CN112448612A - Piezoelectric actuation linear moving platform and working method thereof - Google Patents
Piezoelectric actuation linear moving platform and working method thereof Download PDFInfo
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- CN112448612A CN112448612A CN202011154116.2A CN202011154116A CN112448612A CN 112448612 A CN112448612 A CN 112448612A CN 202011154116 A CN202011154116 A CN 202011154116A CN 112448612 A CN112448612 A CN 112448612A
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- 238000000034 method Methods 0.000 title claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000011159 matrix material Substances 0.000 claims abstract description 5
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical group Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 claims abstract description 3
- 238000005452 bending Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 230000010287 polarization Effects 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 abstract description 2
- 230000004044 response Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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Abstract
The invention discloses a piezoelectric actuation linear moving platform and a working method thereof, wherein the piezoelectric actuation linear moving platform comprises a piezoelectric vibrator, a working substrate, two baffles, two springs and four positioning bolts; the piezoelectric vibrator comprises a metal matrix and four piezoelectric ceramic pieces; the metal matrix is rhombic and comprises two actuating heads and four vibrating beams; the four piezoelectric ceramic pieces are correspondingly distributed on the four vibrating beams and are polarized along the thickness direction. The four positioning bolts are used for propping against the working substrate, and the piezoelectric vibrator is used for driving the two baffles so as to drive the working substrate to translate, so that the piezoelectric vibrator has obvious advantages in the aspects of positioning precision, response speed and the like, and has the advantages of simple mechanism, good controllability and high precision.
Description
Technical Field
The invention relates to the field of piezoelectric actuation and ultrasonic motors, in particular to a piezoelectric actuation linear moving platform and a working method thereof.
Background
With the rapid development of precision engineering, the modern manufacturing field puts higher and higher requirements on the precision, speed and stroke of a precision motion platform, and the positioning precision and the stroke range directly influence the precision and the width of production and processing. The traditional motion platform is mainly driven by an electromagnetic motor, the driving mode is mature in technology and stable in performance, but more intermediate motion conversion links and elastic deformation inevitably exist, so that the real-time performance of the platform is poor, and the positioning precision or speed of the achievable linear motion is low.
Disclosure of Invention
The invention aims to solve the technical problem of providing a piezoelectric actuation linear moving platform and a working method thereof aiming at the defects in the background technology.
The invention adopts the following technical scheme for solving the technical problems:
a piezoelectric actuation linear moving platform comprises a piezoelectric vibrator, a working substrate, a first baffle, a second baffle, a first spring, a second spring and a first positioning bolt, a second spring, a third positioning bolt, a fourth positioning bolt and a fourth positioning bolt;
the piezoelectric vibrator comprises a metal substrate and first to fourth piezoelectric ceramic pieces;
the metal matrix is rhombic and comprises a first actuating head, a second actuating head and first to fourth vibrating beams;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, the angle between the second end face and the first side face is a preset second angle threshold value, and the first angle threshold value and the second angle threshold value are both smaller than 90 degrees;
the first end surface of the first vibrating beam and the first end surface of the second vibrating beam are correspondingly and fixedly connected, so that the first vibrating beam and the second vibrating beam form a V-shaped structure, and a first threaded through hole penetrating through the plane where the first vibrating beam and the second vibrating beam are located is formed in the joint of the first vibrating beam and the second vibrating beam;
the first end surface of the third vibrating beam and the first end surface of the fourth vibrating beam are correspondingly and fixedly connected, so that the third vibrating beam and the fourth vibrating beam form a V-shaped structure, and a second threaded through hole penetrating through the plane where the third vibrating beam and the fourth vibrating beam are located is formed in the joint of the third vibrating beam and the fourth vibrating beam;
one end of the first vibration beam, which is far away from the first end face, is fixedly connected with one end of the third vibration beam, which is far away from the first end face, and round bulges are outwards arranged at the connection part of the first vibration beam and the third vibration beam to serve as a first actuating head; one end of the second vibration beam, which is far away from the first end face of the second vibration beam, is fixedly connected with one end of the fourth vibration beam, which is far away from the first end face of the fourth vibration beam, and round bulges are outwards arranged at the connection part of the second vibration beam and the fourth vibration beam and are used as a second actuating head;
