CN112563198A - Wafer scribing machine for chip processing - Google Patents
Wafer scribing machine for chip processing Download PDFInfo
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- CN112563198A CN112563198A CN202011259765.9A CN202011259765A CN112563198A CN 112563198 A CN112563198 A CN 112563198A CN 202011259765 A CN202011259765 A CN 202011259765A CN 112563198 A CN112563198 A CN 112563198A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
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Abstract
The invention relates to a wafer scribing machine for chip processing, which comprises a bottom plate, a scribing device and a workbench, and also comprises a cooling mechanism and two cleaning mechanisms, wherein each cleaning mechanism comprises a fixed box, a fixed column, an air cylinder, a piston, an air inlet pipe, an air outlet pipe, a filter screen, an oiling component, a fixed block, a driving block, a connecting rope and two air cylinders, the oiling component comprises an oiling box, a driving plate, a driving rod, a power rod, two first springs and two oiling units, the cooling mechanism comprises a water tank, a water inlet pipe, a water spray pipe, a supporting box, two water squeezing components and two supporting rods, the water squeezing components comprise a movable plate and two limiting units, the wafer scribing machine for chip processing realizes the impurity removal function through the cleaning mechanism, avoids increasing the friction force between the scribing device and a wafer due to the adhesion of chips, thereby avoiding influencing the scribing work and improving the scribing quality, through the cooling mechanism, the function of cooling the scribing device is realized, so that the scribing device is prevented from being damaged due to overheating.
Description
Technical Field
The invention relates to the field of chips, in particular to a wafer scribing machine for chip processing.
Background
Wafer dicing is an essential process in the semiconductor chip manufacturing process, and the whole wafer of the prepared chip is divided into single chips according to the size of the chip, which is called wafer dicing.
The existing wafer scribing machine is used for scribing a wafer, produced chips are easily adhered to the wafer, and therefore friction between the wafer and a scribing device can be increased, dividing precision is reduced, scribing work is affected, and the existing wafer scribing machine is used for working, since scribing on the scribing device rotates at a high speed, scribing self temperature is high, if heat is not dissipated in time, consumption of service life of scribing can be accelerated, damage probability of scribing is increased, and reliability of the existing wafer scribing machine is reduced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, a wafer scribing machine for chip processing is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a wafer scribing machine for chip processing comprises a bottom plate, a scribing device and a workbench, wherein the scribing device and the workbench are fixed above the bottom plate, a PLC is arranged in the bottom plate, the wafer scribing machine further comprises a cooling mechanism and two cleaning mechanisms, the two cleaning mechanisms are respectively arranged on two sides of the workbench, the cooling mechanism is arranged above the scribing device, and the cleaning mechanisms are connected with the cooling mechanism;
the cleaning mechanism comprises a fixed box, a fixed column, an air cylinder, a piston, an air inlet pipe, an air outlet pipe, a filter screen, an oiling component, a fixed block, a driving block, a connecting rope and two air cylinders, wherein the fixed box is fixed above the bottom plate through the fixed column, one side of the fixed box, which is close to the workbench, is uniformly provided with a nozzle, the nozzle is communicated with the inside of the fixed box, the air cylinder is fixed above the bottom plate, one side of the air cylinder is communicated with the inside of the fixed box through the air outlet pipe, the other side of the air cylinder is communicated with the air inlet pipe, the filter screen is fixed inside the air inlet pipe, the piston is arranged inside the air cylinder, the piston is hermetically connected with the inner wall of the air cylinder, the fixed block is conical, the bottom surface of the fixed block is fixedly connected with the upper part of, the cylinder body of the air cylinder is vertically fixed above the air cylinder, the air rod of the air cylinder penetrates through the round hole to be fixedly connected with the fixed block, the driving block is fixed at the bottom in the air cylinder, the oiling assembly is connected with the fixed block, the oiling assembly is connected with one end of a connecting rope, the other end of the connecting rope is connected with a cooling mechanism, and the air cylinder is electrically connected with the PLC;
