispensing head is fixedly arranged on the pneumatic module.
The control switch comprises a first isolation structure, a second isolation structure and a third isolation structure; the first isolation structure, the second isolation structure and the third isolation structure are respectively and correspondingly arranged in three clip-shaped channels formed by the shell, the first ring body, the second ring body and the middle isolation body in a sliding manner from top to bottom; the pneumatic module controls the sliding of the first isolation structure, the second isolation structure and the third isolation structure through three pneumatic push rods respectively; the first isolation structure, the second isolation structure and the third isolation structure are all hollow structures, and air outlet holes are formed in the lower sides of the first isolation structure, the second isolation structure and the third isolation structure; the first isolation structure, the second isolation structure and the third isolation structure are connected with the pneumatic module through air pipes.
And a chip centering mechanism for centering the chip is arranged on the transverse plate of the frame body.
As a further improvement of the technology, the transverse plate of the frame body is provided with two sliding grooves which are obliquely distributed and are symmetrical to each other.
The chip centering mechanism comprises a gear, a V-shaped strip, a rack, a servo motor and a motor support, wherein the servo motor is fixedly arranged on the lower side of a transverse plate of the frame body through the motor support; the gear is fixedly arranged on an output shaft of the servo motor; the two V-shaped strips are slidably arranged on the upper side of the transverse plate of the frame body through two sliding grooves; one end of each of the two racks is fixedly arranged at the lower side of each of the two V-shaped strips and is positioned at the lower side of the transverse plate of the frame body, the two racks are respectively meshed with the gear, and the two racks are positioned at two sides of the gear.
As a further improvement of the technology, a plurality of guide support plates which play a role in guiding and supporting the meshed ends of the two racks and the gear are arranged on the lower side of the transverse plate of the frame body.
As a further improvement of the technology, the motor is arranged on a vertical plate of the frame body through a fixing plate; the guide sleeve is fixedly arranged on the vertical plate of the frame body through a first support; two guide grooves are axially and uniformly formed in the inner circular surface of the guide sleeve, two guide blocks are circumferentially and uniformly arranged on the outer circular surface of the threaded sleeve, and the threaded sleeve is arranged on the guide sleeve through the sliding fit of the two guide blocks and the two guide grooves.
As a further improvement of the technology, the outer wall surface of the dispensing head shell is provided with a circular plate, the upper side of the circular plate is provided with a U-shaped plate, and the upper end of the U-shaped plate is fixedly provided with the lower side of the threaded sleeve.
As a further improvement of the technology, the pneumatic module is mounted on one side of the circular plate through a second support; one end of each pneumatic push rod is vertically and uniformly arranged on the second support, and the three pneumatic push rods are respectively connected with the pneumatic module through air pipes.
As a further improvement of the present technology, the first isolation structure, the second isolation structure, and the third isolation structure have the same structure but different sizes.
The first isolation structure comprises a hollow body and a connecting rod, wherein the lower side of the hollow body is provided with uniformly distributed air outlets; the connecting rod is of a hollow structure, one end of the connecting rod is arranged on the clip body, and the connecting rod is communicated with the clip body; the other end of the connecting rod is provided with an air inlet which is connected with the pneumatic module through an air pipe.
As a further improvement of the technology, the inner wall of the shell and the outer wall of the first ring body are provided with communicated first mounting grooves, and the wall surface of the inner wall of the shell, which is not provided with the first mounting groove, is provided with a first supporting groove communicated with the first mounting groove on the shell; the clip body of the first isolation structure is slidably arranged in the first mounting groove and the first supporting groove; the connecting rod of the first isolation structure penetrates out of the shell to be connected with the output end of one of the three pneumatic push rods.
The inner wall of the first ring body and the outer wall of the second ring body are provided with communicated second mounting grooves, and the wall surface of the inner wall of the first ring body, which is not provided with the second mounting grooves, is provided with a second supporting groove communicated with the second mounting grooves on the first ring body; the clip body of the second isolation structure is slidably arranged in the second mounting groove and the second support groove; and the connecting rod of the second isolation structure sequentially penetrates through the first annular body and the shell to be connected with the output end of one of the three pneumatic push rods.
The inner wall of the second ring body and the outer wall of the middle separation body are provided with communicated third mounting grooves, and the wall surface of the inner wall of the second ring body, which is not provided with the third mounting grooves, is provided with a third supporting groove communicated with the third mounting grooves on the second ring body; the clip body of the third isolation structure is slidably arranged in the third mounting groove and the third supporting groove; and the connecting rod of the third isolation structure sequentially penetrates through the second ring body, the first ring body and the shell to be connected with the output end of one of the three pneumatic push rods.
