CN112492476A - Miniature microphone dust keeper and MEMS microphone - Google Patents
Miniature microphone dust keeper and MEMS microphone Download PDFInfo
- Publication number
- CN112492476A CN112492476A CN202011400332.0A CN202011400332A CN112492476A CN 112492476 A CN112492476 A CN 112492476A CN 202011400332 A CN202011400332 A CN 202011400332A CN 112492476 A CN112492476 A CN 112492476A
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- carrier
- miniature microphone
- microphone
- filtering
- filtering part
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention provides a miniature microphone dustproof device and an MEMS (micro-electromechanical systems) microphone, wherein the miniature microphone dustproof device comprises a carrier and a dustproof net arranged on the carrier; the dustproof net is characterized by comprising a supporting part and a filtering part, wherein the filtering part is connected with the carrier through the supporting part; wherein; a connecting area is arranged on the periphery of the filtering part from outside to inside, a connecting part connected with the filtering part is arranged in the connecting area, and one end of the connecting part, which is far away from the center of the filtering part, is integrally formed with the supporting part; and through holes corresponding to the upper and lower positions of the filter part are formed in the carrier. The invention can effectively solve the problem that the displacement degree of the net part wrinkles on the existing miniature microphone dustproof device is relatively large.
Description
Technical Field
The invention relates to the technical field of miniature microphone dust prevention, in particular to a miniature microphone dust prevention device and an MEMS (micro-electromechanical systems) microphone.
Background
In order to prevent the chip inside the miniature microphone from being affected by external powder, particles and moisture, and therefore to reduce the service life of the miniature microphone, under normal circumstances, a miniature microphone dust-proof device is required to be designed at the communication position (such as a sound hole) between the inside of the miniature microphone and the outside, and the miniature microphone chip is separated from the external environment through the miniature microphone dust-proof device, so that the miniature microphone chip is protected.
However, the conventional micro microphone dust-proof device usually includes a mesh part and a carrier part, which are made of different materials, and since the thickness, mechanical properties and thermal expansion coefficient of the materials used in the two parts are different, a strong thermal stress is generated inside the micro microphone dust-proof device (mainly at the interface of the materials) during the installation process, especially during the heat treatment process of the micro microphone dust-proof device.
Specifically, the material of the mesh portion and the support may be inorganic or organic, such as metal, semiconductor, or ceramic. In recent years, the number of combinations of heterogeneous materials has been increasing in accordance with the demand for thinning of chip thickness and cost reduction. For example, a metal film is generally used for the mesh portion, and an organic film is generally used for the support. However, the two materials have a difference in Coefficient of Thermal Expansion (CTE) of about ten times, and when the two materials are joined at a high temperature and then left at a normal temperature, the shrinkage of the web with respect to the carrier is small, and therefore, wrinkles or deformation may occur in the filtration region of the web.
Generally, the displacement degree of the pleats of the filter region is proportional to the size of the dust-proofing device, and the larger the dust-proofing device is, the more the displacement amount in the thickness direction of the pleats increases, and with the increase of the displacement amount, it is difficult to determine whether the filter is in the focal depth range of the optical microscope in the manufacturing inspection (screening inspection).
However, for the MEMS microphone, the specification of the device such as the dust-proof device is predetermined, and therefore, a method for effectively reducing the displacement degree of the wrinkle of the filtering area is needed on the premise of ensuring the specification of the dust-proof device is not changed.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a micro microphone dust-proof device, so as to solve the problem of the conventional micro microphone dust-proof device that the displacement degree of the mesh portion wrinkle is relatively large.
The miniature microphone dustproof device provided by the embodiment of the invention comprises a carrier and a dustproof net arranged on the carrier; the dustproof net comprises a supporting part and a filtering part, and the filtering part is connected with the carrier through the supporting part; wherein; a connecting area is arranged on the periphery of the filtering part from outside to inside, a connecting part connected with the filtering part is arranged in the connecting area, and one end of the connecting part, which is far away from the center of the filtering part, is integrally formed with the supporting part; and through holes corresponding to the upper and lower positions of the filter part are formed in the carrier.
