CN112594315A - Magnetic suspension vibration isolator - Google Patents
Magnetic suspension vibration isolator Download PDFInfo
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- CN112594315A CN112594315A CN202110020894.0A CN202110020894A CN112594315A CN 112594315 A CN112594315 A CN 112594315A CN 202110020894 A CN202110020894 A CN 202110020894A CN 112594315 A CN112594315 A CN 112594315A
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- permanent magnet
- vibration isolator
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- eddy current
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2230/00—Purpose; Design features
- F16F2230/18—Control arrangements
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention discloses a magnetic suspension vibration isolator, which is arranged between a stator and a rotor of a magnetic suspension vibration isolation system, and comprises: electromagnetic permanent magnet module and sensor. The electromagnetic permanent magnet module comprises a suspension part and a fixed part which are arranged at intervals, and the suspension part is suspended in a magnetic field of the fixed part through permanent magnetic force and electromagnetic force; the sensor is used for adjusting the electromagnetic force between the fixed part and the suspension part according to the vibration condition of the rotor relative to the stator. Because the electromagnetic permanent magnet module of the magnetic suspension vibration isolator controls suspension stability and inhibits vibration through electromagnetic force, and the magnitude of the electromagnetic force can be adjusted according to the vibration condition, the vibration control with different frequencies and quick response can be realized; because the electromagnetic permanent magnet module provides main bearing capacity through permanent magnetic force, the loss of electromagnetic force can be reduced, and the energy consumption of the magnetic suspension vibration isolator can be reduced.
Description
Technical Field
The invention relates to the technical field of precise vibration isolation, in particular to a magnetic suspension vibration isolator.
Background
This section provides background information related to the present disclosure only and is not necessarily prior art.
With the rapid development of high and new technology industries, the requirement for precise position control is higher and higher. In industrial precision machining and detection, particularly in ultra-high precision detection and motion scenes in the semiconductor industry, the method is particularly sensitive to external vibration interference. The equipment needs to restrain and isolate ground vibration and external disturbance, so that ultra-high-precision motion control is realized. The traditional vibration isolation modes such as a mechanical passive vibration isolator and an air spring are difficult to realize vibration control with different frequencies and quick response.
Disclosure of Invention
The invention mainly aims to provide a magnetic suspension vibration isolator, which aims to reduce the energy consumption of the magnetic suspension vibration isolator while realizing vibration control with different frequencies and quick response.
In order to achieve the purpose, the magnetic suspension vibration isolator provided by the invention comprises: the electromagnetic permanent magnet module comprises a suspension part and a fixing part which are arranged at intervals, the suspension part is suspended in a magnetic field of the fixing part through permanent magnetic force and electromagnetic force, the fixing part is fixedly connected with the stator, and the suspension part is fixedly connected with the rotor; and the sensor is used for adjusting the electromagnetic force between the fixed part and the suspension part according to the vibration condition of the rotor relative to the stator.
Preferably, the suspension portion includes a first permanent magnet; the fixing part comprises an iron core, a coil and a second permanent magnet, and the second permanent magnet is arranged on one side of the coil, which is far away from the first permanent magnet; the coil is wound on the peripheral wall of the iron core, and the second permanent magnet and the coil are both located in the magnetic field of the first permanent magnet.
Preferably, the permanent magnetic force between the suspension part and the fixing part is configured to be matched with the load of the magnetic suspension vibration isolator.
Preferably, the novel magnetic suspension vibration isolator further comprises an eddy current damping module, the eddy current damping module comprises a conductor induction plate and a permanent magnet array, the conductor induction plate is located in a magnetic field of the permanent magnet array, one of the conductor induction plate and the permanent magnet array is fixedly arranged on the stator, and the other of the conductor induction plate and the permanent magnet array is fixedly arranged on the rotor.
Preferably, the permanent magnet array is a halbach permanent magnet array, and the halbach permanent magnet array comprises a plurality of permanent magnets with the same size parameter, the same magnetizing intensity and different magnetizing directions.
Preferably, the magnetic suspension vibration isolator is a unidirectional vibration isolator in the vertical direction; the unidirectional vibration isolator comprises at least two eddy current damping modules which are symmetrically distributed by taking the vertical direction as a symmetry axis.
