CN112638791A - Method for manufacturing package of cylindrical sputtering target and package - Google Patents

Method for manufacturing package of cylindrical sputtering target and package Download PDF

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Publication number
CN112638791A
CN112638791A CN201980056277.7A CN201980056277A CN112638791A CN 112638791 A CN112638791 A CN 112638791A CN 201980056277 A CN201980056277 A CN 201980056277A CN 112638791 A CN112638791 A CN 112638791A
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China
Prior art keywords
sheet
sputtering target
cushioning material
cylindrical
cylindrical sputtering
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Granted
Application number
CN201980056277.7A
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Chinese (zh)
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CN112638791B (en
Inventor
塚田洋行
西冈宏司
黑田稔显
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/03—Wrappers or envelopes with shock-absorbing properties, e.g. bubble films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/20—Containers, packaging elements or packages, specially adapted for particular articles or materials for incompressible or rigid rod-shaped or tubular articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Buffer Packaging (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention addresses the problem of providing a method for manufacturing a package in which a cylindrical sputtering target is packed with a sheet-like cushioning material, wherein the package can be easily opened while maintaining the cylindrical sputtering target in a lying state. The present invention relates to a method for manufacturing a package in which a cylindrical sputtering target is packed with a sheet-like cushioning material, wherein a cylindrical portion of the cylindrical sputtering target is covered with at least 2-piece sheet-like cushioning material, and both ends of the sheet-like cushioning material are overlapped or butted against each other by a length of half or less of the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target.

Description

Method for manufacturing package of cylindrical sputtering target and package
Technical Field
The present invention relates to a method for manufacturing a package of a cylindrical sputtering target, and more particularly, to a method for manufacturing a package in which a cylindrical sputtering target is packaged with a sheet-like cushioning material, and the package.
Background
The main body of the cylindrical sputtering target (also referred to as a cylindrical sputtering target or a spin sputtering target) has a cylindrical shape (hereinafter, the main body having a cylindrical shape is also referred to as a cylindrical portion). By sputtering the surface of the cylindrical portion while rotating the cylindrical sputtering target, a film derived from the sputtered material can be formed on the object conveyed to face the cylindrical sputtering target.
The cylindrical sputtering target is generally protected by a protective film, and the cylindrical target protected by the protective film is circulated in a packed state by a sheet-like cushioning material, and is transported and stored in such a state. The cylindrical sputtering target is protected by being packed with a sheet-like cushion material, and thus damage to the surface of the sputtering target (particularly, the surface of the cylindrical portion as a sputtering surface) due to impact or the like can be prevented.
More specifically, as shown in fig. 6, in the package body 70 of the conventional cylindrical sputtering target, 1 sheet-like cushion material 63 is wound for 2 circles in the circumferential direction R with respect to the cylindrical sputtering target 61 (in the illustrated embodiment, gaps are shown between the cylindrical sputtering target 61 and the sheet-like cushion material 63 and between the layers of the sheet-like cushion material 63 for easy identification, and such gaps may be present or absent), and the circumferential outer end E (the winding end extending in the longitudinal direction L) of the sheet-like cushion material 63 is bonded to the sheet-like cushion material 63 therebelow over the longitudinal direction L with a tape 67 (having an adhesive layer on one surface), thereby fixing and packing the sheet-like cushion material. In addition, the cylindrical sputtering target 61 is packed by appropriately folding and fixing (not shown) an excess piece-shaped cushion material 63 at both ends in the longitudinal direction of the cylindrical sputtering target 61. As the sheet-like cushioning material 63, a bubble cushioning material is used.
Disclosure of Invention
Problems to be solved by the invention
In the package of the conventional cylindrical sputtering target described above, the sheet-like cushioning material is not wound around a single circumference but wound around 2 circumferences as shown in fig. 6(b) in order to improve impact resistance (or cushioning properties). In the package body 70 of the conventional cylindrical sputtering target, since the sheet-shaped cushion material 63 is wound around the cylindrical sputtering target 61 for 2 circles, the cylindrical sputtering target 61 cannot be directly taken out from the sheet-shaped cushion material 63 only by peeling the tape 67 when opening the package, and therefore, the sheet-shaped cushion material 63 wound around 2 circles must be spread out to take out the cylindrical sputtering target 61. Since the long cylindrical sputtering target 61 is hard to move freely due to its own weight, the sheet-like cushion material 63 wound for 2 weeks can be spread by rolling the cylindrical sputtering target 61 on the sheet-like cushion material 63 while lying on its side. However, when the package is opened in this way, the cylindrical sputtering target 61 eventually rolls on the sheet-like cushion material 63 having a thickness of about 1 sheet, and therefore, the surface of the cylindrical portion of the sputtering target 61, which is a sputtering surface, may be damaged. Such a fear becomes more significant as the cylindrical sputtering target 61 is longer (i.e., heavier). Therefore, in the package of the long cylindrical sputtering target, the sheet-like cushioning material 63 wound for 2 rounds is cut together with a cutter (the cut portion is schematically shown by a dotted line C in fig. 6 (b)) while keeping the cylindrical sputtering target 61 lying (without rotating) and the package is opened by cutting the sheet-like cushioning material across the longitudinal direction L. However, when the package is opened by such an operation, the surface of the cylindrical portion of sputtering target 61 may be damaged by the cutter when the package is cut and cut by the cutter. Further, dust derived from the sheet-like cushioning material 63 is generated at the time of cutting and slitting by the cutter, and for example, when the package is opened in a clean room (the sheet-like cushioning material 63 is cut and slit), there is a problem that the cleanliness in the clean room is lowered.
The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide a method for manufacturing a package body and a package body, in which a cylindrical sputtering target is packed with a sheet-like cushioning material and the package body can be easily opened while maintaining a state in which the cylindrical sputtering target is lying down.
Means for solving the problems
According to the present invention, there is provided a method for manufacturing a package body in which a cylindrical sputtering target is packed with a sheet-like cushioning material, wherein a cylindrical portion of the cylindrical sputtering target is covered with at least 2-piece sheet-like cushioning material, and the cylindrical portion of the cylindrical sputtering target is packed by overlapping both end portions of the sheet-like cushioning material with a length of not more than one half of the circumference of the cylindrical portion or by abutting both end portions of the sheet-like cushioning material in a cross section including the circumferential direction.