the first to fourth piezoelectric ceramic pieces are correspondingly distributed on the first side surfaces of the first to fourth vibrating beams and are polarized along the thickness direction, and the polarization directions are outward or inward;
the piezoelectric vibrators are centrosymmetric;
the working substrate is a rectangular panel, a first sliding groove and a second sliding groove which are parallel to the short edge of the working substrate are respectively arranged at two ends of the bottom surface of the working substrate, a first sliding block and a second sliding block which can freely slide are arranged in the first sliding groove, and a third sliding block and a fourth sliding block which can freely slide are arranged in the second sliding groove;
the first baffle and the second baffle are rectangular panels, and are arranged in parallel and perpendicular to the working substrate, wherein the first baffle is fixedly connected with the first sliding block and the third sliding block respectively, and the second baffle is fixedly connected with the second sliding block and the fourth sliding block respectively, so that the first baffle and the third baffle can freely slide relative to the working substrate along the first sliding groove and the second sliding groove;
the first positioning bolt, the second positioning bolt, the third positioning bolt, the fourth positioning bolt and the nut are vertically arranged, the nuts and the outside are fixed on the same horizontal plane, and one end, far away from the nuts, of each positioning bolt is in a semi-spherical shape and is arranged upwards; the first positioning bolt and the second positioning bolt are respectively in threaded connection with the first threaded through hole and the second threaded through hole and penetrate out of the first threaded through hole and the second threaded through hole to fix the piezoelectric vibrator; the third positioning bolt and the fourth positioning bolt are positioned in the metal base body and are used for being matched with the first positioning bolt and the second positioning bolt so as to support the working substrate;
the working substrate is placed on the first to fourth positioning bolts; the first spring and the second spring are arranged between the first baffle and the second baffle, wherein two ends of the first spring are fixedly connected with one ends of the first baffle and the second baffle respectively, and two ends of the second spring are fixedly connected with the other ends of the first baffle and the second baffle respectively, so that the first baffle is abutted against the first actuating head, and the second baffle is abutted against the second actuating head; the first spring, the second spring, the first baffle and the second baffle form a rectangular frame containing the piezoelectric vibrator.
The invention also discloses a working method of the piezoelectric actuation linear moving platform, which comprises the following processes:
if the working substrate needs to be translated, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to enable the time phase difference to be 90 degrees, a first-order bending vibration symmetry mode and a first-order bending vibration antisymmetric mode of the piezoelectric vibrator are excited, the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, and then the first baffle and the second baffle are driven to translate the working substrate through friction force;
if the working substrate needs to be translated reversely, the first signal and the second signal are adjusted to have a phase difference of-90 degrees in time phase.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
the invention has obvious advantages in the aspects of positioning precision, response speed and the like, and has the advantages of simple mechanism, good controllability and high precision.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a piezoelectric vibrator in the present invention;
FIG. 3 is a schematic view of the structure of a metal substrate according to the present invention;
fig. 4 is a schematic view showing the polarization directions of the first to fourth piezoelectric ceramic sheets in the present invention;
FIG. 5 is a schematic structural view of the present invention with the first to fourth sliders removed from the work substrate;
fig. 6 is a schematic structural diagram of the first baffle plate, the first sliding block and the third sliding block which are matched.
Fig. 7 is a schematic view of the first to fourth piezoelectric ceramic sheets applying an electric signal in the present invention;
FIG. 8 is a schematic view of the first and second longitudinal vibration modes of the actuator head of the present invention;
FIG. 9 is a schematic view of the first and second transverse modes of vibration of the head during operation of the present invention;
FIG. 10 is a schematic view of the change of state of the present invention in operation;
in the figure, 1-piezoelectric vibrator, 2-working substrate, 3-first baffle, 4-first spring, 5-first positioning bolt, 1.1-metal matrix, 1.2-second piezoelectric ceramic piece, 1.1.1-first vibration beam, 1.1.2-second vibration beam, 1.1.3-third vibration beam, 1.1.4-fourth vibration beam, 1.1.5-first actuating head, 1.1.6-second actuating head, 1.1.7-first thread through hole and 1.1.6-second thread through hole.