Preferably, the magnetic suspension vibration isolator comprises two eddy current damping modules and one electromagnetic permanent magnet module, and the two eddy current damping modules are symmetrically arranged on the left side and the right side of the electromagnetic permanent magnet module.
Preferably, the magnetic suspension isolator includes two eddy current damping modules and two electromagnetic permanent magnet modules, two eddy current damping modules are bilateral symmetry about the symmetry axis of vertical direction, two electromagnetic permanent magnet modules are located two between the eddy current damping modules, and two electromagnetic permanent magnet modules are bilateral symmetry about the symmetry axis of vertical direction.
Preferably, the magnetic suspension vibration isolator is a multidirectional vibration isolator, the multidirectional vibration isolator comprises an X-direction vibration isolator, a Y-direction vibration isolator and a Z-direction vibration isolator, and the X-direction vibration isolator and the Y-direction vibration isolator are arranged in the same structure; the Z-direction vibration isolator comprises at least one electromagnetic permanent magnet module and at least two eddy current damping modules which are symmetrically arranged relative to the electromagnetic permanent magnet module; the X-direction vibration isolator comprises at least one eddy current damping module and an even number of electromagnetic permanent magnet modules which are symmetrical to the eddy current damping module.
Preferably, the X-direction vibration isolator comprises one eddy current damping module and two electromagnetic permanent magnet modules, the two electromagnetic permanent magnet modules are bilaterally symmetrical about a vertical axis of symmetry, and the eddy current damping module is arranged between the two electromagnetic permanent magnet modules.
This patent still provides a magnetic suspension vibration isolation system, includes: stator and active cell that relative setting to and magnetic suspension isolator, magnetic suspension isolator locates the stator with between the active cell, magnetic suspension isolator includes:
the electromagnetic permanent magnet module comprises a suspension part and a fixing part which are arranged at intervals, the suspension part is suspended in a magnetic field of the fixing part through permanent magnetic force and electromagnetic force, the fixing part is fixedly connected with the stator, and the suspension part is fixedly connected with the rotor; and the sensor is used for adjusting the electromagnetic force between the fixed part and the suspension part according to the vibration condition of the rotor relative to the stator.
The invention discloses a magnetic suspension vibration isolator, which is arranged between a stator and a rotor of a magnetic suspension vibration isolation system, and comprises: the magnetic suspension vibration isolator comprises an electromagnetic permanent magnet module and a sensor, wherein the electromagnetic permanent magnet module comprises a suspension part and a fixed part which are arranged at intervals, the suspension part is suspended in a magnetic field of the fixed part through permanent magnetic force and electromagnetic force, the fixed part is fixedly connected with a stator, and the suspension part is fixedly connected with a rotor; the sensor is used for adjusting the electromagnetic force between the fixed part and the suspension part according to the vibration condition of the rotor relative to the stator. The magnetic suspension vibration isolator comprises the electromagnetic permanent magnet module, the electromagnetic permanent magnet module controls suspension stability and inhibits vibration through electromagnetic force, and the magnitude of the electromagnetic force can be adjusted according to the vibration condition, so that vibration control with different frequencies and quick response can be realized; because the electromagnetic permanent magnet module provides main bearing capacity through permanent magnetic force, the loss of electromagnetic force can be reduced, and the energy consumption of the magnetic suspension vibration isolator can be reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic cross-sectional structure diagram of a first embodiment of the magnetic levitation vibration isolator of the invention after being installed with a stator and a rotor;
FIG. 2 is a schematic cross-sectional structure diagram of an eddy current damping module of the magnetic suspension vibration isolator according to the invention;
FIG. 3 is a schematic cross-sectional structure diagram of an electromagnetic permanent magnet module of the magnetic suspension vibration isolator according to the invention;
FIG. 4 is a schematic cross-sectional structure diagram of a second embodiment of the magnetic levitation vibration isolator according to the invention after being installed with a stator and a rotor;
fig. 5 is a schematic cross-sectional structure diagram of a third embodiment of the magnetic levitation vibration isolator of the invention after being installed with a stator and a rotor.
