CN106646738A - Photon and microwave quantum state converter - Google Patents

Photon and microwave quantum state converter Download PDF

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CN106646738A
CN106646738A CN201710030124.8A CN201710030124A CN106646738A CN 106646738 A CN106646738 A CN 106646738A CN 201710030124 A CN201710030124 A CN 201710030124A CN 106646738 A CN106646738 A CN 106646738A
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microwave
substrate layer
microlens
photon
quantum state
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CN106646738B (en
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廖进昆
张鹏举
崔佳
蔡淇智
张晓霞
刘永
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University of Electronic Science and Technology of China
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/124Geodesic lenses or integrated gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/136Integrated optical circuits characterised by the manufacturing method by etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/14Mode converters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12102Lens

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The invention belongs to the technical field of quantum information and discloses a photon and microwave quantum state converter which can help solve a problem that a conventional converter is complex in structure, difficult in manufacturing and assembling operation and low in stability. The photon and microwave quantum state converter comprises a silicon substrate layer and a microwave coplanar waveguide; an optical waveguide, a support rack, a lanthanum aluminate substrate layer and a microlens are arranged on the silicon substrate layer; the microlens is used for converting light output from the optical waveguide to parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer, a homogeneous rod is mounted on the support rack, and one side of the homogeneous rod is provided with a reflecting face used for reflecting the parallel light which is converted via the microlens; the microlens is mounted on a part, positioned between the optical waveguide and the reflecting face, of the silicon substrate layer; the microlens and the reflecting face of the homogeneous rod form a resonant cavity; the other side, opposite to the reflecting face, of the homogeneous rod is provided with a metal face, and the metal face and a central conductor of the microwave coplanar waveguide form an adjustable capacitor.

Description

一种光子与微波量子态转换器A Photon and Microwave Quantum State Converter

技术领域technical field

本发明属于量子信息技术领域,具体涉及一种光子与微波量子态转换器。The invention belongs to the technical field of quantum information, in particular to a photon and microwave quantum state converter.

背景技术Background technique

近年来随着量子信息技术的飞速发展,各种基于量子效应的应用不断涌现。量子雷达被视作下一代雷达的发展方向,量子雷达采用光量子进行远距离探测,利用光子的纠缠等特性提高其探测、识别和分辨能力。但是由于光子在大气中传播受到大气吸收、折射等不利因素的影响,大大缩短了光的传播距离,而传统雷达利用微波作为探测手段则受到的影响较小,所以为提高量子雷达的作用距离同样希望采用微波作为探测手段。In recent years, with the rapid development of quantum information technology, various applications based on quantum effects are emerging. Quantum radar is regarded as the development direction of next-generation radar. Quantum radar uses photons for long-distance detection, and uses the characteristics of photon entanglement to improve its detection, identification and resolution capabilities. However, due to the influence of unfavorable factors such as atmospheric absorption and refraction on the propagation of photons in the atmosphere, the propagation distance of light is greatly shortened, while traditional radars using microwaves as detection methods are less affected. It is desirable to use microwaves as a detection means.

麦克斯韦提出光的本质是电磁波,实质上光不仅具有波动性还具有粒子性,即光有波粒二象性。单个光子具有的能量为E=hν,动量为p=hν/c(其中c是光子的速度,ν是光子频率,h代表普朗克常数)。每个光子碰撞到物体表面,产生冲量,即物体对光子产生弹力的作用。根据牛顿第三定律,物体也受到压力的作用。Maxwell proposed that the essence of light is electromagnetic waves. In essence, light has not only wave nature but also particle nature, that is, light has wave-particle duality. A single photon has energy E=hν and momentum p=hν/c (where c is the speed of the photon, ν is the photon frequency, and h represents Planck's constant). Each photon collides with the surface of the object, generating an impulse, that is, the object produces an elastic force on the photon. Objects are also subject to pressure according to Newton's third law.

当光照射在物体表面时,假定每秒有N个光子撞到物体表面的单位面积上。如果光子垂直撞到物体表面且以大小不变的速度反弹,也就是光子的动量大小不变,方向改变,每个光子的动量变化为P=2hν/c,此时物体表面受到的辐射压为2Np(即2Nhν/c)。根据光压量子理论,可以计算光对物体表面所施加的压力大小。When light is irradiated on the surface of an object, it is assumed that N photons hit the unit area of the surface of the object per second. If a photon hits the surface of an object vertically and bounces back at a constant speed, that is, the momentum of the photon remains unchanged but its direction changes, the momentum of each photon changes as P=2hν/c, and the radiation pressure on the surface of the object at this time is 2Np (ie 2Nhν/c). According to the light pressure quantum theory, the pressure exerted by light on the surface of an object can be calculated.

