CN1124446C - 无化学物质的干燥空气发生装置 - Google Patents

无化学物质的干燥空气发生装置 Download PDF

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CN1124446C
CN1124446C CN97115444A CN97115444A CN1124446C CN 1124446 C CN1124446 C CN 1124446C CN 97115444 A CN97115444 A CN 97115444A CN 97115444 A CN97115444 A CN 97115444A CN 1124446 C CN1124446 C CN 1124446C
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长舟平
福本隼明
渋谷博司
江崎浩治
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    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
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    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
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    • F24F2003/144—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by dehumidification only
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    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
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Abstract

提供一种能以低成本供应无化学物质的干燥空气的无化学物质的干燥空气发生装置。在房间11内配置由室外空气导入用的风机3、化学过滤器4和HEPA过滤器5构成的风机过滤单元2和干燥空气发生装置6，由于使室外空气通过风机过滤单元2，把已除去化学烟雾和数微米级的异物的洁净无化学物质的空气供应房间11，接着把供应到房间11内的无化学物质的空气导入干燥空气发生装置6，把已除去水分的无化学物质的干燥空气通过管道和阀门10b供应给制造装置或传送装置等使用点。

Description

无化学物质的干燥空气发生装置
技术领域
本发明涉及一种例如制造半导体装置时为了防止化学污染而供应的无化学物质的干燥空气的发生装置。
背景技术
以往，半导体装置因来自制造工艺过程中的环境污染而降低了产品合格率，所以要在控制温湿度的同时通常还除去了数微米级异物的环境内进行制造。进而，为了防止与空气中的水分进行化学反应，根据需要供应干燥空气。
近年来，随着半导体装置高集成化而引起的图形微细化和膜厚的薄膜化，在供应半导体装置的制造装置和传送装置或保管装置的干燥空气中，由于含有有机物或无机物组成的亚微米级的烟雾或气体而引起的化学污染也成为问题。举例说，在干燥空气发生装置所输入的室外空气内混入了硫化物类气体或酸类气体等会发生腐蚀用于半导体装置的金属等而使半导体装置的可靠性下降等的问题。因此采用把不含有烟雾或气体的N2供应给传送装置或保管库的方法，但存在N2成本高(约35日元/m3)，还发生缺氧状态等安全方面的问题。因此，提出了供应无化学物质的干燥空气以代替N2。
图3是表示现有的无化学物质的干燥空气发生装置的示意图。图中6是干燥空气发生装置，该装置由压缩机7、冷冻式干燥器8和水分吸附用催化剂9构成。13是活性炭等化学吸附用催化剂，5是除去数微米级异物的HEPA(High Efficiency Particulate Air)过滤器。导入了的室外空气经干燥空气发生装置除去水分后，再把除去了化学烟雾和异物的洁净的无化学物质的干燥空气供应制造装置和传送装置或保管装置。
现有的无化学物质的干燥空气发生装置如上构成，存在用于除去化学烟雾的化学吸附用催化剂13价格非常高(供应1500m3/h，大约要花掉5亿日元)等的问题。
发明内容
本发明就是为了解决上述问题而完成的，其目的是提供一种能够以低成本供应无化学物质的干燥空气的无化学物质的干燥空气发生装置。
根据本发明的一种无化学物质的干燥空气发生装置，其特征在于具备：
由室外空气导入风机、化学过滤器与HEPA过滤器构成的风机过滤单元；
具有密闭结构的房间，所述风机过滤单元设置于其内部，由上述室外空气导入风机所导入并通过上述化学过滤器后再通过上述HEPA过滤器的空气被供给于内部空间；
干燥空气发生装置，该装置配置在具有上述密闭结构的房间内，并位于所述风机过滤单元的下游侧，该装置在被供给上述房间的空气的同时，把干燥空气供给于上述房间之外；以及
连接管，能将由上述干燥空气发生装置所供给的空气循环地供给上述室外空气导入风机。
并且，具有密闭结构的房间的空气压力被调整到比房间外部的压力高的正压状态。
并且，具有密闭结构的房间墙壁材料覆盖了放气少的材料。
并且，具有密闭结构的房间的结构能将异物和化学烟雾从房间的空气中除去而使空气洁净。
并且，具有密闭结构的房间是多个并列配置的，且经阀门连接到共用的部位。
附图说明
图1是表示本发明实施例1的无化学物质的干燥空气发生装置示意图。
图2是表示本发明实施例2的无化学物质的干燥空气发生装置示意图。
图3是表示现有的这种无化学物质的干燥空气发生装置示意图。
具体实施方式
实施例1
下面，按图说明作为本发明一个实施例的无化学物质的干燥空气发生装置。图1是表示本发明实施例1的无化学物质的干燥空气发生装置示意图。在该图中，1是配置于室外空气吸入部分的初级过滤器，2是由室外空气导入用的风机3、化学过滤器4和HEPA过滤器5构成的风机过滤单元，经过初级过滤器1吸入室外空气，再通过化学过滤器4和HEPA过滤器5，供应除去了化学烟雾与数微米级异物后的洁净无化学物质的空气。
6为干燥空气发生装置，由压缩机7、冷冻式干燥器8和水分吸附用催化剂9构成。10a、10b和10c是设置于连接管的阀门，10a是用于对从干燥空气发生装置6流向风机过滤单元2的空气进行开闭的阀门，10b是用于对从干燥空气发生装置6流向使用点的空气进行开闭的阀门，10c是用于把来自干燥空气发生装置6的空气向无化学物质的干燥空气的发生装置外部排放的阀门。11是配置了风机过滤单元2和干燥空气发生装置6等的房间，整个房间11变成了无化学物质的干燥空气发生系统室。因此，为了防止室外空气侵入房间11，所以在出入口设有两道门，将房间11内的压力控制成比室外气压高的正压状态。另外，为了防止从混凝土墙内放出气体，所以对房间11的内壁用放气少的氯乙烯膜等进行覆盖。
在无化学物质的干燥空气的发生系中，首先，使室外空气导入用风机3工作，通过初级过滤器1吸入室外空气，再通过化学过滤器4和HEPA过滤器5，把除去了化学烟雾和数微米级异物后的洁净无化学物质的空气供应房间11内。接着，把供应房间11内的洁净无化学物质的空气导入到干燥空气发生装置6，经冷冻式干燥器8和水分吸附用催化剂9，把已除去了水分的无化学物质的干燥空气，经过连接管和阀门10b供应制造装置或传送装置等的使用点。在这里，将无化学物质的干燥空气供应使用端的管道内的风速需要10m/s左右，但化学过滤器4用于通过化学反应除去化学烟雾，所以在高压下反应速度降低，因而吸附化学烟雾的效率变差。为了维持化学烟雾的吸附效率，就必须以1m/s左右的风速通过化学过滤器4，并在化学过滤器4的后部大致需要如房间11那样大小的腔室。
在由于风机过滤单元2或干燥空气发生装置6等的保养、或者突发事故，房间11内受异物和化学烟雾污染的情况下，可关闭从干燥空气发生装置6通向使用点的阀门10b，而打开通向风机过滤单元2的阀门10a，使由干燥空气发生装置6供应的空气再次通过化学过滤器4和HEPA过滤器5，从阀门10a到化学过滤器4和HEPA过滤器5反复进行循环，直至完全除去房间11内的异物和化学烟雾为止，从而使房间11内部洁净化。或者，关闭阀门10a和阀门10b，而打开阀门10c，把受污染了的空气排出房间11之外。
如果采用本发明，不会使化学烟雾的吸附效率降低，而且与图3所示的化学吸附用催化剂13相比，由于采用了低成本的化学过滤器4，因而能够以低成本供应无化学物质的干燥空气。
实施例2
图2是表示本发明实施例2的无化学物质的干燥空气的发生装置示意图，以房间为单位并列配置多个如实施例1所示的无化学物质的干燥空气发生装置的系统。图中11a、11b和11c是具有独立的无化学物质的干燥空气发生装置的房间，并通过管道和阀门10而与贮气罐12连接，从贮气罐12向使用点供应无化学物质的的干燥空气。各个房间11a、11b和11c内的结构，与实施例1所示的无化学物质的干燥空气发生装置相同，所以说明从略。
水分吸附用催化剂9或化学过滤器4和HEPA过滤器5等，都需要频繁进行保养。在进行这些装置的保养时，只关闭进行保养的房间(例如11a)的阀门10b来进行保养，而仍可由不进行保养的其他房间(11b和11c)经常向使用点供应无化学物质的干燥空气。
如果采用本实施例，通过并列配置具有独立无化学物质的干燥空气发生系统的房间11a、11b和11c，在各装置的定期保养和突发事故的情况下，仅仅开闭阀门10b，就仍可把无化学物质的的干燥空气经常供应使用点。
如上所述，如果采用本发明，可以经常以低成本供应无化学物质的的干燥空气。

