CN112504169A - Device and method for testing laser receiving and transmitting coaxiality of active photoelectric system - Google Patents
Device and method for testing laser receiving and transmitting coaxiality of active photoelectric system Download PDFInfo
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Abstract
The invention discloses a device and a method for testing laser receiving and transmitting coaxiality of an active photoelectric system, wherein the device and the method utilize the light splitting function of a light splitting prism, realize the imaging of a received light beam and the emission of a point light source at the focal plane of a collimator at the same time, and combine the imaging and the point light source into a fixed receiving and transmitting integrated focal plane module; meanwhile, a self-calibration function of the pyramid prism is utilized to calibrate a receiving and transmitting coaxial point corresponding to the point light source, then a receiving and transmitting optical axis of the laser receiving and transmitting photoelectric system is respectively calibrated through a two-axis linear displacement table, and coaxiality deviation of a transmitting optical path and a receiving optical path can be obtained through calculation. The invention has simple operation process, lower requirement on test equipment, capability of fully utilizing the existing experimental instrument for measurement, fixed focal plane module and low required cost.
Description
Technical Field
The invention relates to a device and a method for testing laser receiving and transmitting coaxiality of an active photoelectric system, which are suitable for testing the coaxiality of the active and passive combined photoelectric system, particularly suitable for testing the coaxiality of a high-precision laser radar optical system, and also can be used in the optical adjustment field of optical axis calibration and the like of the active photoelectric system.
Background
The laser radar is a product of combining the traditional radar technology and the modern laser technology, and is an optical remote sensing system for acquiring relevant information of a target by detecting the characteristics of scattered light of the remote target. The laser radar mainly uses near infrared, visible and ultraviolet wave bands, and is much shorter than microwave and millimeter waves used by the traditional radar; and the laser has high brightness and good directivity, and has a series of advantages of high angular resolution, high distance resolution, strong anti-interference capability and the like. The method is an important active remote sensing tool.
The laser radar system generally designs a transmitting light path and a receiving light path into a whole, a laser and a beam expander form a transmitting system, and a receiving lens, an optical receiver and a data processing unit form a receiving system. Because the divergence angle of the emitted laser beam is close to the diffraction limit, the alignment and the assembly and the adjustment of the optical axes of the emitting light path and the receiving light path have certain difficulty, and the coaxial error degree of the receiving light path and the transmitting light path needs to be detected. In recent years, the complexity and the integration of an optical system are continuously improved, higher requirements are provided for the precision stability of the optical system, the reliability and the measurement precision of a laser radar system are directly influenced by the coaxiality error of a transmitting-receiving optical path, whether the transmitting-receiving optical path can be established or not is directly determined, the coaxiality error of the transmitting-receiving optical path is required to be detected, the coaxiality difference is obtained, and whether the optical system meets the use requirements or not is determined.
The invention utilizes the light splitting function of the light splitting prism, realizes the imaging of receiving light beams and the emission of a point light source at the focal plane of the collimator at the same time, and combines the imaging and the point light source into a fixed receiving and transmitting integrated focal plane module; meanwhile, a transmitting-receiving coaxial point corresponding to the point light source is marked by utilizing the self-calibration function of the pyramid prism, and when laser emitted by the emitting end of the active photoelectric system to be tested converges on the transmitting-receiving coaxial point, the emission beam of the collimator is coaxial with the emission beam of the emitting end of the active photoelectric system to be tested, so that the reference is realized; and then the movement of the two-dimensional displacement table at the focal plane position is converted into the direction change of the emergent light of the collimator, and the light beam signal of the receiving end disappears through position translation, so that the boundary position of the receiving optical axis is judged, the optical axis of the receiving end of the active photoelectric system to be detected is finally obtained, and the coaxiality of the receiving and transmitting optical axes is obtained. The invention is suitable for the field of transmitting-receiving coaxial detection of various active and passive combined photoelectric systems, and has simple operation process and low cost.
Disclosure of Invention
The invention aims to provide a device and a method for testing laser receiving and transmitting coaxiality of an active photoelectric system, which can accurately detect the coaxiality of a receiving and transmitting optical axis of the active photoelectric system.