光作用在宏观或介观物体表面的辐射压力非常微弱,人们利用由共振腔(或者微腔)增强的光场从而来提高光压效应;也就是说,腔中引入光力效应。光通过光压效应使光腔机械振动,光腔的机械振动可以改变LC震荡电路的电容,进而调制微波震荡电路的微波频率。光和微波之间的转换通过机械谐振腔作为中间介质来实现。The radiation pressure of light acting on the surface of macroscopic or mesoscopic objects is very weak, and people use the light field enhanced by the resonant cavity (or microcavity) to increase the optical pressure effect; that is, the optical force effect is introduced into the cavity. The light causes the optical cavity to vibrate mechanically through the photopressure effect, and the mechanical vibration of the optical cavity can change the capacitance of the LC oscillating circuit, and then modulate the microwave frequency of the microwave oscillating circuit. The conversion between light and microwaves is achieved through a mechanical resonant cavity as an intermediate medium.

目前比较常用的用于光和微波之间的转换器有如下两种:At present, there are two commonly used converters between light and microwave:

第一种,转换器包括2个电磁谐振器,一个光频率,一个微波频率,共享一个机械谐振器。机械谐振器有一薄膜组成,能自由震动。光频谐振器包括一个法布里-波罗腔,膜振动并调制光腔谐振频率。膜部分导电并组成微波谐振器的电感电路中电容的一部分。因为薄膜自由振动,所以可以调制微波电路的电容,进而调制谐振频率。In the first, the converter consists of 2 electromagnetic resonators, one at an optical frequency and one at a microwave frequency, sharing a mechanical resonator. A mechanical resonator consists of a thin film that vibrates freely. The optical frequency resonator consists of a Fabry-Perot cavity with a membrane that vibrates and modulates the resonant frequency of the optical cavity. The membrane part conducts electricity and forms part of the capacitance in the inductive circuit of the microwave resonator. Because the membrane vibrates freely, it is possible to modulate the capacitance of the microwave circuit, and thus the resonant frequency.

第二种,由平行放置的经过仔细抛光的两个铌球镜面构成一法布里-帕罗腔,左边的腔镜固定不动,右端的腔镜可自由移动。当一束经典激光驱动腔场时,腔场受激发,光子在腔内做往返运动,撞击在右边可移动镜子上,对镜子表面产生辐射压力的作用使得可移动镜子偏离平衡位置。腔镜位置的改变使由右边的镜子组成的电容改变,进而改变整个微波电路的谐振频率。The second type consists of two carefully polished niobium ball mirrors placed in parallel to form a Fabry-Perot cavity. The cavity mirror on the left is fixed and the cavity mirror on the right can move freely. When a beam of classical laser drives the cavity field, the cavity field is excited, and the photons move back and forth in the cavity and hit the movable mirror on the right, which produces radiation pressure on the surface of the mirror and makes the movable mirror deviate from the equilibrium position. Changes in the position of the cavity mirror change the capacitance formed by the right mirror, thereby changing the resonant frequency of the entire microwave circuit.

然而这种转换器均利用了法布里-珀罗腔,法布里-珀罗腔有许多缺点:结构复杂、造价昂贵、体积大、难于装配和稳定性低,而且法布里-珀罗腔难以实现小型化,这些原因导致其难以实现商业应用,而且光谐振腔和微波谐振腔难以集成化,因此研制可以集成化、小型化的转换器就是一种必然趋势。However, such converters all utilize Fabry-Perot cavity, which has many disadvantages: complex structure, high cost, large volume, difficult assembly and low stability, and Fabry-Perot cavity It is difficult to miniaturize the cavity. These reasons make it difficult to realize commercial applications, and it is difficult to integrate optical resonators and microwave resonators. Therefore, it is an inevitable trend to develop converters that can be integrated and miniaturized.

