TW338095B - Apparatus for producing chemical-free dry air - Google Patents

Apparatus for producing chemical-free dry air

Info

Publication number
TW338095B
TW338095B TW086104575A TW86104575A TW338095B TW 338095 B TW338095 B TW 338095B TW 086104575 A TW086104575 A TW 086104575A TW 86104575 A TW86104575 A TW 86104575A TW 338095 B TW338095 B TW 338095B
Authority
TW
Taiwan
Prior art keywords
air
dry air
free dry
supply
producing chemical
Prior art date
Application number
TW086104575A
Other languages
English (en)
Inventor
Shuhei Cho
Hayaaki Fukumoto
Hiroshi Shibuya
Koji Esaki
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of TW338095B publication Critical patent/TW338095B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/80—Self-contained air purifiers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F24F8/158—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means using active carbon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means
    • F24F8/167—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means using catalytic reactions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F2003/144—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by dehumidification only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/15—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering by chemical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ventilation (AREA)
  • Drying Of Solid Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Air Filters, Heat-Exchange Apparatuses, And Housings Of Air-Conditioning Units (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)
TW086104575A 1996-10-01 1997-04-10 Apparatus for producing chemical-free dry air TW338095B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8260448A JPH10106908A (ja) 1996-10-01 1996-10-01 ケミカルフリー乾燥空気の発生装置

Publications (1)

Publication Number Publication Date
TW338095B true TW338095B (en) 1998-08-11

Family

ID=17348085

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086104575A TW338095B (en) 1996-10-01 1997-04-10 Apparatus for producing chemical-free dry air

Country Status (6)

Country Link
US (1) US5827339A (zh)
JP (1) JPH10106908A (zh)
KR (1) KR100197057B1 (zh)
CN (1) CN1124446C (zh)
DE (1) DE19721515A1 (zh)
TW (1) TW338095B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8394156B2 (en) 2008-04-30 2013-03-12 Taiwan Semiconductor Manufacturing Co., Ltd. Ultra-pure air system for nano wafer environment

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* Cited by examiner, † Cited by third party
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US6929985B2 (en) * 1995-07-27 2005-08-16 Taisei Corporation Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium
US5997598A (en) 1995-07-27 1999-12-07 Taisei Corporation Air filter for clean room
KR19990027844A (ko) * 1997-09-30 1999-04-15 윤종용 반도체장비의 공기유입장치 및 이를 이용한 화학물 오염 제거방법
DE19835538A1 (de) * 1998-08-06 2000-02-10 Meissner & Wurst Reinraum
WO2000064562A1 (en) 1999-04-28 2000-11-02 Stratotech Corporation Adjustable clean-air flow environment
JP3287337B2 (ja) * 1999-07-14 2002-06-04 日本電気株式会社 ファン・フィルタ・ユニット
US6280507B1 (en) * 2000-02-29 2001-08-28 Advanced Technology Materials, Inc. Air manager apparatus and method for exhausted equipment and systems, and exhaust and airflow management in a semiconductor manufacturing facility
US6878177B2 (en) * 2001-08-28 2005-04-12 Thermo Forma, Inc. Incubator having combined HEPA and VOC filter
DE10143628A1 (de) * 2001-09-06 2003-03-27 M & W Zander Facility Eng Gmbh Anlage und Verfahren zur Abluftaufbereitung, insbesondere bei Reinraumanlagen
TW509097U (en) * 2002-01-18 2002-11-01 Ritdisplay Corp Transporting device for evaporation
KR100474577B1 (ko) * 2002-07-06 2005-03-08 삼성전자주식회사 청정 공기 덕트 및 청정실용 공기 제공 장치
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
KR100572887B1 (ko) * 2004-01-19 2006-04-24 삼성전자주식회사 케미컬 필터 및 이를 갖는 팬 필터 유닛
KR100763226B1 (ko) 2006-02-17 2007-10-04 삼성전자주식회사 전이 금속 이온이 첨가된 평균 입경 10㎚ 이하 크기의 반도체성 금속 산화물로 이루어진 광촉매 물질 제조 방법과 이에 의해 제조된 물질 및 이 물질을 포함하는 필터, 팬 필터 유닛 및 클린룸 시스템
IT1394528B1 (it) * 2009-04-03 2012-07-05 Sinteco Impianti S R L Apparecchiatura modulare per il trattamento dell'aria, particolarmente per ambienti classificati e per processi produttivi di alimenti in genere.
US20100132320A1 (en) * 2010-01-27 2010-06-03 Ali Sharifi Air pollution dry cleaning apparatus
US9673037B2 (en) * 2011-05-31 2017-06-06 Law Research Corporation Substrate freeze dry apparatus and method
CN106039912A (zh) * 2016-08-08 2016-10-26 常熟市东方特种金属材料厂 一种净化装置
CN112325401A (zh) * 2020-11-02 2021-02-05 江苏凤凰数据有限公司 数据机房用逆流空气换热自然冷却系统及其控制方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3192689A (en) * 1963-04-25 1965-07-06 Avery B Smith Air scrubbing device
US3299620A (en) * 1964-03-09 1967-01-24 Charles E Hollingworth Gas treatment device
IT1179369B (it) * 1984-05-15 1987-09-16 Ital Idee Srl Gruppo filtrante multiplo, particolarmente per impianti di aerazione e condizionamento per autoveicoli e ambienti chiusi, munito di mezzi di controllo dell'efficienza
US4601737A (en) * 1984-12-17 1986-07-22 Gerbig Fred T Air filter system for clean room
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US4986838A (en) * 1989-06-14 1991-01-22 Airgard, Inc. Inlet system for gas scrubber
US5064547A (en) * 1990-09-12 1991-11-12 Century Laboratories, Incoporated Lubricant compositions for metals containing dicarboxylic acids as a major constituent

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8394156B2 (en) 2008-04-30 2013-03-12 Taiwan Semiconductor Manufacturing Co., Ltd. Ultra-pure air system for nano wafer environment

Also Published As

Publication number Publication date
JPH10106908A (ja) 1998-04-24
KR19980032129A (ko) 1998-07-25
CN1124446C (zh) 2003-10-15
KR100197057B1 (ko) 1999-06-15
DE19721515A1 (de) 1998-04-09
US5827339A (en) 1998-10-27
CN1178307A (zh) 1998-04-08

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