Preferably, the upper surface of the carrier is connected to the support portion and the connection portion.
Further, it is preferable that the upper surface of the carrier is connected only to the support portion.
In addition, it is preferable that the filter part and the connection region have a circular structure as a whole; and the number of the first and second electrodes,
the through hole is a cylindrical structure corresponding to the whole upper and lower positions formed by the filtering part and the connecting area.
In addition, it is preferable that the carrier has a hollow rectangular or cylindrical structure.
In addition, preferably, the connecting part is a position beam type structure; and the number of the first and second electrodes,
the three sides of the connecting part far away from the supporting part are connected with the filtering part, and one end of the connecting part close to the supporting part is integrally formed with the supporting part.
In addition, preferably, the connecting area is provided with at least two connecting areas from outside to inside on the periphery of the filter part; and the connecting areas are uniformly or symmetrically distributed on the periphery of the filter part.
In addition, it is preferable that an upper concave area and a lower convex area are provided in the filter portion.
In another aspect, the present invention further provides an MEMS microphone, which includes a substrate, a housing, an MEMS chip, and the above-mentioned micro microphone dust-proof device; a packaging structure is formed between the substrate and the shell, and the MEMS chip is arranged on the substrate in the packaging structure; and the substrate is provided with a sound hole corresponding to the upper position and the lower position of the MEMS chip, and the miniature microphone dustproof device is arranged outside the sound hole or between the sound hole and the MEMS chip.
In addition, it is preferable that the micro microphone dust-proof device is disposed between the acoustic hole and the MEMS chip through the carrier; and, the dust screen is disposed between the acoustic hole and the MEMS chip.
According to the technical scheme, the miniature microphone dustproof device provided by the invention has the advantages that the connection area is arranged on the periphery of the filter part, and the connection part connected with the support part is arranged in the connection area, so that the displacement of wrinkles caused by buckling of the net part can be effectively inhibited; in addition, the displacement of the folds can be further controlled by arranging the upper convex part and the lower concave part in the filter part of the dust screen; in addition, the connecting areas are uniformly or symmetrically distributed on the periphery of the filter part, so that the stress applied to each position of the filter part is ensured to be uniform, and the wrinkles of the filter part are reduced.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Drawings
Other objects and results of the present invention will become more apparent and more readily appreciated as the same becomes better understood by reference to the following description taken in conjunction with the accompanying drawings. In the drawings:
fig. 1 is a top view of a dust-proof device for a micro microphone according to an embodiment of the present invention;
fig. 2 is a front sectional view of a dust-proof device for a micro microphone according to an embodiment of the present invention;
fig. 3 is a perspective view of a dust-proof device for a miniature microphone according to an embodiment of the present invention;
fig. 4 is a front sectional view of a micro microphone according to an embodiment of the present invention;
wherein the reference numerals include: filter 11, support 121, connection 122, carrier 13, via 14, substrate 15, MEMS chip 16, housing 17, acoustic hole 19.
The same reference numbers in all figures indicate similar or corresponding features or functions.
Detailed Description
To describe the structure of the miniature microphone dust-proof device of the present invention in detail, specific embodiments of the present invention will be described below with reference to the accompanying drawings.
Fig. 1 shows a top view structure of a micro microphone dust-proof device provided by an embodiment of the invention; fig. 2 shows a front cross-sectional structure of a micro microphone dust-proof device provided by an embodiment of the invention; fig. 3 shows a three-dimensional structure of a micro microphone dust-proof device provided by an embodiment of the present invention, which is shown in common with fig. 1 to 3, and includes a carrier 13 for supporting and a dust-proof net disposed on the carrier 13; the dust screen allows air to pass through but blocks external powder, particles, etc. from passing through, wherein the carrier 13 is a hollow structure, i.e., a through hole 14 is formed in the center, for example.