发明内容Contents of the invention

本发明为了解决现有转换器存在的结构复杂、制备困难、难于装配和稳定性低的问题,而提供一种光子与微波量子态转换器,能够实现波导和谐振腔的集成化、小型化,具有制造成本低的特点,能够实现规模化。In order to solve the problems of complex structure, difficult preparation, difficult assembly and low stability of existing converters, the present invention provides a photon and microwave quantum state converter, which can realize the integration and miniaturization of waveguides and resonant cavities, It has the characteristics of low manufacturing cost and can realize large-scale.

为解决技术问题,本发明所采用的技术方案是:For solving technical problems, the technical solution adopted in the present invention is:

一种光子与微波量子态转换器,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容。A photon and microwave quantum state converter, comprising a silicon substrate layer and a microwave coplanar waveguide, the silicon substrate layer is provided with an optical waveguide, a bracket, a lanthanum aluminate substrate layer and used for converting the light output from the optical waveguide A microlens for parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided for converting the parallel light converted by the microlens A reflective surface for reflection, the microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface, the microlens and the reflective surface of the quality rod form a resonant cavity; the other side of the quality rod facing away from the reflective surface is set There is a metal face that forms an adjustable capacitance with the center conductor of the microwave coplanar waveguide.

所述微透镜的尺寸在400-800μm之间。The size of the microlens is between 400-800 μm.

所述微透镜采用单晶硅通过光刻与反应离子束蚀刻制作而成。The microlens is made of single crystal silicon through photolithography and reactive ion beam etching.

所述质杆的质量在10ng-100ng之间。The mass of the quality rod is between 10ng-100ng.

所述微波共面波导还包括设置在中心导体两侧的共面波导接地层。The microwave coplanar waveguide also includes coplanar waveguide grounding layers arranged on both sides of the central conductor.

所述微波共面波导采用钇钡铜氧(YBCO)制备在铝酸镧衬底层上。The microwave coplanar waveguide is prepared on the lanthanum aluminate substrate layer by using yttrium barium copper oxide (YBCO).

所述光波导为SOI脊形光波导。The optical waveguide is an SOI ridge optical waveguide.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

本发明提供的光子与微波量子态转换器,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容。本发明的工作原理是:利用微透镜将光波导输出的光会聚,使微透镜和质杆组成谐振腔,利用光在谐振腔中往返反射产生的光压效应,使质杆振动,进而改变质杆与微波共面波导组成的电容,从而调制微波频率,实现光子和微波量子态之间的转换。本发明提出的一种新的谐振腔,微透镜和质杆的尺寸和质量分别在μm、ng量级,从而实现了谐振腔的小型化;本发明微透镜可以通过对单晶硅进行光刻与反应离子束刻蚀技术制成、光波导在硅衬底层上制成、微波共面波导利用超导钇钡铜氧(YBCO)在铝酸镧衬底层上制备、质杆通过支架安放在硅衬底层上,使得本发明具有集成程度高的特点;光波导、微波共面波导的制备技术比较成熟,微透镜、质杆制造成本也比较低;因此相比于现有技术,本发明具有结构简单、小型化、集成程度高、制造成本低的特点,便于实现规模化制作。The photon and microwave quantum state converter provided by the present invention includes a silicon substrate layer and a microwave coplanar waveguide, and the silicon substrate layer is provided with an optical waveguide, a bracket, a lanthanum aluminate substrate layer and a Light is converted into a microlens of parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided with a A reflective surface for reflecting parallel light, the microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface, and the microlens and the reflective surface of the quality rod form a resonant cavity; the other part of the quality rod facing away from the reflective surface A metal surface is arranged on the side, and the metal surface forms an adjustable capacitance with the center conductor of the microwave coplanar waveguide. The working principle of the present invention is: use the microlens to converge the light output by the optical waveguide, make the microlens and the mass rod form a resonant cavity, use the light pressure effect generated by the back and forth reflection of light in the resonant cavity, make the mass rod vibrate, and then change the mass The capacitance composed of the rod and the microwave coplanar waveguide can modulate the microwave frequency and realize the conversion between photon and microwave quantum states. In a new resonant cavity proposed by the present invention, the size and quality of the microlens and the quality rod are in the order of μm and ng respectively, thereby realizing the miniaturization of the resonant cavity; It is made with reactive ion beam etching technology, the optical waveguide is made on the silicon substrate layer, the microwave coplanar waveguide is made on the lanthanum aluminate substrate layer using superconducting yttrium barium copper oxide (YBCO), and the mass rod is placed on the silicon substrate layer through the bracket. On the substrate layer, the present invention has the characteristics of high degree of integration; the preparation technology of optical waveguide and microwave coplanar waveguide is relatively mature, and the manufacturing cost of microlens and quality rod is relatively low; therefore, compared with the prior art, the present invention has structural The characteristics of simplicity, miniaturization, high degree of integration and low manufacturing cost facilitate the realization of large-scale production.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明的微透镜、质杆和微波共面波导的配合示意图;Fig. 2 is the cooperation schematic diagram of microlens of the present invention, mass rod and microwave coplanar waveguide;