Further, according to the present invention, there is provided a package in which a cylindrical sputtering target is packed with a sheet-like cushioning material, wherein a cylindrical portion of the cylindrical sputtering target is covered with at least 2-layer sheets of the cushioning material, and in a cross section including a circumferential direction of the cylindrical portion of the cylindrical sputtering target, both end portions of the sheet-like cushioning material are overlapped by a length of one half or less of a circumference of the cylindrical portion, or both end portions of the sheet-like cushioning material are butted.
In the present invention, the term "package" may be understood to mean the same meaning as "coating" or "wrapping". In the present invention, the term "abutting" means that end surfaces of both end portions of the sheet-like cushioning material are in contact with (abut on) or come close to each other. In the present invention, the term "circumferential direction" refers to a circumferential direction with respect to the central axis of the cylindrical portion of the cylindrical sputtering target, and is denoted by the symbol "R" in the drawing. In the present invention, the term "cross section including the circumferential direction" refers to a cross section when the cylindrical portion of the cylindrical sputtering target is cut by a plane including the circumferential direction, in other words, a cross section perpendicular to the central axis of the cylindrical portion of the cylindrical sputtering target.
In one embodiment of the present invention, the sheet-like cushioning material may be folded to form 2 layers or 2 or more layers.
In one embodiment of the present invention, both end portions of the sheet-like cushioning material may be overlapped by contacting an outer surface of one end portion with an inner surface of the other end portion. Alternatively, both end portions of the sheet-like cushioning material may be overlapped by contacting the inner surface of one end portion with the inner surface of the other end portion.
In one embodiment of the present invention, both end portions of the sheet-like cushioning material may be fixed to each other discontinuously in the longitudinal direction of the cylindrical sputtering target.
In one embodiment of the present invention, both end portions of the sheet-like cushioning material may be fixed to each other by at least one member selected from the group consisting of an adhesive tape, an adhesive, and a bonding agent.
In one embodiment of the present invention, the sheet-like cushion material may be a bubble cushion material.
In one embodiment of the present invention, the cylindrical sputtering target may have a length of 500mm or more and a mass of 20kg or more.
In one embodiment of the present invention, a protective film may be present between the cylindrical sputtering target and the sheet-like cushion material.
Effects of the invention
According to the present invention, in the method for manufacturing the package body in which the cylindrical sputtering target is packed with the sheet-like cushioning material, the cylindrical portion of the cylindrical sputtering target is covered with the at least 2-layer sheet-like cushioning material, and in the cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target, both end portions of the sheet-like cushioning material are overlapped by a length of one half or less of the circumference of the cylindrical portion, or both end portions of the sheet-like cushioning material are butted and packed, whereby the method for manufacturing the package body in which the package body can be easily opened while the cylindrical sputtering target is kept lying down can be provided. Further, according to the present invention, there can be provided a package having a structure corresponding to the above-described production method.
Drawings
Fig. 1 is a schematic view showing a package of a cylindrical sputtering target in an embodiment of the present invention, wherein (a) is a perspective view, and (b) is a sectional view (including a view in a circumferential direction) perpendicular to a longitudinal direction L.
Fig. 2(a) to (d) are schematic cross-sectional views along the longitudinal direction L showing exemplary modifications of the structure of the cylindrical sputtering target usable in the present invention.
Fig. 3 is a schematic view showing a package of a cylindrical sputtering target according to another embodiment of the present invention, and is a sectional view corresponding to fig. 1 (b).
Fig. 4 is a schematic view showing a package of a cylindrical sputtering target according to another embodiment of the present invention, and is a sectional view corresponding to fig. 1 (b).
Fig. 5 is a schematic view showing a package of a cylindrical sputtering target according to another embodiment of the present invention, and is a sectional view corresponding to fig. 1 (b).
Fig. 6 is a schematic view showing a package of a conventional cylindrical sputtering target, wherein (a) is a perspective view and (b) is a cross-sectional view perpendicular to the longitudinal direction L.
Detailed Description
Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention is not limited to these embodiments.
(embodiment mode 1)
As shown in fig. 1, the present embodiment relates to a package 10 in which a cylindrical sputtering target 1 is packed with a sheet-like cushion material 3, wherein a cylindrical portion of the cylindrical sputtering target 1 is covered with at least 2 sheets of the sheet-like cushion material 3, and both end portions of the sheet-like cushion material 3 are butted against each other in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1, and a method for manufacturing the same. In the illustrated embodiment, gaps are shown between the cylindrical sputtering target 1 and the sheet-like cushion material 3 and between the layers of the sheet-like cushion material 3 for easy discrimination, but such gaps may be present or absent. In the embodiment shown in fig. 1, only the cylindrical portion as the main body portion is shown as the cylindrical sputtering target 1, but as will be described later with reference to fig. 2, an adapter or the like may be provided at one or both of both ends in the longitudinal direction of the cylindrical portion.
More specifically, in fig. 1(B), as the sheet-like cushioning material 3, at least 2 layers (each formed of the same number of sheets as the number of layers) are used, which are independently separated from each other (for example, 2 layers are formed not by 1 sheet, but by 2 sheets, 2 layers of the inner layer 3a and the outer layer 3B are used in the illustrated embodiment), and in a cross section including the circumferential direction, the inner layer 3a has both end portions a1 and a2, and the outer layer 3B has both end portions B1 and B2. One end portions a1, B1 of the 2-layered sheet-like cushioning material 3 are butted against the other end portions a2, B2. However, the present invention is not limited to the illustrated embodiment, and the sheet-shaped cushioning material 3 may be formed into 3 or more layers that are separated from each other, and the sheet-shaped cushioning material 3 may be overlapped by 3 or more layers, and both end portions in the cross section including the circumferential direction may be butted.
