CN112436818B - Graphene resonator and phonon maser and method based on graphene resonator - Google Patents

Abstract

The invention provides a graphene harmonic oscillator, a phonon laser based on the graphene harmonic oscillator and a working method thereof, wherein the graphene harmonic oscillator comprises a substrate chip and a graphene film, and an optical resonant cavity is formed between the substrate chip and the graphene film; the laser comprises a driving laser source, an optical fiber coupler, a half wave plate, a high-reflection mirror, a polarization beam splitter prism, a quarter wave plate, an objective lens, a graphene harmonic oscillator, a nanometer electric displacement table, a beam splitter, a CCD camera, a filter, a photoelectric detector, a spectrum analyzer and an illumination light source; the phonon laser has the advantages of simple preparation process, low technical difficulty, easiness in chip integration, batch preparation and the like, and the stable and controllable phonon laser has important basic research significance and wide application prospect in the fields of developing acoustic quantum information devices, realizing information interaction among different quantum information systems, precisely measuring and the like.

Description

Graphene resonator and phonon maser and method based on graphene resonator

Technical field

The invention relates to the technical fields of two-dimensional material resonator preparation, cavity optomechanics, phonon information devices, precision measurement and other technical fields, and particularly relates to a method and device for realizing a phonon maser using graphene resonators.

Background technique

In recent years, the rapidly developing laser technology has made great contributions to the field of optical quantum information and greatly promoted people's understanding of quantum physics. Compared with photons, phonons (lattice vibration energy quanta) have several unique advantages: First, phonons have a shorter wavelength at the same frequency, that is, phonons are more localized. Compared with microwaves and photons, The transmission speed on the chip is relatively slow, so it is easier to control and can achieve higher resolution in applications such as imaging and precision processing. Second, the coherence time of phonons is relatively long, which is difficult for classical coherent information transmission and processing as well as quantum information. The third is that in solid-state systems, the coupling between phonons and many physical systems (such as electrons) is relatively strong, and can be used in fields such as the expansion and manipulation of composite quantum systems. Therefore, there is great interest in the application of phonon masers in both classical and quantum information processing. However, the phonon lasing phenomenon based on the laser principle has been difficult to effectively promote the practical application of phonon lasers. With the rapid development of micro-nano electromechanical systems in recent years, optomechanical systems composed of mechanical oscillators and lasers have become an effective means to explore phonon lasers. The mechanical oscillator prepared based on graphene has the advantages of small mass, high frequency, and large quality factor. These advantages are conducive to our use of it for basic and applied research on phonon lasing. The graphene mechanical oscillator and the microholes on the chip form an optical resonant cavity. When the laser is incident on the optical resonant cavity, the optical radiation pressure generated by the blue detuned laser on the graphene will increase with the increase of laser power. , which affects the phonon dissipation of the resonator, causing the degree of phonon dissipation to gradually decrease until it reaches zero. After that, the phonons in the graphene mechanical oscillator will undergo a stimulated emission process similar to that of photons in lasers. The number of phonons will show an obvious threshold effect as the pump laser power increases, that is, the phonon lasing phenomenon will occur. As the graphene mechanical resonator vibrates, the laser light intensity reflected by the optical resonant cavity is synchronously modulated in a high-frequency state. It is converted into an electrical signal through a photodetector and then processed by a spectrum analyzer to extract the resonance of the mechanical oscillator. mode to explore the phenomenon of phonon lasing.

Contents of the invention

In view of the above-mentioned shortcomings of the prior art, the object of the present invention is to provide a graphene resonator, as well as a phonon maser and working method based on the graphene resonator.