The single-side width of the first isolation structure is larger than the single-side width of a clip-shaped channel formed by the inner wall of the shell and the first ring body; the single-side width of the second isolation structure is greater than the single-side width of a clip-shaped channel formed by the first ring body and the second ring body; the single-sided width of the third isolation structure is greater than the single-sided width of the clip-shaped channel formed by the second ring body and the intermediate isolation body.
As a further improvement of the technology, the inner side of the circle plate provided with the dispensing head is provided with a heating layer.
As a further improvement of the technology, the shell, the first ring body, the second ring body and the middle isolation body are all internally provided with a heating layer.
Compared with the traditional chip manufacturing technology, the design of the invention has the following beneficial effects:
1. the first isolation structure, the second isolation structure and the third isolation structure are distributed from top to bottom, and whether the three isolation channels are glued or not can be controlled by controlling the movement of the three isolation structures; thereby being suitable for gluing chips with different sizes.
2. According to the invention, after the corresponding clip-shaped channel of the isolation structure is closed, the pneumatic module applies work to blow air into the isolation structure, and the air blows glue solution on the lower side of the isolation structure after passing through the isolation structure to flow out; the glue solution is blown out by air, so that the glue solution can be prevented from being stuck in the return channel, the wire drawing phenomenon is caused, and the gluing can be quickly finished.
Drawings
Fig. 1 is an external view of an entire part.
FIG. 2 is a schematic view of a chip centering mechanism distribution.
Fig. 3 is a frame structure diagram.
Fig. 4 is a schematic structural view of a chip centering mechanism.
FIG. 5 is a schematic view of a threaded sleeve and screw installation.
Fig. 6 is a schematic view of the dispensing head installation.
Fig. 7 is a schematic view of a pneumatic ram distribution.
Fig. 8 is a schematic view of the dispensing head structure.
Figure 9 is a schematic view of a connection block installation.
Fig. 10 is a schematic view of a first spacer structure installation.
Fig. 11 is a schematic view of the distribution of the first mounting groove and the first supporting groove.
Fig. 12 is a schematic view of a second spacer structure installation.
Fig. 13 is a schematic view of the distribution of the second mounting groove and the second support groove.
Fig. 14 is a schematic view of a third insulation installation.
Fig. 15 is a schematic view showing the distribution of the third mounting grooves and the third supporting grooves.
Fig. 16 is a schematic view of a first isolation structure.
Number designation in the figures: 1. a motor; 2. a frame body; 3. dispensing a glue head; 4. a control switch; 5. a chip centering mechanism; 6. a chute; 7. a gear; 8. a V-shaped strip; 9. a rack; 10. a guide support plate; 11. a servo motor; 12. supporting a motor; 13. a fixing plate; 14. a guide sleeve; 15. a U-shaped plate; 16. a plate return; 17. a first support; 18. a guide groove; 19. a guide block; 20. a threaded sleeve; 21. a screw; 22. a second support; 23. a pneumatic module; 24. a pneumatic push rod; 25. a housing; 26. a first ring body; 27. a second ring body; 28. an intermediate separator; 29. connecting blocks; 30. a first mounting groove; 31. a first support groove; 32. a second isolation structure; 33. a second mounting groove; 34. a second support groove; 35. a third isolation structure; 36. a third mounting groove; 37. a third support groove; 38. an air outlet; 39. a connecting rod; 40. an air inlet; 41. a first isolation structure; 42. and (5) returning the molded body.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples or figures are illustrative of the present invention and are not intended to limit the scope of the present invention.
As shown in fig. 1, the automatic glue dispensing device comprises a motor 1, a frame body 2, a glue dispensing head 3, a control switch 4, a chip centering mechanism 5, a screw rod 21, a threaded sleeve 20 and a guide sleeve 14, wherein as shown in fig. 3, the frame body 2 consists of a transverse plate and a vertical plate; as shown in fig. 1, the motor 1 is fixedly mounted on a vertical plate, and as shown in fig. 5, the upper end of the screw 21 is mounted on the output shaft of the motor 1 through a coupling; the guide sleeve 14 is fixedly arranged on a vertical plate, the thread sleeve 20 is slidably arranged on the guide sleeve 14, and the thread sleeve 20 is in thread fit with the screw 21; the dispensing head 3 is mounted on the lower end of the threaded sleeve 20.