Detailed Description
The technical scheme of the invention is further explained in detail by combining the attached drawings:
the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
As shown in fig. 1, the present invention discloses a piezoelectric linear motion platform, which comprises a piezoelectric vibrator, a working substrate, first to second baffles, first to second springs, and first to fourth positioning bolts.
As shown in fig. 2, the piezoelectric vibrator includes a metal base, and first to fourth piezoelectric ceramic pieces.
As shown in fig. 3, the metal substrate is diamond-shaped and includes a first actuating head, a second actuating head, and first to fourth vibration beams;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, the angle between the second end face and the first side face is a preset second angle threshold value, and the first angle threshold value and the second angle threshold value are both smaller than 90 degrees;
the first end surface of the first vibrating beam and the first end surface of the second vibrating beam are correspondingly and fixedly connected, so that the first vibrating beam and the second vibrating beam form a V-shaped structure, and a first threaded through hole penetrating through the plane where the first vibrating beam and the second vibrating beam are located is formed in the joint of the first vibrating beam and the second vibrating beam;
the first end surface of the third vibrating beam and the first end surface of the fourth vibrating beam are correspondingly and fixedly connected, so that the third vibrating beam and the fourth vibrating beam form a V-shaped structure, and a second threaded through hole penetrating through the plane where the third vibrating beam and the fourth vibrating beam are located is formed in the joint of the third vibrating beam and the fourth vibrating beam;
one end of the first vibration beam, which is far away from the first end face, is fixedly connected with one end of the third vibration beam, which is far away from the first end face, and round bulges are outwards arranged at the connection part of the first vibration beam and the third vibration beam to serve as a first actuating head; and one end of the second vibrating beam, which is far away from the first end surface, is fixedly connected with one end of the fourth vibrating beam, which is far away from the first end surface, and round bulges are outwards arranged at the joint of the second vibrating beam and the fourth vibrating beam and serve as a second actuating head.
As shown in fig. 4, the first to fourth piezoelectric ceramic plates are disposed on the first side surfaces of the first to fourth vibration beams, and are polarized in the thickness direction, and the polarization directions are outward or inward.
The piezoelectric vibrators are centrosymmetric.
As shown in fig. 5, the working substrate is a rectangular panel, the two ends of the bottom surface of the working substrate are respectively provided with a first sliding groove and a second sliding groove parallel to the short edges of the working substrate, the first sliding groove is internally provided with a first sliding block and a second sliding block which can freely slide, and the second sliding groove is internally provided with a third sliding block and a fourth sliding block which can freely slide.
As shown in fig. 6, the first baffle and the second baffle are rectangular panels, and the first baffle and the second baffle are arranged in parallel and are perpendicular to the working substrate, wherein the first baffle is fixedly connected with the first slider and the third slider, and the second baffle is fixedly connected with the second slider and the fourth slider, so that the first baffle and the third baffle can freely slide along the first sliding groove and the second sliding groove relative to the working substrate.
The first positioning bolt, the second positioning bolt, the third positioning bolt, the fourth positioning bolt and the nut are vertically arranged, the nuts and the outside are fixed on the same horizontal plane, and one end, far away from the nuts, of each positioning bolt is in a semi-spherical shape and is arranged upwards; the first positioning bolt and the second positioning bolt are respectively in threaded connection with the first threaded through hole and the second threaded through hole and penetrate out of the first threaded through hole and the second threaded through hole to fix the piezoelectric vibrator; the third positioning bolt and the fourth positioning bolt are positioned in the metal base body and are used for being matched with the first positioning bolt and the second positioning bolt so as to support the working substrate;
the working substrate is placed on the first to fourth positioning bolts; the first spring and the second spring are arranged between the first baffle and the second baffle, wherein two ends of the first spring are fixedly connected with one ends of the first baffle and the second baffle respectively, and two ends of the second spring are fixedly connected with the other ends of the first baffle and the second baffle respectively, so that the first baffle is abutted against the first actuating head, and the second baffle is abutted against the second actuating head; the first spring, the second spring, the first baffle and the second baffle form a rectangular frame containing the piezoelectric vibrator.
The end, far away from the nut, of each positioning bolt is semi-spherical, and the friction force generated when the four positioning bolts are in contact with the working substrate is reduced.