Specifically, the dust screen comprises a support part 121 and a filter part 11, the filter part 11 is used for filtering particulate matters, and the filter part 11 is connected with the carrier 13 through the support part 121; wherein; a connecting area is arranged on the periphery of the filter part 11 from outside to inside, a connecting part 122 connected with the filter part 11 is arranged in the connecting area, the connecting part is adapted in the connecting area and connected with the filter part 11, and one end of the connecting part 122 far away from the center of the filter part 11 is integrally formed with the supporting part 121; in the carrier 13, through holes 14 are formed corresponding to the vertical positions of the filter unit 11.
With this configuration, the plurality of connecting portions 122 integrally formed with the support portion 121 are provided in the filter unit 11, so that the support manner of the filter unit 11 can be finely divided, the overall length and area of the filter unit 11 can be effectively reduced, the stability of the filter unit 11 can be improved, and the displacement amount of the pleats of the filter unit 11 can be suppressed.
Preferably, the upper surface of the carrier 13 may be directly connected to the support portion 121 and the connection portion 122, and in this case, since the lower portions of the support portion 121 and the connection portion 122 are both connected to the carrier 13, the support stability of the filter portion 11 may be further improved.
Of course, the upper surface of the carrier 13 may be connected to the support portion 121 only, and the connection portion 122 may be suspended together with the filter portion 11, in which case, not only the overall length and area of the filter portion 11 may be effectively reduced, but also the through holes 14 inside the carrier 13 may be ensured to have a larger volume, thereby improving the sound transmission effect of the through holes 14.
In addition, in order to further improve the stability of the support of the filter screen by the carrier 13, the filter part 11 and the connection area may be integrally configured as a circular structure; the through hole 14 is a cylindrical structure corresponding to the entire vertical position of the filter unit 11 and the connection region.
The dust-proof screen may cover one end of the through hole 14, or may be provided in the through hole 14, for example, at the center in the depth direction of the through hole 14, so as to cover the through hole 14 in a plan view. When the dust-proof net is used to cover one end of the through hole 14 of the carrier 1311, the microphone dust-proof device can be easily attached to the microphone substrate 15 in the correct attachment direction. When the structure that the dust screen is arranged in the through hole 14 is adopted, in the process of assembling the miniature microphone dust-proof device on the substrate 15 of the microphone, the installation direction does not need to be distinguished, the efficiency of the assembling process can be improved, and the dust screen is prevented from being damaged due to the fact that the dust screen is positioned in the through hole 14 and is contacted in the assembling process and the transporting process. In the following description, a structure in which one end of the through-hole 14 is covered with a dust net will be described as an example.
Specifically, the carrier 13 is a hollow cuboid, cylinder or cube, and the like, as long as the supporting function of the dust screen is satisfied, and the hollow structure is the through hole 14, and is used for transmitting an external sound signal into the interior of the miniature microphone.
In a preferred embodiment of the present invention, in order to further enhance the effect of the connecting portion 122 on suppressing the buckling of the filter portion 11, the connecting portion 122 may be provided in a bridge-shaped structure (a structure having a rectangular cross section); three sides of the connecting portion 122, which are away from the supporting portion 121, are connected to the filter portion 11, and one end of the connecting portion 122, which is close to the supporting portion 121, is integrally formed with the supporting portion 121. In addition, the supporting effect of the connecting portion 122 on the filter portion 11 can be further improved by the design.
Specifically, at least two connecting areas are arranged on the periphery of the filter part 11 from outside to inside; and, the connection regions are uniformly or symmetrically distributed on the outer circumference of the filter part 11. By such symmetrical or uniformly distributed arrangement, the stresses applied to the connecting portion 122 at each position of the filter unit 11 can be made the same, and the displacement amount of the pleats of the filter unit 11 can be further suppressed.
Further, in a preferred embodiment of the present invention, in order to further suppress the amount of displacement of the pleats of the filter house 11, it is also possible to form an upper concave region and a lower convex region in the filter house 11 by adjusting the bending rigidity at each position inside the filter house 11, and reduce the amount of displacement of the filter house 11 in the thickness direction due to the pleats by fitting between the upper concave region and the lower convex region.