The motor 1 works to drive the screw 21 to rotate, the threaded sleeve 20 is slidably mounted on the guide sleeve 14, the guide sleeve 14 is fixedly mounted on the frame body 2, the threaded sleeve 20 can only slide up and down and cannot rotate under the action of the guide sleeve 14, the threaded sleeve 20 is in threaded fit with the screw 21, the screw 21 rotates to drive the threaded sleeve 20 to move up and down along the axis of the threaded sleeve, and the threaded sleeve 20 slides to drive the dispensing head 3 to move up and down.
As shown in fig. 8, the dispensing head 3 is composed of a housing 25, a first ring 26, a second ring 27, and an intermediate spacer 28; as shown in fig. 9, the middle spacer 28, the second ring 27 and the first ring 26 are fixedly mounted in the housing 25 through the connecting block 29 in sequence from inside to outside; the shell 25, the first ring body 26, the second ring body 27 and the intermediate isolation body 28 form three clip-shaped channels with equal cross-sectional widths; the upper end of the shell 25 is connected with the rubber box through a rubber tube. The function of the clip-shaped channel is to allow the glue to flow out in a designated area. After flowing in from the upper end of the shell 25, the glue solution is accumulated on the upper sides of the first ring body 26, the second ring body 27 and the middle separation body 28 in the shell and then flows out through the three clip-shaped channels.
As shown in fig. 1, the dispensing head 3 is provided with a control switch 4; as shown in fig. 6, the outer side of the dispensing head 3 is fixedly mounted on the pneumatic module 23.
As shown in fig. 10, 12 and 14, the control switch 4 includes a first isolation structure 41, a second isolation structure 32 and a third isolation structure 35; the first isolation structure 41, the second isolation structure 32 and the third isolation structure 35 are respectively installed in three clip-shaped channels formed by the shell 25, the first ring body 26, the second ring body 27 and the intermediate isolation body 28 in a one-to-one corresponding sliding manner from top to bottom; as shown in fig. 6 and 7, the pneumatic module 23 controls the sliding of the first isolation structure 41, the second isolation structure 32 and the third isolation structure 35 through three pneumatic push rods 24; as shown in fig. 16, the first isolation structure 41, the second isolation structure 32 and the third isolation structure 35 are all hollow structures, and the lower side thereof is provided with an air outlet 38; the first, second and third isolation structures 41, 32, 35 are connected to the pneumatic module 23 by air pipes.
The sliding of the first isolation structure 41, the second isolation structure 32 and the third isolation structure 35 can control the opening or the closing of three channels formed by the housing 25, the first ring body 26, the second ring body 27 and the intermediate isolation body 28.
The first isolation structure 41, the second isolation structure 32 and the third isolation structure 35 designed by the invention are distributed from top to bottom, so that the structural arrangement is convenient on one hand, and the heights of the lower sides of the corresponding isolation structures in three loop-shaped channels formed by the shell 25, the first ring body 26, the second ring body 27 and the intermediate isolation body 28 are sequentially increased from inside to outside on the other hand; after the glue solution is filled in the back-shaped channels, the glue solution in unit length at the lower side of the corresponding isolation structure in the three back-shaped channels is sequentially increased from inside to outside, so that the glue solution can be conveniently applied to chips with different sizes. In actual use, the chips can be simultaneously glued through two or three groups of the circular channels, and the gluing amount of the chips is increased. The problem that glue liquid is extruded out of the periphery of the chip when the chip and the card are pressed is further considered, when chips with different sizes are glued through a single clip channel with corresponding size, the side length of the designed clip channel is smaller than that of the corresponding chip; and the larger the chip, the smaller the side length of the corresponding rectangular channel is.
As shown in fig. 2, a chip centering mechanism 5 for centering the chip is mounted on the horizontal plate of the frame body 2.
As shown in fig. 3, the horizontal plate of the frame body 2 is provided with two chutes 6 which are obliquely distributed and symmetrical to each other.
As shown in fig. 4, the chip centering mechanism 5 includes a gear 7, a V-shaped bar 8, a rack 9, a servo motor 11, and a motor support 12, wherein as shown in fig. 2, the servo motor 11 is fixedly mounted on the lower side of the horizontal plate of the frame body 2 through the motor support 12; the gear 7 is fixedly arranged on an output shaft of the servo motor 11; the two V-shaped strips 8 are slidably arranged on the upper side of the transverse plate of the frame body 2 through the two sliding chutes 6; as shown in fig. 4, one end of each of the two racks 9 is fixedly mounted on the lower side of the two V-shaped strips 8 and is located on the lower side of the horizontal plate of the frame body 2, the two racks 9 are respectively engaged with the gear 7, and the two racks 9 are located on two sides of the gear 7.