The reference numbers illustrate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 10 | |
32 | |
| 20 | Mover | 41 | First |
| 30 | Eddy |
42 | |
| 40 | Electromagnetic |
43 | |
| 31 | |
44 | Second permanent magnet |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a magnetic suspension vibration isolator which can improve the vibration isolation performance of the vibration isolator and reduce the energy consumption of the vibration isolator.
In an embodiment of the present invention, as shown in fig. 1 to 3, the magnetic levitation vibration isolator is disposed between a stator 10 and a mover 20 of a magnetic levitation vibration isolation system, and includes: the electromagnetic permanent magnet module 40 comprises a suspension part and a fixed part, the suspension part is suspended in a magnetic field of the fixed part through permanent magnetic force and electromagnetic force, the fixed part is fixedly connected with the stator 10, and the suspension part is fixedly connected with the mover 20; the sensor is used for adjusting the electromagnetic force between the fixed part and the floating part according to the vibration condition of the mover 20 relative to the stator 10.
Because the magnetic suspension vibration isolator provided by the invention comprises the electromagnetic permanent magnet module 40, the electromagnetic permanent magnet module 40 controls suspension stability and inhibits vibration through electromagnetic force, and the magnitude of the electromagnetic force can be adjusted according to the vibration condition, the vibration control with different frequencies and quick response can be realized; because the electromagnetic permanent magnet module 40 provides main bearing capacity through permanent magnetic force, the loss of electromagnetic force can be reduced, and thus the energy consumption of the magnetic suspension vibration isolator can be reduced.
In this embodiment, the sensor is a hall sensor, when the mover 20 vibrates relative to the stator 10, the hall sensor detects that the magnetic field between the mover 20 and the stator 10 changes, and the hall sensor controls the current in the induction coil to increase or decrease, so as to change the permanent magnetic force between the fixed portion and the floating portion, and further reduce the vibration between the floating portion and the fixed portion; in other embodiments, the sensor may also be an eddy current displacement sensor or a laser displacement sensor.
Further, referring to fig. 3, the structure of the electromagnetic permanent magnet module 40 will now be described in detail, wherein the suspension portion includes a first permanent magnet 41; the fixed part comprises an iron core 42, a coil 43 and a second permanent magnet 44, and the second permanent magnet 44 is arranged on one side of the coil 43 far away from the first permanent magnet 41; the coil 43 is wound around the outer peripheral wall of the iron core 42, and both the coil 43 and the second permanent magnet are located in the magnetic field formed by the first permanent magnet 41.
When the coil is not energized, the magnetic attraction of the core 42 and the second permanent magnet 44 to the first permanent magnet 41 can lift the mover 20; it is emphasized here that the magnetic field of the second permanent magnet 44 enhances the attraction between the core and the first permanent magnet 41;
when the coil is electrified, the electromagnetic force between the coil 43 and the magnetic field of the first permanent magnet 41 can be adjusted by controlling the magnitude of the induced current in the coil 43, and because the current in the coil 43 has the characteristic of convenient adjustment, the vibration control of different frequencies is realized by adjusting the magnitude of the current in the coil 43.
It is emphasized that the electromagnetic permanent magnet module 40 proposed in this patent is not simply a superposition of permanent magnet and electromagnetic modules, but is an inventive improvement. Specifically, the permanent magnet module makes full use of the iron core 42 in the electromagnetic module, and the magnetic field of the second permanent magnet 44 can be intensified by the iron core 42, so that a larger magnetic field strength can be obtained.
Here, since the coil 43 portion of the fixed portion needs to be supplied with power, the fixed portion is attached to the stator 10; the first permanent magnet 41 of the levitation part does not require power supply, and the first permanent magnet 41 is mounted to the mover 20.
Further, considering that the mass of the weight loaded on the mover 20 is constant under normal conditions, in order to reduce the energy consumption of the electromagnetic permanent magnet module 40, in the present embodiment, the attractive force between the first permanent magnet 41 and the second permanent magnet 44 is configured to be matched with the weight loaded on the mover 20. In this way, the load can be lifted only by the attractive force between the first permanent magnet 41 and the second permanent magnet 44, and the stability of the levitation of the first permanent magnet 41 and the mover 20 can be controlled only by a weak control current of the coil 43 in the case of no vibration, so that the energy consumption of the electromagnetic permanent magnet module 40 can be reduced.