the oiling assembly comprises an oiling box, a driving plate, a driving rod, a power rod, two first springs and two oiling units, one end of the oiling box is fixedly connected with the top end of a fixed block, an opening is formed in the upper portion of the inflator, the other end of the oiling box penetrates through the opening, an oiling port is formed in the other end of the oiling box, the driving plate is arranged inside the oiling box, the driving plate is connected with the inner wall of the oiling box in a sealing mode, lubricating oil is arranged above the driving plate, one end of the power rod is vertically fixed above the driving plate, the two oiling units are respectively arranged on two sides of the oiling box, the oiling units are connected with the top end of the power rod, through holes are formed in the lower portions of the fixed block, the piston and the oiling box, one end of the driving rod is fixedly connected with the lower portion of the piston, and the other end of the driving rod penetrates through holes to be arranged, the other end of the driving rod is arranged opposite to the driving block, the two first springs are arranged below the driving plate respectively, two ends of each first spring are connected with the lower portion of the driving plate and the bottom of the oiling box respectively, the first springs are in a stretching state, one end of the connecting rope is fixedly connected with the upper portion of the oiling box, and the other end of the connecting rope is connected with the cooling mechanism;
the oiling unit comprises an oiling pipe, a fixing ring, a block, a driving rope and two connecting units, wherein the oiling pipe is obliquely arranged towards the fixing block, the oiling pipe is communicated with the oiling box, the periphery of the fixing ring is fixedly connected with the inner wall of the oiling pipe, the block is arranged on one side, close to the oiling box, of the fixing ring, the two connecting units are respectively connected with two ends of one side, close to the oiling box, of the block, two grooves are formed in the inner wall of the oiling pipe, the grooves correspond to the connecting units one by one, the connecting units are connected with the block, and two ends of the driving rope are respectively fixedly connected with the block and the power rod;
the connecting unit comprises a connecting rod and an elastic rope, the connecting rod is L-shaped, one end of the connecting rod is fixedly connected with the blocking block, the other end of the connecting rod is arranged in the groove, the other end of the connecting rod is matched with the groove, the other end of the connecting rod is connected with the groove in a sliding mode, two ends of the elastic rope are fixedly connected with the inner wall of one end, far away from the oil filling box, of the groove and the other end of the connecting rod respectively, and the elastic rope is in a stretching state;
the cooling mechanism comprises a water tank, a water inlet pipe, a water spray pipe, a support box, two water squeezing assemblies and two support rods, wherein two sides of the support box are respectively fixed above the bottom plate through the two support rods;
the water squeezing assembly comprises a movable plate and two limiting units, the movable plate is arranged inside the supporting box and is in sealed connection with the inner wall of the supporting box, the water inlet pipe and the water spraying pipe are arranged between the two movable plates, the two limiting units are respectively arranged at two ends of one side of the movable plate, which is far away from the water inlet pipe, the limiting units are connected with the movable plate, and one end of the connecting rope, which is far away from the oil adding box, is fixedly connected with the movable plate;
spacing unit includes spacing box, gag lever post and two magnet pieces, spacing box is fixed in the inside of supporting the box, the one end and the movable plate fixed connection of gag lever post, one side that is close to the movable plate of spacing box is equipped with the aperture, the other end of gag lever post passes the aperture setting in the inside of spacing box, gag lever post and spacing box sliding connection, the other end and one of them magnet piece fixed connection of gag lever post, another magnet piece is fixed on the inner wall of one side of keeping away from the aperture of spacing box, and two magnet pieces are just to setting up, and the magnetic pole of one side that is close to each other of two magnet pieces is the same.
Preferably, in order to improve the sealing performance, the cleaning mechanism further comprises a sealing ring, the periphery of the sealing ring is fixed on the inner wall of the through hole of the piston, and the inner ring of the sealing ring abuts against the periphery of the driving rod.
Preferably, to avoid the link from separating from the groove, the groove is a dovetail groove.
Preferably, in order to change the moving direction of the connecting rope, the cleaning mechanism further comprises a fixed pulley fixed at the bottom inside the support box, and the connecting rope is wound on the fixed pulley.
Preferably, the driving rope is made of a steel wire rope in order to prolong the service life of the driving rope.
Preferably, the cross-sectional shape of the small hole is square in order to limit the moving direction of the stopper rod.
Preferably, in order to make the stopper rod move smoothly, the inner wall of the small hole is coated with grease.
Preferably, in order to prevent the inner wall of the water tank from being corroded, the inner wall of the water tank is coated with an anti-corrosion zinc coating.
Preferably, a sound-absorbing plate is fixed below the supporting box for the purpose of noise reduction.
Preferably, a photovoltaic panel is fixed above the water tank for performing a solar photovoltaic operation.