In order to achieve the above-mentioned object of the invention, the technical solutions of the present invention are as follows:

A graphene resonator includes a substrate chip. The substrate chip is prepared by etching a silicon wafer. The substrate chip includes a silicon layer at the bottom. There are silicon dioxide layers on the left and right ends of the upper surface of the silicon layer. The silicon dioxide layer is There is a groove in the middle of the silicon layer, and a graphene film is covered directly above the groove. The graphene film is obtained by mechanically peeling off block graphite. Both ends of the graphene film cover part of the silicon dioxide layer, and there is a gap between the substrate chip and the graphene film. constitute an optical resonant cavity.

As a preferred way, when the laser is incident on the optical resonant cavity, the optical radiation pressure generated by the blue detuned laser on the graphene will increase with the increase of the laser power, resulting in the reduction of phonon dissipation in the graphene resonator. until it reaches zero; after that, the phonons in the graphene resonator will show a process similar to the photon stimulated radiation in the laser. The number of phonons will show an obvious threshold effect as the pump laser power increases, that is, the phenomenon of phonon lasing will occur. Get the phonon maser.

In order to achieve the above-mentioned object of the invention, the present invention also provides a phonon maser based on graphene resonators, including the above-mentioned graphene resonators 8, which include: a driving laser source 1 and a driving laser source along the optical path direction. 1. A first optical fiber coupler 21 that is centrally aligned, a second optical fiber coupler 22 that is connected to the first optical fiber coupler 21 through an optical fiber, and a first half-wave plate 31 that is centrally aligned with the second optical fiber coupler 22. The first high-reflection mirror 41 is aligned with the center of the half-wave plate 31 and forms an angle of 45 degrees with the first half-wave plate 31, and the first polarizing beam splitting prism 51 is aligned with the outgoing light of the first high-reflection mirror 41. The second half-wave plate 32 is aligned with the outgoing light of the first polarizing beam splitting prism 51, and the second polarizing beam splitting prism 52 is aligned with the outgoing light of the second half-wave plate 32, and the second polarizing beam splitting prism 52 The quarter-wave plate 6 is aligned with the output light, the objective lens 7 is aligned with the center of the quarter-wave plate 6, the graphene resonator 8 is aligned with the center of the objective lens 7, and the graphene resonator 8 is fixed on the nanometer On the electric displacement stage 9, the beam splitter 10 is aligned with the outgoing light of the second polarizing beam splitting prism 52. A part of the outgoing light of the beam splitter 10 is aligned with the center of the CCD camera 11, and the other part of the outgoing light is aligned with the second high reflection mirror. 42 is centered and aligned with the filter 12 aligned with the emitted light of the second high reflection mirror 42, the photodetector 13 aligned with the center of the filter 12, and the spectrum analyzer 14 electrically connected to the photodetector 13, the first An illumination light source 15 is provided on the side of the polarizing beam splitting prism 51 away from the second half-wave plate 32 , and the illuminating light source 15 is aligned with the outgoing light of the first polarizing beam splitting prism 51 .

As a preferred way, the pump laser that drives the laser source 1 is also used for laser interference measurement of the vibration mode of the resonator. The laser is focused and irradiated on the surface of the graphene resonator 8 through the objective lens in the form of free space light. The graphene resonator 8 is in contact with the silicon liner. An optical resonant cavity is formed between the bottom chips. As the graphene resonator 8 vibrates, the laser light intensity reflected by the optical resonant cavity is synchronously modulated, and is converted into an electrical signal through a photodetector and then through a spectrum analyzer to extract graphene. The resonant mode of the oscillator.

As a preferred way, the beam splitter 10 is a 10:90 beam splitter.

As a preferred method, the nanoelectric displacement stage 9 is a three-axis displacement stage that moves along the three-dimensional direction of space. Initially, the center of the objective lens 7 and the center of the graphene resonator 8 are aligned through the movement of the displacement stage.

As a preferred method, the driving laser source uses a 633nm single-mode continuous light laser.