Claims (5)

1、一种无化学物质的干燥空气发生装置，其特征在于具备：
由室外空气导入风机、化学过滤器与HEPA过滤器构成的风机过滤单元；
具有密闭结构的房间，所述风机过滤单元设置于其内部，由上述室外空气导入风机所导入并通过上述化学过滤器后再通过上述用EPA过滤器的空气被供给于内部空间；
干燥空气发生装置，该装置配置在具有上述密闭结构的房间内，并位于所述风机过滤单元的下游侧，该装置在被供给上述房间的空气的同时，把干燥空气供给于上述房间之外；以及
连接管，能将由上述干燥空气发生装置所供给的空气循环地供给上述室外空气导入风机。
2、根据权利要求1所述的无化学物质的干燥空气发生装置，其特征是，将具有密闭结构的房间的空气压力调整到比该房间的外部的压力高的正压状态。
3、根据权利要求1或2所述的无化学物质的干燥空气发生装置，其特征是，对具有密闭结构的房间的墙壁覆盖一种放出气体少的材料。
4、根据权利要求1或2所述的无化学物质的干燥空气发生装置，其特征是，将具有密闭结构的房间多间并列配置，同时经阀门连接到共用的部位。
5、根据权利要求3所述的无化学物质的干燥空气发生装置，其特征是，将具有密闭结构的房间多间并列配置，同时经阀门连接到共用的部位。
CN97115444A 1996-10-01 1997-07-21 无化学物质的干燥空气发生装置 Expired - Fee Related CN1124446C (zh)

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KR19980032129A (ko) 1998-07-25
KR100197057B1 (ko) 1999-06-15
DE19721515A1 (de) 1998-04-09
US5827339A (en) 1998-10-27
CN1178307A (zh) 1998-04-08
TW338095B (en) 1998-08-11

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