The wafer scribing machine for chip processing has the advantages that the cleaning mechanism is used for realizing the function of impurity removal, the friction force between the scribing device and the wafer is prevented from being increased due to the adhesion of fragments, the scribing work is prevented from being influenced, the scribing quality is improved, compared with the existing cleaning mechanism, the cleaning mechanism can also realize the function of automatically coating oil on the inner wall of the air cylinder, the friction between the piston and the inner wall of the air cylinder is reduced, the piston moves smoothly, the abrasion of the piston is reduced, the function of cooling the scribing device is realized through the cooling mechanism, the scribing device is prevented from being damaged due to overheating, the reliability of equipment is improved, compared with the existing cooling mechanism, the cooling mechanism and the cleaning mechanism are integrated into a whole, and the practicability is higher.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a wafer dicing saw for chip processing according to the present invention;
FIG. 2 is a schematic diagram of the configuration of the wringing assembly of the wafer dicing saw for chip processing of the present invention;
FIG. 3 is a schematic structural diagram of a cleaning mechanism of a wafer dicing saw for chip processing according to the present invention;
FIG. 4 is an enlarged view of portion A of FIG. 3;
FIG. 5 is a schematic diagram of the oiling assembly of the wafer dicing saw for chip processing of the present invention;
FIG. 6 is an enlarged view of portion B of FIG. 5;
in the figure: 1. the automatic water-saving device comprises a base plate, 2 parts of a workbench, 3 parts of a scribing device, 4 parts of an air cylinder, 5 parts of an air cylinder, 6 parts of a fixed block, 7 parts of a piston, 8 parts of a driving block, 9 parts of a filter screen, 10 parts of an air inlet pipe, 11 parts of an air outlet pipe, 12 parts of a fixed box, 13 parts of an oil filling pipe, 14 parts of a driving rod, 15 parts of a first spring, 16 parts of a driving plate, 17 parts of a power rod, 18 parts of a driving rope, 19 parts of an oil filling pipe, 20 parts of a fixed ring, 21 parts of a blocking block, 22 parts of a connecting rod, 23 parts of an elastic rope, 24 parts of a sealing ring, 25 parts of a connecting rope, 26 parts of a supporting rod, 27 parts of a supporting box, 28 parts of a water tank, 29 parts of a water inlet pipe, 30 parts of a water spray pipe.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a wafer dicing machine for chip processing includes a bottom plate 1, a dicing device 3 and a workbench 2, wherein the dicing device 3 and the workbench 2 are both fixed above the bottom plate 1, a PLC is arranged in the bottom plate 1, the wafer dicing machine further includes a cooling mechanism and two cleaning mechanisms, the two cleaning mechanisms are respectively arranged at two sides of the workbench 2, the cooling mechanism is arranged above the dicing device 3, and the cleaning mechanisms are connected with the cooling mechanism;
PLCs, i.e., programmable logic controllers, are generally used for the processing of data and the receipt and output of instructions for central control. The user places the wafer on the worktable 2 and then controls the scribing device 3 to scribe the wafer.
This a wafer scribing machine for chip processing has realized the function of edulcoration through clearance mechanism, avoids increasing the frictional force between scribing device 3 and the wafer because of clastic adhesion to avoid influencing scribing work, improved the quality of scribing, through cooling down the mechanism, realized the function for scribing device 3 cooling, thereby avoid scribing device 3 overheated and damage, improved the reliability of equipment.
As shown in fig. 3-6, the cleaning mechanism includes a fixing box 12, a fixing column, an air cylinder 4, a piston 7, an air inlet pipe 10, an air outlet pipe 11, a filter screen 9, an oiling component, a fixing block 6, a driving block 8, a connecting rope 25 and two cylinders 5, the fixing box 12 is fixed above the bottom plate 1 through the fixing column, one side of the fixing box 12 close to the workbench 2 is uniformly provided with a nozzle, the nozzle is communicated with the inside of the fixing box 12, the air cylinder 4 is fixed above the bottom plate 1, one side of the air cylinder 4 is communicated with the inside of the fixing box 12 through the air outlet pipe 11, the other side of the air cylinder 4 is communicated with the air inlet pipe 10, the filter screen 9 is fixed inside the air inlet pipe 10, the piston 7 is arranged inside the air cylinder 4, the piston 7 is connected with the inner wall of the air cylinder 4 in a sealing manner, the fixing block 6 is conical, the bottom surface, two round holes are formed in the upper portion of the inflator 4, the round holes correspond to the air cylinders 5 one by one, a cylinder body of each air cylinder 5 is vertically fixed to the upper portion of the inflator 4, an air rod of each air cylinder 5 penetrates through the round holes to be fixedly connected with the fixing block 6, the driving block 8 is fixed to the bottom of the inner portion of the inflator 4, the oiling assembly is connected with the fixing block 6, the oiling assembly is connected with one end of a connecting rope 25, the other end of the connecting rope 25 is connected with the cooling mechanism, and the air cylinders 5 are electrically connected with the PLC;