In the present invention, the term "abutting" of both end portions of the sheet-like cushioning material means that end surfaces of both end portions abut against or approach each other, and can be realized by applying a fixing method described later, for example. In fig. 1(B), the end faces of one end portions a1, B1 of the sheet-like cushioning material 3 are in contact with the end faces of the other end portions a2, B2, but if the cylindrical target can be sufficiently protected, a gap may be provided between the end faces of both end portions of the sheet-like cushioning material 3 to bring them close to each other. The end faces of the both end portions may be in contact with or close to each other, and may be different in each layer (for example, in the case of 2 layers, the end faces (a1, a2) of the inner layers 3a may be in contact with each other and the end faces (B1, B2) of the outer layers 3B may be in contact with each other, the end faces of the inner layers 3a may be in contact with each other and the end faces of the outer layers 3B may be close to each other, the end faces of the inner layers 3a may be in contact with each other and the end faces of the outer layers 3B may be in contact with each other, and the end faces of the inner layers 3a may be in close to each other and the. When the gap exists in a plurality of layers, the gap between the end faces in each layer may be substantially the same or different. The gap between the end faces may be present continuously or discontinuously, and in the case of discontinuous presence, for example, the gap may be present only at a portion which is not fixed. The gap between the end faces is 20mm or less, preferably 15mm or less, more preferably 10mm or less, and further preferably 5mm or less.
In the present embodiment, as shown in fig. 1 a, both end portions (typically, the end portions B1 and B2 of the outer layer 3B in the illustrated embodiment) of the sheet-like cushioning material 3 are bonded and fixed to each other by, for example, a tape (generally, an adhesive layer is provided on one surface thereof, but not limited thereto) 5 discontinuously in the longitudinal direction L of the cylindrical sputtering target 1. The fixing method is not limited to the tape, and for example, at least one selected from the group consisting of a tape, an adhesive, and an adhesive may be applied. As the fixing method, although the satisfaction is inferior compared to them, fusion welding may be applied.
In the present invention, "non-continuously" fixed in the longitudinal direction of the cylindrical sputtering target means that the cylindrical sputtering target is not continuously fixed from one end portion to the other end portion in the longitudinal direction of the cylindrical sputtering target (for example, as in the case of the tape 67 shown in fig. 6 (a)), in other words, fixed at a plurality of dispersed portions (or regions) in the longitudinal direction of the cylindrical sputtering target (for example, as in the case of the tape 5 shown in fig. 1(a)), and for example, the total of the lengths of the fixed portions (the lengths along the longitudinal direction L) is 50% or less, preferably 30% or less, more preferably 20% or less, and still more preferably 10% or less, with respect to the total of the lengths of the unfixed portions. Although the present embodiment is not limited to this, more specifically, it is preferable that 3 or more positions are fixed in the longitudinal direction of the cylindrical sputtering target, and the cylindrical sputtering target is fixed at equal intervals including both ends.
As the sheet-like cushioning material 3, a bubble cushioning material may be used. The bubble buffer is also called an air cap (air cap), and generally has a plurality of pockets in which bubbles are sealed on one sheet surface. The bubble cushion material is preferably easily available, is less likely to generate dust and debris when cut with a cutter, scissors, or other blade, and is easy to peel off a fixing means such as an adhesive tape.
The sheet-like cushioning material 3 may have a thickness of, for example, 1mm or more and 15mm or less, preferably 1mm or more and 10mm or less, and more preferably 2mm or more and 5mm or less per 1 layer on average.
When the thickness of the sheet-like cushion material 3 is equal to or greater than the lower limit value, it is possible to have impact resistance sufficient to prevent the surface of the cylindrical sputtering target 1 (particularly, the surface of the cylindrical portion as a sputtering surface) from being damaged. Further, when the thickness of the sheet-like cushion material 3 is equal to or less than the upper limit, the cushion material is soft, and therefore the packing work of the cylindrical sputtering target 1 becomes easy, and particularly, the effect is remarkable when the diameter of the cylindrical sputtering target 1 is small. When the thickness of the sheet-like cushioning material 3 is not constant (or when the thickness is locally changed, for example, the thickness of the air bubble cushioning material is thick in a pocket portion in which air bubbles are sealed, and the other portions are thin), the thickness of the sheet-like cushioning material 3 refers to the thickness (air particle height) of a portion having the largest thickness in the sheet surface (for example, the pocket portion in the case of the air bubble cushioning material).
The number of layers of the sheet-like cushioning material 3 is at least 2, and may be appropriately selected depending on the desired impact resistance (cushioning property) and the thickness of each 1 layer of the sheet-like cushioning material to be actually used.
When the bubble cushion material is used as the sheet-like cushion material 3, the arrangement of at least 2-layer sheet-like cushion material is not particularly limited, but it is preferable that bag portions (hereinafter, also referred to as convex portions) of the sheet-like cushion material in which bubbles are sealed are overlapped so as to be in contact with each other. This can prevent the occurrence of entanglement of irregularities between at least 2-layer sheet-like cushioning materials and displacement of the sheet-like cushioning materials during conveyance. Further, when the bubble cushioning materials having the convex portions only on one sheet surface are stacked so that the convex portions contact each other, the outermost layer is free from irregularities due to the sheet cushioning material, and accumulation of dust and dirt can be prevented.
In the case where a cylindrical sputtering target having a large mass is packed using a bubble cushioning material having a convex portion only on one sheet surface, it is preferable that the sheet cushioning materials are overlapped so that surfaces (i.e., flat surfaces) of at least 2-layer sheet cushioning materials on the opposite side to the surface having the convex portion are in contact with each other. This makes it easy to ensure the thickness of the cushioning material, and to ensure sufficient impact resistance even with heavy objects.
When the cylindrical sputtering target is protected by a protective film described later, the protective film is preferably disposed so as to be in contact with a flat surface (i.e., a surface on the opposite side of the surface having the convex portion) of the sheet-like cushioning material. This increases the contact area between the films, and prevents displacement of the sheet-like cushioning material on the protective film.
The length (length along the longitudinal direction L) of the sheet-like cushioning material 3 can be appropriately selected according to the length of the cylindrical sputtering target 1 to be packed and the form of the storage box. In order to prevent damage from being introduced into the cylindrical sputtering target 1, the length of the cylindrical portion is preferably equal to or greater than the length of the cylindrical sputtering target 1, and more preferably longer than the length of the cylindrical sputtering target 1, and the length is also such that both ends in the longitudinal direction of the cylindrical sputtering target 1 can be packed.