As a preferred way, white LED is used as the illumination source for CCD imaging;

In order to achieve the above-mentioned object of the invention, the present invention also provides a working method of the above-mentioned graphene resonator-based phonon maser, which is: driving the laser source 1 to emit laser, collimating and collecting it through the first optical fiber coupler 21, and After the two optical fiber couplers 22 are collimated again, they enter the first half-wave plate 31 in parallel. After the outgoing light from the first half-wave plate 31 is polarized by the half-wave plate, it changes the direction of the optical path through the first high-reflection mirror 41, so that the laser Vertically incident on the first polarizing beam splitting prism 51, the first polarizing beam splitting prism 51 will reflect the laser with the vertical polarization direction, so that the emitted light of the first polarizing beam splitting prism 51 passes vertically through the center of the second half-wave plate 32 and is The laser light whose polarization state is changed by the second half-wave plate 32 enters the second polarization beam splitter prism 52. At this time, the laser light passes through the second polarization beam splitter prism 52 and changes its polarization state through the quarter-wave plate 6. After being focused by the objective lens 7 , the emitted light from the wave plate 6 irradiates the vertically fixed graphene resonator 8 on the nanoelectric displacement stage 9 . The laser light reflected by the graphene resonator 8 is collected by the objective lens 7 and is collected by the quarter-wave plate 6 After changing the polarization state again, it passes through the second polarization beam splitting prism 52 for the second time. The second polarization beam splitting prism 52 reflects this polarized laser, causing the laser to enter the beam splitter 10, and the beam splitter 10 splits the laser beam. , one beam enters the CCD camera for imaging, and the other beam changes the direction of the optical path through the second high-reflection mirror 42. After the laser is filtered by the filter 12, it is ensured that the laser with the same wavelength as the driving laser source 1 enters the photodetector 13. Photoelectric detection The receiver 13 converts the received optical signal into an electrical signal, and the electrical signal is extracted by the spectrum analyzer 14 to extract the resonance mode of the graphene resonator 8. All half-wave plates and quarter-wave plates are also used to adjust various parts of the optical path. The power of the laser; the nanoelectric displacement stage 9 is used to adjust the position of the graphene resonator so that the laser spot can accurately focus on the target position of the graphene resonator.

As a preferred way, the working method further: focus the driving continuous light laser source with a wavelength of 633 nm onto the optical resonant cavity, and then use a 90:10 beam splitter to divide the laser beam reflected by the graphene resonator 8 into two beams , one beam is used for imaging, and the other beam is converted into an electrical signal by a photodetector. After spectrum analysis, the resonance mode of the graphene mechanical oscillator is extracted by a spectrum analyzer to obtain the frequency domain information of the resonator vibration; with the laser As the power increases, the phonons have an obvious threshold effect, and the phonons maser and become a phonon maser. After ensuring the normal operation of the device and observing the mechanical vibration mode of the graphene resonator 8, half of the rotating optical path is Wave plates and quarter-wave plates are used to change the laser power focused on the graphene film; without damaging the graphene film, increase the optical power of the incident laser and judge based on the amplitude changes of the vibration modes in the spectrum information. Realization of phonon masers. This amplitude change is based on Figure 4. If there is an amplitude change similar to Figure 4, it can be judged that the phonon maser has been implemented.

The beneficial effects of the present invention are: compared with known phonon maser devices, the phonon maser of the present invention has the advantages of simple preparation process, low technical difficulty, easy chip integration and batch preparation. Stable and controllable phonon masers have important basic research significance and broad application prospects in the fields of developing acoustic quantum information devices, realizing information interaction between different quantum information systems, and precision measurement.

Description of the drawings

Figure 1 is a schematic diagram of the device of the graphene resonator-based phonon maser of the present invention.

Figure 2 is a schematic diagram of the graphene resonator laser pump driving measurement principle of the present invention.

Figure 3 shows the optical microscope and electron microscope images of the graphene resonator of the present invention, as well as the frequency domain display of the resonance mode. Among them (a). Optical microscope image of suspended graphene resonator. (b). Electron microscope image of suspended graphene resonator. (c). Measurement spectrum of suspended graphene resonator.