The device of the invention is shown in the attached figure 1:
the single-mode optical fiber 1 emits a laser light source, the light source firstly passes through the light splitting prism 3 and then enters the collimator 8 to be emitted as parallel light beams, the parallel light returns along the original path after passing through the pyramid prism 7, the return light is converged by the collimator 8 and then reflected by the light splitting prism 3 to be imaged on the CCD camera 2, and the position of the light spot is recorded, namely a light receiving and transmitting axis point; the transmitting end 5 of the active photoelectric system to be tested transmits laser, so that the laser is imaged at the transmitting and receiving optical axis point of the CCD camera 2 after passing through the collimator, and the position of the two-dimensional displacement table 4 is recorded at the moment; introducing receiving laser of a receiving end 6 of the active photoelectric system to be tested from the single mode fiber 1, and enabling the laser to enter the receiving end 6 of the active photoelectric system to be tested after being collimated by a collimator 8; and at the moment, the receiving end 6 of the active photoelectric system to be tested outputs signals, the center of the optical axis of the receiving end 6 of the active photoelectric system to be tested is scanned by adjusting the two-dimensional displacement table 4, the position of the two-dimensional displacement table 4 is recorded, and the coaxiality deviation of the receiving and emitting optical systems of the active photoelectric system to be tested can be obtained after the deviation of the two positions is converted.
The device can be used for measuring the transmitting-receiving coaxial parallel error degree of an active photoelectric system, and the method comprises the following steps:
1. collimator device self-check
As shown in the attached figure 1, a single mode optical fiber 1, a CCD camera 2 and a beam splitter prism 3 are fixed on a two-dimensional displacement table 4; and introducing a laser light source into the collimator 8 through the single-mode optical fiber 1, wherein the light source firstly passes through the beam splitter prism 3 and then enters the collimator 8 to be emitted as parallel light beams, the parallel light returns along the original path after passing through the pyramid prism 7, the return light is converged to a focal plane through the collimator 8, the position of the single-mode optical fiber 1 is adjusted, the size and the position of the image of the return light of the pyramid prism 7 on the CCD camera 2 are observed, the position of the single-mode optical fiber 1 is adjusted, the light spot on the CCD camera 2 is minimized, and the position is near the center. This point is recorded as the transmit-receive optical axis point.
2. Alignment of the emitted beam
As shown in fig. 1, the active optoelectronic system to be tested emits light beams aligned: the emitting end 5 of the active photoelectric system to be tested emits laser, the laser is converged and imaged on the CCD camera 2 after passing through the collimator 8, the light spot position of the laser imaged on the CCD camera 2 is enabled to coincide with the light receiving and emitting axis point in the step 1 by finely adjusting the two-axis displacement table 4, and the X-axis position X of the two-axis displacement table 4 is recorded at the moment0And Y-axis position Y0And finishing the alignment of the emission beam of the active photoelectric system to be tested and the emission beam of the collimator.
3. Error detection at the receiving end of a light beam
As shown in fig. 1, the coaxiality error of the light beam received by the active optoelectronic system to be tested is detected: the single-mode optical fiber 1 is led into the receiving end 6 of the active photoelectric system to be tested to receive laser, collimated light enters the receiving end 6 of the active photoelectric system to be tested, and the receiving end 6 of the active photoelectric system to be tested has signal output. As shown in FIG. 2, at this time, the Y-axis position of the two-axis displacement table 4 is firstly kept unchanged, only the X-axis position is rotated, the X-axis position of the two-dimensional displacement table 4 is firstly moved in the positive direction until the received signal disappears, and the X-axis position X at this time is recordedrThen, the X-axis position of the two-dimensional displacement table 4 is shifted in the reverse direction until the reception signal disappears, and the X-axis position X at this time is recordedl. Adjusting the X-axis position of the two-axis displacement table 4 to
And remain unchanged. Then keeping the X-axis position of the two-axis displacement table 4 unchanged, only rotating the Y-axis position, and firstly adjusting the two displacement tables in the positive directionThe Y-axis position of the stage 4 is displaced until the received signal disappears, and the Y-axis position Y at this time is recordedrThen, the Y-axis position of the two-dimensional displacement table 4 is adjusted in the opposite direction until the received signal disappears, and the Y-axis position Y at this time is recordedl. Adjusting the Y-axis position of the two-axis displacement table 4 to
The positions of the receiving center X and the Y axis of the receiving end 6 of the active optoelectronic system to be tested are X respectively1And y1。
4. Coaxiality error calculation
After the step 3, the angular deviation between the transmitting end 5 of the active optoelectronic system to be measured and the receiving end 6 of the active optoelectronic system to be measured can be obtained, and then the angular deviation between the transmitting end 5 of the active optoelectronic system to be measured and the receiving end 6 of the active optoelectronic system to be measured is obtained by conversion according to the focal length of the collimator, wherein the specific formula is as follows:
where F is the focal length of the collimator, θxBeing the coaxiality of the azimuthal directions, thetayIs the coaxiality in the pitch direction.