As shown in fig. 2 and 4, a plurality of guide support plates 10 for guiding and supporting the ends of the two racks 9 engaged with the gear 7 are installed on the lower side of the horizontal plate of the frame body 2.
As shown in fig. 5, the motor 1 is mounted on the vertical plate of the frame body 2 through a fixing plate 13; the guide sleeve 14 is fixedly arranged on the vertical plate of the frame body 2 through a first support 17; two guide grooves 18 are axially and uniformly formed in the inner circular surface of the guide sleeve 14, two guide blocks 19 are circumferentially and uniformly arranged on the outer circular surface of the threaded sleeve 20, and the threaded sleeve 20 is arranged on the guide sleeve 14 through the sliding fit of the two guide blocks 19 and the two guide grooves 18.
As shown in fig. 6, a return plate 16 is mounted on the outer wall surface of the housing 25 of the dispensing head 3, a U-shaped plate 15 is mounted on the upper side of the return plate 16, and the upper end of the U-shaped plate 15 is fixedly mounted on the lower side of the threaded sleeve 20.
As shown in fig. 6, the pneumatic module 23 is mounted on one side of the return plate 16 by means of a second support 22; one ends of the three pneumatic push rods 24 are uniformly arranged on the second support 22 up and down, and the three pneumatic push rods 24 are respectively connected with the pneumatic module 23 through air pipes.
The first isolation structure 41, the second isolation structure 32, and the third isolation structure 35 have the same structure but different sizes.
As shown in fig. 16, the first isolation structure 41 includes a hollow molded body 42 and a connecting rod 39, wherein the hollow molded body 42 has a lower side provided with uniformly distributed air outlets 38; the connecting rod 39 is of a hollow structure, one end of the connecting rod 39 is installed on the back-shaped body 42, and the connecting rod 39 is communicated with the back-shaped body 42; the other end of the connecting rod 39 has an air inlet 40, and the air inlet 40 is connected with the pneumatic module 23 through an air pipe.
As shown in fig. 11, the inner wall of the housing 25 and the outer wall of the first ring 26 are provided with a first mounting groove 30, and the wall surface of the inner wall of the housing 25, which is not provided with the first mounting groove 30, is provided with a first supporting groove 31 communicated with the first mounting groove 30 provided on the housing 25; as shown in fig. 10, the loop body 42 of the first partition structure 41 is slidably installed in the first installation groove 30 and the first support groove 31; as shown in fig. 6, the connecting rod 39 of the first isolating structure 41 passes through the housing 25 and is connected to the output end of one 24 of the three pneumatic push rods 24.
The single-sided width of the first isolation structure 41 is greater than the single-sided width of the clip-shaped channel formed by the inner wall of the housing 25 and the first ring body 26; the single-sided width of the second isolation structure 32 is greater than the single-sided width of the clip-shaped channel formed by the first ring body 26 and the second ring body 27; the single-sided width of the third isolation structure 35 is greater than the single-sided width of the clip-shaped channel formed by the second ring 27 and the middle spacer 28.
The first mounting groove 30 is the position where the first isolation mechanism is located after the corresponding clip channel is opened by sliding; the first supporting groove 31 is designed to support and isolate the upper and lower regions of the first isolation structure 41 by the first supporting groove 31 after the first isolation structure 41 closes the corresponding channel.
As shown in fig. 13, the inner wall of the first ring 26 and the outer wall of the second ring 27 are provided with second mounting grooves 33, and the wall of the inner wall of the first ring 26, which is not provided with the second mounting grooves 33, is provided with second supporting grooves 34 communicated with the second mounting grooves 33 formed in the first ring 26; as shown in fig. 12, the loop body 42 of the second partition structure 32 is slidably installed in the second installation groove 33 and the second support groove 34; as shown in fig. 6, the connecting rod 39 of the second isolating structure 32 passes through the first annular body and the housing 25 in sequence and is connected to the output end of one 24 of the three pneumatic push rods 24.
The second mounting groove 33 is the position where the second isolation mechanism is located after the corresponding clip channel is opened by sliding; the second supporting groove 34 is designed to support and isolate the upper and lower regions of the second isolation structure 32 for the second isolation structure 32 after the second isolation structure 32 closes the corresponding channel.