Figure 4 is a change trend diagram of the resonance mode information under different incident light powers of the present invention. The picture (a) is a waterfall chart of the change of a certain vibration mode under different incident light powers; the picture (b) is the peak change curve of a certain vibration mode under different incident light powers.

Among them, 1 is the driving laser source, 21 is the first fiber coupler, 22 is the second fiber coupler, 31 is the first half-wave plate, 32 is the second half-wave plate, 41 is the first high reflection mirror, and 42 is The second high reflection mirror, 51 is the first polarizing beam splitting prism, 52 is the second polarizing beam splitting prism, 6 is a quarter wave plate, 7 is the objective lens, 8 is the graphene resonator, and 9 is the nano electric displacement stage. , 10 is a beam splitter, 11 is a CCD camera, 12 is a filter, 13 is a photodetector, 14 is a spectrum analyzer, and 15 is an illumination source.

Detailed ways

The following describes the embodiments of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.

This embodiment provides a graphene resonator, including a substrate chip. The substrate chip is prepared by etching a silicon wafer. The substrate chip includes a silicon layer at the bottom. There are silicon dioxide on the left and right ends of the upper surface of the silicon layer. layer, there is a groove in the middle of the silicon dioxide layer, and the graphene film is covered directly above the groove. The graphene film is obtained by mechanically peeling off block graphite. Both ends of the graphene film cover part of the silicon dioxide layer, the substrate chip and the graphite An optical resonant cavity is formed between the ene films.

When the laser is incident on the optical resonator, the optical radiation pressure generated by the blue detuned laser on the graphene will increase as the laser power increases, causing the phonon dissipation in the graphene resonator to decrease until it reaches zero; After that, the phonons in the graphene resonator will show a process similar to the photon stimulated radiation in the laser. The number of phonons will show an obvious threshold effect as the pump laser power increases, that is, the phenomenon of phonon lasing will occur, and the phonon lasing phenomenon will be obtained. launcher.

As shown in Figure 1, this embodiment also provides a phonon maser based on graphene resonators, including the above-mentioned graphene resonators 8, which include: a driving laser source 1 and a driving laser along the optical path direction. The first optical fiber coupler 21 in which the source 1 is centrally aligned, the second optical fiber coupler 22 connected to the first optical fiber coupler 21 through optical fibers, and the first half-wave plate 31 in which the second optical fiber coupler 22 is centrally aligned, and The first high-reflection mirror 41 is aligned with the center of the first half-wave plate 31 and forms an angle of 45 degrees with the first half-wave plate 31 , and the first polarizing beam splitting prism 51 is aligned with the outgoing light of the first high-reflection mirror 41 , the second half-wave plate 32 aligned with the outgoing light of the first polarizing beam splitting prism 51, the second polarizing beam splitting prism 52 aligned with the outgoing light of the second half-wave plate 32, and the second polarizing beam splitting prism. The quarter-wave plate 6 aligned with the exit light of 52, the objective lens 7 aligned with the center of the quarter-wave plate 6, the graphene resonator 8 aligned with the center of the objective lens 7, the graphene resonator 8 is fixed on On the nano electric displacement stage 9, the beam splitter 10 is aligned with the outgoing light of the second polarizing beam splitting prism 52. A part of the outgoing light of the beam splitter 10 is aligned with the center of the CCD camera 11, and the other part of the outgoing light is aligned with the second high reflectance The center of the mirror 42 is aligned, the filter 12 is aligned with the emitted light of the second high-reflection mirror 42, the photodetector 13 is aligned with the center of the filter 12, and the spectrum analyzer 14 is electrically connected to the photodetector 13. An illumination light source 15 is disposed on a side of a polarizing beam splitting prism 51 away from the second half-wave plate 32 , and the illuminating light source 15 is aligned with the outgoing light of the first polarizing beam splitting prism 51 .