图中标记:1、硅衬底层,2、光波导,3、微透镜,4、反射面,5、金属面,6、质杆,7、支架,8、中心导体,9、共面波导接地层,10、微波共面波导,11、铝酸镧衬底层。Marks in the figure: 1. Silicon substrate layer, 2. Optical waveguide, 3. Microlens, 4. Reflective surface, 5. Metal surface, 6. Mass rod, 7. Bracket, 8. Center conductor, 9. Coplanar waveguide grounding Layer, 10, microwave coplanar waveguide, 11, lanthanum aluminate substrate layer.

具体实施方式detailed description

下面结合实施例对本发明作进一步的描述,所描述的实施例仅仅是本发明一部分实施例,并不是全部的实施例。基于本发明中的实施例,本领域的普通技术人员在没有做出创造性劳动前提下所获得的其他所用实施例,都属于本发明的保护范围。The present invention will be further described below in conjunction with the embodiments, and the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other used embodiments obtained by persons of ordinary skill in the art without creative efforts all belong to the protection scope of the present invention.

结合附图,本发明提供的光子与微波量子态转换器,包括硅衬底层1和微波共面波导10,所述硅衬底层1上设置有光波导2、支架7、铝酸镧衬底层11和用于将从光波导2中导出的光转换成平行光的微透镜3,所述微波共面波导10设置在铝酸镧衬底层11上,所述支架7安装有质杆6,所述质杆6的一侧设有用于将经微透镜3转换后的平行光进行反射的反射面4,所述微透镜3安装在光波导2与反射面4之间的硅衬底层1上,微透镜3与质杆6的反射面4形成谐振腔,与反射面4背对的质杆6的另一侧设置有金属面5,所述金属面5与微波共面波导10的中心导体8形成可调电容。In conjunction with the accompanying drawings, the photon and microwave quantum state converter provided by the present invention includes a silicon substrate layer 1 and a microwave coplanar waveguide 10, and the silicon substrate layer 1 is provided with an optical waveguide 2, a bracket 7, and a lanthanum aluminate substrate layer 11 and a microlens 3 for converting the light derived from the optical waveguide 2 into parallel light, the microwave coplanar waveguide 10 is arranged on the lanthanum aluminate substrate layer 11, the bracket 7 is equipped with a quality rod 6, and the One side of the mass rod 6 is provided with a reflective surface 4 for reflecting the parallel light converted by the microlens 3, and the microlens 3 is installed on the silicon substrate layer 1 between the optical waveguide 2 and the reflective surface 4. The lens 3 and the reflective surface 4 of the rod 6 form a resonant cavity, and the other side of the rod 6 facing away from the reflective surface 4 is provided with a metal surface 5, and the metal surface 5 forms a center conductor 8 with the microwave coplanar waveguide 10. Adjustable capacitance.

本发明的工作原理是:利用微透镜将光波导输出的光会聚,使微透镜和质杆组成谐振腔,利用光在谐振腔中往返反射产生的光压效应,使质杆振动,改变质杆与微波共面波导组成的电容,电容的改变是LC震荡电路的频率发生变化,从而调制微波频率,最终整个系统通过谐振腔这个中介实现了光和微波之间的转换。The working principle of the present invention is: use the microlens to converge the light output by the optical waveguide, make the microlens and the mass rod form a resonant cavity, use the light pressure effect generated by the back and forth reflection of light in the resonant cavity, make the mass rod vibrate, change the mass rod The capacitance composed of the coplanar waveguide with the microwave, the change of the capacitance is the change of the frequency of the LC oscillating circuit, thereby modulating the frequency of the microwave, and finally the whole system realizes the conversion between light and microwave through the intermediary of the resonant cavity.