As shown in fig. 15, the inner wall of the second ring 27 and the outer wall of the middle spacer 28 are provided with a third mounting groove 36 which is communicated with each other, and the wall surface of the inner wall of the second ring 27 which is not provided with the third mounting groove 36 is provided with a third supporting groove 37 which is communicated with the third mounting groove 36 provided on the second ring 27; as shown in fig. 14, the loop body 42 of the third partition structure 35 is slidably mounted in the third mounting groove 36 and the third support groove 37; as shown in fig. 6, the connecting rod 39 of the third isolating structure 35 sequentially passes through the second ring 27, the first ring and the housing 25 to be connected to the output end of one 24 of the three pneumatic push rods 24.
The third mounting groove 36 is the position where the third isolation mechanism is located after the corresponding clip channel is opened by sliding; the third supporting groove 37 is designed to support and isolate the upper and lower regions of the third isolation structure 35 by the third supporting groove 37 after the third isolation structure 35 closes the corresponding channel.
The single-sided width of the first isolation structure 41 is greater than the single-sided width of the clip-shaped channel formed by the inner wall of the housing 25 and the first ring body 26; the single-sided width of the second isolation structure 32 is greater than the single-sided width of the clip-shaped channel formed by the first ring body 26 and the second ring body 27; the single-sided width of the third isolation structure 35 is greater than the single-sided width of the clip-shaped channel formed by the second ring 27 and the middle spacer 28.
The inner side of the circular plate 16 provided with the dispensing head 3 is provided with a heating layer.
The housing 25, the first ring body 26, the second ring body 27, and the middle isolation body 28 are all provided with a heating layer therein.
The glue cavity of the glue dispenser is provided with a pump body structure for extruding glue solution, so that the glue solution can conveniently flow into the glue dispensing head 3.
The chip is placed and grabbed by the traditional manipulator technology.
The heating layer is designed to heat the glue solution flowing through the three return channels to ensure that the glue solution flows out smoothly.
The specific working process is as follows: when the apparatus designed by the present invention is used, in the initial state, the three clip-shaped channels formed by the casing 25, the first ring 26, the second ring 27, and the intermediate partition 28 are all in an open state; then, the chip is placed between the two V-shaped strips 8 on the upper side of the transverse plate of the frame body 2; afterwards, servo motor 11 receives and begins work behind the signal of chip putting in diaphragm upside, and servo motor 11 work drives gear 7 rotatory, and two racks 9 of gear 7 rotary drive slide, and two racks 9 slide and drive two V-arrangement strips 8 and draw close to the centre along two spouts 6, after two V-arrangement strip slip in-process contact with the chip, will promote the chip and remove, finally promote the intermediate position with the chip, and on this position, the chip just in time aligns with dispensing head 3.
After the chip is pushed to the middle, the pneumatic module 23 is controlled to drive the three pneumatic push rods 24 to work according to the size of the chip, and the corresponding isolation structures are controlled to close the corresponding clip-shaped channels; after the corresponding return channel of the isolation structure is closed, the pneumatic module 23 applies work to blow air into the isolation structure, the air flows out from the air outlet at the lower side after passing through the isolation structure, and the glue solution at the lower side of the isolation structure is blown to flow out; the glue solution is blown out by air, so that the glue solution can be prevented from being stuck in the return channel and the phenomenon of wire drawing can be prevented.
According to the invention, the servo motor 11 drives the gear 7, the rack 9 and the V-shaped strip 8 to center the chip, the position of the chip is always under the dispensing head 3 after centering, the size of the chip is identified according to the input signal of the servo motor 11 after centering is finished, and the pneumatic module 23 is controlled according to the size signal to drive the three isolation structures to move by adopting the existing control technology. The size of the chip after centering can also be identified by installing a sensor in the chip centering mechanism 5. The invention only discloses the structure of the dispensing head 3 and the execution structure whether the clip channel is closed or not, and the specific proportional relation of the control element and the structure can be flexibly selected according to the actual situation.