the oiling assembly comprises an oiling box 13, a driving plate 16, a driving rod 14, a power rod 17, two first springs 15 and two oiling units, one end of the oiling box 13 is fixedly connected with the top end of a fixed block 6, an opening is formed in the upper portion of the inflator 4, the other end of the oiling box 13 penetrates through the opening, an oiling port is formed in the other end of the oiling box 13, the driving plate 16 is arranged inside the oiling box 13, the driving plate 16 is connected with the inner wall of the oiling box 13 in a sealing mode, lubricating oil is arranged above the driving plate 16, one end of the power rod 17 is vertically fixed above the driving plate 16, the two oiling units are respectively arranged on two sides of the oiling box 13, the oiling units are connected with the top end of the power rod 17, through holes are formed in the lower portions of the fixed block 6, the piston 7 and the oiling box 13, one end of the driving rod 14 is fixedly connected with the lower portion of the piston 7, the other end of the driving rod 14 penetrates through the through hole to be arranged below the piston 7, the other end of the driving rod 14 is arranged opposite to the driving block 8, the two first springs 15 are respectively arranged below the driving plate 16, two ends of each first spring 15 are respectively connected with the lower part of the driving plate 16 and the bottom inside the oiling box 13, each first spring 15 is in a stretching state, one end of the connecting rope 25 is fixedly connected with the upper part of the oiling box 13, and the other end of the connecting rope 25 is connected with the cooling mechanism;
the oiling unit comprises an oiling pipe 19, a fixing ring 20, a block 21, a driving rope 18 and two connecting units, wherein the oiling pipe 19 is obliquely arranged towards the fixing block 6, the oiling pipe 19 is communicated with the oiling box 13, the periphery of the fixing ring 20 is fixedly connected with the inner wall of the oiling pipe 19, the block 21 is arranged on one side, close to the oiling box 13, of the fixing ring 20, the two connecting units are respectively connected with two ends, close to one side of the oiling box 13, of the block 21, two grooves are formed in the inner wall of the oiling pipe 19 and correspond to the connecting units one by one, the connecting units are connected with the block 21, and two ends of the driving rope 18 are respectively fixedly connected with the block 21 and the power rod 17;
the connecting unit comprises a connecting rod 22 and an elastic rope 23, the connecting rod 22 is L-shaped, one end of the connecting rod 22 is fixedly connected with the blocking block 21, the other end of the connecting rod 22 is arranged inside the groove, the other end of the connecting rod 22 is matched with the groove, the other end of the connecting rod 22 is connected with the groove in a sliding mode, two ends of the elastic rope 23 are fixedly connected with the inner wall of one end, far away from the oil adding box 13, of the groove and the other end of the connecting rod 22 respectively, and the elastic rope 23 is in a stretching state;
when scribing is carried out, the control cylinder 5 is started, the air rod is extended to drive the fixed block 6 and the piston 7 to move downwards, so that air in the air cylinder 4 is led into the inside of the fixed box 12 through the air outlet pipe 11 and is sprayed out through the nozzle to realize air blowing work, chips generated during scribing are blown away from a wafer, so that the chips cannot be adhered to the wafer, the increase of friction force between the scribing device 3 and the wafer due to the adhesion of the chips is avoided, the scribing work is prevented from being influenced, the scribing quality is improved, when the piston 7 moves downwards until the driving rod 14 is abutted against the fixed block 6, the piston 7 and the oil filling pipe 19 continue to move downwards, so that the driving rod 14 is abutted against the fixed block 6, the oil filling pipe 19 and the driving rod 16 move relatively, the first spring 15 is stretched, the driving rope 18 drives the blocking block 21 to move towards the direction far away from the fixed ring 20, so that the block 21 no longer blocks the annular hole of the fixing ring 20, thereby facilitating the introduction of the lubricating oil in the filler tube 19 into the interior of the cylinder 4 through the filler tube 19, and the lubricating oil slides down onto the inner wall of the cylinder 4 through the side surface of the fixing block 6, thereby achieving the function of oiling the inner wall of the cylinder 4, so that the friction force between the piston 7 and the inner wall of the cylinder 4 can be reduced, thereby making the piston 7 move more smoothly in the cylinder 4, thereby reducing the wear of the piston 7, increasing the service life of the piston 7, reducing the number of times of replacing the piston 7, thereby improving the practicability of the device, controlling the cylinder 5 to start, withdrawing the air rod, driving the piston 7 to move upwards, separating the driving rod 14 from the fixing block 6, thereby making the driving plate 16 return to the original position under the restoring force of the first spring 15, and at the same time under the restoring force of the elastic rope 23, make the sprue 21 to the direction removal that is close to solid fixed ring 20, make the sprue 21 block up solid fixed ring 20, thereby make the lubricating oil in the oil filling pipe 19 no longer fall into the inside of inflator 4 through oil filling pipe 19, the inside of filter screen 9 edulcoration back suction inflator 4 in the intake pipe 10 can also be passed through with external air in the time of piston 7 rebound, thereby provide the air supply for the work of blowing next time, when oil filling pipe 19 reciprocates, can also drive the work of cooling mechanism through connecting rope 25, realize the function of cooling.