It should be noted that when the ground vibration or the external disturbance may cause the vibration of the stator 10, in order to ensure that the load on the mover 20 maintains the motion control with high precision, the coil 43 needs to be energized, so as to suppress and isolate the ground vibration and the external disturbance, thereby implementing the vibration control with different frequencies and fast response by the active vibration reduction.
Further, in order to improve the vibration isolation effect of the magnetic suspension vibration isolator, in an embodiment of the present invention, the novel magnetic suspension vibration isolator further includes an eddy current damping module 30, as shown in fig. 1, the eddy current damping module 30 includes a conductor induction plate 31 and a permanent magnet array 32, the conductor induction plate 31 is located in the magnetic field of the permanent magnet array 32, one of the conductor induction plate 31 and the permanent magnet array 32 is fixedly disposed on the stator 10, and the other of the conductor induction plate 31 and the permanent magnet array 32 is fixedly disposed on the mover 20. Because the magnetic suspension vibration isolator provided by the invention further comprises the electric eddy current damping module 30, when the rotor 20 vibrates relative to the stator 10, relative motion is generated between the conductor induction plate 31 and the permanent magnet array 32, and the conductor induction plate 31 cuts magnetic induction lines to generate induction current, so that damping force can be generated, vibration can be further inhibited, and the vibration isolation effect of the magnetic suspension vibration isolator can be improved.
It should be noted that the combination of the eddy current damping module 30 and the electromagnetic permanent magnet module 40 is not simply a superposition, but has an effect of one plus one greater than two. Specifically, as shown in fig. 1, when there is no external vibration, the permanent magnetic force of the electromagnetic permanent magnetic module 40 can make the mover 20 keep stable relative to the stator; when vibration occurs outside, the vibration causes the rotor 20 to move relative to the stator 10, and at the moment, the conductor induction plate 31 of the eddy current damping module 30 moves in the magnetic field of the permanent magnet array 32 to cut the magnetic induction lines of the permanent magnet array 32, so that the eddy current damping module can form damping force in the vertical direction, and vibration can be eliminated, so that the stator 10 is kept relatively stable with the rotor 20, the damping force is generated without applying control current to the coil of the electromagnetic permanent magnet module 40, and therefore energy consumption required by active vibration isolation of the electromagnetic permanent magnet module 40 can be reduced.
It should be emphasized here that the damping force is generated after the vibration occurs, compared to the permanent magnetic force of the permanent magnet, the permanent magnetic force is always present, when the permanent magnetic force makes the mover 20 and the stator 10 relatively stable in the vertical direction, the lateral relative position of the mover 20 and the stator 10 is not stable because the permanent magnetic force is always present, and the effect of the permanent magnetic force in the lateral direction is small; however, in a state where the stator 10 and the mover 20 are relatively stable, no damping force is generated, and therefore, a state where the lateral relative positions of the stator 10 and the mover 20 are unstable does not occur.
Specifically, the direction of the vibration force slowed down by the electromagnetic permanent magnet module 40 is the vertical direction, and in the horizontal direction, the electromagnetic permanent magnet module 40 is relatively unstable; the eddy current damping module 30 can form a damping force not only in the vertical direction but also in the horizontal direction, so that the magnetic levitation vibration isolator can be more stable.
In addition, when the mover 20 and the stator 10 generate relative movement due to vibration in the vertical direction, since the eddy current damping module 30 can form a damping force in the vertical direction, energy consumption required for active vibration isolation of the electromagnetic permanent magnet module 40 can be reduced.
Further, in an embodiment of the present invention, the magnetic suspension vibration isolator is a unidirectional vibration isolator in the vertical direction, and the unidirectional vibration isolator includes at least two eddy current damping modules 30 symmetrically distributed about the vertical direction as the symmetry axis, and since at least two eddy current damping modules 30 are provided and the at least two eddy current damping modules 30 are symmetrically distributed about the vertical direction as the symmetry axis, it is possible to ensure that the relative motion between the rotor 20 and the stator 10 is more stable.