Specifically, in this embodiment, the beam splitter 10 is a 10:90 beam splitter. The nano electric displacement stage 9 is a three-axis displacement stage that moves along the three-dimensional direction of space. There are many three-dimensional displacement stages in the prior art, all of which can be used in the present invention; initially, the center of the objective lens 7 and the graphene resonator are moved by the movement of the displacement stage. 8 Center alignment. The driving laser source uses a 633nm single-mode continuous light laser. 633nm single-mode fiber and fiber collimator couple the laser into the free space optical path. The laser power of the laser is 35mW. White LED is used as the lighting source for CCD imaging;

The half-wave plate in the optical path is fixed on the rotating mounting base. By rotating the wave plate, the laser intensity of the subsequent optical path of the wave plate can be easily adjusted by using the polarization characteristics of the laser.

Highly reflective mirrors can easily change the direction of the optical path to reduce the area occupied by the entire system.

The first polarizing beam splitting prism 51 uses its polarizing beam splitting characteristics to change the direction of the light path, and allows the white auxiliary illumination light source to be easily coupled into the light path.

The second polarization beam splitting prism 52 and the quarter-wave plate 6 form an optical isolator to ensure that the laser with polarization characteristics will not return along the incident light path, so as to facilitate imaging and photoelectric detection to extract the resonance mode of the graphene resonator. .

The laser is focused on the graphene resonator 8 through the objective lens, forming a spot of 1um size. Here we choose an objective lens with a magnification of 100 times, a working distance of 0.9mm, and a numerical aperture (NA) of 0.8.

The graphene resonator 8 is vertically fixed on the electric nanodisplacement stage, as shown in Figure 1. The graphene resonator 8 is composed of a graphene film suspended in a 5um silicon substrate chip circular hole.

The electric nanodisplacement stage is used to carry the sample for precise movement, with a step size of 100nm and a movable range of 5mm to ensure that the laser spot is accurately focused on the target position on the graphene mechanical oscillator.

After the light beam passes through the objective lens for the first time, interference occurs between the light beam reflected on the surface of the graphene resonator and the light beam reflected on the surface of the silicon substrate chip below the graphene. The focused laser generates radiation pressure on the graphene, as shown in Figure 2. After the interference beam passes through the objective lens again, the direction of the optical path is changed by the polarizing beam splitter prism, and is illuminated on the 90:10 optical beam splitter.

The 90:10 optical beam splitter divides the laser beam reflected by the optical resonator into two beams, one beam is used for imaging; the other beam is used for the photodetector, which converts the optical signal into an electrical signal. Here, a free-space light photodetector with a response rate of 0.3A/W and covering 633nm is selected.

The spectrum analyzer processes the electrical signals to obtain the vibration information of each mode of the graphene resonator, as shown in Figure 3. (a) and (b) are schematic diagrams of the light microscope and electron microscope of the test sample, and (c) shows the resonance of suspended graphene. Sub-measurement spectrogram. Figure 3(c) here will display different ranges of vibration information due to the selection of the spectrum range. This is only an example, because the appropriate spectrum range is selected according to specific experimental requirements. If similar vibration information cannot be obtained, you should check: 1. Whether the preparation of the graphene resonator is successful; 2. Whether the laser spot hits the correct position on the graphene resonator; 3. Whether the system noise drowns out the resonance mode information .

Adjust the half-wave plate and quarter-wave plate in the optical path so that the laser power focused on the suspended graphene changes smoothly from 300uW to 6.3mW. During the process of power change, divide it into appropriate power intervals and record repeatedly. The spectrum data and image information under each power condition are integrated into drawings from multiple sets of result data similar to Figure 3, and the changes in the resonance mode in the spectrum are observed. As shown in Figure 4, when the incident light power is increased, the resonance mode of the graphene resonator changes: an obvious resonance peak appears, the line width of the resonance peak gradually decreases, and the peak value gradually increases. In this process, the phonon dissipation gradually decreases to zero, and the phonons show an obvious threshold effect, that is, the phonons lasing.