The width (length along the circumferential direction R) of the 1 layer of the sheet-like cushioning material 3 can be appropriately selected in accordance with the outer diameter of the cylindrical portion of the cylindrical sputtering target 1 to be packed. In the present embodiment, the inner layer 3a is located radially outward of the outer layer 3b, and therefore the width of the outer layer 3b may be larger than the width of the inner layer 3a by the radius difference. In the illustrated embodiment, the abutting portions of the both end portions of the sheet-like cushioning material 3 are substantially flush with the other portions (in a state where there is no step) (the outer surface of the sheet-like cushioning material 3 is substantially circular in the cross section perpendicular to the longitudinal direction), but the abutting portions may be slightly convex outward (the outer surface of the sheet-like cushioning material 3 is substantially tear-drop-shaped in the cross section perpendicular to the longitudinal direction). In the former case, the package body 10 may be placed on a U-shaped base disposed in the box or on a U-shaped cushion material laid in the box so as not to roll in the circumferential direction, for example, and packed. In the latter case, even if the U-shaped base and the U-shaped cushioning material are not provided, the package body 10 can be packed into a box by fixing the bulging portions (hereinafter, also referred to as bulging portions) instead of the spacers for filling the space between the cylindrical sputtering target and the box after being packed, or by arranging the bulging portions obliquely downward, thereby preventing the package body 10 from rolling in the circumferential direction in the box. In the latter case, the package body 10 can be prevented from rolling when it is taken out of the box and placed on a flat surface such as a floor or a table. In the latter case, the convex portion of the sheet-like cushioning material 3, which is packed in the cylindrical sputtering target 1, facing outward is preferably 1. For example, the 2 sheets of the inner layer 3a and the outer layer 3b shown in fig. 1(b) are preferably 1 sheet which is not separated from each other. By setting the projection to only 1 position, the container can be packed without an extra space.
The length of the cylindrical sputtering target 1 is not particularly limited, but the present invention can be suitably used for a long cylindrical sputtering target. The length of the cylindrical sputtering target 1 is, for example, 500mm or more, preferably 1000mm or more, more preferably 2000mm or more, further preferably 2200mm or more, and particularly preferably 2500 mm. The upper limit is not particularly limited, and may be, for example, 4500mm or less, and particularly 4000mm or less.
The outer diameter of the cylindrical portion of the cylindrical sputtering target 1 is not particularly limited, and may be, for example, 120mm or more and 300mm or less. The inner diameter of the cylindrical portion of the cylindrical sputtering target 1 is not particularly limited, and may be, for example, 70mm to 250 mm.
The material of the cylindrical sputtering target 1 is not particularly limited as long as it is a material that can be generally used for film formation by a sputtering method. Examples of such materials include Al, Cu, Cr, Fe, Ta, Ti, Zr, W, Mo, Nb, Ag, Co, Ru, Pt, Pd, Ni, and alloys containing these metals, and ceramics such as tin-doped indium oxide (ITO), aluminum-doped zinc oxide (AZO), gallium-doped zinc oxide (GZO), titanium-doped zinc oxide, and In-Ga-Zn-based composite oxide (IGZO). Among these, aluminum (pure Al having a purity of 99.99% (4N) or more, preferably 99.999% (5N) or more), aluminum alloy (the additive elements include Si, Cu, Nd, Mg, Fe, Ti, Mo, Ta, Nb, W, Ni, Co, and the like, and preferably include Si and/or Cu as the additive elements), and the base material other than the additive elements has an Al purity of 99.99% or more, preferably 99.999% or more) or copper (having a purity of 99.99% (4N) or more) is preferable.
The mass of the cylindrical sputtering target 1 is not particularly limited, but is 20kg or more, preferably 30kg or more, more preferably 40kg or more, further preferably 50kg or more, and particularly preferably 60kg or more in order to further obtain the effect of the present invention. The upper limit is not particularly limited, but from the viewpoint of preventing breakage of the sheet-like cushioning material, it is 500kg or less, preferably 350kg or less, and more preferably 300kg or less. According to the package 10 of the cylindrical sputtering target of the present embodiment, even if the cylindrical sputtering target has a very large mass, the package can be easily opened while maintaining the lying state.
The cylindrical sputtering target 1 is not particularly limited in configuration, and generally includes a sputtering target material (cylindrical portion) processed into a cylindrical shape, and an adapter (adapter) for attachment to a sputtering apparatus. Exemplary modifications of the structure of the cylindrical sputtering target usable in the present invention are shown in fig. 2(a) to (d) (each is a schematic sectional view along the longitudinal direction L). The sputtering target material 11 processed into a cylindrical shape may be processed into a cylindrical shape at least in the main body portion, and one or both of both end portions in a cross section along the longitudinal direction may be processed appropriately. More specifically, the adapter 12 may be in the form of, for example, a flange 21 (see fig. 2(a)), an engagement ring 23 (see fig. 2(b)), an engagement portion 24 (see fig. 2(c)), a backing tube 25 (see fig. 2(d)), and the like, and is not particularly limited. The backing tube 25 (fig. 2 d) may have a cylindrical sputtering target support portion inserted into the hollow portion of the cylindrical sputtering target material 11, and a joint portion (more specifically, a flange portion) provided at an end portion thereof for attachment to the sputtering apparatus.
The cylindrical sputtering target material 11 is the material of the cylindrical sputtering target 1 as described above. The material of the adapter 12 is preferably different from that of the sputtering target material 11 processed into a cylindrical shape, and typically, a metal having a higher strength (1 metal or an alloy of 2 or more metals) can be used. When the material of the bonding tool 12 is different from the material of the cylindrical sputtering target material 11, these materials can be fixed by the fixing part 13 (see fig. 2(a), (b), and (d)). The fixing method is not particularly limited, and examples thereof include welding such as tungsten-inert gas welding (TIG welding), electron beam welding (EB welding), metal inert gas welding (MIG welding), laser welding, friction stir welding, solder bonding, and brazing. Alternatively, the material of the bonding tool 12 may be the same as the material of the cylindrical sputtering target 11, and for example, the bonding tool may be in the form of a bonding portion 24 obtained by processing at least one end portion of the cylindrical sputtering target 11 (see fig. 2 (c)).
The cylindrical sputtering target 1 may include a cap (cap)22 in addition to the sputtering target material 11 and the adapter 12 processed into a cylindrical shape. More specifically, as shown in fig. 2(a), a flange 21 as the adapter 12 is fixed to one end of the cylindrical sputtering target 11, and a cap 22 is fixed to the other end. The method of fixing the flange 21 and the cover 22 is not particularly limited, and any suitable fixing method as described above may be applied.