As shown in fig. 1 to 3, in the first embodiment of the present invention, the magnetic levitation vibration isolator includes two eddy current damping modules 30 and one electromagnetic permanent magnet module 40, and the two eddy current damping modules 30 are symmetrically disposed on the left and right sides of the electromagnetic permanent magnet module 40.
Specifically, as shown in fig. 1, the mover 20 and the stator 10 are both disposed with an open top, the mover 20 is disposed inside the stator 10, and the mover 20 and the stator 10 are disposed at an interval; the suspension portion of the electromagnetic permanent magnet module 40, i.e. the first permanent magnet 41, is fixedly disposed on the mover 20, and the fixing portion a (including the iron core 42, the coil 43, and the second permanent magnet 44) of the electromagnetic permanent magnet module 40 is fixedly disposed on the stator 10 at a position corresponding to the suspension portion; two the left and right sides of the week lateral part of runner 20 is located in conductor tablet 31 branch of eddy current damping module 30, two the left and right sides of the week lateral part of stator 10 is located in permanent magnetism array 32 branch of eddy current damping module 30, each permanent magnetism array 32 and one conductor tablet 31 is the corresponding setting.
In the second embodiment of the present patent, the magnetic suspension vibration isolator is a unidirectional vibration isolator in the vertical direction, and the magnetic suspension vibration isolator includes two eddy current damping modules 30 and two electromagnetic permanent magnet modules 40, two eddy current damping modules 30 are bilaterally symmetric about the symmetry axis in the vertical direction, two electromagnetic permanent magnet modules 40 are disposed between the eddy current damping modules 30, and two electromagnetic permanent magnet modules 40 are bilaterally symmetric about the symmetry axis in the vertical direction.
Specifically, as shown in fig. 4, the cross section of the stator 10 is i-shaped, and the stator 10 includes a bottom portion, a connecting portion and a top portion; the cross section of the rotor 20 is in a square shape with a semi-open bottom, and the rotor 20 is sleeved on the outer side of the top of the stator 10; the fixed part a of the electromagnetic permanent magnet module 40 is fixedly arranged at the top of the stator 10, and the suspension part of the electromagnetic permanent magnet module 40, that is, the first permanent magnet 41 of the electromagnetic permanent magnet module 40 is fixedly arranged at the position of the mover 20 corresponding to the fixed part a; the conductor induction plates 31 of the eddy current damping module 30 are fixedly arranged at the left side and the right side of the top of the stator 10, and the permanent magnet arrays 32 of the eddy current damping module 30 are fixedly arranged at the positions of the mover 20 corresponding to the conductor induction plates 31.
Further, in a third embodiment of the present invention, the magnetic levitation vibration isolator is a multidirectional vibration isolator, the multidirectional vibration isolator includes an X-directional vibration isolator, a Y-directional vibration isolator and a Z-directional vibration isolator, and the X-directional vibration isolator and the Y-directional vibration isolator are arranged in the same structure;
the Z-direction vibration isolator can be a unidirectional vibration isolator in the first embodiment (as shown in fig. 1) or the second embodiment (as shown in fig. 4), namely: the Z-direction vibration isolator comprises at least one electromagnetic permanent magnet module 40 and at least two eddy current damping modules 30 which are symmetrically arranged relative to the electromagnetic permanent magnet module 40;
the X-direction vibration isolator comprises at least one eddy current damping module 30 and an even number of electromagnetic permanent magnet modules 40 which are symmetrical to the eddy current damping module 30.
In this embodiment, the X-direction vibration isolator includes one eddy current damping module 30 and two electromagnetic permanent magnet modules 40, the two electromagnetic permanent magnet modules 40 are bilaterally symmetric about a vertical axis of symmetry, and the eddy current damping module 30 is disposed between the two electromagnetic permanent magnet modules 40.