As shown in fig. 2, the temperature reduction mechanism includes a water tank 28, a water inlet pipe 29, a water spray pipe 30, a support box 27, two water squeezing assemblies and two support rods 26, two sides of the support box 27 are respectively fixed above the bottom plate 1 through the two support rods 26, the water tank 28 is fixed above the support box 27, the water tank 28 is communicated with the inside of the support box 27 through the water inlet pipe 29, the water spray pipe 30 is communicated with the lower part of the support box 27, the two water squeezing assemblies are respectively arranged at two sides in the support box 27, the water squeezing assemblies correspond to the refueling boxes 13 one to one, and the water squeezing assemblies are connected with the refueling boxes 13;
the water squeezing assembly comprises a moving plate 31 and two limiting units, the moving plate 31 is arranged inside the supporting box 27, the moving plate 31 is connected with the inner wall of the supporting box 27 in a sealing mode, the water inlet pipe 29 and the water spraying pipe 30 are arranged between the two moving plates 31, the two limiting units are respectively arranged at two ends of one side, far away from the water inlet pipe 29, of the moving plate 31, the limiting units are connected with the moving plates 31, and one end, far away from the oil adding box 13, of the connecting rope 25 is fixedly connected with the moving plate 31;
the limiting unit comprises a limiting box 34, a limiting rod 32 and two magnet blocks 33, the limiting box 34 is fixed inside the supporting box 27, one end of the limiting rod 32 is fixedly connected with the moving plate 31, one side, close to the moving plate 31, of the limiting box 34 is provided with a small hole, the other end of the limiting rod 32 penetrates through the small hole to be arranged inside the limiting box 34, the limiting rod 32 is connected with the limiting box 34 in a sliding mode, the other end of the limiting rod 32 is fixedly connected with one of the magnet blocks 33, the other magnet block 33 is fixed on the inner wall of one side, far away from the small hole, of the limiting box 34, the two magnet blocks 33 are arranged rightly, and the magnetic poles of one sides, close to each other, of the two magnet blocks.
When the oil filling pipe 19 moves downwards, the two moving plates 31 can be driven to move towards the directions away from each other through the connecting rope 25, so that water in the water tank 28 enters the inside of the supporting box 27 through the water inlet pipe 29, the limiting rod 32 is driven to move along the small hole, the two magnet blocks 33 move towards the directions close to each other, when the oil filling pipe 19 moves upwards, due to the fact that the magnetic poles of the sides, close to each other, of the two magnet blocks 33 are the same, repulsion exists between the two magnet blocks 33, the two magnet blocks 33 move towards the directions away from each other through the repulsion, the two moving plates 31 move towards the directions close to each other through the limiting rod 32, clear water in the supporting box 27 is led into the water spraying pipe 30, clear water is sprayed to the scribing device 3, heat on the scribing device 3 can be driven through evaporation of the water, and the function of cooling of the scribing device 3 is achieved, the scribing device 3 is prevented from being damaged due to overheating, so that the scribing work is prevented from being influenced, and the reliability of the equipment is improved.
Preferably, in order to improve the sealing performance, the cleaning mechanism further includes a seal ring 24, an outer periphery of the seal ring 24 is fixed on an inner wall of the through hole of the piston 7, and an inner ring of the seal ring 24 abuts against an outer periphery of the drive rod 14.
By providing the seal ring 24, you will laugh the gap between the drive rod 14 and the through hole, so that the air sucked into the cylinder 4 will not flow into the upper side of the piston 7 through the through hole, and the sealing performance of the cylinder 4 will not be affected, and the cleaning work will not be affected, and the practicability of the apparatus is improved.
Preferably, to avoid separation of the connecting rod 22 from the groove, the groove is a dovetail groove.
Preferably, in order to change the moving direction of the connecting rope 25, the cleaning mechanism further includes a fixed pulley 35, the fixed pulley 35 is fixed at the bottom inside the supporting box 27, and the connecting rope 25 is wound on the fixed pulley 35.
By providing the fixed pulley 35, the moving direction of the connecting rope 25 can be changed, and when the refueling box 13 moves downward, the two moving plates 31 can be driven by the connecting rope 25 to move in the directions away from each other.
Preferably, the driving rope 18 is made of a steel wire rope in order to prolong the service life of the driving rope 18.
Preferably, the cross-sectional shape of the aperture is square in order to limit the direction of movement of the stop bar 32.
Through setting the aperture to the quad slit for the gag lever post 32 can not take place to rotate when moving along the aperture, thereby has reduced rocking when the movable plate 31 removes, thereby avoids the movable plate 31 slope and influences the leakproofness between movable plate 31 and the support box 27 inner wall, thereby has reduced the probability that the phenomenon of leaking appears.
Preferably, in order to make the stopper rod 32 move smoothly, the inner wall of the small hole is coated with grease, so that the friction between the small hole and the stopper rod 32 is reduced, and the stopper rod 32 moves more smoothly along the small hole.