The pump laser driving the laser source 1 is also used for laser interference measurement of the vibration mode of the resonator. The laser is focused and irradiated on the surface of the graphene resonator 8 through the objective lens in the form of free space light, between the graphene resonator 8 and the silicon substrate chip. An optical resonant cavity is formed. As the graphene resonator 8 vibrates, the laser light intensity reflected by the optical resonant cavity is synchronously modulated. It is converted into an electrical signal through a photodetector and then passed through a spectrum analyzer to extract the resonance of the graphene resonator. model.

This embodiment also provides a working method of the above-mentioned graphene resonator-based phonon maser, which is: driving the laser source 1 to emit laser, collimating and collecting it through the first fiber coupler 21, the second fiber coupler 22 After re-collimation, it enters the first half-wave plate 31 in parallel. After the emitted light from the first half-wave plate 31 is polarized by the half-wave plate, the light path direction is changed by the first high-reflective mirror 41, so that the laser is vertically incident on the first half-wave plate. Polarizing beam splitting prism 51, the first polarizing beam splitting prism 51 reflects the laser with the polarization direction, so that the emitted light of the first polarizing beam splitting prism 51 passes vertically through the center of the second half-wave plate 32 and is changed by the second half-wave plate 32 The polarized laser enters the second polarization beam splitting prism 52. At this time, the laser passes through the second polarization beam splitting prism 52 and changes the polarization state through the quarter-wave plate 6. The exit light of the quarter-wave plate 6 After being focused by the objective lens 7 into a 1 μm spot, the vertically fixed graphene resonator 8 on the nanoelectric displacement stage 9 is irradiated. The laser reflected by the graphene resonator 8 is collected by the objective lens 7 and the polarization state is changed again by the quarter-wave plate 6 After that, it passes through the second polarization beam splitting prism 52 for the second time. The second polarization beam splitting prism 52 reflects the polarized laser light, causing the laser light to enter the beam splitter 10. The beam splitter 10 splits the laser beam, and one beam enters The CCD camera is used for imaging, and the other beam changes the direction of the optical path through the second high-reflection mirror 42. After the laser is filtered by the filter 12, it is ensured that the laser with the same wavelength as the driving laser source 1 enters the photodetector 13, and the photodetector 13 will accept The optical signal is converted into an electrical signal, and the electrical signal is extracted by the spectrum analyzer 14 to extract the resonance mode of the graphene resonator 8. All half-wave plates and quarter-wave plates are also used to adjust the power of each part of the laser in the optical path; The nanoelectric displacement stage 9 is used to adjust the position of the graphene resonator so that the laser spot can be accurately focused on the target position of the graphene resonator.

Further, a driven continuous light laser source with a wavelength of 633 nm is focused on the optical resonant cavity, and a 90:10 beam splitter is used to divide the laser beam reflected by the graphene resonator 8 into two beams, one of which is used for imaging. , the other beam is converted into an electrical signal by a photodetector. After spectrum analysis, the resonance mode of the graphene mechanical oscillator is extracted by a spectrum analyzer to obtain the frequency domain information of the resonator vibration. As the laser power increases, phonons appear. Obvious threshold effect, phonons maser and become a phonon maser; to ensure normal operation of the device, after observing the mechanical vibration mode of graphene resonator 8, rotate the half-wave plate and quarter-wave plate in the optical path Wave plate is used to change the laser power focused on the graphene film; without damaging the graphene film, the optical power of the incident laser is increased, and the realization of the phonon maser is judged based on the amplitude change of the vibration mode in the spectrum information. Condition.

Other resonator embodiments of different two-dimensional materials can achieve phonon lasing.