Specifically, as shown in fig. 5, the structure of the X-direction vibration isolator of the multi-direction vibration isolator will now be described in detail, wherein the mover 20 is disposed with an open bottom, and the stator 10 is disposed in the mover 20; the suspension parts of the two electromagnetic permanent magnet modules 40, that is, the first permanent magnets 41 of the electromagnetic permanent magnet modules 40 are respectively fixed on the peripheral side walls of the left and right sides of the mover 20, and the fixing part a of the electromagnetic permanent magnet modules 40 is fixed on the position of the stator 10 corresponding to the first permanent magnets 41; the conductor induction plate 31 of the eddy current damping module 30 is fixedly arranged on the lower surface of the top of the mover 20, and the permanent magnet array 32 of the eddy current damping module 30 is fixedly arranged on the position of the stator 10 corresponding to the conductor induction plate 31.
Further, the permanent magnet array 32 is a Halbach permanent magnet array (Halbach permanent magnet array), and the Halbach permanent magnet array includes a plurality of permanent magnets having the same size parameter, the same magnetizing intensity, and different magnetizing directions. In the case of using permanent magnets of the same weight, the halbach array provides the strongest magnetic field on one side, specifically, on the side facing the conductive induction plate 31 (metal plate such as copper plate or aluminum plate), much stronger than the other side. However, the design of the present patent is not limited thereto, and in other embodiments, an arrangement of opposite poles of NS adjacent to the magnet may be used.
This patent still provides a magnetic suspension vibration isolation system, magnetic suspension vibration isolation system includes: the magnetic suspension vibration isolator comprises a stator 10 and a rotor 20 which are oppositely arranged, and a magnetic suspension vibration isolator arranged between the stator 10 and the rotor 20, wherein the structure of the magnetic suspension vibration isolator is as described in the above embodiments, and is not described in detail herein. Since the magnetic levitation vibration isolation system proposed by the patent comprises the magnetic levitation vibration isolator in each of the above embodiments, the magnetic levitation vibration isolator in each of the above embodiments has all the advantages.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A novel magnetic suspension vibration isolator is arranged between a stator and a rotor of a magnetic suspension vibration isolation system; characterized in that, the magnetic suspension isolator includes:
the electromagnetic permanent magnet module comprises a suspension part and a fixing part which are arranged at intervals, the suspension part is suspended in a magnetic field of the fixing part through permanent magnetic force and electromagnetic force, the fixing part is fixedly connected with the stator, and the suspension part is fixedly connected with the rotor; and the number of the first and second groups,
and the sensor is used for adjusting the electromagnetic force between the fixed part and the suspension part according to the vibration condition of the rotor relative to the stator.
2. The magnetic levitation vibration isolator of claim 1, wherein the levitating portion comprises a first permanent magnet;
the fixing part comprises an iron core, a coil and a second permanent magnet, and the second permanent magnet is arranged on one side of the coil, which is far away from the first permanent magnet; the coil is wound on the peripheral wall of the iron core, and the second permanent magnet and the coil are both located in the magnetic field of the first permanent magnet.
3. The magnetic levitation vibration isolator as claimed in claim 2, wherein the permanent magnetic force between the levitating portion and the fixed portion is configured to match a load of the magnetic levitation vibration isolator.
4. The magnetic levitation vibration isolator as claimed in claim 1, wherein the novel magnetic levitation vibration isolator further comprises an eddy current damping module, the eddy current damping module comprises a conductor induction plate and a permanent magnet array, the conductor induction plate is located in a magnetic field of the permanent magnet array, one of the conductor induction plate and the permanent magnet array is fixedly arranged on the stator, and the other of the conductor induction plate and the permanent magnet array is fixedly arranged on the mover.
5. The magnetic suspension vibration isolator according to claim 4, wherein the permanent magnet array is a Halbach permanent magnet array, and the Halbach permanent magnet array comprises a plurality of permanent magnets with the same size parameters, the same magnetizing strength and different magnetizing directions.
6. The magnetic levitation vibration isolator as claimed in any one of claims 1 to 5, wherein the magnetic levitation vibration isolator is a unidirectional vibration isolator in a vertical direction; the unidirectional vibration isolator comprises at least two eddy current damping modules which are symmetrically distributed by taking the vertical direction as a symmetry axis.
7. The magnetic levitation vibration isolator as claimed in claim 6, wherein the magnetic levitation vibration isolator comprises two eddy current damping modules and one electromagnetic permanent magnet module, and the two eddy current damping modules are symmetrically arranged on the left side and the right side of the electromagnetic permanent magnet module.