The invention also discloses a working method of the piezoelectric actuation linear moving platform, which comprises the following processes:
as shown in fig. 7, if the working substrate needs to be translated, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to have a 90 ° difference in time phase, and a first-order bending vibration symmetry mode (as shown in fig. 8) and a first-order bending vibration anti-symmetry mode (as shown in fig. 9) of the piezoelectric vibrator are excited, and the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, as shown in fig. 10, so that the first baffle plate and the second baffle plate are driven by friction force to translate the working substrate;
if the working substrate needs to be translated reversely, the first signal and the second signal are adjusted to have a phase difference of-90 degrees in time phase.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The above-mentioned embodiments, objects, technical solutions and advantages of the present invention are further described in detail, it should be understood that the above-mentioned embodiments are only illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. A piezoelectric actuation linear moving platform is characterized by comprising a piezoelectric vibrator, a working substrate, a first baffle, a second baffle, a first spring, a second spring and a first positioning bolt, a second spring, a third positioning bolt and a fourth positioning bolt;
the piezoelectric vibrator comprises a metal substrate and first to fourth piezoelectric ceramic pieces;
the metal matrix is rhombic and comprises a first actuating head, a second actuating head and first to fourth vibrating beams;
the first to fourth vibrating beams are strip-shaped, have the same structure and respectively comprise first to fourth side surfaces, a first end surface and a second end surface, wherein the first to fourth side surfaces are sequentially and vertically connected, the first side surface is parallel to the third side surface, and the second side surface is parallel to the fourth side surface; the angle of an included angle between the first end face and the first side face is a preset first angle threshold value, the angle between the second end face and the first side face is a preset second angle threshold value, and the first angle threshold value and the second angle threshold value are both smaller than 90 degrees;
the first end surface of the first vibrating beam and the first end surface of the second vibrating beam are correspondingly and fixedly connected, so that the first vibrating beam and the second vibrating beam form a V-shaped structure, and a first threaded through hole penetrating through the plane where the first vibrating beam and the second vibrating beam are located is formed in the joint of the first vibrating beam and the second vibrating beam;
the first end surface of the third vibrating beam and the first end surface of the fourth vibrating beam are correspondingly and fixedly connected, so that the third vibrating beam and the fourth vibrating beam form a V-shaped structure, and a second threaded through hole penetrating through the plane where the third vibrating beam and the fourth vibrating beam are located is formed in the joint of the third vibrating beam and the fourth vibrating beam;
one end of the first vibration beam, which is far away from the first end face, is fixedly connected with one end of the third vibration beam, which is far away from the first end face, and round bulges are outwards arranged at the connection part of the first vibration beam and the third vibration beam to serve as a first actuating head; one end of the second vibration beam, which is far away from the first end face of the second vibration beam, is fixedly connected with one end of the fourth vibration beam, which is far away from the first end face of the fourth vibration beam, and round bulges are outwards arranged at the connection part of the second vibration beam and the fourth vibration beam and are used as a second actuating head;
the first to fourth piezoelectric ceramic pieces are correspondingly distributed on the first side surfaces of the first to fourth vibrating beams and are polarized along the thickness direction, and the polarization directions are outward or inward;
the piezoelectric vibrators are centrosymmetric;
the working substrate is a rectangular panel, a first sliding groove and a second sliding groove which are parallel to the short edge of the working substrate are respectively arranged at two ends of the bottom surface of the working substrate, a first sliding block and a second sliding block which can freely slide are arranged in the first sliding groove, and a third sliding block and a fourth sliding block which can freely slide are arranged in the second sliding groove;
the first baffle and the second baffle are rectangular panels, and are arranged in parallel and perpendicular to the working substrate, wherein the first baffle is fixedly connected with the first sliding block and the third sliding block respectively, and the second baffle is fixedly connected with the second sliding block and the fourth sliding block respectively, so that the first baffle and the third baffle can freely slide relative to the working substrate along the first sliding groove and the second sliding groove;
the first positioning bolt, the second positioning bolt, the third positioning bolt, the fourth positioning bolt and the nut are vertically arranged, the nuts and the outside are fixed on the same horizontal plane, and one end, far away from the nuts, of each positioning bolt is in a semi-spherical shape and is arranged upwards; the first positioning bolt and the second positioning bolt are respectively in threaded connection with the first threaded through hole and the second threaded through hole and penetrate out of the first threaded through hole and the second threaded through hole to fix the piezoelectric vibrator; the third positioning bolt and the fourth positioning bolt are positioned in the metal base body and are used for being matched with the first positioning bolt and the second positioning bolt so as to support the working substrate;
the working substrate is placed on the first to fourth positioning bolts; the first spring and the second spring are arranged between the first baffle and the second baffle, wherein two ends of the first spring are fixedly connected with one ends of the first baffle and the second baffle respectively, and two ends of the second spring are fixedly connected with the other ends of the first baffle and the second baffle respectively, so that the first baffle is abutted against the first actuating head, and the second baffle is abutted against the second actuating head; the first spring, the second spring, the first baffle and the second baffle form a rectangular frame containing the piezoelectric vibrator.