When the cylindrical sputtering target 1 has the flange 21 (or the flange portion), the package can be more easily opened while maintaining the state in which the cylindrical sputtering target 1 is lying down. The flange 21 (or the flange portion) has a convex portion (a flange portion) protruding outward from the cylindrical portion of the root thereof, and a space can be formed between the cylindrical sputtering target 1 and the sheet-like cushioning material 3 (not shown in fig. 2) by the convex portion. When both end portions of the sheet-shaped cushioning material 3 are fixed, if portions where both end portions of the sheet-shaped cushioning material 3 are not fixed are provided in advance in a region where the space exists (in this specification, the portions where both end portions of the sheet-shaped cushioning material 3 are fixed and the portions where both end portions are not fixed are also referred to as a fixed portion and a non-fixed portion, respectively), the worker can insert a finger from the non-fixed portion and release the fixation of the fixed portion (in other words, unseal the sheet-shaped cushioning material 3), and thus the package of the cylindrical sputtering target 1 can be more easily opened.
According to the package 10 of the cylindrical sputtering target of the present embodiment, first, since the cylindrical sputtering target 1 is covered with at least 2-layer sheet-like cushion material 3, it is possible to obtain impact resistance (or cushion property) sufficient to protect the cylindrical sputtering target 1. Further, according to the package 10 of the cylindrical sputtering target of the present embodiment, since both end portions of the sheet-like cushioning material 3 are butted against each other in the cross section including the circumferential direction, the cylindrical sputtering target 1 can be directly taken out from the sheet-like cushioning material 3 only by releasing the fixation of the sheet-like cushioning material 3 when opening the package, more specifically, only by peeling the tape 5 in the present embodiment. Such opening of the package can be easily performed even in the case of a long (or larger) cylindrical sputtering target, and there is no fear of damaging the surface of the cylindrical portion, which is the sputtering surface, of the cylindrical sputtering target. Further, since the opening of the package can be performed without cutting the sheet-like cushioning material 3, dust derived from the sheet-like cushioning material 3 does not occur, and even when the package is opened in a clean room, for example, the cleanliness in the clean room does not decrease.
While one embodiment of the present invention has been described above, the present embodiment can be variously modified. As the modification, other embodiments of the present invention will be described below, but the same description as the present embodiment can be applied unless otherwise specified.
(embodiment mode 2)
The present embodiment relates to another embodiment of a package in which a cylindrical sputtering target 1 is packed with a sheet-like cushion material 3, and a method for manufacturing the same, in which a cylindrical portion of the cylindrical sputtering target 1 is covered with at least 2 sheets of the sheet-like cushion material 3, and both end portions of the sheet-like cushion material 3 are butted against each other in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1.
In more detail, as shown in fig. 3, the sheet-like cushioning material 3 is formed into at least 2 layers by folding. At this time, the sheet-like cushion material 3 is folded so that the sizes of the respective layers formed by folding are substantially uniform, preferably uniform (for example, in the case of 2 layers, the sheet-like cushion material 3 has a width-directional dimension of substantially 2 times, preferably 2 times, the circumference of the cylindrical sputtering target 1 in an unfolded state, and is folded at a substantially central portion, preferably a central portion in the width direction). That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the folded portion F to form 2 layers of the inner layer 3a and the outer layer 3B, and in the cross section including the circumferential direction, the inner layer 3a has both end portions a1 and a2, the outer layer 3B has both end portions B1 and B2, and the end portion a2 of the inner layer 3a and the end portion B2 of the outer layer 3B form the folded portion F (end surfaces on the side of the end portions a2 and B2). One end portions a1, B1 of the 2-layered sheet-like cushioning material 3 are butted against the other end portions a2, B2 (i.e., the folded portion F). However, the present invention is not limited to the illustrated embodiment, and the sheet-like cushioning material 3 may be further folded to form 3 or more layers, and both end portions in the cross section including the circumferential direction of the sheet-like cushioning material 3 may be butted together in a state of being folded into 3 or more layers. Alternatively, the sheet-like cushioning material 3 may be used in combination of at least 2 layers formed by folding and at least 1 layer independently separated from each other, and the sheet-like cushioning material 3 may be in a folded state and in a state independently separated from each other, with both end portions in a cross section including the circumferential direction abutting each other.
As described above in embodiment 1, the "abutting" of the both end portions of the sheet-like cushioning material means that the end surfaces of the both end portions abut against or approach each other, and can be realized by applying the fixing method described above in embodiment 1, for example. In fig. 3, the end faces of one end portions a1, B1 of the sheet-like cushioning material 3 are in contact with the end faces (folded portions F) of the other end portions a2, B2, but as long as the cylindrical target can be sufficiently protected, a gap may be provided between the end faces of both end portions of the sheet-like cushioning material 3 so as to be close to each other. The same description as in embodiment 1 applies to this embodiment.
According to the present embodiment, in addition to the effects described above in embodiment 1, since at least 1 sheet of cushioning material 3 is folded at least 1 time and used, the following effects can be obtained: the sheet-like cushioning material 3 can be packed without being displaced in position when packed, depending on the size of each layer. Further, compared to the case where a plurality of sheets separated independently are stacked and used, the frequency of mutual friction between the sheets can be reduced, and therefore, generation of static electricity can be suppressed, and the risk of dust or dirt being caught in the packaging can be reduced.
(embodiment mode 3)
The present embodiment relates to a package in which a cylindrical sputtering target 1 is packed with a sheet-like cushion material 3, and a method for manufacturing the same, wherein a cylindrical portion of the cylindrical sputtering target 1 is covered with at least 2 sheets of the sheet-like cushion material 3, and both end portions of the sheet-like cushion material 3 are overlapped with each other by a length of not more than one-half of the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1.
In more detail, as shown in fig. 4, the sheet-like cushioning material 3 is formed into at least 2 layers by folding. That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the fold portion F to form 2 layers of the inner layer 3a and the outer layer 3B, and in the cross section including the circumferential direction, the inner layer 3a has both end portions a1 and a2, the outer layer 3B has both end portions B1 and B2, and the end portion a2 of the inner layer 3a and the end portion B2 of the outer layer 3B form the fold portion F. The length of overlap between one end portion a1, B1 and the other end portion a2, B2 of the sheet-like cushioning material 3 in the cross section including the circumferential direction is set to be equal to or less than one-half of the circumference of the cylindrical portion of the cylindrical sputtering target 1. When the overlapping lengths of the layers are different, for example, in the illustrated embodiment, the overlapping length d between the end a1 and the end a2 of the inner layer 3aAAnd the overlapping length d of the end portion B1 and the end portion B2 of the outer layer 3BBIn a different case, all the overlapping lengths are set to be equal to or less than half of the circumference of the cylindrical portion of the cylindrical sputtering target 1. However, the present invention is not limited to the illustrated embodiment, and the sheet-like cushioning material 3 may be further folded to form 3 or more layers, and in a state where the sheet-like cushioning material 3 is folded to 3 or more layers, the overlapping length of both end portions in the cross section in the circumferential direction is set to a length equal to or less than half of the circumference of the cylindrical portion of the cylindrical sputtering target 1.