Graphene resonators have the characteristics of simple material preparation, small mass, stable physical properties, and high quality factor. The graphene material involved is a layered graphene sample obtained by mechanically peeling off bulk graphite. Then, using a two-dimensional material transfer platform, the few-layer graphene sample obtained by mechanical exfoliation is transferred to a silicon substrate chip with a microstructure and suspended to obtain the required graphene resonator. In addition, resonators prepared by transferring other two-dimensional materials, such as MoS ₂ and WSe ₂ , can also be coupled with lasers and microcircuits to prepare opto-mechanical and micro-electromechanical systems, which has broad research and application prospects.

The above embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present invention shall still be covered by the claims of the present invention.

Claims (9)

1. A graphene resonator, characterized in that: it includes a substrate chip. The substrate chip is prepared by etching a silicon wafer. The substrate chip includes a silicon layer at the bottom. There are two ends on the left and right sides of the upper surface of the silicon layer. Silicon oxide layer, with a groove in the middle of the silicon dioxide layer, and a graphene film directly above the groove. The graphene film is obtained by mechanically peeling off block graphite. Both ends of the graphene film cover part of the silicon dioxide layer, and the substrate chip An optical resonant cavity is formed between the graphene film and the graphene film; When the laser is incident on the optical resonator, the optical radiation pressure generated by the blue detuned laser on the graphene will increase as the laser power increases, causing the phonon dissipation in the graphene resonator to decrease until it reaches zero; After that, the phonons in the graphene resonator will show a process similar to the photon stimulated radiation in the laser. The number of phonons will show an obvious threshold effect as the pump laser power increases, that is, the phenomenon of phonon lasing will occur, and the phonon lasing phenomenon will be obtained. launcher. 2. A phonon maser based on graphene resonators, comprising the graphene resonator (8) according to claim 1, characterized in that: along the optical path direction, it sequentially includes a driving laser source (1) and a driving The first optical fiber coupler (21) in which the laser source (1) is centrally aligned, the second optical fiber coupler (22) connected to the first optical fiber coupler (21) through optical fibers, and the center of the second optical fiber coupler (22) The aligned first half-wave plate (31), the first high-reflection mirror (41) that is aligned with the center of the first half-wave plate (31) and forms an angle of (45) degrees with the first half-wave plate (31) , the first polarizing beam splitting prism (51) aligned with the outgoing light of the first high reflective mirror (41), and the second half-wave plate (32) aligned with the outgoing light of the first polarizing beam splitting prism (51) , a second polarizing beam splitting prism (52) aligned with the outgoing light of the second half-wave plate (32), and a quarter-wave plate (6) aligned with the outgoing light of the second polarizing beam splitting prism (52) ), the objective lens (7) aligned with the center of the quarter-wave plate (6), the graphene resonator (8) aligned with the center of the objective lens (7), the graphene resonator (8) fixed at the nanometer electrodynamic displacement On the stage (9), a beam splitter (10) is aligned with the outgoing light of the second polarizing beam splitting prism (52). A part of the outgoing light of the beam splitter (10) is aligned with the center of the CCD camera (11), and the other part is aligned with the center of the CCD camera (11). The emergent light is aligned with the center of the second high-reflection mirror (42), the filter (12) is aligned with the emergent light of the second high-reflection mirror (42), and the photodetector (13) is aligned with the center of the filter (12) ), and a spectrum analyzer (14) electrically connected to the photodetector (13). The first polarizing beam splitter prism (51) is provided with an illuminating light source (15) on the side away from the second half-wave plate (32). The light source (15) is aligned with the outgoing light of the first polarizing beam splitting prism (51). 3. The phonon maser based on graphene resonators according to claim 2, characterized in that: the pump laser driving the laser source (1) is simultaneously used for laser interference measurement of the resonator vibration mode, and the laser is in free space. The form of light is focused and irradiated on the surface of the graphene resonator (8) through the objective lens. An optical resonance cavity is formed between the graphene resonator (8) and the silicon substrate chip. As the graphene resonator (8) vibrates, the optical resonance The laser light intensity reflected by the cavity is synchronously modulated, converted into an electrical signal through a photodetector, and then passed through a spectrum analyzer to extract the resonance mode of the graphene resonator. 