2. The method of claim 1, comprising the steps of:
if the working substrate needs to be translated, a first signal is applied to the first piezoelectric ceramic piece and the second piezoelectric ceramic piece, a second signal is applied to the third piezoelectric ceramic piece and the fourth piezoelectric ceramic piece, the first signal and the second signal are adjusted to enable the time phase difference to be 90 degrees, a first-order bending vibration symmetry mode and a first-order bending vibration antisymmetric mode of the piezoelectric vibrator are excited, the two modes are superposed to enable mass points of the first actuating head and the second actuating head to generate elliptical motion tracks with opposite directions, and then the first baffle and the second baffle are driven to translate the working substrate through friction force;
if the working substrate needs to be translated reversely, the first signal and the second signal are adjusted to have a phase difference of-90 degrees in time phase.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234065A (en) * | 1988-03-15 | 1989-09-19 | Alps Electric Co Ltd | Ultrasonic linear motor |
| CN2794032Y (en) * | 2005-03-15 | 2006-07-05 | 辽宁工学院 | Square and circular ultrasonic motor vibrator with linear travelling wave |
| CN101630925A (en) * | 2009-08-25 | 2010-01-20 | 哈尔滨工业大学 | Square rotary ultrasonic motor oscillator |
| CN204304831U (en) * | 2014-12-12 | 2015-04-29 | 联想(北京)有限公司 | Piezoelectricity amplification mechanism, piezoelectricity amplitude device and electronic equipment |
| CN106230309A (en) * | 2016-09-26 | 2016-12-14 | 吉林大学 | Become friction-type bending vibration compound biped Piexoelectric actuator |
| CN106787933A (en) * | 2017-03-27 | 2017-05-31 | 武汉大学 | Based on planar motor and driving method that quasi- matrix pattern piezoelectric vibrator drives |
| CN106976558A (en) * | 2017-04-28 | 2017-07-25 | 南京航空航天大学 | A kind of patch type piezoelectric drives four rotor flight devices and its method of work |
| CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
-
2020
- 2020-10-26 CN CN202011154116.2A patent/CN112448612B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01234065A (en) * | 1988-03-15 | 1989-09-19 | Alps Electric Co Ltd | Ultrasonic linear motor |
| CN2794032Y (en) * | 2005-03-15 | 2006-07-05 | 辽宁工学院 | Square and circular ultrasonic motor vibrator with linear travelling wave |
| CN101630925A (en) * | 2009-08-25 | 2010-01-20 | 哈尔滨工业大学 | Square rotary ultrasonic motor oscillator |
| CN204304831U (en) * | 2014-12-12 | 2015-04-29 | 联想(北京)有限公司 | Piezoelectricity amplification mechanism, piezoelectricity amplitude device and electronic equipment |
| CN106230309A (en) * | 2016-09-26 | 2016-12-14 | 吉林大学 | Become friction-type bending vibration compound biped Piexoelectric actuator |
| CN106787933A (en) * | 2017-03-27 | 2017-05-31 | 武汉大学 | Based on planar motor and driving method that quasi- matrix pattern piezoelectric vibrator drives |
| CN106976558A (en) * | 2017-04-28 | 2017-07-25 | 南京航空航天大学 | A kind of patch type piezoelectric drives four rotor flight devices and its method of work |
| CN108322086A (en) * | 2018-01-09 | 2018-07-24 | 长春理工大学 | Piezoelectric vibrator |
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