In the present embodiment, as shown in fig. 4, both ends of the sheet-like cushioning material 3 are overlapped by contacting the outer surface of one end (one end of the sheet-like cushioning material 3 in a folded state, more specifically, the end located on the side of the ends a1 and B1) with the inner surface of the other end (the other end of the sheet-like cushioning material 3 in a folded state, more specifically, the end located on the side of the ends a2 and B2 forming the folded portion F).
For example, in the sheet-like cushioning material 3, the outer surface of one end of the outermost layer (in the illustrated embodiment, the outer surface of the end B1 of the outer layer 3B) and the inner surface of the other end of the innermost layer (in the illustrated embodiment, the inner surface of the end a2 of the inner layer 3 a) may be in contact with each other. However, the present invention is not limited to this, and the sheet-like cushioning material 3 may be in contact with any combination as long as the outer surface of a certain layer is in contact with the inner surface of a layer that is the same as or different from the layer. For example, by inserting the folded portion F of the sheet-like cushioning material 3 between the opposite end portions, the inner layer and the folded portion are first fixed, and then the outer layer is arranged and fixed so that the fixed portion is covered from above, thereby preventing the sheet-like cushioning material 3 from being loosened.
In the present invention, the circumference of the cylindrical portion of the cylindrical sputtering target means the outer circumference of the cylindrical portion (the same applies to the following embodiments). In the present embodiment, the overlapping length may be equal to or less than one-half of the circumference of the cylindrical portion of the cylindrical sputtering target, and is, for example, 1/3 or less, preferably 1/4 or less, and more preferably 1/8 or less. By setting the overlap length in such a range, the package can be easily opened while maintaining the lying state.
According to the present embodiment, in addition to the effects described above in embodiment 1, the following effects can be obtained: the convex portion based on the sheet-like cushioning material 3 is easily formed.
(embodiment mode 4)
The present embodiment relates to another embodiment of a package in which a cylindrical sputtering target 1 is packed with a sheet-like cushion material 3, and a method for manufacturing the same, wherein a cylindrical portion of the cylindrical sputtering target 1 is covered with at least 2 sheets of the sheet-like cushion material 3, and both end portions of the sheet-like cushion material 3 are overlapped with each other by a length of not more than one half of the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1.
In more detail, as shown in fig. 5, the sheet-like cushioning material 3 is formed into at least 2 layers by folding. That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the fold portion F to form 2 layers of the inner layer 3a and the outer layer 3B, and in the cross section including the circumferential direction, the inner layer 3a has both end portions a1 and a2, the outer layer 3B has both end portions B1 and B2, and the end portion a2 of the inner layer 3a and the end portion B of the outer layer 3B are formed2 form a fold F. The length of overlap between one end portion a1, B1 and the other end portion a2, B2 of the sheet-like cushioning material 3 in the cross section including the circumferential direction is set to be equal to or less than one-half of the circumference of the cylindrical portion of the cylindrical sputtering target 1. When the overlapping lengths of the layers are different, for example, in the illustrated embodiment, the overlapping length d between the end a1 and the end a2 of the inner layer 3aAAnd the overlapping length d of the end portion B1 and the end portion B2 of the outer layer 3BBIn a different case, all the overlapping lengths are set to be equal to or less than half of the circumference of the cylindrical portion of the cylindrical sputtering target 1. However, the present invention is not limited to the illustrated embodiment, and the sheet-like cushioning material 3 may be further folded to form 3 or more layers, and in a state where the sheet-like cushioning material 3 is folded to 3 or more layers, the overlapping length of both end portions in the cross section in the circumferential direction is set to a length equal to or less than half of the circumference of the cylindrical portion of the cylindrical sputtering target 1.
In the present embodiment, as shown in fig. 5, both ends of the sheet-like cushioning material 3 are overlapped by contacting the inner surface of one end (one end of the sheet-like cushioning material 3 in a folded state, more specifically, the end on the side of the ends a1 and B1) with the inner surface of the other end (the other end of the sheet-like cushioning material 3 in a folded state, more specifically, the end on the side of the ends a2 and B2 forming the folded portion F).
For example, in the sheet-like cushioning material 3, the inner surface of one end of the innermost layer (in the illustrated embodiment, the inner surface of the end a1 of the inner layer 3 a) and the inner surface of the other end of the innermost layer (in the illustrated embodiment, the inner surface of the end a2 of the inner layer 3 a) may be in contact with each other.
In the present embodiment, the overlapping length may be equal to or less than one-half of the circumference of the cylindrical portion of the cylindrical sputtering target, and is, for example, 1/3 or less, preferably 1/4 or less, and more preferably 1/8 or less. By setting the overlap length within such a range, not only can the package be easily opened while maintaining the lying state, but also the packed cylindrical target can be boxed without an extra space.
According to the present embodiment, in addition to the effects described above in embodiment 1, the following effects can be obtained: the convex portion based on the sheet-like cushioning material 3 is easily formed. Further, since a fastening member such as a jig or bag seal (bag closure) can be used instead of a fixing method using an adhesive such as an adhesive tape, the package can be opened more easily, and since no adhesive is attached, the sheet-like cushioning material 3 can be easily reused.
(other embodiments)
As with the modification of embodiment 1 in embodiment 2, as with embodiments 3 and 4, at least 2 layers each independently separated may be used as the sheet-like cushioning material 3, or at least 2 layers formed by folding may be used in combination with at least 1 layer each independently separated. In particular, when the cylindrical sputtering target is packed by using the sheet-like cushioning materials 3 of 2 or more layers, which are separately separated from each other, the outermost 1 layer, which is highly contaminated with dust, dirt, or the like, can be removed and transported in a clean room, and contamination of the clean room can be prevented. In addition, in order to further prevent contamination of the clean room by dust, dirt, the sheet-like buffer material 3 may have an antistatic function.