Specifically, since the cross section of the sound hole 19 of the miniature microphone is usually configured to be a circular structure, in order to achieve the fitting between the miniature microphone dust-proof device and the sound hole 19, the cross section of the whole body formed by the filter part 11 and the connecting part 122 and the cross section of the through hole 14 can be configured to be a circular structure; the filter unit 11 is provided with a mesh having a circular, polygonal or irregular structure, thereby achieving a desired filtering effect.
In addition, in order to prevent external moisture from entering the interior of the miniature microphone through the filter portion 11, the filter portion 11 may be made of a material having a hydrophobic property to damage the miniature microphone dust-proof device.
In addition, fig. 4 shows a front cross-sectional structure of a MEMS microphone according to an embodiment of the present invention, and as can be seen from fig. 4, the present invention further provides a MEMS microphone, which includes a substrate 15 for carrying a chip, a protective housing 17, a MEMS chip 16, and the above-mentioned micro microphone dust-proof device; wherein, a packaging structure is formed between the substrate 15 and the shell 17, and the MEMS chip 16 is arranged on the substrate 15 in the packaging structure; moreover, the substrate 15 is provided with a sound hole 19 corresponding to the up-and-down position of the MEMS chip 16, and the micro microphone dust-proof device is disposed outside the sound hole 19 or between the sound hole 19 and the MEMS chip 16 as long as the function of covering the sound hole 19 by the micro microphone dust-proof device is satisfied.
Specifically, when the miniature microphone dust-proof device is disposed between the sound hole 19 and the MEMS chip 16, the miniature microphone dust-proof device may be disposed between the sound hole 19 and the MEMS chip 16 by way of the carrier 13 being connected with the substrate 15; also, a dust screen is provided between the acoustic hole 19 and the MEMS chip 16.
In this way, a channel formed by the sound hole 19 and the through hole 14 is formed, through which external sound signals enter the interior of the microphone, while external powder, particles and moisture are blocked by the filter 11, thereby protecting the MEMS chip 16 inside the housing 17.
As can be seen from the above embodiments, the dust-proof device for a miniature microphone according to the present invention has at least the following advantages:
1. the displacement of the wrinkles caused by the buckling of the net part can be effectively inhibited by arranging the connecting area on the periphery of the filter part and arranging the connecting part connected with the supporting part in the connecting area;
2. the displacement of the folds can be further controlled by arranging the upper convex part and the lower concave part in the filter part of the dust screen;
3. the connecting areas are uniformly or symmetrically distributed on the periphery of the filter part, so that the stress on each position of the filter part can be ensured to be uniform, and the folds of the filter part are reduced;
4. the filter part is made of a hydrophobic material, so that the waterproof effect of the filter part can be realized, and a micro microphone chip in the micro microphone is protected;
5. by providing the entire dust-proof device for a miniature microphone with a more symmetrical pattern in the cross-sectional view at the filter portion, the amount of displacement of the filter portion can be further suppressed.
The dust-proof device for a miniature microphone and the MEMS microphone according to the present invention have been described above by way of example with reference to the accompanying drawings. However, it will be understood by those skilled in the art that various modifications may be made to the above-described miniature microphone dust-proof device and MEMS microphone of the present invention without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (10)
1. A dustproof device for a miniature microphone comprises a carrier and a dustproof net arranged on the carrier; the dustproof net is characterized by comprising a supporting part and a filtering part, wherein the filtering part is connected with the carrier through the supporting part; wherein;
a connecting area is arranged on the periphery of the filtering part from outside to inside, a connecting part connected with the filtering part is arranged in the connecting area, and one end of the connecting part, which is far away from the center of the filtering part, is integrally formed with the supporting part; and the number of the first and second electrodes,
through holes corresponding to the upper and lower positions of the filtering part are formed in the carrier.
2. The miniature microphone dust keeper of claim 1,
the upper surface of the carrier is connected with the supporting part and the connecting part.
3. The miniature microphone dust keeper of claim 1,
the upper surface of the carrier is connected only to the support portion.
4. The miniature microphone dust keeper of claim 3,
the filtering part and the connecting area are integrally in a circular structure; and the number of the first and second electrodes,
the through hole is a cylindrical structure corresponding to the whole upper and lower positions formed by the filtering part and the connecting area.