Preferably, the inner wall of the water tank 28 is coated with an anti-corrosion zinc coating to prevent the inner wall of the water tank 28 from being corroded.
Preferably, a sound-absorbing plate 37 is fixed below the supporting box 27 for noise reduction.
Through setting up the abatvoix 37, can absorb the noise that the scribing during operation produced to the purpose of making an uproar has been realized falling.
Preferably, a photovoltaic panel 36 is fixed above the water tank 28 for the solar photovoltaic operation.
Through setting up photovoltaic board 36, can carry out the solar photovoltaic power generation work to can provide electric power support for equipment under the circumstances of city electric wire netting outage, thereby make equipment can carry out the work of cutting into slices, thereby improve the practicality of equipment.
When scribing is carried out, the control cylinder 5 is started, the air rod is extended to drive the fixed block 6 and the piston 7 to move downwards, so that air in the air cylinder 4 is led into the inside of the fixed box 12 through the air outlet pipe 11 and is sprayed out through the nozzle to realize air blowing work, chips generated during scribing are blown away from a wafer, so that the chips cannot be adhered to the wafer, the increase of friction force between the scribing device 3 and the wafer due to the adhesion of the chips is avoided, the scribing work is prevented from being influenced, the scribing quality is improved, when the piston 7 moves downwards until the driving rod 14 is abutted against the fixed block 6, the piston 7 and the oil filling pipe 19 continue to move downwards, so that the driving rod 14 is abutted against the fixed block 6, the oil filling pipe 19 and the driving rod 16 move relatively, the first spring 15 is stretched, the driving rope 18 drives the blocking block 21 to move towards the direction far away from the fixed ring 20, so that the block 21 no longer blocks the annular hole of the fixing ring 20, thereby facilitating the introduction of the lubricating oil in the filler tube 19 into the interior of the cylinder 4 through the filler tube 19, and the lubricating oil slides down onto the inner wall of the cylinder 4 through the side surface of the fixing block 6, thereby achieving the function of oiling the inner wall of the cylinder 4, so that the friction force between the piston 7 and the inner wall of the cylinder 4 can be reduced, thereby making the piston 7 move more smoothly in the cylinder 4, thereby reducing the wear of the piston 7, increasing the service life of the piston 7, reducing the number of times of replacing the piston 7, thereby improving the practicability of the device, controlling the cylinder 5 to start, withdrawing the air rod, driving the piston 7 to move upwards, separating the driving rod 14 from the fixing block 6, thereby making the driving plate 16 return to the original position under the restoring force of the first spring 15, and at the same time under the restoring force of the elastic rope 23, make the sprue 21 to the direction removal that is close to solid fixed ring 20, make the sprue 21 block up solid fixed ring 20, thereby make the lubricating oil in the oil filling pipe 19 no longer fall into the inside of inflator 4 through oil filling pipe 19, the inside of filter screen 9 edulcoration back suction inflator 4 in the intake pipe 10 can also be passed through with external air in the time of piston 7 rebound, thereby provide the air supply for the work of blowing next time, when oil filling pipe 19 reciprocates, can also drive the work of cooling mechanism through connecting rope 25, realize the function of cooling. When the oil filling pipe 19 moves downwards, the two moving plates 31 can be driven to move towards the directions away from each other through the connecting rope 25, so that water in the water tank 28 enters the inside of the supporting box 27 through the water inlet pipe 29, the limiting rod 32 is driven to move along the small hole, the two magnet blocks 33 move towards the directions close to each other, when the oil filling pipe 19 moves upwards, due to the fact that the magnetic poles of the sides, close to each other, of the two magnet blocks 33 are the same, repulsion exists between the two magnet blocks 33, the two magnet blocks 33 move towards the directions away from each other through the repulsion, the two moving plates 31 move towards the directions close to each other through the limiting rod 32, clear water in the supporting box 27 is led into the water spraying pipe 30, clear water is sprayed to the scribing device 3, heat on the scribing device 3 can be driven through evaporation of the water, and the function of cooling of the scribing device 3 is achieved, the scribing device 3 is prevented from being damaged due to overheating, so that the scribing work is prevented from being influenced, and the reliability of the equipment is improved.