In the embodiment of the present invention, a protective film may be provided between the cylindrical sputtering target and the sheet-like cushioning material in order to prevent the cylindrical sputtering target from being contaminated with dust, dirt, or the like. This can further prevent the surface of the cylindrical sputtering target, particularly the sputtering surface, and the surface (sealing surface) to be attached to the sputtering apparatus from being damaged by friction with the sheet-like cushioning material 3. The protective film is not particularly limited as long as it can protect the surface of the cylindrical sputtering target and can be peeled. Examples of the protective film include polyester resin films such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate; the resin film is preferably selected from the group consisting of polyolefin resin films, polyethylene, polypropylene films and the like, acrylic resin films and the like.
The length of the protective film can be appropriately selected according to the length of the cylindrical sputtering target, but is preferably the same as the sheet-like cushioning material 3 described above from the viewpoint of preventing damage to the cylindrical sputtering target. The width of the protective film can be appropriately selected according to the diameter of the outer periphery of the cylindrical sputtering target, but the overlapping length of the protective films is preferably set to a length of one half or less of the circumference of the cylindrical portion of the cylindrical sputtering target, more preferably 1/3 or less, still more preferably 1/4 or less, and particularly preferably 1/8 or less. Further, a plurality of protective films may be bonded to cover the entire circumference of the cylindrical sputtering target, and for example, in the case of using 2 protective films, the protective films may be disposed so as to cover half of the circumference of the cylindrical portion. When a plurality of protective films are used, the overlapping length of the protective films is preferably equal to or less than one-half of the circumference of the cylindrical portion of the cylindrical sputtering target, and is set so as to be equal to or less than 1/3, more preferably equal to or less than 1/4, and particularly preferably equal to or less than 1/8.
In the case where the cylindrical sputtering target is protected by the protective film, the fixing positions of both ends or one end of the protective film to the outer peripheral surface of the protective film are preferably located close to the fixing portions of the sheet-like cushioning material 3, and the distance between the fixing portions is 1/3 or less, preferably 1/4 or less, more preferably 1/8 or less, still more preferably substantially the same position, and particularly preferably the same position, of the circumference of the cylindrical portion of the cylindrical sputtering target, from the viewpoint of ease of opening the package.
In the embodiment of the present invention, when it is required to suppress the modification (for example, oxidation) of the cylindrical sputtering target during long-term storage, the cylindrical sputtering target may be vacuum-packed before being packed with the sheet-like cushioning material. In addition, from the viewpoint of preventing damage during vacuum packaging, the cylindrical sputtering target protected by the protective film may be vacuum-packaged with a packaging material. The packaging material used for vacuum packaging preferably has such a property that the packaging material is not permeable to oxygen and water. This can suppress the surface of the cylindrical sputtering target from being modified by oxidation or the like. The characteristic of being hardly permeable to oxygen and water means the following characteristic: oxygen permeability of 100cc/m2Atm.day or less, preferably 80cc/m2Atm.day or less, more preferably 70cc/m2Atm.day or less, moisture permeability of 20g/m2Day or less, preferably 15g/m2Less than day, more preferably 10g/m2Day or less. The oxygen permeability and the moisture permeability are values measured by measurement methods in accordance with JIS K7126 and JIS K7129.
For example, a specific material of a packaging material used for vacuum packaging is a resin film. Examples of the resin include, but are not limited to, polypropylene, polyethylene terephthalate coated with a nanocomposite system, polyethylene terephthalate (PET) or unstretched polypropylene (CPP) vapor-deposited with aluminum, PET or biaxially stretched nylon (ONY) vapor-deposited with silica or alumina, polyvinylidene chloride (PVDC), nylon, biaxially stretched nylon (KON) or biaxially stretched polypropylene (KOP) coated with PVDC, PET, polyvinyl chloride (PVC), biaxially stretched polypropylene (OPP), High Density Polyethylene (HDPE), Low Density Polyethylene (LDPE), and ethylene-vinyl alcohol copolymer resin (EVOH). Further, a laminated film, a coextruded multilayer film, or the like of these resins may be used. The packaging material used in vacuum packaging is preferably a laminated or multilayer film. By adopting such a film form, it is easy to have a plurality of functions such as moisture resistance, oxygen permeation resistance, heat sealability, mechanical strength, flexibility, and the like.
Examples
(example 1)
Example 1 relates to the package of the cylindrical sputtering target and the method for producing the same described above with reference to fig. 3 in embodiment 2.
A cylindrical sputtering target (total length 2950mm) having a cylindrical portion of 2750mm length, 165mm outer diameter and 126mm inner diameter and formed of high purity (99.999%) aluminum was prepared, and had flange portions (end portions of 175mm diameter) and lid portions made of an aluminum alloy at both longitudinal end portions of the cylindrical portion. The mass was 73 kg.
The surface of the cylindrical portion of the cylindrical sputtering target was protected with a protective film ("Masking Tape" (registered trademark), manufactured by Mitsui Chemicals tohcello.inc.).
As the sheet-like cushion material, a polyethylene bubble cushion material "AirCap (エアーキャップ)" (registered trademark) C-800 (manufactured by JIWEL CHEMICAL CO., LTD.) having a length of 3700mm and a width of 1100mm was folded at the center portion in the width direction to prepare 2 layers. The cylindrical sputtering target having the cylindrical portion surface protected is disposed on the upper layer (corresponding to the inner layer) of the sheet-like cushioning material folded into 2 layers so that the longitudinal directions thereof are aligned. Then, the sheet-like cushioning material folded into 2 layers was disposed along the surface of the cylindrical portion of the cylindrical sputtering target so that both ends of the sheet-like cushioning material were butted against each other in the cross section including the circumferential direction, and the both ends were fixed at intervals of 500mm in the longitudinal direction of the cylindrical sputtering target using a tape. The total length of the portions fixed with the tape was fixed so as to be 4% of the total length of the portions not fixed (the length in the longitudinal direction of the cylindrical target) (see fig. 1 (a)). The fixing portion of the protective film and the fixing portion of the sheet-like cushioning material are disposed so as to be substantially at the same position in the circumferential direction.
Thus, a package in which the cylindrical sputtering target was packed with the sheet-like cushioning material was obtained.
Comparative example 1
Comparative example 1 relates to a package of a conventional cylindrical sputtering target and a method for producing the same, which were described above with reference to fig. 6.