Claims (8)

1. An intelligent chip manufacturing equipment which characterized in that: the automatic glue dispensing device comprises a motor, a frame body, a glue dispensing head, a control switch, a chip centering mechanism, a screw rod, a threaded sleeve and a guide sleeve, wherein the frame body consists of a transverse plate and a vertical plate; the motor is fixedly arranged on the vertical plate, and the upper end of the screw rod is arranged on an output shaft of the motor through a coupler; the guide sleeve is fixedly arranged on the vertical plate, the thread sleeve is slidably arranged on the guide sleeve, and the thread sleeve is in thread fit with the screw; the dispensing head is arranged at the lower end of the threaded sleeve;
the dispensing head consists of a shell, a first ring body, a second ring body and a middle separation body; the middle isolating body, the second ring body and the first ring body are fixedly arranged in the shell through the connecting blocks in sequence from inside to outside; the shell, the first ring body, the second ring body and the middle separator form three clip-shaped channels with equal cross section width; the upper end of the shell is connected with the rubber box through a rubber tube;
the dispensing head is provided with a control switch; the outer side of the dispensing head is fixedly arranged on the pneumatic module;
the control switch comprises a first isolation structure, a second isolation structure and a third isolation structure; the first isolation structure, the second isolation structure and the third isolation structure are respectively and correspondingly arranged in three clip-shaped channels formed by the shell, the first ring body, the second ring body and the middle isolation body in a sliding manner from top to bottom; the pneumatic module controls the sliding of the first isolation structure, the second isolation structure and the third isolation structure through three pneumatic push rods respectively; the first isolation structure, the second isolation structure and the third isolation structure are all hollow structures, and air outlet holes are formed in the lower sides of the first isolation structure, the second isolation structure and the third isolation structure; the first isolation structure, the second isolation structure and the third isolation structure are connected with the pneumatic module through air pipes;
and a chip centering mechanism for centering the chip is arranged on the transverse plate of the frame body.
2. The smart chip manufacturing apparatus according to claim 1, wherein: the transverse plate of the frame body is provided with two chutes which are obliquely distributed and are symmetrical to each other;
the chip centering mechanism comprises a gear, a V-shaped strip, a rack, a servo motor and a motor support, wherein the servo motor is fixedly arranged on the lower side of a transverse plate of the frame body through the motor support; the gear is fixedly arranged on an output shaft of the servo motor; the two V-shaped strips are slidably arranged on the upper side of the transverse plate of the frame body through two sliding grooves; one end of each of the two racks is fixedly arranged at the lower side of each of the two V-shaped strips and is positioned at the lower side of the transverse plate of the frame body, the two racks are respectively meshed with the gear, and the two racks are positioned at two sides of the gear.
3. The smart chip manufacturing apparatus according to claim 2, wherein: a plurality of guide support plates which play a role in guiding and supporting the meshed ends of the two racks and the gear are arranged on the lower side of the transverse plate of the frame body.
4. The smart chip manufacturing apparatus according to claim 1, wherein: the motor is arranged on the vertical plate of the frame body through the fixing plate; the guide sleeve is fixedly arranged on the vertical plate of the frame body through a first support; two guide grooves are axially and uniformly formed in the inner circular surface of the guide sleeve, two guide blocks are circumferentially and uniformly arranged on the outer circular surface of the threaded sleeve, and the threaded sleeve is arranged on the guide sleeve through the sliding fit of the two guide blocks and the two guide grooves.
5. The smart chip manufacturing apparatus according to claim 1, wherein: the outer wall surface of the dispensing head shell is provided with a mould returning plate, the upper side of the mould returning plate is provided with a U-shaped plate, and the upper end of the U-shaped plate is fixedly provided with the lower side of a threaded sleeve.
6. The smart chip manufacturing apparatus according to claim 5, wherein: the pneumatic module is arranged on one side of the circular plate through a second support; one end of each pneumatic push rod is vertically and uniformly arranged on the second support, and the three pneumatic push rods are respectively connected with the pneumatic module through air pipes.
7. The smart chip manufacturing apparatus according to claim 1, wherein: the first isolation structure, the second isolation structure and the third isolation structure have the same structure and are different in size;
the first isolation structure comprises a hollow body and a connecting rod, wherein the lower side of the hollow body is provided with uniformly distributed air outlets; the connecting rod is of a hollow structure, one end of the connecting rod is arranged on the clip body, and the connecting rod is communicated with the clip body; the other end of the connecting rod is provided with an air inlet which is connected with the pneumatic module through an air pipe.
8. The smart chip manufacturing apparatus according to claim 1, wherein: a heating layer is arranged on the inner side of the clip plate provided with the dispensing head; the shell, the first ring body, the second ring body and the middle isolation body are internally provided with heating layers.
CN202110064088.3A 2021-01-18 2021-01-18 Intelligent chip manufacturing equipment and manufacturing method Active CN112705423B (en)

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CN117019567A (en) * 2023-10-10 2023-11-10 常州捷佳创智能装备有限公司 Silicon wafer feeding and coating mechanism, coating platform and silicon wafer coating machine

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