本发明的微透镜3采用单晶硅通过硅光刻或反应离子束蚀刻等制作而成。微透镜3的尺度在μm量级,在400-800μm之间,作为本发明一种优选的方式,微透镜3的通光口径为500μm。The microlens 3 of the present invention is made of single crystal silicon through silicon photolithography or reactive ion beam etching. The size of the microlens 3 is on the order of μm, between 400-800 μm. As a preferred mode of the present invention, the aperture of the microlens 3 is 500 μm.

本发明的质杆6的质量为ng量级,质量在10ng-100ng之间The quality of the mass rod 6 of the present invention is in the order of ng, and the quality is between 10ng-100ng

本发明的微波共面波导10还包括设置在中心导体8两侧的共面波导接地层9。The microwave coplanar waveguide 10 of the present invention further includes coplanar waveguide grounding layers 9 arranged on both sides of the central conductor 8 .

作为本发明一种优选的方式,所述光波导2为SOI脊形光波导。As a preferred mode of the present invention, the optical waveguide 2 is an SOI ridge optical waveguide.

本发明提出的一种新的谐振腔,微透镜和质杆的尺寸和质量分别在μm、ng量级,从而实现了谐振腔的小型化;本发明微透镜可以通过对单晶硅进行光刻或反应离子束刻蚀技术制成、光波导在硅衬底层上制成、微波共面波导利用钇钡铜氧(YBCO)在铝酸镧衬底层上制备、轻质杆通过支架安放在硅衬底层上,使得本发明具有集成程度高的特点;光波导、微波共面波导的制备技术比较成熟,微透镜、质杆制造成本也比较低;因此相比于现有技术,本发明具有结构简单、小型化、集成程度高、制造成本低的特点,便于实现规模化制作。In a new resonant cavity proposed by the present invention, the size and quality of the microlens and the quality rod are in the order of μm and ng respectively, thereby realizing the miniaturization of the resonant cavity; Or reactive ion beam etching technology, the optical waveguide is made on the silicon substrate layer, the microwave coplanar waveguide is prepared on the lanthanum aluminate substrate layer using yttrium barium copper oxide (YBCO), and the light rod is placed on the silicon substrate through the bracket On the bottom layer, the present invention has the characteristics of high integration; the preparation technology of optical waveguide and microwave coplanar waveguide is relatively mature, and the manufacturing cost of microlens and quality rod is relatively low; therefore, compared with the prior art, the present invention has simple structure , miniaturization, high degree of integration, and low manufacturing cost, it is easy to realize large-scale production.

实施例一Embodiment one

本实施例的光子与微波量子态转换器,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容。The photon-to-microwave quantum state converter of this embodiment includes a silicon substrate layer and a microwave coplanar waveguide, on which an optical waveguide, a bracket, a lanthanum aluminate substrate layer, and a Light is converted into a microlens of parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided with a A reflective surface for reflecting parallel light, the microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface, and the microlens and the reflective surface of the quality rod form a resonant cavity; the other part of the quality rod facing away from the reflective surface A metal surface is arranged on the side, and the metal surface forms an adjustable capacitance with the center conductor of the microwave coplanar waveguide.

实施例二Embodiment two

本实施例的光子与微波量子态转换器,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容;所述微透镜的尺寸在400-800μm之间。The photon-to-microwave quantum state converter of this embodiment includes a silicon substrate layer and a microwave coplanar waveguide, on which an optical waveguide, a bracket, a lanthanum aluminate substrate layer, and a Light is converted into a microlens of parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided with a A reflective surface for reflecting parallel light, the microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface, and the microlens and the reflective surface of the quality rod form a resonant cavity; the other part of the quality rod facing away from the reflective surface A metal surface is arranged on the side, and the metal surface forms an adjustable capacitance with the central conductor of the microwave coplanar waveguide; the size of the microlens is between 400-800 μm.

实施例三Embodiment three

本实施例的光子与微波量子态转换器,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容;所述微透镜的尺寸在400-800μm之间;所述微透镜采用单晶硅通过光刻蚀或者反应离子束蚀刻制作而成。The photon-to-microwave quantum state converter of this embodiment includes a silicon substrate layer and a microwave coplanar waveguide, on which an optical waveguide, a bracket, a lanthanum aluminate substrate layer, and a Light is converted into a microlens of parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided with a A reflective surface for reflecting parallel light, the microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface, and the microlens and the reflective surface of the quality rod form a resonant cavity; the other part of the quality rod facing away from the reflective surface The side is provided with a metal surface, and the metal surface forms an adjustable capacitor with the central conductor of the microwave coplanar waveguide; the size of the microlens is between 400-800 μm; the microlens is made of single crystal silicon through photoetching or reaction Manufactured by ion beam etching.