Compared with the prior art, this a wafer scribing machine for chip processing passes through clearance mechanism, the function of edulcoration has been realized, avoid increasing the frictional force between scribing device 3 and the wafer because of clastic adhesion, thereby avoid influencing scribing work, the quality of scribing has been improved, compare with current clearance mechanism, this clearance mechanism can also realize the automatic function of scribbling oil on toward 4 inner walls of inflator, thereby the friction between piston 7 and 4 inner walls of inflator has been reduced, make piston 7 remove smoothly, the wearing and tearing of piston 7 have also been reduced, through cooling mechanism, the function of cooling for scribing device 3 has been realized, thereby avoid scribing device 3 overheated and damage, the reliability of equipment has been improved, compare with current cooling mechanism, this cooling mechanism and clearance mechanism be the link gear as an organic whole, the practicality is higher.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A wafer scribing machine for chip processing comprises a bottom plate (1), a scribing device (3) and a workbench (2), wherein the scribing device (3) and the workbench (2) are fixed above the bottom plate (1), and a PLC is arranged in the bottom plate (1), and the wafer scribing machine is characterized by further comprising a cooling mechanism and two cleaning mechanisms, wherein the two cleaning mechanisms are respectively arranged on two sides of the workbench (2), the cooling mechanism is arranged above the scribing device (3), and the cleaning mechanisms are connected with the cooling mechanism;
the cleaning mechanism comprises a fixed box (12), a fixed column, an air cylinder (4), a piston (7), an air inlet pipe (10), an air outlet pipe (11), a filter screen (9), an oiling assembly, a fixed block (6), a driving block (8), a connecting rope (25) and two air cylinders (5), wherein the fixed box (12) is fixed above the bottom plate (1) through the fixed column, one side of the fixed box (12) close to the workbench (2) is uniformly provided with a nozzle, the nozzle is communicated with the inside of the fixed box (12), the air cylinder (4) is fixed above the bottom plate (1), one side of the air cylinder (4) is communicated with the inside of the fixed box (12) through the air outlet pipe (11), the other side of the air cylinder (4) is communicated with the air inlet pipe (10), the filter screen (9) is fixed inside the air inlet pipe (10), the piston (7) is arranged inside the air cylinder (4), the inner wall sealing connection of piston (7) and inflator (4), the shape of fixed block (6) is conical, the bottom surface of fixed block (6) and the top fixed connection of piston (7), the top of inflator (4) is equipped with two round holes, the round hole corresponds with cylinder (5) one-to-one, the cylinder body of cylinder (5) is vertical to be fixed in the top of inflator (4), the gas lever of cylinder (5) passes round hole and fixed block (6) fixed connection, drive block (8) is fixed in the bottom in inflator (4), refuel subassembly is connected with fixed block (6), refuel subassembly is connected with the one end of connecting rope (25), the other end of connecting rope (25) is connected with cooling mechanism, cylinder (5) is connected with the PLC electricity;
the oiling assembly comprises an oiling box (13), a driving plate (16), a driving rod (14), a power rod (17), two first springs (15) and two oiling units, one end of the oiling box (13) is fixedly connected with the top end of a fixed block (6), an opening is formed in the upper portion of the inflator (4), the other end of the oiling box (13) penetrates through the opening, an oiling port is formed in the other end of the oiling box (13), the driving plate (16) is arranged inside the oiling box (13), the driving plate (16) is connected with the inner wall of the oiling box (13) in a sealing mode, lubricating oil is arranged above the driving plate (16), one end of the power rod (17) is vertically fixed above the driving plate (16), the two oiling units are respectively arranged on two sides of the oiling box (13), and the oiling units are connected with the top end of the power rod (17), the oil filling device is characterized in that through holes are formed in the lower portions of the fixed block (6), the piston (7) and the oil filling box (13), one end of the driving rod (14) is fixedly connected with the lower portion of the piston (7), the other end of the driving rod (14) penetrates through the through holes to be arranged below the piston (7), the other end of the driving rod (14) is opposite to the driving block (8), two first springs (15) are respectively arranged below the driving plate (16), two ends of each first spring (15) are respectively connected with the lower portion of the driving plate (16) and the inner bottom of the oil filling box (13), each first spring (15) is in a stretching state, one end of the connecting rope (25) is fixedly connected with the upper portion of the oil filling box (13), and the other end of the connecting rope (25) is connected with the temperature reducing mechanism;
the oiling unit comprises an oiling pipe (19), a fixing ring (20), a blocking block (21), a driving rope (18) and two connecting units, wherein the oiling pipe (19) is obliquely arranged towards the fixing block (6), the oiling pipe (19) is communicated with an oiling box (13), the periphery of the fixing ring (20) is fixedly connected with the inner wall of the oiling pipe (19), the blocking block (21) is arranged on one side, close to the oiling box (13), of the fixing ring (20), the two connecting units are respectively connected with the two ends, close to one side of the oiling box (13), of the blocking block (21), two grooves are formed in the inner wall of the oiling pipe (19), the grooves correspond to the connecting units one to one, the connecting units are connected with the blocking block (21), and the two ends of the driving rope (18) are respectively and fixedly connected with the blocking block (21) and a power rod (17);