The invention can measure the coaxiality errors of optical systems with different offsets to obtain corresponding azimuth and pitch angle difference values, and the invention is mainly characterized in that:
1) the device and the method are simple and low in cost;
2) the invention is convenient to test, fully utilizes the existing equipment, does not need to customize a high-precision azimuth pitching rotary table, obtains the angle deviation of the receiving and transmitting optical axis by means of the light spot offset and the focal length conversion of the collimator, can accurately obtain the receiving and transmitting coaxiality of an optical system, and has simple self-checking method;
3) the invention can meet the assembly and calibration of the parallelism of the optical axes with different offsets, and can also meet the assembly, calibration and test of a coaxial photoelectric system;
drawings
FIG. 1 is a schematic diagram of the measurement of the transmit-receive coaxiality error of the active optoelectronic system
FIG. 2 is a schematic diagram of the X-axis and Y-axis position adjustment method
Detailed Description
An embodiment of the method of the present invention will be described in detail below with reference to the accompanying drawings.
The main components used in the present invention are described below:
1) single-mode optical fiber 1: the single-mode optical fiber with the model number of SM980 manufactured by Thorlabs company is adopted, and the main performance parameters are as follows: the working band is 900-1100 nm; the diameter of the optical fiber mode field is 6um @980nm, and the diameter of the cladding core is 125 +/-1 um;
2) the CCD camera 2: the main performance parameters of the beam analyzer adopting the American Spiricon company model SP620 are as follows: the working wave band is 190nm-1100nm, the pixel size is 4.4um by 4.4um, and the number of pixels is 1600 by 1200;
3) beam splitter prism 3: the non-polarization beam splitter prism with the structure of Thorlabs and the model number of BS017 is adopted, and the main performance parameters are as follows: the working wave band is 700-1100nm, the light splitting ratio is 1: 1, the aperture of the light transmission is 25 mm;
4) two-axis linear displacement stage 4: a two-axis linear displacement table with the belt structure of Thorlabs company and the model number of XYT1 is adopted, the X axis and the Y axis are both 13mm linear strokes, and the precision can reach 10 mu m. Meanwhile, the single-mode optical fiber 1, the CCD camera 2 and the beam splitter prism 3 can be placed on a support and can move up and down and left and right in the focal plane direction, the displacement direction is shown in figure 1, the X-axis direction is shown by an arrow, and the Y-axis direction is perpendicular to the paper surface and faces outwards.
5) The optical system to be tested: the device comprises an emission end 5 of an active photoelectric system to be tested and a receiving end 6 of the active photoelectric system to be tested, wherein the wavelength of the emission end 5 of the active photoelectric system to be tested is 1064nm, the receiving system 6 of the active photoelectric system to be tested is used for receiving signals, the receiving system 6 adopts an APD detector to receive signals, and the spectral response range is 400-1100 nm.
6) Corner cube 7: the cube-corner prism of the Thorlabs company with the model number PS971 is adopted, and the main performance parameters are as follows: the surface profile of the light-transmitting surface is better than lambda/10 @632.8 nm; the rotation precision is less than 3', the light transmission aperture is 25.4mm, and the light transmission range is 400 and 1100 nm;
7) the collimator 8: the common reflective collimator is adopted, the aperture of a telescope is 400mm, the focal length of the telescope is 4m, and the required RMS of a paraboloid surface is superior to 1/20 lambda @632.8 nm;
the device of the invention is schematically shown in figure 1, and comprises the following steps:
1, self-checking of a collimator device: as shown in fig. 1, a single mode optical fiber 1, a CCD camera 2 and a beam splitting prism 3 are fixed on a two-dimensional displacement table 4; and then, 1064nm laser is introduced into a collimator 8 with the focal length of 4m through the single-mode optical fiber 1, the laser firstly passes through the beam splitter prism 3 and then enters the collimator 8 to be emitted as parallel light beams, the parallel light returns along the original path after passing through the pyramid prism 7, the return light is converged to a focal plane through the collimator 8, the position of the single-mode optical fiber 1 is adjusted, the size and the position of the image of the return light of the pyramid prism 7 on the CCD camera 2 are observed, and the position of the single-mode optical fiber 1 is adjusted to ensure that the light spot on the CCD camera 2 is minimum and the position is close to the center. This point is recorded as the transmit-receive optical axis point.