8. The magnetic levitation vibration isolator as claimed in claim 6, wherein the magnetic levitation vibration isolator comprises two of the eddy current damping modules and two of the electromagnetic permanent magnet modules, the two of the eddy current damping modules are bilaterally symmetric about a vertical axis of symmetry, the two of the electromagnetic permanent magnet modules are disposed between the two of the eddy current damping modules, and the two of the electromagnetic permanent magnet modules are bilaterally symmetric about the vertical axis of symmetry.
9. The magnetic levitation vibration isolator as claimed in any one of claims 1 to 5, wherein the magnetic levitation vibration isolator is a multidirectional vibration isolator, the multidirectional vibration isolator comprises an X-direction vibration isolator, a Y-direction vibration isolator and a Z-direction vibration isolator, and the X-direction vibration isolator and the Y-direction vibration isolator are arranged in the same structure;
the Z-direction vibration isolator comprises at least one electromagnetic permanent magnet module and at least two eddy current damping modules which are symmetrically arranged relative to the electromagnetic permanent magnet module;
the X-direction vibration isolator comprises at least one eddy current damping module and an even number of electromagnetic permanent magnet modules which are symmetrical to the eddy current damping module.
10. The magnetic levitation vibration isolator according to claim 9, wherein the X-direction vibration isolator comprises one of the eddy current damping modules and two of the electromagnetic permanent magnet modules, the two electromagnetic permanent magnet modules are bilaterally symmetric with respect to a vertical axis of symmetry, and the eddy current damping module is disposed between the two electromagnetic permanent magnet modules.
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| CN202010433261.8A CN111473079A (en) | 2020-05-21 | 2020-05-21 | Magnetic suspension vibration isolator |
| CN2020104332618 | 2020-05-21 |
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| CN202110020894.0A Pending CN112594315A (en) | 2020-05-21 | 2021-01-08 | Magnetic suspension vibration isolator |
| CN202120042398.0U Active CN214274318U (en) | 2020-05-21 | 2021-01-08 | Magnetic suspension vibration isolation system |
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| CN114199354A (en) * | 2021-11-29 | 2022-03-18 | 江苏大学 | Self-adaptive magnetic suspension electronic balance and weighing method thereof |
| CN114483866A (en) * | 2022-02-25 | 2022-05-13 | 浙江大学 | Spring vibration isolator of coupling electromagnetic damping |
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| CN115143231A (en) * | 2022-07-27 | 2022-10-04 | 哈尔滨工程大学 | Multi-degree-of-freedom magnetic suspension vibration damping device capable of resisting sea wave impact |
| CN115891670B (en) * | 2023-03-09 | 2023-06-13 | 西南交通大学 | Suspension structure, permanent magnet electric suspension system thereof and gap calculation method |
| CN116026508B (en) * | 2023-03-29 | 2023-08-15 | 中国人民解放军火箭军工程大学 | Vibration isolation structure of micro-thrust measuring system |
| CN118100578B (en) * | 2024-04-28 | 2024-07-26 | 中国人民解放军海军工程大学 | Magnetic assembly structure based on vibration active control electromagnetic actuator |
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2020
- 2020-05-21 CN CN202010433261.8A patent/CN111473079A/en active Pending
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2021
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199354A (en) * | 2021-11-29 | 2022-03-18 | 江苏大学 | Self-adaptive magnetic suspension electronic balance and weighing method thereof |
| CN114199354B (en) * | 2021-11-29 | 2024-05-10 | 江苏大学 | Self-adaptive magnetic suspension electronic balance and weighing method thereof |
| CN114483866A (en) * | 2022-02-25 | 2022-05-13 | 浙江大学 | Spring vibration isolator of coupling electromagnetic damping |
| CN114483866B (en) * | 2022-02-25 | 2022-11-25 | 浙江大学 | Electromagnetic damping coupled spring vibration isolator |
Also Published As
| Publication number | Publication date |
|---|---|
| CN214274318U (en) | 2021-09-24 |
| CN111473079A (en) | 2020-07-31 |
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