Similarly to example 1, a cylindrical sputtering target (total length 2950mm) having a cylindrical portion of 2750mm in length, 165mm in outer diameter, 126mm in inner diameter and formed of high-purity (99.999%) aluminum was prepared, and the cylindrical portion had a flange portion and a lid portion made of an aluminum alloy at both longitudinal end portions thereof.
The surface of the cylindrical portion of the cylindrical sputtering target was protected with a protective film ("Mitsui chemical products tohcello.inc., registered trademark) in the same manner as in example 1.
The cylindrical sputtering target having the surface of the cylindrical portion protected thereon was disposed so that the longitudinal directions thereof were aligned at one end in the width direction of a polyethylene bubble buffer "AirCap" (registered trademark) C-800 (manufactured by cellu chemical industries, ltd.) having a length of 3700mm and a width of 1100mm as a sheet-like buffer. Then, the cylindrical sputtering target was lifted up, and the sheet-like cushion material was arranged so as to be wound for 2 circles along the surface of the cylindrical portion of the cylindrical sputtering target, and the winding end portion was fixed in the longitudinal direction with a tape (see fig. 6).
Thus, a package in which the cylindrical sputtering target was packed with the sheet-like cushioning material was obtained.
In the package of example 1, the cylindrical sputtering target can be directly taken out from the sheet-like cushioning material and the package can be opened by simply peeling the tape (for example, in the case of being held in a state of being disposed on the U-shaped base or the U-shaped cushioning material in the box), without rotating the cylindrical sputtering target in the circumferential direction and without cutting the sheet-like cushioning material. Such unpacking can be easily performed even in the case of a long cylindrical sputtering target having a large mass, and there is no fear of damaging the surface of the cylindrical portion as a sputtering surface of the cylindrical sputtering target. In addition, since such opening of the package can be performed without cutting the sheet-like cushioning material, there is no concern that the clean room is contaminated by dust originating from the sheet-like cushioning material. Such opening of the package can be easily performed by an operator inserting a finger from a non-fixed portion (for example, a lateral side of the tape) along a space between both end portions of the sheet-like cushioning material and peeling the tape at the fixed portion.
In order to open the package of comparative example 1, it is necessary to peel the tape and rotate the cylindrical sputtering target in the circumferential direction or cut the sheet-like cushioning material.
Industrial applicability
The package of the cylindrical sputtering target obtained by the present invention can be easily unpacked while keeping the cylindrical sputtering target lying down, and can be used for protecting the cylindrical sputtering target from damage such as impact that may be applied during transportation and storage without the risk of contaminating the clean room.
Description of the reference numerals
1 cylindrical sputtering target
3 sheet-like cushioning material
3a, 3b layer
5 adhesive tape
10 package body
11 sputtering target material processed into cylindrical shape
12 adapter
13 fixed part
21 Flange
22 cover
23 mating ring
24 joint
25 liner tube
L longitudinal direction
R circumferential direction
F-fold part
A1, A2, B1, B2 (including in circumferential cross-section) ends

Claims (18)

1. A method for manufacturing a package body in which a cylindrical sputtering target is packed with a sheet-like cushioning material, wherein a cylindrical portion of the cylindrical sputtering target is covered with at least 2-layer sheets of the cushioning material, and both ends of the sheet-like cushioning material are overlapped or butted against each other by a length of not more than one half of the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target.
2. The package manufacturing method according to claim 1, wherein the sheet-like cushioning material is folded to form 2 or more layers.
3. The package manufacturing method according to claim 1 or 2, wherein both end portions of the sheet-like cushioning material are superimposed such that an outer surface of one end portion of the sheet-like cushioning material is in contact with an inner surface of the other end portion.
4. The package manufacturing method according to claim 1 or 2, wherein both end portions of the sheet-like cushioning material are superimposed such that an inner surface of one end portion of the both end portions is in contact with an inner surface of the other end portion of the both end portions.
5. The package production method according to any one of claims 1 to 4, wherein both end portions of the sheet-like cushioning material are fixed to each other discontinuously in the longitudinal direction of the cylindrical sputtering target.
6. The package manufacturing method according to any one of claims 1 to 5, wherein both end portions of the sheet-like cushioning material are fixed to each other by at least one selected from the group consisting of an adhesive tape, an adhesive, and a bonding agent.
7. The package body production method according to any one of claims 1 to 6, wherein the sheet-like cushioning material is a bubble cushioning material.
8. The package body manufacturing method according to any one of claims 1 to 7, wherein the cylindrical sputtering target has a length of 500mm or more and a mass of 20kg or more.
9. The package production method according to any one of claims 1 to 8, wherein a protective film is provided between the cylindrical sputtering target and the sheet-like cushioning material.
10. A package body in which a cylindrical sputtering target is packed with a sheet-like cushion material, wherein a cylindrical section of the cylindrical sputtering target is covered with at least 2-layer sheet-like cushion material, and in a cross section including a circumferential direction of the cylindrical section of the cylindrical sputtering target, both end portions of the sheet-like cushion material are overlapped by a length of one half or less of a circumference of the cylindrical section, or both end portions of the sheet-like cushion material are butted against each other.
11. A package according to claim 10, wherein the sheet-like cushioning material is folded to form 2 or more layers.
12. A package according to claim 10 or 11, wherein both end portions of the sheet-like cushioning material are overlapped by contacting an outer side surface of one end portion thereof with an inner side surface of the other end portion thereof.
13. A package according to claim 10 or 11, wherein both end portions of the sheet-like cushioning material are overlapped by contacting an inner side surface of one end portion thereof with an inner side surface of the other end portion thereof.
14. The package according to any one of claims 10 to 13, wherein both end portions of the sheet-like cushioning material are fixed to each other discontinuously in a longitudinal direction of the cylindrical sputtering target.
15. The package according to any one of claims 10 to 14, wherein both end portions of the sheet-like cushioning material are fixed to each other by at least one member selected from the group consisting of an adhesive tape, an adhesive, and a bonding agent.
16. A package according to any of claims 10 to 15, wherein the sheet-like cushioning material is a bubble cushioning material.
17. The package according to any one of claims 10 to 16, wherein the cylindrical sputtering target has a length of 500mm or more and has a mass of 20kg or more.
18. The package according to any one of claims 10 to 17, wherein a protective film is present between the cylindrical sputtering target and the sheet-like cushioning material.
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