5. The miniature microphone dust keeper of claim 1,
the carrier is of a hollow cuboid or cylinder structure.
6. The miniature microphone dust keeper of claim 1,
the connecting part is of a position beam type structure; and the number of the first and second electrodes,
the three sides of the connecting part far away from the supporting part are connected with the filtering part, and one end of the connecting part close to the supporting part is integrally formed with the supporting part.
7. The miniature microphone dust keeper of claim 6,
the connecting areas are provided with at least two connecting areas from outside to inside on the periphery of the filtering part; and the number of the first and second electrodes,
the connecting areas are uniformly or symmetrically distributed on the periphery of the filter part.
8. The miniature microphone dust keeper of claim 1,
an upper concave area and a lower convex area are arranged in the filtering part.
9. A MEMS microphone comprising a substrate, a housing, a MEMS chip, and the miniature microphone dust-proof device of any one of claims 1 to 8; wherein the content of the first and second substances,
a packaging structure is formed between the substrate and the shell, and the MEMS chip is arranged on the substrate in the packaging structure; and the number of the first and second electrodes,
the substrate is provided with a sound hole corresponding to the upper position and the lower position of the MEMS chip, and the miniature microphone dustproof device is arranged outside the sound hole or between the sound hole and the MEMS chip.
10. The MEMS microphone of claim 9,
the miniature microphone dustproof device is arranged between the sound hole and the MEMS chip through the carrier; and, the dust screen is disposed between the acoustic hole and the MEMS chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011400332.0A CN112492476B (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011400332.0A CN112492476B (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112492476A true CN112492476A (en) | 2021-03-12 |
| CN112492476B CN112492476B (en) | 2022-08-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202011400332.0A Active CN112492476B (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM446658U (en) * | 2012-07-31 | 2013-02-11 | Topguns Automation Corp | Dust filtering sheet |
| CN104105040A (en) * | 2014-07-31 | 2014-10-15 | 歌尔声学股份有限公司 | MEMS (Micro-electromechanical Systems) microphone |
| US20190145806A1 (en) * | 2017-11-14 | 2019-05-16 | Knowles Electronics, Llc | Sensor package with ingress protection |
| CN110267173A (en) * | 2019-06-28 | 2019-09-20 | 歌尔股份有限公司 | A kind of microfilter and acoustic equipment |
| CN110809207A (en) * | 2019-10-31 | 2020-02-18 | 歌尔股份有限公司 | Micro-filter and MEMS sensor assembly |
| CN110933579A (en) * | 2019-12-31 | 2020-03-27 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN110972047A (en) * | 2019-12-31 | 2020-04-07 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111147995A (en) * | 2019-12-31 | 2020-05-12 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111711911A (en) * | 2020-06-30 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
| CN111711904A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
-
2020
- 2020-12-02 CN CN202011400332.0A patent/CN112492476B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM446658U (en) * | 2012-07-31 | 2013-02-11 | Topguns Automation Corp | Dust filtering sheet |
| CN104105040A (en) * | 2014-07-31 | 2014-10-15 | 歌尔声学股份有限公司 | MEMS (Micro-electromechanical Systems) microphone |
| US20190145806A1 (en) * | 2017-11-14 | 2019-05-16 | Knowles Electronics, Llc | Sensor package with ingress protection |
| CN110267173A (en) * | 2019-06-28 | 2019-09-20 | 歌尔股份有限公司 | A kind of microfilter and acoustic equipment |
| CN110809207A (en) * | 2019-10-31 | 2020-02-18 | 歌尔股份有限公司 | Micro-filter and MEMS sensor assembly |
| CN110933579A (en) * | 2019-12-31 | 2020-03-27 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN110972047A (en) * | 2019-12-31 | 2020-04-07 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111147995A (en) * | 2019-12-31 | 2020-05-12 | 歌尔股份有限公司 | Dustproof structure, microphone packaging structure and electronic equipment |
| CN111711904A (en) * | 2020-06-24 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
| CN111711911A (en) * | 2020-06-30 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
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| Publication number | Publication date |
|---|---|
| CN112492476B (en) | 2022-08-09 |
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