4. The phonon maser based on graphene resonators according to claim 2, characterized in that: the beam splitter (10) is a 10:90 beam splitter. 5. The phonon maser based on graphene resonators according to claim 2, characterized in that: the nanoelectric displacement stage (9) is a three-axis displacement stage, moving along the three-dimensional direction of space, initially passing through the displacement stage. Move to align the center of the objective lens (7) with the center of the graphene resonator (8). 6. The phonon maser based on graphene resonators according to claim 2, characterized in that: the driving laser source adopts a 633nm single-mode continuous light laser. 7. The phonon maser based on graphene resonators according to claim 2, characterized in that: white LED is used as the illumination source for CCD imaging. 8. The working method of the phonon maser based on graphene resonators according to any one of claims 2 to 7, characterized in that: the laser source (1) is driven to emit laser light, which is collimated and collected by the first optical fiber coupler (21) After the second optical fiber coupler (22) is re-collimated, it enters the first half-wave plate (31) in parallel. After the outgoing light of the first half-wave plate (31) is polarized by the half-wave plate, it passes through the first high-reflection plate. The mirror (41) changes the direction of the optical path so that the laser light is vertically incident on the first polarization beam splitting prism (51). The first polarization beam splitting prism (51) reflects the laser light with a vertical polarization direction, causing the first polarization beam splitting prism (51) to The emitted light of 51) vertically passes through the center of the second half-wave plate (32), and the polarization state of the laser is changed by the second half-wave plate (32), and enters the second polarizing beam splitting prism (52). At this time, the laser passes through the second half-wave plate (32). The polarization beam splitting prism (52) changes the polarization state through the quarter-wave plate (6). After being focused by the objective lens (7), the emitted light from the quarter-wave plate (6) illuminates the nanoelectric displacement stage (9 ) is fixed vertically on the graphene resonator (8). The laser light reflected by the graphene resonator (8) is collected by the objective lens (7), changes the polarization state again by the quarter-wave plate (6), and passes through the The second polarizing beam splitting prism (52) reflects the polarized laser light so that the laser light enters the beam splitter (10). The beam splitter (10) splits the laser beam. One beam enters the CCD camera for imaging, and the other beam changes the direction of the optical path through the second high-reflection mirror (42). After the laser is filtered by the filter (12), it is ensured that the laser with the same wavelength as the driving laser source (1) enters the photodetector. (13), the photodetector (13) converts the received optical signal into an electrical signal, and the electrical signal is extracted by the spectrum analyzer (14) to extract the resonance mode of the graphene resonator (8), all half-wave plates and quarter-wave plates One of the wave plates is also used to adjust the power of the laser in each part of the optical path; the nanoelectric displacement stage (9) is used to adjust the position of the graphene resonator so that the laser spot can accurately focus on the target position of the graphene resonator. 9. The working method of the phonon maser based on graphene resonators according to claim 8, characterized in that: focusing the driving continuous light laser source with a wavelength of 633nm onto the optical resonant cavity, and then using 90:10 The beam splitter divides the laser beam reflected by the graphene resonator (8) into two beams, one of which is used for imaging, and the other beam is converted into an electrical signal by the photodetector, which is extracted by the spectrum analyzer after passing spectrum analysis. The resonant mode of the graphene mechanical oscillator obtains the frequency domain information of the resonator vibration; as the laser power increases, the phonons have an obvious threshold effect, and the phonons maser and become a phonon maser; ensuring the normal operation of the device , after being able to observe the mechanical vibration mode of the graphene resonator (8), the half-wave in the rotating optical path and quarter-wave plate to change the laser power focused on the graphene film; without damaging the graphene film, Increase the optical power of the incident laser, and judge the implementation of the phonon maser based on the amplitude changes of the vibration modes in the spectrum information.