2, aligning the emission light beams of the active optoelectronic system to be tested: as shown in the attached drawing 1, a 1064nm laser is emitted by an emitting end 5 of an active photoelectric system to be measured, the laser is converged and imaged on a CCD camera 2 after passing through a collimator 8, the position of a light spot imaged on the CCD camera 2 by finely adjusting a two-axis displacement table 4 is made to coincide with the axis point of the light receiving and emitting in step 1, and at this time, the X-axis position X of the two-axis displacement table 4 is recorded0(in um) and Y-axis position Y0(unit is um) to complete the alignment of the emission beam of the active photoelectric system to be tested and the emission beam of the collimator
3, detecting the coaxiality error of the received light beam of the active photoelectric system to be detected: as shown in attached figure 1, a single mode fiber 1 introduces a 1064nm laser source received by a receiving end 6 of an active photoelectric system to be measured, the laser enters the receiving end 6 of the active photoelectric system to be measured after being collimated by a collimator 8 with the focal length of 4m, and the positions of an X axis and a Y axis of a two-axis displacement table 4 are adjusted, so that the receiving end 6 of the active photoelectric system to be measured hasAnd (6) outputting the signals. As shown in FIG. 2, the Y-axis position of the two-axis displacement table 4 is firstly kept unchanged, only the X-axis position is rotated, the X-axis position is firstly adjusted along the time until the received signal disappears, and the X-axis position at the moment is recordedr(in um), then the X-axis position is adjusted counterclockwise until the received signal disappears, and the X-axis position X at this time is recordedl(in um). Adjusting the X-axis position of the two-axis displacement table 4 to
(unit is um) and keeping the same, then keeping the X-axis position of the two-axis displacement table 4 constant, only rotating the Y-axis position, firstly adjusting the Y-axis position clockwise until the received signal disappears, and recording the Y-axis position Y at the momentr(in um), then adjusting the Y-axis position counterclockwise until the received signal disappears, and recording the Y-axis position Y at the momentl(in um). Adjusting the Y-axis position of the two-axis displacement table 4 to
(unit is um), the positions of the receiving center X and the Y axis of the receiving end 6 of the active photoelectric system to be measured are respectively X1And y1。
4, calculation of coaxiality error
After the step 3, the angular deviation between the transmitting end 5 of the active optoelectronic system to be measured and the receiving end 6 of the active optoelectronic system to be measured can be obtained, and then the angular deviation between the transmitting end 5 of the active optoelectronic system to be measured and the receiving end 6 of the active optoelectronic system to be measured is obtained by conversion according to the focal length of the collimator, wherein the specific formula is as follows:
in the formula, thetaxIs the axiality in azimuth (in urad), θyBeing coaxiality in pitch direction (single)Bit urad).
Claims (5)
1. The utility model provides a testing arrangement of initiative optoelectronic system laser receiving and dispatching axiality, includes single mode fiber (1), CCD camera (2), beam splitter prism (3), diaxon displacement platform (4), awaits measuring initiative optoelectronic system transmitting terminal (5) and await measuring initiative optoelectronic system receiving terminal (6), pyramid prism (7), collimator (8), its characterized in that:
the single-mode optical fiber (1) and the CCD camera (2) are fixed on two sides of the beam splitter prism (3) at equal intervals, the transceiving coaxial module is located at the focal plane position of the collimator tube (8), and the single-mode optical fiber (1) and the CCD camera (2) are matched with the emitting end (5) of the active photoelectric system to be tested to emit laser. The positions of the single-mode fiber (1), the CCD camera (2) and the beam splitter prism (3) are relatively static and are simultaneously fixed on the two-dimensional displacement table (4) together. The single-mode fiber (1) introduces a laser light source into a collimator (8), the light source of the single-mode fiber firstly passes through a beam splitter prism (3) and then enters the collimator (8) to be emitted as parallel light beams, the parallel light returns along the original path after passing through a pyramid prism (7), the return light is converged by the collimator (8), reflected by the beam splitter prism (3) and imaged on a CCD camera (2), and the position of the light spot is recorded, namely a light receiving and emitting axis point; the transmitting end (5) of the active photoelectric system to be tested transmits laser, so that the laser passes through the collimator and then is imaged at the receiving and transmitting optical axis point of the CCD camera (2), and the position of the two-axis displacement table (4) is recorded at the moment; introducing receiving laser of a receiving end (6) of the active photoelectric system to be tested from the single-mode optical fiber (1), wherein the laser enters the receiving end (6) of the active photoelectric system to be tested after being collimated by a collimator tube (8); and at the moment, a signal is output from the receiving end (6) of the active photoelectric system to be tested, the center of the optical axis of the receiving end (6) of the active photoelectric system to be tested is scanned by adjusting the two-axis displacement table (4), the positions of the two-axis displacement table (4) at the moment are recorded, and the deviation of the two positions is converted to be the coaxiality of the light receiving and emitting optical system of the active photoelectric system to be tested.