the connecting unit comprises a connecting rod (22) and an elastic rope (23), the connecting rod (22) is L-shaped, one end of the connecting rod (22) is fixedly connected with the blocking block (21), the other end of the connecting rod (22) is arranged in the groove, the other end of the connecting rod (22) is matched with the groove, the other end of the connecting rod (22) is connected with the groove in a sliding mode, two ends of the elastic rope (23) are fixedly connected with the inner wall of one end, far away from the oil adding box (13), of the groove and the other end of the connecting rod (22), and the elastic rope (23) is in a stretching state;
the cooling mechanism comprises a water tank (28), a water inlet pipe (29), a water spray pipe (30), a support box (27), two water squeezing assemblies and two support rods (26), wherein two sides of the support box (27) are respectively fixed above the bottom plate (1) through the two support rods (26), the water tank (28) is fixed above the support box (27), the water tank (28) is communicated with the inside of the support box (27) through the water inlet pipe (29), the water spray pipe (30) is communicated with the lower part of the support box (27), the two water squeezing assemblies are respectively arranged on two sides in the support box (27), the water squeezing assemblies correspond to the oil adding boxes (13) one to one, and the water squeezing assemblies are connected with the oil adding boxes (13);
the water squeezing assembly comprises a moving plate (31) and two limiting units, the moving plate (31) is arranged inside the supporting box (27), the moving plate (31) is connected with the inner wall of the supporting box (27) in a sealing mode, the water inlet pipe (29) and the water spraying pipe (30) are arranged between the two moving plates (31), the two limiting units are respectively arranged at two ends of one side, far away from the water inlet pipe (29), of the moving plate (31), the limiting units are connected with the moving plate (31), and one end, far away from the oil adding box (13), of the connecting rope (25) is fixedly connected with the moving plate (31);
the limiting unit comprises a limiting box (34), a limiting rod (32) and two magnet blocks (33), the limiting box (34) is fixed inside the supporting box (27), one end of the limiting rod (32) is fixedly connected with the movable plate (31), one side, close to the movable plate (31), of the limiting box (34) is provided with a small hole, the other end of the limiting rod (32) penetrates through the small hole to be arranged inside the limiting box (34), the limiting rod (32) is in sliding connection with the limiting box (34), the other end of the limiting rod (32) is fixedly connected with one magnet block (33), the other magnet block (33) is fixed on the inner wall of the side, far away from the small hole, of the limiting box (34), the two magnet blocks (33) are arranged rightly, and magnetic poles of one side, close to each other, of the two magnet blocks (33) are the same.
2. The wafer dicing saw for chip processing according to claim 1, wherein the cleaning mechanism further comprises a seal ring (24), an outer periphery of the seal ring (24) is fixed on an inner wall of the through hole of the piston (7), and an inner ring of the seal ring (24) abuts against an outer periphery of the drive rod (14).
3. The wafer dicing saw for chip processing according to claim 1, wherein the groove is a dovetail groove.
4. The wafer dicing machine for chip processing according to claim 1, wherein the cleaning mechanism further comprises a fixed pulley (35), the fixed pulley (35) is fixed at the bottom inside the support box (27), and the connecting rope (25) is wound around the fixed pulley (35).
5. The wafer dicing machine for chip processing according to claim 1, wherein the material of the driving rope (18) is a wire rope.
6. The wafer dicing saw for chip processing according to claim 1, wherein the cross-sectional shape of the small hole is a square.
7. The wafer dicing saw for chip processing according to claim 1, wherein an inner wall of the small hole is coated with grease.
8. The wafer dicing saw for chip processing according to claim 1, wherein an inner wall of the water tank (28) is coated with an anti-corrosion zinc plating layer.
9. The wafer dicing machine for chip processing according to claim 1, wherein an acoustic panel (37) is fixed below the support box (27).
10. The wafer dicing saw for chip processing according to claim 1, wherein a photovoltaic panel (36) is fixed above the water tank (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011259765.9A CN112563198A (en) | 2020-11-12 | 2020-11-12 | Wafer scribing machine for chip processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011259765.9A CN112563198A (en) | 2020-11-12 | 2020-11-12 | Wafer scribing machine for chip processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112563198A true CN112563198A (en) | 2021-03-26 |
Family
ID=75043034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011259765.9A Withdrawn CN112563198A (en) | 2020-11-12 | 2020-11-12 | Wafer scribing machine for chip processing |
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| Country | Link |
|---|---|
| CN (1) | CN112563198A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654611A (en) * | 2022-05-24 | 2022-06-24 | 江苏邦翰信息科技有限公司 | Wafer scribing machine of hard disk video recorder for dynamic environment monitoring |
-
2020
- 2020-11-12 CN CN202011259765.9A patent/CN112563198A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114654611A (en) * | 2022-05-24 | 2022-06-24 | 江苏邦翰信息科技有限公司 | Wafer scribing machine of hard disk video recorder for dynamic environment monitoring |
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