实施例四Embodiment Four

在上述任一实施例的基础之上,所述质杆的质量在10ng-100ng之间。On the basis of any of the above-mentioned embodiments, the mass of the mass rod is between 10ng-100ng.

实施例五Embodiment five

在上述任一实施例的基础之上,所微波共面波导还包括设置在中心导体两侧的共面波导接地层。On the basis of any of the above embodiments, the microwave coplanar waveguide further includes coplanar waveguide grounding layers arranged on both sides of the central conductor.

实施例六Embodiment six

在上述任一实施例的基础之上,所述微波共面波导采用钇钡铜氧YBCO制备在铝酸镧衬底层上。On the basis of any of the above embodiments, the microwave coplanar waveguide is prepared on the lanthanum aluminate substrate layer by using yttrium barium copper oxide YBCO.

实施例七Embodiment seven

在上述任一实施例的基础之上,所述光波导为SOI脊形光波导。On the basis of any of the above embodiments, the optical waveguide is an SOI ridge optical waveguide.

Claims (7)

1.一种光子与微波量子态转换器,其特征在于,包括硅衬底层和微波共面波导,所述硅衬底层上设置有光波导、支架、铝酸镧衬底层和用于将从光波导中输出的光转换成平行光的微透镜,所述微波共面波导设置在铝酸镧衬底层上;所述支架上安装有质杆,所述质杆的一侧设有用于将经微透镜转换后的平行光进行反射的反射面,所述微透镜安装在光波导与反射面之间的硅衬底层上,微透镜与质杆的反射面形成谐振腔;与反射面背对的质杆的另一侧设置有金属面,所述金属面与微波共面波导的中心导体形成可调电容。1. A kind of photon and microwave quantum state converter, it is characterized in that, comprise silicon substrate layer and microwave coplanar waveguide, described silicon substrate layer is provided with optical waveguide, support, lanthanum aluminate substrate layer and is used for will from light The light output in the waveguide is converted into a microlens of parallel light, the microwave coplanar waveguide is arranged on the lanthanum aluminate substrate layer; a quality rod is installed on the support, and one side of the quality rod is provided for The reflective surface on which the parallel light converted by the lens is reflected. The microlens is installed on the silicon substrate layer between the optical waveguide and the reflective surface. The microlens and the reflective surface of the mass rod form a resonant cavity; the mass opposite to the reflective surface The other side of the rod is provided with a metal surface, which forms an adjustable capacitance with the central conductor of the microwave coplanar waveguide. 2.根据权利要求1所述的光子与微波量子态转换器,其特征在于,所述微透镜的尺寸在400-800μm之间。2. The photon-to-microwave quantum state converter according to claim 1, characterized in that the size of the microlens is between 400-800 μm. 3.根据权利要求2所述的光子与微波量子态转换器,其特征在于,所述微透镜采用单晶硅通过光刻与反应离子束蚀刻制作而成。3 . The photon and microwave quantum state converter according to claim 2 , wherein the microlens is made of single crystal silicon through photolithography and reactive ion beam etching. 4 . 4.根据权利要求1所述的光子与微波量子态转换器,其特征在于,所述质杆的质量在10ng-100ng之间。4. The photon-to-microwave quantum state converter according to claim 1, wherein the mass of the mass rod is between 10ng-100ng. 5.根据权利要求1所述的光子与微波量子态转换器,其特征在于,所述微波共面波导还包括设置在中心导体两侧的共面波导接地层。5 . The photon-to-microwave quantum state converter according to claim 1 , wherein the microwave coplanar waveguide further comprises coplanar waveguide grounding layers disposed on both sides of the central conductor. 6.根据权利要求1所述的光子与微波量子态转换器,其特征在于,所述微波共面波导采用钇钡铜氧制备在铝酸镧衬底层上。6 . The photon and microwave quantum state converter according to claim 1 , wherein the microwave coplanar waveguide is prepared on a lanthanum aluminate substrate layer using yttrium barium copper oxide. 7.根据权利要求1-6任一所述的光子与微波量子态转换器,其特征在于,所述光波导为SOI脊形光波导。7. The photon-to-microwave quantum state converter according to any one of claims 1-6, wherein the optical waveguide is an SOI ridge optical waveguide.
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