2. The coaxiality testing device of the laser transceiving electro-optical system according to claim 1, wherein: the working wave band of the light splitting prism (3) is 700-1100nm, the light splitting ratio is 1: 1, the light transmission aperture is 20 mm; the splitting ratio of the used wavelength is between 4:6 and 6:4, and the light-passing surface shape deviation RMS value is better than lambda/10 @632.8 nm.
3. The coaxiality testing device of the laser transceiving electro-optical system according to claim 1, wherein: the ratio of the precision of the two-axis displacement table (4) to the focal length of the collimator (8) is superior to the requirement of system test precision, and the precision can reach 10 mu m.
4. The coaxiality testing device of the laser transceiving electro-optical system according to claim 1, wherein: the revolution precision of the pyramid prism (7) is less than 3'.
5. A method for measuring the coaxiality of the coaxiality testing device of the laser transceiver optoelectronic system based on the claim 1, which is characterized by comprising the following steps:
1) self-checking of the collimator device: the single-mode optical fiber (1), the CCD camera (2) and the beam splitting prism (3) are fixed on a two-dimensional displacement table (4); a laser light source is introduced into a collimator (8) through a single-mode fiber (1), the light source of the single-mode fiber firstly passes through a beam splitter prism (3) and then enters the collimator (8) to be emitted as parallel light beams, the parallel light returns along the original path after passing through a pyramid prism (7), the return light is converged to a focal plane through the collimator (8), the position of the single-mode fiber (1) is adjusted, the size and the position of the image of the return light of the pyramid prism (7) on a CCD camera (2) are observed, and the position of the single-mode fiber (1) is adjusted to enable the light spot on the CCD camera (2) to be the minimum and the position to be close to the center. Recording the point as a light receiving and transmitting axis point;
2) the emission light beam of the active photoelectric system to be tested is aligned: the active photoelectric system to be tested emits laser at an emitting end (5), the laser is converged and imaged on the CCD camera (2) through the collimator (8), the light spot position of the laser imaged on the CCD camera (2) is coincided with the light receiving and emitting axis point in the step 1) through fine adjustment of the two-axis displacement table (4), and the X-axis position X of the two-axis displacement table (4) is recorded at the moment0And Y-axis position Y0The alignment of the emission beam of the active photoelectric system to be tested and the emission beam of the collimator is completed;
3) detecting the coaxiality error of the received light beam of the active photoelectric system to be detected: receiving laser led into a receiving end (6) of the active photoelectric system to be tested from the single-mode optical fiber (1) enters the receiving end (6) of the active photoelectric system to be tested after being collimated by the collimator tube (8), and the receiving end (6) of the active photoelectric system to be tested outputs signals. Firstly keeping the Y-axis position of the two-axis displacement table (4) unchanged, only rotating the X-axis position, firstly adjusting the X-axis position clockwise until the received signal disappears, and recording the X-axis position at the momentrThen, the X-axis position is adjusted counterclockwise until the received signal disappears, and the X-axis position X at the moment is recordedl. Adjusting the X-axis position of a two-axis displacement table (4) to
Keeping the position of the X axis of the two-axis displacement table (4) unchanged, only rotating the position of the Y axis, firstly adjusting the position of the Y axis clockwise until the received signal disappears, and recording the position Y of the Y axis at the momentrThen, the Y-axis position is adjusted counterclockwise until the received signal disappears, and the Y-axis position Y at this time is recordedl. Adjusting the Y-axis position of the two-axis displacement table (4) to
The X-axis position and the Y-axis position of a receiving center of a receiving end (6) of the active photoelectric system to be detected are respectively X1And y1：
4) And (3) coaxiality error calculation: after the step 3), the angle deviation between the transmitting end (5) of the active photoelectric system to be tested and the receiving end (6) of the active photoelectric system to be tested can be obtained, and then the angle deviation between the transmitting end (5) of the active photoelectric system to be tested and the receiving end (6) of the active photoelectric system to be tested is obtained by conversion according to the focal length of the collimator, wherein the specific formula is as follows:
where F is the focal length of the collimator, θxBeing the coaxiality of the azimuthal directions, thetayIs the coaxiality in the pitch direction.
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| CN113340424A (en) * | 2021-06-18 | 2021-09-03 | 上海国科航星量子科技有限公司 | Device and method for detecting performance of polarized light |
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